Electronic paper display and manufacturing method of array substrate

Abstract

The invention discloses an electronic paper display and a manufacturing method of an array substrate, the electronic paper display comprises the array substrate, an opposite substrate arranged opposite to the array substrate and ink capsules located between the array substrate and the opposite substrate, and black particles and white particles with opposite polarities are arranged in all the ink capsules. The array substrate is located on the side, close to the external environment, of the electronic paper display, a touch electrode, a touch signal line and a pixel electrode are arranged on the side, facing the ink capsule, of the array substrate, the touch electrode and the touch signal line are located between the pixel electrode and the array substrate, the touch electrode is electrically connected with the corresponding touch signal line, and the touch signal line is electrically connected with the array substrate. And a first common electrode matched with the pixel electrode is arranged on the opposite substrate. The array substrate is arranged on the side, close to the external environment, of the electronic paper display, and the touch electrode and the touch signal line are arranged on the side, facing the ink capsule, of the array substrate, so that the electronic paper display achieves an In-cell touch mode.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic paper displays, and particularly to an electronic paper display and a manufacturing method of an array substrate. Background Art

[0002] The display panel has the advantages of being thin, light, durable, and low power consumption meeting energy conservation and environmental protection requirements. However, it needs to be used with a backlight, resulting in a thick module and high cost. The electronic paper display (reflective display) has become a display that meets the needs of the public. The electronic paper display can use external light sources to display images, unlike liquid crystal displays that require a backlight. Therefore, in an outdoor environment with strong sunlight, the information on the electronic paper can still be clearly seen without the problem of viewing angles. Moreover, due to its advantages such as power saving, high reflectivity, and contrast ratio, the electronic paper display is now widely used in electronic readers (such as e-books, e-newspapers) or other electronic components (such as price tags).

[0003] Existing electronic paper displays usually adopt E-Ink microcapsule technology (microcapsule electronic ink technology), SiPix microcup technology (microcup electrophoretic display technology), Bridgestone electronic liquid powder technology, cholesteric liquid crystal display (CLCD) technology, microelectromechanical systems (MEMS) technology, or electrowetting technology. However, the existing electronic paper display technology is not as mature as liquid crystal display technology, with low mass production efficiency and relatively high manufacturing costs. Moreover, since the existing electronic paper display forms a vertical electric field between the pixel electrode and the common electrode to control the picture, in order not to affect the normal display of the picture, the existing electronic paper display usually adopts an on-cell touch method and cannot achieve an in-cell touch method, that is, the touch electrode cannot be set on the array substrate. If the touch electrode is set on the array substrate, it will interfere with the pixel electrode and the common electrode, either the touch function cannot be achieved or the display image quality is poor. Summary of the Invention

[0004] In order to overcome the disadvantages and deficiencies existing in the prior art, the purpose of the present invention is to provide an electronic paper display and a manufacturing method of an array substrate to solve the problem that the in-cell touch method cannot be achieved in the prior art for electronic paper displays.

[0005] The purpose of the present invention is achieved by the following technical solutions: The present invention provides an electronic paper display, which includes an array substrate, a counter substrate disposed opposite to the array substrate, and ink capsules located between the array substrate and the counter substrate. Oppositely polarized black particles and white particles are provided in all the ink capsules. The array substrate is located on the side of the electronic paper display close to the external environment. A touch electrode, a touch signal line, and a pixel electrode are provided on the side of the array substrate facing the ink capsules. The touch electrode and the touch signal line are both located between the pixel electrode and the array substrate. The touch electrode is electrically connected to the corresponding touch signal line. A first common electrode is provided on the counter substrate and is matched with the pixel electrode.

[0006] Further, a second common electrode is provided on the side of the array substrate facing the ink capsules. A storage capacitor is formed between the second common electrode and the pixel electrode.

[0007] Further, the second common electrode is located on the side of the pixel electrode away from the ink capsules. The touch electrode and the touch signal line are both located between the second common electrode and the array substrate.

[0008] Further, a plurality of scan lines, a plurality of data lines, and a plurality of thin film transistors are provided on the array substrate. The plurality of scan lines and the plurality of data lines are insulated and cross each other to define a plurality of pixel units. A thin film transistor and a pixel electrode are provided in each pixel unit. The pixel electrode is electrically connected to the data line adjacent to the thin film transistor through the thin film transistor.

