Transfer equipment, automatic graphite boat cleaning system and automatic graphite boat cleaning method

Abstract

The invention provides transfer equipment, an automatic graphite boat cleaning system and an automatic graphite boat cleaning method. The transfer equipment is used for transferring a graphite boat, and comprises a frame, a driving device, a driving device and a driving device, and the frame is provided with a feeding position and a discharging position; the mechanical gripper is arranged on the frame; the carrying mechanism comprises a carrying assembly connected to the frame in a sliding mode and a driving assembly connected to the carrying assembly in a transmission mode, the mechanical gripper is used for grabbing the graphite boat to the carrying assembly from the feeding position, and the driving assembly is used for driving the carrying assembly to move; therefore, the carrying assembly transfers the graphite boat to the discharging position. According to the transfer equipment, the graphite boat can be grabbed to the carrying assembly of the carrying mechanism from the feeding position through the mechanical gripper, then the carrying assembly is driven by the driving assembly to transport the graphite boat to the discharging position, and conversion of the graphite boat carrier among different carriers can be achieved without manual carrying.

Description

Technical Field

[0001] The present invention relates to the technical field of graphite boat cleaning and drying, and particularly to a transfer device, an automatic graphite boat cleaning system, and an automatic graphite boat cleaning method. Background Art

[0002] In the current production process of photovoltaic cells, the PECVD (Plasma Enhanced Chemical Vapor Deposition) technology has been widely used. Due to its stable chemical properties and high temperature resistance, graphite profiles are commonly used in the production of boats for carrying solar cells.

[0003] In the traditional production process of photovoltaic cells, after a certain service life, a graphite boat needs to undergo a series of treatments and cleaning. The main process includes transporting the graphite boat from the process equipment for manufacturing photovoltaic cells to the cleaning equipment for cleaning operations, then transporting the cleaned graphite boat to the drying equipment for drying operations after cleaning, transporting the dried graphite boat to the boat baking equipment for baking operations after drying, and finally transporting the graphite boat back to the process equipment after baking. The traditional cleaning process requires a large amount of manpower to transfer the graphite boat, significantly increasing the labor cost.

[0004] Currently, in the prior art, a graphite boat cleaning and drying system is provided. This graphite boat cleaning and drying system integrates the cleaning equipment, drying equipment, and boat baking equipment in the graphite boat cleaning process into one device, which can simultaneously perform cleaning, drying, and baking operations on the graphite boat, eliminating the need for manual transfer of the graphite boat and significantly saving labor costs. However, since all the equipment is integrated together, the device is too large in size and requires a large amount of space. In addition, when technicians perform streamlining and automation transformation on this device, some of the original equipment cannot be used, increasing the transformation cost and unable to meet the usage requirements of some old factories.

[0005] In existing automated assembly line factories, automatic guided vehicles (AGVs) are usually used to transfer materials. This transport vehicle can transfer materials between various equipment according to the set route, realizing automated production and significantly saving labor costs. However, for graphite boats, the graphite boats cannot be directly placed on the transport vehicle and need to rely on carriers to reduce the risk of contamination and collision during transfer. In addition, usually, the carriers of various equipment used in the graphite boat cleaning system are not universal. After cleaning, the cleaned graphite boat needs to be manually transferred from the cleaning carrier to the drying carrier, still consuming labor costs and not achieving true fully automated unmanned production. Summary of the Invention

[0006] Based on this, in view of the problem that a large amount of labor cost is required in the process of cleaning and drying graphite boats, it is necessary to provide a transfer device.

[0007] A transfer device for transferring graphite boats, comprising:

[0008] A frame having a loading position and an unloading position;

[0009] A mechanical gripper disposed on the frame; and

[0010] A handling mechanism, the handling mechanism includes a handling component slidably connected to the frame and a driving component drivably connected to the handling component. The mechanical gripper is used to grab the graphite boat from the loading position to the handling component, and the driving component is used to drive the handling component to move so that the handling component transfers the graphite boat to the unloading position.

[0011] The above transfer device can grab the graphite boat from the loading position to the handling component of the handling mechanism through the mechanical gripper, and then drive the handling component through the driving component to transport the graphite boat to the unloading position, realizing the conversion of the graphite boat carrier between different carriers without manual handling.

