Ultrasonic vibration assisted laser and electrolysis synchronous combined machining device and method

Abstract

The invention discloses an ultrasonic vibration assisted laser and electrolysis synchronous combined machining device and method. The device comprises a laser irradiation system, an electrolytic machining system, an ultrasonic vibration system, a three-axis feeding mechanism, a base and a stand column. Wherein the laser irradiation system comprises a laser, a light blocking mirror, a reflecting mirror and a focusing lens; the electrolytic machining system comprises an electrolytic power supply, conductive glass, an electricity leading sheet, a workpiece, an electrolytic tank and an annular clamp; the ultrasonic vibration system comprises an ultrasonic transducer and an ultrasonic power supply; the device has the beneficial effects that the annular clamp achieves vibration of the electric glass in a small range through ultrasonic vibration generated by the ultrasonic vibration system, and then the problem that in laser and electrolysis synchronous combined machining, electrolyte flow is not smooth is solved. A low-power high-frequency laser is adopted, the spot size is small, single pulse laser energy is small, generated bubbles are small, the high-frequency pulse period is short, the bubbles cannot be increased in time, and the precision of laser and electrolysis synchronous combined machining is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-electrolytic machining of special manufacturing technology, and in particular relates to an ultrasonic vibration-assisted laser and electrolytic synchronous composite machining device and method. Background Art

[0002] With the rapid advancement of science and technology, the trend of miniaturization of industrial products is becoming increasingly prominent, especially in the fields of aerospace and precision machinery. The processing of microstructures such as micro holes, narrow grooves, and fine slits has become an important and dynamic research field. Taking the turbine blades of aircraft engines as an example, processing many tiny holes on its components can not only ensure that the structure has good mechanical properties, but also effectively solve the heat dissipation problem of the engine.

[0003] At present, there are two main methods for processing microstructures such as micro holes, narrow grooves, and fine slits: mechanical processing and special processing. Among them, mechanical processing mainly covers drilling, punching and other processes; special processing is represented by electrolytic processing, and also includes laser and electrolytic composite processing, electric spark machining, electron beam machining, etc.

[0004] Among them, electrolytic machining is based on the principle that metal will undergo anodic dissolution in the electrolyte to achieve the forming of parts. During the machining process, the cathode and the anode are separated from each other and do not directly contact each other, and the processed products are discharged through the electrolyte. This machining method is not limited by the strength, hardness and toughness of the material, and can obtain good surface quality. However, it is also restricted by factors such as stray corrosion, poor localization and difficulty in cathode manufacturing. Laser machining heats the workpiece to a vaporized state, thereby removing the material. Although this method has high machining efficiency, it inevitably has problems such as recast layer and microcracks. Laser and electrolytic composite machining makes full use of the respective advantages of laser machining and electrolytic machining by controlling the spatiotemporal synergistic coupling of laser and electrochemical energy fields. However, this method still faces problems such as poor discharge of processed products and impurities generated in the machining gap affecting light transmission and conductivity, so there is still a lot of room for improvement in machining efficiency. Summary of the invention

[0005] In order to solve the above problems, the object of the present invention is to provide an ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device and method.

[0006] In order to achieve the above-mentioned purpose, the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention comprises a laser irradiation system, an electrolytic processing system, an ultrasonic vibration system, a three-axis feeding mechanism, a base and a column; wherein the laser irradiation system comprises a laser, a light-blocking mirror, a reflecting mirror and a focusing lens; the electrolytic processing system comprises an electrolytic power supply, conductive glass, a current guide sheet, a workpiece, an electrolytic cell and a ring-shaped fixture; the ultrasonic vibration system comprises an ultrasonic transducer and an ultrasonic power supply;

[0007] The three-axis feeding mechanism is installed in the middle of the base in a three-dimensional movable manner; the lower end of the column is fixed to the edge of the base, and the upper end is connected to the lower end of the ultrasonic transducer; the electrolytic cell is fixed on the three-axis feeding mechanism, and the interior is used to contain electrolyte and place workpieces; the ultrasonic transducer is provided with an aviation plug, and the aviation plug is connected to the ultrasonic power supply through a wire; the annular clamp includes a horizontal support rod, an upper ring, a lower ring and a vertical connecting rod; the upper ring and the lower ring are connected to each other through a plurality of vertical connecting rods; one end of the horizontal support rod is connected to the side of the upper ring, and the other end is connected to the upper end of the ultrasonic transducer by bolts; the conductive glass is installed at the lower The center hole of the ring has a conductive coating on the bottom surface; the lead sheet is fixed to one side of the bottom surface of the lower ring by bolts and contacts the conductive coating on the bottom surface of the conductive glass; the workpiece and the lead sheet are respectively connected to the positive and negative electrodes of the electrolytic power supply, wherein the workpiece serves as the anode and the conductive glass serves as the cathode; the focusing lens is horizontally arranged above the upper ring; the reflector is tiltedly arranged just above the focusing lens; the laser is arranged on one side of the reflector, and the laser emission port faces the reflector; the light blocking mirror is installed on the light path between the laser and the reflector, and can pass or block the light path, and its regular opening and closing can be achieved by setting the switching time of the light blocking mirror.

