Multi-station carrying table and optical detection device
By designing a multi-station loading and optical detection device, multiple fixtures share a set of optical detection elements, the problems of high cost of traditional equipment and inconsistent detection results are solved, and the production efficiency improvement and the comparability of detection results are achieved.
Patent Information
- Application Number
- CN202510338898.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2025-06-06
AI Technical Summary
In the prior art, traditional optical detection equipment needs to be equipped with optical detection elements and fixtures one by one, resulting in high production costs and inconsistent detection results.
A multi-station loading platform is designed, through the load transfer mechanism and the adjustment mechanism, multiple fixtures can share a set of optical detection elements, so as to realize the rapid and independent drive of the fixture to the product detection station.
It effectively shortens the production cycle, reduces production costs, ensures the consistency and comparability of testing results, and improves the unified evaluation and control of product quality.
Smart Images

Figure CN120102103A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of mobile phone component detection equipment, and in particular to a multi-station carrier and an optical detection device. Background Art
[0002] In the production process of mobile phone keypad glass, in order to meet high standards for shipment, it is necessary to conduct appearance inspection during the production process. Because the volume of mobile phone keypad glass is small, in order to meet the consistency requirements of the product, some of its key characteristics are extremely high, such as the color difference of the product and the high consistency of the product.
[0003] In the prior art, optical inspection devices are usually used to perform appearance inspection on mobile phone keypad glass. However, in order to ensure the consistency of the inspection results, traditional optical inspection equipment usually equips optical inspection elements and fixtures one by one, resulting in high production costs.
[0004] Therefore, the above problems need to be solved urgently. Summary of the invention
[0005] The object of the present invention is to provide a multi-station stage and an optical detection device so that a plurality of fixtures can share a set of optical detection elements, thereby reducing production costs.
[0006] To achieve this object, the present invention adopts the following technical solutions:
[0007] A multi-station stage, comprising:
[0008] Basic parts;
[0009] A fixture, configured to carry and secure the product;
[0010] A transfer mechanism, disposed on the base member, and configured to drive the fixture to move to a product inspection station;
[0011] An adjustment mechanism, disposed between the transfer mechanism and the fixture and used to adjust the height position of the fixture;
[0012] At least two of the jigs are provided, and the number of the transfer mechanisms and the adjustment mechanisms are set corresponding to the number of the jigs. The plurality of transfer mechanisms can transport the plurality of products to the same product inspection station.
[0013] Preferably, the adjustment mechanism comprises:
[0014] A mounting member, wherein the transfer mechanism is in transmission connection with the mounting member to drive the mounting member to move;
[0015] A bearing member, movably disposed on the mounting member, and used for bearing the fixture;
[0016] The connecting assembly is used to mount the bearing member on the bearing member and to adjust the height of the bearing member on the mounting member.
[0017] Preferably, the connection assembly comprises:
[0018] An adjusting member, screwed to the mounting member and capable of lifting the bearing member;
[0019] A connecting member passes through the bearing member and is threadedly connected with the mounting member to lock the bearing member on the mounting member.
[0020] Preferably, a plurality of the adjusting members and a plurality of the connecting members are provided.
[0021] Preferably, the base member is a marble platform.
[0022] Preferably, the transfer mechanism comprises:
[0023] A first motion module, disposed on the base member, the first motion module comprising a first motion part capable of moving along a first horizontal direction;
[0024] A second motion module is disposed on the first motion part, the second motion module includes a second motion part that can move along a second horizontal direction, the first horizontal direction is perpendicular to the second horizontal direction;
[0025] The adapter is arranged on the second moving part, and the adjustment mechanism is arranged on the adapter.
[0026] Preferably, both the first motion module and the second motion module are linear modules.
[0027] Preferably, the fixture comprises:
[0028] A bottom plate, detachably connected to the bearing member;
[0029] A fixing member, disposed on the bottom plate, and used to carry and fix the product;
[0030] A positioning member, movably disposed on the fixing member, the positioning member being configured to cooperate with the fixing member to position the product;
[0031] A driving assembly is disposed on the base plate, and the driving assembly is configured to drive the positioning member to move.
