Industrial optical network intelligent inspection system based on passive metasurface

By using passive hypersurface optical cross connectors and virtualized instrument resources in the industrial optical network inspection system, the problem of synchronous detection of multiple indicators in the existing system is solved, and a more efficient inspection process and resource utilization is achieved.

CN120074660APending Publication Date: 2025-05-30CHONGQING UNIV OF POSTS & TELECOMM
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202510202112.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-24
Publication Date
2025-05-30

AI Technical Summary

Technical Problem

In the existing industrial optical network inspection system, optical cross connectors based on active serial beam regulation cannot achieve synchronous detection of multiple indicators of production parts, resulting in high inspection time and energy consumption.

Method used

The intelligent inspection system of industrial optical network based on passive metasurface is adopted. By virtualizing instrument resources and using optical cross connectors based on refraction metasurface, parallel beam regulation without external excitation is achieved, and synchronous detection of multiple indicators is supported.

Benefits of technology

The synchronous inspection of multiple indicators of production parts has been achieved, which shortens inspection time and energy consumption, and improves the utilization rate of instrument resources, avoids production line stagnation caused by instrument failure.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN120074660A_ABST
    Figure CN120074660A_ABST
Patent Text Reader

Abstract

The invention relates to an optical communication technology, in particular to an industrial optical network intelligent inspection system based on a passive metasurface, which comprises the following steps: virtualizing instrument resources, namely decomposing each physical instrument into a plurality of logic units which work independently and do not influence each other, and enabling each logic unit to be connected with an instrument server through a GPIB (General Purpose Interface Bus); the system is provided with stations for placing to-be-detected products, and each station is provided with an optical cross connector based on a refraction metasurface. After a to-be-detected product is placed on the station, the station requests instrument resources from the instrument server and then establishes connection with the logic unit through the optical cross connector based on the refraction metasurface. According to the invention, synchronous detection of multiple indexes of the same to-be-detected product can be realized, and compared with the prior art, under the same number of rotation operations of the basic units, higher-dimension signal exchange can be supported by adopting the metasurface, that is, more to-be-detected products and instruments are introduced into a detection system, and the inspection process is accelerated.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to optical communication technologies, and particularly to an intelligent inspection system for industrial optical networks based on passive metasurfaces. Background Art

[0002] Industrial optical networks are a network technology that uses optical communication technologies to connect the production elements of industrial enterprises. Through optical fibers as the transmission medium and deployed according to the actual network construction requirements of industrial enterprises, they aim to provide convenient and efficient optical network bearing services for enterprise production management. In recent years, industrial optical networks have been applied in production manufacturing and enterprise informatization, especially in intelligent production and personalized customization where various elements within an enterprise are interconnected. To meet the performance test requirements of optical products during the production and manufacturing stage, an automated optical product test platform has emerged.

[0003] It adopts centralized control, remotely automates the testing of production parts by operating instruments and meters based on scripts, and stores and analyzes test data. Among them, an optical cross-connector (OXC) builds a signal path for connection between the test instruments and the production parts. Current OXCs are mainly based on wavelength selective switches (WSSs), including microelectromechanical systems (MEMS) with electro-controlled micro-mirrors, phase modulators of liquid crystal on silicon (LCoS), etc. For two-dimensional / three-dimensional MEMS, an external voltage needs to be applied to control the rotation of the micro-mirror, thereby changing the outgoing direction / angle θ of the light beam; for LCoS, the voltage of each pixel point needs to be controlled to manipulate the alignment direction of liquid crystal molecules, thereby changing the phase of the outgoing light beam. However, the above-mentioned solutions based on active serial beam regulation cannot achieve synchronous detection of multiple indicators of production parts. For example, when measuring the wavelength and eye diagram performance of a certain production part, after completing the eye diagram (spectrum) test, an external voltage needs to be applied to change the outgoing angle or phase of the light beam to achieve optical path switching before the spectrum (eye diagram) can be tested continuously. Therefore, there is an urgent need to develop a new industrial inspection OXC that has the ability to regulate parallel beams without applying external excitation, supports synchronous detection of multiple indicators of a certain production part, and effectively shortens the time and energy consumption of the entire industrial inspection. Summary of the Invention

