Detection device for light-emitting element

Abstract

The invention discloses a detection device of a light-emitting element. The detection device of the light-emitting element comprises a first polar plate, a second polar plate and a detection module. The first polar plate is used for bearing light-emitting elements; the first pole plate and the second pole plate are used for being connected with an alternating current signal, and an electric field is formed between the first pole plate and the second pole plate and used for driving the light-emitting element to emit light. The detection module is used for detecting light of the light-emitting element. The second pole plate is arranged at one end of the detection module close to the first pole plate. The detection module is used for driving the second polar plate to move in the direction perpendicular to the first polar plate according to the first distance between the surface of the side, away from the first polar plate, of the light-emitting element on the first polar plate and the second polar plate. According to the technical scheme provided by the invention, the detection efficiency and precision of the light-emitting element are improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of display technologies, and in particular, to a detection device for light-emitting elements. Background Art

[0002] Light-emitting elements include micro LEDs, Nano LEDs, Mini-LEDs, etc. For example, micro LED display technology refers to a display technology in which self-luminous micron-scale LEDs are used as light-emitting pixel units and assembled onto a driving panel to form a high-density LED array. During the production process, it is necessary to timely detect defective pixels in the display chip for removal or repair. Since the number of chips reaches millions or even tens of millions when the light-emitting elements are used for display, it is necessary to detect the light-emitting elements in regions during detection.

[0003] Existing detection methods for light-emitting elements have problems of low detection efficiency and accuracy. Summary of the Invention

[0004] Embodiments of the present invention provide a detection device for light-emitting elements to solve the problems of low detection efficiency and accuracy in the detection method of light-emitting elements.

[0005] To solve the above technical problems, the present invention adopts the following technical solutions:

[0006] Embodiments of the present invention provide a detection device for light-emitting elements, including:

[0007] A first electrode plate for carrying the light-emitting element;

[0008] A second electrode plate facing the first electrode plate. The first electrode plate and the second electrode plate are used to conduct an alternating current signal, and an electric field is formed between the first electrode plate and the second electrode plate. The electric field is used to drive the light-emitting element to emit light;

[0009] A detection module for detecting the light of the light-emitting element;

[0010] The second electrode plate is disposed at one end of the detection module close to the first electrode plate;

[0011] The detection module is used to drive the second electrode plate to move in a direction perpendicular to the first electrode plate according to a first distance between the surface of the light-emitting element on the first electrode plate away from the first electrode plate and the second electrode plate.

[0012] Optionally, the detection module is used to adjust the first distance between the second electrode plate and the surface of each light-emitting element to be measured on the first electrode plate away from the first electrode plate to be equal.

[0013] Optionally, the detection module is fixedly connected to the second electrode plate; or the detection module is adjustably connected to the second electrode plate.

[0014] Optionally, the detection module includes:

[0015] A lens barrel, which is arranged in a direction perpendicular to the first electrode plate;

[0016] A lens, which is arranged inside the lens barrel and is used to image the light-emitting element on the first electrode plate within the focal length of the lens to detect the brightness of the light emitted by the light-emitting element.

[0017] Optionally, the lens further includes:

[0018] An acquisition unit, which is used to acquire the actual distance between the surface on the side of the light-emitting element to be measured on the first electrode plate away from the first electrode plate and the second electrode plate;

[0019] A control unit, which is connected to the lens and the acquisition unit. The control unit is used to compare the actual distance between the surface on the side of the light-emitting element on the first electrode plate away from the first electrode plate and the second electrode plate with the focal length of the lens, and generate a first control signal according to the comparison result;

[0020] An adjustment mechanism, which is connected to the control unit and is used to adjust the detection module to move in a direction perpendicular to the first electrode plate according to the first control signal, so that the distances between the surfaces on the side of the light-emitting element to be measured on the first electrode plate away from the first electrode plate are all the first distance.

[0021] Optionally, it further includes:

[0022] A grating scale, which is arranged on the side of the detection module and is used to identify the second distance between the lens and the second electrode plate;

[0023] Wherein, the second distance includes a preset distance, or the second distance is used to be determined according to the focal length of the lens and the scale of the grating scale when the lens is in focus.

[0024] Optionally, the first distance between the surface on the side of the light-emitting element on the first electrode plate away from the first electrode plate and the second electrode plate is determined by the difference between the focal length of the lens and the second distance.

