Vaporizer anti-blocking device and control method thereof

Abstract

The invention relates to a vaporizer anti-blocking device and a control method thereof, and the device comprises a vaporizer which receives a precursor in a liquid state, heats and vaporizes the precursor through a first heater and a second heater in the vaporizer, and discharges precursor gas; a heating block which is provided on the outer surface of the vaporizer in a surface-contact state and which transfers heat to the inside of the vaporizer; and a storage tank which is provided in a space different from the vaporizer installation space and supplies a heat transfer fluid to the heating block. Therefore, when the heater inside the vaporizer stops working, condensation of the precursor gas is prevented, thereby preventing a flow path clogging phenomenon caused by the liquid phase precursor.

Description

Technical Field

[0001] The present invention relates to a vaporizer anti-blocking device and a control method thereof. More specifically, the present invention relates to a vaporizer anti-blocking device and a control method thereof that prevent condensation of a precursor when a heater stops operating, thereby preventing blockage of an internal flow path of the vaporizer caused by the precursor in a liquid state. Background Art

[0002] In a semiconductor deposition process, a liquid precursor is vaporized by a vaporizer and then supplied to a process chamber, and is deposited on the surface of a wafer by various methods (physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), etc.).

[0003] The above vaporizer is provided with a heater inside to heat and vaporize the liquid precursor, and a flow control valve is provided in a flow path through which the gaseous precursor flows to control the supply flow rate.

[0004] In addition, the space where the vaporizer is installed has a risk of fire and explosion due to precursors, process gases, etc. Therefore, the above heater is provided in an interlock manner so as to operate only in a safe state.

[0005] However, during the operation of the above vaporizer, when the power supply of the above heater is cut off due to temporarily not meeting the conditions (including manual cutting), the temperature inside the above vaporizer decreases, causing the vaporized precursor to condense again, thereby causing blockage of the flow path through which the gaseous precursor flows. More precisely, there is a problem of blockage occurring in the flow control valve provided in the flow path through which the gaseous precursor flows to control the flow rate.

[0006] Therefore, not only can the precursor gas not be supplied to the process chamber, but also no separate heater is provided in the flow control valve setting part, so the condensed precursor cannot be vaporized again, and thus there is a problem that the above vaporizer cannot be restored to a normal state (vaporizer damage).

[0007] The prior art is technical information that the inventor has or has mastered during the derivation of the present invention, and is not necessarily prior art publicly disclosed to the public before the application of the present invention.

[0008] Prior Art Documents

[0009] Patent Documents

[0010] Patent Document 1: Korean Patent Publication No. 10-2005-0059505 (published on June 21, 2005). Summary of the Invention

[0011] Technical problem

[0012] In the process of solving the above problems, the object of the present invention is to provide a vaporizer anti-blocking device and its control method as follows: when the heater inside the vaporizer stops working, prevent the condensation of the precursor gas, thereby preventing the flow path blockage phenomenon caused by the liquid-phase precursor.

[0013] The problems to be solved by the present invention are not limited to the above-mentioned problems. Those of ordinary skill in the technical field to which the present invention pertains can clearly understand other technical problems not mentioned through the following description.

[0014] Solution to the problem

[0015] The vaporizer anti-blocking device according to an embodiment of the present invention includes: a vaporizer that receives a precursor in a liquid state, heats and vaporizes it through a first heater and a second heater inside, and then discharges the precursor gas; a heating block that is arranged in a surface-contact state on the outer side surface of the above-mentioned vaporizer and is used to transfer heat to the inside of the above-mentioned vaporizer; and a storage tank that is arranged in a space different from the space where the above-mentioned vaporizer is arranged and is used to supply a heat transfer fluid to the above-mentioned heating block.

[0016] In addition, the above-mentioned heating block and the above-mentioned storage tank are connected through an inflow path and an outflow path, and a pump for circulating the heat transfer fluid, a flow sensor for measuring the circulation flow rate of the above-mentioned heat transfer fluid, and a valve for controlling the circulation flow rate of the above-mentioned heat transfer fluid are arranged in the above-mentioned inflow path and the above-mentioned outflow path.

[0017] In addition, the vaporizer anti-blocking device of the present invention further includes a temperature control unit connected to the above-mentioned pump, the above-mentioned flow sensor, and the above-mentioned valve. The above-mentioned temperature control unit controls the operations of the above-mentioned pump and the above-mentioned valve and receives the circulation flow rate information of the heat transfer fluid from the above-mentioned flow sensor.

[0018] In addition, the above-mentioned storage tank is provided with a second temperature sensor for measuring the temperature of the heat transfer fluid inside and a third heater for heating the above-mentioned heat transfer fluid. In the above-mentioned temperature control unit, when the temperature of the heat transfer fluid measured by the above-mentioned second temperature sensor is below the condensation temperature of the precursor supplied to the above-mentioned vaporizer, the above-mentioned third heater is started to heat the above-mentioned heat transfer fluid. Thus, the temperature of the heat transfer fluid is maintained at a value higher than the condensation temperature of the above-mentioned precursor.