[0009] Further, the scan lines, the data lines, and the thin film transistors are all located on the side of the touch electrode and the touch signal line facing the ink capsules, and are all located on the side of the pixel electrode away from the ink capsules.

[0010] Further, the projection of the touch signal line on the array substrate is located within the projection area of the scan line or the data line on the array substrate.

[0011] The present application also provides a manufacturing method of an array substrate for manufacturing the array substrate as described above. The manufacturing method includes: Providing a substrate; Forming a first metal layer and a first transparent conductive layer on the substrate, etching the first metal layer to form a patterned touch signal line, etching the first transparent conductive layer to form a patterned touch electrode. The touch electrode is electrically connected to the corresponding touch signal line. A first insulating layer is provided between the first metal layer and the first transparent conductive layer; Form a second insulating layer on the substrate to cover the first metal layer and the first transparent conductive layer; Form a second metal layer on the second insulating layer, etch the second metal layer and form patterned scan lines and gates, and the gates are conductively connected to the scan lines; Form a third insulating layer on the second insulating layer to cover the second metal layer; Form a semiconductor layer on the third insulating layer, etch the semiconductor layer and form an active layer corresponding to the gates; Form a third metal layer on the third insulating layer to cover the semiconductor layer, etch the third metal layer and form patterned data lines, source electrodes and drain electrodes, the source electrodes are conductively connected to the data lines, and the source electrodes and the drain electrodes are connected through the active layer; Form a fourth insulating layer above the third insulating layer to cover the semiconductor layer and the third metal layer; Form a second transparent conductive layer on the fourth insulating layer, etch the second transparent conductive layer and form a patterned pixel electrode, and the pixel electrode is electrically connected to the drain electrode.

[0012] Further, the manufacturing method includes: Form a third transparent conductive layer on the fourth insulating layer, etch the third transparent conductive layer and form a patterned second common electrode; Form a fifth insulating layer on the fourth insulating layer to cover the third transparent conductive layer, both the third transparent conductive layer and the fifth insulating layer are located between the fourth insulating layer and the second transparent conductive layer, and the third transparent conductive layer and the second transparent conductive layer are insulated and spaced apart from each other through the fifth insulating layer.

[0013] Further, the manufacturing method includes: The first metal layer is in contact with the surface of the substrate, and the first transparent conductive layer is located on the side of the first insulating layer away from the first metal layer; Or, the first transparent conductive layer is in contact with the surface of the substrate, and the first metal layer is located on the side of the first insulating layer away from the first transparent conductive layer.

[0014] Further, the manufacturing method includes: The projection of the touch signal line on the substrate is located within the projection area of the scan line or the data line on the substrate.

[0015] The beneficial effects of the present invention are as follows: By arranging the array substrate on the side of the electronic paper display close to the external environment, and arranging the touch electrodes and touch signal lines on the side of the array substrate facing the ink capsules, the electronic paper display realizes the In-cell touch method; moreover, both the touch electrodes and touch signal lines are located between the pixel electrodes and the array substrate, avoiding the problem of mutual interference between the touch signals and the pixel driving signals, so that the electronic paper display has good touch effects and display image quality. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the electronic paper display in the initial state in Embodiment 1 of the present invention.

[0017] Figure 2 It is a schematic structural diagram of the array substrate in Embodiment 1 of the present invention.

[0018] Figure 3 It is a schematic plan view of the touch electrodes and touch signal lines in Embodiment 1 of the present invention.

[0019] Figure 4 It is a schematic plan view of the array substrate in Embodiment 1 of the present invention.

[0020] Figure 5 It is a schematic structural diagram of the electronic paper display in the black state in Embodiment 1 of the present invention.

[0021] Figure 6 It is a schematic structural diagram of the electronic paper display in the white state in Embodiment 1 of the present invention.

[0022] Figure 7 It is a schematic structural diagram of the electronic paper display in the picture display state in Embodiment 1 of the present invention.

[0023] Figures 8a to 16b It is a schematic flow chart of the manufacturing method of the array substrate in Embodiment 1 of the present invention.

