Sensor High-Temperature Environmental Performance Testing Device and Testing Method

Abstract

This invention relates to sensor testing and provides a sensor high-temperature environmental performance testing device, comprising a low-temperature testing chamber with a built-in first sensor testing seat and a high-temperature testing chamber with a built-in second sensor testing seat. The low-temperature testing chamber and the high-temperature testing chamber are connected by a gas guide pipe, and a one-way valve is provided on the gas guide pipe. The one-way valve allows unidirectional flow from the low-temperature testing chamber to the high-temperature testing chamber. The low-temperature testing chamber is connected to a gas source, and the high-temperature testing chamber is equipped with an exhaust valve. This invention also provides a sensor high-temperature environmental performance testing method. In this invention, the low-temperature testing chamber and the high-temperature testing chamber are connected by a gas guide pipe, and unidirectional flow between them is achieved through a one-way valve, thereby achieving pressure balance between the two during the testing process. This enables sensor performance testing under the same pressure but different temperature differences, significantly improving sensor performance testing efficiency and ensuring testing reliability.

Description

Technical Field

[0001] This invention relates to sensor detection, and more particularly to a sensor high-temperature environment performance testing device and method. Background Technology

[0002] Pressure sensors are widely used devices in various production, industrial, and aerospace fields to detect pressure signals and convert them into electrical signals according to a certain rule. With the segmentation of application areas, pressure measurement in high-temperature and harsh environments, such as high-temperature oil wells, various engine cavities, flight control of aircraft and hypersonic missiles, and heat-resistant cavities in rockets, missiles, and satellites, is becoming increasingly important. The materials used in ordinary pressure sensors fail above certain temperatures (for example, diffused silicon pressure sensors operate below 120°C, and SOI materials rarely exceed 300°C), rendering effective pressure measurements impossible. Furthermore, high-temperature pressure sensors are widely used in the power, petroleum, and aerospace industries, with market demand growing at a rate of 10% to 32% annually, demonstrating a broad prospect. Therefore, the research and development of high-temperature pressure sensors has become an extremely important task.

[0003] In the process of developing sensors, verifying the performance of the sensors is an important task. Current experiments on testing pressure sensors under high-temperature conditions can only measure one temperature, which is inefficient and greatly limits the progress of the experiments. Summary of the Invention

[0004] The purpose of this invention is to overcome the deficiencies of the prior art and provide a sensor high-temperature environment performance testing device and testing method to solve at least one of the above-mentioned technical problems.

[0005] This invention is implemented as follows:

[0006] This invention provides a sensor high-temperature environment performance testing device, comprising:

[0007] A low-temperature detection chamber is provided with a first sensor detection seat inside;

[0008] A high-temperature detection chamber is provided, inside which a second sensor detection seat is installed;

[0009] Both the first sensor detection base and the second sensor detection base are electrically connected to the sensor detection assembly;

[0010] The low-temperature detection chamber and the high-temperature detection chamber are connected by a gas guide pipe. A one-way valve is installed on the gas guide pipe. The one-way valve is unidirectionally open in the direction from the low-temperature detection chamber to the high-temperature detection chamber. The low-temperature detection chamber is connected to a gas source. The high-temperature detection chamber is equipped with an exhaust valve.

[0011] Furthermore, it includes a heating furnace having a low-temperature zone and a high-temperature zone, wherein the low-temperature detection chamber is installed in the low-temperature zone and the high-temperature detection chamber is installed in the high-temperature zone.

[0012] Furthermore, the heating furnace is provided with a heat preservation zone, and the gas guide pipe is located within the heat preservation zone.

[0013] Furthermore, both the first sensor detection seat and the second sensor detection seat include a ceramic chamber, and both the low-temperature detection chamber and the high-temperature detection chamber are provided with slides, with the ceramic chamber slidably disposed on the corresponding slides.

[0014] Furthermore, both the low-temperature detection chamber and the high-temperature detection chamber include a cavity structure and an end cap that can be movably sealed to the opening of the cavity structure. The ceramic chamber is provided with conductive lines, and the end cap is provided with an inner wire connector that can be detachably connected to the conductive lines.

