Integrated processing and detecting equipment and method for optical element

Abstract

The invention relates to the field of semiconductors, and discloses an integrated processing detection device and method for an optical element, and the device comprises a mechanical arm which is used for transferring a to-be-detected optical element between a detection device and a processing device; the detection device is used for detecting the surface shape of the optical element to be detected; the control device is connected with the mechanical arm, the detection device and the machining device and used for adjusting the positions of the mechanical arm and the detection device and generating machining parameter information when the surface shape does not meet the preset surface shape condition; and the machining device is used for machining the optical element to be detected according to the machining parameter information, the mechanical arm, the detection device, the control device and the machining device are all integrated on a workpiece table, and the position of the mechanical arm is fixed. The device can realize integration and automation of detection and processing, and has the characteristics of high processing efficiency, time saving and labor saving.

Description

Technical Field

[0001] The present application relates to the field of semiconductors, and particularly to an integrated processing and detection device and method for optical elements. Background Art

[0002] Optical elements, especially those with large numerical apertures, are of great strategic significance for promoting the development of lithography technology and achieving the self-control of the semiconductor industry. When manufacturing optical elements, the processing and detection of optical elements are carried out separately. After each round of processing, the operator needs to take the optical element out for detection. When the detection does not meet the requirements, the operator puts the optical element into the processing equipment again for the next round of processing. Therefore, the current manufacturing method has relatively low efficiency and relatively high labor costs.

[0003] Therefore, how to solve the above technical problems should be the focus of attention of those skilled in the art. Summary of the Invention

[0004] The purpose of the present application is to provide an integrated processing and detection device and method for optical elements, which can improve the processing accuracy on the basis of realizing the integration of processing and detection.

[0005] To solve the above technical problems, the present application provides an integrated processing and detection device for optical elements, including:

[0006] A robotic arm for transferring the optical element to be detected between the detection device and the processing device;

[0007] The detection device for detecting the surface shape of the optical element to be detected;

[0008] A control device respectively connected to the robotic arm, the detection device and the processing device, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape condition;

[0009] The processing device for processing the optical element to be detected according to the processing parameter information;

[0010] Wherein, the robotic arm, the detection device, the control device and the processing device are all integrated on the workpiece table, and the position of the robotic arm is fixed.

[0011] Optionally, the processing device includes a magnetorheological processing device.

[0012] Optionally, the magnetorheological processing device includes:

[0013] A calibration pen with a fixed distance from the polishing disc, for calibrating the position of the optical element to be detected.

[0014] Optionally, the control device is further configured to roughly adjust the position of the robotic arm.

[0015] Optionally, the detection device includes an interferometer.

[0016] Optionally, it further includes:

[0017] A displacement adjustment structure located below the detection device, configured to adjust the position of the detection device to adjust the detection optical path.

[0018] Optionally, it further includes:

[0019] A cleaning and drying device, configured to clean and dry the optical element to be inspected after processing.

[0020] Optionally, it further includes:

[0021] An active vibration isolation device, configured to isolate the target device from the foundation, where the target device includes the detection device and the processing device.

[0022] This application also provides an integrated processing and detection method for an optical element of an integrated processing and detection device for an optical element based on the above, including:

[0023] Establish a global coordinate system based on the robotic arm, and determine the positions of the detection device and the processing device in the global coordinate system;

[0024] When the optical element to be inspected is placed on the robotic arm, determine the theoretical detection coordinates of the optical element to be inspected in the global coordinate system based on the parameters of the optical element to be inspected, the parameters of the standard optical element, and the global coordinate system;

[0025] Adjust the robotic arm according to the surface shape detection result of the optical element to be inspected to drive the optical element to be inspected to the theoretical detection coordinates;

[0026] Adjust the positions of the robotic arm and the detection device so that the optical element to be inspected moves from the theoretical detection coordinates to the target detection position;

[0027] Obtain the surface shape of the optical element to be inspected at the target detection position detected by the detection device;

[0028] When the surface shape does not meet the preset surface shape condition, generate processing parameter information according to the surface shape and send the processing parameter information to the processing device, so that when the robotic arm transfers the optical element to be inspected to the processing device, the processing device processes the optical element to be inspected until the surface shape meets the preset surface shape condition.

