Integrated processing and detection equipment and method for optical components

Abstract

The present application relates to the field of semiconductors and discloses an integrated processing and inspection device and method for optical elements. The device comprises: a robotic arm for transferring an optical element to be inspected between a detection device and a processing device; the detection device for detecting the surface shape of the optical element to be inspected; a control device connected to the robotic arm, the detection device, and the processing device, respectively, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet preset surface shape conditions; and the processing device for processing the optical element to be inspected according to the processing parameter information. The robotic arm, the detection device, the control device, and the processing device are all integrated on a workpiece table, and the position of the robotic arm is fixed. The present application can achieve integrated and automated detection and processing, and has the characteristics of high processing efficiency and time and labor savings.

Description

Technical Field

[0001] The present application relates to the field of semiconductors, and in particular to an integrated processing and detection device and method for optical elements. Background Art

[0002] Optical components, especially those with large numerical apertures, are of great strategic significance for advancing lithography technology and achieving independent control of the semiconductor industry. During optical component manufacturing, processing and testing are performed separately. After each round of processing, operators are required to remove the optical component for testing. If the test fails to meet the requirements, the operator places the optical component back into the processing equipment for the next round of processing. Therefore, current manufacturing methods are relatively inefficient and labor-intensive.

[0003] Therefore, how to solve the above technical problems should be the focus of those skilled in the art. Summary of the Invention

[0004] The purpose of this application is to provide an integrated processing and detection device and method for optical elements, which can improve the processing accuracy on the basis of realizing the integration of processing and detection.

[0005] To solve the above technical problems, the present application provides an integrated processing and detection device for optical components, comprising:

[0006] A robotic arm, used to transfer optical components to be inspected between the inspection device and the processing device;

[0007] The detection device is used to detect the surface shape of the optical element to be inspected;

[0008] a control device, connected to the robotic arm, the detection device, and the processing device, respectively, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape conditions;

[0009] The processing device is used to process the optical element to be inspected according to the processing parameter information;

[0010] Wherein, the robotic arm, the detection device, the control device and the processing device are all integrated on the workpiece table, and the position of the robotic arm is fixed.

[0011] Optionally, the processing device includes a magnetorheological processing device.

[0012] Optionally, the magnetorheological processing device includes:

[0013] The calibration pen is fixed at a distance from the polishing plate and is used to calibrate the position of the optical element to be inspected.

[0014] Optionally, the control device is further used to roughly adjust the position of the robotic arm.

[0015] Optionally, the detection device includes an interferometer.

[0016] Optionally, it also includes:

[0017] The displacement adjustment structure located below the detection device is used to adjust the position of the detection device to adjust the detection light path.

[0018] Optionally, it also includes:

[0019] The cleaning and drying device is used to clean and dry the optical components to be inspected after processing.

[0020] Optionally, it also includes:

[0021] The active vibration isolation device is used to isolate the target device from the foundation, and the target device includes the detection device and the processing device.

[0022] The present application also provides an integrated processing and detection method for optical elements based on the above-mentioned integrated processing and detection device for optical elements, comprising:

[0023] Establishing a global coordinate system based on the robotic arm, and determining the positions of the detection device and the processing device in the global coordinate system;

[0024] When the optical element to be inspected is placed on the robotic arm, a theoretical detection coordinate of the optical element to be inspected in the global coordinate system is determined based on the parameters of the optical element to be inspected, the parameters of the standard optical element, and the global coordinate system;

[0025] According to the surface shape detection result of the optical element to be tested, the mechanical arm is adjusted to drive the optical element to be tested to the theoretical detection coordinate;

[0026] Adjusting the positions of the robotic arm and the detection device so that the optical element to be detected moves from the theoretical detection coordinates to the target detection position;

[0027] Acquiring the surface shape of the optical element to be inspected located at the target inspection position detected by the detection device;

[0028] When the surface shape does not meet the preset surface shape conditions, processing parameter information is generated according to the surface shape and the processing parameter information is sent to the processing device, so that when the robotic arm transfers the optical element to be inspected to the processing device, the processing device processes the optical element to be inspected until the surface shape meets the preset surface shape conditions.

