Recording device, system, method, and program

Abstract

Provided are a recording device, system, method, and program for recording device information for estimating the cause of an error in a device to be monitored. A recording device (100) for recording device information for estimating the cause of an error in a device (50) to be monitored having a function for outputting device information and an error signal indicating that an error has occurred when an error has occurred, the recording device (100) being provided with: a device information acquisition unit (110) for acquiring a plurality of pieces of device information from the device (50) to be monitored; an error signal acquisition unit (120) that acquires the error signal from the device (50) to be monitored; a holding information instructing unit (130) that instructs the device information to be held on the basis of the error signal; and a device information recording unit (140) that records, on the basis of an instruction from the holding information instruction unit, the device information for a predetermined time that includes a time before and after the time at which the error signal has been output.

Description

Technical Field

[0001] The present invention relates to a recording device, a system, a method, and a program for recording device information for presumptively determining the cause of an error in a monitored object device. Background Art

[0002] When an abnormal situation occurs in various devices such as an X-ray analysis device, many devices display an error. For example, there is a method of notifying an error number when an error occurs and grasping the cause of the error based on the error number. However, sometimes it is difficult to determine the cause location by simply notifying the error number. In such a case, the cause of the error is investigated based on the log stored in the device itself or the control unit (PC, etc.) of the device.

[0003] Patent Document 1 discloses a remote fault diagnosis support system in which, during a measurement operation on the user side, an operation history or an error history of an operation input unit of a three-dimensional measuring machine is recorded in an operation history file, and a measurement screen history is recorded in a measurement screen history file. The created history file is transmitted to the service center side via a communication line when a fault occurs. Thus, even if the service personnel do not go to the site, they can accurately presume the cause of the fault by referring to the content of the history file.

[0004] Patent Document 2 discloses an analysis device for analyzing a specimen, characterized by comprising: a) an initialization unit that, immediately after power-on or according to a prescribed instruction, performs initialization of each part of the device and self-diagnosis for checking whether the operation of each part is normal; b) an operation history storage unit that, each time the initialization unit performs initialization and self-diagnosis, stores the result of the execution as an operation history in a non-volatile storage unit in a manner capable of identifying the time series order; c) an error history storage unit that, when a device error occurs during analysis, stores information capable of determining the type of the device error as an error history in the non-volatile storage unit in a manner corresponding to the operation history immediately before the device error; and d) an output unit that reads out the error history stored in the non-volatile storage unit and the operation history corresponding to the error history according to a prescribed instruction and outputs them for display or printing.

[0005] Patent Document 3 discloses an automatic analysis device, which is an automatic analysis device having a plurality of structural elements, an output unit (sensor), a photographing unit, a first storage unit, a second storage unit, and a control unit. Among them, the output unit (sensor) outputs a signal indicating the error when an error occurs in the structural element. The photographing unit is provided corresponding to the structural element and photographs the structural element with a moving image. The control unit stores the photographed moving image in the first storage unit, and when receiving the signal from the output unit, extracts the saved data including the moving image photographed from the time of reception to the time point after a specified time has elapsed, and stores the saved data in the second storage unit.

[0006] Prior art documents

[0007] Patent documents

[0008] Patent Document 1: Japanese Unexamined Patent Application Publication No. 11-69467

[0009] Patent Document 2: Japanese Patent No. 4957587

[0010] Patent Document 3: Japanese Unexamined Patent Application Publication No. 2013-148445 Summary of the Invention

[0011] However, in the technology of Patent Document 1, since the operation history information and error history information are always continuously written in the historical file, it takes time to extract only the required error history information. In addition, although the error category is written as the error history information, in the case of an error caused by multiple reasons, it is difficult to infer the cause from the error category.

[0012] In addition, since the technology of Patent Document 2 cannot obtain the information before the device error is about to occur, it is difficult to infer the cause of the error. In addition, the technology of Patent Document 3 applies the technology of a conventional drive recorder, and it is difficult to apply it to a device whose failure part is inside the device.

[0013] The present invention has been completed in view of such circumstances, and its purpose is to provide a recording device, system, method, and program for recording device information for inferring the cause of an error of a monitoring object device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs.

