Method and system for evaluating dust emission amount of ground material for clean room

Abstract

The invention discloses a method and system for evaluating the dust emission amount of a floor material for a clean room, and belongs to the field of material performance testing. The method for evaluating the dust emission amount of the floor material for the clean room comprises the following steps: adjusting preset environment parameters; adjusting a preset friction working condition; after the preset environment parameters are reached, air inlet and air outlet are closed; obtaining the particle size and concentration of background particles in the cabin in a no-load state; a to-be-tested sample is placed in the environment test chamber; the friction device rubs the to-be-tested sample and measures the particle concentration of particles in the cabin at the t moment online in real time; and calculating the dust emission amount of the to-be-tested sample. The invention further provides a system for evaluating the dust emission amount of the floor material for the clean room. Constant environmental conditions are provided through the environmental test chamber, and the friction device simulates the friction process, so that the accuracy and repeatability of test results are ensured, and reliable support is provided for selecting applicable ground materials for a clean room and related controlled environments.

Description

Technical Field

[0001] The present invention relates to the field of material property testing, and particularly to a method and system for evaluating the dust generation amount of floor materials used in clean rooms. Background Art

[0002] As a basic guarantee system for the air cleanliness control in clean rooms, its technical indicators directly determine the core competitiveness of strategic emerging industries such as semiconductor manufacturing (yield fluctuation of 12-inch wafer production line ≤ 0.05%), biomedicine (risk level of particulate pollution in sterile preparations ≥ Grade A), and precision instruments (assembly environment of laser gyroscopes ≥ ISO Class 4). Taking the front-end semiconductor manufacturing process as an example, in key process nodes (such as extreme ultraviolet lithography, atomic layer deposition, plasma etching, etc.), when the environmental cleanliness is lower than the ISO Class 1 standard, the single-wafer defect density will increase exponentially (measured data shows that for every 1 ISO level decrease in cleanliness, the yield of 28nm process decreases by 2.7%, and the yield reduction of 3nm process can reach 8.9%). Such defects will trigger catastrophic failure modes such as gate oxide breakdown, interconnection layer short circuit, and aggravated quantum tunneling effect in chips.

[0003] In a dynamic operating environment, the atmospheric environment, production equipment, building materials, personnel activities, etc. will all affect the air cleanliness in the clean room to varying degrees. Among them, floor materials such as floor coatings, PVC floors, and rubber floors generate particulate pollution of different particle size ranges after being rubbed (by personnel walking and equipment handling), which has become a key bottleneck affecting the performance of clean rooms. GB / T 25915.14-2022 "Cleanrooms and associated controlled environments - Part 14: Evaluation of equipment suitability by particle concentration" provides a method for evaluating the suitability of machinery and equipment used in clean rooms and associated controlled environments from the perspective of particle concentration, including the test method for the total particle release rate of mechanical equipment. However, for floor materials used in clean rooms, simulating and evaluating their dust generation amount under service conditions is blank in the industry. Summary of the Invention

[0004] In view of this, the present invention provides a method and system for evaluating the dust generation amount of floor materials used in clean rooms. The main purpose is to simulate and evaluate the dust generation amount of floor materials used in clean rooms under different environmental conditions (temperature, relative humidity, wind speed) and friction conditions (load, abrasive particle size, friction area, friction speed), so as to provide technical support for further evaluating the suitability of materials.

[0005] On the one hand, the present invention provides a method for evaluating the dust generation amount of floor materials used in clean rooms, including the following steps:

[0006] S1. Adjust the preset environmental parameters of the environment where the test sample is located according to the friction test conditions of the test sample; wherein, the environmental parameters include temperature, humidity, and wind speed;

[0007] S2. Adjust the preset friction working conditions, where the friction working conditions include load, abrasive particle size, friction area, and friction speed;

[0008] S3. Wait until the temperature, humidity, and wind speed in the environmental test chamber are stable. After reaching the preset requirements, close the intake and exhaust;

[0009] S4. Obtain the particle size D of the particles in the chamber under no-load conditions, p classify all the particles, and divide them into N b grades; obtain the background concentration C of the particles in the i-th particle size grade, Pi0 where i ∈ [1, N b ;

[0010] S5. Place the specimen to be tested inside the environmental test chamber;

[0011] S6. Start the friction device. The friction device frictions the specimen to be tested, and measures in real time and online the particle concentration C of the particles in the i-th particle size grade in the chamber at time t Pi(t) ;

[0012] S7. Calculate the average dust emission amount of the specimen to be tested under the preset environmental parameters and preset friction working conditions. Among them, the average concentration of the particles is calculated according to the following formula:

[0013] ;

[0014] The average dust emission amount is calculated according to the following formula:

[0015] ;

[0016] In the formula,

[0017] C Pi(av) is the average concentration of the particles in the i-th particle size grade, with the unit of particles per cubic meter;

[0018] C Pi(t) is the concentration of the particles in the i-th particle size grade at time t, with the unit of particles per cubic meter;

[0019] C Pi0 is the background concentration of the particles in the i-th particle size grade, with the unit of particles per cubic meter;

[0020] t 0 is the starting time of the friction device;

[0021] t 1 is the closing time of the friction device;

[0022] E Pi(av) is the average dust emission amount of the particles in the i-th particle size grade, with the unit of particles per square meter;

[0023] A is the friction area of the sample to be tested, with the unit of square meter;

[0024] V is the internal volume of the environmental test chamber, with the unit of cubic meter.

[0025] According to the aforementioned method for evaluating the dust generation amount of floor materials for clean rooms, the temperature range inside the environmental test chamber is 15°C to 40°C, the relative humidity range is 20% to 80%, and the wind speed range is 0.1 m / s to 0.5 m / s.