[0015] Furthermore, the air duct has multiple sections, and each air duct is equipped with a one-way valve.

[0016] Furthermore, the high-temperature detection chamber is connected to the exhaust valve through an exhaust flow path, and an oxygen concentration detector is installed on the exhaust flow path.

[0017] Furthermore, the low-temperature detection chamber is connected to a gas source through an inlet airflow path, and a first regulating valve is provided on the inlet airflow path; the high-temperature detection chamber is connected to an exhaust valve through an exhaust airflow path, and a second regulating valve is provided on the exhaust airflow path; the opening degree of the first regulating valve and the second regulating valve is controlled by the host computer to adjust the gas pressure of the low-temperature detection chamber and the high-temperature detection chamber.

[0018] This invention also provides a method for testing the high-temperature environmental performance of a sensor, using the aforementioned testing device, and comprising the following steps:

[0019] The sensor to be detected is placed in both the low-temperature detection chamber and the high-temperature detection chamber;

[0020] Protective gas is introduced into the low-temperature detection chamber through the gas source to replace the air in the low-temperature detection chamber and the high-temperature detection chamber. After the gas replacement is completed, the exhaust valve and the second regulating valve of the exhaust flow path are closed.

[0021] The low-temperature detection chamber and the high-temperature detection chamber are heated. When the pressure detected by the first pressure gauge corresponding to the low-temperature detection chamber reaches the preset value, the first regulating valve of the air intake path is closed.

[0022] When the air pressure in the low-temperature detection chamber and the high-temperature detection chamber stabilizes, the second regulating valve and the exhaust valve corresponding to the high-temperature detection chamber open; and when the air pressure in the high-temperature detection chamber reaches a preset value, the second regulating valve corresponding to the exhaust flow path closes.

[0023] When the temperature of the low-temperature detection chamber reaches the first preset value, the second regulating valve corresponding to the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve corresponding to the exhaust flow path is closed.

[0024] When the temperature of the high-temperature detection chamber reaches the second preset value, the second regulating valve corresponding to the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve corresponding to the exhaust flow path is closed.

[0025] The sensor detection data in the low-temperature detection chamber and the high-temperature detection chamber are acquired and compared with standard data to determine the detection performance of the sensor.

[0026] Furthermore, pressure warning values ​​are set for the low-temperature detection chamber and the high-temperature detection chamber, and the warning values ​​are greater than preset values; when the pressure values ​​of the low-temperature detection chamber and the high-temperature detection chamber reach the warning values, the second regulating valve of the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve of the exhaust flow path is closed.

[0027] The present invention has the following beneficial effects:

[0028] In the detection device of the present invention, the high-temperature detection chamber and the low-temperature detection chamber are connected by a gas guide pipe and a one-way valve is used for one-way conduction. The two detection chambers can be supplied with gas at the same time through a single gas source, which improves the detection efficiency. Furthermore, since the one-way valve can achieve pressure balance between the two during the detection process, the sensor performance detection purpose can be achieved under the same pressure and different temperature difference conditions, thus ensuring the reliability of the detection. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the sensor high-temperature environment performance testing device provided in an embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of the low-temperature detection chamber of the sensor high-temperature environment performance testing device provided in an embodiment of the present invention;

[0032] Figure 3 This is a schematic diagram of the end cap structure of the sensor high-temperature environment performance testing device provided in an embodiment of the present invention;

[0033] Figure 4This is a flowchart of a sensor high-temperature environment performance testing method provided in an embodiment of the present invention. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] See Figures 1-3 This invention provides a sensor high-temperature environment performance testing device, mainly for sensors used in high-temperature environments, which can be used to monitor the sensor's detection performance under various high-temperature environments.