[0024] Figure 17 It is a schematic structural diagram of the array substrate in Embodiment 2 of the present invention. Detailed Embodiments

[0025] To further elaborate on the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following, in combination with the accompanying drawings and preferred embodiments, details the specific embodiments, structures, features, and effects of the electronic paper display and the manufacturing method of the array substrate proposed according to the present invention are described in detail as follows: [Embodiment 1] Figure 1 It is a schematic structural diagram of the electronic paper display in the initial state in Embodiment 1 of the present invention. Figure 2It is a schematic structural diagram of the array substrate in Embodiment 1 of the present invention. Figure 3 It is a schematic plan view of the touch electrode and the touch signal line in Embodiment 1 of the present invention. Figure 4 It is a schematic plan view of the array substrate in Embodiment 1 of the present invention.

[0026] As Figures 1 to 4 shown, an electronic paper display provided in Embodiment 1 of the present invention includes an array substrate 10, a counter substrate 20 disposed opposite to the array substrate 10, and ink capsules 30 located between the array substrate 10 and the counter substrate 20. Oppositely polarized black particles 31 and white particles 32 are provided in all the ink capsules 30. The array substrate 10 is located on the side of the electronic paper display close to the external environment (i.e., the side that is touched by a finger when a user uses the electronic paper display), and the counter substrate 20 is located on the side of the electronic paper display away from the external environment. By providing electric fields in different directions to the ink capsules 30, the black particles 31 and the white particles 32 can move in corresponding directions. For example, the black particles 31 are negatively charged and the white particles 32 are positively charged, so that the white particles 32 move in the direction of the electric field and the black particles 31 move in the opposite direction of the electric field. If an upward electric field is provided, the white particles 32 move upward and the black particles 31 move downward; if a downward electric field is provided, the white particles 32 move downward and the black particles 31 move upward. Of course, it is also possible that the black particles 31 are positively charged and the white particles 32 are negatively charged, so that the black particles 31 move in the direction of the electric field and the white particles 32 move in the opposite direction of the electric field.

[0027] A pixel electrode 171 is provided on the side of the array substrate 10 facing the ink capsules 30, and a first common electrode 21 is provided on the counter substrate 20 and is matched with the pixel electrode 171. Among them, the first common electrode 21 is a planar electrode that entirely covers the counter substrate 20, and the pixel electrode 171 is a block-shaped electrode corresponding to the pixel unit P. The pixel electrodes 171 correspond to the pixel units P one by one, and one pixel unit P can correspond to one or more ink capsules 30. By controlling the voltage polarity on the pixel electrode 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is controlled, so as to control the switching of the ink capsules 30 between the black state (light absorption state) and the white state (light reflection state). For example, if a 0V common voltage is applied to the first common electrode 21, and a positive-polarity voltage is applied to the pixel electrode 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is towards the first common electrode 21; if a negative-polarity voltage is applied to the pixel electrode 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is towards the pixel electrode 171.

[0028] As Figure 2 and Figure 4As shown, a plurality of scan lines 131, a plurality of data lines 151, and a plurality of thin film transistors 1 are provided on the array substrate 10. The plurality of scan lines 131 and the plurality of data lines 151 are insulated and cross each other to define a plurality of pixel units P. A thin film transistor 1 and a pixel electrode 171 are provided in each pixel unit P. The pixel electrode 171 is electrically connected to the data line 151 adjacent to the thin film transistor 1 through the thin film transistor 1. Among them, the thin film transistor 1 includes a gate 132, an active layer 141, a source 152, and a drain 153. The gate 132 and the scan line 131 are located on the same layer and electrically connected. The gate 132 and the active layer 141 are separated by a gate insulating layer. The source 152 and the data line 151 are located on the same layer and electrically connected. The drain 153 and the pixel electrode 171 are electrically connected through a contact hole.