[0019] In addition, the above-mentioned anti-clogging device for the vaporizer of the present invention further includes an electronic contactor for connecting the above-mentioned first heater and the above-mentioned second heater to a power source, and further includes a vaporizer control unit. When a gas detection signal is input from the gas detection sensor, the above-mentioned vaporizer control unit turns off the above-mentioned electronic contactor to stop the operation of the above-mentioned first heater and the above-mentioned second heater. The above-mentioned gas detection sensor is arranged around the above-mentioned vaporizer to detect leaked gas.

[0020] In addition, in the above-mentioned temperature control unit, when a gas detection signal is generated in the above-mentioned gas detection sensor and the above-mentioned electronic contactor is turned off (including the case of automatic shutdown by the above-mentioned vaporizer control unit and the case of manual shutdown by the user), the above-mentioned pump is started to circulate the above-mentioned heat transfer fluid.

[0021] In addition, the above-mentioned temperature control unit always starts the above-mentioned pump and always controls the temperature of the above-mentioned heat transfer fluid by using the above-mentioned second temperature sensor and the above-mentioned third heater.

[0022] In addition, in the above-mentioned anti-clogging device for the vaporizer of the present invention, a heat-conducting paste is coated and / or filled in the gap between the contact surfaces of the above-mentioned vaporizer and the above-mentioned heating block.

[0023] In addition, the control method of the anti-clogging device for the vaporizer of the present invention is used to control the operation of the above-mentioned anti-clogging device for the vaporizer, and includes: a pump operation step, in which the above-mentioned temperature control unit starts the above-mentioned pump to circulate the heat transfer fluid between the above-mentioned storage tank and the above-mentioned heating block; a heat transfer fluid temperature judgment step, which is implemented after the above-mentioned pump start step, and the above-mentioned temperature control unit is used to judge whether the measured value of the above-mentioned second temperature sensor is below the condensation temperature of the precursor supplied to the above-mentioned vaporizer; and a heater operation control step, which is implemented after the above-mentioned heat transfer fluid temperature judgment step. When the above-mentioned temperature control unit judges that the measured value of the above-mentioned second temperature sensor is below the condensation temperature of the precursor supplied to the above-mentioned vaporizer, the above-mentioned third heater arranged inside the above-mentioned storage tank is started. When it is judged that the measured value of the above-mentioned second temperature sensor is higher than the condensation temperature of the precursor supplied to the above-mentioned vaporizer, the above-mentioned third heater is terminated from working.

[0024] In addition, the control method of the vaporizer anti-blocking device of the present invention may implement the following steps before the above-mentioned pump operation step: a heater stop condition determination step, when the vaporizer control unit receives the gas detection signal of the gas detection sensor, it is determined that the stop conditions of the first heater and the second heater are satisfied; and a heater stop step, which is implemented after the heater stop condition determination step. When the vaporizer control unit receives the input of the gas detection signal of the gas detection sensor in the heater stop condition determination step and determines that the heater stop condition is satisfied, the electronic contactor is controlled to the closed state to stop the operation of the first heater and the second heater.

[0025] In addition, in the above-mentioned pump operation step, when the temperature control unit directly receives from the gas detection sensor and the electronic contactor or receives the gas detection signal of the gas detection sensor or the closing signal of the electronic contactor from the vaporizer control unit, it is determined that the heater stop condition is satisfied, and the pump is started.

[0026] In addition, the condensation temperature of the above-mentioned precursor follows the vapor pressure curve of the precursor supplied to the vaporizer, and the data of the vapor pressure curve are pre-input to the temperature control unit.

[0027] Effects of the Invention

[0028] As described above, in the vaporizer anti-blocking device and its control method of the present invention, when the heater inside the vaporizer stops working, the condensation of the precursor gas is prevented, thereby preventing the flow path blockage phenomenon caused by the liquid-phase precursor.

[0029] The effects of the present invention are not limited to the above-mentioned effects, and those of ordinary skill in the technical field to which the present invention pertains can clearly understand other effects not mentioned through the following description. Description of the Drawings

[0030] Figure 1 It is a structural diagram of the vaporizer anti-blocking device according to an embodiment of the present invention.

[0031] Figure 2 It is an exemplary diagram of the precursor vapor pressure curve.

[0032] Figure 3 It is a flowchart of the control method of the vaporizer anti-blocking device according to an embodiment of the present invention.