[0008] The laser uses a femtosecond pulse laser, and the emitted pulse laser beam has a wavelength of 1030nm, a pulse width of 300fs, and an energy flux density of 0-20kJ / m 2 , frequency is 0.025MHz-5MHz, power is 0-50W.

[0009] The conductive glass is ITO conductive glass, which has a laser transmittance greater than 80% and a resistivity of 5×10 -4 Ω·cm

[0010] The electrolyte is NaNO with a mass concentration of 12.5%. 3 Solution.

[0011] The electrolysis power source adopts a pulse power source with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

[0012] The processing method using the ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device comprises the following steps performed in sequence:

[0013] S1. Place the workpiece connected to the positive electrode of the electrolytic power supply in the electrolytic cell; start the three-axis feeding mechanism to drive the electrolytic cell to achieve three-dimensional movement and place the workpiece in the electrolytic cell at a distance of 2-3 mm directly below the conductive glass;

[0014] S2, inject 12.5% ​​NaNO into the electrolytic cell. 3 The solution is used as an electrolyte, and the workpiece is immersed in the electrolyte; then the electrolytic power supply is turned on, the workpiece is used as an anode, the conductive glass is used as a cathode, and an electrochemical circuit is formed between the conductive glass and the workpiece, thereby generating a passivation layer on the surface of the workpiece to perform electrolytic processing;

[0015] S3, turning on the ultrasonic power supply, transmitting the ultrasonic vibration to the conductive glass through the annular fixture by the ultrasonic transducer, promoting the flow of the electrolyte, and discharging the electrolysis products in the electrolysis gap;

[0016] S4. Turn on the laser and the light-blocking mirror, so that the pulsed laser beam emitted by the laser is reflected by the reflecting mirror and focused by the focusing lens to irradiate the surface of the workpiece, and at the same time, the three-axis feed mechanism is moved in the horizontal plane, thereby removing the passivation layer on the surface of the workpiece during the laser pulse to expose new workpiece substrate material, and regenerating the passivation layer on the exposed surface of the workpiece under the electrochemical reaction during the laser pulse interval; through the repeated action of the pulsed laser beam and the electrochemical reaction, the surface material of the workpiece in the laser irradiation area is gradually removed.

[0017] The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device and method provided by the present invention have the following beneficial effects:

[0018] 1. The annular fixture uses the ultrasonic vibration generated by the ultrasonic vibration system to achieve vibration of the electric glass in a small range, thereby solving the problem of poor electrolyte flow in the synchronous composite processing of laser and electrolysis.

[0019] 2. Use low-power, high-frequency lasers, which have small spot size, small single-pulse laser energy, small bubbles generated, short high-frequency pulse cycles, and no time for bubbles to grow, which helps improve the accuracy of laser and electrolytic synchronous composite processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention.

[0021] Figure 2 A schematic diagram of an exploded view of an electrolytic machining device in the ultrasonic vibration-assisted laser and electrolytic synchronous composite machining device provided by the present invention. DETAILED DESCRIPTION

[0022] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] like Figure 1-Figure 2 As shown, the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention includes a laser irradiation system, an electrolytic processing system, an ultrasonic vibration system, a three-axis feeding mechanism 10, a base 11 and a column 12; wherein the laser irradiation system includes a laser 3, a light blocking mirror 2, a reflector 1 and a focusing lens 4; the electrolytic processing system includes an electrolytic power supply 7, a conductive glass 5, a current guide sheet 6, a workpiece 8, an electrolytic cell 9 and a ring clamp 15; the ultrasonic vibration system includes an ultrasonic transducer 14 and an ultrasonic power supply 13;