[0029] As Figure 2 and Figure 3 As shown, a touch electrode 121 and a touch signal line 111 are provided on one side of the array substrate 10 facing the ink capsule 30. The touch electrode 121 is electrically connected to the corresponding touch signal line 111. The touch electrode 121 and the touch signal line 111 are both located between the pixel electrode 171 and the array substrate 10, so that the touch electrode 121 and the touch signal line 111 will not shield the vertical electric field formed between the pixel electrode 171 and the first common electrode 21. Instead, they can shield the influence of the external electric field on the vertical electric field formed between the pixel electrode 171 and the first common electrode 21. Among them, the touch electrode 121 is a block electrode. A plurality of touch electrodes 121 are arranged in an array. Each touch electrode 121 can correspond to a plurality of pixel units P, that is, the projection of the touch electrode 121 on the array substrate 10 covers a plurality of pixel units P. One end of the touch signal line 111 is electrically connected to the touch electrode 121, and the other end of the touch signal line 111 is electrically connected to the touch chip. The touch chip applies a touch signal to the corresponding touch electrode 121 through a plurality of touch signal lines 111. The touch electrode 121 and the touch signal line 111 are located on different layers and are electrically connected through a contact hole. Preferably, the touch signal line 111 is provided on the surface of the array substrate 10 facing the ink capsule 30 and is in direct contact with the surface of the array substrate 10, so as to avoid interference between the touch signal on the touch signal line 111 and the electrical signal on the thin film transistor 1 or the pixel electrode 171. Moreover, by arranging the touch electrode 121 and the touch signal line 111 on the array substrate 10, a flexible printed circuit (FPC) can be used for the gate driving circuit or the source driving circuit on the array substrate 10, saving FPC materials.

[0030] Further, the projection of the touch signal line 111 on the array substrate 10 is located within the projection area of the data line 151 on the array substrate 10, thereby reducing or avoiding the touch signal line 111 from blocking light and affecting the light transmittance. Of course, the projection of the touch signal line 111 on the array substrate 10 may also be located within the projection area of the scan line 131 on the array substrate 10.

[0031] In this embodiment, as Figure 2 shown, a second common electrode 161 is provided on the side of the array substrate 10 facing the ink capsule 30. The second common electrode 161 is a planar electrode that entirely covers the array substrate 10. A storage capacitor is formed between the second common electrode 161 and the pixel electrode 171. In existing electronic paper displays, a metal common electrode trace located on the same layer as the scan line 131 or the data line 151 is usually provided to form a storage capacitor with the pixel electrode 171, which results in a reduced aperture ratio of the electronic paper display. In this embodiment, by additionally providing a transparent second common electrode 161, not only can a storage capacitor be formed with the pixel electrode 171, but also the aperture ratio of the electronic paper display can be increased.

[0032] Further, the second common electrode 161 is located on the side of the pixel electrode 171 away from the ink capsule 30. The touch electrode 121 and the touch signal line 111 are both located between the second common electrode 161 and the array substrate 10. Optionally, the scan line 131, the data line 151, and the thin film transistor 1 are all located on the side of the touch electrode 121 and the touch signal line 111 facing the ink capsule 30, and are all located on the side of the second common electrode 161 away from the ink capsule 30. Thus, the second common electrode 161 can shield the interference of the touch electrode 121, the touch signal line 111, the scan line 131, the data line 151, and the thin film transistor 1 on the driving signal of the pixel electrode 171, avoiding the movement of the particles in the ink capsule 30 from being affected and affecting the display image quality.

[0033] Among them, the array substrate 10 and the counter substrate 20 can be made of materials such as glass, acrylic, and polycarbonate. The materials of the first common electrode 21, the second common electrode 161, the pixel electrode 171, and the touch electrode 121 can be transparent metals such as indium tin oxide (ITO) or indium zinc oxide (IZO). The materials of the scan line 131, the data line 151, and the touch signal line 111 can be metal materials, such as copper (Cu), silver (Ag), chromium (Cr), molybdenum (Mo), aluminum (Al), titanium (Ti), manganese (Mn), nickel (Ni), etc. Of course, the first common electrode 21 can also adopt a metal material.

[0034] Figure 5 is a schematic structural diagram of the electronic paper display in the black state in Embodiment 1 of the present invention. As Figure 5As shown, in the black state, a common voltage of 0V is applied to the first common electrode 21, and corresponding positive and negative voltages are applied to all pixel electrodes 171. For example, the black particles 31 are negatively charged and the white particles 32 are positively charged, such that the white particles 32 move towards the direction of the electric field and the black particles 31 move towards the opposite direction of the electric field. When positive voltages are applied to all pixel electrodes 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is from the pixel electrode 171 towards the first common electrode 21. Then, the white particles 32 move towards the first common electrode 21 and the black particles 31 move towards the pixel electrode 171, making all the ink capsules 30 in the black state.

