Device and method for detecting damage of laser diaphragm

By installing a detection light generation device and a photoelectric probe in the laser, the optical performance of the window sheet is detected, and the burning and breakdown problems caused by contamination or damage of the window sheet is solved, thereby improving the safety and stability of the laser.

CN120063658APending Publication Date: 2025-05-30LAZON MEDICAL LASER CO LTD
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Patent Information

Application Number
CN202311598358.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-11-28
Publication Date
2025-05-30

AI Technical Summary

Technical Problem

During use, high-power laser window sheets are easily burned due to the absorption of laser energy by pollutants. High-energy pulsed lasers may cause lens breakdown, causing debris to splash, damage the laser, and even cause fire.

Method used

By adding a detection light generation device and a photoelectric probe to the laser, the transmission, reflected or scattered light intensity of the window sheet is detected by detecting the transmission, reflected or scattered light of the window sheet. When the light intensity is lower than the set value, the control system shuts down the laser to emit.

Benefits of technology

Effectively detect damage or contamination of the window sheet, avoid burning or breaking down of the window sheet, prevent laser damage and fire, and do not increase the cost of laser equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to a laser diaphragm damage detection device and method.The laser diaphragm damage detection device comprises a detection light generating device and a photoelectric probe, detection light emitted by the detection light generating device is emitted to a diaphragm, and the detection light points to the intersection point of laser and the diaphragm; the detection light passing through the intersection point of the laser and the diaphragm is received by the photoelectric probe, and the photoelectric probe is connected with a control system for controlling the laser generating device to start and stop. According to the invention, by simply adding the detection light generating device and the photoelectric probe, the damage condition of the diaphragm can be effectively detected under the condition that the cost of laser equipment is not obviously increased, and the mounting positions of the detection light generating device and the photoelectric probe can be flexibly selected according to actual requirements, so that the use flexibility is improved.
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Description

Technical Field

[0001] The present invention relates to the field of lasers, and more specifically to a device and method for detecting damage to a laser window plate. Background Art

[0002] During the use of high-power lasers, a protective window plate is often installed at the light output port to prevent dust or impurities from entering the laser and damaging the optical components. In some high-power laser fiber coupling systems, a similar window plate is also required to be installed between the optical fiber and the coupling mirror to prevent the splashes generated by the burning of the optical fiber from damaging the coupling mirror. Since these window plates are in direct contact with the external environment, they are very likely to be contaminated. At this time, if the laser is working, these contaminants will absorb a large amount of laser energy and generate high temperature, thereby burning the window plate. Even if the window plate is not contaminated, when high-power continuous laser passes through the window plate, it will heat the lens and cause the lens to burn. When high-energy pulsed laser passes through the window plate, it may cause the lens to be punctured. At this time, this fault must be detected and the laser emission should be quickly cut off. Otherwise, the window plate will continue to melt and crack, and the generated fragments may splash into the laser and cause damage to the laser. More seriously, it may cause dangers such as fire. Summary of the Invention

[0003] The purpose of the present invention is to provide a device and method for detecting damage to a laser window plate. By simply adding two components, namely a detection light generating device and a photoelectric probe, the damage condition of the window plate can be effectively detected without significantly increasing the cost of the laser device. Moreover, the installation positions of the detection light generating device and the photoelectric probe can be flexibly selected according to actual needs, improving the flexibility of use.

[0004] The purpose of the present invention is achieved by the following technical solutions:

[0005] A device for detecting damage to a laser window plate includes a detection light generating device and a photoelectric probe. The detection light emitted by the detection light generating device is directed towards the window plate, and the detection light points to the intersection point of the laser and the window plate. The detection light passing through the intersection point of the laser and the window plate is received by the photoelectric probe, and the photoelectric probe is connected to a control system for starting and stopping the laser generating device.

[0006] The detection light generating device and the photoelectric probe are respectively arranged on both sides of the window plate and are arranged in a straight line. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window plate, the transmitted light formed by the detection light passing through the window plate is received by the photoelectric probe.

[0007] The detection light generating device and the photoelectric probe are located on the same side of the window plate and are respectively arranged on both sides of the laser. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window plate, the reflected light formed by the detection light being reflected by the window plate is received by the photoelectric probe.

[0008] The detection light generating device is arranged on either side of the window pane. The photoelectric probe is arranged on either side of the window pane and avoids the direct transmission path of the transmitted light and the reflection path of the reflected light after the detection light passes through the intersection point of the laser and the window pane. Moreover, the scattered light formed after the detection light generated by the detection light generating device passes through the intersection point of the laser and the window pane is received by the photoelectric probe.