[0032] Preferably, the fixing member comprises a placement groove for accommodating the product, one side of the placement groove is open to form an opening, and the positioning member comprises a closing portion capable of closing the opening.
[0033] An optical detection device comprises a frame, an optical detection element and the above-mentioned multi-station carrier, wherein the optical detection element and the multi-station carrier are both arranged on the frame, and the multi-station carrier is located below the optical detection element.
[0034] Beneficial effects of the present invention:
[0035] 1. Multiple fixtures are set up, and the remaining fixtures can be loaded and unloaded while the previous fixture is in the product inspection station. Compared with the carrier of a single fixture, it can effectively shorten the overall production cycle and improve production efficiency;
[0036] 2. The number of transfer mechanisms and adjustment mechanisms are set corresponding to the fixtures, so that each fixture can be driven to the product inspection station independently and quickly, so that multiple fixtures can share a set of optical inspection elements, with low production costs;
[0037] 3. Using only one set of optical detection components to detect products on multiple fixtures can avoid the problem of inconsistent test results caused by performance differences, calibration errors and other factors between multiple sets of optical detection components, ensure that all products are tested under the same testing conditions and standards, improve the comparability and reliability of the test results, and facilitate unified evaluation and control of product quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0038] Figure 1 It is a structural schematic diagram of the multi-station carrier provided by the present invention;
[0039] Figure 2 It is a structural schematic diagram of the transfer mechanism and the adjustment mechanism provided by the present invention;
[0040] Figure 3 yes Figure 2 The enlarged view of point A in the middle;
[0041] Figure 4 It is a structural schematic diagram of the fixture provided by the present invention;
[0042] Figure 5 yes Figure 4 Enlarged view of point B in the middle.
[0043] In the figure:
[0044] 100. Products; 1. Basic parts;
[0045] 2. fixture; 21. bottom plate; 22. fixing member; 221. placement groove; 23. positioning member; 231. closing part; 24. driving assembly;
[0046] 3. Transfer mechanism; 31. First motion module; 32. Second motion module; 33. Adapter;
[0047] 4. Adjusting mechanism; 41. Mounting part; 42. Carrying part. DETAILED DESCRIPTION
[0048] Before any embodiments of the application are explained in detail, it is to be understood that the application is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the above drawings.
[0049] In this application, the terms "comprises", "includes", "has" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device that includes the element.
[0050] In the present application, the term "and / or" is a description of the association relationship of associated objects, indicating that three relationships may exist. For example, a centrifugal vortex magnetic pump and / or a centrifugal vortex magnetic pump can represent: the existence of a centrifugal vortex magnetic pump alone, the existence of a centrifugal vortex magnetic pump and a centrifugal vortex magnetic pump at the same time, and the existence of a centrifugal vortex magnetic pump alone. In addition, the character " / " in the present application generally indicates that the objects associated before and after are in an "and / or" relationship.
[0051] In the present application, the terms "connect", "combine", "couple", and "install" may refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, direct connection refers to two parts or components being connected together without the need for an intermediate piece, and indirect connection refers to two parts or components being connected to at least one intermediate piece respectively, and the two parts or components being connected via the intermediate piece. In addition, "connect" and "couple" are not limited to physical or mechanical connections or couplings, and may include electrical connections or couplings.
[0052] In the present application, it will be understood by those of ordinary skill in the art that relative terms (e.g., "about," "approximately," "substantially," etc.) used in conjunction with quantities or conditions include the values and have the meaning indicated by the context. For example, the relative terms include at least the degree of error associated with the measurement of a specific value, the tolerances caused by manufacturing, assembly, and use associated with a specific value, and the like. Such terms should also be considered to disclose a range defined by the absolute values of the two endpoints. Relative terms may refer to plus or minus a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values that do not use relative terms should also be disclosed as specific values with tolerances. In addition, "substantially" may refer to plus or minus a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) on the basis of the indicated angle when expressing a relative angular position relationship (e.g., substantially parallel, substantially perpendicular).