[0036] The detection device includes a low-temperature detection chamber 1 and a high-temperature detection chamber 2. The low-temperature detection chamber 1 provides a low-temperature environment and houses a first sensor detection seat. The sensor to be detected can be placed on this first sensor detection seat, and the low-temperature environment is provided to the sensor on the first sensor detection seat through the low-temperature detection chamber 1. Similarly, the high-temperature detection chamber 2 provides a high-temperature environment and houses a second sensor detection seat. The sensor to be detected can be placed on the second sensor detection seat, and the high-temperature environment is provided to the sensor on the second sensor detection seat through the high-temperature detection chamber 2. It should be noted that the low-temperature environment of the low-temperature detection chamber 1 is relative to the ambient temperature of the high-temperature detection chamber 2. The ambient temperature of the low-temperature detection chamber 1 is lower than that of the high-temperature detection chamber 2. Typically, the temperature difference between the two can be 50 degrees Celsius; for example, the temperature of the low-temperature detection chamber 1 is 700 degrees Celsius, and the temperature of the high-temperature detection chamber 2 is 750 degrees Celsius.

[0037] The detection device also includes a sensor detection assembly, with both the first and second sensor detection seats electrically connected to the sensor detection assembly. The sensor detection assembly is primarily used to acquire data detected by sensors within the low-temperature detection chamber 1 and the high-temperature detection chamber 2. For example, if the sensor is a pressure sensor, the sensor detection assembly can acquire pressure data detected by the sensors within the low-temperature detection chamber 1 and the high-temperature detection chamber 2 in real time.

[0038] In this invention, the low-temperature detection chamber 1 and the high-temperature detection chamber 2 are connected by a gas guide pipe 3, and a one-way valve 31 is provided on the gas guide pipe 3. The one-way valve 31 is unidirectionally open in the direction from the low-temperature detection chamber 1 to the high-temperature detection chamber 2, that is, the gas in the low-temperature detection chamber 1 can enter the high-temperature detection chamber 2 through the gas guide pipe 3, but the gas in the high-temperature detection chamber 2 cannot enter the low-temperature detection chamber 1 through the gas guide pipe 3. In addition, the low-temperature detection chamber 1 is connected to a gas source 4, and the high-temperature detection chamber 2 is provided with an exhaust valve 22. When simulating a high-temperature environment, the low-temperature detection chamber 1 and the high-temperature detection chamber 2 need to be filled with a protective gas, generally an inert gas or nitrogen. The gas source 4 is the protective gas. The protective gas is introduced into the low-temperature detection chamber 1 from the gas source 4, then enters the high-temperature detection chamber 2 through the gas guide pipe 3, and can be discharged from the high-temperature detection chamber 2 through the exhaust valve 22.

[0039] A pressure reducing valve 12, a first regulating valve 13, and a safety valve 14 are installed on the air inlet path 11 of the cryogenic detection chamber 1, and are arranged sequentially along the air inlet direction of the air inlet path 11. The first regulating valve 13 on the air inlet path 11 is used to regulate the air inlet flow rate of the cryogenic detection chamber 1, the pressure reducing valve 12 is used to regulate the air inlet pressure, and the safety valve 14 is used to ensure the safety of the air inlet path 11 and the cryogenic detection chamber 1. When the pressure in the air inlet path 11 is too high, the safety valve 14 automatically opens. In addition, a first pressure gauge 15 is installed on the air inlet path 11, and the first pressure gauge 15 is connected to the cryogenic detection chamber 1 to detect the pressure of the cryogenic detection chamber 1.

[0040] A second regulating valve 23 and a safety valve 24 are provided on the exhaust flow path 21 of the high-temperature detection chamber 2. Along the exhaust direction of the exhaust flow path 21, the safety valve 24, the second regulating valve 23, and the exhaust valve 22 are arranged sequentially. The second regulating valve 23 is used to regulate the exhaust flow rate of the high-temperature detection chamber 2, while the safety valve 24 is used to ensure the safety of the exhaust flow path 21 and the high-temperature detection chamber 2. When the pressure in the exhaust flow path 21 is too high, the corresponding safety valve 24 automatically opens. Additionally, a second pressure gauge 25 is provided on the exhaust flow path 21, connected to the high-temperature detection chamber 2, to detect the pressure in the high-temperature detection chamber 2. In a preferred embodiment, an oxygen concentration detector is provided on the exhaust flow path 21 of the high-temperature detection chamber 2. The oxygen concentration detector can be located on the outlet side of the exhaust valve 22 to detect the oxygen concentration in the gas discharged from the exhaust valve 22.