[0012] In one embodiment, the handling component includes a horizontal connecting frame slidably connected to the frame, a vertical connecting frame slidably connected to the horizontal connecting frame, and a handling frame fixed to the horizontal connecting frame. The driving component includes a horizontal driver fixed to the frame and a vertical driver fixed to the horizontal connecting frame. The horizontal driver is drivably connected to the horizontal connecting frame to drive the horizontal connecting frame to slide in the horizontal direction, and the vertical driver is drivably connected to the vertical connecting frame to drive the vertical driver to slide in the vertical direction.

[0013] Furthermore, the present invention also provides a graphite boat automatic cleaning system for cleaning graphite boats, comprising:

[0014] Cleaning equipment for cleaning graphite boats;

[0015] The transfer device as described in any one of the above, the cleaning equipment and the transfer device are arranged in sequence to form a cleaning route between the cleaning equipment and the transfer device;

[0016] Surface treatment equipment for surface treatment of graphite boats, the transfer device and the surface treatment equipment are arranged in sequence to form a surface treatment route between the transfer device and the surface treatment equipment;

[0017] A cleaning transport vehicle that moves along the cleaning route between the cleaning equipment and the transfer device; and

[0018] A drying transport vehicle that moves between the transfer device and the surface treatment device along the surface treatment route.

[0019] The above-mentioned graphite boat automatic cleaning system can transfer graphite boats through a cleaning transport vehicle and a drying transport vehicle, and complete the conversion of carriers through this transfer device, realizing the full-automatic cleaning of graphite boats.

[0020] In one embodiment, the cleaning transport vehicle includes a cleaning transport vehicle main body and a cleaning carrier arranged on the cleaning transport vehicle main body. The cleaning carrier includes a carrier main body and carrier pulleys arranged at the bottom of the carrier main body.

[0021] With such an arrangement, the cleaning transport vehicle main body can drive the cleaning carrier to move together through the carrier pulleys.

[0022] In one embodiment, the drying transport vehicle includes a drying transport vehicle main body and a shelf arranged on the drying transport vehicle main body. The shelf includes a shelf main body and shelf pulleys arranged at the bottom of the shelf main body. The shelf main body has a multi-layer structure.

[0023] With such an arrangement, the drying transport vehicle main body can drive the shelf to move together through the shelf pulleys. The shelf main body can load multiple graphite boats at the same time, increasing the processing efficiency of the surface treatment device.

[0024] In one embodiment, the cleaning transport vehicle main body and the drying transport vehicle main body are autonomous guided vehicles.

[0025] In one embodiment, the surface treatment device includes an oven for drying graphite boats and a baking machine platform for baking graphite boats. The oven and the baking machine platform are arranged in sequence.

[0026] Furthermore, the present application also provides a method for automatically cleaning a graphite boat, including the following steps:

[0027] Clean the graphite boat through a cleaning device, and place the cleaned graphite boat on the cleaning transport vehicle;

[0028] Transport the cleaned graphite boat from the cleaning device to the loading position of the transfer device through the cleaning transport vehicle;

[0029] Grab the cleaned graphite boat from the cleaning transport vehicle at the loading position to the handling mechanism of the transfer device through the mechanical gripper of the transfer device;

[0030] Transport the cleaned graphite boat to the drying transport vehicle at the unloading position of the transfer device through the handling mechanism; and

[0031] Through the drying transport vehicle, the cleaned graphite boat is transported to the surface treatment equipment, so that the surface treatment equipment can perform surface treatment on the cleaned graphite boat.

[0032] In one embodiment, the step of transferring the cleaned graphite boat to the drying transport vehicle located at the unloading position of the transfer equipment through the handling mechanism includes:

[0033] Through the horizontal driver of the handling mechanism, drive the horizontal connecting frame of the handling mechanism to slide forward, so that the handling frame of the handling mechanism is above the drying transport vehicle;

[0034] Through the vertical driver of the handling mechanism, drive the vertical connecting frame of the handling mechanism to slide downward, so that the handling frame contacts the drying transport vehicle;

[0035] Through the horizontal driver, drive the horizontal connecting frame to slide backward, so as to place the graphite boat on the handling frame onto the drying transport vehicle; and

[0036] Through the vertical driver, drive the vertical connecting frame of the handling mechanism to slide upward.