[0026] On the other hand, the present invention provides a system for evaluating the dust generation amount of floor materials for clean rooms. The system executes the aforementioned method for evaluating the dust generation amount of floor materials for clean rooms. The system includes:

[0027] An environmental test chamber, which is used to provide a test environment for the friction process of the sample to be tested;

[0028] A gas supply device, which is connected to the environmental test chamber through a pipeline and is used to provide clean and dust-free constant humidity gas for the environmental test chamber;

[0029] A friction device, which is used to friction the sample to be tested placed inside the environmental test chamber; and

[0030] A particle collection and analysis device, which is used to collect the particles inside the chamber and analyze the particle size and concentration of the particles; The particle collection and analysis device includes:

[0031] A particle collection port, which is arranged inside the environmental test chamber;

[0032] A particle counter, which is communicated with the particle collection port;

[0033] The particles generated by friction inside the environmental test chamber enter the particle counter through the particle collection port for analysis.

[0034] According to the aforementioned system for evaluating the dust generation amount of floor materials for clean rooms, the main structure of the environmental test chamber is a chamber body. An air inlet communicated with the gas supply device is arranged on the side wall of the chamber body. A temperature sensor, a humidity sensor, a wind speed sensor, an exhaust pump and a temperature control module are arranged on the inner wall of the chamber. At least one circulation fan is arranged on the side wall and / or the top wall inside the chamber;

[0035] The air inlet is a stainless steel or polytetrafluoroethylene pipe with uniformly distributed holes, which uniformly transports the air into the chamber.

[0036] According to the aforementioned system for evaluating the dust generation amount of floor materials for clean rooms, the gas supply device includes

[0037] A gas source, which is used to provide gas for the inside of the environmental test chamber;

[0038] An electromagnetic valve, which is used to open or close the gas path;

[0039] A flowmeter for regulating the gas flow rate to control the ventilation rate;

[0040] A high-efficiency filter for removing particulate matter in the air to avoid affecting the internal background of the environmental test chamber; and

[0041] A humidifier for adjusting the air humidity to meet the set requirements of the environmental test chamber; the humidifier is connected to the air inlet through a pipeline.

[0042] According to the aforementioned system for evaluating the dust generation amount of the floor material for clean rooms, the friction device includes:

[0043] A bottom plate;

[0044] Guide rods, which are vertically arranged on the upper surface of the bottom plate and are distributed in a rectangular array of four;

[0045] A specimen jacket, which is slidably connected to the guide rods and is used for clamping and fixing the specimen to be tested;

[0046] A grinding assembly, which is arranged on the upper surface of the bottom plate and is located in the internal space between two groups of guide rods and is used for frictional contact with the specimen to be tested; the grinding assembly includes a rotation source, and the rotation output end of the rotation source is detachably connected with a grinding disc through an elastic coupling, and the grinding surface of the grinding disc faces away from the bottom plate;

[0047] A load assembly, which is arranged on the upper part of the specimen jacket and is used for applying a load during the frictional contact process of the specimen to be tested;

[0048] When the friction device is not in the friction state of the specimen to be tested, the height of the specimen jacket is higher than that of the grinding disc; when the friction device is in the friction state of the specimen to be tested, the specimen to be tested is in contact with the grinding surface of the grinding disc; during the friction process, the specimen jacket drives the specimen to be tested to move downward along the guide rods, and the specimen to be tested remains in contact with the grinding surface of the grinding disc.

[0049] Further, the friction device further includes a telescopic assembly, and the telescopic assembly includes:

[0050] A linear drive source, which is fixedly arranged on the bottom plate; and

[0051] A support plate, which is arranged at the output end of the linear drive source, and the support plate is in movable contact with the bottom of the specimen jacket;

[0052] When the friction device is not in the friction state of the specimen to be tested, the telescopic assembly lifts the specimen jacket upward, and the height of the specimen jacket is higher than that of the grinding disc; when the friction device is in the friction state of the specimen to be tested, the telescopic assembly moves away from the specimen jacket, and the specimen to be tested is in contact with the grinding surface of the grinding disc.

[0053] Further, the specimen jacket includes:

[0054] A sample placement part is provided with a sample placement groove for placing a sample to be tested, and is provided with a threaded hole that penetrates from the upper surface of the sample placement part to the sample placement groove, and the axis of the threaded hole is orthogonally arranged with the sample placement groove; and

[0055] A clamping part includes a threaded column that cooperates with the threaded hole and a pressing block fixed at the bottom end of the threaded column. The threaded column is in threaded fit with the threaded hole and penetrates through the threaded hole. The pressing block is in the sample placement groove, and by rotating the threaded column, the pressing block is driven to press the sample to be tested.

[0056] Further, the load assembly includes:

[0057] A mounting plate, which forms a rigid fixed connection with the upper surface of the sample jacket through a bolt connection structure;

[0058] A weight placement rod, which is arranged on the bearing plane of the mounting plate in a way that extends vertically along the axis, and a precision threaded section is machined on the surface of its rod body;

[0059] A weight set, which is formed by assembling standard weight units in a sleeved manner on the weight placement rod; and

[0060] A fastening nut, which is arranged on the weight placement rod and on the top surface of the weight set;

[0061] The frictional load of the sample to be tested is the sum of the weight of the load assembly, the weight of the sample jacket, and the self-weight of the sample to be tested.

[0062] According to the system for evaluating the dust generation amount of floor materials for clean rooms described above, the system further includes a controller, and the controller is electrically connected to the air supply device, the friction device, and the particle collection and analysis device respectively. The controller is used to control the environmental parameter conditions of the environmental test chamber, the operation and stop of the air supply device, the operation and stop of the friction device, and obtain the particle size and concentration information of the particles.