[0009] The laser generating device serves as the detection light generating device. The photoelectric probe is arranged on either side of the window pane and on either side of the laser. Moreover, the scattered light formed after the laser passes through the window pane is received by the photoelectric probe.

[0010] A condenser lens for increasing the light input amount is provided on the front side of the photoelectric probe.

[0011] A filter that only allows the detection light to pass through is provided on the front side of the photoelectric probe.

[0012] A method for a laser window pane damage detection device according to the above includes the following steps:

[0013] Step 1: Determine whether to directly use the laser generating device as the detection light generating device or use a separate detection light generating device according to the situation of the laser device. If directly using the laser generating device as the detection light generating device, determine the installation position, specifications, and trigger light intensity parameters of the photoelectric probe. If using a separate detection light generating device, go to Step 2;

[0014] Step 2: If using a separate detection light generating device, determine the installation positions of the detection light generating device and the photoelectric probe according to the situation of the laser device, and determine the specifications and trigger light intensity parameters of the photoelectric probe, including:

[0015] 1. The detection light generating device and the photoelectric probe are respectively arranged on both sides of the window pane and are arranged in a straight line. Moreover, after the detection light generated by the detection light generating device passes through the intersection point of the laser and the window pane, the transmitted light part formed by the detection light passing through the window pane can be received by the photoelectric probe. When the light intensity of the transmitted light detected by the photoelectric probe is less than the set trigger light intensity parameter, the photoelectric probe sends a signal to the control system, and the control system controls the laser generating device to stop;

[0016] 2. The detection light generating device and the photoelectric probe are on the same side of the window pane and are respectively arranged on both sides of the laser. Moreover, after the detection light generated by the detection light generating device passes through the intersection point of the laser and the window pane, the reflected light part formed by the detection light being reflected by the window pane can be received by the photoelectric probe. When the light intensity of the reflected light detected by the photoelectric probe is less than the set trigger light intensity parameter, the photoelectric probe sends a signal to the control system, and the control system controls the laser generating device to stop;

[0017] 3. The detection light generating device is arranged on either side of the window pane, and the optoelectronic probe is arranged on either side of the window pane while avoiding the direct transmission path of the transmitted light and the reflection path of the reflected light after the detection light passes through the intersection point of the laser and the window pane. A part of the scattered light formed when the detection light passes through the window pane is received by the optoelectronic probe. When the light intensity of the scattered light detected by the optoelectronic probe is greater than the set trigger light intensity parameter, the optoelectronic probe sends a signal to the control system, and the control system controls the laser generating device to stop.

[0018] When directly using the laser generating device as the detection light generating device, the optoelectronic probe is arranged on either side of the window pane and on either side of the laser. The position, specifications, and trigger light intensity parameter of the optoelectronic probe are determined according to the scattered light situation formed after the laser passes through the window pane. When the light intensity of the laser scattered light detected by the optoelectronic probe is greater than the trigger light intensity parameter, the optoelectronic probe sends a signal to the control system, and the control system controls the laser generating device to stop.

[0019] The advantages and positive effects of the present invention are as follows:

[0020] By simply adding two components, namely the detection light generating device and the optoelectronic probe, the present invention can effectively detect the damage of the window pane without significantly increasing the cost of the laser equipment. Moreover, the installation positions of the detection light generating device and the optoelectronic probe can be flexibly selected according to actual needs, improving the flexibility of use. The present invention can also detect the pollution situation of the window pane, enabling users to timely discover potential hazards before the window pane is burned out and eliminate the hazards by cleaning the lens. Description of the Drawings

[0021] Figure 1 It is a schematic diagram of the working state of Embodiment 1 of the present invention.

[0022] Figure 2 It is a schematic diagram of the working state of Embodiment 2 of the present invention.

[0023] Figure 3 It is a schematic diagram of the working state of Embodiment 3 of the present invention.

[0024] Figure 4 It is a schematic diagram of the working state of Embodiment 4 of the present invention.

[0025] Among them, 1 is the optoelectronic probe, 2 is the window pane, and 3 is the damaged part of the window. Detailed Embodiment

[0026] The present invention will be further described in detail below with reference to the drawings.

[0027] As Figures 1 to 4As shown in the figure, the present invention includes a detection light generating device and a photoelectric probe 1. The detection light emitted by the detection light generating device is directed towards the window pane 2, and the detection light is directed towards the intersection point of the laser and the window pane 2. The detection light passing through the intersection point of the laser and the window pane 2 is received by the photoelectric probe 1, and the photoelectric probe 1 is connected to a control system that controls the start and stop of the laser generating device. Both the detection light generating device and the laser generating device are commercially available products.