[0041] In the above embodiments, when a detection device is needed to test the performance of the sensor, the sensor 8 to be tested is first placed in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 respectively. After sealing the low-temperature detection chamber 1 and the high-temperature detection chamber 2, the exhaust valve 22 and the second regulating valve 23 on the exhaust flow path 21 are in the open state. The gas source 4 blows protective gas into the low-temperature detection chamber 1. At this time, the pressure in the low-temperature detection chamber 1 is greater than that in the high-temperature detection chamber 2. The one-way valve 31 of the gas guide pipe 3 is open, and the gas in the low-temperature detection chamber 1 enters the high-temperature detection chamber 2 through the one-way valve 31 and is then discharged through the exhaust valve 22. When the oxygen concentration detected by the oxygen concentration detector reaches the set value, the exhaust valve 22 and the corresponding second regulating valve 23 are closed, indicating that the gas replacement in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 is complete, and the sensor 8 to be tested is in a protective gas atmosphere. Based on this, the detection device also includes a collection pipe, one end of which is connected to the exhaust valve 22 of the high-temperature detection chamber 2, and the other end is connected to the gas source 4. When the oxygen concentration is high, it indicates that the gas replacement process has not been completed, and the gas discharged from the exhaust valve 22 is directly discharged to the outside. When the detected oxygen concentration is lower than the set value, it indicates that the gas discharged from the exhaust valve 22 is mainly protective gas. In this case, the gas discharged from the exhaust valve 22 can be collected through the collection pipe and then recycled back to the gas source 4 for reuse. Of course, during the collection process, the gas temperature can be cooled to prevent the gas temperature entering the gas source 4 from being too high. In addition, in one scheme, a switching control valve is provided on the inlet flow path 11 to control the connection between the inlet flow path 11 and the gas source or external air. After the detection device completes the detection, the temperature of the low-temperature detection chamber 1 and the high-temperature detection chamber 2 is usually relatively high. Therefore, it is possible to introduce external air through the inlet flow path 11 to replace the protective gas in the entire flow path. The oxygen concentration in the discharged gas can be detected by the oxygen concentration detector, and the replacement can be judged based on the oxygen concentration. This replacement process can collect the discharged protective gas and cool the low-temperature detection chamber 1 and the high-temperature detection chamber 2.

[0042] The low-temperature detection chamber 1 and the high-temperature detection chamber 2 are heated. When the pressure detected by the first pressure gauge 15 corresponding to the low-temperature detection chamber 1 reaches the preset value, the first regulating valve 13 of the air inlet passage 11 is closed. As the gas temperature in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 rises, the gas begins to expand.

[0043] Once the gas pressure in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 stabilizes, the pressure in both chambers exceeds the preset value. The second regulating valve 23 and the exhaust valve 22 corresponding to the high-temperature detection chamber 2 open, and the gas in the high-temperature detection chamber 2 is adjusted to the preset value. Then the second regulating valve 23 closes. During this process, when the pressure in the high-temperature detection chamber 2 is lower than that in the low-temperature detection chamber 1, the one-way valve 31 is opened, and the gas in the low-temperature detection chamber 1 enters the high-temperature detection chamber 2 until the pressures of the two chambers are equal. Only then does the one-way valve 31 close.

[0044] When both the low-temperature detection chamber 1 and the high-temperature detection chamber 2 reach the preset pressure, but the high-temperature detection chamber 2 is mixed with the lower-temperature gas from the low-temperature detection chamber 1, the gas expands again as the temperature rises. After the gas pressure stabilizes, the second regulating valve 23 corresponding to the high-temperature detection chamber 2 opens again and closes when the pressure in the high-temperature detection chamber 2 returns to the preset value. At this time, the high-temperature detection chamber 2 and the low-temperature detection chamber 1 reach the preset pressure value.