[0029] Optionally, it also includes:

[0030] Determining a position for sub-aperture stitching detection based on the parameters of the optical element to be inspected and the parameters of the standard optical element;

[0031] Correspondingly, obtaining the surface shape of the optical element to be inspected detected by the detection device includes:

[0032] Acquire each local surface shape of the optical element to be inspected detected by the detection device at the position of the sub-aperture stitching detection;

[0033] The surface shape of the optical element to be inspected is obtained by integrating the local surface shapes.

[0034] The present application provides an integrated processing and detection device for optical elements, comprising: a robotic arm for transferring the optical element to be inspected between a detection device and a processing device; the detection device for detecting the surface shape of the optical element to be inspected; a control device connected to the robotic arm, the detection device and the processing device respectively, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape conditions; the processing device for processing the optical element to be inspected according to the processing parameter information; wherein the robotic arm, the detection device, the control device and the processing device are all integrated on a workpiece table, and the position of the robotic arm is fixed.

[0035] It can be seen that the optical element integrated processing and detection equipment in this application includes a robotic arm, a detection device, a processing device and a control device. The control device can adjust the position of the robotic arm and the detection device. The detection device can detect the surface shape of the optical element to be detected. When the surface shape of the optical element to be detected does not meet the preset surface shape conditions, the processing device processes the optical element to be detected. Since the robotic arm can transfer the optical element to be detected between the detection device and the processing device, this application can realize the integration and automation of detection and processing, with the characteristics of high processing efficiency, time saving and labor saving, and reduced labor costs. The entire processing and detection process does not require human participation, and the degree of automation is very high. In addition, the robotic arm, detection device, control device and processing device are all integrated on the workpiece table, which can make the processing and detection equipment have the characteristics of small size and high integration.

[0036] In addition, the present application also provides an integrated processing and detection method with the above advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions of the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0038] Figure 1 The structural frame of an integrated processing and detection device for optical elements provided in the embodiment of the present application Figure 1 ;

[0039] Figure 2 A schematic structural diagram of an integrated processing and testing device for optical elements provided in an embodiment of the present application;

[0040] Figure 3 The structural frame of an integrated processing and detection device for optical elements provided in the embodiment of the present application Figure 2 ;

[0041] Figure 4 A flowchart of an integrated processing and detection method for an optical element provided in an embodiment of the present application;

[0042] In the figure, 1. Robotic arm, 2. Detection device, 3. Processing device, 4. Control device, 5. Displacement adjustment structure, 6. Calibration pen, 7. Active vibration isolation device, 8. Workpiece table. DETAILED DESCRIPTION

[0043] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. Obviously, the embodiments described are only a part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making any creative efforts are within the scope of protection of the present application.

[0044] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0045] As described in the background technology section, in current integrated processing and testing equipment, the method used when processing optical components is the tool path processing method. This processing method belongs to the rough processing method and has relatively low processing accuracy.

[0046] In view of this, this application provides an integrated processing and detection equipment for optical components, please refer to Figures 1 to 2 , which may include:

[0047] A robotic arm 1 is used to transfer optical components to be inspected between the inspection device 2 and the processing device 3;

[0048] The detection device 2 is used to detect the surface shape of the optical element to be inspected;

[0049] a control device 4, connected to the robotic arm 1, the detection device 2, and the processing device 3, respectively, for adjusting the positions of the robotic arm 1 and the detection device 2, and generating processing parameter information when the surface shape does not meet the preset surface shape conditions;

[0050] The processing device 3 is used to process the optical element to be inspected according to the processing parameter information;

[0051] The robotic arm 1 , the detection device 3 , the control device 4 and the processing device 3 are all integrated on the workpiece table 8 , and the position of the robotic arm 1 is fixed.

