A batch planar grinding and polishing tooling and method with controllable pressure

Abstract

The present invention belongs to the field of precision machining and relates to a batch planar grinding and polishing tooling and method with controllable pressure. The present invention includes: a metal pressing block for pressing the workpiece to be ground and polished; a workpiece ring is sleeved outside the metal pressing block; a workpiece ring oil groove is arranged at the bottom of the workpiece ring; a spring plunger is axially arranged inside the metal pressing block; a gasket is arranged at one end of the elastic pin of the spring plunger; a workpiece isolation ring is arranged at the bottom of the metal pressing block; a plurality of workpiece placement holes capable of embedding the workpiece to be ground and polished are axially arranged inside the workpiece isolation ring; a workpiece isolation ring oil groove is arranged between the workpiece placement holes; the spring plunger corresponds to the position of the workpiece placement hole; by rotating the spring plunger to move downward, the downward pressure is controlled, and the gasket is pushed downward to press the workpiece to be ground and polished. The grinding and polishing tooling of the present invention has a simple structure, a high-efficiency processing method, realizes the quantitative control of any grinding pressure, and can batch grind workpieces of different shapes.

Description

Technical Field

[0001] The present invention belongs to the field of precision machining, and relates to a batch planar grinding and polishing tooling and method with controllable pressure. Background Art

[0002] A plane is one of the most common surface types of parts. Plane machining includes processes such as surface grinding, rotary table grinding, and ring polishing. Among them, the ring polishing process can be used to machine wafers with high precision, flatness gauges for measurement, and high-precision planar parts, and the machining accuracy can reach the nanometer level. Ring polishing, that is, the annular continuous polishing process, belongs to a kind of replication polishing, which replicates the planar accuracy of the grinding disk on the workpiece. This process has the advantages of simple machining and low cost, but the machining efficiency is low.

[0003] In the general grinding and polishing process, methods such as using a pressure block can be used to provide pressure for grinding and polishing, but this method cannot achieve quantitative control of any pressure. In batch grinding, the grinding efficiency is relatively low when relying on the self-weight of the parts. By putting in a pressure block to apply overall pressure, the pressure received by each workpiece is equalized, but it is impossible to apply additional pressure to individual parts that require more material removal.

[0004] Currently, the tooling structures available for batch grinding on the market are more complex, have relatively higher requirements for machining, have relatively high manufacturing costs for the tooling, and generally can only be used to grind workpieces with specific shapes. Patent [CN221111317U] discloses an annular grinding tooling for a large number of small-volume workpieces, which can install multiple workpieces on each mounting part for large-scale grinding. However, this tooling can only grind annular-shaped parts, and the grinding pressure of this tooling relies on the self-weight of the workpieces, and the grinding and machining efficiency is relatively low. Patent [CN108032196A] discloses a workpiece batch grinding device, whose frame is provided with a transmission device and a grinding assembly, and uses a stepping motor to enable the device to achieve the functions of batch feeding and batch grinding. However, this device has a complex mechanism and a high cost. Patent [CN206732805U] discloses a fully automatic planar grinding device, which realizes rapid batch grinding of workpieces at one time by reasonably setting the supporting rod and setting the support column to fix the workpiece. This device is designed with multiple motors, has a relatively high cost and relatively complex control, and the grinding pressure of the workpiece only relies on the self-weight of the workpiece, resulting in relatively low grinding efficiency. Summary of the Invention

[0005] To solve the problems of the existing planar grinding and polishing tooling, such as complex structure, low processing efficiency, inability to achieve quantitative control of arbitrary grinding pressure, and only being able to grind workpieces with specific shapes, the present invention proposes a batch planar grinding and polishing tooling with controllable pressure, including: a metal pressing block for providing pressure to the workpiece to be ground and polished; a workpiece ring is sleeved outside the metal pressing block; a workpiece ring oil groove is arranged at the bottom of the workpiece ring; a spring plunger is axially arranged inside the metal pressing block; a gasket is arranged at one end of the elastic pin of the spring plunger; a workpiece isolation ring is arranged at the bottom of the metal pressing block; a plurality of workpiece placement holes for embedding the workpiece to be ground and polished are axially arranged inside the workpiece isolation ring; a workpiece isolation ring oil groove is arranged between the workpiece placement holes; the position of the spring plunger corresponds to that of the workpiece placement hole; by rotating the spring plunger to move downward, the downward pressure is controlled, and the gasket is pushed downward to be pressed tightly, and the pressing force of the spring plunger is equalized on the workpiece to be ground and polished.

