Linear array detector integral time matching method and device, storage medium and terminal

Abstract

The invention provides a linear array detector integral time matching method and device, a storage medium and a terminal. The method comprises the following steps: acquiring an original image shot by a preset wafer detector and corresponding original integral time; extracting a first ellipse and a second ellipse based on a wafer structure in the original image; the first ellipse and the second ellipse are mutually overlapped; and correcting the original integration time based on the long and short axes of the first ellipse and the long and short axes of the second ellipse to obtain corrected integration time. According to the invention, the corrected integral time can be automatically generated based on the original image and the original integral time, manual intervention is saved, and the integral time matching efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of detectors, and relates to a method for matching the integration time of a linear array detector, in particular to a method and device for matching the integration time of a linear array detector, a storage medium, and a terminal. Background Art

[0002] A linear array detector is a special type of sensor used to detect and record signals received by a single row of pixels or photosensitive elements arranged in a straight line. Different from a two-dimensional planar detector, a linear array detector can only capture information on one line at a time, so relative movement (such as the movement of the detector or the object to be detected) is required to gradually construct the entire image.

[0003] During the shooting process of a linear array detector, if the actual integration time differs significantly from the integration time set in the shooting parameters, it often leads to serious deformation problems in the image, which affects the accuracy and usability of the image.

[0004] In the prior art, to correct the integration time, it is necessary to manually adjust the integration time. However, in the application environment of industrial inspection, the on-site manual matching of the integration time is complex and time-consuming, and it is difficult to meet the requirements of efficient detection. Another method is to use a metal disc with a fixed size for calibration, and adjust the integration time by shooting the disc image and measuring the aspect ratio of the image. However, this method relies on manual measurement by technicians, which is not only cumbersome to operate, but also time-consuming and has low efficiency. Summary of the Invention

[0005] The purpose of the present invention is to provide a method and device for matching the integration time of a linear array detector, a storage medium, and a terminal, which are used to solve the technical problem that it is difficult for the detector in the prior art to achieve automatic integration time matching.

[0006] In a first aspect, the present invention provides a method for matching the integration time of a linear array detector, including:

[0007] Obtaining the original image captured by a preset wafer detector and the corresponding original integration time;

[0008] Based on the wafer structure in the original image, extracting a first ellipse and a second ellipse; the first ellipse and the second ellipse overlap each other;

[0009] Based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse, correcting the original integration time to obtain the corrected integration time.

[0010] In an embodiment of the present invention, correcting the original integration time includes:

[0011] Obtain a correction coefficient based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse, and use the product of the correction coefficient and the original integration time as the corrected integration time.

[0012] In an embodiment of the present invention,

[0013] The correction coefficient is the arithmetic mean of a first ratio and a second ratio;

[0014] The first ratio is the ratio of the first axis to the second axis in the first ellipse;

[0015] The second ratio is the ratio of the first axis to the second axis in the second ellipse;

[0016] Wherein, the first axis is the axis in the horizontal direction among the major axis and the minor axis of the ellipse, and the second axis is the axis in the vertical direction among the major axis and the minor axis of the ellipse.

[0017] In an embodiment of the present invention, based on the wafer structure in the original image, extracting the first ellipse and the second ellipse includes:

[0018] Obtain the histogram corresponding to the original image, where the histogram includes the occurrence times of different gray-level points;

[0019] Search left and right respectively from the middle gray level in the histogram to obtain the left threshold point and the right threshold point;

[0020] Set the gray level of the points in the original image whose gray level is in the gray level interval formed by the left threshold point and the right threshold point to 255, and set the gray level of the points in the original image outside the gray level interval to 0, so as to obtain the first ellipse and the second ellipse.

[0021] In an embodiment of the present invention, the left threshold point is the point where the gradient change is greater than a preset change value for the first time when searching left, and the right threshold point is the point where the gradient change is greater than a preset change value for the first time when searching right.

[0022] In an embodiment of the present invention, the left threshold point is the threshold point obtained by the triangular threshold method when searching left, and the right threshold point is the threshold point obtained by the triangular threshold method when searching right.

[0023] In a second aspect, the present invention further provides a linear array detector integration time matching device, which is characterized by including:

[0024] A data acquisition module, configured to acquire the original image captured by a preset wafer detector and the corresponding original integration time;

[0025] A structure extraction module, configured to extract a first ellipse and a second ellipse based on the wafer structure in the original image; the first ellipse and the second ellipse overlap each other.

[0026] A time matching module, configured to correct the original integration time based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse to obtain a corrected integration time.