[0052] The optical element to be inspected may be a lens or other optical elements, which is not specifically limited in this embodiment.

[0053] It should be noted that the shape of the optical element to be inspected is not limited in this embodiment. For example, the surface shape of the optical element to be inspected can be a plane, a spherical surface, an aspherical surface, a free-form surface, etc.

[0054] The integrated processing and testing equipment in this application can be applied to optical components to be tested of different specifications and sizes without the need to replace individual components.

[0055] It should also be noted that, in this embodiment, there is no limitation on the detection device 2 , as long as it can detect the surface shape result of the optical element to be detected.

[0056] As an implementation method, the detection device 2 may include an interferometer or other detection instruments.

[0057] The interferometer performs surface shape detection on the optical component to be inspected, and has the characteristics of high detection accuracy.

[0058] The robotic arm 1 is fixed on the upper surface of the workpiece table 8 and remains stationary during the machining process. The inspection device 2 and the processing device 3 are located on either side of the robotic arm 1. The robotic arm 1 can rotate to transfer the optical component to be inspected between the inspection device 2 and the processing device 3.

[0059] The robotic arm 1 may include a vacuum adsorption device for adsorbing and placing the optical component to be inspected on the robotic arm 1. In order to ensure the stability of the optical component to be inspected during processing and inspection, and to avoid deformation caused by improper air pressure, the air pressure of the vacuum adsorption device can be automatically adjusted according to the weight of the optical component to be inspected.

[0060] It should be noted that the control device 4 is not limited in this embodiment and can be configured arbitrarily. The control device 4 can be a computer, a laptop computer, etc.

[0061] The control device 4 adjusts the position of the robot arm 1 to perform a rough adjustment of the robot arm 1 before the optical element to be inspected is inspected, and adjusts the position of the detection device 2 to perform a fine adjustment of the detection optical path. In this application, both rough adjustment and fine adjustment are achieved by the control device 4, without manual intervention, thereby improving the degree of automation.

[0062] It should be noted that the preset face shape conditions are not limited in this embodiment and can be set at will.

[0063] In this embodiment, the specific type of the processing device 3 is not limited and depends on the situation.

[0064] As an implementation method, the processing device 3 may be a magnetorheological processing device. The processing of the optical element to be inspected by the magnetorheological processing device is a polishing process, which has a higher processing precision, thereby improving the processing precision of the optical element to be inspected.

[0065] The optical element integrated processing and detection equipment in this embodiment includes a robot arm 1, a detection device 2, a processing device 3 and a control device 4. The control device 4 can adjust the position of the robot arm 1 and the detection device 2. The detection device 2 can detect the surface shape of the optical element to be detected. When the surface shape of the optical element to be detected does not meet the preset surface shape conditions, the processing device 3 processes the optical element to be detected. Since the robot arm 1 can transfer the optical element to be detected between the detection device 2 and the processing device 3, the present application can realize the integration and automation of detection and processing, and has the characteristics of high processing efficiency, time saving and labor saving. The entire processing and detection process does not require human participation, and the degree of automation is very high. In addition, the robot arm 1, the detection device 2, the control device 4 and the processing device 3 are all integrated on the workpiece table 8, which can make the processing and detection equipment have the characteristics of small size and high integration.

[0066] On the basis of the above embodiment, in one embodiment of the present application, the magnetorheological processing device may further include:

[0067] The calibration pen 6 is at a fixed distance from the polishing disk in the magnetorheological processing device and is used to calibrate the position of the optical element to be inspected.

[0068] When the robotic arm 1 is adjusted, the positioning accuracy is limited, and errors may occur in the processing process due to inaccurate positioning. By setting the calibration pen 6, the distance between the calibration pen 6 and the polishing disk is fixed, so it is only necessary to touch the calibration pen 6 with the optical element to be inspected to calibrate the coordinate position of the optical element to be inspected, thereby improving the positioning accuracy of the robotic arm 1 and realizing the calibration of the position of the optical element to be inspected.