[0014] (1) To achieve the above object, the analysis device of the present invention adopts the following means. That is, a recording device according to one aspect of the present invention is a recording device that records the device information for inferring the cause of an error of a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs, and is characterized by including: a device information acquisition unit that acquires a plurality of pieces of the device information from the monitoring target device; an error signal acquisition unit that acquires the error signal from the monitoring target device; a holding information indication unit that indicates the device information to be held based on the error signal; and a device information recording unit that records the device information for a specified time including the time before and after the time when the error signal was output based on the indication of the holding information indication unit.

[0015] (2) Further, a recording device according to one aspect of the present invention is characterized by further including an error inference unit that infers the cause of an error based on the device information recorded by the device information recording unit.

[0016] (3) Further, in a recording device according to one aspect of the present invention, the error inference unit uses a machine learning model that outputs a score indicating the possibility of the cause of an error for an input to the device information recorded by the device information recording unit to infer the cause of an error.

[0017] (4) Further, in a recording device according to one aspect of the present invention, the machine learning model is created based on teacher data that takes a variety of the device information as input and the cause of an error corresponding to the input as output.

[0018] (5) Further, in a recording device according to one aspect of the present invention, there are a variety of the error signals, and the holding information indication unit at least indicates the holding of the device information corresponding to the acquired error signal.

[0019] (6) Further, in a recording device according to one aspect of the present invention, the monitoring target device is an X-ray analysis device including an X-ray generation unit that generates X-rays, a specimen stage on which a specimen is provided, and a detector that detects X-rays.

[0020] (7) Further, in a recording device according to one aspect of the present invention, the device information includes two or more of tube voltage, tube current, vacuum degree, filament current, number of discharges, or bias voltage.

[0021] (8) Further, the system according to one aspect of the present invention is characterized by comprising: an analysis device having a function of analyzing a specimen and outputting the device information and the error signal; and the recording device according to any one of (1) to (6) above, wherein the monitored device is the analysis device.

[0022] (9) Further, a method according to one aspect of the present invention is a method applied to a recording device which is a recording device for recording device information for presumptively determining the cause of an error of a monitored device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs. The method is characterized by comprising: a step of obtaining a plurality of pieces of the device information from the monitored device; a step of obtaining the error signal from the monitored device; a step of instructing, based on the error signal, the device information to be held; and a step of recording, based on the instruction, the device information for a predetermined time including the time before and after the time when the error signal is output.

[0023] (10) Further, a program according to one aspect of the present invention is a program for recording device information for presumptively determining the cause of an error of a monitored device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs. The program is characterized by causing a computer to execute: a process of obtaining a plurality of pieces of the device information from the monitored device; a process of obtaining the error signal from the monitored device; a process of instructing, based on the error signal, the device information to be held; and a process of recording, based on the instruction, the device information for a predetermined time including the time before and after the time when the error signal is output. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a block diagram showing an example of the configuration of the system according to Embodiment 1 of the present invention.

[0025] Figure 2 is a flowchart showing an example of the operation of the recording device according to Embodiment 1 of the present invention.

[0026] Figure 3 is a block diagram showing an example of the configuration of the system according to Embodiment 2 of the present invention.

[0027] Figure 4 is a flowchart showing an example of the operation of the recording device according to Embodiment 2 of the present invention.

[0028] Figure 5 is a block diagram showing an example of the configuration of the system according to Embodiment 3 of the present invention.

[0029] Figure 6This is a conceptual diagram showing an example of the configuration of a system according to Embodiment 4 of the present invention.

[0030] Figure 7 This is a block diagram showing an example of the configuration of a system according to Embodiment 4 of the present invention.

[0031] Figure 8 This is a block diagram showing a modified example of the configuration of the system according to the fourth embodiment of the present invention.

[0032] Figure 9 This is a block diagram showing a modified example of the configuration of the system according to the fourth embodiment of the present invention.

[0033] Figure 10 This is a schematic graph showing an example of two pieces of device information at a predetermined time including the time before and after the time when the error signal is output.

[0034] Figure 11A and Figure 11B Each of the graphs is a schematic graph showing an example of two pieces of device information at a predetermined time including the time before and after the time when the error signal is output.