[0033] (Description of the reference numerals)

[0034] 100: Vaporizer 110: Preheating section

[0035] 111: First heater 120: Vaporization section

[0036] 121: Second heater 130: Flow control section

[0037] 131: Flow control valve 132: First pressure sensor

[0038] 133: Second pressure sensor 134: First temperature sensor

[0039] 140: Liquid valve 150: Shut-off valve

[0040] 160: Gas detection sensor 170: Electronic contactor

[0041] 180: Vaporizer control unit 200: Heating block

[0042] 201: Heat insulation material 202: Thermal conductive paste

[0043] 210: Inflow passage 215: Internal inflow

[0044] 220: Discharge passage 230: Pump

[0045] 240: Flow sensor 250: Valve

[0046] 260: Temperature control unit 300: Storage tank

[0047] 310: Third heater 320: Second temperature sensor Detailed implementation mode

[0048] In the present invention, for the sake of distinctiveness, clarity from the prior art, and ease of understanding the technology, the drawings are exaggerated. In addition, the following terms are defined in consideration of the functions in the present invention and may vary according to the intentions or customs of users and operators. Therefore, these terms should be defined by the technical content throughout this specification. Furthermore, the embodiments are only illustrative matters of the structural elements disclosed in the claims of the present invention and do not limit the scope of rights of the present invention. The scope of rights should be interpreted according to the technical idea throughout the specification of the present invention.

[0049] Throughout the specification, when referring to a structure "including" another structure, unless there is a particularly contrary description, it means that other structures may also be included, rather than excluding other structures.

[0050] In addition, when referring to a structure "connected", "coupled", or "joined" to another structure, it not only refers to the case of "directly connected", "directly coupled", or "directly joined", but also refers to the case of "connected with another structure intervening therebetween", "coupled with another structure intervening therebetween", or "joined with another structure intervening therebetween". Conversely, when referring to a structure "directly connected", "directly coupled", or "directly joined" to another structure, it should be understood that there is no other structure in between.

[0051] In addition, when directional terms such as "front", "rear", "upper", "lower", "left", "right", "one end", "the other end", and "both ends" are used, these are terms used illustratively for the orientation of the disclosed drawings. Therefore, they cannot be restrictively interpreted. When terms such as "first" and "second" are used, they are terms used to distinguish each structure and cannot be restrictively interpreted.

[0052] To more clearly illustrate the features of the embodiments of the present invention, detailed descriptions of matters well-known to those of ordinary skill in the art belonging to the technical field of the following embodiments will be omitted. Also, in the drawings, detailed descriptions of parts unrelated to the description of the embodiments will be omitted.

[0053] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0054] Figure 1 It is a structural diagram of a vaporizer anti-blocking device according to an embodiment of the present invention. Figure 2 It is an illustrative diagram of a precursor vapor pressure curve.

[0055] Refer to Figures 1 to 2 , the vaporizer anti-blocking device according to an embodiment of the present invention includes a vaporizer 100, a heating block 200, and a storage tank 300.

[0056] The above-mentioned vaporizer 100 is a device that receives a precursor in a liquid state, heats and vaporizes it through a first heater 111 and a second heater 121, discharges the precursor gas, and supplies it to a process chamber.

[0057] In the above-mentioned vaporizer 100, a preheating section 110, a vaporization section 120, and a flow control section 130 are sequentially formed along the flow direction of the precursor.

[0058] The first heater 111 and the second heater 121 are respectively provided in the preheating section 110 and the vaporization section 120. The first heater 111 and the second heater 121 generate heat by setting resistance hot wires. The first heater 111 in the preheating section 110 preheats the precursor in a liquid state at room temperature to a specified temperature, thereby facilitating vaporization in the vaporization section 120. The second heater 121 in the vaporization section 120 heats the precursor to a temperature above the corresponding boiling point according to the type of the flowing-in precursor, thereby vaporizing the precursor in a liquid state into a gas state.

[0059] In the above-mentioned flow control unit 130, a flow control valve 131 is provided on the flow path through which the gaseous precursor flows, and a first pressure sensor 132 and a second pressure sensor 133 are respectively provided on the front side and the rear side of the flow control valve 131. To grasp the temperature of the precursor gas discharged from the vaporizer 100, a first temperature sensor 134 can be provided.

[0060] The measured values of the above-mentioned first pressure sensor 132, the above-mentioned second pressure sensor 133, and the above-mentioned first temperature sensor 134 are transmitted to the vaporizer control unit 180.

[0061] In the above-mentioned vaporizer control unit 180, the measured values of the above-mentioned first pressure sensor 132 and the above-mentioned second pressure sensor 133 are compared. When a pressure difference greater than or equal to the set value is generated between the front end and the rear end of the flow control valve 131, the flow path is opened to allow the precursor gas to flow. Conversely, the flow path is cut off to smoothly supply the precursor gas generated in the vaporization unit 120 to the process chamber side.