[0028] According to the actual situation, the present invention can arrange the detection light generating device and the photoelectric probe 1 at appropriate positions on both sides of the window pane 2, or directly use the laser generating device as the detection light generating device.

[0029] Embodiment 1:

[0030] As Figure 1 shown in the figure, in this embodiment, the detection light generating device and the photoelectric probe 1 are respectively arranged on both sides of the window pane 2 and are arranged in a straight line. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window pane 2, the transmitted light part formed by the detection light passing through the window pane 2 is received by the photoelectric probe 1. When the window pane 2 is not damaged or contaminated, the detection light can pass through the window pane 2 normally and be received by the photoelectric probe 1. Once the window pane 2 is damaged or contaminated, the damaged part 3 of the window will absorb and obstruct a large amount of the detection light from propagating in the original direction, and the light intensity of the transmitted light received by the photoelectric probe 1 will be significantly reduced.

[0031] In an application example of this embodiment, the detection light generating device can use a low-power laser module with a power of 1 to 10 mW. For an undamaged window pane 2, about 90% of the detection light power can pass through the lens. However, for a damaged window pane 2, only about 10 - 40% of the detection light can pass through the window pane 2 smoothly. The above 2 - 9 times difference in transmittance is sufficient to determine whether the window pane 2 is damaged. The photoelectric probe 1 can use an ordinary photodiode, whose detection spectral range is generally 400 - 1100 nm, and the photoelectric conversion efficiency is about 0.3 mA / mW. Thus, a detection current in the mA level can be obtained, which can be very easily amplified and detected.

[0032] Embodiment 2:

[0033] As Figure 2As shown, in this embodiment, the detection light generating device and the photoelectric probe 1 are located on the same side (inside or outside of the window pane 2) of the window pane 2 and are disposed on both sides of the laser. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window pane 2, a part of the reflected light formed by the reflection of the detection light by the window pane 2 is received by the photoelectric probe 1. For an uncoated window pane 2, the light intensity of its reflected light is generally about 4-8% of the light intensity of the detection light. When the window pane 2 is not damaged or contaminated, the detection light can be normally reflected by the window pane 2 and received by the photoelectric probe 1. Once the window pane 2 is damaged or contaminated, the damaged part 3 of the window will absorb a large amount of the detection light, and the broken deformation generated by the damaged part 3 of the window cannot form a specular reflection. Therefore, the part of the reflected light of the detection light will be greatly reduced, and the light intensity of the reflected light received by the photoelectric probe 1 will also be significantly reduced. Thus, it can be determined that the window pane 2 has been damaged or contaminated.

[0034] In an application example of this embodiment, the detection light generating device can use a low-power laser module with a power of 1-10 mW. For an undamaged window pane 2, about 8% of the optical power is reflected. However, for a damaged window pane 2, only about 1-2% of the detection light is reflected to form the reflected light. The difference in reflectivity of 4-8 times is sufficient to determine whether the window pane 2 is damaged. The photoelectric probe 1 can use an ordinary photodiode. The detection spectral range is generally 400-1100 nm, and the photoelectric conversion efficiency is about 0.3 mA / mW. Thus, a detection current in the range of dozens to hundreds of μA can be obtained and can be amplified and detected.

[0035] Embodiment 3:

[0036] As Figure 3 shown, in this embodiment, the detection light generating device is disposed on either side (inside or outside) of the window pane 2, and the photoelectric probe 1 is disposed on either side (inside or outside) of the window pane 2 and avoids the direct path and the reflection path of the detection light after passing through the intersection point of the laser and the window pane 2. That is, since the scattered light diverges in all directions, the photoelectric probe 1 can be disposed at an appropriate position along the circumferential direction around the damaged part 3 of the window by 360 degrees, as long as it avoids the direct path and the reflection path of the detection light after passing through the intersection point of the laser and the window pane 2, and ensures that the part of the scattered light formed by the detection light passing through the window pane 2 can be received by the photoelectric probe 1. When the window pane 2 is not damaged or contaminated, the scattered light generated when the detection light passes through the window pane 2 can be ignored, and the light intensity of the scattered light detected by the photoelectric probe 1 is very weak. Once the window pane 2 is damaged or contaminated, the damaged part 3 of the window will scatter the detection light in all directions and form a bright spot, and the light intensity of the scattered light detected by the photoelectric probe 1 will increase significantly. Thus, it can be determined that the window pane 2 has been damaged or contaminated.