[0035] Figure 6 is a schematic structural diagram of the electronic paper display in the white state in the first embodiment of the present invention. As Figure 6 shown, in the white state, a common voltage of 0V is applied to the first common electrode 21, and corresponding positive and negative voltages are applied to all pixel electrodes 171. For example, the black particles 31 are negatively charged and the white particles 32 are positively charged, such that the white particles 32 move towards the direction of the electric field and the black particles 31 move towards the opposite direction of the electric field. When negative voltages are applied to all pixel electrodes 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is from the first common electrode 21 towards the pixel electrode 171. Then, the white particles 32 move towards the pixel electrode 171 and the black particles 31 move towards the first common electrode 21, making all the ink capsules 30 in the white state.

[0036] Figure 7 is a schematic structural diagram of the electronic paper display in the screen display state in the first embodiment of the present invention. As Figure 7As shown, in the black-and-white display mode, a common voltage of 0V is applied to the first common electrode 21, and corresponding positive and negative voltages are applied to the pixel electrode 171. For example, the black particles 31 are negatively charged, and the white particles 32 are positively charged, such that the white particles 32 move towards the direction of the electric field, and the black particles 31 move towards the opposite direction of the electric field. When a negative voltage is applied to the pixel electrode 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is from the first common electrode 21 towards the pixel electrode 171, so that the white particles 32 move towards the pixel electrode 171, and the black particles 31 move towards the first common electrode 21, making the corresponding ink capsule 30 in a white state. When a positive voltage is applied to the pixel electrode 171, the direction of the electric field between the pixel electrode 171 and the first common electrode 21 is from the pixel electrode 171 towards the first common electrode 21, so that the white particles 32 move towards the first common electrode 21, and the black particles 31 move towards the pixel electrode 171, making the corresponding ink capsule 30 in a black state. By combining black and white of different pixel units P with each other, the electronic paper display can display black-and-white images using ambient light.

[0037] Figures 8a to 16b is a schematic flow chart of the manufacturing method of the array substrate in Embodiment 1 of the present invention. As Figures 8a to 16b shown, in this embodiment, a manufacturing method of an array substrate is further provided for manufacturing the array substrate 10 as described above. The manufacturing method includes: As Figure 8a and Figure 8b shown, a substrate 10a is provided. The substrate 10a can be made of materials such as glass, quartz, silicon, acrylic, or polycarbonate. The substrate 10a can also be a flexible substrate. Suitable materials for the flexible substrate include, for example, polyethersulfone (PES), polyethylene naphthalate (PEN), polyethylene (PE), polyimide (PI), polyvinyl chloride (PVC), polyethylene terephthalate (PET), or a combination thereof.

[0038] A first metal layer 11 is formed on the substrate 10a. The first metal layer 11 is in direct contact with the surface of the substrate 10a. The first metal layer 11 is etched to form a patterned touch signal line 111. Among them, the first metal layer 11 can be made of a metal such as copper (Cu), silver (Ag), chromium (Cr), molybdenum (Mo), aluminum (Al), titanium (Ti), manganese (Mn), nickel (Ni), etc., or a combination of the above metals such as Al / Mo, Cu / Mo, etc.

[0039] A first insulating layer 101 covering the first metal layer 11 (touch control signal line 111) is formed on the substrate 10a. The first insulating layer 101 is etched to form a first contact hole H1, and the touch control signal line 111 leaks out from the first contact hole H1. Among them, the material of the first insulating layer 101 is silicon oxide (SiOx), silicon nitride (SiNx), or a combination of the two.

[0040] As Figure 9a and Figure 9b shown, a first transparent conductive layer 12 is formed on the first insulating layer 101. The first transparent conductive layer 12 is etched to form a patterned touch control electrode 121. The touch control electrode 121 is electrically connected to the corresponding touch control signal line 111 through the first contact hole H1. The first metal layer 11 and the first transparent conductive layer 12 are spaced apart from each other by the first insulating layer 101. Among them, the first transparent conductive layer 12 can be a transparent conductive material such as indium tin oxide (ITO) or indium zinc oxide (IZO).