[0025] Optionally, the first electrode plate includes:

[0026] A first substrate;

[0027] A first conductive layer arranged on the side of the first substrate close to the second electrode plate;

[0028] A first insulating layer arranged on the side of the first conductive layer away from the first substrate;

[0029] A transfer material layer arranged on the side of the first insulating layer away from the first substrate;

[0030] The light-emitting element is disposed on a side of the transfer material layer away from the first substrate;

[0031] Preferably, the material of the first insulating layer includes an inorganic or organic insulating layer; the material of the first conductive layer includes a transparent or semi-transparent conductive layer;

[0032] Preferably, the material of the first insulating layer includes SiNx, SiOx, TiO 2 or Al 2 O 3 .

[0033] Optionally, the second electrode plate includes:

[0034] a second substrate, which is attached to the detection module;

[0035] a second conductive layer disposed on a side of the second substrate away from the detection module;

[0036] a second insulating layer disposed on a side of the second conductive layer away from the second substrate;

[0037] Preferably, the material of the second insulating layer includes an inorganic or organic insulating layer; the material of the second conductive layer includes a transparent or semi-transparent conductive layer;

[0038] Preferably, the material of the second insulating layer includes SiNx, SiOx, TiO 2 or Al 2 O 3 .

[0039] Optionally, the distance between the first conductive layer of the first electrode plate and the second conductive layer of the second electrode plate includes: the sum of the first distance and the thicknesses of the light-emitting element, the transfer material layer, the first insulating layer, and the second insulating layer.

[0040] The technical solution provided by the embodiment of the present invention detects the light of the light-emitting element disposed on the first electrode plate by arranging the second electrode plate at one end of the detection module close to the first electrode plate. And the detection module drives the second electrode plate to move in a direction perpendicular to the first electrode plate according to the first distance between the surface of the light-emitting element on the first electrode plate far from the first electrode plate and the second electrode plate. With this arrangement, the electrode plate spacing can be adjusted in real time, making the electrode plate spacing in different regions consistent. Therefore, when the amplitude of the alternating current signal passed between the first electrode plate and the second electrode plate remains unchanged, the electric field intensity received by the light-emitting elements in each region is the same, making the induced light-emitting intensity of the normal light-emitting elements in each region consistent. With this arrangement, when the detection module detects the light of the light-emitting elements in each region, it is easier to identify the induced light-emitting intensity of abnormal light-emitting elements, thereby improving the efficiency and accuracy of light-emitting element detection. Therefore, the technical solution provided by the embodiment of the present invention can improve the efficiency and accuracy of light-emitting element detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for description in the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0042] Figure 1 is a schematic structural diagram of a detection device for a light-emitting element provided by an embodiment of the present invention;

[0043] Figure 2 is a schematic structural diagram of another detection device for a light-emitting element provided by an embodiment of the present invention;

[0044] Figure 3 is a schematic structural diagram of yet another detection device for a light-emitting element provided by an embodiment of the present invention;

[0045] Figure 4 is a schematic structural diagram of a lens provided by an embodiment of the present invention;

[0046] Figure 5 is a schematic structural diagram of yet another detection device for a light-emitting element provided by an embodiment of the present invention;

[0047] Figure 6 is a schematic structural diagram of yet another detection device for a light-emitting element provided by an embodiment of the present invention;

[0048] Figure 7 is a schematic structural diagram of yet another detection device for a light-emitting element provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0049] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. Additionally, it should be noted that for the convenience of description, only the parts related to the present invention rather than all the structures are shown in the drawings.

[0050] Currently, the light-emitting element device for non-contact EL detection generally uses a planar electrode plate structure including two electrode plates. The induced light-emitting intensity of the light-emitting element is determined by the electric field intensity applied to the light-emitting element, and its value is related to the distance between the two electrode plates. Since the electrode plates may be warped or deformed, or there are process deviations on their surfaces, resulting in differences in the electrode plate spacing in different regions, the electric field intensities applied to the light-emitting elements in different regions are inconsistent. Therefore, the induced light-emitting intensities of the light-emitting elements in different regions are inconsistent, thus affecting the accuracy of the light-emitting element detection.

[0051] Based on the above technical problems, the following solutions are proposed in this embodiment:

[0052] Figure 1 It is a schematic structural diagram of a detection device for a light-emitting element provided by an embodiment of the present invention. Figure 2 It is a schematic structural diagram of another detection device for a light-emitting element provided by an embodiment of the present invention. Combining Figure 1 and Figure 2 , the detection device for the light-emitting element includes: a first electrode plate 1, a second electrode plate 2, and a detection module 3.