[0006] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, an elastic pin threaded hole and a metal pressing block screw connection hole are vertically penetrated on the metal pressing block; the spring plunger is arranged in the elastic pin threaded hole in a matching manner; a workpiece isolation ring screw connection hole corresponding to the position of the metal pressing block screw connection hole is arranged on the workpiece isolation ring; screws are arranged in the screw connection holes and the corresponding screw connection holes in a matching manner; the screws fixedly connect the metal pressing block and the workpiece isolation ring.

[0007] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece ring and the workpiece isolation ring are in clearance fit. The workpiece ring is used to prevent the grinding fluid from flowing out of the gap between the workpiece ring and the workpiece isolation ring, so that more grinding fluid flows into the grinding and polishing tooling along the oil groove of the workpiece isolation ring; there is a gap between the workpiece ring and the metal pressing block, which is convenient for the grinding fluid to enter the grinding and polishing tooling.

[0008] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the metal pressing block is a centrally symmetric cylindrical structure, one end of which is a cylindrical step; the other end is a cylinder with a diameter larger than the cylindrical step; a metal pressing block lifting ring bolt threaded hole is arranged at the center of the end face of the cylindrical step of the metal pressing block; the metal pressing block is bolted with a metal pressing block lifting ring bolt through the metal pressing block lifting ring bolt threaded hole.

[0009] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, a cylindrical step thread is arranged on the cylindrical surface of the cylindrical step of the metal pressing block; a protective cover is arranged on the metal pressing block and is in fit with the cylindrical step thread.

[0010] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece isolation ring is a vertically symmetric structure, and workpiece isolation ring oil grooves are arranged on both the upper and lower end faces of the workpiece isolation ring.

[0011] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece placement holes of the workpiece isolation ring are through holes with a matrix distribution. The workpiece isolation ring oil grooves connect adjacent workpiece placement holes on the upper and lower end faces of the workpiece isolation ring, and a circular passage is provided at the center of the upper end face of the workpiece isolation ring oil groove 5-2.

[0012] The method for grinding and polishing a plane using the above-mentioned batch planar grinding and polishing tooling with controllable pressure includes the following steps:

[0013] S1: Clean the components of the grinding and polishing tooling;

[0014] S2: Assemble the grinding and polishing tooling:

[0015] S2.1: Place the workpiece ring on the surface of the workbench, screw the lifting ring bolt of the workpiece isolation ring into the workpiece isolation ring, and place the workpiece isolation ring into the workpiece ring;

[0016] S2.2: Place the workpiece to be ground and polished into the workpiece isolation ring and place the gasket on the workpiece to be ground and polished, then unscrew the lifting ring bolt of the workpiece isolation ring;

[0017] S2.2: Screw the lifting ring bolt of the metal pressing block into the metal pressing block, and place the metal pressing block on the workpiece isolation ring; unscrew the lifting ring bolt of the metal pressing block;

[0018] S2.3: Screw the spring plunger into the elastic pin threaded hole of the metal pressing block;

[0019] S2.4: Screw the protective cover into the external cylindrical thread of the metal pressing block;

[0020] S3: Add grinding fluid to the grinding and polishing tooling;

[0021] S4: Start grinding the workpiece to be ground and polished.

[0022] According to the above-mentioned batch planar grinding and polishing method with controllable pressure, in step 2.2: First, use a pin to insert into the screw connection holes of the metal pressing block and the workpiece isolation ring for fixation; then screw the screw into the screw connection hole of the workpiece isolation ring for fixation.

[0023] According to the above-mentioned batch planar grinding and polishing method with controllable pressure, in step S3: Drop the grinding fluid onto the top of the protective cover; the grinding fluid flows along the periphery of the protective cover and enters through the gap between the metal pressing block and the workpiece ring, then flows to the upper end face of the workpiece isolation ring, and flows along the workpiece isolation ring oil groove on the upper end face of the workpiece isolation ring to the workpiece to be ground and polished inside the workpiece isolation ring, and flows out from the workpiece isolation ring oil groove on the lower end face of the workpiece isolation ring and the workpiece ring oil groove 4-1 of the workpiece ring, forming a cycle of the grinding fluid.