[0027] In a third aspect, the present invention further provides a storage medium, on which a computer program is stored, and when the program is executed by a processor, the linear array detector integration time matching method as described above is implemented.

[0028] In a fourth aspect, the present invention further provides a terminal, including a processor and a memory, and the memory is communicatively connected to the processor;

[0029] The memory is configured to store a computer program, and the processor is configured to execute the computer program stored in the memory so that the terminal executes the linear array detector integration time matching method as described above.

[0030] As described above, the linear array detector integration time matching method, device, storage medium and terminal of the present invention have the following beneficial effects:

[0031] The present invention obtains the currently used integration time (original integration time) and the original image, and corrects the original integration time based on the first ellipse and the second ellipse to obtain the corrected integration time as the actual integration matching time. This method does not require modification of the hardware design. At the same time, it effectively avoids the problem that it is difficult to accurately obtain the actual FOD (distance from the radiation source to the object to be measured) and FDD (distance from the radiation source to the detector) in the prior art. The present invention is beneficial to improving the efficiency of industrial inspection and reducing manual participation. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 The flowchart of the linear array detector integration time matching method described in the embodiments of the present invention is shown.

[0033] Figure 2 The schematic diagram of images with different integration times in the linear array detector integration time matching method described in the embodiments of the present invention is shown.

[0034] Figure 3 The schematic diagram of extracting the first ellipse and the second ellipse in the linear array detector integration time matching method described in the embodiments of the present invention is shown.

[0035] Figure 4 The schematic diagram of the structure of the linear array detector integration time matching device described in the embodiments of the present invention is shown.

[0036] Figure 5A schematic structural diagram of the terminal according to an embodiment of the present invention is shown. Detailed implementation manners

[0037] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0038] The principle and implementation manners of the line array detector integration time matching method, device, storage medium and terminal of this embodiment will be elaborated in detail below, so that those skilled in the art can understand the line array detector integration time matching method, device, storage medium and terminal of this embodiment without creative labor.

[0039] The integration time is the time length during which the optoelectronic element accumulates the optical signal during the photosensitive process of an optical sensor (such as a line array detector or a camera). Simply put, the integration time is the "time window for receiving optical signals" of the sensor. The integration time of the detector, simply put, is the time for the detector to collect and process the optical signal. During this process, the detector continuously receives photons and converts them into electrical signals for accumulation. The length of the integration time determines the amount of optical signals that the detector can collect, thereby affecting the accuracy and reliability of the detection results. Reasonably setting the integration time of the detector is crucial for improving the performance of the detector.

[0040] To solve the above technical problems existing in the prior art, an embodiment of the present invention provides a line array detector integration time matching method.

[0041] Figure 1 A flowchart showing the line array detector integration time matching method according to an embodiment of the present invention is shown. Refer to Figure 1 As shown, the line array detector integration time matching method according to an embodiment of the present invention mainly includes steps S100 to S300.

[0042] Step S100: Obtain the original image captured by a preset wafer detector and the corresponding original integration time.

[0043] Specifically, the integration time matching method for the linear array detector in the embodiments of the present invention uses a wafer linear array detector to capture an original image. The wafer linear array detector is a linear array detector of a wafer with a fixed size. The original image is an image with unmatched integration. The present invention uses this original image as input and outputs the corresponding image after integration matching. At the same time, the integration time corresponding to the original image is obtained in advance as the original integration time.

[0044] Step S200: Based on the wafer structure in the original image, extract the first ellipse and the second ellipse; the first ellipse and the second ellipse overlap each other.

[0045] It should be noted that when using a wafer detector for shooting, different captured images have different display characteristics. Figure 2 FIG. shows the schematic diagrams of images with different integration times in the integration time matching method for the linear array detector described in the embodiments of the present invention. Refer to Figure 2 As shown, if the integration time of the image is matched, the image is an image close to a circle. If the integration time of the image is not matched, the image presents as two overlapping ellipses. Since the original image is obtained by using a wafer detector, it contains a wafer structure. Based on this wafer structure, two ellipses - the first ellipse and the second ellipse - can be extracted. These two ellipses present an overlapping relationship in the original image. Figure 3 FIG. shows the schematic diagram of extracting the first ellipse and the second ellipse in the integration time matching method for the linear array detector described in the embodiments of the present invention. Refer to Figure 3 As shown, the two extracted ellipses are used to correct the integration time subsequently.

[0046] Optionally, extracting the first ellipse and the second ellipse based on the wafer structure in the original image includes the following steps:

[0047] Step S201: Obtain the histogram corresponding to the original image. The histogram includes the occurrence times of different gray-level points.