[0053] The first electrode plate 1 is used to carry the light-emitting element 4. The second electrode plate 2 is opposite to the first electrode plate 1. The first electrode plate 1 and the second electrode plate 2 are used to conduct an alternating current signal, and an electric field is formed between the first electrode plate 1 and the second electrode plate 2, and the electric field is used to drive the light-emitting element 4 to emit light. The detection module 3 is used to detect the light of the light-emitting element 4. The second electrode plate 2 is arranged at one end of the detection module 3 close to the first electrode plate 1. The detection module 3 is used to drive the second electrode plate 2 to move in a direction perpendicular to the first electrode plate 1 according to the first distance d1 between the surface of the light-emitting element 4 on the side far from the first electrode plate 1 on the first electrode plate 1 and the second electrode plate 2.

[0054] Specifically, the cross-sectional shapes of the second electrode plate 2 and the detection module 3 can be rectangular, polygonal, circular, or other irregular shapes. The specific shapes of the above structures can be designed according to actual needs and are not limited herein. The size of the second electrode plate 2 can be larger than, smaller than, or equal to the size of the detection module 3. As Figure 1As shown, to facilitate the correspondence between the second electrode plate 2 and the first electrode plate 1, the cross-sectional shapes of both the second electrode plate 2 and the detection module 3 can be set to be rectangular. It should be noted that the second electrode plate 2 can be relatively independent of the detection module 3, or the second electrode plate 2 can be assembled with the detection module 3 through a connection structure for linkage. As Figure 2 shown, to facilitate the linkage between the second electrode plate 2 and the detection module 3, the second electrode plate 2 and the detection module 3 are arranged in a fitting manner.

[0055] Combined with Figure 1 and Figure 2 , the first electrode plate 1 and the second electrode plate 2 are arranged opposite to each other. By connecting an AC power supply AC between the first electrode plate 1 and the second electrode plate 2, an electric field is formed between the first electrode plate 1 and the second electrode plate 2. The light-emitting element 4 is placed on the first electrode plate 1 and emits light under the drive of the electric field. Among them, the positional relationship between the light-emitting element 4 and the first electrode plate 1 can include being mounted upright, being mounted upside down, and being vertical.

[0056] The detection module 3 can include a area array camera, a line scan camera, a TDI camera, an imaging luminance chrominance meter, a spectral luminance chrominance meter, or a hyperspectral camera. The second electrode plate 2 is arranged at one end of the detection module 3 close to the first electrode plate 1, so that while the detection module 3 detects the light of the light-emitting element 4, the position of the second electrode plate 2 can be controlled by the movement of the detection module 3. The distance between the surface of the light-emitting element 4 on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2 is the first distance d1. The detection module 3 can drive the second electrode plate 2 to move in a direction perpendicular to the first electrode plate 1 according to the first distance d1, that is, the distance between the first electrode plate 1 and the second electrode plate 2 can be adjusted.

[0057] Exemplarily, the materials of the first electrode plate 1 and the second electrode plate 2 can be silicon wafers. The larger the area of the silicon wafer, the more serious the warping degree of the silicon wafer. If a certain area on the electrode plate (including the first electrode plate 1 and / or the second electrode plate 2) warps upward, it will cause the electrode plate spacing in this area to be inconsistent with that in other areas.

[0058] When the detection module 3 detects the light of the light-emitting element 4 in this area, according to the first distance d1 corresponding to this light-emitting element 4, the detection module 3 drives the second electrode plate 2 to move in a direction perpendicular to the first electrode plate 1, away from the first electrode plate 1, until the first distance d1 corresponding to the light-emitting element 4 in this area is consistent with the first distance d1 corresponding to the light-emitting element 4 in other areas. With such a setting, when the amplitude of the AC signal applied between the first electrode plate 1 and the second electrode plate 2 remains unchanged, the electric field intensity applied to the light-emitting element 4 in each area on the first electrode plate 1 can be made consistent, so that the induced light-emitting intensity of the light-emitting element 4 in each area on the first electrode plate 1 is consistent. Among them, the light-emitting intensity of the light-emitting element 4 includes light brightness, light intensity, luminous flux, etc.

[0059] In the technical solution provided by this embodiment, the second electrode plate 2 is disposed at one end of the detection module 3 close to the first electrode plate 1, and the detection module 3 is used to detect the light of the light-emitting element 4 disposed on the first electrode plate 1. And according to the first distance d1 between the surface of the light-emitting element 4 on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2, the detection module 3 drives the second electrode plate 2 to move in a direction perpendicular to the first electrode plate 1. With such a setting, the electrode plate spacing can be adjusted in real time, so that the electrode plate spacings in different regions are the same. Therefore, when the amplitude of the alternating current signal applied between the first electrode plate 1 and the second electrode plate 2 remains unchanged, the electric field intensity received by the light-emitting element 4 in each region is the same, so that the induced light-emitting intensity of the normal light-emitting element 4 in each region is the same. With such a setting, when the detection module 3 detects the light of the light-emitting element 4 in each region, it is easier to identify the induced light-emitting intensity of the abnormal light-emitting element 4, thereby improving the efficiency and accuracy of the detection of the light-emitting element 4. Therefore, the technical solution provided by this embodiment can improve the efficiency and accuracy of the detection of the light-emitting element 4.