[0024] The beneficial effects of the present invention are as follows:

[0025] 1. The workpiece isolation ring and the metal pressing block of the present invention are connected by upper and lower snap-fastening bolts. The workpiece isolation ring with a workpiece placement hole of a corresponding shape is set according to the shape of the workpiece to be polished. The height of the metal pressing block can also be adjusted according to the polishing pressure requirement. As long as the position of the screw is kept unchanged, the reuse of the metal pressing block and the workpiece isolation ring in different workpieces can be ensured. The structure is simple, greatly reducing the production cost of the grinding tooling, and enabling batch polishing of workpieces to be polished in various shapes.

[0026] 2. The polishing pressure of the tooling of the present invention is constant and easy to adjust. By controlling the rotation angle of the spring plunger, the position of the spring plunger can be controlled, and finally the polishing pressure control can be achieved.

[0027] 3. The present invention can achieve uniform grinding and additional pressure grinding of individual workpieces to be polished according to the grinding requirements. Moreover, the pressurizing method is flexible pressurization. When polishing a batch of workpieces to be polished at the same time, by controlling the polishing forces applied by different spring plungers, each workpiece to be polished will receive an appropriate pressure during the processing, which is convenient for controlling the removal amount of each workpiece.

[0028] 4. The grinding fluid of the present invention is dripped from above the protective cover of the polishing tooling. The grinding fluid flows into the gap between the metal pressing block and the workpiece ring along the periphery of the protective cover. After entering, it flows to the upper end face of the workpiece isolation ring, and then flows along the oil groove on the upper end face of the workpiece isolation ring to the workpiece to be polished inside the workpiece isolation ring, and flows out from the oil groove on the lower end face of the workpiece isolation ring and the oil groove of the workpiece ring of the workpiece ring, forming a cycle of the grinding fluid, saving costs and improving the polishing accuracy at the same time. Description of the Drawings

[0029] Figure 1 It is a schematic diagram of the overall assembly of a batch plane polishing tooling with controllable pressure according to the present invention.

[0030] Figure 2 It is a schematic diagram of the overall assembly of a batch plane polishing tooling with controllable pressure according to the present invention.

[0031] Figure 3 It is a schematic diagram of the assembly of the workpiece isolation ring of a batch plane polishing tooling with controllable pressure according to the present invention.

[0032] Figure 4 It is a schematic diagram of the structure of the metal pressing block of a batch plane polishing tooling with controllable pressure according to the present invention.

[0033] Figure 5 It is a schematic diagram of the structure of the workpiece ring of a batch plane polishing tooling with controllable pressure according to the present invention.

[0034] Figure 6 It is a schematic diagram of the structure of the workpiece isolation ring of a batch plane polishing tooling with controllable pressure according to the present invention.

[0035] In the figure: 1: Metal block lifting ring bolt; 2: Metal block; 2-1: Cylindrical step; 2-2: Cylinder; 2-3: Elastic pin threaded hole; 2-4: Metal block lifting ring bolt threaded hole; 2-5: Bottom surface; 2-6: Metal block screw connection hole; 3: Screw; 4: Workpiece ring; 4-1: Workpiece ring oil groove; 5: Workpiece isolation ring; 5-1: Workpiece isolation ring screw connection hole; 5-2: Workpiece isolation ring oil groove; 5-3: Workpiece insertion hole; 5-4: Outer cylindrical surface of workpiece isolation ring; 5-5: Lifting ring bolt threaded hole; 6: Spring plunger; 7: Gasket; 8: Workpiece to be lapped and polished; 9: Protective cover; 10: Workpiece isolation ring lifting ring bolt. Specific embodiments

[0036] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0037] As Figures 1 to 4 shown: A batch planar lapping and polishing tool with controllable pressure, comprising: a metal block 2 for pressing the workpiece 8 to be lapped and polished; a workpiece ring 4 is sleeved outside the metal block 2; a workpiece ring oil groove 4-1 is arranged at the bottom of the workpiece ring 4; a spring plunger 6 is axially arranged inside the metal block 2; a gasket 7 is arranged at one end of the elastic pin of the spring plunger 6; a workpiece isolation ring 5 is arranged at the bottom of the metal block 2; a plurality of workpiece insertion holes 5-3 for embedding the workpiece 8 to be lapped and polished are axially arranged inside the workpiece isolation ring 5; a workpiece isolation ring oil groove 5-2 is arranged between the workpiece insertion holes 5-3; the position of the spring plunger 6 corresponds to that of the workpiece insertion hole 5-3; by rotating the spring plunger 6 to move downward, the downward pressure is controlled, and the gasket 7 is pushed downward to press the workpiece 8 to be lapped and polished.

