Fluorescent touch sensor and preparation method and application thereof

Abstract

The invention provides a tactile sensor and a preparation method and application thereof. The tactile sensor comprises a substrate, a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array and a cover plate. The core of the preparation method of the touch sensor is to induce the self-assembly of the thermoplastic elastomer and the aggregation-induced emission molecules through the capillary liquid bridge, so that the preparation of the micro touch sensor is realized. The tactile sensor provided by the invention can quickly and accurately detect the surface stress, has the characteristics of low cost, easiness in preparation, easiness in signal processing and high sensitivity, and is beneficial to promoting the practical application of the tactile sensor in industrial production.

Description

Technical Field

[0001] The present invention relates to the field of sensors, and in particular to a fluorescent tactile sensor and a preparation method and application thereof. Background Art

[0002] In recent years, with the needs of production and life, the research and development of various sensor devices has made great progress, especially tactile sensor devices have attracted much attention. In particular, the demand for automated production lines, prosthetic equipment, and robotic surgical systems continues to rise, and tactile sensor products will become more and more popular. Tactile sensors are devices or devices that can sense the measured pressure and convert it into a usable output signal according to certain rules. But they are still limited in practical applications. One of the main reasons is that the data obtained by tactile sensors is more complicated to process than other sensors. At the same time, there is no tactile sensor perception system that can reach the same level as the human somatosensory system, and most tactile sensors are still mainly research tools. In addition, they still have shortcomings such as high cost, complex manufacturing and assembly and disassembly processes, difficult data processing, and poor flexibility. Continuous in-depth research is needed to meet higher requirements and achieve wide application. Therefore, it is very important to design a low-cost, easy-to-prepare, easy-to-process signal, and high-sensitivity tactile sensor for the production and wide application of tactile sensors in engineering. Summary of the invention

[0003] In order to improve the deficiencies of the prior art, an object of the present invention is to provide a fluorescent tactile sensor and a preparation method and use thereof, wherein the fluorescent tactile sensor has the characteristics of low cost, easy preparation, easy signal processing and high sensitivity.

[0004] The object of the present invention is achieved through the following technical solutions:

[0005] A tactile sensor comprises a substrate, a thermoplastic elastomer / aggregation-induced luminescence molecule composite microdot array and a cover plate;

[0006] The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is microdots prepared from thermoplastic elastomer and aggregation-induced emission molecules arranged at equal intervals;

[0007] The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is fixed on a substrate;

[0008] The cover plate covers the thermoplastic elastomer / aggregation-induced emission molecule composite micro-dot array.

[0009] According to the present invention, the substrate is a glass sheet, a silicon sheet or a quartz sheet; and / or the thickness of the substrate is 0.5-5 mm; and / or the cover plate is a quartz glass sheet; and / or the thickness of the cover plate is 0.5-5 mm.

[0010] According to the present invention, the diameter of the micro-dots is 2-8 μm; and / or, the height of the micro-dots is 0.9-1.5 μm; and / or, the interval between adjacent micro-dots is 8-12 μm.

[0011] According to the present invention, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is a triangular array, a square array, a diamond array or a hexagonal array; and / or the shape of the microdot is hemispherical or cylindrical.

[0012] According to the present invention, the mass proportion of the thermoplastic elastomer in the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is greater than or equal to 90wt% and less than 100wt%; the mass proportion of the aggregation-induced emission molecule is greater than 0wt% and less than or equal to 10wt%;

[0013] and / or, the thermoplastic elastomer is selected from styrene butadiene copolymer;

[0014] And / or, the aggregation-induced emission molecule is selected from at least one of 2-[4-(diphenylamino)benzylidenemalononitrile] and tetraphenylethylene.

[0015] According to the present invention, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is prepared by a self-assembled liquid film directional shrinkage method.