[0053] In this application, it will be understood by those skilled in the art that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.
[0054] In the present application, the terms "upper", "lower", "left", "right", "front", "back" and other directional words are described based on the orientation and positional relationship shown in the accompanying drawings, and should not be understood as limiting the embodiments of the present application. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is connected to another element "upper" or "lower", it can not only be directly connected to another element "upper" or "lower", but also indirectly connected to another element "upper" or "lower" through an intermediate element. It should also be understood that directional words such as upper side, lower side, left side, right side, front side, back side, etc. not only represent the positive orientation, but can also be understood as the lateral orientation. For example, the bottom can include directly below, lower left, lower right, lower front, and lower back, etc.
[0055] See also Figures 1 to 5 , this embodiment provides a multi-station carrier, which includes a base member 1, a fixture 2, a transfer mechanism 3 and an adjustment mechanism 4. Among them, the fixture 2 is configured to carry and fix the product 100. The transfer mechanism 3 is arranged on the base member 1, and the transfer mechanism 3 is configured to drive the fixture 2 to move to the product inspection station. The adjustment mechanism 4 is arranged between the transfer mechanism 3 and the fixture 2 and is used to adjust the height position of the fixture 2. There are at least two fixtures 2, and the number of transfer mechanisms 3 and adjustment mechanisms 4 are set corresponding to the number of fixtures 2. Multiple transfer mechanisms 3 can transport multiple products 100 to the same product inspection station. In this embodiment, there are two fixtures 2, and the number of transfer mechanisms 3 and adjustment mechanisms 4 are correspondingly set to two.
[0056] During the inspection, the product 100 to be inspected is first placed on the jig 2, and the jig 2 carries and fixes the product 100. Then the transfer mechanism 3 transfers the jig 2 carrying the product 100 to the product inspection station according to the preset trajectory. At this time, the optical detection element begins to perform a comprehensive inspection on the product 100 and obtains the corresponding data. After the inspection is completed, the jig 2 returns to the initial position under the drive of the transfer mechanism 3, which is convenient for the operator to perform subsequent operations. At the same time, the next jig 2 repeats the above process, and this cycle is repeated one by one to achieve continuous inspection of the product 100.
[0057] It should be noted that the height adjustment of the fixture 2 is performed before the inspection to ensure that the product 100 is in the best position for inspection. It is understandable that when multiple fixtures 2 are provided, the remaining fixtures 2 can be loaded and unloaded when the previous fixture 2 is in the product inspection station. Compared with the carrier of a single fixture 2, the overall production cycle can be effectively shortened and production efficiency can be improved.
[0058] It can also be understood that the number of transfer mechanisms 3 and adjustment mechanisms 4 are set corresponding to the jigs 2, so that each jig 2 can be driven independently and quickly to the product inspection station, so that multiple jigs 2 can share a set of optical detection elements, and the production cost is low. In addition, using only one set of optical detection elements to detect products 100 on multiple jigs 2 can avoid the problem of inconsistent detection results caused by factors such as performance differences and calibration errors between multiple sets of optical detection elements, ensuring that all products 100 are tested under the same testing conditions and standards, improving the comparability and reliability of the test results, and facilitating unified evaluation and control of the quality of products 100. It is especially suitable for products 100 such as mobile phone button glass that are small in size and have extremely high requirements for color difference and height consistency.
[0059] Specifically, the adjustment mechanism 4 includes a mounting member 41, a bearing member 42 and a connecting assembly (not shown in the figure). The transfer mechanism 3 is connected to the mounting member 41 in a transmission manner to drive the mounting member 41 to move. The bearing member 42 is movably arranged on the mounting member 41, and the bearing member 42 is used to carry the fixture 2. The connecting assembly is used to install the bearing member 42 on the bearing member 42, and is used to adjust the height of the bearing member 42 on the mounting member 41.