[0004] Aiming at the problems existing in the prior art, the present invention proposes an intelligent inspection system for industrial optical networks based on passive metasurfaces, including the following steps:

[0005] Virtualize the instrument resources, that is, decompose each physical instrument into multiple logically independent and non-interfering units, and connect each logical unit to the instrument server through the GPIB bus;

[0006] The system is provided with workstations for placing products to be inspected, and each workstation is provided with an optical cross-connector based on refractive metasurfaces;

[0007] After placing the product to be inspected on the workstation, the workstation requests instrument resources from the instrument server, and then establishes a connection with the logic unit through an optical cross-connector based on a refractive metasurface.

[0008] Furthermore, the instrument resources at least include an oscilloscope and a spectrometer. The oscilloscope is used to measure the wavelength of the product to be inspected, and the spectrometer is used to measure the eye diagram performance of the product to be inspected.

[0009] Furthermore, the optical cross-connector based on a refractive metasurface refracts the received light beam into two types of light beams. The light beam of type Ⅰ is used to detect the wavelength of the product to be inspected, and the light beam of type Ⅱ is used to detect the eye diagram performance of the product to be inspected.

[0010] Furthermore, the optical cross-connector based on a refractive metasurface consists of multiple supercell arrays that achieve 0 to 2π phase coverage. Each supercell array is composed of multiple superatoms consisting of a metal substrate, a silica isolation layer, and a top gold nanopattern. The superatom acts as a nanoantenna. When illuminated by an incident plane wave polarized in the x or y direction, it will cause local surface plasmon resonance, thereby radiating electromagnetic waves outward. By changing the size of the superatom, the detuning amount can be adjusted, thereby controlling the phase delay of the radiated electromagnetic wave.

[0011] Furthermore, the parameters of the superatom are optimized using the finite-difference time-domain algorithm. For the light beam of type Ⅱ, its incident angle and the reflection angle ω satisfy where Λ is the length of the supercell of the metasurface, and λ is the wavelength of the incident light. Preferably, there is a one-to-one corresponding angle between the workstation and each virtual unit. By controlling the rotation of the metasurface set on the workstation, the optical signal of the product to be inspected can be refracted to different positions. The resource pool then sends the optical signals received at different positions to the virtual unit corresponding to that position for processing, that is, only by determining the incident angle can the corresponding optical path be determined.

[0012] Furthermore, there are N instruments of each type, and each instrument is virtualized into M logic units. When the light beam of type Ⅰ reflected by the optical cross-connector based on a refractive metasurface from a workstation establishes an optical path with the m-th logic unit of the n-th oscilloscope, and then by rotating the optical cross-connector based on a refractive metasurface, the light beam of type Ⅱ establishes an optical path with the m-th logic unit of the n-th spectrometer, where n ∈ {1, 2, …, N} and m ∈ {1, 2, …, M}.

[0013] Furthermore, the position of the workstation is fixed and the position of each logic unit is also fixed. The angle at which the light beam of the optical cross-connector based on a refractive metasurface reflected to the logic unit of the oscilloscope rotates to the logic unit of the spectrometer under each workstation is obtained to form an angle mapping table. After the workstation requests instrument resources from the instrument server, the instrument server sends the incident angle information to the workstation.