[0062] In addition, a gas detection sensor 160 is provided around the above-mentioned vaporizer 100, and the gas detection sensor 160 is connected to the vaporizer control unit 180. Among them, a smoke detector, a UV / IR sensor, a gas leak sensor, etc. can be used as the gas detection sensor 160.

[0063] Therefore, the above-mentioned vaporizer control unit 180 can grasp whether the vaporizer 100 leaks precursor gas and can also grasp whether there is gas of other dangerous (flammable and explosive) components around the vaporizer 100.

[0064] Thus, in the case of gas leakage, for safety, the above-mentioned vaporizer control unit 180 cuts off the power supply to the first heater 111 and the second heater 121 of the above-mentioned preheating unit 110 and the above-mentioned vaporization unit 120, so as to prevent problems before they occur.

[0065] The first heater 111 and the second heater 121 of the above-mentioned preheating unit 110 and the above-mentioned vaporization unit 120 are connected to the power supply through a magnetic contactor (MC) 170. The magnetic contactor 170 is connected to the vaporizer control unit 180 and can be turned on / off through the vaporizer control unit 180, and can also be manually turned on / off by the user. And the above-mentioned vaporizer control unit 180 can real-time sense the on / off state of the magnetic contactor 170.

[0066] In addition, in the above-described vaporizer 100, a liquid valve 140 for controlling the flow of the precursor in a liquid state is provided between the preheating unit 110 and the vaporizing unit 120, and a shut-off valve 150 for cutting off the flow of the precursor gas is provided in the discharge flow path connected to the rear end of the flow control unit 130. Although not shown, the liquid valve 140 and the shut-off valve 150 may also be electronic control valves that are operationally controlled by the vaporizer control unit 180.

[0067] The above-described heating block 200 is provided in surface contact with the outer side surface of the vaporizer 100 and is a heat source that transfers heat to the inside of the vaporizer 100. Figure 1 An embodiment in which the heating block 200 is provided on the bottom surface of the vaporizer 100 is shown.

[0068] The above-described heating block 200 is fixedly provided on the vaporizer 100 by various fastening means such as bolts.

[0069] In the above-described heating block 200, an inflow flow path 210 and a discharge flow path 220 are respectively connected to both end portions, and an internal inflow 215 is formed inside. The internal inflow 215 connects the inflow flow path 210 and the discharge flow path 220, so that the heat transfer fluid flows inside the heating block 200.

[0070] The heat transfer fluid flowing in the internal inflow 215 transfers heat to the vaporizer 100 through the main body of the heating block 200.

[0071] As Figure 1 shown, the internal inflow 215 may be in a straight line form, but may also be in a form that reciprocates in the vertical direction, or may be formed by a plurality of branched flow path structures to increase the heat transfer area toward the main body of the heating block 200.

[0072] In addition, in the above-described heating block 200, the outer side surface except for the contact surface (heat transfer surface) with the vaporizer 100 may be surrounded by a heat insulating material 201. Through the heat insulating material 201, the amount of heat loss through the remaining surfaces except for the heat transfer surface is minimized. Thus, more heat can be transferred from the heating block 200 to the vaporizer 100 through the heat transfer surface.

[0073] In addition, between the contact surface of the heating block 200 and the vaporizer 100, a heat conductive paste 202 may be applied and / or filled. As described above, the gap between the heating block 200 and the vaporizer 100 is filled with the heat conductive paste 202. Thus, heat transfer from the heating block 200 to the vaporizer 100 can be made more smooth.

[0074] The above storage tank 300 is a tank for storing heat transfer fluid, and is connected to the heating block 200 through the above inflow passage 210 and the above discharge passage 220. That is, the above inflow passage 210 is connected to the discharge port 301 of the above storage tank 300, and the above discharge passage 220 is connected to the inflow port 302 of the above storage tank 300. However, the above storage tank 300 is located in a space different from the space where the vaporizer 100 is provided (a place that does not share the fire and explosion risks caused by leaked gas), and acts as an additional heat source that has no operational relationship with the above heaters 111 and 121 of the above vaporizer 100.

[0075] A third heater 310 is provided inside the above storage tank 300, whereby the temperature of the heat transfer fluid stored inside the above storage tank 300 can be heated to a desired temperature. The temperature of the above heat transfer fluid should be maintained at a value greater than the condensation temperature of the precursor supplied to the above vaporizer 100.

[0076] For example, when the precursor substance supplied to the above vaporizer 100 is tetraethylorthosilicate (TEOS), when the pressure measured by the above first pressure sensor 132 is 63 kPa(A), in the Figure 2 vapor pressure curve of TEOS, the corresponding saturation temperature is 150 °C (B). Therefore, when the temperature is lower than this temperature, it becomes a liquid, and when the temperature is higher than this temperature, it becomes a gas. Therefore, by adjusting the temperature of the above heat transfer fluid to a value greater than 150 °C, it is possible to prevent the condensation and liquefaction of TEOS in the internal flow path of the above vaporizer 100 (more precisely, the part where the flow control valve 131 is provided).