[0016] The present invention also provides a method for preparing the above-mentioned tactile sensor, the method comprising the following steps:

[0017] 1) mixing a thermoplastic elastomer and an aggregation-induced emission molecule and dissolving them in an organic solvent to obtain a mixed solution;

[0018] 2) placing the silicon wafer template on a glass slide, dripping the mixed solution of step 1) onto the silicon wafer template, and covering the top with a substrate, fixing the glass slide, the silicon wafer template and the substrate, and then placing them in an electronic moisture-proof box for self-assembly;

[0019] 3) removing the silicon wafer template and the glass slide, and obtaining a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array on the substrate surface;

[0020] 4) Covering the surface of the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array with a cover plate to prepare the tactile sensor.

[0021] According to the present invention, in step 1), the concentration of the solute in the mixed solution is 20-80 mg / mL;

[0022] And / or, in step 2), the temperature of the self-assembly is room temperature; the time of the self-assembly is 24-72 hours;

[0023] And / or, in step 2), the silicon wafer template is, for example, a silicon wafer template with a micro-column structure, and the micro-column structure is in an array shape.

[0024] The present invention also provides a use of the above-mentioned tactile sensor, which is used in the field of tactile sensing.

[0025] The present invention also provides a tactile sensing device, which comprises the tactile sensor and a fluorescence spectrometer.

[0026] Beneficial effects of the present invention:

[0027] The present invention provides a tactile sensor and its preparation method and use. The tactile sensor includes a substrate, a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array and a cover plate. The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is a regularly arranged microdot, which can evenly disperse the force and improve the sensing sensitivity; at the same time, the thermoplastic elastomer in the microdot, as the main component of the microdot, provides excellent reversible deformation, and realizes the stress response repeatability and rapid response characteristics of the tactile sensor; the aggregation-induced emission molecule in the microdot is a signal output component, and its luminescence property reflects the change of the internal space of the microdot in real time and accurately, giving the tactile sensor an excellent response relationship between force and fluorescence intensity. The core of the preparation method of the tactile sensor of the present invention is to induce the self-assembly of thermoplastic elastomer and aggregation-induced emission molecule through capillary liquid bridge, so as to realize the preparation of micro tactile sensor. The tactile sensor provided by the present invention can quickly and accurately detect the force on its surface, and has the characteristics of low cost, easy preparation, easy signal processing and high sensitivity, which is conducive to promoting the practical application of tactile sensors in industrial production. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 The figure is a flow chart for preparing thermoplastic elastomer / aggregation-induced emission molecule composite microdot arrays;

[0029] Figure 2 A schematic diagram of the structure of a silicon wafer template with a micro-pillar structure used in the preparation of thermoplastic elastomer / aggregation-induced emission molecule composite micro-dot arrays;

[0030] Figure 3 A schematic diagram of the structure of the tactile sensor device provided in Example 1;

[0031] Figure 4 A graph showing the relationship between the diameter of microdots in the tactile sensing device provided in Example 2 and the concentration of the solute used to prepare the microdot array;

[0032] Figure 5 A graph showing the relationship between the solute concentration and the fluorescence response intensity of the micro-dot array prepared in the tactile sensing device provided in Example 2;

[0033] Figure 6 is the fluorescence spectrum of a single response of the tactile sensor in Experimental Example 1;

[0034] Figure 7 is the fluorescence intensity-time curve of the cyclic response of the tactile sensor in Experimental Example 2;

[0035] Figure 8 is the stress and fluorescence intensity standard curve of the tactile sensor in Experimental Example 3;

[0036] Figure numerals: 1 - substrate; 2 - thermoplastic elastomer / aggregation-induced emission molecule composite microdot array; 3 - cover plate; 4 - excitation light; 5 - fluorescence. DETAILED DESCRIPTION

[0037] As mentioned above, the present invention provides a tactile sensor, comprising a substrate, a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array and a cover plate;

[0038] The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is microdots prepared from thermoplastic elastomer and aggregation-induced emission molecules arranged at equal intervals;

[0039] The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is fixed on a substrate;

[0040] The cover plate covers the thermoplastic elastomer / aggregation-induced emission molecule composite micro-dot array.

[0041] According to an embodiment of the present invention, the substrate mainly plays the role of supporting the response material (ie, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array).