[0045] In the above process, the low-temperature detection chamber 1 and the high-temperature detection chamber 2 can be controlled to a preset pressure by adjusting the valve and pressure gauge. Since the low-temperature detection chamber 1 and the high-temperature detection chamber 2 are connected by a gas guide pipe 3, pressure balance between them can be achieved. This allows for testing the performance parameters of the same sensor under the same pressure and two different temperature conditions, significantly improving testing efficiency and facilitating a more comprehensive comparative analysis of sensor performance. Furthermore, by setting up a temperature gradient experimental scheme, the performance of the sensor under different temperature differences can be systematically evaluated.

[0046] In an optimized embodiment, the detection device includes a heating furnace 5 with a tubular structure. The heating furnace 5 has a low-temperature zone 51 and a high-temperature zone 52. The low-temperature detection chamber 1 is installed in the low-temperature zone 51, and the high-temperature detection chamber 2 is installed in the high-temperature zone 52. In this embodiment, a single heating furnace 5 is used to simultaneously heat the low-temperature detection chamber 1 and the high-temperature detection chamber 2, and the temperatures of the low-temperature zone 51 and the high-temperature zone 52 are controlled independently. In a preferred embodiment, the heating furnace 5 has three temperature zones: a high-temperature zone 52, a heat preservation zone 53, and a low-temperature zone 51. The heat preservation zone 53 is located between the low-temperature zone 51 and the high-temperature zone 52. The low-temperature detection chamber 1 is located in the low-temperature zone 51, the high-temperature detection chamber 2 is located in the high-temperature zone 52, and the gas guide pipe 3 is located in the heat preservation zone 53. Therefore, both ends of the tubular heating furnace 5 are furnace chambers, with the low-temperature detection chamber 1 and the high-temperature detection chamber 2 located within the two chambers respectively. The middle part of the tubular heating furnace 5 is a hollow structure, and the gaps are filled with a low thermal conductivity material such as quartz wool. The gas guide pipe 3 is inserted through the low thermal conductivity material. This hollow structure filled with low thermal conductivity material separates the two furnace chambers, preventing heat from affecting each other. In addition, the gas guide pipe 3 is also made of a material with poor thermal conductivity, such as ceramic-coated high-temperature resistant steel pipe, and its two ends are welded to the low-temperature detection chamber 1 and the high-temperature detection chamber 2 respectively. Multiple gas guide pipes 3 can be provided, such as two. Both gas guide pipes 3 are equipped with one-way valves 31 to ensure that the gas in the low-temperature detection chamber 1 can flow quickly to the high-temperature detection chamber 2, further ensuring the independence of the ambient temperature of the low-temperature detection chamber 1 and the high-temperature detection chamber 2. In one embodiment, the detection device includes a stand 54, on which the heating furnace 5 is mounted.

[0047] The structures of the first and second sensor detection seats are detailed. Their structures are basically similar, both including a cavity structure 6 and a ceramic chamber 61 located within the cavity structure 6. The ceramic chamber 61 is an Ω-shaped sliding plate structure made of high-temperature ceramic material, on which the sensor 8 to be tested is placed. A thermocouple 62 is also installed on the ceramic chamber 61, which can accurately detect the ambient temperature of the sensor 8 on the ceramic chamber 61 in real time. Conductive lines and sensor connectors are provided on the ceramic chamber 61. When the sensor 8 to be tested is placed on the ceramic chamber 61, the sensor 8 is electrically connected to the sensor connector, and the detection data from the thermocouple 62 and the sensor 8 is exported to either the low-temperature detection chamber 1 or the high-temperature detection chamber 2 through the conductive lines.