[0077] As described above, according to the type of precursor supplied to the above vaporizer 100, the temperature of the heat transfer fluid is maintained at a value greater than the condensation temperature of the above precursor, thereby preventing the condensation of the precursor even when the above first heater 111 and the above second heater 121 are stopped, and thus preventing the flow path blockage phenomenon caused by the precursor in the liquid state.

[0078] Pumps 230, flow sensors 240, valves 250, etc. are provided in the above inflow passage 210 and the above discharge passage 220, and they can be connected to a temperature control unit 260 for controlling the temperature of the heat transfer fluid to perform operation control. The above temperature control unit 260 controls the operations of the above pump 230 and the above valve 250, and can receive the circulating heat quantity information of the heat transfer fluid from the above flow sensor 240. In addition, a second temperature sensor 320 for measuring the temperature of the heat transfer fluid is provided on one side of the above storage tank 300, and the second temperature sensor 320 transmits the measured value to the above temperature control unit 260.

[0079] Therefore, the above-mentioned pump 230 is configured to circulate the heat transfer fluid between the above-mentioned heating block 200 and the above-mentioned storage tank 300. The above-mentioned flow sensor 240 is configured to measure the circulation flow rate of the heat transfer fluid. The above-mentioned valve 250 is configured to control the circulation flow rate of the heat transfer fluid by adjusting the opening degree.

[0080] In addition, the temperature of the heat transfer fluid stored in the above-mentioned storage tank 300 is transmitted to the above-mentioned temperature control unit 260 in real time through the above-mentioned second temperature sensor 320. When the temperature of the heat transfer fluid in the above-mentioned storage tank 300 drops below the condensation temperature of the precursor supplied to the above-mentioned vaporizer 100 (accurately, the saturation temperature at the pressure measured by the above-mentioned first pressure sensor 132), the above-mentioned temperature control unit 260 activates the above-mentioned heater 310 to heat the heat transfer fluid. Thus, it is controlled in such a way that the temperature of the heat transfer fluid supplied to the above-mentioned heating block 200 is always maintained at a value greater than the condensation temperature of the precursor supplied to the above-mentioned vaporizer 100.

[0081] The above-mentioned temperature control unit 260 detects the internal temperature of the above-mentioned storage tank 300 in real time through the above-mentioned second temperature sensor 320. When the measured temperature drops below the condensation temperature of the gaseous precursor, the above-mentioned third heater 310 is activated to always maintain the internal temperature of the above-mentioned storage tank 300 in a state higher than the condensation temperature of the precursor.

[0082] In addition, the above-mentioned temperature control unit 260 always activates the above-mentioned pump 230 to always maintain the temperature inside the above-mentioned heating block 200 in a state higher than the condensation temperature of the precursor.

[0083] In addition, the above-mentioned temperature control unit 260 activates the above-mentioned pump 230 to circulate the heat transfer fluid for preventing precursor condensation only when the above-mentioned first heater 111 and the above-mentioned second heater 121 of the above-mentioned vaporizer 100 stop working. And when a gas detection signal is generated in the above-mentioned gas detection sensor 160 and the above-mentioned electronic contactor 170 is closed (including the case of automatic closing by the above-mentioned vaporizer control unit 180 and the case of manual closing by the user), the above-mentioned temperature control unit 260 can activate the above-mentioned pump 230 to circulate the above-mentioned heat transfer fluid.

[0084] In addition, the condensation temperature of the above-mentioned precursor supplied to the above-mentioned vaporizer 100 follows the vapor pressure curve of the corresponding precursor, and the data of the corresponding vapor pressure curve is input to the temperature control unit 260 in advance.

[0085] In addition, in the vaporizer anti-blocking device of the present invention, since the storage tank 300 is an additional indirect heat source provided in a space different from the vaporizer 100, in the case of gas leakage in the vaporizer 100, there is no risk of fire and explosion, and the advantage of safely supplying heat to the vaporizer 100.

[0086] As described above, according to the vaporizer anti-blocking device of the present invention, the heating block 200 through which the heat transfer fluid circulates is provided in the vaporizer 100, so that heat can be supplied to the vaporizer 100. The heat transfer fluid is maintained at a temperature higher than the condensation temperature of the precursor supplied to the vaporizer 100. Thus, the liquid-state precursor flowing through the flow path of the vaporizer 100 is liquefied, thereby preventing the phenomenon that the flow path (especially the flow control valve 131) is blocked.