[0038] An elastic pin threaded hole 2-3 and a metal block screw connection hole 2-6 are vertically penetrated through the metal block 2; the spring plunger 6 is arranged in the elastic pin threaded hole 2-3 in a matching manner; a workpiece isolation ring screw connection hole 5-1 corresponding to the position of the metal block screw connection hole 2-6 is arranged on the workpiece isolation ring 5; a screw 3 is arranged in a matching manner in the screw connection hole 2-6 and the corresponding screw connection hole 5-1 at the corresponding position; the screw 3 fixedly connects the metal block 2 and the workpiece isolation ring 5.

[0039] The workpiece ring 4 and the workpiece isolation ring 5 are in clearance fit. The workpiece ring 4 is used to prevent the grinding fluid from flowing out of the gap between the workpiece ring 4 and the workpiece isolation ring 5, so that more grinding fluid flows into the lapping and polishing tool along the oil groove 5-2 of the workpiece isolation ring 5; the workpiece ring 4 and the metal block 2 are in clearance fit, which is convenient for the grinding fluid to enter the lapping and polishing tool.

[0040] The metal compact 2 has a centrosymmetric cylindrical structure. One end is a cylindrical step 2-1, and the other end is a cylinder 2-2 with a diameter larger than that of the cylindrical step 2-1. A threaded hole 2-4 for the metal compact lifting ring bolt is provided at the center of the end face of the cylindrical step 2-1 of the metal compact 2. The metal compact 2 is bolted to the metal compact lifting ring bolt 1 through the threaded hole 2-4 for the metal compact lifting ring bolt.

[0041] Threads are provided on the cylindrical surface of the cylindrical step 2-1 of the metal compact 2, and a protective cover 9 is provided on the metal compact 2 to cooperate with the threads of the cylindrical step.

[0042] The workpiece isolation ring 5 has an up-and-down symmetric structure, and workpiece isolation ring oil grooves 5-2 are provided on both the upper and lower end faces of the workpiece isolation ring 5.

[0043] The workpiece placement holes 5-3 of the workpiece isolation ring 5 are through holes distributed in a matrix. The workpiece isolation ring oil grooves 5-2 connect adjacent workpiece placement holes 5-3 on the upper and lower end faces of the workpiece isolation ring 5, and a circular passage is provided at the center of the upper end face of the workpiece isolation ring oil groove 5-2.

[0044] A method for polishing a plane using a batch plane polishing tool with controllable pressure includes the following steps:

[0045] S1: Clean the components of the polishing tool.

[0046] S2: Assemble the polishing tool:

[0047] S2.1: Place the workpiece ring 4 on the surface of the workbench, screw the workpiece isolation ring lifting ring bolt 10 into the workpiece isolation ring 5, and place the workpiece isolation ring 5 into the workpiece ring 4.

[0048] S2.2: Place the workpiece to be polished 8 into the workpiece isolation ring 5 and place the gasket 7 on the workpiece to be polished 8, then unscrew the workpiece isolation ring lifting ring bolt 10.

[0049] S2.2: Screw the metal compact lifting ring bolt 1 into the metal compact 2, place the metal compact 2 on the workpiece isolation ring 5, and then unscrew the metal compact lifting ring bolt 1.

[0050] S2.3: Screw the spring plunger 6 into the elastic pin threaded hole 2-3 of the metal compact 2.

[0051] S2.4: Screw the protective cover 9 onto the external cylindrical thread 2-1 of the metal compact 2.

[0052] S3: Add grinding fluid to the polishing tool.

[0053] S4: Start grinding the workpiece to be polished 8.

[0054] In Step 2.2: First, insert the pin into the screw connection hole 2-6 of the metal pressing block and the screw connection hole 5-1 of the workpiece isolation ring for fixation; then, screw the screw 3 into the screw connection hole 5-1 of the workpiece isolation ring for fixation.