[0063] Compared with the prior art, the present invention has the following beneficial effects:

[0064] (1) The present invention provides a method for evaluating the dust generation amount of floor materials for clean rooms. By providing constant environmental conditions through the environmental test chamber and simulating the friction process with the friction device, it evaluates the dust generation amount of different particle size ranges of floor materials under different environmental conditions (including temperature, relative humidity, wind speed) and friction working conditions (including load, abrasive particle size, friction area, friction speed), ensuring the accuracy and repeatability of the test results, greatly saving labor costs and time costs, and providing reliable support for selecting suitable floor materials for clean rooms and related controlled environments.

[0065] (2) The present invention designs the structure of the friction device: a fixed installation structure for the test specimen to be tested is provided inside the specimen jacket; the guide rod forms a sliding pair connection with the specimen jacket, and the specimen jacket makes a linear motion in the vertical direction under the guiding action of the guide rod. During the friction process, as the worn surface of the test specimen being tested wears, the specimen jacket slides downward, ensuring that the test specimen remains in contact with the grinding disc at all times and the friction process is stable; the load assembly includes an adjustable weight group, which is connected to the specimen jacket through a mounting plate to form a force application structure in the vertical direction for the test specimen; the weight group adopts a modular counterweight design, and the linear adjustment of the applied load is achieved by increasing or decreasing the number of standard weight units.

[0066] (3) The friction device of the present invention has a high degree of automation, improving production efficiency and saving labor; at the same time, the friction process of the friction device for the test specimen is more stable. Description of the Drawings

[0067] Figure 1 It is a schematic flow chart for the implementation of the method for evaluating the dust generation amount of floor materials used in clean rooms;

[0068] Figure 2 It is a curve showing the change of particle concentration with time for particle size ranges ≥ 1.0 μm;

[0069] Figure 3 It is a schematic structural diagram of the system for evaluating the dust generation amount of floor materials used in clean rooms;

[0070] Figure 4 It is a three-dimensional structure diagram of the friction device in the system for evaluating the dust generation amount of floor materials used in clean rooms;

[0071] Figure 5 It is Figure 4 The partial enlarged view at A in

[0072] Figure 6 It is a front view of the friction device in the system for evaluating the dust generation amount of floor materials used in clean rooms when it is not in the friction state;

[0073] Figure 7 It is a front view of the friction device in the system for evaluating the dust generation amount of floor materials used in clean rooms when it is in the friction state;

[0074] Figure 8 It is a three-dimensional diagram of a specimen placement part;

[0075] Figure 9 It is a three-dimensional diagram of the combined state of another specimen placement part and the connecting plate.

[0076] Explanation of the Reference Numerals:

[0077] 100. Test Specimen to be Tested;

[0078] 1. Environmental test chamber; 11. Chamber body; 12. Air inlet; 13. Temperature sensor; 14. Humidity sensor; 15. Wind speed sensor; 16. Exhaust pump; 17. Temperature control module; 18. Circulation fan;

[0079] 2. Gas supply device; 21. Gas source; 22. Solenoid valve; 23. Flowmeter; 24. High - efficiency filter; 25. Humidifier;

[0080] 3. Friction device; 31. Bottom plate; 32. Guide rod; 33. Specimen jacket; 331. Specimen placement part; 3311. Specimen placement groove; 3312. Threaded hole; 3313. Through hole; 332. Clamping part; 3321. Threaded post; 3322. Pressing block; 3323. Handle; 333. Connecting plate; 34. Grinding assembly; 341. Rotating source; 342. Elastic coupling; 343. Grinding disc; 35. Load assembly; 351. Mounting plate; 352. Weight placement rod; 353. Weight set; 354. Tightening nut; 36. Telescopic assembly; 361. Linear drive source; 362. Support plate; 37. Bush; 38. XY two - way slide; 39. Support leg;

[0081] 4. Particle collection and analysis device; 41. Particle collection port; 42. Particle counter;

[0082] 5. Controller. Detailed implementation manners

[0083] To make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings Figures 1 to 9 and specific embodiments.

[0084] Figure 1 It is a schematic flow chart of the implementation process of a method for evaluating the dust generation amount of floor materials used in clean rooms.

[0085] An embodiment of the present invention provides a method for evaluating the dust generation amount of floor materials used in clean rooms, including the following steps:

[0086] S1. According to the friction test conditions of the test specimen 100 to be tested, adjust the preset environmental parameters of the environment where the test specimen 100 to be tested is located; wherein, the environmental parameters include temperature, humidity and wind speed. Specifically, the temperature range inside the environmental test chamber 1 is 15°C to 40°C, the relative humidity range is 20% to 80%, and the wind speed range is 0.1 m / s to 0.5 m / s.

[0087] S2. Adjust the preset friction working conditions, and the friction working conditions include load, abrasive particle size, friction area and friction speed.

[0088] S3. Wait until the temperature, humidity and wind speed inside the environmental test chamber 1 are stable, and after reaching the preset requirements, close the air inlet and exhaust.

[0089] S4. Obtain the particle size D of the particles in the chamber under no-load conditions p , classify all the particles, and divide them into N b grades; obtain the background concentration C of the particles in the i-th particle size grade Pi0 , where i ∈ [1, N b .

[0090] S5. Place the test sample 100 inside the environmental test chamber

[0091] S6. Turn on the friction device 3. The friction device 3 frictions the test sample and measures in real time and online the particle concentration C of the particles in the i-th particle size grade in the chamber at time t Pi(t) .