[0029] Optionally, it further includes:

[0030] Determine the positions for sub-aperture stitching detection based on the parameters of the optical element to be detected and the parameters of the standard optical element;

[0031] Correspondingly, obtaining the surface shape of the optical element to be detected by the detection device includes:

[0032] Obtain the respective local surface shapes of the optical element to be detected by the detection device at the positions for sub-aperture stitching detection;

[0033] Integrate each of the local surface shapes to obtain the surface shape of the optical element to be detected.

[0034] An integrated processing and detection device for an optical element provided in this application includes: a robotic arm for transferring the optical element to be detected between the detection device and the processing device; the detection device for detecting the surface shape of the optical element to be detected; a control device respectively connected to the robotic arm, the detection device, and the processing device, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape condition; the processing device for processing the optical element to be detected according to the processing parameter information; wherein, the robotic arm, the detection device, the control device, and the processing device are all integrated on the workpiece table, and the position of the robotic arm is fixed.

[0035] It can be seen that the integrated processing and detection device for an optical element in this application includes a robotic arm, a detection device, a processing device, and a control device. The control device can adjust the positions of the robotic arm and the detection device. The detection device can detect the surface shape of the optical element to be detected. When the surface shape of the optical element to be detected does not meet the preset surface shape condition, the processing device processes the optical element to be detected. And since the robotic arm can transfer the optical element to be detected between the detection device and the processing device, this application can achieve integration and automation of detection and processing, has the characteristics of high processing efficiency, time-saving and labor-saving, reduces labor costs, and the entire processing and detection process can be carried out without manual participation, with a very high degree of automation. In addition, the robotic arm, the detection device, the control device, and the processing device are all integrated on the workpiece table, which can make the processing and detection device have the characteristics of small volume and high integration degree.

[0036] In addition, this application also provides an integrated processing and detection method with the above advantages. Description of the Drawings

[0037] In order to more clearly illustrate the technical solutions of the embodiments of this application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0038] Figure 1 The structural frame of an integrated processing and detection device for an optical element provided by an embodiment of the present application Figure 1 ;

[0039] Figure 2 The structural schematic diagram of an integrated processing and detection device for an optical element provided by an embodiment of the present application;

[0040] Figure 3 The structural frame of an integrated processing and detection device for an optical element provided by an embodiment of the present application Figure 2 ;

[0041] Figure 4 The flow chart of an integrated processing and detection method for an optical element provided by an embodiment of the present application;

[0042] In the figure, 1 is a robotic arm, 2 is a detection device, 3 is a processing device, 4 is a control device, 5 is a displacement adjustment structure, 6 is a calibration pen, 7 is an active vibration isolation device, and 8 is a workpiece table. Specific embodiments

[0043] In order to enable those skilled in the art to better understand the solution of the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present application.

[0044] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described herein. Those skilled in the art can make similar promotions without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0045] As described in the background art section, in the current integrated processing and detection device, the method used for processing optical elements is the tool path processing method, which belongs to a rough processing method and has relatively low processing accuracy.

[0046] In view of this, the present application provides an integrated processing and detection device for an optical element. Please refer to Figures 1 to 2 , which may include:

[0047] A robotic arm 1 for transferring the optical element to be detected between the detection device 2 and the processing device 3;

[0048] The detection device 2 for detecting the surface shape of the optical element to be detected;

[0049] The control device 4 is respectively connected to the robotic arm 1, the detection device 2, and the processing device 3, and is configured to adjust the positions of the robotic arm 1 and the detection device 2, and generate processing parameter information when the surface shape does not meet the preset surface shape conditions;

[0050] The processing device 3 is configured to process the optical element to be inspected according to the processing parameter information;

[0051] Wherein, the robotic arm 1, the detection device 3, the control device 4, and the processing device 3 are all integrated on the workpiece table 8, and the position of the robotic arm 1 is fixed.