[0048] Specifically, traverse each pixel point of the image, count the occurrence times of pixel points (i.e., gray-level points) with different gray values (0 - 255), and store the result as the histogram H(g), where g is the gray value and H(g) is the number of pixels with the gray value g. For an image with a wafer structure, the histogram is usually bimodal. The gray values of the foreground (wafer part) and the background form two main peaks, and the middle gray area is the transition area between the foreground and the background. The histogram corresponding to the original image contains the distribution of the number of pixels with different gray values, that is, the occurrence times of different gray-level points. The purpose of step S201 is to establish the relationship between the gray value and the occurrence frequency, providing a basis for subsequent threshold selection.

[0049] Step S202: Search left and right respectively from the middle gray level in the histogram to obtain the left threshold point and the right threshold point.

[0050] Middle gray level g mid Is the midpoint value of the histogram peak or the central value 127 of the histogram gray level range. The midpoint value of the peak is the average gray level value between two peaks. Those skilled in the art can select one of the above two results as the middle gray level based on the above two methods. Search for the left threshold point starting from the point corresponding to the middle gray level, that is, search for the left threshold point in the direction of lower gray level; search for the right threshold point starting from the point corresponding to the middle gray level, that is, search for the right threshold point in the direction of higher gray level. The left threshold point and the right threshold point serve as the basis for dividing the gray level values for subsequent extraction of the ellipse contour.

[0051] Step S203: Set the gray level of the points in the original image whose gray levels are within the gray level interval formed by the left threshold point and the right threshold point to 255, and set the gray levels of the points in the original image outside the gray level interval to 0 to obtain the first ellipse and the second ellipse.

[0052] According to the gray level interval (left threshold point and right threshold point) determined in step S202, perform binary processing on the image to separate the first ellipse and the second ellipse. The gray level interval is [g left ,g right , where g left Is the gray level value of the left threshold point, and g right Is the gray level value of the right threshold point. The image binary processing is specifically as follows: Traverse each pixel point I(x, y) in the original image and process it using the following formula:

[0053]

[0054] Among them, I′(x, y) is the processed pixel point. The pixels with gray levels within the interval are set to 255 (white), representing the foreground area (including two ellipses), and the pixels with gray levels outside the interval are set to 0 (black), representing the background area. Collect all the processed pixel points to form the processed image. In the processed image, the foreground area contains two overlapping ellipses, that is, the contours of the first ellipse and the second ellipse.

[0055] Steps S201 - S203 combine histogram analysis and dynamic threshold search to efficiently extract the first ellipse and the second ellipse in the original image, providing an accurate foreground contour for subsequent integration time correction or shape analysis.

[0056] Optionally, the left threshold point is the point where the gradient change first exceeds a preset change value when searching leftward, and the right threshold point is the point where the gradient change first exceeds the preset change value when searching rightward. The preset change value is used to distinguish the sensitivity of the gradient change. When the gradient change is greater than the preset change value, it indicates that a large gradient change has occurred, and at this time, the corresponding threshold point (left threshold point or right threshold point) is determined to be captured. Those skilled in the art can set an appropriate preset change value according to the actual situation based on the introduction of the present invention. For example, when the boundary of the original image is relatively blurred or the gray distribution is relatively smooth, the preset change value can be appropriately lowered; when the boundary of the original image is clear or the gray distribution changes suddenly, the preset change value can be appropriately increased to detect the boundary of the ellipse through the gradient change. The above method for determining the left and right threshold points based on the gradient change effectively solves the deficiencies of the traditional fixed threshold method in scenarios with blurred boundaries or complex lighting by detecting the significant change positions in the gray histogram, and provides a more accurate segmentation result for extracting the first ellipse and the second ellipse.

[0057] Optionally, the left threshold point is the threshold point obtained by the triangular threshold method when searching leftward, and the right threshold point is the threshold point obtained by the triangular threshold method when searching rightward. The triangular threshold method is an automatic threshold selection method based on the shape of the gray histogram. It determines the segmentation threshold by finding the point with the maximum distance between the peak and valley of the histogram. This method is simple and fast, and is suitable for the ellipse extraction scenario where there is an obvious gray difference between the object and the background of the present invention. Specifically, the triangular threshold method obtains the peak point and valley point in the gray histogram within the search range (searching leftward or rightward), connects the peak point and the valley point into a straight line, and finds the point closest to this straight line within the search range as the target point, and the target point is the threshold point corresponding to the search range. By using the triangular threshold segmentation method, the left and right threshold points are dynamically determined, providing a reliable segmentation basis for extracting the first ellipse and the second ellipse, and this method effectively improves the accuracy of ellipse extraction.