[0069] In one embodiment of the present application, the magnetorheological processing device may further include:

[0070] The control component is used to control the gradient magnetic field intensity, the flow and distribution of the magnetorheological polishing fluid, and the motion trajectory of the optical element to be inspected to achieve precise polishing effect.

[0071] Based on any of the above embodiments, in one embodiment of the present application, Figure 3 As shown, when the detection device 2 includes an interferometer, the integrated processing and detection equipment for optical elements may further include:

[0072] The displacement adjustment structure 5 located below the detection device 2 is used to adjust the position of the detection device 2 to adjust the detection light path.

[0073] The displacement adjustment structure 5 may be a displacement control platform.

[0074] The displacement adjustment structure 5 is connected to the control device 4 . The control device 4 adjusts the position of the detection device 2 by adjusting the displacement adjustment structure 5 , thereby adjusting the detection optical path.

[0075] The displacement adjustment structure 5 can perform fine adjustments of less than 0.5 mm. The optical element to be inspected may have optical path alignment problems during the inspection process, that is, the installation error caused by the accuracy limitation of the robotic arm 1. When fine adjustments of less than 0.5 mm are required, the displacement adjustment structure 5 can be used to finely adjust the inspection optical path, thereby ensuring the accuracy of the inspection process and solving the problem that the inspection results may be affected by the accuracy limitation of the robotic arm 1.

[0076] On the basis of any of the above embodiments, in one embodiment of the present application, the integrated processing and detection equipment for optical elements may further include:

[0077] Cleaning and drying device, used for cleaning and drying the processed optical components to be inspected;

[0078] Correspondingly, the robot arm 1 is also used to transfer the optical element to be inspected between the cleaning and drying device and the magnetorheological processing device 3 .

[0079] After the processing device 3 finishes processing the optical element to be inspected, the robot arm 1 transfers the optical element to be inspected to the cleaning and drying device for cleaning and drying the optical element to be inspected.

[0080] On the basis of any of the above embodiments, in one embodiment of the present application, the integrated processing and detection equipment for optical elements may further include:

[0081] The active vibration isolation device 7 is used to isolate the target device from the foundation, and the target device includes the detection device 2 and the processing device 3.

[0082] By providing the active vibration isolation device 7, the stability of the optical element integrated processing and detection equipment can be ensured, thereby improving the stability of optical element processing and detection.

[0083] Please refer to Figure 4 The present application also provides an integrated processing and detection method for optical elements based on the integrated processing and detection device for optical elements described in the above embodiment, which may include:

[0084] Step S101: establishing a global coordinate system based on the robot arm, and determining the positions of the detection device and the processing device in the global coordinate system.

[0085] The robotic arm's end effector is equipped with a positioning device. A calibration process establishes the lowest point of the positioning device on the robotic arm as a reference. Contact measurement technology is used to precisely locate the magnetorheological processing device and the detection device in space, identifying their absolute positions and their relative positions.

[0086] It should be pointed out that when the integrated processing and detection equipment for optical elements includes cleaning and drying devices, the cleaning and drying devices can also be accurately spatially positioned to identify the absolute position of the cleaning and drying devices and their relative positional relationship with the magnetorheological processing device and the detection device.

[0087] After spatial positioning of each device, the components on each device are marked in the global coordinate system to ensure that each component can be accurately identified and positioned in the automated operation process.

[0088] Step S102: When the optical component to be inspected is placed on the robotic arm, the theoretical inspection coordinates of the optical component to be inspected in the global coordinate system are determined based on the parameters of the optical component to be inspected, the parameters of the standard optical component, and the global coordinate system.

[0089] The optical component to be inspected can be mounted on the robotic arm through a vacuum adsorption device.

[0090] It should be noted that in this embodiment, the optical element to be tested and the standard optical element have the same parameter types, including but not limited to aperture, radius, focal length, etc.