[0055] In Step S3: Drop the grinding fluid onto the top of the protective cover 9; the grinding fluid flows in along the gap between the metal pressing block 2 and the workpiece ring 4 around the protective cover 9. After entering, the grinding fluid flows to the upper end face of the workpiece isolation ring 5, and flows along the workpiece isolation ring oil groove 5-2 on the upper end face of the workpiece isolation ring 5 towards the workpiece 8 to be ground and polished inside the workpiece isolation ring 5, and flows out from the workpiece isolation ring oil groove 5-2 on the lower end face of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4, forming a cycle of the grinding fluid.

[0056] A batch planar grinding and polishing tooling with controllable pressure in this embodiment includes a metal pressing block lifting ring bolt 1, a metal pressing block 2, a screw 3, a workpiece ring 4, a workpiece isolation ring 5, a spring plunger 6, a gasket 7, a protective cover 9, and a workpiece isolation ring lifting ring bolt 10.

[0057] The screw 3 is threadedly connected to the workpiece isolation ring threaded hole 5-1 through the connecting metal pressing block screw connection hole 2-6 that mates with it, so that the metal pressing block 2 and the workpiece isolation ring 5 are tightly connected;

[0058] The elastic plunger threaded hole 2-3 of the metal pressing block 2 is threadedly connected to the spring plunger 6; the gasket 7 is arranged between the spring plunger 6 and the workpiece 8 to be ground and polished, and it is in point contact with the spring plunger 6 and surface contact with the workpiece 8 to be ground and polished;

[0059] The metal pressing block lifting ring bolt 1 is threadedly connected to the metal pressing block 2 through the metal pressing block lifting ring bolt threaded hole 2-4; there is a gap between the inner cylindrical surface of the workpiece ring 4 and the cylindrical surface of the cylinder 2-2 of the metal pressing block 2 and the outer cylindrical surface 5-4 of the workpiece isolation ring, facilitating the grinding fluid to enter the grinding and polishing tooling;

[0060] The workpiece ring 4 and the workpiece isolation ring 5 are in clearance fit. The workpiece ring 4 restricts the grinding fluid from flowing out through the gap between the workpiece ring 4 and the workpiece isolation ring 5, so that the grinding fluid flows into the grinding tooling along the workpiece isolation ring oil groove 5-2 of the workpiece isolation ring 5;

[0061] The protective cover 9 is threadedly connected to the outer cylindrical thread 2-1 of the metal pressing block 2. The protective cover 9 is used to prevent the grinding fluid from entering the elastic pin threaded hole 2-3, the metal pressing block lifting ring bolt threaded hole 2-4, and the screw connection hole 2-6 on the metal pressing block 2, resulting in blockage; at the same time, it can also disperse the grinding fluid sprayed on the grinding and polishing tooling so that it flows into the gap between the inner cylindrical surface of the workpiece ring 4 and the cylindrical surface of the cylinder 2-2 of the metal pressing block 2 around the protective cover 9.

[0062] The metal briquette 2 has a centrosymmetric structure and is made of a high-density metal material to have a larger pressure range for providing the polishing pressure for the workpiece 8 to be polished.

[0063] The workpiece isolation ring 5 has an up-and-down symmetric structure and is provided with a workpiece placement hole 5-3 for placing the workpiece 8 to be polished. The upper and lower end faces of the workpiece isolation ring 5 are both provided with workpiece isolation ring oil grooves 5-2. During the grinding process, the grinding fluid flows from the gap between the metal briquette 2 and the workpiece ring 4 and the workpiece isolation ring oil groove 5-2 on the upper end face of the workpiece isolation ring 5 into the gap between the workpiece isolation ring 5 and the workpiece 8 to be polished, and then flows out through the workpiece isolation ring oil groove 5-2 on the lower end face of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4. The grinding fluid flows down from the edge of the grinding plate and returns to the loop polishing machine liquid path, and is dripped out again from the nozzle above the tooling in cooperation with an external liquid pump to realize the circulating flow of the grinding fluid. Since the lower end face of the workpiece isolation ring 5 is directly in contact with the grinding plate of the workbench, wear will occur during the working process, and the workpiece isolation ring 5 is made of wear-resistant material.