[0058] Step S300: Modify the original integration time based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse to obtain the modified integration time.

[0059] Since two overlapping ellipses will appear in the original image when the integration time does not match, the main features (major and minor axes) of the two overlapping ellipses are analyzed, and the original integration time is modified to obtain the modified integration time.

[0060] Optionally, the correction of the original integration time includes: obtaining a correction coefficient based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse, and using the product of the correction coefficient and the original integration time as the corrected integration time. In this way, a specific correction coefficient is obtained through the major and minor axis parameters of the first ellipse and the second ellipse, and the product obtained by multiplying the correction coefficient by the original integration time is used as the corrected integration time. The correction coefficient is a numerical feature obtained based on the characteristics of the ellipse set. Correcting the integration time based on this correction coefficient is more accurate and has a wider application range.

[0061] In a specific embodiment, the following formula is referred to for obtaining the correction coefficient:

[0062]

[0063] Where k represents the correction coefficient, R1 represents the first ratio, R2 represents the second ratio, A1 represents the first axis in the first ellipse, B1 represents the second axis in the first ellipse, A2 represents the second axis in the second ellipse, and B2 represents the second axis in the second ellipse. Specifically, the correction coefficient k is the arithmetic mean of the first ratio and the second ratio; the first ratio is the ratio of the first axis to the second axis in the first ellipse; the second ratio is the ratio of the first axis to the second axis in the second ellipse. It should be noted that the first axis is the axis in the horizontal direction among the major axis and the minor axis of the ellipse, and the second axis is the axis in the vertical direction among the major axis and the minor axis of the ellipse.

[0064] The protection scope of the linear array detector integration time matching method in the embodiments of the present invention is not limited to the execution order of the steps listed in this embodiment. Any solution achieved by adding or reducing steps of the prior art and replacing steps according to the principle of the present invention is included in the protection scope of the present invention.

[0065] The linear array detector integration time matching method in the embodiments of the present invention can correct the original integration time by obtaining the currently used integration time (original integration time) and the original image, so as to obtain the corrected integration time as the actual integration matching time. The present invention is beneficial to improving the efficiency of industrial inspection and reducing manual participation.

[0066] To solve the above technical problems existing in the prior art, the embodiments of the present invention also provide a linear array detector integration time matching device.

[0067] Figure 3 The structural schematic diagram of the linear array detector integration time matching device described in the embodiments of the present invention is shown. Refer to Figure 3 As shown, the linear array detector integration time matching device in the embodiments of the present invention includes a data acquisition module, a structure extraction module, and a time matching module.

[0068] A data acquisition module for acquiring the original image captured by a preset wafer detector and the corresponding original integration time;

[0069] A structure extraction module for extracting a first ellipse and a second ellipse based on the wafer structure in the original image; the first ellipse and the second ellipse overlap each other;

[0070] A time matching module for correcting the original integration time based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse to obtain the corrected integration time.

[0071] The linear array detector integration time matching device according to the embodiment of the present invention can correct the original integration time by acquiring the currently used integration time (original integration time) and the original image, so as to obtain the corrected integration time as the actual integration matching time. The present invention is beneficial to improving the efficiency of industrial inspection and reducing manual participation.

[0072] To solve the above technical problems existing in the prior art, an embodiment of the present invention also provides a storage medium, on which a computer program is stored, characterized in that when the program is executed by a processor, all steps of the linear array detector integration time matching method according to the embodiment are implemented.

[0073] The specific steps of the linear array detector integration time matching method and the beneficial effects obtained by using the readable storage medium provided by the embodiment of the present invention are the same as those of the above embodiment, and will not be repeated herein.

[0074] Those of ordinary skill in the art can understand that all or part of the steps in the method of the above embodiment can be completed by instructing a processor through a program, and the program can be stored in a computer-readable storage medium. The storage medium is a non-transitory medium, such as a random access memory, a read-only memory, a flash memory, a hard disk, a solid-state drive, a magnetic tape, a floppy disk, an optical disc, and any combination thereof. The above storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or a data center integrating one or more available media. The available medium can be a magnetic medium (such as a floppy disk, a hard disk, a magnetic tape), an optical medium (such as a digital video disc (DVD)), or a semiconductor medium (such as a solid state disk (SSD)), etc.