[0092] S7. Calculate the average dust generation amount of the test sample 100 under the preset environmental parameters and preset friction conditions. Among them, the average concentration of the particles is calculated according to the following formula

[0093] ;

[0094] The average dust generation amount is calculated according to the following formula

[0095] ;

[0096] In the formula

[0097] C Pi(av) is the average concentration of the particles in the i-th particle size grade, with the unit of particles per cubic meter;

[0098] C Pi(t) is the concentration of the particles in the i-th particle size grade at time t, with the unit of particles per cubic meter;

[0099] C Pi0 is the background concentration of the particles in the i-th particle size grade, with the unit of particles per cubic meter;

[0100] t 0 is the starting time of the friction device;

[0101] t 1 is the closing time of the friction device;

[0102] E Pi(av) is the average dust generation amount of the particles in the i-th particle size grade, with the unit of particles per square meter;

[0103] A is the friction area of the test sample, with the unit of square meters;

[0104] V is the internal volume of the environmental test chamber, with the unit of cubic meters.

[0105] An embodiment of the present invention provides a method for evaluating the dust generation amount of floor materials used in clean rooms. By providing a constant environmental condition through an environmental test chamber and simulating the friction process with a friction device, the dust generation amount of floor materials in different particle size ranges under different environmental conditions (including temperature, relative humidity, and wind speed) and friction working conditions (including load, abrasive particle size, friction area, and friction speed) is evaluated, ensuring the accuracy and repeatability of the test results, greatly saving labor costs and time costs, and providing reliable support for selecting suitable floor materials for clean rooms and related controlled environments.

[0106] A system for evaluating the dust generation amount of floor materials used in clean rooms provided by an embodiment of the present invention is used to execute the method for evaluating the dust generation amount of floor materials used in clean rooms in Embodiment 1. As Figure 3 shown, the system for evaluating the dust generation amount of floor materials used in clean rooms includes: an environmental test chamber 1, a gas supply device 2, a friction device 3, a particle collection and analysis device 4, and a controller 5.

[0107] The environmental test chamber 1 is used to provide a test environment for the friction process of the test sample 100 to be tested. The gas supply device 2 is connected to the environmental test chamber 1 through a pipeline and is used to provide a clean and dust-free constant-humidity gas for the environmental test chamber 1. The friction device 3 is located inside the environmental test chamber 1, and the friction device 3 is used to friction the test sample 100 placed inside the environmental test chamber 1. The particle collection and analysis device 4. The particle collection and analysis device 4 is used to collect the particles in the chamber and analyze the particle size and concentration of the particles. The controller 5 is electrically connected to the gas supply device 2, the friction device 3, and the particle collection and analysis device 4 respectively. The controller 5 is used to control the environmental parameter conditions of the environmental test chamber 1, the operation and stop of the gas supply device 2, the operation and stop of the friction device 3, and obtain the particle size and concentration information of the particles.

[0108] Specifically, the main structure of the environmental test chamber 1 is a chamber body 11. An air inlet 12 communicated with the gas supply device 2 is arranged on the side wall of the chamber body 11. A temperature sensor 13, a humidity sensor 14, a wind speed sensor 15, an exhaust pump 16, and a temperature control module 17 are arranged on the inner wall of the chamber body 11. At least one circulation fan 18 is arranged on the side wall and / or the top wall inside the chamber body 11. The circulation fan 18 is configured to promote the rapid mixing of air and heat through forced convection, and at the same time maintain the uniform dispersion state of the particles inside the environmental test chamber 1, thereby ensuring the measurement accuracy of the environmental parameter detection data. The internal volume of the chamber body 11 is 0.2 m 3 ~2 m 3, the cabin body 11 is composed of metal sandwich panels, providing heat insulation; the air inlet 12 is a pipe made of stainless steel or polytetrafluoroethylene with evenly distributed holes, which evenly transports the intake air into the cabin; the circulation fan 18 is made of stainless steel, with a rotation speed of 50 rpm to 500 rpm; the temperature sensor 13 is used to monitor the temperature inside the cabin in real time, and the temperature monitoring range is 0°C to 100°C; the humidity sensor 14 is used to monitor the humidity inside the cabin in real time, and the monitoring range is 0% to 90%; the wind speed sensor 15 is used to monitor the wind speed inside the cabin in real time, and the monitoring range is 0 to 5 m / s, and the exhaust pump 16 discharges the air inside the cabin at a set speed. The operating temperature range of the environmental test chamber 1 is 15°C to 40°C, the relative humidity range is 20% to 80%, and the wind speed range is 0.1 m / s to 0.5 m / s.

[0109] The temperature control module 17, as the core temperature control component of the cabin body 11, includes a heating unit and a refrigeration unit. The heating unit uses a PTC ceramic heater or a resistance wire, with self-limiting temperature characteristics to ensure safe and efficient heating. The cooling unit can be a thermoelectric cooler (TEC) or a micro-compressor system, and preferably a thermoelectric cooler (TEC) to be applicable to a compact space. The temperature control module 17 forms a closed-loop feedback control by integrating the heating and refrigeration functions and combining with the temperature sensor 13, providing reliable temperature management for the cabin body 11.

[0110] Specifically, the gas supply device 2 includes a gas source 21, an electromagnetic valve 22, a flow meter 23, and a humidifier 25 connected in sequence through pipelines. The humidifier 25 communicates with the inside of the environmental test chamber 1 through a pipeline; the gas source 21 is used to supply gas to the inside of the environmental test chamber 1. The specific gas source 21 can be an air compressor, or the gas source 21 can also be a high-purity gas cylinder. An efficient filter 24 is provided on the pipeline between the flow meter 23 and the humidifier 25; the electromagnetic valve 22 is used to open or close the gas path; the flow meter 23 is a mass flow meter, which is used to adjust the gas flow rate to control the air change rate; the efficient filter 24 is used to remove particulate matter in the air to avoid affecting the internal background of the environmental test chamber 1; the humidifier 25 is used to adjust the air humidity to meet the set requirements of the environmental test chamber 1.