[0042] According to an embodiment of the present invention, the substrate is a glass sheet, a silicon sheet or a quartz sheet, or a substrate known to those skilled in the art that can be used to carry a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is suitable for the solution of the present application.

[0043] According to an embodiment of the present invention, the substrate is preferably a substrate with hydrophilic surface modification, which helps to improve the adhesion of the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array prepared by the self-assembled liquid film directional shrinkage method on the substrate.

[0044] According to an embodiment of the present invention, the surface hydrophilic modification method is performed by, for example, using a plasma treatment method.

[0045] According to an embodiment of the present invention, before use, the substrate is preferably cleaned with at least one solution selected from deionized water, acetone and ethanol to remove impurities such as dust and grease on the surface.

[0046] According to an embodiment of the present invention, the thickness of the substrate is 0.5-5 mm, for example, 0.5 mm, 1 mm, 2 mm, 3 mm, 4 mm or 5 mm.

[0047] According to an embodiment of the present invention, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is microdots prepared from thermoplastic elastomer and aggregation-induced emission molecules arranged at equal intervals. The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array has excellent reversible deformation and sensitive fluorescence response to deformation, which enables the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array to serve as a response center for tactile detection.

[0048] According to the embodiment of the present invention, the equal spacing arrangement can ensure that the signal generated by the tactile sensor in response to stress is more stable and reduce the possibility of signal drift. However, a chaotic arrangement may cause the problem of inconsistent response sensitivity of the tactile sensor.

[0049] According to an embodiment of the present invention, the diameter of the micro-dot is 2-8 μm, for example, 2 μm, 3 μm, 4 μm, 5 μm, 5.5 μm, 6 μm, 6.5 μm, 7 μm or 8 μm. The diameter of the micro-dot is the diameter of the micro-dot after the micro-dot is fixed on the substrate. Adjusting the diameter of the micro-dot can adjust the sensitivity of the tactile sensor to the fluorescent signal generated by the stress response.

[0050] According to an embodiment of the present invention, the height of the micro-dot is 0.9-1.5 μm, for example, 0.9 μm, 1 μm, 1.2 μm, 1.3 μm, 1.4 μm or 1.5 μm; the height of the micro-dot is the distance between the substrate and the cover plate. Adjusting the height of the micro-dot can adjust the sensitivity of the tactile sensor to the fluorescent signal generated by the stress response.

[0051] According to an embodiment of the present invention, the interval between adjacent micro dots is 8-12 μm, for example, 8 μm, 9 μm, 9.5 μm, 10 μm, 11 μm or 12 μm. The interval between adjacent micro dots is the interval between adjacent micro dots after the micro dots are fixed on the substrate.

[0052] According to an embodiment of the present invention, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is a triangle array, a square array, a diamond array, a hexagonal array, etc.

[0053] According to an embodiment of the present invention, the micro-dots are in a hemispherical or cylindrical shape.

[0054] According to an embodiment of the present invention, the mass proportion of the thermoplastic elastomer in the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is greater than or equal to 90wt% and less than 100wt%, for example, 90wt%, 91wt%, 92wt%, 93wt%, 94wt%, 95wt%, 96wt%, 97wt%, 98wt% or 99wt%; the mass proportion of the aggregation-induced emission molecule is greater than 0wt% and less than or equal to 10wt%, for example, 1wt%, 2wt%, 3wt%, 4wt%, 5wt%, 6wt%, 7wt%, 8wt%, 9wt% or 10wt%.

[0055] According to an embodiment of the present invention, the thermoplastic elastomer is selected from styrene butadiene copolymer.

[0056] According to an embodiment of the present invention, the aggregation-induced emission molecule is selected from at least one of 2-[4-(diphenylamino)benzylidenemalononitrile] and tetraphenylethylene.

[0057] According to an embodiment of the present invention, the weight average molecular weight of the thermoplastic elastomer is 100,000-500,000, for example, 100,000, 150,000, 200,000, 250,000, 300,000, 350,000, 400,000, 450,000 or 500,000. Exemplarily, the molecular weight of the styrene butadiene copolymer is 140,000.