[0014] Further, considering the two detection tasks of spectrum and eye diagram as data packets, the detection time required for different data packets is different. At the same time, the data packet with the shortest given detection time e applies for the instrument first. Assume that the data packet is selected and sent to the nth station W at time a t . This station needs to apply to the instrument server to query whether the instrument is idle or faulty. The process of allocating instrument resources specifically includes: n

[0015] 101. Select the logical unit with the highest current resource occupancy rate among the idle and functionally normal instruments, and randomly allocate an idle logical unit to the data packet;

[0016] 102. If the instrument is busy, that is, all logical units are occupied, but the instrument is functionally normal, as some detection services are completed, the instrument server will select the instrument that will become idle soonest, and the allocation method of logical units is the same as in 101;

[0017] 103. If the instrument fails and all its logical units become invalid, the instrument server queries and selects other logical units according to step 101.

[0018] The present invention proposes an intelligent industrial optical network inspection system based on passive metasurfaces, which can provide technical support for the production of high-quality components. The experimental results show that the designed metasurface exhibits strong parallel beam control capabilities and can realize the synchronous detection of multiple indicators of the same product under test; at the same time, the present invention compares the switching dimensions of industrial OXCs constructed with MEMS and metasurfaces as basic units. Under the same number of basic unit rotation operations, using metasurfaces can support higher-dimensional signal switching, that is, introducing more products under test and instruments into the detection system to accelerate the inspection process; in addition, the introduction of virtualization effectively avoids the problem of production line stagnation caused by instrument failures and efficiently utilizes instrument resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the optical instrument cloud architecture based on the metasurface OXC of the present invention;

[0020] Figure 2 is a schematic diagram of the structure of the OXC based on metasurfaces of the present invention;

[0021] Figure 3 is a schematic diagram of the elastic service orchestration algorithm designed by the present invention;

[0022] Figure 4 is a framework diagram of the proof-of-concept prototype system built by the present invention;

[0023] Figure 5 ​Comparison chart of the average detection delay and instrument utilization rate between the traditional solution and the metasurface solution of the present invention under different instrument failure rates;

[0024] Figure 6 Comparison chart of the instrument resource utilization rate under different numbers of workstations and different failure rates. Specific implementation manner

[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0026] The present invention proposes an industrial optical network intelligent inspection system based on passive metasurfaces, including the following steps:

[0027] Virtualize the instrument resources, that is, decompose each physical instrument into multiple independent and non-interfering logical units, and connect each logical unit to the instrument server through the GPIB bus;

[0028] Workstations for placing products to be inspected are set in the system, and a light cross-connector based on refractive metasurfaces is set on each workstation;

[0029] After a product to be inspected is placed on the workstation, the workstation requests instrument resources from the instrument server, and then establishes a connection with the logical unit through the light cross-connector based on refractive metasurfaces.

[0030] As a two-dimensional sub-wavelength microstructure array, metasurfaces do not require external excitation. By changing the size and arrangement of the microstructures, the amplitude, phase, polarization, or spectrum of light can be manipulated. Metasurfaces not only retain the extraordinary electromagnetic properties of three-dimensional structured metamaterials but also reduce the processing difficulty and device energy consumption. According to the generalized Snell's law, the change of the phase gradient on the metasurface determines the propagation direction of the reflected light. Therefore, the present invention designs and fabricates a metasurface composed of a periodic plasma array and its rotation system. For the incidence of an x-polarized light beam, the metasurface acts as an ordinary micro-mirror, forming a type-I reflected light with a reflection angle equal to the incident angle; for the incidence of a y-polarized light beam, due to a non-zero phase mutation in the x direction, a type-II reflected light with a reflection angle not equal to the incident angle is formed. Obviously, this kind of metasurface has natural beam splitting ability, that is, an incident light can form a pair of reflected lights after being reflected by the metasurface, and passive parallel beam control can be achieved without applying an external voltage.