[0091] The parameters of the optical component to be inspected and the parameters of the standard optical component can be manually input by the operator.

[0092] It should be noted that, in this embodiment, there is no limitation on the process of determining the theoretical detection coordinates of the optical element to be inspected, as long as the theoretical detection coordinates of the optical element to be inspected can be obtained.

[0093] Step S103: According to the surface shape detection result of the optical element to be detected, the mechanical arm is adjusted to drive the optical element to be detected to a theoretical detection coordinate.

[0094] Before adjusting the position of the robotic arm, the optical component to be inspected is subjected to surface shape inspection to obtain a surface shape inspection result.

[0095] In order to improve the detection accuracy, after adjusting the mechanical arm to drive the optical element to be detected to the theoretical detection coordinate, the method may further include: raising the active vibration isolation device to isolate the detection device from the foundation.

[0096] Step S104: adjusting the positions of the robotic arm and the detection device so that the optical element to be detected moves from the theoretical detection coordinates to the target detection position.

[0097] Due to the influence of multiple errors, it is necessary to perform a rough adjustment on the robot arm and a fine adjustment on the detection device. The robot arm should be adjusted first, and then the detection device should be adjusted.

[0098] The process of adjusting the position of the robotic arm may include: adjusting the position of the robotic arm, determining whether the light spot recognition reaches the designated area, and if not, continuing to adjust the position of the robotic arm until the light spot recognition reaches the designated area; if it reaches the designated area, stopping adjusting the position of the robotic arm.

[0099] As an implementation method, the process of adjusting the detection device may include:

[0100] According to the surface detection results of the optical component to be tested, the surface detection results are decoupled based on the posture algorithm to obtain the detailed posture coordinates of the optical component to be tested, and the adjustment amount of the displacement adjustment structure is determined. The posture adjustment is automatically performed to judge whether the position of the detection device is in place. If it is in place, the position of the detection device is fine-tuned; if not, the adjustment amount of the displacement adjustment structure is continued to be determined, and the position of the detection device is fine-tuned until the position of the detection device is in place.

[0101] Step S105: Acquire the surface shape of the optical element to be inspected located at the target inspection position detected by the inspection device.

[0102] When the optical element to be inspected is adjusted to the target inspection position, the inspection device inspects the optical element to be inspected to obtain the surface shape of the optical element to be inspected.

[0103] The surface shape can be in the form of a detection data matrix.

[0104] Step S106: When the surface shape does not meet the preset surface shape conditions, generate processing parameter information according to the surface shape and send the processing parameter information to the processing device, so that when the robotic arm transfers the optical element to be inspected to the processing device, the processing device processes the optical element to be inspected until the surface shape meets the preset surface shape conditions.

[0105] The processing parameter information includes the processing path and the processing matrix.

[0106] After the magnetorheological processing device completes processing of the optical element to be inspected, if the surface shape does not meet the preset surface shape condition, the process returns to step S103 and repeats the process until the surface shape meets the preset surface shape condition.

[0107] As an implementable method, after the processing device processes the optical element to be inspected, the method may further include:

[0108] The robot arm is controlled to transfer the processed optical element to be inspected to the cleaning and drying device so that the cleaning and drying device can clean and dry the optical element to be inspected.

[0109] Based on the above embodiments, in one embodiment of the present application, the integrated processing and detection method of optical elements may further include:

[0110] Determining a position for sub-aperture stitching detection based on the parameters of the optical element to be inspected and the parameters of the standard optical element;

[0111] Correspondingly, obtaining the surface shape of the optical element to be inspected detected by the detection device includes:

[0112] Acquire each local surface shape of the optical element to be inspected detected by the detection device at the position of the sub-aperture stitching detection;

[0113] The surface shape of the optical element to be inspected is obtained by integrating the local surface shapes.