[0060] In the actual detection process, different products 100 may have different detection requirements, and the product 100 needs to be adjusted to a specific height to accommodate the optical detection element. For this reason, the precise height adjustment function provided by the adjustment mechanism 4 can ensure that the product 100 is in the best detection position, thereby improving the accuracy and reliability of the detection. In this way, the height of the carrier 42 on the mounting member 41 can be adjusted through the connection assembly, so that the height position of the fixture 2 can be accurately controlled.
[0061] In particular, the connecting assembly includes an adjusting member and a connecting member. The adjusting member is screwed on the mounting member 41 and can lift the bearing member 42. The connecting member passes through the bearing member 42 and is screwed with the mounting member 41 to lock the bearing member 42 on the mounting member 41.
[0062] When adjusting, first rotate the adjustment piece to change its relative position with the mounting piece 41 by means of threaded transmission, so as to lift or lower the carrier 42, and the fixture 2 will rise and fall synchronously. Then, according to actual needs, with the help of measuring tools or preset standards, fine-tune the adjustment piece until the fixture 2 reaches the required height. After the height of the fixture 2 is in place, the connecting piece is passed through the carrier 42 and screwed to the mounting piece 41. After tightening, the carrier 42 is fixed on the mounting piece 41 to ensure that the height of the fixture 2 remains unchanged during subsequent transfer and testing, ensuring stable and accurate testing.
[0063] It can be understood that the adjusting parts and connecting parts with simple structures are easy to disassemble and install and can reduce the cost of use.
[0064] Furthermore, multiple adjusting members and connecting members are provided. Multiple adjusting members can make the bearing member 42 evenly stressed during height adjustment, avoiding tilting or uneven stress of the bearing member 42 caused by single-point adjustment, thereby making the height adjustment of the fixture 2 more precise and smooth, ensuring that the product 100 on the fixture 2 is in a horizontal or specific standard position, and improving the accuracy of detection or processing. In addition, multiple adjusting members can work together to share the load and increase the stability and reliability of the entire system.
[0065] More importantly, multiple adjustment members can realize independent adjustment of different positions, so that the carrier 42 can be fine-tuned in multiple dimensions. For example, when facing an irregularly shaped fixture 2 or when different heights need to be adjusted in different areas, complex adjustment requirements can be met by controlling the adjustment members at different positions separately, thereby increasing the adaptability and flexibility of the adjustment mechanism 4.
[0066] In order to further improve the accuracy of the test results, the base member 1 is a marble platform. It is understandable that marble has high hardness and good rigidity, can withstand the weight and impact of the fixture 2 during the transfer process, and is not easy to deform, so that the fixture 2 can remain stable during the transfer process, reducing the position deviation caused by the deformation of the base member 1, so as to improve the transfer accuracy. In addition, the surface of the marble platform has been finely processed, and the flatness and finish are extremely high, which helps the transfer mechanism 3 to move accurately according to the preset path and speed during the transfer of the fixture 2, and achieve more accurate positioning.
[0067] Generally speaking, the flatness accuracy of the marble platform can reach the micron level, which can provide a high-precision reference surface for detection. Specifically, the marble platform can achieve a flatness accuracy of 0.005mm. It should be noted that the specific structure of the marble platform is designed according to the actual use scenario, and this embodiment does not make specific requirements and restrictions on this.
[0068] In this embodiment, the transfer mechanism 3 includes a first motion module 31, a second motion module 32 and an adapter 33. The first motion module 31 is arranged on the base member 1, and the first motion module 31 includes a first motion part that can move along a first horizontal direction. The second motion module 32 is arranged on the first motion part, and the second motion module 32 includes a second motion part that can move along a second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction. The adapter 33 is arranged on the second motion part, and the adjustment mechanism 4 is arranged on the adapter 33.
[0069] It can be understood that by moving the first motion module 31 along the first horizontal direction and the second motion module 32 along the second horizontal direction perpendicular to the first horizontal direction, the adapter 33 can move freely in a two-dimensional plane, that is, the jig 2 can be moved freely in a two-dimensional plane, thereby meeting the adjustment or detection requirements of the jig 2 at different positions.