[0048] In a preferred embodiment, slides 63 are provided on the inner walls of the cavity structures 6 of both the low-temperature detection cavity 1 and the high-temperature detection cavity 2. The ceramic chamber 61 is slidably disposed on the corresponding slide 63, allowing the ceramic chamber 61 to be pushed into or pulled out of the corresponding cavity structure 6. Correspondingly, the cavity structure 6 has an opening facing the sliding direction of the corresponding ceramic chamber 61 and an end cap 64 that can be movable to seal the opening. The end cap 64 can be a flange structure, and an annular sealing ring 65 is provided between it and the end face of the cavity structure 6 to ensure the sealing performance after installation. An inner wire connector 641 and an outer wire connector 642 are respectively provided on the inner and outer surfaces of the end cover 64. The inner wire connector 641 and the outer wire connector 642 are electrically connected, and the inner wire connector 641 is detachably connected to the conductive line on the ceramic chamber 61, generally by plugging. The outer wire connector 642 can be connected to an external line, which is the electrical line between the end cover 64 and the sensor detection assembly. Thus, the conductive line in the low temperature detection chamber 1 or the high temperature detection chamber 2 can be rotated out through the end cover 64.

[0049] The detection device provided in this embodiment of the invention also includes a host computer 7, in which the aforementioned sensor detection components are integrated. The host computer 7 can control the air pressure and temperature of the low-temperature detection chamber 1 and the high-temperature detection chamber 2, and can also perform corresponding processing based on the collected sensor detection data.

[0050] Specifically, during the pressure adjustment process of the low-temperature detection chamber 1, the host computer 7 collects the data of the first pressure gauge 15 corresponding to the low-temperature detection chamber 1 in real time, calculates the difference between the actual detection pressure and the preset value, and adjusts the opening of the first regulating valve 13 according to the size of the difference, so that the pressure of the low-temperature detection chamber 1 gradually increases. When the pressure reaches the preset value, the first regulating valve 13 automatically closes to stop the air intake and ensure that the pressure of the low-temperature detection chamber 1 is stable.

[0051] For the pressure regulation of the high-temperature detection chamber 2, the host computer 7 monitors the pressure changes of the high-temperature detection chamber 2 in real time. As gas flows into the high-temperature detection chamber 2, the pressure gradually increases. When the pressure of the high-temperature detection chamber 2 reaches the preset value, the corresponding second regulating valve 23 opens, and the pressure is controlled within the preset value by venting or adjusting the flow rate. To ensure the stability and reliability of the venting process, the host computer 7 further analyzes the pressure change rate. If the pressure change tends to stabilize and exceeds the preset value, the second regulating valve 23 is controlled to slowly vent; if the pressure fluctuation is large, the venting is delayed, and the adjustment is carried out after the pressure tends to stabilize.

[0052] See Figure 4 This invention also provides a method for testing the high-temperature environmental performance of a sensor, using the aforementioned testing device, and specifically includes the following steps:

[0053] The sensor 8 to be tested is placed in both the low-temperature detection chamber 1 and the high-temperature detection chamber 2;

[0054] Protective gas is introduced into the low-temperature detection chamber 1 through the gas source 4 to replace the air in the low-temperature detection chamber 1 and the high-temperature detection chamber 2. When the oxygen concentration of the discharged gas reaches the set value, the exhaust valve 22 and the second regulating valve 23 of the exhaust flow path 21 are closed.

[0055] The low-temperature detection chamber 1 and the high-temperature detection chamber 2 are heated. When the pressure detected by the first pressure gauge 15 corresponding to the low-temperature detection chamber 1 reaches the preset value, the first regulating valve 13 of the air inlet passage 11 is closed.

[0056] When the air pressure in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 stabilizes, the second regulating valve 23 and the exhaust valve 22 corresponding to the high-temperature detection chamber 2 open; and when the air pressure in the high-temperature detection chamber 2 reaches the preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 closes.

[0057] When the temperature of the low-temperature detection chamber 1 reaches the first preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is opened, and when the air pressure of the high-temperature detection chamber 2 reaches the preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is closed.

[0058] When the temperature of the high-temperature detection chamber 2 reaches the second preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is opened, and when the air pressure of the high-temperature detection chamber 2 reaches the preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is closed.

[0059] Acquire sensor detection data from the low-temperature detection chamber 1 and the high-temperature detection chamber 2, and compare them with standard data to determine the sensor's detection performance.