[0087] In addition, the storage tank 300 is an additional indirect heat source provided in a space different from the vaporizer 100 (a space that does not share the accident risk caused by gas leakage), and has the advantage that even in the case of gas leakage in the vaporizer 100, heat can be safely supplied to the vaporizer 100 to prevent the condensation of the precursor.

[0088] Hereinafter, a control method of the vaporizer anti-blocking device will be described.

[0089] Figure 3 It is a flowchart of the control method of the vaporizer anti-blocking device of the present invention.

[0090] As Figure 3 , the control method of the vaporizer anti-blocking device of the present invention includes a pump operation step S30, a heat transfer fluid temperature judgment step S40, and a heater operation control step S50. And, before the pump operation step S30 of the control method of the vaporizer anti-blocking device of the present invention, a heater stop condition judgment step S10 and a heater stop step S20 can also be implemented.

[0091] In the heater stop condition judgment step S10, before implementing the pump operation step S30, when the vaporizer control unit 180 receives the gas detection signal of the gas detection sensor 160, it is determined that the stop conditions of the first heater 111 and the second heater 121 are satisfied.

[0092] In one embodiment, in the heater stop condition judgment step S10, before implementing the pump operation step S30, in the operating state of the vaporizer 100, when the gas detection sensor 160 detects the gas around the vaporizer 100 or the user manually closes the electronic contactor 170, the vaporizer control unit 180 recognizes it and determines that the heater stop condition is satisfied.

[0093] As described above, the gas detection sensor 160 can utilize a smoke detector, an ultraviolet / infrared sensor, a gas leakage sensor, etc., and can be applied singly or in multiple. When the gas detection sensor 160 detects a gas with a risk of flammability and explosion around the vaporizer 100, it transmits a gas detection signal to the vaporizer control unit 180. Thus, the vaporizer control unit 180 determines that the heater stop condition for stopping the operation of the first heater 111 of the preheating unit 110 and the second heater 121 of the vaporizing unit 120 is satisfied.

[0094] In addition, in one embodiment, when the user manually closes the electronic contactor 170 for various other reasons, the corresponding signal is transmitted to the vaporizer control unit 180, and the vaporizer control unit 180 recognizes that the electronic contactor 170 has been closed.

[0095] The heater stop condition signal as described above, that is, the gas detection information of the gas detection sensor 160 and the closing information of the electronic contactor 170, is transmitted from the vaporizer control unit 180 to the temperature control unit 260. In addition, the heater stop condition signal can be directly transmitted from the gas detection sensor 160 and the electronic contactor 170 to the temperature control unit 260.

[0096] The heater stop step S20 is implemented after the heater stop condition determination step S10. When it is determined in the heater stop condition determination step S10 that the heater stop condition is satisfied through the gas detection signal, the vaporizer control unit 180 controls the electronic contactor 170 to the closed state, cutting off the power supply to the first heater 111 and the second heater 121, so that the first heater 111 and the second heater 121 stop operating. Thus, safety against gas fires and explosion accidents can be ensured.

[0097] In the case where the user manually closes the electronic contactor 170, the first heater 111 and the second heater 121 still stop operating, and the vaporizer control unit 180 and the temperature control unit 260 recognize this state.

[0098] As described above, the first heater 111 and the second heater 121 inside the vaporizer 100 stop operating. Thus, the temperature of the precursor gas flowing in the internal flow path of the vaporizer 100 is in a state where it can be reduced. If time continues, the temperature of the precursor gas drops below the condensation temperature, eventually leading to condensation, and thus being in a state where the flow path through the flow control valve 131 is blocked by the liquid-phase precursor.

[0099] In the above-mentioned pump operation step S30, the temperature control unit 260 starts the pump 230 to circulate the heat transfer fluid between the storage tank 300 and the heating block 200.

[0100] The above-mentioned pump operation step S30 can be implemented as the first step of the control method of the anti-blocking device of the vaporizer of the present invention. That is, in the normal operation mode, the above-mentioned pump operation step S30 can be implemented without additional conditions.

[0101] In addition, the above-mentioned pump operation step S30 can be implemented conditionally (heater stopped). That is, it can be implemented after the above-mentioned heater stop condition judgment step S10. In the conditional implementation mode, in the above-mentioned pump operation step S30, when the temperature control unit 260 receives the gas detection information of the gas detection sensor 160 or the closing information of the electronic contactor 170 from the vaporizer control unit 180, or directly receives the gas detection signal from the gas detection sensor 160, or directly receives the closing signal from the electronic contactor 170, it is determined as the heater stop condition, and the pump 230 is started.

[0102] Figure 3 It is shown that the above-mentioned pump operation step S30 is implemented after the above-mentioned heater stop step S20, but not necessarily after the above-mentioned heater stop step S20 ends. That is, the above-mentioned pump operation step S30 can be independently implemented by the temperature control unit 260 regardless of the operation of the above-mentioned heaters (the first heater 111 and the second heater 121) of the vaporizer 100, and it can be implemented simultaneously with the above-mentioned heater stop step S20.