[0037] In one embodiment, the step of transporting the cleaned graphite boat to the surface treatment equipment through the drying transport vehicle, so that the surface treatment equipment can perform surface treatment on the cleaned graphite boat includes:

[0038] Through the drying transport vehicle, transport the cleaned graphite boat to the oven of the surface treatment equipment, so as to dry the cleaned graphite boat through the oven; and

[0039] Through the drying transport vehicle, transport the dried graphite boat to the boat baking machine of the surface treatment equipment, and perform boat baking operation on the dried graphite boat through the boat baking machine. Description of the Drawings

[0040] Figure 1 It is a schematic block diagram of a graphite boat automatic cleaning system provided by an embodiment of the present application;

[0041] Figure 2 It shows a side view schematic diagram of a transfer component of the graphite boat automatic cleaning system according to the above embodiment of the present application;

[0042] Figure 3 It shows a three-dimensional schematic diagram of a transfer component of the graphite boat automatic cleaning system according to the above embodiment of the present application;

[0043] Figure 4 It shows a front view schematic diagram of a cleaning transport vehicle of the graphite boat automatic cleaning system according to the above embodiment of the present application;

[0044] Figure 5 Shows a front view schematic diagram of the drying transport vehicle of the graphite boat automatic cleaning system according to the above embodiments of the present application;

[0045] Figure 6 Shows a step schematic diagram of the graphite boat automatic cleaning method of the graphite boat automatic cleaning system according to the above embodiments of the present application;

[0046] Figure 7 Shows a step schematic diagram of the transfer step of the graphite boat automatic cleaning method of the graphite boat automatic cleaning system according to the above embodiments of the present application;

[0047] Figure 8 Shows a step schematic diagram of the surface treatment step of the graphite boat automatic cleaning method of the graphite boat automatic cleaning system according to the above embodiments of the present application.

[0048] Reference numerals: 10, transfer device; 11, frame; 111, loading position; 112, unloading position; 12, mechanical gripper; 13, handling mechanism; 131, handling component; 1311, horizontal connecting frame; 1312, vertical connecting frame; 1313, handling frame; 132, driving component; 1321, horizontal driver; 1322, vertical driver; 20, cleaning device; 30, surface treatment device; 31, oven; 32, boat baking machine platform; 40, cleaning transport vehicle; 41, cleaning transport vehicle main body; 42, cleaning carrier; 421, carrier main body; 422, carrier pulley; 50, drying transport vehicle; 51, drying transport vehicle main body; 52, shelf; 521, shelf main body; 522, shelf pulley. Detailed implementation manners

[0049] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the following will describe the specific implementation manners of the present invention in detail with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0050] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0051] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0052] In the present invention, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0054] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0055] Please refer to Figure 2 and Figure 3 , the present application provides a transfer device 10 for transferring a graphite boat. The transfer device 10 may include a frame 11, a mechanical gripper 12 and a handling mechanism 13. The frame 11 has a loading position 111 and an unloading position 112, and the loading position 111 and the unloading position 112 can dock a transport vehicle for transporting the graphite boat. The mechanical gripper 12 is disposed on the frame 11. The handling mechanism 13 may include a handling component 131 slidably connected to the frame 11 and a driving component 132 drivably connected to the handling component 131. The mechanical gripper 12 is used to grab the graphite boat from the loading position 111 to the handling component 131, and the driving component 132 is used to drive the handling component 131 to move so that the handling component 131 transfers the graphite boat to the unloading position 112. In other words, the transfer device 10 can grab the graphite boat from the carrier of the transport vehicle parked at the loading position 111 to the carrier pre-placed on the handling component 131, and then drive the handling component 131 by the driving component 132 to transport the graphite boat to the unloading position 112, realizing the conversion of the graphite boat between two different carriers without manual handling. In this way, the transfer device 10 can be used as a transfer station of an automatic cleaning system. The graphite boat is transported to the loading position 111 of the transfer device 10 by a transport vehicle, and the graphite boat is transported away from the unloading position 112 of the transfer device 10 by a transport vehicle, realizing the coordinated work of each device of the automatic cleaning system.

[0056] Optionally, as Figure 3As shown, in one of the embodiments, the handling assembly 131 includes a horizontal connecting frame 1311 slidably connected to the frame 11, a vertical connecting frame 1312 slidably connected to the horizontal connecting frame 1311, and a handling frame 1313 fixed to the horizontal connecting frame 1311. The driving assembly 132 includes a horizontal driver 1321 fixed to the frame 11 and a vertical driver 1322 fixed to the horizontal connecting frame 1311. The horizontal driver 1321 is drivably connected to the horizontal connecting frame 1311 to drive the horizontal connecting frame 1311 to slide in the horizontal direction. The vertical driver 1322 is drivably connected to the vertical connecting frame 1312 to drive the vertical driver 1322 to slide in the vertical direction. It can be understood that after the mechanical gripper 12 grabs the graphite boat onto the handling frame 1313, the horizontal driver 1321 and the vertical driver 1322 can cooperate with each other to drive the handling frame 1313 to move to the blanking position 112, place the graphite boat on the transport vehicle staying at the blanking position 112, and then restore the handling frame 1313 to its original position.

