Vacuum pump based on air floating shaft driving

Abstract

The invention relates to the technical field of air treatment, in particular to a vacuum pump driven by an air floating shaft, which comprises a base, a pump body, a motor and an air tank, the pump body, the motor and the air tank are arranged on the base, an output shaft of the motor is connected with the pump body through an air suspension bearing, and the air tank is sequentially provided with an air inlet pipe, a first air outlet pipe and a second air outlet pipe. The air inlet pipe is connected with the pump body; the first air outlet pipe is connected with the air suspension bearing; a first air valve is arranged in the first air outlet pipe, a second air valve is arranged in the second air outlet pipe, a piston plate is arranged in the air tank, the piston plate is connected with a plate driving part, and when the motor drives the pump body to operate, the first air valve and the second air valve are opened, and the piston plate moves away from the first air outlet pipe; according to the air suspension bearing device, the air suspension bearing is utilized, and meanwhile the problems that the operation structure of a vacuum pump is complex, and maintenance is troublesome are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of air treatment, and in particular to a vacuum pump driven by an air floating shaft. Background Art

[0002] A vacuum pump is a device used to remove gas molecules from an enclosed space to create a vacuum or low-pressure environment. It works through mechanical, physical, or chemical means and is widely used in scientific research, industry, and medical fields, such as semiconductor manufacturing, food packaging, vacuum drying, and laboratory experiments. Common types of vacuum pumps include rotary vane pumps, turbomolecular pumps, and diffusion pumps. In a vacuum pump, bearings play a crucial role. They support the rotating components inside the pump to ensure smooth and precise operation of the rotating components. In traditional technologies, deep groove ball bearings, angular contact ball bearings, cylindrical roller bearings, etc. are usually used. However, there is direct metal contact during the rotation of bearings such as those mentioned above, which inevitably generates a certain amount of heat during the operation of the bearings, resulting in relatively rapid accumulation of internal heat during the operation of the vacuum pump, which is not conducive to long-term operation.

[0003] In contrast, since an air suspension bearing suspends the rotating components through a layer of high-pressure air to achieve a non-contact bearing, some new vacuum pumps use air suspension bearings to replace other contact bearings to effectively reduce the heat generated during the rotation of the bearings, thereby slowing down the accumulation of internal heat during the operation of the vacuum pump and being conducive to long-term operation. When existing new vacuum pumps use air suspension bearings, they usually additionally equip a set of air supply systems to supply air to the air suspension bearings to ensure that the air suspension bearings can fully exert their effects. However, the additional air supply system will make the overall operation structure of the vacuum pump relatively complex and troublesome to maintain. Summary of the Invention

[0004] In order to solve the problems existing in the prior art, the present application provides a vacuum pump driven by an air floating shaft.

[0005] The vacuum pump driven by an air floating shaft provided by the present invention adopts the following technical solutions:

[0006] A vacuum pump based on an air floating shaft drive, comprising a base and a pump body, a motor and an air tank arranged on the base. The output shaft of the motor is connected to the pump body through an air suspension bearing. The air tank is sequentially provided with an air inlet pipe, a first air outlet pipe and a second air outlet pipe. The air inlet pipe is connected to the pump body, and the first air outlet pipe is connected to the air suspension bearing. A first air valve is arranged in the first air outlet pipe, a second air valve is arranged in the second air outlet pipe, and a piston plate is arranged in the air tank. The piston plate is connected with a plate driving assembly. When the motor drives the pump body to operate, the first air valve and the second air valve are opened, and the piston plate moves away from the first air outlet pipe. When the motor stops driving the pump body, the first air valve and the second air valve are closed, and the piston plate moves close to the first air outlet pipe.

[0007] Preferably, an installation groove is inwardly formed on one side of the base, and the air tank is fixedly arranged in the installation groove. The length of the air tank is greater than the length of the installation groove.

[0008] Preferably, the plate driving assembly includes a telescopic rod and an electric cylinder. The electric cylinder is fixedly arranged on the base. One end of the telescopic rod is connected to the electric cylinder, and the other end of the telescopic rod passes through the end of the air tank and then is connected to the piston plate.

[0009] Preferably, a pressure adjustment hole is arranged at one end of the air tank, and the pressure adjustment hole controls the air pressure inside and outside to be consistent.

[0010] Preferably, the pressure adjustment hole and the telescopic rod are located at the same end of the air tank.