[0041] A second insulating layer 102 covering the first transparent conductive layer 12 (touch control electrode 121) is formed on the first insulating layer 101. Among them, the material of the second insulating layer 102 is silicon oxide (SiOx), silicon nitride (SiNx), or a combination of the two.

[0042] As Figure 10a and Figure 10b shown, a second metal layer 13 is formed on the second insulating layer 102. The second metal layer 13 is etched to form a patterned scan line 131 and a gate 132. The gate 132 is conductively connected to the scan line 131. Among them, the second metal layer 13 can be a metal such as copper (Cu), silver (Ag), chromium (Cr), molybdenum (Mo), aluminum (Al), titanium (Ti), manganese (Mn), nickel (Ni), etc., or a combination of the above metals such as Al / Mo, Cu / Mo, etc.

[0043] A third insulating layer 103 covering the second metal layer 13 (scan line 131, gate 132) is formed on the second insulating layer 102. The third insulating layer 103 is a gate insulating layer. Among them, the material of the third insulating layer 103 is silicon oxide (SiOx), silicon nitride (SiNx), or a combination of the two.

[0044] As Figure 11a and Figure 11bAs shown, a semiconductor layer 14 is formed on the third insulating layer 103. The semiconductor layer 14 is etched to form an active layer 141 corresponding to the gate 132. Among them, the semiconductor layer 14 can be made of a metal oxide material, such as indium zinc oxide (InZnO), indium gallium oxide (InGaO), indium tin oxide (InSnO), zinc tin oxide (ZnSnO), gallium tin oxide (GaSnO), gallium zinc oxide (GaZnO), indium gallium zinc oxide (IGZO), or indium gallium zinc tin oxide (IGZTO) and other semiconductor materials.

[0045] As Figure 12a and Figure 12b shown, a third metal layer 15 covering the semiconductor layer 14 (active layer 141) is formed on the third insulating layer 103. The third metal layer 15 is etched to form a patterned data line 151, a source electrode 152, and a drain electrode 153. The source electrode 152 is electrically connected to the data line 151, and the source electrode 152 and the drain electrode 153 are connected through the active layer 151. A plurality of scan lines 131 and a plurality of data lines 151 are insulated and cross each other to define a plurality of pixel units P. Among them, the third metal layer 15 can be made of a metal such as copper (Cu), silver (Ag), chromium (Cr), molybdenum (Mo), aluminum (Al), titanium (Ti), manganese (Mn), nickel (Ni), etc., or a combination of the above metals such as Al / Mo, Cu / Mo, etc. Optionally, the projection of the touch signal line 111 on the array substrate 10 is located within the projection area of the data line 151 on the array substrate 10, so as to reduce or avoid the touch signal line 111 blocking the light and affecting the light transmittance. Of course, the projection of the touch signal line 111 on the array substrate 10 can also be located within the projection area of the scan line 131 on the array substrate 10.

[0046] As Figure 13 shown, a fourth insulating layer 104 covering the semiconductor layer 12 (active layer 141) and the third metal layer 15 (data line 151, source electrode 152, and drain electrode 153) is formed above the third insulating layer 103. Among them, the material of the fourth insulating layer 104 is silicon oxide (SiOx), silicon nitride (SiNx), or a combination of the two.

[0047] As Figure 14a and Figure 14b shown, a third transparent conductive layer 16 is formed on the fourth insulating layer 104. The third transparent conductive layer 16 is etched to form a patterned second common electrode 161. The third transparent conductive layer 16 has an opening 162 in the area corresponding to the drain electrode 153. Among them, the third transparent conductive layer 16 can be a transparent conductive material such as indium tin oxide (ITO) or indium zinc oxide (IZO).

[0048] As Figure 15As shown, a fifth insulating layer 105 is formed on the fourth insulating layer 104 to cover the third transparent conductive layer 16 (second common electrode 161). The fourth insulating layer 104 and the fifth insulating layer 105 are etched simultaneously, so as to form a second contact hole H2 in the region corresponding to the drain 153, and the drain 153 leaks out from the second contact hole H2. Among them, the size of the opening 162 is larger than the size of the second contact hole H.