[0070] Preferably, the first motion module 31 and the second motion module 32 are both linear modules. It is understandable that the linear module adopts precise guide rails and transmission systems, such as ball screws or synchronous belt drives, which can achieve high-precision positioning and maintain precise position control within a longer stroke, thereby ensuring that the fixture 2 is accurately transported to the product inspection station to improve the accuracy of the inspection results. In addition, the linear module has high driving efficiency, shortens the transfer time, and improves production efficiency. It should be noted that the specific model of the linear module can be selected according to the actual application scenario, and this embodiment does not make specific requirements and restrictions on this.
[0071] Specifically, the fixture 2 includes a base plate 21, a fixing member 22, a positioning member 23 and a driving assembly 24. The base plate 21 is detachably connected to the carrier 42. The fixing member 22 is arranged on the base plate 21, and the fixing member 22 is used to carry and fix the product 100. The positioning member 23 is movably arranged on the fixing member 22, and the positioning member 23 is configured to cooperate with the fixing member 22 to position the product 100. The driving assembly 24 is arranged on the base plate 21, and the driving assembly 24 is configured to drive the positioning member 23 to move. It should be noted that in the present embodiment, the base plate 21 and the carrier 42 are detachably connected by a bolt structure, and in other embodiments, structures such as snap-on and magnetic attraction can also be used.
[0072] When clamping the product 100, first place the product 100 on the fixing part 22, and the structure on the fixing part 22 that matches the bottom of the product 100 provides stable support for the product 100. Then the driving component 24 drives the positioning part 23 to move, and the positioning part 23 cooperates with the fixing part 22 to accurately position the product 100. After the positioning is completed, the fixing part 22 applies a tightening force to the product 100 through mechanical clamping, magnetic adsorption or vacuum adsorption, etc., to firmly fix it. At this point, the product 100 is firmly clamped on the fixture 2, which can meet the subsequent inspection requirements and ensure that the position of the product 100 remains unchanged during the inspection.
[0073] Preferably, the fixing member 22 includes a placement groove 221 for accommodating the product 100, and one side of the placement groove 221 is open to form an opening, and the positioning member 23 includes a closing portion 231 that can close the opening. When the product 100 is placed in the placement groove 221, the closing portion 231 can accurately limit the product 100, and the driving component 24 drives the positioning member 23 to move to close the opening through the closing portion 231, so that the closing portion 231 and other parts of the placement groove 221 work together to achieve accurate positioning of the product 100, ensuring that the product 100 is always in the placement groove 221 during the detection process, reducing position deviation, and improving processing accuracy and detection accuracy. In addition, the above structure is relatively simple and easy to design. While ensuring the positioning and fixing functions of the product 100, it reduces the design and manufacturing difficulty of the fixture 2, and is also convenient for later maintenance and maintenance, and is easier to repair and replace parts when a fault occurs.
[0074] It should be noted that, in the present embodiment, the fixing member 22 fixes the product 100 by vacuum adsorption. Specifically, at least one vacuum adsorption hole is provided on the bottom wall of the placement groove 221. The vacuum generator provides vacuum adsorption force for the product 100 positioned in the placement groove 221 through the vacuum adsorption hole to fix the product 100. The structure and working principle of the vacuum generator are both prior art, so they are not described in detail. It should also be noted that the driving assembly 24 includes a cylinder and a telescopic spring respectively located on both sides of the positioning member 23, so that the positioning member 23 is driven to move by the cylinder, and the telescopic spring drives the positioning member 23 to reset.
[0075] It should also be noted that the specific structure of the placement slot 221 of the fixing member 22 is set according to the size and shape of the product 100, so it will not be described in detail. In addition, the number and arrangement of the placement slots 221 can also be set according to the size and shape of the product 100. For example, since the mobile phone key glass is small in size, the placement slots 221 can be set in multiple rows to improve the detection efficiency. In this embodiment, the placement slots 221 are set in two rows, and each row has eight.