[0031] During the industrial inspection process, an optical instrument needs to upload the current test data before proceeding to the next test, which results in service waiting when testing multiple products to be tested or multiple indicators of the same product to be tested, leading to a longer total inspection time. Therefore, in the present invention, expensive instrument resources are pooled, and through virtualization, each physical instrument is decomposed into multiple independent and non-interfering logical units. Figure 1 The optical instrument cloud architecture based on the metasurface OXC includes two types of instruments, an oscilloscope and a spectrometer. Each type of instrument has N physical devices, and each physical device is virtualized into M logical units. The logical units are connected to the instrument server through the GPIB bus, and the optical path is established with the product to be tested through the OXC based on the metasurface MS. The instrument server is responsible for receiving the instrument call requests sent from the product to be tested, that is, the workstation, and registering the optical path between the product to be tested and the logical unit according to the instrument status (idle, busy, or faulty). Through the fine-grained scheduling of the logical units, one instrument can be dynamically used for the synchronous testing of different products to be tested, and its resource utilization rate is also improved.

[0032] As Figure 2 , without virtualization, Product to be tested 2 must wait for Product to be tested 1 to occupy the oscilloscope O 1 to complete the detection before the corresponding detection service can be executed. However, through virtualization, two logical units O 1 of the same oscilloscope O 11 and O 1m can be called by Product to be tested 1 and 2 respectively to complete synchronous testing. Once the logical unit of the instrument is assigned to the current product to be tested, the operation and maintenance personnel remotely configure the optical path between the product to be tested and the assigned logical unit through the network management to complete the corresponding detection task. More importantly, due to the unique passive parallel beam control ability, compared with other OXCs, the metasurface-based OXC can access more products to be tested and instruments, and the signal does not need to be resolved to the electrical layer for processing, further shortening the total inspection time and reducing the overall power consumption.

[0033] As Figure 3 , after the incident beam passes through an exclusive metasurface chip of each product to be tested (workstation), two reflected lights, type I and type II, will be generated simultaneously, corresponding to the eye diagram test optical path and the wavelength test optical path respectively, so as to complete the synchronous detection of two different indicators of each product to be tested. In addition, the metasurface-based OXC can also achieve transparent transmission of test data, meeting the requirements of industrial enterprises for production information security.

[0034] In this embodiment, the metasurface chip dedicated to each station consists of multiple supercell arrays that achieve 0 to 2π phase coverage. Each supercell array is composed of multiple superatoms consisting of a metal substrate, a silica isolation layer, and a top gold nanopattern. In the present invention, the superatom acts as a nanoantenna. When illuminated by an incident plane wave polarized in the x or y direction, it will cause local surface plasmon resonance and thus radiate electromagnetic waves outward. Therefore, by changing the size of the superatom, the detuning amount can be adjusted, thereby controlling the phase delay of the radiated electromagnetic wave. Further, the present invention optimized the geometric parameters of the superatom using the finite-difference time-domain (FDTD) algorithm. Compared with the working wavelength λ = 1550 nm, all superatoms have subwavelength sizes, and the normalized scattering intensity of the metasurface under y-polarized light irradiation at different incident angles. For type-II reflected light, the incident angle and the reflection angle ω strictly satisfy the relationship, where Λ is the length of the supercell of the metasurface and λ is the wavelength of the incident light.

[0035] When the optical instrument fails or needs maintenance, all the corresponding logic units and related optical paths will fail. The instrument server needs to quickly find the logic units of other similar devices that are idle and can work normally, and complete the corresponding optical path switching. The optical path switching requires rotating the metasurface chip. For example, Figure 2 if station s is connected to the m-th virtual unit O of the n-th oscilloscope nm through type-I reflected light, it is necessary to ensure that the corresponding type-II reflected light is aligned with the spectrometer S nm . For example, station 1 is connected to the m-th virtual unit O of the n-th oscilloscope 11 through type-I reflected light. At this time, while the reflection angle of the type-II reflected light aligned with the first virtual unit S of the first spectrometer 11 is expressed as Obviously, once the relative positions of the station and the logic unit are determined, a fixed rotation angle can be obtained. The metasurface controller applies a corresponding drive voltage V to one end electrode of the metasurface rotation system according to the rotation angle to complete the optical path switching.