[0057] Preferably, as Figure 3 shown, the handling frame 1313 may include a pair of handling arms adjustably connected to the vertical connecting frame 1312 and a connecting rod disposed between the handling arms. The connecting rod can reinforce the structures of the two handling arms, and the distance between the two handling arms is adjustable to adapt to graphite boat carriers of various sizes.

[0058] Further, please refer to Figure 1 、 Figure 4 and Figure 5 , the present invention also provides a graphite boat automatic cleaning system for cleaning a graphite boat. The graphite boat automatic cleaning system may include a cleaning device 20, a transfer device 10 as described in the above embodiment, a surface treatment device 30, a cleaning transport vehicle 40, and a drying transport vehicle 50. The cleaning device 20 is used for cleaning the graphite boat, and the surface treatment device 30 is used for surface-treating the cleaned graphite boat. The cleaning device 20 and the transfer device 10 are arranged in sequence to form a cleaning route between the cleaning device 20 and the transfer device 10. The cleaning transport vehicle 40 moves along the cleaning route between the cleaning device 20 and the transfer device 10. The transfer device 10 and the surface treatment device 30 are arranged in sequence to form a surface treatment route between the transfer device 10 and the surface treatment device 30. The drying transport vehicle 50 moves along the surface treatment route between the transfer device 10 and the surface treatment device 30.

[0059] It can be understood that after the cleaning device 20 sends an idle signal to the cleaning transport vehicle 40, the cleaning transport vehicle 40 can transport the graphite boat to be cleaned from the area to be cleaned to the cleaning device 20 for cleaning. After the cleaning is completed, the cleaned graphite boat is transported along the cleaning route to the loading position 111 of the transfer device 10. Through the transfer device 10, the graphite boat is transferred to the drying transport vehicle 50 staying at the unloading position 112 of the transfer device 10. Then, the drying transport vehicle 50 transports the cleaned graphite boat along the surface treatment route to the surface treatment device 30 for surface treatment operations. The automatic graphite boat cleaning system has a high degree of automated execution ability. The entire process is completed by each device itself without manual intervention, and can clean the graphite boat fully automatically. In addition, by transporting the graphite boat through the cleaning transport vehicle 40 and the drying transport vehicle 50, the cleaning device 20 and the surface treatment device 30 can be set at different positions respectively, so that the automatic graphite boat cleaning system does not need to make too many improvements to the original cleaning device 20 and surface treatment device 30, reducing the equipment investment cost of the factory.

[0060] Optionally, as Figure 4 shown, in one embodiment, the cleaning transport vehicle 40 includes a cleaning transport vehicle main body 41 and a cleaning carrier 42 provided on the cleaning transport vehicle main body 41. The cleaning carrier 42 includes a carrier main body 421 and carrier pulleys 422 provided at the bottom of the carrier main body 421. The cleaning carrier 42 is the carrier used by the cleaning device 20 to clean the graphite boat. The cleaning carrier 42 can slide on the road surface through the carrier pulleys 422. The bottom of the cleaning carrier 42 has an installation space, and the cleaning transport vehicle 40 is provided in the installation space to drive the cleaning carrier 42 to move together through the cleaning transport vehicle main body 41.

[0061] Optionally, as Figure 5 shown, in one embodiment, the drying transport vehicle 50 includes a drying transport vehicle main body 51 and a shelf 52 provided on the drying transport vehicle main body 51. The shelf 52 includes a shelf main body 521 and shelf pulleys 522 provided at the bottom of the shelf main body 521. The drying transport vehicle main body 51 can drive the shelf 52 to move together through the shelf pulleys 522. The shelf main body 521 has a multi-layer structure and can load multiple graphite boats at the same time, increasing the processing efficiency of the surface treatment device 30.

[0062] Preferably, the cleaning transport vehicle main body 41 and the drying transport vehicle main body 51 are latent automatic transport vehicles. The latent automatic transport vehicle is a common automatic transport vehicle with characteristics such as high intelligence and strong compatibility. By simply combining the latent automatic transport vehicle and the carrier, the transformation of the automatic transport vehicle can be reduced to save the cost of the factory for equipping the automatic transport vehicle.