[0035] Description of reference numerals

[0036] 10 System

[0037] 50 Surveillance target device

[0038] 100 Recording Devices

[0039] 110 Device information acquisition unit

[0040] 120 Error signal acquisition unit

[0041] 130 Holding information indication unit

[0042] 140 device information recording unit

[0043] 150 Error Presumption Department

[0044] 200X-ray analysis device

[0045] 210X-ray generating unit

[0046] 220 incident side optical unit

[0047] 230 Goniometer

[0048] 240 sample table

[0049] 250 output side optical unit

[0050] 260 detector

[0051] 300 control device

[0052] 310 Control Unit

[0053] 320 Control Information Storage Unit

[0054] 330 Measurement Data Storage Unit

[0055] 340 Display Unit

[0056] 510 Input Device

[0057] 520 Display Device

[0058] L Control Bus Detailed Implementation Manner

[0059] Next, embodiments of the present invention will be described with reference to the accompanying drawings. For ease of understanding the description, the same reference numerals are assigned to the same components in each drawing, and repeated descriptions are omitted.

[0060] [Embodiment 1]

[0061] [Overall System]

[0062] In Embodiment 1, a recording device for recording device information used to deduce the cause of an error will be described. Figure 1 FIG. is a block diagram showing an example of the configuration of system 10 in Embodiment 1. System 10 includes a recording device 100 and a device under monitoring 50.

[0063] [Device Under Monitoring]

[0064] The device under monitoring 50 to which the present invention can be applied may be any device as long as it has the function of outputting a plurality of device information and an error signal indicating that an error has occurred when an error occurs. Details of the device information and the error signal will be described later. The present invention can be preferably applied to a device under monitoring 50 that may have the same error due to multiple factors and can deduce the cause of the error by confirming a plurality of device information before and after the occurrence of the error.

[0065] [Recording Device]

[0066] The recording device 100 is composed of a computer in which a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and a memory are connected to a bus. The recording device 100 can be a PC terminal or a server on the cloud. In addition, not only can the entire device be set on the cloud, but also a part of the device or a part of the functions within the device can be set on the cloud. The recording device 100 can also be directly connected to the monitored device 50, for example. Additionally, the recording device 100 can be set as a function inside the monitored device 50, for example.

[0067] The recording device 100 records device information for estimating the cause of an error in a monitored device having a function of outputting device information and an error signal. The recording device 100 includes a device information acquisition unit 110, an error signal acquisition unit 120, a holding information instruction unit 130, and a device information recording unit 140. Each unit can transmit and receive information through the control bus L.

[0068] The input device 510 and the display device 520 are connected to the CPU of the recording device 100 via an appropriate interface. The input device 510 is, for example, a keyboard or a mouse and performs input to the recording device 100. The display device 520 is, for example, a display and displays the content of device information or an error signal, etc. Additionally, in the case where the recording device 100 has a configuration including an error estimation unit 150 described later, the display device 520 can also display the estimated cause of the error.

[0069] The device information acquisition unit 110 acquires a plurality of pieces of device information from the monitored device 50. The device information refers to information of the monitored device 50 required for estimating the cause of an error in the monitored device 50. The device information is information for grasping the operating status, action status, etc. of various functions of the monitored device 50 and is output continuously or intermittently at each specific timing. The device information is also output for a specified time after the error signal is output. The device information can be numerical information or language information. The device information can also be information indicating that its value is 0.

[0070] The device information acquisition unit 110 can always acquire device information. In this case, the acquired device information is temporarily stored in the device information recording unit 140 or a storage unit different from the device information recording unit 140. Additionally, the device information acquisition unit 110 can also acquire device information simultaneously with or after the acquisition of an error signal. In this case, the device information is temporarily stored in a storage unit within the monitored device 50 or a device with a storage function provided independently of them. In either configuration, in order not to make the capacity of the stored device information excessive, it is preferably configured to sequentially delete the old device information and store only the device information for a certain period of time.

[0071] The error signal acquisition unit 120 acquires an error signal from the monitored device 50. The error signal refers to a signal output when an error occurs in the monitored device 50. The error signal preferably includes information on the error occurrence time or the error signal output time. The error signal can also be a signal directly output from the monitored device 50 itself. When the device information or other information is numerical information, the error signal can also be a signal indicating that its value is lower than or exceeds a specified threshold. Additionally, the error signal can also be a signal indicating that the device information or other information cannot be obtained. Multiple error signals can be output simultaneously or continuously.

[0072] The hold information instruction unit 130 instructs the device information to be held based on the error signal. The hold information instruction unit 130 instructs the device information recording unit 140 to hold the device information for a specified period of time including the time before and after the time when the error signal is output.