[0011] Preferably, when the motor drives the pump body to operate, the piston plate passes through the second air outlet pipe during the process of moving away from the first air outlet pipe. When the motor stops driving the pump body, the piston plate also passes through the second air outlet pipe during the process of moving close to the first air outlet pipe.

[0012] Preferably, the air flow cross-section of the first air outlet pipe is smaller than that of the second air outlet pipe.

[0013] Preferably, the flow rate of the air inlet pipe is V 0 , and the flow rate of the first air outlet pipe is V 1 , V 0 / V 1= X, the intake pipe is provided with a front flowmeter for monitoring the gas flow rate of the intake pipe, the first outlet pipe is provided with a rear flowmeter for monitoring the gas flow rate of the first outlet pipe, the second gas valve of the second outlet pipe is a regulating valve, and the regulating valve controls the gas flow cross-section of the second outlet pipe by changing the position of its valve core. The second gas valve adjusts the flow rate of the second outlet pipe according to the result calculated from the monitoring data of the front flowmeter and the rear flowmeter to keep the ratio between V 0 and V 1 constant.

[0014] Preferably, the second outlet pipe is connected with a gas silencer, and the gas silencer is an absorption type silencer.

[0015] Preferably, the bottom of the gas silencer is threadedly connected to the top of the second outlet pipe.

[0016] The beneficial effects of the present invention are as follows:

[0017] When the pump body is working to pump vacuum, the air in the closed space will be pumped into the gas tank. The air in the gas tank is then discharged through the first outlet pipe and the second outlet pipe respectively. The gas discharged from the first outlet pipe will flow through the inlet and outlet of the air suspension bearing, realizing the self-supply of air for the air suspension bearing by the pump body. In addition, when the pump body stops running, the first gas valve and the second gas valve are closed, and the piston plate will move towards the first outlet pipe and compress the gas in the gas tank to form compressed air. When the pump body starts again, the first gas valve and the second gas valve are opened. At this time, the compressed air in the gas tank will enter the air suspension bearing through the first intake pipe to form an air film in the air suspension bearing, so as to ensure that the air suspension bearing can also play its role in the start-up stage of the pump body. Then the piston plate gradually returns to the rear position, and again makes the air pumped out by the pump body can be discharged through the first outlet pipe and the second outlet pipe. Finally, while using the air suspension bearing, the present invention does not need to be additionally equipped with a gas supply system to ensure that the air suspension bearing always effectively plays its role, avoiding the problems of complex operation structure and troublesome maintenance of the whole vacuum pump. Description of the Drawings

[0018] Figure 1 is a schematic structural diagram of a vacuum pump driven by an air floating shaft in an embodiment of the present application;

[0019] Figure 2 is a schematic internal structure diagram of the gas tank when the pump body is running in an embodiment of the present application;

[0020] Figure 3 is a schematic internal structure diagram of the gas tank when the pump body stops in an embodiment of the present application.

[0021] Explanation of the accompanying drawings: 1. Pump body; 11. Gas pump inlet; 2. Motor; 31. Air inlet; 32. Air outlet; 4. Gas tank; 40. Air inlet pipe; 41. First air outlet pipe; 42. Second air outlet pipe; 43. Air pressure regulating hole; 5. Base; 61. First air valve; 62. Second air valve; 71. Piston plate; 72. Telescopic rod; 81. Front flow meter; 82. Rear flow meter; 9. Gas silencer. DETAILED DESCRIPTION

[0022] The following will be combined Figures 1 - 3 The present invention is further illustrated by the following embodiments.

[0023] This embodiment discloses a vacuum pump driven by an air-floating shaft.

[0024] Reference Figures 1 to 3 The vacuum pump driven by an air floating shaft includes a pump body 1, a motor 2, a bearing, a gas tank 4 and a base 5, wherein the base 5 is used to be placed horizontally in a working environment, and the pump body 1 and the motor 2 are horizontally spaced and arranged on the top of the base 5. In the present embodiment, the pump body 1 is fixedly arranged on the left side of the top of the base 5, the top of the pump body 1 is a gas pump inlet 11, and the gas pump inlet 11 is used to connect the closed space of the gas molecules to be removed, the bottom of the pump body 1 is a gas pump outlet, and the gas molecules in the closed space are pumped out from the gas pump outlet, the bearing is arranged on one side of the pump body 1, and the motor 2 is fixedly arranged on the right side of the top of the base 5, and the output shaft of the motor 2 is rotatably connected to the pump body 1 through the bearing, and the motor 2 drives the pump body 1 to evacuate when it is running. Since the structure and principle of the motor 2 driving the pump body 1 to evacuate are prior art, they will not be described in detail. The bearing uses an air suspension bearing, which is provided with an air inlet 31 and an air outlet 32. The air inlet 31 allows air to enter the air suspension bearing, and the air inside the air suspension bearing is discharged from the air outlet 32, thereby forming a flowing air film between the air suspension bearing and the output shaft of the motor 2, realizing non-contact contact, effectively reducing the heat generated when the bearing rotates, thereby slowing down the internal heat accumulation when the vacuum pump is running.