[0052] The optical element to be inspected can be a lens or other optical elements, and no specific limitation is made in this embodiment.

[0053] It should be noted that the shape of the optical element to be inspected is not limited in this embodiment. For example, the surface shape of the optical element to be inspected can be a plane, a spherical surface, an aspherical surface, a free-form surface, etc.

[0054] In this application, the integrated processing and detection equipment can be applicable to optical elements to be inspected with different specifications and sizes, and there is no need to replace each component.

[0055] It should also be noted that the detection device 2 is not limited in this embodiment, as long as it can detect the surface shape result of the optical element to be inspected.

[0056] As an implementable manner, the detection device 2 can include an interferometer or other detection instruments.

[0057] The interferometer performs surface shape detection on the optical element to be inspected, and has the characteristic of high detection accuracy.

[0058] The position of the robotic arm 1 on the upper surface of the workpiece table 8 is fixed, and the position of the robotic arm 1 remains unchanged during the processing. The detection device 2 and the processing device 3 are respectively located on both sides of the robotic arm 1, and the robotic arm 1 can rotate, so as to transfer the optical element to be inspected between the detection device 2 and the processing device 3.

[0059] The robotic arm 1 can include a vacuum adsorption device for adsorbing and placing the optical element to be inspected on the robotic arm 1. In order to ensure the stability of the optical element to be inspected during the processing and detection, and at the same time avoid deformation caused by improper air pressure, the air pressure of the vacuum adsorption device can be automatically adjusted according to the weight of the optical element to be inspected.

[0060] It should be noted that the control device 4 is not limited in this embodiment and can be set by itself. The control device 4 can be a computer, a laptop, etc.

[0061] The control device 4 adjusts the position of the robotic arm 1 to perform a rough adjustment on the robotic arm 1 before detecting the optical element to be inspected, and adjusts the position of the detection device 2 to finely adjust the detection optical path. In this application, both the rough adjustment and the fine adjustment are realized by the control device 4, without manual participation, improving the degree of automation.

[0062] It should be noted that in this embodiment, the preset surface shape condition is not limited and can be set by oneself.

[0063] In this embodiment, the specific type of the processing device 3 is not limited and depends on the situation.

[0064] As an implementable manner, the processing device 3 can be a magnetorheological processing device. The processing of the optical element to be inspected by the magnetorheological processing device belongs to polishing processing, and the processing accuracy of polishing processing is higher, so the processing accuracy of the optical element to be inspected can be improved.

[0065] The integrated processing and detection equipment for optical elements in this embodiment includes a robotic arm 1, a detection device 2, a processing device 3, and a control device 4. The control device 4 can adjust the positions of the robotic arm 1 and the detection device 2. The detection device 2 can detect the surface shape of the optical element to be inspected. When the surface shape of the optical element to be inspected does not meet the preset surface shape condition, the processing device 3 processes the optical element to be inspected. And because the robotic arm 1 can transfer the optical element to be inspected between the detection device 2 and the processing device 3, so this application can realize the integration and automation of detection and processing, has the characteristics of high processing efficiency, time-saving and labor-saving. The entire processing and detection process can be carried out without manual participation, and the degree of automation is very high. In addition, the robotic arm 1, the detection device 2, the control device 4, and the processing device 3 are all integrated on the workpiece table 8, which can make the processing and detection equipment have the characteristics of small volume and high integration.

[0066] Based on the above embodiment, in an embodiment of the present application, the magnetorheological processing device may further include:

[0067] A calibration pen 6, with a fixed distance from the polishing disc in the magnetorheological processing device, is used to calibrate the position of the optical element to be inspected.