[0060] Optionally, continuing to refer to Figure 2 , on the basis of the above embodiments, the detection module 3 is used to adjust the first distance d1 between the second electrode plate 2 and the surface of each light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 to be equal.

[0061] Specifically, the heights of the surfaces of the light-emitting elements 4 to be measured in different regions away from the first electrode plate 1 relative to the horizontal plane where the first electrode plate 1 is located may be inconsistent. When the detection module 3 detects the light of each light-emitting element 4 to be measured on the first electrode plate 1, the distances between the detection module 3 and the light-emitting elements 4 are different, and the imaging results of the light-emitting elements 4 on the detection module 3 are inconsistent, which affects the accuracy of the detection of the light-emitting elements 4. Therefore, when the distance between the light-emitting element 4 to be measured and the detection module 3 is inconsistent with the distance between the detected light-emitting element 4 and the detection module 3, the detection module 3 drives the second electrode plate 2 to move in a direction perpendicular to the first electrode plate 1 towards the end away from the first electrode plate 1 until the distance between the light-emitting element 4 to be measured and the detection module 3 is the same as the distance between the detected light-emitting element 4 and the detection module 3. With such a setting, the first distance d1 corresponding to the light-emitting element 4 to be measured is equal to the first distance d1 corresponding to the detected light-emitting element 4.

[0062] In this embodiment, the detection module 3 is used to adjust the first distance d1 between the second electrode plate 2 and the surface of each light-emitting element 4 to be measured on the first electrode plate 1 on the side away from the first electrode plate 1 to be equal. When the amplitude of the alternating current signal passed between the first electrode plate 1 and the second electrode plate 2 remains unchanged, the electric field intensity received by each light-emitting element 4 to be measured is the same, thus enhancing the discrimination between the induced light-emitting intensities of the normal light-emitting elements 4 and the abnormal light-emitting elements 4. With such a setting, when the detection module 3 detects the light of the light-emitting elements 4 in each area, it is easier to identify the induced light-emitting intensity of the light-emitting elements 4, further improving the efficiency and accuracy of the detection of the light-emitting elements 4.

[0063] Optionally, referring further to Figure 2 , based on the above embodiments, the detection module 3 is fixedly connected to the second electrode plate 2. Alternatively, the detection module 3 is adjustably connected to the second electrode plate 2.

[0064] Specifically, when using the detection module 3 to adjust the first distance d1 between the second electrode plate 2 and the surface of each light-emitting element 4 to be measured on the first electrode plate 1 on the side away from the first electrode plate 1 to be equal, the detection module 3 needs to be connected to the second electrode plate 2. In one implementation, the detection module 3 can be fixedly connected to the second electrode plate 2, which can improve the stability of the second electrode plate 2 and facilitate the detection module 3 to drive the second electrode plate 2 to move to adjust the distance between the first electrode plate 1 and the second electrode plate 2. In another implementation, the detection module 3 can be adjustably connected to the second electrode plate 2, which can adjust the distance between the second electrode plate 2 and the detection module 3 in real time. Such a setting can improve the flexibility of the device.

[0065] In this embodiment, by setting the detection module 3 to be fixedly connected to the second electrode plate 2 or the detection module 3 to be adjustably connected to the second electrode plate 2, it is beneficial to improve the stability and flexibility when the detection module 3 drives the second electrode plate 2 to move.

[0066] Figure 3 is a schematic structural diagram of another light-emitting element detection device provided by an embodiment of the present invention. Referring to Figure 3 , based on the above embodiments, optionally, the detection module 3 includes: a lens barrel 31 and a lens 32. The lens barrel 31 is arranged in a direction perpendicular to the first electrode plate 1. The lens 32 is arranged in the lens barrel 31, and the lens 32 is used to image the light-emitting element 4 on the first electrode plate 1 within the focal length d2 of the lens 32 to detect the light-emitting intensity of the light-emitting element 4.