[0037] In an application example of this embodiment, a low-power laser module with a power of 1 to 10 mW can be used as the detection light. For the undamaged window pane 2, only about 0.01% of the light power can reach the photoelectric probe 1 through scattering. However, for the damaged window pane 2, about 0.1% of the laser light can reach the photoelectric probe 1 through scattering. The above-mentioned 10-fold difference in the intensity of scattered light is sufficient to determine whether the window pane 2 is damaged. Since the intensity of scattered light is weak, although an ordinary photodiode can also be used for the photoelectric probe 1, a circuit with a large magnification factor must be used for amplification, which may introduce relatively large noise. Therefore, an avalanche photodiode is more recommended in this embodiment. Its detection spectral range is generally between 400 and 1100 nm, and the photoelectric conversion efficiency under a 100-fold amplification factor is about 30 mA / mW. Thus, a detection current in the order of dozens of μA can be obtained and can be amplified and detected.

[0038] Embodiment 4:

[0039] As Figure 4 shown, in this embodiment, the laser generating device is directly used as the detection light generating device. The photoelectric probe 1 is arranged on either side (inside or outside) of the window pane 2 and on either side of the laser, and a part of the scattered light formed after the laser passes through the window pane 2 is received by the photoelectric probe 1. Compared with the above-mentioned Embodiment 3, this embodiment is simpler and has lower cost. Moreover, generally, the high-power laser power is between 100 and 10,000 W, which is more than 100,000 times the detection light power in Scheme 3. Therefore, the scattered light is very strong, and the difference in the intensity of scattered light is also greater. It is very easy to use an ordinary photodiode with lower cost for detection.

[0040] In the above-mentioned embodiments, in order to increase the signal intensity and enhance the signal-to-noise ratio, a condenser lens can be added in front of the photoelectric probe 1 according to actual needs to increase the light input amount. At the same time, in order to prevent the interference of ambient light, a filter can also be added in front of the photoelectric probe 1 to filter out other light outside the detection light band and only allow the detection light to pass through.

[0041] The design of the present invention includes the following steps:

[0042] Step 1: Determine whether to directly use the laser generating device as the detection light generating device or use a separate detection light generating device according to the situation of the laser device. If the laser generating device is directly used as the detection light generating device, determine the installation position, specifications, and trigger light intensity parameters of the photoelectric probe 1. If a separate detection light generating device is used, go to Step 2;

[0043] When the laser generating device is directly used as the detection light generating device, as Figure 4As shown in the figure, the photoelectric probe 1 is arranged on either side of the window piece 2 and on either side of the laser. The position, specifications and trigger light intensity parameters of the photoelectric probe 1 are determined according to the scattered light situation formed after the laser passes through the window piece 2. When the light intensity of the laser scattered light detected by the photoelectric probe 1 is greater than the trigger light intensity parameter, the photoelectric probe 1 sends a signal to the control system, and the control system controls the laser generating device to stop running;

[0044] Step 2: If a separate detection light generating device is used, determine the installation positions of the detection light generating device and the photoelectric probe 1 according to the laser device situation, and determine the specifications and trigger light intensity parameters of the photoelectric probe 1, including:

[0045] I. The detection light generating device and the photoelectric probe 1 are arranged on both sides of the window piece 2 and are arranged in a straight line. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece 2, the transmitted light part formed after the detection light passes through the window piece 2 can be received by the photoelectric probe 1. When the light intensity of the transmitted light detected by the photoelectric probe 1 is less than the set trigger light intensity parameter, the photoelectric probe 1 sends a signal to the control system, and the control system controls the laser generating device to stop running;

[0046] II. The detection light generating device and the photoelectric probe 1 are on the same side of the window piece 2 and are arranged on both sides of the laser. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece 2, the reflected light part formed after the detection light is reflected by the window piece 2 can be received by the photoelectric probe 1. When the light intensity of the reflected light detected by the photoelectric probe 1 is less than the set trigger light intensity parameter, the photoelectric probe 1 sends a signal to the control system, and the control system controls the laser generating device to stop running;

[0047] III. The detection light generating device is arranged on either side of the window piece 2, the photoelectric probe 1 is arranged on either side of the window piece 2 and avoids the direct light path of the transmitted light and the reflected light path of the reflected light after the detection light passes through the intersection point of the laser and the window piece 2. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece 2, the scattered light part formed after the detection light passes through the window piece 2 is received by the photoelectric probe 1. When the light intensity of the scattered light detected by the photoelectric probe 1 is greater than the set trigger light intensity parameter, the photoelectric probe 1 sends a signal to the control system, and the control system controls the laser generating device to stop running.