[0073] The specified period of time including the time before and after the time when the error signal is output refers to the time obtained by adding the first specified period of time before the time when the error signal is output and the second specified period of time after the time when the error signal is output. The specified period of time including the time before and after the time when the error signal is output can also be preset as the time required to presume the cause of the error in the monitored device 50. The specified period of time including the time before and after the time when the error signal is output varies depending on the type or function of the monitored device 50. For example, preferably, the first specified period of time is 10 seconds or more and 60 seconds or less. Additionally, for example, preferably, the second specified period of time is 5 seconds or more and 30 seconds or less.

[0074] In the case where there are multiple error signals, it is preferable to keep the information indicating unit 130 indicating at least the holding of the device information corresponding to the acquired error signal. Thereby, the time for confirming the device information in order to deduce the cause of the error can be reduced. In addition, the capacity of the device information recording unit 140 for recording the device information can be reduced. In the case where there are multiple error signals, the information indicating unit 130 may also determine and indicate the first specified time or the second specified time based on the type of the error signal.

[0075] The device information recording unit 140 records the device information for a specified time including the time before and after the moment when the error signal is output based on the indication of the information indicating unit 130. The device information recording unit 140 preferably includes a non-volatile memory. The device information for a specified time including the time before and after the moment when the error signal is output is preferably recorded in the non-volatile memory. Thereby, even when the power supply of the recording device 100 or the monitored device 50 is turned off, the device information can be confirmed afterwards or the cause of the error can be deduced. In addition to recording the device information, the device information recording unit 140 may also record the error signal acquired by the error signal acquisition unit 120.

[0076] [Method of recording device information]

[0077] (Explanation of the process until recording device information)

[0078] Figure 2 It is a flowchart showing an example of the operation of the recording device 100 according to Embodiment 1. Figure 2 It shows an example of the operation until recording the device information. First, the recording device 100 acquires the device information (step S1). Next, the error signal is acquired (step S2). Next, the device information to be held is indicated based on the error signal (step S3). Then, based on the indication of the holding information indicating unit, the device information for a specified time including the time before and after the moment when the error signal is output is recorded and held (step S4), and the process ends. The device information may be displayed as needed. In this way, the device information for a specified time including the time before and after the moment when the error signal is output can be recorded.

[0079] [Embodiment 2]

[0080] In Embodiment 2, a recording device that records device information for deducing the cause of an error and deduces the cause of the error based on the recorded device information will be described. Figure 3 It is a block diagram showing an example of the configuration of the system 10 in Embodiment 2. In Embodiment 2, based on Embodiment 1, as Figure 3As shown, the recording device 100 preferably includes an error estimation unit 150. The error estimation unit 150 estimates the error cause based on the device information recorded by the device information recording unit 140.

[0081] The error estimation unit 150 preferably estimates the error cause based on the combination of the device information indicating an abnormal behavior different from normal and the error signal among the multiple device information. Thus, in the case where the same error may occur due to multiple factors, a complex error cause that cannot be known only from the error signal can be estimated. The error cause estimated for the combination of the device information indicating an abnormal behavior different from normal and the error signal among the multiple device information may also be stored in a table in advance.

[0082] The error estimation unit 150 preferably uses a machine learning model that outputs a score indicating the possibility of the error cause for the input of the device information recorded by the device information recording unit 140 to estimate the error cause. Thus, the error cause can be estimated more appropriately. The score indicating the possibility of the error cause is a score that numerically represents the probabilities of multiple estimated error causes. The error cause estimated based on the score indicating the possibility of the error cause output by the machine learning model may be one, or multiple candidates may be presented.

[0083] The machine learning model is created based on the teacher data that takes various device information as input and the corresponding error cause as output. The machine learning for the error estimation unit 150 is performed in advance. The input of the teacher data may be all or a part of the device information that can be obtained by the device information acquisition unit 110. The input of the teacher data may include an error signal in addition to various device information. The input of the teacher data is preferably an input that matches the composition of the data recorded by the device information recording unit 140. The various device information or error signals of the teacher data may be virtual data calculated by calculation or measured data. The error cause corresponding to the input may use a preset error cause or may use the cause after the true error cause is determined. The learning data composed of the combination of the device information and the error cause may use the data of not only one monitored device 50 but also the data of multiple monitored devices 50 having the same composition.

[0084] When the error estimation unit 150 estimates the error cause, the estimated error cause is preferably recorded in the device information recording unit 140 together with the device information. In addition, the estimated error cause may be displayed on the display device 520. The error estimation unit 150 may also perform the estimation of the error cause at a time separated from the recording of the device information, such as after the monitored device 50 or the recording device 100 is restarted.