[0064] The grinding pressure is realized by controlling the relative position of the spring plunger 6 and the metal briquette 2. By controlling the screwing depth of the spring plunger 6, the relative height between the spring plunger 6 and the metal briquette 2 is changed. The greater the compression amount of the spring plunger 6, the greater the generated pressure, and finally the pressure is evenly transmitted to the workpiece 8 to be polished through the gasket 7.

[0065] The gasket 7 is arranged between the spring plunger 6 and the workpiece 8 to be polished. Its main function is to transmit the pressure from the spring plunger 6 to the workpiece 8 to be polished and equalize the pressure to the workpiece 8 to be polished during this process. The gasket 7 avoids the direct contact between the spring plunger 6 and the workpiece 8 to be polished and effectively protects the surface integrity of the workpiece 8 to be polished. The gasket 7 is made of a soft material such as copper.

[0066] The assembly steps of a batch plane polishing tooling with controllable pressure in this embodiment are as follows:

[0067] First, place the workpiece ring 4 on the surface of the workbench, screw the workpiece isolation ring lifting ring bolt 10 into the workpiece isolation ring 5, place the workpiece isolation ring 5 into the workpiece ring 4, place the workpiece 8 to be polished into the workpiece isolation ring 5 and place the gasket 7 on the workpiece 8 to be polished, and then unscrew the workpiece isolation ring lifting ring bolt 10.

[0068] Second, screw the metal briquette lifting ring bolt 1 into the metal briquette 2, place the metal briquette 2 on the workpiece isolation ring 5; then unscrew the metal briquette lifting ring bolt 1.

[0069] If the metal compact 2 rotates relative to the lower workpiece isolation ring 5, the screw 3 cannot be engaged with the screw connection hole 5-1 of the lower workpiece isolation ring 5. In this case, a pin can be first inserted into the screw connection hole 2-6 of the metal compact 2 and the screw connection hole 5-1 of the workpiece isolation ring 5 for fixation, and then the screw 3 can be screwed into the screw connection hole 5-1 of the workpiece isolation ring 5 for fixation;

[0070] Next, the spring plunger 6 is screwed into the elastic pin thread hole 2-3 of the metal compact 2 and rotated to an appropriate depth according to the lapping and polishing requirements.

[0071] Finally, the protective cover 9 is screwed onto the outer cylindrical thread 2-1 of the metal compact 2.

[0072] Taking the grinding of a cubic workpiece as an example, the specific implementation method of the present invention is described. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0073] The workpiece 8 to be lapped and polished is selected as a cubic block with a length, width and height of 20 mm, and the material is bearing steel; the diameter of the workpiece isolation ring 5 is , and the material is acrylic. The workpiece isolation ring 5 has a centrosymmetric and vertically symmetric structure and includes a workpiece placement hole 5-3 for placing 20 workpieces 8 to be lapped and polished. A workpiece isolation ring lifting ring bolt 10 is provided at the center of the workpiece isolation ring 5. Since the workpiece isolation ring 5 and the workpiece ring 4 have a clearance fit, the workpiece isolation ring lifting ring bolt 10 can be used to prevent the workpiece isolation ring 5 from getting stuck when it is placed into the workpiece ring 4. Workpiece isolation ring oil grooves 5-2 are provided at both the upper and lower ends of the workpiece isolation ring 5. Each workpiece placement hole 5-3 has workpiece isolation ring oil grooves 5-2 that penetrate in both the horizontal and vertical directions. The workpiece isolation ring oil groove 5-2 has a semi-circular cross-section with a radius of R1.5. A circular passage is provided at the center of the upper end surface of the workpiece isolation ring oil groove 5-2 to prevent the grinding fluid from entering the lifting ring bolt thread hole 5-5.

[0074] The outer cylinder diameter of the metal compact 2 is 158 mm, the material is selected as stainless steel, and the weight is 5.4 kg. There is a 2-mm gap between the metal compact 2 and the workpiece ring 4, so that the grinding fluid can flow from this gap to the workpiece isolation ring 5. Twenty elastic pin thread holes 2-3 are provided corresponding to the 20 workpiece placement holes 5-3 in the workpiece isolation ring 5; a metal compact lifting ring bolt thread hole 2-4 is provided at the center of the metal compact 2; four screw connection holes 2-6 are provided on the metal compact 2; the cylindrical step thread on the metal compact 2 is in threaded fit with the protective cover 9. The metal compact 2 and the workpiece isolation ring 5 can provide a maximum pressure of 59.82 N when they are engaged.