[0111] Figure 3 It is a schematic structural diagram of a system for evaluating the dust generation amount of floor materials used in clean rooms.

[0112] The friction device 3 includes a bottom plate 31, which is disposed on the inner bottom surface of the cabin body 11. Four guide rods 32 distributed in a rectangular array are vertically arranged on the upper surface of the bottom plate 31. A specimen jacket 33 is slidably connected to the guide rods 32. The specimen jacket 33 is used for clamping and fixing the specimen 100 to be tested. A grinding assembly 34 is disposed on the upper surface of the bottom plate 31 and within the inner space of two sets of guide rods 32. The grinding assembly 34 is used for frictional testing of the specimen to be tested. The grinding assembly 34 includes a rotation source 341. The rotation output end of the rotation source 341 is detachably connected to a grinding disc 343 through an elastic coupling 342. The grinding surface of the grinding disc 343 faces away from the bottom plate 31. A load assembly 35 is disposed on the upper part of the specimen jacket 33 for applying a load during the friction process of the specimen 100 to be tested. When the friction device 3 is not in the friction state of the specimen 100 to be tested, the height of the specimen jacket 33 is higher than that of the grinding disc 343, which facilitates placing the specimen 100 to be tested into the specimen jacket 33. When the friction device 3 is in the friction state of the specimen 100 to be tested, the specimen 100 to be tested is in contact with the grinding surface of the grinding disc 343. During the friction process, the specimen jacket 33 drives the specimen 100 to move downward along the guide rods 32, and the specimen 100 remains in contact with the grinding surface of the grinding disc 343.

[0113] The rotation source 341 can be selected as a device capable of outputting rotation, such as a motor, an engine, a hydraulic motor, or a combination of one of them and a speed reducer, etc. Preferably, it is a motor with a small volume and mature technology. The grinding disc 343 is made of diamond or silicon carbide, and the abrasive grain size ranges from P12 to P2500, and the friction area ranges from 0 to 0.1 m 2 . Different grinding discs 343 can be replaced to adapt to different abrasive grain sizes and friction areas.

[0114] By connecting the rotation source 341 and the grinding disc 343 through the elastic coupling 342, the stability of power transmission required for high-precision grinding process is achieved on the premise of low cost, providing a reliable basic structure for the controllable preparation of particles. Further, the radial deviation compensation amount of the elastic coupling 342 is ±0.1 mm.

[0115] To facilitate placing the specimen 100 to be tested on the specimen jacket 33 before the friction of the specimen 100 to be tested, the friction device 3 further includes a telescopic assembly 36. The telescopic assembly 36 includes a linear drive source 361 fixedly disposed on the bottom plate 31 and a support plate 362 disposed at the output end of the linear drive source 361. The support plate 362 is in movable contact with the bottom of the specimen jacket 33. When the friction device 3 is not in the friction state of the specimen 100 to be tested, the telescopic assembly 36 lifts the specimen jacket 33 upward. The height of the specimen jacket 33 is higher than that of the grinding disc 343, and the distance between the bottom surface of the specimen jacket 33 and the working plane of the grinding disc 343 maintains a safety distance of 10 mm to 15 mm, which facilitates placing the specimen 100 to be tested into the specimen jacket 33, such as Figure 6As shown; when the friction device 3 is in the friction state of the test specimen 100, the telescopic assembly 36 is away from the specimen jacket 33, and the test specimen 100 is in contact with the grinding surface of the grinding disc 343, as Figure 7 shown.

[0116] The linear drive source 361 can specifically be a cylinder, a hydraulic cylinder, an electric push rod, etc., as long as it can provide a linear driving force.

[0117] As Figure 5 shown, the specimen jacket 33 includes a specimen placement portion 331 and a clamping portion 332. The specimen placement portion 331 is provided with a specimen placement groove 3311 for placing the test specimen 100, and the clamping portion 332 cooperates with the specimen placement portion 331 to fix the test specimen 100. The specimen placement portion 331 is provided with a threaded hole 3312, and the threaded hole 3312 penetrates through the upper surface of the specimen placement portion 331 and the specimen placement groove 3311, and the axis of the threaded hole 3312 is orthogonally arranged with the specimen placement groove 3311. The clamping portion 332 includes a threaded post 3321 that cooperates with the threaded hole 3312 and a pressing block 3322 fixed to the bottom end of the threaded post 3321. The threaded post 3321 is in threaded cooperation with the threaded hole 3312 and penetrates through the threaded hole 3312. The pressing block 3322 is in the specimen placement groove 3311. By rotating the threaded post 3321, the pressing block 3322 is driven to press the test specimen 100. The specimen jacket 33 can be used for friction tests on test specimens of different thicknesses and has equipment versatility. In order to facilitate the screwing of the threaded post 3321, a handle 3323 is provided at the top end of the threaded post 3321.