[0085] (Explanation of the process up to the presumed cause of the error)

[0086] Figure 4 This is a flowchart showing an example of the operation of the recording device 100 according to Embodiment 2. Figure 4 It shows an example of the operation up to the presumed cause of the error. In the description of this flowchart, the characteristic operations will be described in detail, and the description of the operations that have already been described will be omitted. From the acquisition of device information (step T1) to the recording and retention of device information (step T4) are the same as steps S1 to S4 described above. Next, the recording device 100 presumes the cause of the error (step T5) and ends. The presumed cause of the error can also be saved as needed, or the device information or the cause of the error can be displayed. In this way, the cause of the error can be presumed based on the recorded device information.

[0087] As described above, the device information can be acquired at all times, or can be acquired simultaneously with or after the acquisition of the error signal. Therefore, in Figure 2 or Figure 4 in the flowchart, the acquisition of device information and the acquisition of the error signal can be in a different order or can be performed simultaneously.

[0088] [Embodiment 3]

[0089] In Embodiments 1 and 2, an example in which the recording device 100 is directly connected to the monitored device 50 has been described. In Embodiment 3, a system in which the control device 300 of the monitored device 50 exists independently of the monitored device 50 will be described. Figure 5 This is a block diagram showing an example of the configuration of the system 10 in Embodiment 3. In Figure 5 it, the control device 300 and the recording device 100 are described as different devices, but they can also be the same device. In addition, Figure 5 the recording device 100 in

[0090] is configured without the error presumption unit 150, but in this embodiment, it can also be configured to include the error presumption unit 150.

[0091] In the presence of the control device 300, the device information obtained by the device information acquisition unit 110 may also be information obtained via the control device 300. In this case, the device information may also be information based on the feedback obtained by the control device 300 from monitoring the monitored device 50. That is, the device information may also be the information output by the control device 300.

[0092] The device information acquisition unit 110 may always acquire the device information. Additionally, the device information acquisition unit 110 may also acquire the device information simultaneously with or after the acquisition of the error signal. In this case, the device information is temporarily stored in the storage unit within the monitored device 50, the storage unit within the control device 300, or a device with a storage function provided independently of them.

[0093] In the presence of the control device 300, the error signal acquired by the error signal acquisition unit 120 may also be a signal output from the control device 300. The error signal may also be a signal determined based on the device information or other information obtained by the monitored device 50 itself or the control device 300 from monitoring the monitored device 50.

[0094] Even in the system 10 equipped with the control device 300, the operation of the recording device 100 can be carried out in the same manner as the above process.

[0095] [Embodiment 4]

[0096] In Embodiment 4, for the recording system 10, recording device 100, and control device 300 when the monitored device 50 is the X-ray analysis device 200, specific examples of device information and error signals are included in the description.

[0097] [Overall System]

[0098] The present invention can, for example, be configured as a system 10 including a recording device 100 and an X-ray analysis device 200. Figure 6 It is a conceptual diagram showing an example of the configuration of the system 10 including the recording device 100, X-ray analysis device 200, and control device 300. The system 10 has a recording device 100, an X-ray analysis device 200, and a control device 300.

[0099] By using such a system 10, when an error occurs in the X-ray analysis device 200, the device information for estimating the cause of the error can be recorded. Additionally, the cause of the error can be estimated.

[0100] [X-ray Analysis Device]

[0101] The X-ray analysis device 200 constitutes an optical system that makes X-rays incident on a specimen and detects scattered X-rays or fluorescent X-rays generated from the specimen. The X-ray analysis device 200 is configured to include: an X-ray generation unit 210 that generates X-rays from an X-ray focus, i.e., an X-ray source; an incident-side optical unit 220; a goniometer 230; a specimen stage 240 on which a specimen is placed; and a detector 260 that detects X-rays. The X-ray analysis device 200 may be configured to include an exit-side optical unit 250. The X-ray generation unit 210, the incident-side optical unit 220, the goniometer 230, the specimen stage 240, the exit-side optical unit 250, and the detector 260 that constitute the X-ray analysis device 200 may be general components, so the description thereof is omitted. In addition, Figure 6 The configuration shown is an example, and various other configurations may also be adopted.