[0036] Currently, the possible implementation schemes of industrial patrol OXC include:

[0037] 1) Constructing an N×N dimensional optical switching OXC module requires 2N 1×N port WSS optical switches, and as N increases, the module size and cost increase sharply;

[0038] 2) The maximum spot size of the matrix optical switch based on the 2D-MEMS micromirror array is limited by the micromirror size.

[0039] The MS solution of the present invention is compared with the 2D-MEMS solution of the prior art. Under the same number of rotation operations, the swapping dimension of the solution of the present invention is larger, which means that more workstations and instruments can be connected to the inspection platform, facilitating the acceleration of the product inspection time. Specifically, under 36 unit rotation operations, up to 72 workstations and instruments of the present solution can be connected to the inspection platform, representing a 50% increase compared to the prior art 2D-MEMS.

[0040] In an actual production environment, the number of workstations and physical instruments required for different inspection lines varies. It is necessary to perform service orchestration for each inspection line in combination with the instrument cloud. By coordinating and managing the mapping relationship between the product under test (workstation) and the instrument logic unit, the sequence of inspection services is determined. Most traditional solutions adopt manual pre-configuration or fixed service orchestration, resulting in low inspection efficiency and lacking the working ability of a flexible production line. In addition, the OXC based on LCOS and MEMS only supports a one-to-one mapping between the product under test and the instrument logic unit and does not consider the negative impact of instrument failure on industrial inspection efficiency. Therefore, the present invention proposes a simple and elastic service orchestration algorithm - VPMA applicable to the metasurface industrial inspection platform and considers uninterrupted inspection services in the case of instrument failure.

[0041] The VPMA algorithm is similar to the stable matching algorithm. The difference is that the product under test does not have a fixed target address, and the instrument logic unit is elastically selected on demand, and a one-to-two mapping relationship in which a certain product under test is simultaneously linked to two instrument logic units under the metasurface spectroscopic ability is always maintained. In this embodiment, only two inspection tasks, namely spectroscopy and eye diagram, are considered in the form of data packets. Different data packets require different inspection times. At the same time, the data packet with the shortest given inspection time e applies for the instrument first, which conforms to the actual factory production line environment. Assume that the data packet is selected and sent to workstation W t at time a n , and this workstation needs to apply to the instrument server to query whether the instrument is idle or faulty:

[0042] 1) Select the instrument with the highest current occupancy rate of the logic unit among the idle and fully functional instruments, which is conducive to improving the utilization rate of the logic unit resources. Then, randomly allocate an idle logic unit for data packet p;

[0043] 2) When the instrument is busy (all logic units are occupied) but fully functional, as some inspection services are completed, the instrument server will select the instrument that will soon become idle the fastest, and the method of allocating the logic unit is the same as in 1);

[0044] 3) If the instrument fails and all its logic units become invalid, the instrument server queries and selects other idle instruments with the highest current occupancy rate of the logic unit and repeats the operation in 1).

[0045] After determining the mapping relationship between the workstations and the instruments, the instrument server sends instructions to the metasurface rotation controller to perform a one-to-two optical path switching. When all the detection tasks are completed, the algorithm ends.

[0046] The present invention uses the total detection time as the performance evaluation index, which is expressed as:

[0047]

[0048] where c p is the service completion time of the data packet p, and (c p -a p ) is the service time of the data packet, including the waiting time for service and the detection time.