[0068] When the robotic arm 1 is adjusted, the positioning accuracy is limited, and errors may occur in the processing link due to inaccurate positioning during processing. By setting the calibration pen 6, the distance between the calibration pen 6 and the polishing disc is determined, so only by using the optical element to be inspected to touch the calibration pen 6 can the coordinate position of the optical element to be inspected be calibrated, improving the positioning accuracy of the robotic arm 1, and then realizing the calibration of the position of the optical element to be inspected.

[0069] In an embodiment of the present application, the magnetorheological processing device may further include:

[0070] A control component for controlling the gradient magnetic field intensity, the flow and distribution of the magnetorheological polishing fluid, and the movement trajectory of the optical element to be inspected, so as to achieve an accurate polishing effect.

[0071] Based on any of the above embodiments, in an embodiment of the present application, as Figure 3 shown, when the detection device 2 includes an interferometer, the integrated processing and detection equipment for the optical element may further include:

[0072] A displacement adjustment structure 5 located below the detection device 2 for adjusting the position of the detection device 2 to adjust the detection optical path.

[0073] The displacement adjustment structure 5 may be a displacement control platform.

[0074] The displacement adjustment structure 5 is connected to the control device 4, and the control device 4 adjusts the detection device 2 by adjusting the displacement adjustment structure 5, thereby realizing the adjustment of the detection optical path.

[0075] The displacement adjustment structure 5 can perform fine adjustment of less than 0.5 mm. During the detection process of the optical element to be inspected, there may be problems with the collimation of the optical path, that is, the alignment error caused by the accuracy limitation of the robotic arm 1. When fine adjustment of less than 0.5 mm is required, the detection optical path can be finely adjusted through the displacement adjustment structure 5, thereby ensuring the accuracy of the detection process and solving the problem that the detection result may be affected by the accuracy limitation of the robotic arm 1.

[0076] Based on any of the above embodiments, in an embodiment of the present application, the integrated processing and detection equipment for the optical element may further include:

[0077] A cleaning and drying device for cleaning and drying the optical element to be inspected after processing;

[0078] Correspondingly, the robotic arm 1 is also used to transfer the optical element to be inspected between the cleaning and drying device and the magnetorheological processing device 3.

[0079] After the processing device 3 finishes processing the optical element to be inspected, the robotic arm 1 transfers the optical element to be inspected to the cleaning and drying device to clean and dry the optical element to be inspected.

[0080] Based on any of the above embodiments, in an embodiment of the present application, the integrated processing and detection equipment for the optical element may further include:

[0081] An active vibration isolation device 7 for isolating the target device from the foundation, and the target device includes the detection device 2 and the processing device 3.

[0082] By setting up the active vibration isolation device 7, the stability of the integrated processing and testing equipment for optical elements can be ensured, thereby improving the stability of optical element processing and testing.

[0083] Please refer to Figure 4 , this application also provides an integrated processing and testing method for optical elements of the integrated processing and testing equipment for optical elements described in the above embodiments. This method may include:

[0084] Step S101: Establish a global coordinate system based on the robotic arm and determine the positions of the detection device and the processing device in the global coordinate system.

[0085] A positioning device is installed on the end effector of the robotic arm. The lowest point of the positioning device on the robotic arm is established as a reference benchmark through a calibration program. Using contact measurement technology, precise spatial positioning of the magnetorheological processing device and the detection device is performed to identify the absolute positions of these devices and their relative position relationships with each other.

[0086] It should be noted that when the integrated processing and testing equipment for optical elements includes a cleaning and drying device, precise spatial positioning of the cleaning and drying device can also be performed to identify the absolute position of the cleaning and drying device and its relative position relationships with the magnetorheological processing device and the detection device.

[0087] After the spatial positioning of each device, components on each device are marked within the global coordinate system to ensure that each component can be accurately identified and positioned during the automated operation process.

[0088] Step S102: When the optical element to be inspected is placed on the robotic arm, determine the theoretical detection coordinates of the optical element to be inspected in the global coordinate system based on the parameters of the optical element to be inspected, the parameters of the standard optical element, and the global coordinate system.