[0118] A structure of the specimen placement portion 331 is: as Figure 8 shown, the specimen placement portion 331 is a U-shaped structure, and the inner side of the specimen placement portion 331 is provided with a specimen placement groove 3311 along the U-shape. Taking two adjacent guide rods 32 as a group, two groups of guide rods 32 are arranged oppositely and each group of guide rods 32 is slidably connected to the opposite side walls of the specimen placement portion 331. The specimen placement groove 3311 in the side wall opposite to the U-shaped opening can limit the test specimen 100. Another structure of the specimen placement portion 331 is: as Figure 9 shown, the specimen placement portion 331 is a strip-shaped structure, and one side of the specimen placement portion 331 is provided with a specimen placement groove 3311 that penetrates along the length direction. Taking two adjacent guide rods 32 as a group, two groups of guide rods 32 are arranged oppositely and each group of guide rods 32 is slidably connected to a specimen placement portion 331. The specimen placement grooves 3311 of the two specimen placement portions 331 are arranged oppositely, and connecting plates 333 are provided at the front and rear ends of the two specimen placement portions 331 to keep the heights of the two specimen placement portions 331 the same.

[0119] One way of the sliding connection between the guide rod 32 and the specimen placement part 331 is as follows: through holes 3313 are provided at both ends of the specimen placement part 331, the guide rod 32 is inserted into the through holes 3313 of the specimen jacket 33, and the guide rod 32 and the through holes 3313 are in clearance fit. Another way of the sliding connection between the guide rod 32 and the specimen jacket 33 is as follows: through holes 3313 are provided at both ends of the specimen jacket 33, and a bushing 37 is coaxially and fixedly arranged in the through holes 3313. The guide rod 32 is inserted into the bushing 37, and the specimen placement part 331 slides more stably on the guide rod 32.

[0120] The load assembly 35 adopts an integrated counterweight adjustment mechanism, which specifically includes the following structural features: the mounting plate 351 is rigidly and fixedly connected to the upper surface of the specimen jacket 33 through a bolt connection structure; the weight placement rod 352 is arranged on the bearing plane of the mounting plate 351 in an axially perpendicular extension manner, and a precision threaded section (preferably with a pitch of 0.8 mm to 1.2 mm) is machined on the rod surface; the standard weight unit is assembled on the weight placement rod 352 in a sleeved manner to form a modular weight group 353; a locknut 354 is arranged on the weight placement rod 352 and on the top surface of the weight group 353. The frictional load of the specimen 100 to be tested is the sum of the weight of the load assembly 35, the weight of the specimen jacket 33, and the self-weight of the specimen 100 to be tested (the change in the self-weight of the specimen 100 to be tested during the friction process can be ignored).

[0121] The friction device 3 further includes an XY two-way sliding table 38 arranged on the bottom plate 31, and the grinding assembly 34 is fixedly arranged on the XY two-way sliding table 38. The XY two-way sliding table 38 can adjust the horizontal position of the grinding assembly 34 in the X-axis and Y-axis directions, so that the grinding assembly 34 performs a friction test on the specimen 100 to be tested in the horizontal direction (i.e., the front-back and left-right directions), which is convenient for testing different positions of the specimen 100 to be tested. It should be noted that the XY two-way sliding table 38 can be a knob-type manual positioning platform or an electric positioning platform, and its specific structure is the prior art, so it will not be elaborated here.

[0122] The friction device 3 further includes four adjustable support legs 39 arranged on the bottom plate 31 and distributed in a rectangular array, which ensure that the bottom plate 31 is in a horizontal state, and further ensure that the guide rod 32 is perpendicular to the horizontal plane. The specimen jacket 33 moves vertically up and down on the guide rod 32, ensuring accurate force application of the load assembly 35. A horizontal bubble level is arranged on the bottom plate 31 to indicate whether the bottom plate 31 is horizontal. The support legs 39 are conventional prior art and will not be elaborated here.

[0123] The particle collection and analysis device 4 includes a particle collection port 41 and a particle counter 42 communicated with the particle collection port 41. The particle collection port 41 is arranged inside the cabin body 11; the particle counter 42 is arranged on the outer wall of the cabin body 11, and the particle counter 42 is electrically connected to the controller 5. The particle collection port 41 is in a flared shape and is made of a stainless steel pipe. The particles generated by friction inside the cabin body 11 enter the particle counter 42 through the particle collection port 41 for analysis.

[0124] The controller 5 is respectively electrically connected to the temperature sensor 13, humidity sensor 14, wind speed sensor 15, exhaust pump 16, temperature control module 17 of the environmental test chamber 1; to the gas source 21, solenoid valve 22, flow meter 23, humidifier 25 of the gas supply device 2; to the rotation source 341, linear drive source 361, XY two-way slide table 38 of the friction device 3; and to the particle counter 42 of the particle collection and analysis device 4. The controller 5 is used to control the environmental parameter conditions of the environmental test chamber 1, the operation and stop of the gas supply device 2, the operation and stop of the friction device 3, and to obtain the particle size and concentration information of the particles. It is used to control and adjust the environmental conditions (temperature, relative humidity, wind speed, air change rate) and friction working conditions (load, abrasive particle size, friction area, friction speed), and to record the monitoring data in real time, realizing the precise control and real-time monitoring of the environmental test parameters and friction working conditions, and improving the accuracy and reliability of the test data.

[0125] The system for evaluating the dust generation amount of the floor material for a clean room of the present invention has the advantages of the method for evaluating the dust generation amount of the floor material for a clean room, which will not be elaborated here.