[0049] Here, a simple example is used to illustrate the algorithm process. As Figure 3 (a), there are two workstations W 1 and W 2 , two spectrometers and two oscilloscopes each, namely the first spectrometer S 1 , the second spectrometer S 2 , the first oscilloscope O 1 , the second oscilloscope O 2 , and each instrument is virtualized into two logical units. Among them, S ij represents the jth virtual unit of the ith spectrometer, and O ij represents the jth virtual unit of the ith oscilloscope. In this embodiment, i ∈ {1, 2}, j ∈ {1, 2}. Assuming that the detection time e 1 <e 2 <e 3 , so the data packet p 1 is first scheduled to the workstation W 1 , and p 2 is then forwarded to the workstation W 2 . Since the current workstations are all busy, p 3 needs to wait for the detection task of a workstation to be completed before being forwarded; subsequently, the instrument server sends an instrument application. As Figure 3 (b), the instrument server selects the first virtual unit S 1 of the first spectrometer and the first virtual unit O 11 of the first oscilloscope that are idle for the product to be inspected at the workstation W 11 as the target detection units. The instrument server selects the second virtual unit S 2 of the first spectrometer and the first virtual unit O 12 of the first oscilloscope that are idle for the product to be inspected at the workstation W 12, if the physical instrument is not faulty, the original connection relationship is maintained; 8de, it is necessary to wait for the fastest available logical unit and occupy it. Obviously, if the second spectrometer S is not virtualized, the workstations W 2 will not have the opportunity to simultaneously occupy the second spectrometer S 1 and W 2 and can only wait for the first spectrometer S 2 to be repaired, which will lead to a long detection cycle for the product to be tested and possible problems of production line suspension. 1

[0050] For example Figure 4 , in this embodiment, based on the fabricated metasurface chip, a proof-of-concept prototype system is built to demonstrate the multi-index synchronous detection ability of the metasurface. First, the OOK keying signal is loaded onto the optical carrier of the tunable broadband light source through a Mach-Zehnder modulator (MZM). After passing through an erbium-doped fiber amplifier (EDFA) and a polarization controller (PC), the light beam has a certain power and a stable polarization state. Subsequently, the light beam passes through the device under test (DUT), and the corresponding output light beam is received by a coupling lens and passes through a polarizer, and finally is reflected at the center position of the metasurface. Due to conditions, manual fine adjustment is required to ensure that the light spot falls exactly at the center of the metasurface, and at the same time, the metasurface needs to be at the focal position of the lens. At the receiving end, manually fine adjust the landing positions of the light spots of the two reflected light beams so that they can be coupled by the coupling lens at the receiving end as much as possible. One of the two output light beams is directly connected to the spectrometer, and the other needs to be connected to the oscilloscope after passing through a photodetector (PD).

[0051] In this embodiment, the detection requirements of a factory area (within a few kilometers) are concentrated together. In the virtualization operation, a physical module can be divided into multiple logical units, and the specific number depends on the hardware configuration of the server and the requirements of the virtualization software. Without loss of generality, this embodiment assumes that the number of workstations s = 4, the number of each type of instrument n = 2, and the number of logical units of each instrument m = 3. In addition, the detection time is a random integer in [1, 3], that is, three types of data packets are considered. Under different instrument failure rates, the average detection delay and instrument utilization rate of the traditional scheme and the metasurface are analyzed. Here, the instrument failure rate is defined as: the number of failed logical units / the total number of logical units, and the failed logical units are randomly marked by spreading seeds. As shown in Figure 5 (a) - (b), under two failure rates, the average detection delay of the metasurface is always better than that of MEMS, and the improvement rate > 50% is more obvious with the increase of data packets. When the instrument failure rate increases, it means that the available instrument resources become fewer. However, the total number of data packets remains unchanged. Therefore, the average detection delays of both the metasurface and MEMS will increase. As shown in Figure 6 ​(a)~(b) respectively analyze the instrument resource utilization under different numbers of workstations (failure rate f=0.2) and different failure rates. As the number of workstations and the failure rate increase, the metasurface can always maintain a higher instrument resource utilization. This is because the metasurface designed in the present invention cooperates with virtualization to improve the detection efficiency and resource utilization.