[0089] The optical element to be inspected can be installed on the robotic arm through a vacuum adsorption device.

[0090] It should be noted that in this embodiment, the parameter types of the optical element to be inspected and the standard optical element are the same. The parameters include but are not limited to aperture, radius, focal length, etc.

[0091] The parameters of the optical element to be inspected and the parameters of the standard optical element can be manually input by the operator.

[0092] It should be noted that in this embodiment, the determination process of the theoretical detection coordinates of the optical element to be inspected is not limited, as long as the theoretical detection coordinates of the optical element to be inspected can be obtained.

[0093] Step S103: According to the surface shape detection result of the optical element to be inspected, adjust the robotic arm to drive the optical element to be inspected to the theoretical detection coordinate.

[0094] Before adjusting the position of the robotic arm, the surface shape of the optical element to be inspected is detected to obtain the surface shape detection result.

[0095] To improve the detection accuracy, after adjusting the robotic arm to drive the optical element to be inspected to the theoretical detection coordinate, it may further include: raising the active vibration isolation device to isolate the detection device and the ground.

[0096] Step S104: Adjust the positions of the robotic arm and the detection device so that the optical element to be inspected moves from the theoretical detection coordinate to the target detection position.

[0097] Due to the influence of multiple errors, it is necessary to roughly swing the robotic arm and finely adjust the detection device. First, adjust the robotic arm, and then adjust the detection device.

[0098] The process of adjusting the position of the robotic arm may include: adjusting the position of the robotic arm, determining whether the light spot recognition reaches the specified area. If it does not reach the specified area, continue to adjust the position of the robotic arm until the light spot recognition reaches the specified area; if it reaches the specified area, stop adjusting the position of the robotic arm.

[0099] As an implementable manner, the process of adjusting the detection device may include:

[0100] According to the surface shape detection result of the optical element to be inspected, decouple the surface shape detection result based on the pose algorithm to obtain the detailed pose coordinates of the optical element to be inspected, determine the adjustment amount of the displacement adjustment structure, and automatically perform pose adjustment. Determine whether the position of the detection device is in place. If it is in place, the position of the detection device is finely adjusted; if it is not in place, continue to determine the adjustment amount of the displacement adjustment structure and finely adjust the position of the detection device until the position of the detection device is in place.

[0101] Step S105: Obtain the surface shape of the optical element to be inspected located at the target detection position detected by the detection device.

[0102] When the optical element to be inspected is adjusted to the target detection position, the detection device detects the optical element to be inspected to obtain the surface shape of the optical element to be inspected.

[0103] The form of the surface shape may be a detection data matrix.

[0104] Step S106: When the surface shape does not meet the preset surface shape condition, generate machining parameter information according to the surface shape and send the machining parameter information to the machining device, so that when the robotic arm transfers the optical element to be inspected to the machining device, the machining device processes the optical element to be inspected until the surface shape meets the preset surface shape condition.

[0105] The machining parameter information includes a machining path and a machining matrix.

[0106] After the magnetorheological machining device finishes machining the optical element to be inspected once, when the surface shape does not meet the preset surface shape condition, return to step S103 and repeat until the surface shape meets the preset surface shape condition.

[0107] As an implementable manner, after the machining device processes the optical element to be inspected, it may further include:

[0108] Control the robotic arm to transfer the processed optical element to be inspected to a cleaning and drying device, so that the cleaning and drying device cleans and dries the optical element to be inspected.

[0109] Based on the above embodiments, in an embodiment of the present application, the integrated machining and detection method of the optical element may further include:

[0110] Determine the positions for sub-aperture stitching detection based on the parameters of the optical element to be inspected and the parameters of the standard optical element;

[0111] Correspondingly, obtaining the surface shape of the optical element to be inspected by the detection device includes:

[0112] Obtain the respective local surface shapes of the optical element to be inspected by the detection device at the positions for sub-aperture stitching detection;

[0113] Integrate each of the local surface shapes to obtain the surface shape of the optical element to be inspected.