[0025] Reference Figures 1 to 3, an installation groove is horizontally and inwardly formed on the right side of the base 5, and the gas tank 4 is fixedly arranged in the installation groove. The length of the gas tank 4 is greater than the length of the installation groove, so that the outer end of the gas tank 4 protrudes out of the right side surface of the base 5. Further, an air inlet pipe 40, a first air outlet pipe 41 and a second air outlet pipe 42 are sequentially formed on the top of the gas tank 4 along the length direction. The air inlet 31 is located at the inner end of the gas tank 4, and the first air outlet pipe 41 and the second air outlet pipe 42 are located at the outer end of the gas tank 4. Among them, the air inlet pipe 40 is communicated with the gas pump outlet of the pump body 1, and the first air outlet pipe 41 is communicated with the air inlet 31 of the air suspension bearing. Through the above settings, when the pump body 1 is working to pump vacuum, the air in the closed space will be pumped into the gas tank 4, and the air in the gas tank 4 will be discharged from the first air outlet pipe 41 and the second air outlet pipe 42 respectively. Among them, the gas discharged from the first air outlet pipe 41 will flow through the air inlet 31 and the air outlet 32 of the air suspension bearing, realizing the self-air supply of the pump body 1 to the air suspension bearing. However, it is difficult for the pump body 1 to timely inject air into the air suspension bearing through the gas tank 4 during the starting stage, resulting in the inability to form a flowing air film in the air suspension bearing at this time, ultimately affecting the start of the pump body 1. Therefore, the present invention also makes the following improvements.

[0026] Refer to Figures 1 to 3, a first air outlet pipe 41 is provided with a first air valve 61, and a second air outlet pipe 42 is provided with a second air valve 62. The first air valve 61 and the second air valve 62 are respectively used to control the opening and closing of the first air outlet pipe 41 and the second air outlet pipe 42. The first air valve 61 and the second air valve 62 are controlled by the working state of the pump body 1. When the motor 2 drives the pump body 1 to operate, the first air valve 61 and the second air valve 62 are opened. When the motor 2 stops driving the pump body 1, the first air valve 61 and the second air valve 62 are closed. A piston plate 71 is movably arranged in the air tank 4 along the length direction. The outer wall of the piston plate 71 is in sealing fit with the inner wall of the air tank 4. The piston plate 71 is connected with a plate driving assembly. The piston plate 71 is also controlled by the working state of the pump body 1. When the motor 2 drives the pump body 1 to operate, the plate driving assembly controls the piston plate 71 to move to the side of the second air outlet pipe 42 away from the first air outlet pipe 41. When the motor 2 stops driving the pump body 1, the plate driving assembly controls the piston plate 71 to move between the first air outlet pipe 41 and the second air outlet pipe 42. To sum up, through further improvement, when the pump body 1 stops operating, the first air valve 61 and the second air valve 62 are closed, and the piston plate 71 will move towards the first air outlet pipe 41 and compress the gas in the air tank 4 to form compressed air. When the pump body 1 starts again, the first air valve 61 and the second air valve 62 are opened. At this time, the compressed air in the air tank 4 will enter the air suspension bearing through the first air inlet pipe 40 to form an air film in the air suspension bearing, so as to ensure that the air suspension bearing can also play its role during the starting stage of the pump body 1. Then the piston plate 71 gradually returns to its original position, and again enables the air pumped out by the pump body 1 to be discharged through both the first air outlet pipe 41 and the second air outlet pipe 42. Finally, while using the air suspension bearing, the present invention does not need to be additionally equipped with a gas supply system to ensure that the air suspension bearing always effectively plays its role, avoiding the problems of the overall operation structure of the vacuum pump being relatively complex and difficult to maintain.