[0076] This embodiment also provides an optical detection device, which includes a frame, an optical detection element and the above-mentioned multi-station stage, the optical detection element and the multi-station stage are both arranged on the frame, and the multi-station stage is located below the optical detection element. Placing the multi-station stage below the optical detection element is conducive to optimizing the optical path of optical detection. Light can be irradiated vertically or nearly vertically to the product 100 on the stage, reducing the influence of factors such as light refraction and scattering on the detection results, improving the accuracy and reliability of optical detection, and being able to obtain optical information of the product 100 more clearly, which helps to detect minor defects and flaws on the surface or inside of the product 100.
[0077] It should be noted that the optical detection element usually uses a camera to capture the image of the product 100 and forms a digital image signal after signal processing, which is transmitted to the processing equipment, and finally generates a digital image for detection and analysis, which will not be described in detail.
[0078] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.
Claims
1. A multi-station stage, characterized in that: The multi-station platform comprises: Basic part (1); A fixture (2) configured to carry and fix the product (100); A transfer mechanism (3) is arranged on the base member (1), and the transfer mechanism (3) is configured to drive the fixture (2) to move to a product inspection station; An adjustment mechanism (4) is arranged between the transfer mechanism (3) and the fixture (2) and is used to adjust the height position of the fixture (2); At least two of the jigs (2) are provided, and the number of the transfer mechanisms (3) and the adjustment mechanisms (4) are arranged corresponding to the number of the jigs (2). The plurality of transfer mechanisms (3) can transport the plurality of products (100) to the same product inspection station.
2. A multi-station stage according to claim 1, characterized in that: The adjustment mechanism (4) comprises: A mounting member (41), wherein the transfer mechanism (3) is in transmission connection with the mounting member (41) so as to drive the mounting member (41) to move; A bearing member (42) movably disposed on the mounting member (41), the bearing member (42) being used to bear the fixture (2); A connecting assembly is used for mounting the bearing member (42) on the bearing member (42) and for adjusting the height of the bearing member (42) on the mounting member (41).
3. A multi-station stage according to claim 2, characterized in that: The connection component comprises: An adjusting member, which is screwed onto the mounting member (41) and is capable of lifting the bearing member (42); A connecting member passes through the bearing member (42) and is threadedly connected to the mounting member (41) so as to lock the bearing member (42) on the mounting member (41).
4. A multi-station stage according to claim 3, characterized in that: The adjusting member and the connecting member are both provided in plurality.
5. The multi-station stage according to claim 1, characterized in that: The base member (1) is a marble platform.
6. The multi-station stage according to claim 1, characterized in that: The transfer mechanism (3) comprises: A first motion module (31) is arranged on the base member (1), wherein the first motion module (31) comprises a first motion part capable of moving along a first horizontal direction; A second motion module (32) is arranged on the first motion part, the second motion module (32) comprises a second motion part capable of moving along a second horizontal direction, the first horizontal direction being perpendicular to the second horizontal direction; The adapter (33) is arranged on the second moving part, and the adjustment mechanism (4) is arranged on the adapter (33).
7. The multi-station stage according to claim 6, characterized in that: The first motion module (31) and the second motion module (32) are both linear modules.
8. The multi-station stage according to claim 2, characterized in that: The fixture (2) includes: A bottom plate (21) detachably connected to the bearing member (42); A fixing member (22) is disposed on the bottom plate (21), and the fixing member (22) is used to carry and fix the product (100); a positioning member (23) movably disposed on the fixing member (22), the positioning member (23) being configured to cooperate with the fixing member (22) to position the product (100); A driving assembly (24) is disposed on the base plate (21), and the driving assembly (24) is configured to drive the positioning member (23) to move.
9. The multi-station stage according to claim 8, characterized in that: The fixing member (22) comprises a placement groove (221) for accommodating the product (100), one side of the placement groove (221) is open to form an opening, and the positioning member (23) comprises a closing portion (231) capable of closing the opening.
10. An optical detection device, characterized in that: It comprises a frame, an optical detection element and a multi-station stage as described in any one of claims 1 to 9, wherein the optical detection element and the multi-station stage are both arranged on the frame, and the multi-station stage is located below the optical detection element.