[0067] Specifically, the lens barrel 31 is arranged in a direction perpendicular to the first electrode plate 1, and the second electrode plate 2 is arranged in a direction perpendicular to the lens barrel 31 at one end of the lens barrel 31 close to the first electrode plate 1. Such an arrangement can make the first electrode plate 1 and the second electrode plate 2 parallel to each other, avoiding inconsistent distances between each light-emitting element 4 to be measured on the first electrode plate 1 and the second electrode plate 2 due to the inclination of the lens barrel 31. The lens 32 is arranged inside the lens barrel 31 to image the light-emitting element 4 on the first electrode plate 1 within the focal length d2 of the lens 32, so as to detect the brightness of the light emitted by the light-emitting element 4. There are various ways to determine the focal length d2 of the lens 32, and the present invention does not limit this. Exemplarily, the focal point of the detection module 3 can be determined through schemes such as laser ranging, spectral confocal, magnification method, precision angle measurement method, or image sharpness recognition, so as to determine the focal length d2 of the lens 32.

[0068] In this embodiment, by arranging the lens barrel 31, it is convenient for the detection module 3 to adjust the first distance d1 between the second electrode plate 2 and the surface of each light-emitting element 4 to be measured on the first electrode plate 1 on the side away from the first electrode plate 1 to be equal; and by arranging the lens 32 to image the light-emitting element 4 within the focal length d2 of the lens 32, it is beneficial to further detect the light-emitting intensity of the light-emitting element 4.

[0069] Figure 4 It is a schematic structural diagram of a lens provided by an embodiment of the present invention. Refer to Figure 4 Based on the above embodiments, optionally, the lens 32 includes: an acquisition unit 321, a control unit 322, and an adjustment mechanism 323. The acquisition unit 321 is used to acquire the actual distance between the surface of the light-emitting element 4 to be measured on the first electrode plate 1 on the side away from the first electrode plate 1 and the second electrode plate 2. The control unit 322 is connected to the lens 32 and the acquisition unit 321. The control unit 322 is used to compare the actual distance between the surface of the light-emitting element 4 on the first electrode plate 1 on the side away from the first electrode plate 1 and the second electrode plate 2 with the focal length d2 of the lens 32, and generate a first control signal according to the comparison result. The adjustment mechanism 323 is connected to the control unit 322. The adjustment mechanism 323 is used to move the detection module 3 in a direction perpendicular to the first electrode plate 1 according to the first control signal, so that the distances between the surfaces of the light-emitting elements 4 to be measured on the first electrode plate 1 on the side away from the first electrode plate 1 are all the first distance d1.

[0070] Specifically, when the detection module 3 detects the brightness of the light-emitting element 4, the acquisition unit 321 acquires the actual distance between the surface of the light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2. The control unit 322 subtracts the focal length d2 of the lens 32 from the actual distance to obtain the difference between the focal length d2 of the lens 32 and the actual distance. The control unit 322 generates a first control signal according to the difference and sends it to the adjustment mechanism 323. In response to the first control signal, the adjustment mechanism 323 adjusts the detection module 3 to move in a direction perpendicular to the first electrode plate 1, and then the second electrode plate 2 also moves with the detection module 3. The distance of the displacement of the second electrode plate 2 is the difference between the focal length d2 of the lens 32 and the actual distance. By using such an adjustment process to adjust the detection module 3 in real time, the distance between the surface of the light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 can be adjusted to the first distance d1.

[0071] In this embodiment, by providing the acquisition unit 321, the control unit 322, and the adjustment mechanism 323 in the lens 32, the distance between the surface of the light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 can be adjusted to the first distance d1, which is convenient for further improving the efficiency and accuracy of detecting the light-emitting intensity of the light-emitting element 4.

[0072] Since the distance of the displacement of the second electrode plate 2 driven by the detection module 3 is very small, the displacement can be precisely controlled by a grating scale or a piezoelectric element. The present invention does not limit this, and the following takes a grating scale as an example for illustration.

[0073] Figure 5 It is a schematic structural diagram of another light-emitting element detection device provided by an embodiment of the present invention. Refer to Figure 5 On the basis of the above embodiments, optionally, the light-emitting element 4 detection device further includes: a grating scale 5. The grating scale 5 is disposed on the side of the detection module 3, and the grating scale 5 is used to identify the second distance d3 between the lens 32 and the second electrode plate 2. Wherein, the second distance d3 includes a preset distance, or the second distance d3 is used to determine according to the focal length d2 of the lens 32 and the scale of the grating scale 5 when the lens 32 finishes focusing.