[0103] When the pump 230 is started through the above-mentioned pump operation step S30, the heat transfer fluid in the storage tank 300 circulates along the following circulation path: it is supplied to the inside of the heating block 200 through the above-mentioned inflow passage 210, after flowing through the above-mentioned internal inflow 215 of the heating block 200, it is discharged through the above-mentioned discharge passage 220, and then flows back into the storage tank 300 again.

[0104] Therefore, the heat transfer fluid from the heating block 200 transfers heat to the vaporizer 100 through the main body of the heating block 200, thereby heating the liquid-phase precursor inside the vaporizer 100 and maintaining a temperature above the condensation temperature.

[0105] The above heat transfer fluid temperature determination step S40 is implemented after the above pump operation step S30. The temperature control unit 260 determines the measured value of the second temperature sensor 320, that is, whether the current temperature of the heat transfer fluid in the storage tank 300 is below the condensation temperature of the precursor supplied to the vaporizer 100 (following the vapor pressure curve of the precursor supplied to the vaporizer, and the data of the corresponding vapor pressure curve is pre-input to the temperature control unit 260). That is, the temperature control unit 260 determines whether it is necessary to raise the temperature of the heat transfer fluid inside the storage tank 300.

[0106] The above heater operation control step S50 is implemented after the above heat transfer fluid temperature determination step S40. According to the result of the above heat transfer fluid temperature determination step S40, the temperature control unit 260 starts the third heater 310 or stops the third heater 310 from operating.

[0107] When the measured value of the second temperature sensor 320 in the above heat transfer fluid temperature determination step S40, that is, the temperature of the heat transfer fluid is below the condensation temperature of the precursor, the temperature control unit 260 starts the third heater 310 provided inside the storage tank 300 to heat the heat transfer fluid, thereby raising the temperature to a temperature higher than the condensation temperature of the precursor.

[0108] On the contrary, when the measured value of the second temperature sensor 320 in the above heat transfer fluid temperature determination step S40, that is, the temperature of the heat transfer fluid is higher than the condensation temperature of the precursor, the temperature control unit 260 stops the third heater 310 from operating to prevent unnecessary power consumption.

[0109] As described above, the temperature control unit 260 repeatedly starts and stops the third heater 310 according to the temperature of the heat transfer fluid. Thus, the temperature of the heat transfer fluid is maintained at a temperature higher than the condensation temperature of the precursor.

[0110] As described above, according to the control method of the vaporizer anti-blocking device of the present invention, the operation of the pump 230 and the temperature control of the heat transfer fluid using the third heater 310 are carried out in the normal mode to keep the liquid-state precursor inside the vaporizer 100 above the condensation temperature, thereby preventing the flow path from being blocked by preventing the condensation of the precursor.

[0111] In addition, according to the control method of the vaporizer anti-blocking device of the present invention, when the above heater 111, 121 stop conditions of the vaporizer 100 are satisfied, the pump 230 is started to supply the heat transfer fluid to the heating block 200, and heat can be transferred to the inside of the vaporizer 100. The temperature of the heat transfer fluid is controlled to a value greater than the condensation temperature of the precursor supplied to the vaporizer 100.

[0112] Therefore, even when the heaters 111 and 121 are stopped as described above, condensation of the precursor inside the vaporizer 100 is prevented, thereby preventing the phenomenon of blockage of the flow path inside the vaporizer 100 caused by the precursor in the liquid state.

[0113] As described above, according to the vaporizer anti-blocking device and its control method of the present invention, when the heater inside the vaporizer stops working, condensation of the precursor gas is prevented, thereby preventing the phenomenon of blockage of the flow path caused by the liquid-phase precursor.

[0114] As described above, the present invention has been described with reference to the embodiments shown in the drawings, but this is only for illustration, and it should be understood that various modifications and equivalent other embodiments can be made according to the general knowledge in the technical field. Therefore, the true technical protection scope of the present invention should be based on the appended claims and defined according to the specific content of the above invention.

[0115] Industrial Applicability

[0116] The present invention relates to a vaporizer anti-blocking device and its control method, which can be used in the industrial field of vaporizers for converting liquid-phase substances into a gaseous state.

Claims

1. A carburetor anti-blocking device, characterized in that: include: A vaporizer receives a precursor in a liquid state, heats and vaporizes the precursor through a first heater and a second heater inside the vaporizer, and then discharges the precursor gas; a heating block disposed on the outer side of the vaporizer in a surface-contact state, and used for transferring heat to the interior of the vaporizer; and The storage tank is arranged in a space different from the space where the vaporizer is arranged, and is used to supply the heat transfer fluid to the heating block.