[0024] The three-axis feeding mechanism 10 is installed in the middle of the base 11 in a three-dimensional movable manner; the lower end of the column 12 is fixed to the edge of the base 11, and the upper end is connected to the lower end of the ultrasonic transducer 14; the electrolytic cell 9 is fixed on the three-axis feeding mechanism 10, and the interior is used to contain electrolyte and place the workpiece 8; the ultrasonic transducer 14 is provided with an aviation plug, and the aviation plug is connected to the ultrasonic power supply 13 through a wire; the annular clamp 15 includes a horizontal support rod 15-1, an upper ring 15-2, a lower ring 15-3 and a vertical connecting rod 15-4; the upper ring 15-2 and the lower ring 15-3 are connected to each other by a plurality of vertical connecting rods 15-4; one end of the horizontal support rod 15-1 is connected to the side of the upper ring 15-2, and the other end is connected to the ultrasonic transducer 1 by bolts. 4; the conductive glass 5 is installed at the center hole of the lower ring 15-3, and has a conductive coating on the bottom surface; the lead sheet 6 is fixed to one side of the bottom surface of the lower ring 15-3 by bolts, and contacts the conductive coating on the bottom surface of the conductive glass 5; the workpiece 8 and the lead sheet 6 are respectively connected to the positive and negative electrodes of the electrolytic power supply 7, wherein the workpiece 8 serves as the anode and the conductive glass 5 serves as the cathode; the focusing lens 4 is horizontally arranged above the upper ring 15-2; the reflector 1 is tilted and arranged directly above the focusing lens 4; the laser 3 is arranged on one side of the reflector 1, and the laser emission port faces the reflector 1; the light blocking mirror 2 is installed on the light path between the laser 3 and the reflector 1, and can pass or block the light path, and its regular opening and closing can be achieved by setting the switching time of the light blocking mirror 2;

[0025] The laser 3 is a femtosecond pulse laser, the emitted pulse laser beam has a wavelength of 1030nm, a pulse width of 300fs, and an energy flux density of 0-20kJ / m 2 , frequency is 0.025MHz-5MHz, power is 0-50W.

[0026] The conductive glass 5 is ITO conductive glass, which has a laser transmittance greater than 80% and a resistivity of 5×10-4 Ω·cm

[0027] The electrolyte is NaNO with a mass concentration of 12.5%. 3 Solution.

[0028] The electrolysis power source 7 is a pulse power source with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

[0029] The processing method using the above-mentioned ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device is described as follows:

[0030] First, the staff placed the workpiece 8 connected to the positive electrode of the electrolytic power supply 7 into the electrolytic cell 9; then the three-axis feeding mechanism 10 was turned on to drive the electrolytic cell 9 to achieve three-dimensional movement and to position the workpiece 8 in the electrolytic cell 9 at a distance of 2-3 mm directly below the conductive glass 5; then, NaNO with a mass concentration of 12.5% ​​was injected into the electrolytic cell 9. 3 The solution is used as an electrolyte, and the workpiece 8 is immersed in the electrolyte; then the electrolytic power supply 7 is turned on, the workpiece 8 is used as the anode, the conductive glass 5 is used as the cathode, and an electrochemical circuit is formed between the conductive glass 5 and the workpiece 8, thereby generating a passivation layer on the surface of the workpiece 8 for electrolytic processing, and the input voltage can be adjusted by the electrolytic power supply 7; the ultrasonic power supply 13 is turned on, and the ultrasonic vibration is transmitted to the conductive glass 5 through the annular clamp 15 by the ultrasonic transducer 14, so as to promote the flow of the electrolyte and discharge the electrolytic products in the electrolytic gap to improve the processing quality; the laser 3 and the light blocking mirror 2 are turned on, so that the pulsed laser beam emitted by the laser 3 is irradiated to the surface of the workpiece 8 after the reflection effect of the reflector 1 and the focusing effect of the focusing lens 4, and the three-axis feeding mechanism 10 is moved in the horizontal plane at the same time, thereby removing the passivation layer on the surface of the workpiece 8 during the laser pulse duration, exposing a new workpiece matrix material, and the exposed surface of the workpiece 8 regenerates the passivation layer under the electrochemical reaction during the laser pulse interval. Through the repeated action of the pulsed laser beam and the electrochemical reaction, the surface material of the workpiece 8 in the laser irradiated area is gradually removed. Due to the protective effect of the surface passivation layer, the material of the workpiece 8 in the laser non-irradiated area will not be removed, thereby realizing ultrasonic vibration-assisted laser and electrolysis synchronous composite processing.