[0114] In this embodiment, the optical element to be inspected is inspected by using a sub-aperture stitching inspection method to solve the problem that the optical element to be inspected cannot be inspected at full aperture. The sub-aperture stitching inspection method is generally used for inspecting optical elements with small F numbers or large apertures.

[0115] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0116] The above is a detailed introduction to the integrated processing and detection equipment and method for optical elements provided by the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the scheme and core ideas of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the present application.

Claims

1. An integrated processing and testing device for optical components, characterized in that: include: A robotic arm is used to transfer the optical component to be inspected between the detection device and the processing device; the robotic arm includes a vacuum adsorption device for adsorbing and placing the optical component to be inspected on the robotic arm, and the robotic arm automatically adjusts the air pressure of the vacuum adsorption device according to the weight of the optical component to be inspected; The detection device is used to detect the surface shape of the optical element to be inspected; a control device, connected to the robotic arm, the detection device, and the processing device, respectively, for adjusting the positions of the robotic arm and the detection device, and generating processing parameter information when the surface shape does not meet the preset surface shape conditions; The processing device is used to process the optical element to be inspected according to the processing parameter information; Wherein, the robotic arm, the detection device, the control device and the processing device are all integrated on the workpiece table, and the position of the robotic arm is fixed; The processing device includes a magnetorheological processing device; The magnetorheological processing device comprises: A calibration pen, which is at a fixed distance from the polishing plate and is used to calibrate the position of the optical element to be inspected; The magnetorheological processing device further includes a control component for controlling the gradient magnetic field intensity, the flow and distribution of the magnetorheological polishing fluid, and the motion trajectory of the optical element to be inspected.

2. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: The control device is also used to roughly adjust the position of the robotic arm.

3. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: The detection device includes an interferometer.

4. The integrated processing and testing equipment for optical elements according to claim 3, characterized in that: Also includes: The displacement adjustment structure located below the detection device is used to adjust the position of the detection device to adjust the detection light path.

5. The integrated processing and testing equipment for optical elements according to claim 1, characterized in that: Also includes: The cleaning and drying device is used to clean and dry the optical components to be inspected after processing.

6. The integrated processing and testing equipment for optical elements according to any one of claims 1 to 5, characterized in that: Also includes: The active vibration isolation device is used to isolate the target device from the foundation, and the target device includes the detection device and the processing device.

7. A method for integrated processing and detection of optical elements based on the integrated processing and detection equipment for optical elements according to claim 1, characterized in that: include: Establishing a global coordinate system based on the robotic arm, and determining the positions of the detection device and the processing device in the global coordinate system; When the optical element to be inspected is placed on the robotic arm, a theoretical detection coordinate of the optical element to be inspected in the global coordinate system is determined based on the parameters of the optical element to be inspected, the parameters of the standard optical element, and the global coordinate system; According to the surface shape detection result of the optical element to be tested, the mechanical arm is adjusted to drive the optical element to be tested to the theoretical detection coordinate; Adjusting the positions of the robotic arm and the detection device so that the optical element to be detected moves from the theoretical detection coordinates to the target detection position; Acquiring the surface shape of the optical element to be inspected located at the target inspection position detected by the detection device; When the surface shape does not meet the preset surface shape conditions, processing parameter information is generated according to the surface shape and the processing parameter information is sent to the processing device, so that when the robotic arm transfers the optical element to be inspected to the processing device, the processing device processes the optical element to be inspected until the surface shape meets the preset surface shape conditions.

8. The integrated processing and detection method for optical elements according to claim 7, wherein: Also includes: Determining a position for sub-aperture stitching detection based on the parameters of the optical element to be inspected and the parameters of the standard optical element; Correspondingly, obtaining the surface shape of the optical element to be inspected detected by the detection device includes: Acquire each local surface shape of the optical element to be inspected detected by the detection device at the position of the sub-aperture stitching detection; The surface shape of the optical element to be inspected is obtained by integrating the local surface shapes.

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