[0075] A spring plunger 6 with an appropriate elastic modulus is selected. If the elastic modulus of the spring plunger 6 is too small, the pressure of the metal compact 2 cannot be fully released; if the elastic modulus of the spring plunger 6 is too large, the sensitivity of pressure adjustment will decrease, resulting in an increase in the difficulty of controlling the pressure.

[0076] The following operations shall be carried out before grinding:

[0077] Clean all parts to prevent the residual grinding fluid from the previous processing from affecting the current processing.

[0078] According to the removal amount required for each workpiece 8 to be ground and polished, adjust the screwing depth of each plunger. If some workpieces 8 to be ground and polished require more removal amount, additional pressure shall be applied to grind them. Therefore, these workpieces 8 to be ground and polished are symmetrically arranged on the workpiece isolation ring 5, and the screwing depth of the spring plunger 6 is relatively deeper. The remaining workpieces 8 to be ground and polished that only require a small amount of removal can still be arranged therein, and the screwing depth of the spring plunger 6 is relatively shallower, so as to achieve different removal effects in the same processing. If the removal amount required for all workpieces 8 to be ground and polished is the same, just evenly arrange the workpieces 8 to be ground and polished on the workpiece isolation ring 5 and screw the spring plunger 6 into the same depth, so that the removal amount of each workpiece 8 to be ground and polished is the same.

[0079] The grinding process is as follows:

[0080] First, set the entire grinding duration according to the requirements. Since grinding will cause the temperature of the parts to change, the grinding time should not be too long.

[0081] Next, control the grinding fluid so that it drips above the protective cover 9. The grinding fluid will flow in from the gap between the metal pressing block 2 and the workpiece ring 4 along the periphery of the protective cover 9. After entering, the grinding fluid flows to the upper end face of the workpiece isolation ring 5 and flows along the workpiece isolation ring oil groove 5-2 on the upper end face of the workpiece isolation ring 5 to the workpieces 8 to be ground and polished in the workpiece isolation ring 5, and flows out from the workpiece isolation ring oil groove 5-2 on the lower end face of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4, finally forming a cycle of the grinding fluid.

[0082] Finally, after grinding and polishing, unscrew the protective cover 9, unscrew the spring plunger 6 and the screw 3, screw in the metal pressing block lifting ring bolt 1 to take out the metal pressing block 2, and take out the gasket 7, the workpieces 8 to be ground and polished and the workpiece isolation ring 5.

[0083] As mentioned above, it is only the preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent replacements or changes, and all should be covered within the protection scope of the present invention.

Claims

1. A batch planar grinding and polishing tooling with controllable pressure, characterized in that: Comprising: A metal pressing block (2) for providing pressure to a workpiece (8) to be lapped and polished; a workpiece ring (4) is sleeved outside the metal pressing block (2); a workpiece ring oil groove (4-1) is arranged at the bottom of the workpiece ring (4); a spring plunger (6) is axially arranged inside the metal pressing block (2); a gasket (7) is arranged at one end of the elastic pin of the spring plunger (6); a workpiece isolation ring (5) is arranged at the bottom of the metal pressing block (2); a plurality of workpiece placing holes (5-3) that can be inserted into the workpiece (8) to be lapped and polished are axially arranged inside the workpiece isolation ring (5); a workpiece isolation ring oil groove (5-2) is arranged between the workpiece placing holes (5-3); the spring plunger (6) corresponds to the position of the workpiece placing hole (5-3); by rotating the spring plunger (6) to move downward, the downward pressure is controlled, and the gasket (7) is pushed downward to be pressed tightly, and the pressing force of the spring plunger (6) is equalized on the workpiece (8) to be lapped and polished; an elastic pin threaded hole (2-3) and a metal pressing block screw connection hole (2-6) are vertically penetrated and arranged on the metal pressing block (2); the spring plunger (6) is arranged in the elastic pin threaded hole (2-3) in a matching manner; a workpiece isolation ring screw connection hole (5-1) corresponding to the position of the metal pressing block screw connection hole (2-6) is arranged on the workpiece isolation ring (5); a screw (3) is arranged in the metal pressing block screw connection hole (2-6) and the corresponding workpiece isolation ring screw connection hole (5-1) in a matching manner; the screw (3) fixedly connects the metal pressing block (2) and the workpiece isolation ring (5); the workpiece isolation ring (5) is a symmetric structure up and down, and workpiece isolation ring oil grooves (5-2) are arranged on the upper and lower end faces of the workpiece isolation ring (5); the workpiece placing holes (5-3) of the workpiece isolation ring (5) are through holes distributed in a matrix, the workpiece isolation ring oil grooves (5-2) connect adjacent workpiece placing holes (5-3) on the upper and lower end faces of the workpiece isolation ring (5), and a circular passage is arranged at the center of the upper end face of the workpiece isolation ring oil groove (5-2).