Claims

1. An ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device, characterized in that: The ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device comprises a laser irradiation system, an electrolytic processing system, an ultrasonic vibration system, a three-axis feeding mechanism (10), a base (11) and a column (12); wherein the laser irradiation system comprises a laser (3), a light blocking mirror (2), a reflector (1) and a focusing lens (4); the electrolytic processing system comprises an electrolytic power source (7), a conductive glass (5), a current guide sheet (6), a workpiece (8), an electrolytic cell (9) and a ring-shaped fixture (15); and the ultrasonic vibration system comprises an ultrasonic transducer (14) and an ultrasonic power source (13); The three-axis feeding mechanism (10) is installed in the middle of the base (11) in a three-dimensional movable manner; the lower end of the column (12) is fixed to the edge of the base (11), and the upper end is connected to the lower end of the ultrasonic transducer (14); the electrolytic cell (9) is fixed on the three-axis feeding mechanism (10), and the interior is used to contain electrolyte and place the workpiece (8); the ultrasonic transducer (14) is provided with an aviation plug, and the aviation plug is connected to the ultrasonic power supply (13) through a wire; the annular clamp (15) includes a horizontal support rod (15-1), an upper circular ring (15-2), a lower circular ring (15-3) and a vertical connecting rod (15-4); the upper circular ring (15-2) and the lower circular ring (15-3) are connected as a whole through a plurality of vertical connecting rods (15-4); one end of the horizontal support rod (15-1) is connected to the side of the upper ring (15-2), and the other end is connected to the upper end of the ultrasonic transducer (14) by means of bolts; the conductive glass (5) is installed at the center hole of the lower ring (15-3), and has a conductive coating on the bottom surface; the lead sheet (6) is fixed to one side of the bottom surface of the lower ring (15-3) by means of bolts, and is in contact with the conductive coating on the bottom surface of the conductive glass (5); the workpiece (8) and the lead sheet (6) are respectively connected to the positive and negative electrodes of the electrolytic power source (7), wherein the workpiece (8) serves as the anode and the conductive glass (5) serves as the cathode; The focusing lens (4) is horizontally arranged above the upper circular ring (15-2); the reflecting mirror (1) is tiltedly arranged directly above the focusing lens (4); the laser (3) is arranged on one side of the reflecting mirror (1), and the laser emission port faces the reflecting mirror (1); and the light blocking mirror (2) is installed on the optical path between the laser (3) and the reflecting mirror (1).

2. The ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device according to claim 1 is characterized in that: The laser (3) is a femtosecond pulse laser, the wavelength of the emitted pulse laser beam is 1030nm, the pulse width is 300fs, and the energy flux density is 0-20kJ / m 2 , frequency is 0.025MHz-5MHz, power is 0-50W.

3. The ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device according to claim 1 is characterized in that: The conductive glass (5) is ITO conductive glass, with a laser transmittance greater than 80% and a resistivity of 5×10 -4 Ω·cm.

4. The ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device according to claim 1, characterized in that: The electrolyte is a NaNO3 solution with a mass concentration of 12.5%.

5. The ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device according to claim 1 is characterized in that: The electrolysis power source (7) adopts a pulse power source with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

6. A processing method using the ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device according to any one of claims 1 to 5, characterized in that: The processing method comprises the following steps performed in sequence: S1. Place a workpiece (8) connected to the positive electrode of an electrolytic power source (7) in an electrolytic cell (9); start a three-axis feeding mechanism (10) to drive the electrolytic cell (9) to achieve three-dimensional movement and position the workpiece (8) in the electrolytic cell (9) at a distance of 2-3 mm directly below the conductive glass (5); S2, injecting a NaNO3 solution with a mass concentration of 12.5% ​​as an electrolyte into the electrolytic cell (9), and immersing the workpiece (8) in the electrolyte; then turning on the electrolytic power supply (7), using the workpiece (8) as an anode and the conductive glass (5) as a cathode, forming an electrochemical circuit between the conductive glass (5) and the workpiece (8), thereby generating a passivation layer on the surface of the workpiece (8) and performing electrolytic processing; S3, turning on the ultrasonic power supply (13), transmitting the ultrasonic vibration to the conductive glass (5) through the annular clamp (15) via the ultrasonic transducer (14), thereby promoting the flow of the electrolyte and discharging the electrolysis products in the electrolysis gap; S4, turning on the laser (3) and the light-blocking mirror (2), so that the pulsed laser beam emitted by the laser (3) is reflected by the reflecting mirror (1) and focused by the focusing lens (4) and then irradiated onto the surface of the workpiece (8), and at the same time, the three-axis feeding mechanism (10) is moved in a horizontal plane, thereby removing the passivation layer on the surface of the workpiece (8) during the laser pulse period, exposing new workpiece substrate material, and regenerating the passivation layer on the exposed surface of the workpiece (8) under the electrochemical reaction during the laser pulse interval; through the repeated action of the pulsed laser beam and the electrochemical reaction, the surface material of the workpiece (8) in the laser irradiation area is gradually removed.

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