[0126] The present invention designs the structure of the friction device 3. Inside the specimen jacket 33, there is a fixed installation structure for the specimen 100 to be tested; the guide rod 32 forms a sliding pair connection with the specimen jacket 33, and through the guiding action of the guide rod 32, the specimen jacket 33 makes a linear motion in the vertical direction. During the friction process, as the worn surface of the specimen 100 to be tested wears, the specimen jacket 33 slides downward, so that the specimen 100 to be tested always remains in contact with the grinding disc 343, and the friction process is stable; the load assembly 35 includes an adjustable weight set 353, and this weight set is connected to the specimen jacket 33 through the mounting plate 351 to form a force application structure for applying force to the specimen 100 to be tested in the vertical direction; the grinding disc 343 is arranged at the bottom of the cabin 11 and forms a friction pair with the specimen 100 moving in the vertical direction; the cabin 11 forms a sealed chamber structure for accommodating the abrasive grains generated during the friction process; among them, the weight set 353 adopts a modular weight design, and the linear adjustment of the applied load is realized by increasing or decreasing the number of standard weight units, and the fit clearance between the guide rod 32 and the specimen jacket 33 is controlled within the range of 0.05 mm to 0.1 mm to ensure the motion accuracy. The friction device 3 has a high degree of automation, improves the production efficiency and saves labor; at the same time, the friction device 3 makes the friction process of the specimen 100 to be tested more stable.

[0127] The following specifically gives examples of the method for evaluating the dust generation amount of the floor materials used in clean rooms.

[0128] For a certain type of PVC floor planned to be used in semiconductor clean rooms, the dust generation amount under its service conditions is simulated and evaluated. Set the conditions of the environmental test chamber 1, with a volume of 1 m 3 , a temperature of 23 °C, a relative humidity of 50%, and a wind speed of 0.3 m / s to 0.5 m / s. Start the environmental test chamber 1, set the environmental conditions (temperature, relative humidity, wind speed, air change rate) in the controller 5, use a grinding disc 343 with an abrasive grain size of P220 and a friction area of 0.05 m 2 . The friction load of the specimen 100 to be tested is 10 kg, use the motor as the rotation source 341, and set the rotation speed of the motor to 80 rpm. After reaching the set environmental conditions, close the intake and exhaust; start the particle collection and analysis device 4 to monitor the background value of the particle concentration in the cabin air; cut the PVC floor into specimens to be tested of about 0.1 m 2 . After cleaning the surface with deionized water and air drying, then blow it with a powerful blower to remove the surface dust, and then install the specimen to be tested on the specimen jacket 33. Start the grinding assembly 34, monitor the particle concentration of different particle size ranges in the cabin air, for a duration of 10 min, and then close the grinding assembly 34. The calculation results of the average dust generation amount of the specimen 100 to be tested under the set conditions are shown in Table 1:

[0129] Table 1

[0130]

[0131] Figure 2 is the variation curve of the particle concentration with a particle size range of ≥ 1.0 μm over time, t 0 is the starting time of the friction system, t 1 is the closing time of the friction system, t 1 -t 0 = 10 min.

[0132] Finally, it should be noted that the above-described embodiments are only specific implementation manners of the present invention, used to illustrate the technical solutions of the present invention, rather than limiting it. The protection scope of the present invention is not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: any person skilled in the art within the technical scope disclosed by the present invention can still modify the technical solutions recorded in the foregoing embodiments or can easily think of changes, or perform equivalent replacements on some of the technical features; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be covered within the protection scope of the present invention.

Claims

1. A method for evaluating the dust generation of floor materials for clean rooms, characterized in that: The following steps are involved: S1. adjusting preset environmental parameters of the environment in which the sample to be tested (100) is located according to the friction test conditions of the sample to be tested (100); wherein the environmental parameters include temperature, humidity and wind speed; S2. Adjust the preset friction conditions, which include load, abrasive particle size, friction area and friction speed; S3. After the temperature, humidity and wind speed in the environmental test chamber (1) are stable and meet the preset requirements, the air intake and exhaust are closed; S4. Obtain the particle size D of the particles in the cabin under no-load condition p , all particles are divided into N b Get the background concentration C of particles in the i-th particle size file Pi0 ,i∈[1,N b ]; S5, placing the sample to be tested (100) inside the environmental test chamber (1); S6, turning on the friction device (3), the friction device (3) rubs the test sample (100), and measures the particle concentration C of the i-th particle size range particles in the chamber at time t in real time online. Pi(t) ; S7. Calculate the average dust generation of the test sample (100) under the preset environmental parameters and the preset friction conditions, wherein the average concentration of the particles is calculated according to the following formula: ； The average dust generation amount is calculated according to the following formula: ； In the formula, C Pi(av) is the average concentration of particles in the ith particle size bin, in units of particles per cubic meter; C Pi(t) is the concentration of particles in the ith size bin at time t, in units of particles per cubic meter; C Pi0 is the background concentration of particles in the ith size bin, in units of particles per cubic meter; t0 is the starting time of the friction device; t1 is the moment when the friction device is closed; E Pi(av) is the average dust emission of particles in the ith particle size range, in units of per square meter; A is the friction area of ​​the sample to be tested, in square meters; V is the volume of the environmental test chamber in cubic meters.

2. The method for evaluating the dust generation of clean room floor materials according to claim 1, characterized in that: The temperature range of the inner cavity of the environmental test chamber (1) is 15℃~40℃, the relative humidity range is 20%~80%, and the wind speed range is 0.1m / s~0.5m / s.

3. A system for evaluating the dust generation of floor materials for clean rooms, characterized in that: The system executes the method according to claim 1 or 2, and the system comprises: An environmental test chamber (1) for providing a test environment for a friction process of a sample to be tested (100); An air supply device (2), which is connected to the environmental test chamber (1) via a pipeline and is used to provide clean, dust-free, constant-humidity air to the environmental test chamber (1); A friction device (3) for rubbing a sample to be tested (100) placed inside the environmental test chamber (1); and The particle collection and analysis device (4) is used to collect particles in the chamber and analyze the particle size and concentration of the particles; the particle collection and analysis device (4) comprises: A particle collection port (41) disposed inside the environmental test chamber (1); A particle counter (42) connected to the particle collection port (41); Particles generated by friction inside the environmental test chamber (1) enter the particle counter (42) through the particle collection port (41) for analysis.