[0060] In another embodiment, when it is necessary to detect the sensor's performance under multi-gradient ambient temperatures, the heating temperatures of the low-temperature detection chamber 1 and the high-temperature detection chamber 2 are increased by a gradient, typically by 50 degrees Celsius, i.e., by 50 degrees Celsius for both chambers. Therefore, when the temperature of the low-temperature detection chamber 1 is reached, the second regulating valve 23 corresponding to the exhaust flow path 21 is opened, and when the air pressure of the high-temperature detection chamber 2 reaches a preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is closed; similarly, when the temperature of the high-temperature detection chamber 2 is reached, the second regulating valve 23 corresponding to the exhaust flow path 21 is opened, and when the air pressure of the high-temperature detection chamber 2 reaches a preset value, the second regulating valve 23 corresponding to the exhaust flow path 21 is closed. This allows for comparison of the impact of different temperatures on the sensor response under the same pressure, real-time acquisition of the sensor's response curve under dynamic temperature changes, recording of the sensor's temperature tolerance limit, and statistical analysis of the detection data response curves at different temperatures. When the sensor is a pressure sensor, the pressure response curve can also be detected.

[0061] The above embodiment is optimized by setting pressure warning values ​​for the low-temperature detection chamber 1 and the high-temperature detection chamber 2. After closing the first regulating valve 13 of the inlet airflow path 11, the pressure values ​​of the low-temperature detection chamber 1 and the high-temperature detection chamber 2 when they are stable are obtained, and these pressure values ​​are used as the pressure warning values. Of course, these pressure warning values ​​are greater than the preset values ​​mentioned above. During the heating process of the low-temperature detection chamber 1 and the high-temperature detection chamber 2, the pressure inside the low-temperature detection chamber 1 and the high-temperature detection chamber 2 continuously increases. When the pressure value reaches the warning value, the second regulating valve 23 of the exhaust flow path 21 is opened, and when the gas pressure in the high-temperature detection chamber 2 reaches the preset value, the second regulating valve 23 of the exhaust flow path 21 is closed. Generally speaking, the pressure warning values ​​of the low-temperature detection chamber 1 and the high-temperature detection chamber 2 are less than the pressure values ​​of the two safety valves, thus forming two safety measures. The use of pressure warning values ​​can improve the pressure regulation efficiency of the high-temperature detection chamber 2 and the low-temperature detection chamber 1. When the host computer 7 detects a pressure deviation, it will calculate the output signal according to the control algorithm and immediately adjust the opening of the second regulating valve 23 to control the gas flow rate. Specifically, during the flow rate control process described above (when the detected value is greater than the preset value), the opening of the second regulating valve 23 in the exhaust flow path 21 is dynamically adjusted according to the difference between the real-time detected pressure and the preset value. When the difference is large, the opening of the second regulating valve 23 is large, and when the difference is small, the opening of the second regulating valve 23 is small. For example, multiple difference (detected value and preset value) ranges can be set, and each difference range corresponds to an opening of the second regulating valve 23. During the gas replacement process between the low-temperature detection chamber 1 and the high-temperature detection chamber 2, the openings of the regulating valves in the exhaust flow path 21 and the inlet flow path 11 are both at relatively large values. When the pressure in the low-temperature detection chamber 1 is less than the preset value, the gas source 4 continuously introduces protective gas into the low-temperature detection chamber 1. The opening of the first regulating valve 13 in the inlet flow path 11 is dynamically adjusted according to the real-time difference between the detected pressure and the preset value. When the difference is large, the opening of the first regulating valve 13 is large, and when the difference is small, the opening of the first regulating valve 13 is small. For example, multiple difference (detected value and preset value) ranges can be set, and each difference range corresponds to one opening of the first regulating valve 13. Thus, with the cooperation of the sampling frequency and the feedback mechanism, the detection device can dynamically correct the pressure deviation and ensure that the pressures in the low-temperature detection chamber 1 and the high-temperature detection chamber 2 are always within the set range.