[0027] Refer to Figures 1 to 3 , the plate driving assembly includes a telescopic rod 72 and an electric cylinder. The electric cylinder is arranged on the back of the base 5. The telescopic rod 72 is U-shaped. One end of the telescopic rod 72 is connected to the electric cylinder, and the other end of the telescopic rod 72 passes through the right side of the air tank 4 and is connected to the piston plate 71. Finally, the piston plate 71 is controlled to move in the air tank 4 through the electric cylinder. In addition, a plurality of air pressure adjustment holes 43 are arranged at the right end of the air tank 4 to keep the air pressure in the space on the right side of the piston plate 71 balanced inside and outside, reducing the resistance of the piston plate 71 to move. And since both the telescopic rod 72 and the air pressure adjustment holes 43 are located at the same end of the air tank 4, there is no need to consider the airtightness problem between the telescopic rod 72 and the air tank 4.

[0028] Refer to Figures 1 to 3, the air flow cross-section of the first air outlet pipe 41 is smaller than that of the second air outlet pipe 42, so that when the air in the air tank 4 meets the basic air supply requirements of the air suspension bearing, the remaining gas in the air tank 4 can be discharged outwards more smoothly through the second air outlet pipe 42. And in this embodiment, the inlet pipe 40 is located at the inner end of the air tank 4, and the first air outlet pipe 41 and the second air outlet pipe 42 are located at the outer end of the air tank 4.

[0029] Refer to Figures 1 to 3 , other advantages of the present invention also include: First, when the pump body 1 stops running and the piston plate 71 moves leftward to compress the gas in the air tank 4, the piston plate 71 will pass through the second air outlet pipe 42. Therefore, after the gas in the air tank 4 is compressed, there is no need to ensure the airtightness of the second air outlet pipe 42, reducing the airtightness requirements for the second air outlet pipe 42 and the second air valve 62; Second, since the left side of the air tank 4 is embedded in the base 5, when the piston plate 71 compresses the gas on the left side of the air tank 4, the base 5 can provide strength support for the left side of the air tank 4 to avoid deformation and damage, and ultimately ensure the stability after gas compression; In addition, when the power of the motor 2 driving the pump body 1 to operate increases, the gas flow rate of the inlet pipe 40 and the gas flow rate of the first air outlet pipe 41 will increase synchronously. Eventually, the gas film flow rate in the air suspension bearing will increase with the increase of the air pump power, realizing adaptive adjustment.

[0030] Refer to Figures 1 to 3 , in order to precisely control the relationship between the flow rate of the inlet pipe 40 and the flow rate of the first air outlet pipe 41, while ensuring that the gas film flow rate in the air suspension bearing increases with the increase of the air pump power, and avoiding too much gas flowing out through the first air outlet pipe 41 with a smaller diameter, thus avoiding affecting the timely discharge of the gas in the air tank 4, the present invention also makes the following improvements. Specifically, the flow rate of the inlet pipe 40 is V 0 , the flow rate of the first air outlet pipe 41 is V 1 , V 0 / V 1 =X, and X is set according to the actual situation. The inlet pipe 40 is provided with a front flow meter 81 for monitoring the gas flow rate of the inlet pipe 40, and the first air outlet pipe 41 is provided with a rear flow meter 82 for monitoring the gas flow rate of the first air outlet pipe 41. In addition, the second air valve 62 of the second air outlet pipe 42 is a regulating valve, and the regulating valve can control the air flow cross-section of the second air outlet pipe 42 by changing the position of its valve core. The second air valve 62 adjusts the flow rate of the second air outlet pipe 42 according to the results calculated from the monitoring data of the front flow meter 81 and the rear flow meter 82 to ensure the realization of V 0 / V 1 =X, ultimately ensuring that the gas film flow rate in the air suspension bearing increases with the increase of the air pump power, while avoiding too much gas flowing out through the first air outlet pipe 41 with a smaller diameter, and ensuring the timely discharge of the gas in the air tank 4.

[0031] Refer to Figures 1 to 3 , in the present invention, since the vacuum pump uses an air suspension bearing to support the output shaft of the motor 2, the noise caused by rotation is relatively low. In order to further improve the noise reduction effect, the second air outlet pipe 42 is connected with a gas silencer 9. The gas silencer 9 is a device for reducing the noise generated during gas flow. Its working principle is to reduce noise by absorbing, reflecting or interfering with sound waves. In this embodiment, the gas silencer 9 is selected as an absorption type silencer, which uses sound-absorbing materials such as glass fiber and foam to absorb the sound wave energy and reduce the high-frequency noise. Further, the bottom of the gas silencer 9 is threadedly connected to the top of the second air outlet pipe 42, achieving the effect of easy disassembly and assembly.