[0058] According to an embodiment of the present invention, the mass ratio of styrene to butadiene in the styrene butadiene copolymer is 1-4:9-6, such as 1:9, 2:8, 3:7 or 4:6.

[0059] According to an embodiment of the present invention, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is prepared by a self-assembled liquid film directional shrinkage method.

[0060] According to an embodiment of the present invention, the method for preparing the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array comprises the following steps:

[0061] 1) mixing a thermoplastic elastomer and an aggregation-induced emission molecule and dissolving them in an organic solvent to obtain a mixed solution;

[0062] 2) placing the silicon wafer template on a glass slide, dripping the mixed solution of step 1) onto the silicon wafer template, and covering the top with a substrate, fixing the glass slide, the silicon wafer template and the substrate, and then placing them in an electronic moisture-proof box for self-assembly;

[0063] 3) removing the silicon wafer template and the glass slide, and obtaining a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array on the substrate surface.

[0064] According to an embodiment of the present invention, in step 1), the organic solvent is at least one of toluene, ethyl acetate, benzene, ethylene dichloride, etc.

[0065] According to an embodiment of the present invention, in step 1), the concentration of the solute (thermoplastic elastomer and aggregation-induced emission molecule) in the mixed solution is 20-80 mg / mL, for example, 20 mg / mL, 30 mg / mL, 40 mg / mL, 50 mg / mL, 60 mg / mL, 70 mg / mL or 80 mg / mL.

[0066] According to an embodiment of the present invention, in step 2), the temperature of the self-assembly is room temperature (20-30° C., such as 25° C.).

[0067] According to an embodiment of the present invention, in step 2), the self-assembly time is 24-72 hours, such as 24 hours, 36 hours, 48 ​​hours, 60 hours or 72 hours.

[0068] According to an embodiment of the present invention, in step 2), the silicon wafer template is prepared by, for example, photolithography and deep reactive ion etching (DRIE) technology.

[0069] According to an embodiment of the present invention, in step 2), the silicon wafer template is, for example, a silicon wafer template with a micro-pillar structure, and the micro-pillar structure is in an array shape, and the exemplary structure is as follows Figure 2 shown.

[0070] According to an embodiment of the present invention, in step 2), the silicon wafer template is first cleaned with ethanol and ultrapure water before use, and then the silicon wafer template is plasma treated to achieve hydrophilic modification of the silicon wafer template; the silicon wafer template and 1H,1H,2H,2H-perfluorodecyltrimethoxysilane are placed in a vacuum desiccator, evacuated, and then the vacuum desiccator is placed in an oven for standing. After the standing period, the vacuum desiccator is taken out and cooled to room temperature to obtain a liquid-repellent silicon wafer template.

[0071] According to an embodiment of the present invention, in step 2), the mixed solution forms a thin film dispersion between the silicon wafer template and the substrate, forming an assembly system structure mediated by a capillary bridge, which is similar to a sandwich structure. Due to the Laplace pressure of asymmetric wettability between the silicon microcolumns on the surface of the silicon wafer template, during the self-assembly process, the solid-liquid-gas three-phase contact line is fixed at the top of the silicon microcolumn and guides the vertical dewetting of the liquid meniscus. As the liquid meniscus develops, the continuous liquid film splits into a series of independent capillary point bridges at the top of the silicon microcolumn. As the self-assembly process is prolonged, the capillary points are further dewetted, leaving a uniform, dot-shaped thermoplastic elastomer / aggregation-induced emission molecule composite microdot array that conforms to the silicon wafer template on the top substrate.

[0072] According to an embodiment of the present invention, the cover plate covers the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array, can transmit ultraviolet excitation light and evenly disperse the applied stress, making the response signal more accurate.

[0073] According to an embodiment of the present invention, the cover plate is a quartz glass sheet.

[0074] According to an embodiment of the present invention, the thickness of the cover plate is 0.5-5 mm, for example, 0.5 mm, 1 mm, 2 mm, 3 mm, 4 mm or 5 mm.