[0074] Specifically, a grating scale 5 is installed on the side of the detection module 3. Through the grating scale 5, the second distance d3 from the second electrode plate 2 to the lens 32 can be obtained. The second distance d3 can be a preset distance. Alternatively, when the detection module 3 detects the luminous intensity of each to-be-detected light-emitting element 4 on the first electrode plate 1, the detection module 3 focuses on the to-be-detected light-emitting element 4 to obtain the focal length d2 of the lens 32. To make the first distance d1 between the second electrode plate 2 and the surface on the side away from the first electrode plate 1 of each to-be-detected light-emitting element 4 located on the first electrode plate 1 equal, the position of the second electrode plate 2 relative to the detection module 3 is moved in a direction perpendicular to the first electrode plate 1. At this time, the scale of the grating scale 5 is the second distance d3 between the lens 32 and the second electrode plate 2. Exemplarily, the value of the second distance d3 can be set to the threshold of the preset distance. It should be noted that after the detection module 3 detects one area and moves to the next area, the detection module 3 needs to repeat the above focusing process. With such a setting, when the focal length d2 of the lens 32 is fixed, it can be ensured that when the detection module 3 moves to each area, the first distance d1 between the second electrode plate 2 and the surface on the side away from the first electrode plate 1 of each to-be-detected light-emitting element 4 located on the first electrode plate 1 can be adjusted to be equal. With such a setting, when the amplitude of the alternating current signal passing between the first electrode plate 1 and the second electrode plate 2 remains unchanged, the electric field intensity received by each to-be-detected light-emitting element 4 is consistent, which enhances the difference in the induced luminous intensity between the normal light-emitting element 4 and the abnormal light-emitting element 4, and further improves the efficiency and accuracy of the detection of the light-emitting element 4.

[0075] Optionally, continuing to refer to Figure 5 , on the basis of the above embodiments, the first distance d1 between the surface on the side away from the first electrode plate 1 of the light-emitting element 4 on the first electrode plate 1 and the second electrode plate 2 is determined by the difference between the focal length d2 of the lens 32 and the second distance d3.

[0076] Specifically, the process of determining the first distance d1 between the surface of the light-emitting element 4 on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2 can be as follows: When the detection module 3 detects the light-emitting intensity of the light-emitting element 4 to be measured, the light-emitting element 4 to be measured is focused to obtain the focal length d2 of the lens 32. During the focusing process of the lens 32, the detection module 3 drives the second electrode plate 2 to displace according to the actual distance between the surface of the light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2. When the focusing process is completed, the second distance d3 between the second electrode plate 2 and the lens 32 is determined. At this time, the difference obtained by subtracting the focal length d2 of the lens 32 from the second distance d3 is the first distance d1 between the surface of the light-emitting element 4 on the first electrode plate 1 away from the first electrode plate 1 and the second electrode plate 2. With this setting, when the focal length d2 of the lens 32 is fixed, the first distance d1 between the second electrode plate 2 and the surface of each light-emitting element 4 to be measured on the first electrode plate 1 away from the first electrode plate 1 can be adjusted to be equal. With this setting, when the amplitude of the alternating current signal passed between the first electrode plate 1 and the second electrode plate 2 remains unchanged, the electric field intensities received by the light-emitting elements 4 to be measured are all the same, which is convenient for further improving the efficiency and accuracy of detecting the light-emitting intensity of the light-emitting element 4.

[0077] Figure 6 is a schematic structural diagram of another light-emitting element detection device provided by an embodiment of the present invention. Refer to Figure 6 , on the basis of the above embodiments, optionally, the first electrode plate 1 includes: a first substrate 10, a first conductive layer 11, a first insulating layer 12, and a transfer material layer 13. The first conductive layer 11 is disposed on the side of the first substrate 10 close to the second electrode plate 2. The first insulating layer 12 is disposed on the side of the first conductive layer 11 away from the first substrate 10. The transfer material layer 13 is disposed on the side of the first insulating layer 12 away from the first substrate 10. The light-emitting element 4 is disposed on the side of the transfer material layer 13 away from the first substrate 10. Preferably, the material of the first insulating layer 12 includes an inorganic or organic insulating layer. The material of the first conductive layer 11 includes a transparent or semi-transparent conductive layer. Preferably, the material of the first insulating layer 12 includes SiNx, SiOx, TiO 2 or Al 2 O 3 .

[0078] Specifically, the material of the first substrate 10 can be sapphire or glass. Exemplarily, on the side of the first substrate 10 close to the second electrode plate 2, an ITO film layer is prepared by Physical Vapor Deposition (PVD) technology as the first conductive layer 11 for applying an electric field intensity to the light-emitting element 4. On the side of the first conductive layer 11 away from the first substrate 10, a first insulating layer 12 is prepared. The first insulating layer 12 has good insulation performance and can preferably prevent a short circuit between the first conductive layer 11 and the pins of the light-emitting element 4. Exemplarily, the first insulating layer 12 can be prepared by Chemical Vapor Deposition (CVD) technology. On the side of the first insulating layer 12 away from the first substrate 10, a transfer material layer 13 is prepared for the transfer of the light-emitting element 4. The transfer material layer 13 can include a transfer adhesive layer. Additionally, by disposing the first insulating layer 12 between the first conductive layer 11 and the transfer material layer 13, the flatness on the side of the first conductive layer 11 away from the first substrate 10 can be better, facilitating the improvement of the thickness uniformity of the transfer material layer 13.