[0114] In this embodiment, the sub-aperture stitching detection method is used to detect the optical element to be inspected to solve the problem that the optical element to be inspected cannot be fully-aperture detected. The sub-aperture stitching detection method is generally used for the detection of small F-number or large-aperture optical elements.

[0115] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is the difference from other embodiments. The same or similar parts between each embodiment can be referred to each other.

[0116] The above has introduced in detail the integrated processing and detection equipment and method for the optical element provided by this application. Specific examples are used in this article to elaborate on the principle and implementation manner of this application. The description of the above embodiments is only used to help understand the solution of this application and its core idea. It should be noted that for those of ordinary skill in the art, without departing from the principle of this application, several improvements and modifications can still be made to this application, and these improvements and modifications also fall within the protection scope of this application.

Claims

1. An integrated processing and testing device for optical components, characterized in that: include: A mechanical arm, used for transferring the optical component to be inspected between the inspection device and the processing device; The detection device is used to detect the surface shape of the optical element to be detected; A control device, connected to the mechanical arm, the detection device and the processing device respectively, for adjusting the positions of the mechanical arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape condition; The processing device is used to process the optical element to be inspected according to the processing parameter information; Wherein, the robotic arm, the detection device, the control device and the processing device are all integrated on the workpiece table, and the position of the robotic arm is fixed.

2. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: The processing device comprises a magnetorheological processing device.

3. The integrated processing and testing equipment for optical elements according to claim 2, characterized in that: The magnetorheological processing device comprises: The calibration pen is fixed at a distance from the polishing plate and is used to calibrate the position of the optical element to be inspected.

4. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: The control device is also used to roughly adjust the position of the robotic arm.

5. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: The detection device comprises an interferometer.

6. The integrated processing and testing equipment for optical elements according to claim 5, characterized in that: Also includes: The displacement adjustment structure located below the detection device is used to adjust the position of the detection device to adjust the detection light path.

7. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: Also includes: The cleaning and drying device is used to clean and dry the optical components to be inspected after processing.

8. The integrated processing and testing equipment for optical elements according to any one of claims 1 to 7, characterized in that: Also includes: The active vibration isolation device is used to isolate the target device from the foundation, and the target device includes the detection device and the processing device.

9. An integrated processing detection method for optical elements based on the integrated processing detection device for optical elements according to claim 1, characterized in that: include: Establishing a global coordinate system based on the robot arm, and determining the positions of the detection device and the processing device in the global coordinate system; When the optical element to be inspected is placed on the mechanical arm, a theoretical detection coordinate of the optical element to be inspected in the global coordinate system is determined based on the parameters of the optical element to be inspected, the parameters of the standard optical element and the global coordinate system; According to the surface shape detection result of the optical element to be tested, adjusting the mechanical arm to drive the optical element to be tested to a theoretical detection coordinate; Adjusting the positions of the mechanical arm and the detection device so that the optical element to be detected moves from the theoretical detection coordinates to the target detection position; Acquiring the surface shape of the optical element to be inspected located at the target inspection position detected by the inspection device; When the surface shape does not meet the preset surface shape conditions, processing parameter information is generated according to the surface shape and sent to the processing device, so that when the robot arm transfers the optical element to be inspected to the processing device, the processing device processes the optical element to be inspected until the surface shape meets the preset surface shape conditions.

10. The integrated processing and detection method of optical elements according to claim 9, characterized in that: Also includes: Determining a position for sub-aperture stitching detection based on the parameters of the optical element to be tested and the parameters of the standard optical element; Correspondingly, obtaining the surface shape of the optical element to be inspected detected by the detection device includes: Acquire each local surface shape of the optical element to be inspected detected by the detection device at the position of the sub-aperture stitching detection; The surface shape of the optical element to be inspected is obtained by integrating the local surface shapes.

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