[0075] According to an embodiment of the present invention, the aggregation-induced emission molecule / thermoplastic elastomer composite microdot array contained in the tactile sensor will produce obvious fluorescence changes after being subjected to external force. The change in fluorescence intensity corresponds to the change in stress on the device, thereby obtaining a tactile sensor.

[0076] According to an embodiment of the present invention, the measuring principle of the tactile sensor of the present invention is as follows:

[0077] When the tactile sensor is subjected to pressure, the cover plate will evenly disperse the pressure above the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array. The evenly arranged microdots can respond to tiny stress changes and improve the response sensitivity. At the same time, the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is affected by pressure and deforms, causing the spatial environment of the internal aggregation-induced emission molecules to change, causing them to respond with fluorescence intensity. The generated fluorescence signal is transmitted through the cover plate to the receiver of the fluorescence spectrometer, thereby realizing the sensing of touch. In summary, the tactile sensor provided by the present invention can quickly and accurately detect the pressure it is subjected to, and has the characteristics of low cost, easy preparation, easy signal processing, and high sensitivity.

[0078] The present invention also provides a method for preparing the tactile sensor, the method comprising the following steps:

[0079] 1) mixing a thermoplastic elastomer and an aggregation-induced emission molecule and dissolving them in an organic solvent to obtain a mixed solution;

[0080] 2) placing the silicon wafer template on a glass slide, dripping the mixed solution of step 1) onto the silicon wafer template, and covering the top with a substrate, fixing the glass slide, the silicon wafer template and the substrate, and then placing them in an electronic moisture-proof box for self-assembly;

[0081] 3) removing the silicon wafer template and the glass slide, and obtaining a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array on the substrate surface;

[0082] 4) Covering the surface of the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array with a cover plate to prepare the tactile sensor.

[0083] The present invention also provides a use of the tactile sensor, which is used in the field of tactile sensing.

[0084] The present invention also provides a tactile sensing device, which comprises the tactile sensor and a fluorescence spectrometer.

[0085] The embodiments of the present invention will be described in detail below in conjunction with the embodiments and examples, but it will be appreciated by those skilled in the art that the following embodiments and examples are only used to illustrate the present invention and should not be considered as limiting the scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention. If specific conditions are not specified, proceed according to normal conditions or conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0086] The present invention is further described below by means of specific examples and comparative examples. However, it should be understood that these examples are only used for more detailed description and should not be construed as limiting the present invention in any form.

[0087] Example 1

[0088] A tactile sensor, such as Figure 3 As shown, it includes a glass substrate, a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array and a quartz cover plate.

[0089] 1. Treatment of glass substrate: Take a flat glass slide with a thickness of 1 mm, and clean its surface three times with deionized water and anhydrous ethanol respectively. Then put it into a plasma treatment instrument for further cleaning. The cleaning power is 200W and the cleaning time is 10s.

[0090] 2. The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is an equidistantly arranged microdot array, which is prepared by a mixed solution of polystyrene butadiene copolymer and 2-[4-(diphenylamino)benzylidenemalononitrile] using a self-assembled liquid film directional shrinkage method and fixed on a substrate. The diameter of the microdot is 5.5 μm, the height is 1.2 μm, and the spacing between adjacent microdots is 9.5 μm.

[0091] The specific operation of the self-assembled liquid film directional shrinkage method is as follows:

[0092] First, a 100 mm diameter, p-doped, oriented <100> , 400μm thick silicon wafer. On this basis, a periodically distributed micro-pillar structure substrate with a spacing of 5μm between adjacent points, a diameter of 10μm, and a height of 20μm was prepared, namely a silicon micro-pillar template. The photoresist was removed by cleaning in a plasma cleaner for 20 minutes.

[0093] Liquid-repellent modification of silicon microcolumn template: The silicon microcolumn template was rinsed with deionized water and acetone in turn, soaked in ethanol for about 5 minutes, and blown dry with dry nitrogen. At the same time, the glass slide was cleaned with ethanol. The silicon microcolumn template and the reagent cover dripped with 1H,1H,2H,2H-perfluorodecyltrimethoxysilane were placed in a vacuum dryer, vacuumed for 20 minutes, and then the vacuum dryer was placed in an 80°C oven for 4-5 hours. Finally, the vacuum dryer was taken out and cooled to room temperature to obtain a liquid-repellent silicon wafer template.