[0049] As Figure 16a and Figure 16b shown, a second transparent conductive layer 17 is formed on the fifth insulating layer 105. The second transparent conductive layer 17 is etched to form a patterned pixel electrode 171. The pixel electrode 171 is electrically connected to the drain 153 through the second contact hole H2. The second common electrode 161 and the pixel electrode 171 are insulated from each other and spaced apart by the fifth insulating layer 105. Among them, the second transparent conductive layer 17 can be a transparent conductive material such as indium tin oxide (ITO) or indium zinc oxide (IZO).

[0050] [Embodiment 2] Figure 17 is a schematic structural diagram of the array substrate in Embodiment 2 of the present invention. As Figure 17 shown, the manufacturing method of the electronic paper display and the array substrate provided in Embodiment 2 of the present invention is basically the same as that of Embodiment 1 ( Figures 1 to 16b ), the difference is that: In this embodiment, the touch electrode 121 is disposed on the surface of the array substrate 10 facing the ink capsule 30 and is in direct contact with the surface of the array substrate 10. The touch signal line 111 is disposed on the surface of the first insulating layer 101 away from the touch electrode 121, so that the touch electrode 121 can be closer to the external environment to enhance the touch effect.

[0051] Embodiment 2 of the present invention also provides a manufacturing method of an array substrate for manufacturing the array substrate 10 as described above, which is basically the same as the manufacturing method of the array substrate in Embodiment 1 ( Figures 8a to 16b ), the difference is that: First, a first transparent conductive layer 12 is formed on the substrate 10a, and the first transparent conductive layer 12 is etched to form a patterned touch electrode 121. Then, a first insulating layer 101 of the first transparent conductive layer 12 (touch electrode 121) is formed on the substrate 10a, and the first insulating layer 101 is etched to form a first contact hole H1, and the touch electrode 121 leaks out from the first contact hole H1. Then, a second insulating layer 102 covering the first metal layer 11 (touch signal line 111) is formed on the first insulating layer 101. As for the manufacturing sequence of the scanning line 131, gate 132, active layer 141, data line 151, source electrode 152, drain electrode 153, second common electrode 161, and pixel electrode 171, it is the same as that in the first embodiment, and reference can be made to the first embodiment.

[0052] Those skilled in the art should understand that the rest of the structure and working principle of this embodiment are the same as those in the first embodiment, and will not be elaborated here.

[0053] In this article, the orientation terms such as up, down, left, right, front, and back are defined based on the positions of the structures in the drawings and the positions relative to each other, only for the sake of clarity and convenience in expressing the technical solution. It should be understood that the use of the orientation terms should not limit the scope of protection claimed in this application. It should also be understood that the terms "first" and "second" used in this article are only for distinction in name and do not limit the quantity and order.

[0054] The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed above with the preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications within the scope of the technical solution of the present invention by using the above-disclosed technical content, which are equivalent embodiments of equivalent changes. However, as long as it does not depart from the content of the technical solution of the present invention, any simple modification, equivalent change, and modification made to the above embodiment based on the technical essence of the present invention still fall within the protection scope of the technical solution of the present invention.

Claims

1. An electronic paper display, characterized in that: The electronic paper display device comprises an array substrate (10), an opposing substrate (20) arranged opposite to the array substrate (10), and ink capsules (30) located between the array substrate (10) and the opposing substrate (20), wherein all the ink capsules (30) are provided with black particles (31) and white particles (32) of opposite polarities, the array substrate (10) is located on a side of the electronic paper display device close to the external environment, a touch electrode (121), a touch signal line (111), and a pixel electrode (171) are provided on a side of the array substrate (10) facing the ink capsules (30), the touch electrode (121) and the touch signal line (111) are both located between the pixel electrode (171) and the array substrate (10), the touch electrode (121) is electrically connected to the corresponding touch signal line (111), and a first common electrode (21) matched with the pixel electrode (171) is provided on the opposing substrate (20).

2. The electronic paper display according to claim 1, characterized in that: A second common electrode (161) is provided on a side of the array substrate (10) facing the ink capsule (30), and a storage capacitor is formed between the second common electrode (161) and the pixel electrode (171).

3. The electronic paper display according to claim 2, characterized in that: The second common electrode (161) is located on a side of the pixel electrode (171) away from the ink capsule (30), and the touch electrode (121) and the touch signal line (111) are both located between the second common electrode (161) and the array substrate (10).