[0052] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An industrial optical network intelligent inspection system based on passive metasurface, characterized in that: The following steps are involved: Virtualize instrument resources, that is, decompose each physical instrument into multiple logical units that work independently and do not affect each other, and connect each logical unit to the instrument server through the GPIB bus; The system is provided with workstations for placing the products to be inspected, and each workstation is provided with an optical cross-connector based on a refractive metasurface; When the product to be inspected is placed on the workstation, the workstation requests instrument resources from the instrument server and then establishes a connection with the logic unit through an optical cross-connector based on the refractive metasurface.

2. According to claim 1, an industrial optical network intelligent inspection system based on passive metasurface is characterized in that: The instrument resources include at least an oscilloscope and a spectrometer. The oscilloscope is used to test the wavelength of the product to be tested, and the spectrometer is used to test the eye diagram performance of the product to be tested.

3. An industrial optical network intelligent inspection system based on passive metasurface according to claim 1 or 2, characterized in that: The optical cross-connector based on the refractive metasurface refracts the received light beam into two types of light beams. The type I light beam is used to detect the wavelength of the product to be inspected, and the type II light beam is used to detect the eye diagram performance of the product to be inspected.

4. According to claim 3, an industrial optical network intelligent inspection system based on passive metasurface is characterized in that: The optical cross-connector based on refractive metasurface is composed of multiple super-unit arrays that achieve 0 to 2π phase coverage. Each super-unit array is composed of multiple super-atoms composed of a metal substrate, a silicon dioxide isolation layer and a top gold nano-pattern. The super-atom acts as a nano-antenna. When illuminated by an x-polarized or y-polarized incident plane wave, it will cause localized surface plasmon resonance, thereby radiating electromagnetic waves outward. The detuning amount can be adjusted by changing the size of the super-atom, thereby controlling the phase delay of the radiated electromagnetic wave.

5. According to claim 4, an industrial optical network intelligent inspection system based on passive metasurface is characterized in that: The parameters of the metaatom are optimized using the finite-difference time-domain algorithm. For the type II beam, the incident angle The reflection angle ω satisfies Where Λ is the length of the metasurface supercell and λ is the wavelength of the incident light.

6. The industrial optical network intelligent inspection system based on passive metasurface according to claim 3 or 4 is characterized in that: There are N instruments of each type, and each instrument is virtualized into M logic units. When the light beam of a workstation is reflected by the type I light beam based on the refractive metasurface to establish an optical path with the m-th logic unit of the n-th oscilloscope, and then the optical cross-connector of the refractive metasurface is rotated to make the type II light beam establish an optical path with the m-th logic unit of the n-th spectrometer, n∈{1,2,…,N}, m∈{1,2,…,M}.

7. The industrial optical network intelligent inspection system based on passive metasurface according to claim 6 is characterized in that: The position of the workstation is fixed and the position of each logic unit is also fixed. The angle of the logic unit light beam reflected from the oscilloscope by the optical cross-connector based on the refractive metasurface is rotated to the logic unit of the spectrometer at each workstation to form an angle mapping table. After the workstation requests the instrument resource from the instrument server, the instrument server sends the incident angle information to the workstation.

8. The industrial optical network intelligent inspection system based on passive metasurface according to claim 1 is characterized in that: Considering the two detection tasks of spectrum and eye diagram as data packets, different data packets require different detection times. At the same time, the data packet with the shortest detection time e is given priority to apply for the instrument. Assuming that the data packet is in a t At the moment, it is selected and sent to the nth station W n The workstation needs to apply to the instrument server to query whether the instrument is idle or faulty. The process of allocating instrument resources specifically includes: Select a logical unit with the highest current resource occupancy rate from among the idle and functioning meters, and randomly assign an idle logical unit to the data packet; If the meter is busy, that is, all logical units are occupied, but the meter functions normally, along with the completion of some detection services, the meter server will select the meter that will become idle soonest, and the allocation method of logical units is the same as 101; If the meter fails and all its logic units fail, the meter server queries and selects other logic units according to step 101 .