[0094] Preparation of thermoplastic elastomer / aggregation-induced emission molecule composite microdot array: Use an analytical balance to weigh styrene butadiene copolymer and 2-[4-(diphenylamino)benzylidene malononitrile] with a mass ratio of 97:3, dissolve them in toluene, shake them well, make a mixed solution with a solute concentration of 60 mg / mL, and store them in a refrigerator away from light. Then add 10 μL of the mixed solution between the glass slide substrate and the silicon wafer template, and fix them with a dovetail clip to form a sandwich structure. Then place it in an electronic moisture-proof box for self-assembly. During the self-assembly process, the solid-liquid-gas triple line (TCL) gradually retreats as the solution evaporates. As the solvent evaporates further, the liquid film moves toward the top of the column during the contraction process, so that the solute forms a liquid bridge between the top of the column and the substrate. The volatilization causes the solute to precipitate and deposit on the substrate, and finally forms a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array on the substrate.

[0095] 3. The quartz cover plate has a thickness of 1 mm and is cleaned three times with deionized water and anhydrous ethanol respectively, and then placed on the glass plate on which the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is formed.

[0096] Example 2

[0097] The tactile sensor of Example 2 was prepared under the same conditions as Example 1, with only the solute concentration changed (20 g / L, 30 g / L, 40 g / L, 50 g / L, 70 g / L, and 80 g / L, respectively). The microdot diameters obtained at the corresponding concentrations were tested by confocal microscopy. The test results are shown in Figure 2. Figure 4 As shown, from Figure 4 It can be seen that the solute concentration in the solution is positively correlated with the micro-dot diameter, that is, the larger the solute concentration, the larger the micro-dot diameter.

[0098] Using the devices of various concentrations prepared under the above conditions, under the same test conditions as in Experimental Example 1, the fluorescence intensity change of the micro-dot arrays obtained from the solutions of different concentrations was tested before and after 10N stress, and the ratio of the fluorescence intensity change to the initial fluorescence intensity (marked as ΔI / I 0 ) data were sorted to obtain ΔI / I 0 The relationship curve between the solute concentration of the prepared micro-dot array and the test results are as follows Figure 5 As shown, combined Figure 4 and Figure 5 It can be seen from the data that the size of the micro-dot diameter will affect the sensitivity of the tactile sensor to stress response, among which the micro-dot array prepared when the solute concentration is 60g / L (Example 1) has the best response performance.

[0099] Test Example 1

[0100] In the fluorescence spectrometer, the tactile sensor prepared in Example 1 was placed on the detection table. The excitation light spectrum mode was selected, the excitation wavelength was 480nm, the detection speed was Fast, and the fluorescence wavelength detection range was 500nm-600nm. A weight was used to apply a force of 10N to the tactile sensor. The results are as follows: Figure 6 shown.

[0101] The results show that the photoluminescence performance of the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is relatively ideal, and the photoluminescence performance is improved after pressure is applied. The maximum fluorescence intensity is 295a.u. when there is no pressure (0N), and the maximum fluorescence intensity is 328a.u. after 10N pressure.

[0102] Test Example 2

[0103] In the fluorescence spectrometer, the tactile sensor prepared in Example 1 was placed on the test table. The time detection mode was selected, the excitation wavelength was 480nm, the detection wavelength was 555nm, and the detection time was 170s. After the spectrum data was stable, a tensiometer was used to apply a pressure of 10N. After the data was stable, the pressure was released, and the process was repeated after the data was stable. The results are shown in Figure 2. Figure 7 shown.

[0104] The results show that the dot array responds quickly to pressure, with a response time of 1.5s±0.1s, and the response time after pressure release is 12s±1.4s. Therefore, it is obvious that the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array has a faster response speed and better reversibility to pressure, and can be used as a tactile sensing device.