4. The system for evaluating the dust generation amount of clean room floor materials according to claim 3, characterized in that: The main structure of the environmental test chamber (1) is a chamber body (11); an air inlet (12) connected to an air supply device (2) is arranged on a side wall of the chamber body (11); a temperature sensor (13), a humidity sensor (14), a wind speed sensor (15), an exhaust pump (16) and a temperature control module (17) are arranged on an inner wall of the chamber body (11); and at least one circulation fan (18) is arranged on the side wall and / or the top wall of the chamber body (11); The air inlet (12) is a pipe made of stainless steel or polytetrafluoroethylene with evenly distributed holes, which evenly transports the intake air into the cabin.

5. The system for evaluating dust generation of clean room floor materials according to claim 4, characterized in that: The gas supply device (2) comprises A gas source (21) for supplying gas to the interior of the environmental test chamber (1); A solenoid valve (22) is used to open or close the gas circuit; A flow meter (23) for adjusting the gas flow rate to control the ventilation rate; A high efficiency filter (24) for removing particulate matter in the air to avoid affecting the internal background of the environmental test chamber (1); as well as The humidifier (25) is used to adjust the air humidity to achieve the set requirements of the environmental test chamber (1); the humidifier (25) is connected to the air inlet (12) through a pipeline.

6. The system for evaluating the dust generation amount of clean room floor materials according to claim 3, characterized in that: The friction device (3) comprises: Bottom plate (31); Guide rods (32) vertically disposed on the upper surface of the bottom plate (31) and four of which are distributed in a rectangular array; A sample clamp (33) which is slidably connected to the guide rod (32) and is used to clamp and fix the sample to be tested (100); A grinding assembly (34) is arranged on the upper surface of the bottom plate (31) and located in the internal space of the two sets of guide rods (32), and is used to rub the sample to be tested (100); the grinding assembly (34) comprises a rotation source (341), and a rotation output end of the rotation source (341) is detachably connected to a grinding disc (343) via an elastic coupling (342), and a grinding surface of the grinding disc (343) faces a direction away from the bottom plate (31); A load assembly (35) disposed on the upper portion of the sample jacket (33) and used to apply a load to the test sample (100) during the friction process; When the friction device (3) is not in a friction state with the sample to be tested (100), the height of the sample jacket (33) is higher than the grinding disc (343); when the friction device (3) is in a friction state with the sample to be tested (100), the sample to be tested (100) is in contact with the grinding surface of the grinding disc (343); during the friction process, the sample jacket (33) drives the sample to be tested (100) to move downward along the guide rod (32), and the sample to be tested (100) remains in contact with the grinding surface of the grinding disc (343).

7. The system for evaluating dust generation of clean room floor materials according to claim 6, characterized in that: The friction device (3) further comprises a telescopic assembly (36), wherein the telescopic assembly (36) comprises: A linear drive source (361) fixedly disposed on the bottom plate (31); and A support plate (362) is arranged at the output end of the linear drive source (361), and the support plate (362) is in active contact with the bottom of the sample jacket (33); When the friction device (3) is not in a friction state with the sample to be tested (100), the telescopic assembly (36) lifts the sample jacket (33) upwards, and the height of the sample jacket (33) is higher than the grinding disc (343). When the friction device (3) is in a friction state with the sample to be tested (100), the telescopic assembly (36) is away from the sample jacket (33), and the sample to be tested (100) is in contact with the grinding surface of the grinding disc (343).

8. The system for evaluating dust generation of clean room floor materials according to claim 6, characterized in that: The specimen jacket (33) comprises: A sample placement portion (331) is provided with a sample placement groove (3311) for placing a sample to be tested (100), and a threaded hole (3312) is provided. The threaded hole (3312) penetrates from the upper surface of the sample placement portion (331) and the sample placement groove (3311), and the axis of the threaded hole (3312) is arranged orthogonally to the sample placement groove (3311); and The clamping portion (332) comprises a threaded column (3321) matched with the threaded hole (3312) and a pressing block (3322) fixed at the bottom end of the threaded column (3321); the threaded column (3321) is threadably matched with the threaded hole (3312) and penetrates the threaded hole (3312); the pressing block (3322) is in the sample placement groove (3311), and by rotating the threaded column (3321), the pressing block (3322) is driven to press the sample to be tested (100).

9. The system for evaluating dust generation of clean room floor materials according to claim 6, characterized in that: The load assembly (35) comprises: A mounting plate (351) which is rigidly fixedly connected to the upper surface of the sample jacket (33) via a bolt connection structure; A weight placement rod (352) is arranged on the bearing plane of the mounting plate (351) in an axially vertically extending manner, and a precision threaded section is machined on the surface of the rod body; A weight set (353), which is formed by installing a standard weight unit on a weight placement rod (352) in a sleeve manner; and A fastening nut (354) is disposed on the weight placement rod (352) and on the top surface of the weight set (353); The friction load of the test sample (100) is the sum of the weight of the load assembly (35), the weight of the sample jacket (33) and the weight of the test sample (100).

10. The system for evaluating dust generation of clean room floor materials according to claim 3, characterized in that: The system further comprises a controller (5), the controller (5) being electrically connected to the air supply device (2), the friction device (3), and the particle collection and analysis device (4), respectively. The controller (5) is used to control the environmental parameter conditions of the environmental test chamber (1), the operation and stop of the air supply device (2), the operation and stop of the friction device (3), and to obtain particle size and concentration information of the particles.

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