[0079] Specifically, the material of the first conductive layer 11 includes a transparent or semi-transparent conductive layer. Exemplarily, the material of the first conductive layer 11 can include indium tin oxide, and the film layer prepared using indium tin oxide has good electrical conductivity and chemical stability. The first insulating layer 12 includes an inorganic or organic insulating layer. The inorganic insulating layer has good stability, high temperature resistance, and good aging performance. The organic insulating layer has good electrical insulation performance and mechanical properties, which can ensure the long-term stability of electronic components. The material of the first insulating layer 12 is SiNx, SiOx, TiO 2 or Al 2 O 3 , making its corrosion resistance, thermal stability, and insulation performance strong, and making the first insulating layer 12 not easily deformed, facilitating the improvement of the accuracy of detecting the light-emitting intensity of the light-emitting element 4.

[0080] Figure 7 is a schematic structural diagram of another light-emitting element detection device provided by an embodiment of the present invention. Refer to Figure 7 , based on the above embodiments, optionally, the second electrode plate 2 includes: a second substrate 20, a second conductive layer 21, and a second insulating layer 22. The second substrate 20 is attached to the detection module 3, the second conductive layer 21 is disposed on the side of the second substrate 20 away from the detection module 3, and the second insulating layer 22 is disposed on the side of the second conductive layer 21 away from the second substrate 20. Preferably, the material of the second insulating layer 22 includes an inorganic or organic insulating layer. The material of the second conductive layer 21 includes a transparent or semi-transparent conductive layer. Preferably, the material of the second insulating layer 22 is SiNx, SiOx, TiO 2 or Al2 O 3 。

[0081] Specifically, the material of the second substrate 20 can be sapphire or glass. Exemplarily, on the side of the second substrate 20 away from the detection module 3, an ITO film layer is prepared by Physical Vapor Deposition (PVD) technology as the second conductive layer 21. The second conductive layer 21 and the first conductive layer 11 located on the first electrode plate 1 form two opposite electrode plates. An alternating current signal acts on the first conductive layer 11 and the second conductive layer 21, and an electric field is formed between the first conductive layer 11 and the second conductive layer 21. Such a setting makes the electric field strength between the two electrode plates relatively uniform. The material of the second conductive layer 21 includes a transparent or semi-transparent conductive layer. Exemplarily, the material of the second conductive layer 21 includes indium tin oxide, and the film layer prepared by indium tin oxide has good electrical conductivity and chemical stability.

[0082] Exemplarily, a second insulating layer 22 can be prepared on the side of the second conductive layer 21 away from the second substrate 20 by Chemical Vapor Deposition (CVD) technology. The second insulating layer 22 has good insulating properties and can preferably avoid short circuits between the second conductive layer 21 and the light-emitting element 4. The second insulating layer 22 includes an inorganic or organic insulating layer. The inorganic insulating layer has good stability, high temperature resistance, and good aging performance. The organic insulating layer has good electrical insulating properties and mechanical properties, and can ensure the long-term stability of electronic components. The material of the second insulating layer 22 is SiNx, SiOx, TiO 2 or Al 2 O 3 , so that it has strong corrosion resistance, good thermal stability, and good insulating properties, and makes the second insulating layer 22 not easily deformed, facilitating the improvement of the accuracy of detecting the light-emitting intensity of the light-emitting element 4.

[0083] Optionally, on the basis of the above embodiments, in combination with Figure 6 and Figure 7 , the distance between the first conductive layer 11 of the first electrode plate 1 and the second conductive layer 21 of the second electrode plate 2 includes: the sum of the first distance d1 and the thicknesses of the light-emitting element 4, the transfer material layer 13, the first insulating layer 12, and the second insulating layer 22.

[0084] Specifically, the induced light-emitting intensity of the light-emitting element 4 is determined by the electric field intensity applied to the light-emitting element 4, and its value can be obtained by dividing the voltage value applied to the first conductive layer 11 of the first electrode plate 1 and the second conductive layer 21 of the second electrode plate 2 by the distance between the first conductive layer 11 and the second conductive layer 21. Since the side of the first conductive layer 11 of the first electrode plate 1 away from the first substrate 10 is sequentially covered with a first insulating layer 12 and a transfer material layer 13, and the side of the second conductive layer 21 of the second electrode plate 2 away from the second substrate 20 is covered with a second insulating layer 22, these film layers themselves have a certain thickness, and the thickness may be inconsistent in different regions. In addition, the light-emitting element 4 itself has a certain thickness. Therefore, the sum of the first distance d1, the thickness of the light-emitting element 4, the thickness of the transfer material layer 13, the first insulating layer 12, and the second insulating layer 22 is obtained, and the obtained sum value is closest to the true distance between the first conductive layer 11 of the first electrode plate 1 and the second conductive layer 21 of the second electrode plate 2. Such a setting facilitates further improving the accuracy of detecting the light-emitting intensity of the light-emitting element 4.