[0105] Test Example 3

[0106] In the fluorescence spectrometer, the tactile sensor prepared in Example 1 was placed on the test table. The excitation light spectrum mode was selected, the excitation wavelength was 480nm, the detection speed was Fast, and the fluorescence wavelength detection range was 500nm-600nm. During this period, weights were used to apply 2N, 4N, 6N, 8N, and 10N forces to the tactile sensor. Each group was measured ten times, and the data were plotted into a standard curve. The results are shown in Figure 2. Figure 8 shown.

[0107] The results show that the change in fluorescence intensity is proportional to the pressure applied to the sensor. Correlation coefficient R of the standard curve of force and fluorescence intensity 2 It is 0.9988, close to 1, and the fit is good, indicating that the tactile sensor has good pressure detection performance.

[0108] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

[0109] The above is an explanation of the embodiments of the present invention. However, the present invention is not limited to the above embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A tactile sensor comprising a substrate, a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array and a cover plate; The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is microdots prepared from thermoplastic elastomer and aggregation-induced emission molecules arranged at equal intervals; The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is fixed on a substrate; The cover plate covers the thermoplastic elastomer / aggregation-induced emission molecule composite micro-dot array.

2. The tactile sensor according to claim 1, in, The substrate is a glass sheet, a silicon sheet or a quartz sheet; and / or the thickness of the substrate is 0.5-5 mm; And / or, the cover plate is a quartz glass sheet; and / or, the cover plate has a thickness of 0.5-5 mm.

3. The tactile sensor according to claim 1 or 2, in, The diameter of the microdots is 2-8 μm; And / or, the height of the micro dots is 0.9-1.5 μm; And / or, the interval between adjacent micro dots is 8-12 μm.

4. The tactile sensor according to any one of claims 1 to 3, in, The thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is a triangle array, a square array, a diamond array or a hexagonal array; And / or, the micro-dots are in a hemispherical or cylindrical shape.

5. The tactile sensor according to any one of claims 1 to 4, in, The mass proportion of the thermoplastic elastomer in the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array is greater than or equal to 90wt% and less than 100wt%; the mass proportion of the aggregation-induced emission molecule is greater than 0wt% and less than or equal to 10wt%; and / or, the thermoplastic elastomer is selected from styrene butadiene copolymer; And / or, the aggregation-induced emission molecule is selected from at least one of 2-[4-(diphenylamino)benzylidenemalononitrile] and tetraphenylethylene.

6. The tactile sensor according to any one of claims 1 to 5, in, The thermoplastic elastomer / aggregation-induced luminescence molecule composite micro-dot array is prepared by a self-assembled liquid film directional shrinkage method.

7. The method for preparing a tactile sensor according to any one of claims 1 to 6, comprising the following steps: 1) mixing a thermoplastic elastomer and an aggregation-induced emission molecule and dissolving them in an organic solvent to obtain a mixed solution; 2) placing the silicon wafer template on a glass slide, dripping the mixed solution of step 1) onto the silicon wafer template, and covering the top with a substrate, fixing the glass slide, the silicon wafer template and the substrate, and then placing them in an electronic moisture-proof box for self-assembly; 3) removing the silicon wafer template and the glass slide, and obtaining a thermoplastic elastomer / aggregation-induced emission molecule composite microdot array on the substrate surface; 4) Covering the surface of the thermoplastic elastomer / aggregation-induced emission molecule composite microdot array with a cover plate to prepare the tactile sensor.

8. The method for preparing a tactile sensor according to claim 7, in, In step 1), the concentration of the solute in the mixed solution is 20-80 mg / mL; And / or, in step 2), the temperature of the self-assembly is room temperature; the time of the self-assembly is 24-72 hours; And / or, in step 2), the silicon wafer template is, for example, a silicon wafer template with a micro-column structure, and the micro-column structure is in an array shape.

9. Use of the tactile sensor according to any one of claims 1 to 6 in the field of tactile sensing.

10. A tactile sensing device, comprising the tactile sensor according to any one of claims 1 to 6 and a fluorescence spectrometer.

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