[0063] Further, as Figure 1 shown, in one of the embodiments, the surface treatment device 30 includes an oven 31 for drying the graphite boat and a boat baking machine 32 for baking the graphite boat. The oven 31 and the boat baking machine 32 are arranged in sequence. The drying transport vehicle 50 first transports the cleaned graphite boat from the unloading position 112 of the transfer device 10 to the oven 31, performs drying treatment through the oven 31, then transports the cleaned graphite boat to the boat baking machine 32 through the transfer device 10, and performs boat baking operation through the boat baking machine 32. With such a setting, the residual moisture can be prevented from affecting the boat baking operation of the graphite boat.

[0064] Further, as Figure 6 shown, in order to more clearly express the process of the automatic graphite boat cleaning system provided by the present invention, the present application also provides an automatic graphite boat cleaning method, which includes the following steps:

[0065] S100. Clean the graphite boat through the cleaning device 20, and place the cleaned graphite boat on the cleaning transport vehicle 40;

[0066] S200. Through the cleaning transport vehicle 40, transport the cleaned graphite boat from the cleaning device 20 to the loading position 111 of the transfer device 10;

[0067] S300. Through the mechanical gripper 12 of the transfer device 10, grab the cleaned graphite boat from the cleaning transport vehicle 40 located at the loading position 111 onto the handling mechanism 13 of the transfer device 10;

[0068] S400. Through the handling mechanism 13, transfer the cleaned graphite boat to the drying transport vehicle 50 located at the unloading position 112 of the transfer device 10; and

[0069] S500. Through the drying transport vehicle 50, transport the cleaned graphite boat to the surface treatment device 30, so as to perform surface treatment on the cleaned graphite boat through the surface treatment device 30.

[0070] In this way, when using the automatic graphite boat cleaning system, the staff can preset the cleaning route and the surface treatment route according to the above convenience to control the cleaning transport vehicle 40 and the drying transport vehicle 50 to transfer the graphite boat between various devices. The entire cleaning process is automatically performed by the devices and the transport vehicles without manual intervention, realizing automatic cleaning of the graphite boat.

[0071] Optionally, as Figure 7As shown, in one embodiment, the step of the S400 transporting the cleaned graphite boat to the drying transport vehicle 50 located at the unloading position 112 of the transport device 10 through the handling mechanism 13 includes:

[0072] S410. Drive the horizontal connecting frame 1311 of the handling mechanism 13 to slide forward through the horizontal driver 1321 of the handling mechanism 13, so that the handling frame 1313 of the handling mechanism 13 is above the drying transport vehicle 50;

[0073] S420. Drive the vertical connecting frame 1312 of the handling mechanism 13 to slide downward through the vertical driver 1322 of the handling mechanism 13, so that the handling frame 1313 contacts the drying transport vehicle 50;

[0074] S430. Drive the horizontal connecting frame 1311 to slide backward through the horizontal driver 1321 to place the graphite boat on the handling frame 1313 on the drying transport vehicle 50; and

[0075] S440. Drive the vertical connecting frame 1312 of the handling mechanism 13 to slide upward through the vertical driver 1322.

[0076] Driven by the horizontal driver 1321 and the vertical driver 1322, the handling frame 1313 can transport the graphite boat to the drying transport vehicle 50. In this way, the mechanical gripper 12 and the handling component 131 cooperate to realize the replacement of the graphite boat between the carriers of different devices to meet the working requirements of each device.

[0077] Optionally, as Figure 8 shown, in one embodiment, the step of the S500 transporting the cleaned graphite boat to the surface treatment device 30 through the drying transport vehicle 50 to perform surface treatment on the cleaned graphite boat by the surface treatment device 30 includes:

[0078] S510. Transport the cleaned graphite boat to the oven 31 of the surface treatment device 30 through the drying transport vehicle 50 to dry the cleaned graphite boat through the oven 31; and

[0079] S520. Transport the dried graphite boat to the boat baking machine platform 32 of the surface treatment device 30 through the drying transport vehicle 50, and perform boat baking operation on the dried graphite boat through the boat baking machine platform 32.

[0080] In this way, the residual moisture on the cleaned graphite boat is dried through the oven 31, avoiding affecting the boat baking operation of the boat baking machine platform 32 on the graphite boat.

[0081] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0082] The above-described embodiments only express several implementation manners of the present invention, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent should be subject to the appended claims.

Claims

1. A transfer device for transferring graphite boats, characterized in that, it includes: A frame having a loading position and an unloading position; A mechanical gripper disposed on the frame; And A handling mechanism including a handling component slidably connected to the frame and a driving component drivably connected to the handling component. The mechanical gripper is used to grab the graphite boat from the loading position to the handling component, and the driving component is used to drive the handling component to move so that the handling component transfers the graphite boat to the unloading position.