[0032] The above are all the preferred embodiments of the present invention, and the protection scope of this application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of this application should be covered within the protection scope of this application.

Claims

1. A vacuum pump driven by an air-floating shaft, characterized in that: The invention comprises a base (5), a pump body (1), a motor (2) and an air tank (4) arranged on the base (5); the output shaft of the motor (2) is connected to the pump body (1) via an air suspension bearing; the air tank (4) is provided with an air inlet pipe (40), a first air outlet pipe (41) and a second air outlet pipe (42) in sequence; the air inlet pipe (40) is connected to the pump body (1); the first air outlet pipe (41) is connected to the air suspension bearing; a first air valve (61) is arranged in the first air outlet pipe (41); a second air valve (61) is arranged in the second air outlet pipe (42); A second air valve (62) is arranged, and a piston plate (71) is arranged in the air tank (4). The piston plate (71) is connected to a plate driving assembly. When the motor (2) drives the pump body (1) to operate, the first air valve (61) and the second air valve (62) are opened, and the piston plate (71) moves away from the first air outlet pipe (41). When the motor (2) stops driving the pump body (1), the first air valve (61) and the second air valve (62) are closed, and the piston plate (71) moves close to the first air outlet pipe (41).

2. A vacuum pump based on air-floating shaft drive according to claim 1, characterized in that: A mounting groove is provided inwardly on one side of the base (5), and the gas tank (4) is fixedly arranged in the mounting groove. The length of the gas tank (4) is greater than the length of the mounting groove.

3. A vacuum pump based on air-floating shaft drive according to claim 2, characterized in that: The plate driving assembly comprises a telescopic rod (72) and an electric cylinder, wherein the electric cylinder is fixedly arranged on the base (5), one end of the telescopic rod (72) is connected to the electric cylinder, and the other end of the telescopic rod (72) passes through the end of the gas tank (4) and is connected to the piston plate (71).

4. A vacuum pump based on air-floating shaft drive according to claim 3, characterized in that: One end of the gas tank (4) is provided with a gas pressure regulating hole (43), and the gas pressure regulating hole (43) controls the gas pressure inside and outside thereof to be consistent.

5. A vacuum pump based on air-floating shaft drive according to claim 4, characterized in that: The air pressure regulating hole (43) and the telescopic rod (72) are located at the same end of the gas tank (4).

6. A vacuum pump based on air-floating shaft drive according to claim 1, characterized in that: When the motor (2) drives the pump body (1) to operate, the piston plate (71) passes through the second air outlet pipe (42) in the process of moving away from the first air outlet pipe (41); when the motor (2) stops driving the pump body (1), the piston plate (71) also passes through the second air outlet pipe (42) in the process of moving closer to the first air outlet pipe (41).

7. A vacuum pump based on air-floating shaft drive according to claim 1, characterized in that: The air flow cross section of the first air outlet pipe (41) is smaller than the air flow cross section of the second air outlet pipe (42).

8. A vacuum pump based on air-floating shaft drive according to claim 7, characterized in that: The flow rate of the air inlet pipe (40) is V0, the flow rate of the first air outlet pipe (41) is V1, V0 / V1=X, the air inlet pipe (40) is provided with a front flow meter (81), the front flow meter (81) is used to monitor the gas flow rate of the air inlet pipe (40), the first air outlet pipe (41) is provided with a rear flow meter (82), the rear flow meter (82) is used to monitor the gas flow rate of the first air outlet pipe (41), the second air valve (62) of the second air outlet pipe (42) is a regulating valve, the regulating valve controls the air flow cross section of the second air outlet pipe (42) by changing the position of its valve core, and the second air valve (62) adjusts the flow of the second air outlet pipe (42) according to the result calculated by the monitoring data of the front flow meter (81) and the rear flow meter (82), so as to keep the ratio between V0 and V1 constant.

9. The vacuum pump driven by an air-floating shaft according to claim 1, characterized in that: The second gas outlet pipe (42) is connected to a gas silencer (9), and the gas silencer (9) is an absorption silencer.

10. A vacuum pump based on air-floating shaft drive according to claim 9, characterized in that: The bottom of the gas silencer (9) is threadedly connected to the top of the second gas outlet pipe (42).

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