2. The carburetor anti-blocking device according to claim 1, characterized in that: The heating block and the storage tank are connected via an inlet flow path and an outlet flow path, in which a pump for circulating a heat transfer fluid, a flow sensor for measuring a circulation flow rate of the heat transfer fluid, and a valve for controlling the circulation flow rate of the heat transfer fluid are provided.

3. The carburetor anti-blocking device according to claim 2, characterized in that: The vaporizer anti-blocking device further comprises a temperature control unit connected to the pump, the flow sensor and the valve. The temperature control unit controls the operation of the pump and the valve and receives circulation flow information of the heat transfer fluid from the flow sensor.

4. The carburetor anti-blocking device according to claim 3, characterized in that: The storage tank is provided with a second temperature sensor for measuring the temperature of the internal heat transfer fluid and a third heater for heating the heat transfer fluid. In the temperature control unit, when the temperature of the heat transfer fluid measured in the second temperature sensor is lower than the condensation temperature of the precursor supplied to the vaporizer, the third heater is started to heat the heat transfer fluid, thereby maintaining the temperature of the heat transfer fluid at a value higher than the condensation temperature of the precursor.

5. The carburetor anti-blocking device according to claim 4, characterized in that: The carburetor anti-blocking device further comprises an electronic contactor for connecting the first heater and the second heater to a power source. It also includes a vaporizer control unit. When a gas detection signal is input from a gas detection sensor, the vaporizer control unit turns off the electronic contactor to stop the first heater and the second heater from working. The gas detection sensor is arranged around the vaporizer to detect leaking gas.

6. The carburetor anti-blocking device according to claim 5, characterized in that: In the temperature control unit, when a gas detection signal is generated in the gas detection sensor and the electronic contactor is closed, the pump is started to circulate the heat transfer fluid. The electronic contactor is closed automatically by the vaporizer control unit and manually by the user.

7. The carburetor anti-blocking device according to claim 4, characterized in that: The temperature control unit always starts the pump and always controls the temperature of the heat transfer fluid using the second temperature sensor and the third heater.

8. The carburetor anti-blocking device according to claim 1, characterized in that: In the vaporizer blocking prevention device, a thermal conductive paste is applied and / or filled in a gap between the contact surface of the vaporizer and the heating block.

9. A method for controlling a carburetor anti-blocking device, the method being used to control the operation of the carburetor anti-blocking device according to any one of claims 1 to 8, characterized in that: include: a pump operation step, wherein the temperature control unit starts the pump to circulate the heat transfer fluid between the storage tank and the heating block; a temperature determination step of the heat transfer fluid, which is performed after the pump starting step, wherein the temperature control unit is used to determine whether the measurement value of the second temperature sensor is below the condensation temperature of the precursor supplied to the vaporizer; and The heater operation control step is implemented after the temperature judgment step of the heat transfer fluid. When the temperature control unit judges that the measurement value of the second temperature sensor is lower than the condensation temperature of the precursor supplied to the vaporizer, the third heater arranged inside the storage tank is started. When the temperature control unit judges that the measurement value of the second temperature sensor is higher than the condensation temperature of the precursor supplied to the vaporizer, the third heater is stopped.

10. The control method of the carburetor anti-blocking device according to claim 9, characterized in that: The control method of the vaporizer anti-blocking device is implemented by performing the following steps before the pump operation step: a heater stop condition judging step, when the carburetor control unit receives the gas detection signal from the gas detection sensor, judging that the stop conditions of the first heater and the second heater are satisfied; and The heater stopping step is implemented after the above-mentioned heater stopping condition judging step. When the above-mentioned vaporizer control unit receives the input of the gas detection signal of the above-mentioned gas detection sensor and judges that the heater stopping condition is met in the above-mentioned heater stopping condition judging step, the above-mentioned electronic contactor is controlled to be in a closed state to stop the above-mentioned first heater and the above-mentioned second heater from working.

11. The control method of the carburetor anti-blocking device according to claim 10, characterized in that: In the above-mentioned pump operation steps, when the above-mentioned temperature control unit directly receives the gas detection signal of the above-mentioned gas detection sensor or the shutdown signal of the above-mentioned electronic contactor from the above-mentioned gas detection sensor and the above-mentioned electronic contactor or receives the gas detection signal of the above-mentioned gas detection sensor or the shutdown signal of the above-mentioned electronic contactor from the above-mentioned vaporizer control unit, it is determined that the heater stop condition is met and the above-mentioned pump is started.

12. The control method of the carburetor anti-blocking device according to claim 9, characterized in that: The condensation temperature of the precursor follows a vapor pressure curve of the precursor supplied to the vaporizer, and data of the vapor pressure curve is input in advance to the temperature control unit.

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