4. The electronic paper display according to claim 1, characterized in that: The array substrate (10) is provided with a plurality of scanning lines (131), a plurality of data lines (151) and a plurality of thin film transistors (1); the plurality of scanning lines (131) and the plurality of data lines (151) are insulated from each other and cross-defined to form a plurality of pixel units (P); each of the pixel units (P) is provided with the thin film transistor (1) and the pixel electrode (171); the pixel electrode (171) is electrically connected to the data line (151) adjacent to the thin film transistor (1) through the thin film transistor (1).

5. The electronic paper display according to claim 4, characterized in that: The scan line (131), the data line (151), and the thin film transistor (1) are all located on a side of the touch electrode (121) and the touch signal line (111) facing the ink capsule (30), and are also located on a side of the pixel electrode (171) away from the ink capsule (30).

6. The electronic paper display according to claim 4, characterized in that: The projection of the touch signal line (211) on the array substrate (10) is located within a projection area of ​​the scan line (131) or the data line (151) on the array substrate (10).

7. A method for manufacturing an array substrate, characterized in that: Used for manufacturing the array substrate (10) according to any one of claims 1 to 6, the manufacturing method comprising: Providing a substrate (10a); A first metal layer (11) and a first transparent conductive layer (12) are formed on the substrate (10a); the first metal layer (11) is etched to form a patterned touch signal line (111); the first transparent conductive layer (12) is etched to form a patterned touch electrode (121); the touch electrode (121) is electrically connected to the corresponding touch signal line (111); and a first insulating layer (101) is provided between the first metal layer (11) and the first transparent conductive layer (12); forming a second insulating layer (102) on the substrate (10a) and covering the first metal layer (11) and the first transparent conductive layer (12); forming a second metal layer (13) on the second insulating layer (102), etching the second metal layer (13) to form a patterned scan line (131) and a gate (132), wherein the gate (132) is conductively connected to the scan line (131); forming a third insulating layer (103) covering the second metal layer (13) on the second insulating layer (102); forming a semiconductor layer (14) on the third insulating layer (103), etching the semiconductor layer (14) to form an active layer (141) corresponding to the gate (132); forming a third metal layer (15) covering the semiconductor layer (14) on the third insulating layer (103), etching the third metal layer (15) to form a patterned data line (151), a source electrode (152) and a drain electrode (153), wherein the source electrode (152) is conductively connected to the data line (151), and the source electrode (152) and the drain electrode (153) are connected via the active layer (151); forming a fourth insulating layer (104) covering the semiconductor layer (12) and the third metal layer (15) above the third insulating layer (103); A second transparent conductive layer (17) is formed on the fourth insulating layer (104), and the second transparent conductive layer (17) is etched to form a patterned pixel electrode (171), wherein the pixel electrode (171) is electrically connected to the drain electrode (153).

8. The method for manufacturing an array substrate according to claim 7, characterized in that: The production method comprises: forming a third transparent conductive layer (16) on the fourth insulating layer (104), etching the third transparent conductive layer (16) to form a patterned second common electrode (161); A fifth insulating layer (105) covering the third transparent conductive layer (16) is formed on the fourth insulating layer (104); the third transparent conductive layer (16) and the fifth insulating layer (105) are both located between the fourth insulating layer (104) and the second transparent conductive layer (17); and the third transparent conductive layer (16) and the second transparent conductive layer (17) are insulated and separated from each other by the fifth insulating layer (105).

9. The method for manufacturing an array substrate according to claim 7, characterized in that: The production method comprises: The first metal layer (11) is in contact with the surface of the substrate (10a), and the first transparent conductive layer (12) is located on a side of the first insulating layer (101) away from the first metal layer (11); Alternatively, the first transparent conductive layer (12) is in contact with the surface of the substrate (10a), and the first metal layer (11) is located on a side of the first insulating layer (101) away from the first transparent conductive layer (12).

10. The method for manufacturing an array substrate according to claim 7, characterized in that: The production method comprises: The projection of the touch signal line (211) on the substrate (10a) is located within a projection area of ​​the scan line (131) or the data line (151) on the substrate (10a).

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