[0075] To solve the above technical problems existing in the prior art, an embodiment of the present invention also provides a terminal. Figure 4 The structural schematic diagram of the terminal according to the embodiment of the present invention is shown. Refer toFigure 4 As shown, the terminal in the embodiment of the present invention includes a processor and a memory, and the memory is communicatively connected to the processor; the memory is used to store a computer program, and the processor is used to execute the computer program stored in the memory so that the terminal executes all steps of the linear array detector integration time matching method in the above embodiment.

[0076] The specific steps of the linear array detector integration time matching method and the beneficial effects obtained by applying the terminal provided in the embodiment of the present invention are the same as those in the above embodiment, and will not be elaborated here.

[0077] It should be noted that the memory may include a random access memory (Random Access Memory, abbreviated as RAM), and may also include a non-volatile memory, such as at least one disk memory. Similarly, the processor may also be a general-purpose processor, including a central processing unit (Central Processing Unit, abbreviated as CPU), a network processor (Network Processor, abbreviated as NP), etc.; it may also be a digital signal processor (Digital Signal Processing, abbreviated as DSP), an application specific integrated circuit (Application Specific Integrated Circuit, abbreviated as ASIC), a field programmable gate array (Field Programmable Gate Array, abbreviated as FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0078] Although the disclosed embodiments of the present invention are as above, the content described is only an embodiment adopted for the convenience of understanding the present invention and is not used to limit the present invention. Any person skilled in the art within the technical field to which the present invention pertains may make any modifications and changes in the form of implementation and details without departing from the spirit and scope disclosed by the present invention. However, the protection scope of the present invention shall still be subject to the scope defined by the appended claims.

Claims

1. A linear array detector integration time matching method, comprising: Obtaining the original image captured by the preset wafer detector and the corresponding original integration time; Extracting a first ellipse and a second ellipse based on a circular structure in the original image; The first ellipse and the second ellipse overlap each other; The original integration time is corrected based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse to obtain a corrected integration time.

2. The linear array detector integration time matching method according to claim 1, characterized in that: Correcting the original integration time includes: A correction coefficient is obtained based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse, and the product of the correction coefficient and the original integration time is used as the corrected integration time.

3. The linear array detector integration time matching method according to claim 2, characterized in that: The correction coefficient is the arithmetic mean of the first ratio and the second ratio; The first ratio is a ratio of a first axis to a second axis in the first ellipse; The second ratio is a ratio of the first axis to the second axis in the second ellipse; The first axis is the axis in the horizontal direction between the major axis and the minor axis of the ellipse, and the second axis is the axis in the vertical direction between the major axis and the minor axis of the ellipse.

4. The linear array detector integration time matching method according to claim 1, characterized in that: Based on the circular structure in the original image, extracting the first ellipse and the second ellipse comprises: Obtaining a histogram corresponding to the original image, wherein the histogram includes the number of occurrences of different grayscale points; Searching leftward and rightward respectively from the middle grayscale in the histogram to obtain a left threshold point and a right threshold point; The grayscale of the points in the original image whose grayscale is located in the grayscale interval formed by the left threshold point and the right threshold point is set to 255, and the grayscale of the points in the original image whose grayscale is outside the grayscale interval is set to 0 to obtain the first ellipse and the second ellipse.

5. The linear array detector integration time matching method according to claim 4, characterized in that: The left threshold point is the point where the gradient change is greater than the preset change value for the first time when searching to the left, and the right threshold point is the point where the gradient change is greater than the preset change value for the first time when searching to the right.

6. The linear array detector integration time matching method according to claim 4, characterized in that: The left threshold point is a threshold point obtained by the triangular threshold method when searching to the left, and the right threshold point is a threshold point obtained by the triangular threshold method when searching to the right.

7. A linear array detector integration time matching device, characterized in that: include: A data acquisition module, used to acquire the original image taken by the preset wafer detector and the corresponding original integration time; A structure extraction module, configured to extract a first ellipse and a second ellipse based on a circular structure in the original image; the first ellipse and the second ellipse overlap each other; The time matching module is used to correct the original integration time based on the major and minor axes of the first ellipse and the major and minor axes of the second ellipse to obtain a corrected integration time.

8. A storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the linear array detector integration time matching method described in any one of claims 1 to 6 is implemented.

9. A terminal, characterized in that: It comprises a processor and a memory, wherein the memory is communicatively connected to the processor; the memory is used to store a computer program, and the processor is used to execute the computer program stored in the memory, so that the terminal executes the linear array detector integration time matching method according to any one of claims 1 to 6.

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