[0062] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A sensor high-temperature environment performance testing device, characterized in that, include: A low-temperature detection chamber is provided with a first sensor detection seat inside; A high-temperature detection chamber is provided, inside which a second sensor detection seat is installed; Both the first sensor detection base and the second sensor detection base are electrically connected to the sensor detection assembly; The low-temperature detection chamber and the high-temperature detection chamber are connected by a gas guide pipe. A one-way valve is provided on the gas guide pipe. The one-way valve is unidirectionally open in the direction from the low-temperature detection chamber to the high-temperature detection chamber. The low-temperature detection chamber is connected to a gas source. The high-temperature detection chamber is provided with an exhaust valve. The detection device also includes a heating furnace, which has a low-temperature zone, a high-temperature zone and a heat preservation zone. The low-temperature detection chamber is installed in the low-temperature zone, the high-temperature detection chamber is installed in the high-temperature zone, and the gas guide pipe is installed in the heat preservation zone. The low-temperature detection chamber is connected to a gas source through an inlet airflow path, and a first regulating valve is provided on the inlet airflow path; the high-temperature detection chamber is connected to an exhaust valve through an exhaust airflow path, and a second regulating valve is provided on the exhaust airflow path; the opening degree of the first regulating valve and the second regulating valve is controlled by the host computer to adjust the gas pressure of the low-temperature detection chamber and the high-temperature detection chamber.

2. The sensor high-temperature environment performance testing device as described in claim 1, characterized in that, Both the first sensor detection seat and the second sensor detection seat include a ceramic chamber. Both the low-temperature detection chamber and the high-temperature detection chamber are provided with slides, and the ceramic chamber is slidably disposed on the corresponding slide.

3. The sensor high-temperature environment performance testing device as described in claim 2, characterized in that, Both the low-temperature detection chamber and the high-temperature detection chamber include a cavity structure and an end cap that can be movably sealed to the opening of the cavity structure. The ceramic chamber is provided with conductive lines, and the end cap is provided with an internal wire connector that can be detachably connected to the conductive lines.

4. The sensor high-temperature environment performance testing device as described in claim 1, characterized in that, The air duct has multiple sections, and each air duct is equipped with a one-way valve.

5. The sensor high-temperature environment performance testing device as described in claim 1, characterized in that, The high-temperature detection chamber is connected to the exhaust valve through an exhaust flow path, and an oxygen concentration detector is installed on the exhaust flow path.

6. A method for testing the high-temperature environmental performance of a sensor, characterized in that, The detection device according to claim 5 includes the following steps: The sensor to be detected is placed in both the low-temperature detection chamber and the high-temperature detection chamber; Protective gas is introduced into the low-temperature detection chamber through the gas source to replace the air in the low-temperature detection chamber and the high-temperature detection chamber. After the gas replacement is completed, the exhaust valve and the second regulating valve of the exhaust flow path are closed. The low-temperature detection chamber and the high-temperature detection chamber are heated. When the pressure detected by the first pressure gauge corresponding to the low-temperature detection chamber reaches the preset value, the first regulating valve of the air intake path is closed. When the air pressure in the low-temperature detection chamber and the high-temperature detection chamber stabilizes, the second regulating valve and the exhaust valve corresponding to the high-temperature detection chamber open; and when the air pressure in the high-temperature detection chamber reaches a preset value, the second regulating valve corresponding to the exhaust flow path closes. When the temperature of the low-temperature detection chamber reaches the first preset value, the second regulating valve corresponding to the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve corresponding to the exhaust flow path is closed. When the temperature of the high-temperature detection chamber reaches the second preset value, the second regulating valve corresponding to the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve corresponding to the exhaust flow path is closed. The sensor detection data in the low-temperature detection chamber and the high-temperature detection chamber are acquired and compared with standard data to determine the detection performance of the sensor.

7. The sensor high-temperature environment performance testing method as described in claim 6, characterized in that, The pressure warning values ​​for the low-temperature detection chamber and the high-temperature detection chamber are set, and the warning values ​​are greater than the preset values. When the pressure values ​​of the low-temperature detection chamber and the high-temperature detection chamber reach the warning values, the second regulating valve of the exhaust flow path is opened, and when the air pressure of the high-temperature detection chamber reaches the preset value, the second regulating valve of the exhaust flow path is closed.

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