[0085] Note that the above is only a preferred embodiment of the present invention and the technical principles applied. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A light-emitting element detection device, characterized in that, it includes: A first electrode plate for carrying a light-emitting element; A second electrode plate facing the first electrode plate. The first electrode plate and the second electrode plate are used to conduct an alternating current signal, and an electric field is formed between the first electrode plate and the second electrode plate. The electric field is used to drive the light-emitting element to emit light; A detection module for detecting the light of the light-emitting element; The second electrode plate is arranged at one end of the detection module close to the first electrode plate; The detection module is used to drive the second electrode plate to move in a direction perpendicular to the first electrode plate according to a first distance between the surface of the light-emitting element on the first electrode plate away from the first electrode plate and the second electrode plate.

2. The detection device according to claim 1, characterized in that, the detection module is used to adjust the first distances between the second electrode plate and the surfaces of the respective light-emitting elements to be measured on the first electrode plate away from the first electrode plate to be equal.

3. The detection device according to claim 1, characterized in that, the detection module is fixedly connected to the second electrode plate; or, the detection module is adjustably connected to the second electrode plate.

4. The detection device according to claim 1, characterized in that, the detection module includes: A lens barrel arranged in a direction perpendicular to the first electrode plate; A lens arranged in the lens barrel. The lens is used to image the light-emitting element on the first electrode plate within the focal length of the lens to detect the intensity or spectrum of the light emitted by the light-emitting element.

5. The detection device according to claim 4, characterized in that, the lens further includes: An acquisition unit for acquiring the actual distance between the surface of the light-emitting element to be measured on the first electrode plate away from the first electrode plate and the second electrode plate; A control unit connected to the lens and the acquisition unit. The control unit is used to compare the actual distance between the surface of the light-emitting element on the first electrode plate away from the first electrode plate and the second electrode plate with the focal length of the lens, and generate a first control signal according to the comparison result; An adjustment mechanism connected to the control unit. The adjustment mechanism is used to adjust the detection module to move in a direction perpendicular to the first electrode plate according to the first control signal, so that the distances between the surfaces of the light-emitting elements to be measured on the first electrode plate away from the first electrode plate are all the first distance.

6. The detection device according to claim 4, characterized in that, it further includes: A grating scale arranged on the side of the detection module. The grating scale is used to identify a second distance between the lens and the second electrode plate; wherein, the second distance includes a preset distance, or the second distance is used to be determined according to the focal length of the lens and the scale of the grating scale when the lens is focused.

7. The detection device according to claim 6, characterized in that, The first distance between the surface of the light-emitting element on the side of the first electrode plate away from the first electrode plate and the second electrode plate is determined by the difference between the focal length of the lens and the second distance.

8. The detection device according to claim 7, wherein, the first electrode plate includes: a first substrate; a first conductive layer disposed on the side of the first substrate close to the second electrode plate; a first insulating layer disposed on the side of the first conductive layer away from the first substrate; a transfer material layer disposed on the side of the first insulating layer away from the first substrate; the light-emitting element is disposed on the side of the transfer material layer away from the first substrate; Preferably, the material of the first insulating layer includes an inorganic or organic insulating layer; the material of the first conductive layer includes a transparent or semi-transparent conductive layer; Preferably, the material of the first insulating layer includes SiNx, SiOx, TiO 2 or Al 2 O 3 .

9. The detection device according to claim 8, wherein, the second electrode plate includes: a second substrate, the second substrate being attached to the detection module; a second conductive layer disposed on the side of the second substrate away from the detection module; a second insulating layer disposed on the side of the second conductive layer away from the second substrate; Preferably, the material of the second insulating layer includes an inorganic or organic insulating layer; the material of the second conductive layer includes a transparent or semi-transparent conductive layer; Preferably, the material of the second insulating layer includes SiNx, SiOx, TiO 2 or Al 2 O 3 .

10. The detection device according to claim 9, wherein, the distance between the first conductive layer of the first electrode plate and the second conductive layer of the second electrode plate includes: the sum of the first distance, the thickness of the light-emitting element, the thickness of the transfer material layer, the thickness of the first insulating layer, and the thickness of the second insulating layer.

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