2. The transfer device according to claim 1, characterized in that, The handling component includes a horizontal connecting frame slidably connected to the frame, a vertical connecting frame slidably connected to the horizontal connecting frame, and a handling frame fixed to the horizontal connecting frame. The driving component includes a horizontal driver fixed to the frame and a vertical driver fixed to the horizontal connecting frame. The horizontal driver is drivably connected to the horizontal connecting frame to drive the horizontal connecting frame to slide in the horizontal direction, and the vertical driver is drivably connected to the vertical connecting frame to drive the vertical driver to slide in the vertical direction.

3. A graphite boat automatic cleaning system for cleaning graphite boats, characterized in that, it includes: Cleaning equipment for cleaning graphite boats; The transfer device according to any one of claims 1 to 2, the cleaning equipment and the transfer device are arranged in sequence to form a cleaning route between the cleaning equipment and the transfer device; Surface treatment equipment for surface treatment of graphite boats, the transfer device and the surface treatment equipment are arranged in sequence to form a surface treatment route between the transfer device and the surface treatment equipment; A cleaning transport vehicle that moves along the cleaning route between the cleaning equipment and the transfer device; And A drying transport vehicle that moves along the surface treatment route between the transfer device and the surface treatment equipment.

4. The graphite boat automatic cleaning system according to claim 3, characterized in that, The cleaning transport vehicle includes a cleaning transport vehicle main body and a cleaning carrier disposed on the cleaning transport vehicle main body. The cleaning carrier includes a carrier main body and carrier pulleys disposed at the bottom of the carrier main body.

5. The graphite boat automatic cleaning system according to claim 4, characterized in that, The drying transport vehicle includes a drying transport vehicle main body and a shelf disposed on the drying transport vehicle main body. The shelf includes a shelf main body and shelf pulleys disposed at the bottom of the shelf main body. The shelf main body has a multi-layer structure.

6. The graphite boat automatic cleaning system according to claim 5, characterized in that, The cleaning transport vehicle main body and the drying transport vehicle main body are latent automatic transport vehicles.

7. The graphite boat automatic cleaning system according to claim 3, characterized in that, The surface treatment equipment includes an oven for drying graphite boats and a baking machine platform for baking graphite boats. The oven and the baking machine platform are arranged in sequence.

8. A graphite boat automatic cleaning method, characterized in that, It includes the following steps: Clean the graphite boat through a cleaning device, and place the cleaned graphite boat on a cleaning transport vehicle; Through the cleaning transport vehicle, transport the cleaned graphite boat from the cleaning device to the loading position of the transfer device; Use the mechanical gripper of the transfer device to grab the cleaned graphite boat from the cleaning transport vehicle at the loading position onto the handling mechanism of the transfer device; Through the handling mechanism, transfer the cleaned graphite boat to a drying transport vehicle located at the unloading position of the transfer device; And Through the drying transport vehicle, transport the cleaned graphite boat to a surface treatment device to perform surface treatment on the cleaned graphite boat through the surface treatment device.

9. An automatic cleaning method for a graphite boat according to claim 8, characterized in that the step of transferring the cleaned graphite boat to a drying transport vehicle located at the unloading position of the transfer device through the handling mechanism includes: Drive the horizontal connecting frame of the handling mechanism to slide forward through the horizontal driver of the handling mechanism, so that the handling frame of the handling mechanism is above the drying transport vehicle; Drive the vertical connecting frame of the handling mechanism to slide downward through the vertical driver of the handling mechanism, so that the handling frame contacts the drying transport vehicle; Drive the horizontal connecting frame to slide backward through the horizontal driver to place the graphite boat on the handling frame onto the drying transport vehicle; and Drive the vertical connecting frame of the handling mechanism to slide upward through the vertical driver.

10. An automatic cleaning method for a graphite boat according to claim 9, characterized in that the step of transporting the cleaned graphite boat to a surface treatment device through the drying transport vehicle to perform surface treatment on the cleaned graphite boat through the surface treatment device includes: Transport the cleaned graphite boat to the oven of the surface treatment device through the drying transport vehicle to dry the cleaned graphite boat through the oven; and Transport the dried graphite boat to the boat baking machine of the surface treatment device through the drying transport vehicle, and perform boat baking operation on the dried graphite boat through the boat baking machine.

Images