2. A batch planar grinding and polishing tooling with controllable pressure according to claim 1, characterized in that: The workpiece ring (4) and the workpiece isolation ring (5) are in clearance fit; there is a gap between the workpiece ring (4) and the metal pressing block (2), which is convenient for the grinding liquid to enter the lapping and polishing tooling.

3. A batch planar grinding and polishing tooling with controllable pressure according to claim 2, characterized in that: The metal pressing block (2) is a centrally symmetric cylindrical structure, one end of which is a cylindrical step (2-1); the other end is a cylinder (2-2) with a diameter larger than the cylindrical step (2-1); a metal pressing block lifting ring bolt threaded hole (2-4) is arranged at the center of the end face of the cylindrical step (2-1) of the metal pressing block (2); the metal pressing block (2) is bolted with a metal pressing block lifting ring bolt (1) through the metal pressing block lifting ring bolt threaded hole (2-4).

4. A batch planar grinding and polishing tool with controllable pressure according to claim 3, characterized in that: A cylindrical step thread is arranged on the cylindrical surface of the cylindrical step (2-1) of the metal pressing block (2); a protective cover (9) matched with the cylindrical step thread is arranged on the metal pressing block (2).

5. A pressure-controlled batch planar lapping and polishing method using the pressure-controlled batch planar lapping and polishing tooling described in claim 4, characterized in that: Including the following steps: S1: Cleaning the components of the lapping and polishing tooling; S2: Assembling the lapping and polishing tooling: S2.1: Placing the workpiece ring (4) on the surface of the workbench, screwing the workpiece isolation ring lifting ring bolt (10) into the workpiece isolation ring (5), and placing the workpiece isolation ring (5) into the workpiece ring (4); S2.2: Place the workpiece to be lapped and polished (8) into the workpiece isolation ring (5), place the gasket (7) on the workpiece to be lapped and polished (8), and screw out the lifting ring bolt (10) of the workpiece isolation ring; S2.2: Screw the lifting ring bolt (1) of the metal pressing block into the metal pressing block (2), place the metal pressing block (2) on the workpiece isolation ring (5); Screw out the lifting ring bolt (1) of the metal pressing block; S2.3: Screw the spring plunger (6) into the elastic pin threaded hole (2-3) of the metal pressing block (2); S2.4: Screw the protective cover (9) onto the cylindrical step (2-1) of the metal pressing block (2); S3: Add grinding fluid to the lapping and polishing tooling; S4: Start lapping the workpiece to be lapped and polished (8).

6. A method for batch planar grinding and polishing with controllable pressure according to claim 5, characterized in that: In step 2.2: First, use the pin to insert into the screw connection hole (2-6) of the metal pressing block and the screw connection hole (5-1) of the workpiece isolation ring for fixation; Then screw the screw (3) into the screw connection hole (5-1) of the workpiece isolation ring for fixation.

7. A batch planar grinding and polishing method with controllable pressure according to claim 6, characterized in that: In step S3: Drop the grinding fluid onto the top of the protective cover (9); The grinding fluid flows in along the gap between the metal pressing block (2) and the workpiece ring (4) around the protective cover (9), flows to the upper end face of the workpiece isolation ring (5) after entering, and flows along the workpiece isolation ring oil groove (5-2) on the upper end face of the workpiece isolation ring (5) to the workpiece to be lapped and polished (8) inside the workpiece isolation ring (5), and flows out from the workpiece isolation ring oil groove (5-2) on the lower end face of the workpiece isolation ring (5) and the workpiece ring oil groove (4-1) of the workpiece ring (4), forming a cycle of the grinding fluid.

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