Claims

1. A laser window damage detection device, characterized in that: It includes a detection light generating device and a photoelectric probe (1). The detection light emitted by the detection light generating device is directed towards the window piece (2), and the detection light points to the intersection point of the laser and the window piece (2). The detection light passing through the intersection point of the laser and the window piece (2) is received by the photoelectric probe (1), and the photoelectric probe (1) is connected to a control system that controls the start and stop of the laser generating device.

2. The laser window damage detection device according to claim 1, characterized in that: The detection light generating device and the photoelectric probe (1) are arranged on both sides of the window piece (2) and are arranged in a straight line. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece (2), the transmitted light formed by the detection light passing through the window piece (2) is received by the photoelectric probe (1).

3. The laser window damage detection device according to claim 1, characterized in that: The detection light generating device and the photoelectric probe (1) are on the same side of the window piece (2) and are arranged on both sides of the laser. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece (2), the reflected light formed by the detection light being reflected by the window piece (2) is received by the photoelectric probe (1).

4. The laser window damage detection device according to claim 1, characterized in that: The detection light generating device is arranged on either side of the window piece (2), and the photoelectric probe (1) is arranged on either side of the window piece (2) and avoids the direct light path of the transmitted light and the reflected light path of the reflected light after the detection light passes through the intersection point of the laser and the window piece (2). The scattered light formed after the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece (2) is received by the photoelectric probe (1).

5. The laser window damage detection device according to claim 1, characterized in that: The laser generating device is used as the detection light generating device, and the photoelectric probe (1) is arranged on either side of the window piece (2) and on either side of the laser. The scattered light formed after the laser passes through the window piece (2) is received by the photoelectric probe (1).

6. The laser window damage detection device according to claim 1, characterized in that: A condenser lens for increasing the light input amount is provided in front of the photoelectric probe (1).

7. The laser window damage detection device according to claim 1, characterized in that: A filter that only allows the detection light to pass through is provided in front of the photoelectric probe (1).

8. A method for the laser window damage detection device according to claim 1, characterized in that: It includes the following steps: Step 1: Determine whether to directly use the laser generating device as the detection light generating device or use a separate detection light generating device according to the situation of the laser device. If directly using the laser generating device as the detection light generating device, determine the installation position, specifications, and trigger light intensity parameters of the photoelectric probe (1). If using a separate detection light generating device, go to Step 2; Step 2: If a separate detection light generating device is adopted, determine the installation positions of the detection light generating device and the photoelectric probe (1) according to the laser device, and determine the specifications of the photoelectric probe (1) and the trigger light intensity parameters, including:

1. The detection light generating device and the photoelectric probe (1) are respectively arranged on both sides of the window piece (2) and in a straight line. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece (2), the transmitted light part formed by the detection light passing through the window piece (2) can be received by the photoelectric probe (1). When the light intensity of the transmitted light detected by the photoelectric probe (1) is less than the set trigger light intensity parameter, the photoelectric probe (1) sends a signal to the control system, and the control system controls the laser generating device to stop; 2. The detection light generating device and the photoelectric probe (1) are on the same side of the window piece (2) and are respectively arranged on both sides of the laser. After the detection light generated by the detection light generating device passes through the intersection point of the laser and the window piece (2), the reflected light part formed by the detection light being reflected by the window piece (2) can be received by the photoelectric probe (1). When the light intensity of the reflected light detected by the photoelectric probe (1) is less than the set trigger light intensity parameter, the photoelectric probe (1) sends a signal to the control system, and the control system controls the laser generating device to stop; 3. The detection light generating device is arranged on either side of the window piece (2), the photoelectric probe (1) is arranged on either side of the window piece (2) and avoids the direct light path of the transmitted light and the reflected light path of the reflected light after the detection light passes through the intersection point of the laser and the window piece (2). The scattered light part formed by the detection light passing through the window piece (2) is received by the photoelectric probe (1). When the light intensity of the scattered light detected by the photoelectric probe (1) is greater than the set trigger light intensity parameter, the photoelectric probe (1) sends a signal to the control system, and the control system controls the laser generating device to stop.

9. The method for the laser window piece damage detection device according to claim 8, characterized in that: When directly using the laser generating device as the detection light generating device, the photoelectric probe (1) is arranged on either side of the window piece (2) and on either side of the laser. Determine the position, specifications and trigger light intensity parameters of the photoelectric probe (1) according to the scattered light situation formed after the laser passes through the window piece (2). When the light intensity of the laser scattered light detected by the photoelectric probe (1) is greater than the trigger light intensity parameter, the photoelectric probe (1) sends a signal to the control system, and the control system controls the laser generating device to stop.