[0102] When the device 50 to be monitored is the X-ray analysis device 200, the device information preferably includes two or more of the tube voltage, tube current, vacuum degree, filament current, number of discharges, or bias voltage. In addition, the vacuum degree refers to the vacuum degree in the region where the X-ray generation unit 210 is disposed. Thereby, it becomes easy to presume the cause of an error when an error occurs in the X-ray generation unit 210. Errors in the X-ray generation unit 210 of the X-ray analysis device 200 are mostly caused by complex factors, so the present invention can be preferably applied.

[0103] As the X-ray generation unit 210 of the X-ray analysis device 200, a rotor-type X-ray generation unit 210 may also be used. In this case, the X-ray generation unit 210 is composed of a rotationally symmetric anode-grounded type anti-cathode unit and an electron gun. Moreover, the electron gun is composed of an electron emission unit and a Wehnelt electrode for electron focusing. Here, the Wehnelt electrode has a structure in which a voltage (bias voltage) lower than the negative voltage applied to the electron emission unit is applied.

[0104] [Control device]

[0105] Figure 7 is a block diagram showing an example of the configuration of a system 10 including a recording device 100, an X-ray analysis device 200, and a control device 300. In Figure 7 it, the recording device 100 and the control device 300 are described as an integrated device. The control device 300 is connected to the X-ray analysis device 200 and controls the X-ray analysis device 200 and processes and stores the acquired data. The recording device 100 is the above-described recording device 100.

[0106] The control device 300 and the recording device 100 are devices equipped with a CPU and a memory, which can be a PC terminal or a server on the cloud. In addition, not only can the entire device be set on the cloud, but also a part of the device or a part of the functions within the device can be set on the cloud. The input device 510 is, for example, a keyboard or a mouse, and is used to input to the control device 300 or the recording device 100. The display device 520 is, for example, a display, and is used to display the measurement data, device information, the content of the error signal, or the deduced error cause, etc.

[0107] The control device 300 is configured to include a control unit 310, a control information storage unit 320, a measurement data storage unit 330, and a display unit 340.

[0108] The control unit 310 controls the operation of the X-ray analysis device 200. The control information storage unit 320 stores the information required for the control or analysis of the sample obtained from the X-ray analysis device 200. The information required for the control or analysis of the sample includes information related to the X-ray analysis device 200 such as the device name, the type of the radiation source, the wavelength, the background. In addition to this, it may also include the required information among the shape, configuration, types of constituent elements, composition, and absorption coefficient of the sample, etc. The control information storage unit 320 may also temporarily store the device information.

[0109] The measurement data storage unit 330 stores the measurement data obtained from the X-ray analysis device 200. The measurement data may include the required information among the type of the radiation source, the wavelength, the background, the shape, configuration, types of constituent elements, composition, and absorption coefficient of the sample, etc. The display unit 340 displays the measurement data on the display device 520. Thus, the user can confirm the measurement data. In addition, the user can give instructions and make specifications to the control device 300 based on the measurement data.

[0110] In addition, in Figure 6 , the control device 300 and the recording device 100 are described as the same PC. Also, in Figure 7 , the control device 300 and the recording device 100 are described as an integrated device. However, as described above, in the case where the device information and the error signal are output from the X-ray analysis device 200, the method of the present invention can obtain the device information and the error signal without passing through the control device 300 to record the device information or deduce the error cause. Therefore, as Figure 8 shows, the recording device 100 can also be configured as a device different from the control device 300. Also, as Figure 9 shows, the recording device 100 can also be configured as a part of the functions included in the control device 300. Figure 8 , Figure 9It is a block diagram showing a modified example of the configuration of a system 10 including a recording device 100, an X-ray analysis device 200, and a control device 300.

[0111] [Measurement method]

[0112] A sample is set in the X-ray analysis device 200, and based on the control of the control device 300, the goniometer is driven under specified conditions. The X-ray analysis device 200 repeatedly moves the rotation axis and projects X-rays under specified conditions. In addition, X-rays are irradiated onto the sample, and scattered X-rays, transmitted X-rays, fluorescent X-rays, etc. generated from the sample are detected. Thus, measurement data such as X-ray reflectivity data, small-angle X-ray scattering data, and fluorescent X-ray data are obtained. The X-ray analysis device 200 sends the obtained measurement data to the control device 300. The X-ray analysis device 200 may also send device information during measurement to the control device 300. The X-ray analysis device 200 sends an error signal to the control device 300 when an error occurs. When the recording device 100 is configured as a device different from the control device 300, the device information or the error signal may also be directly sent to the recording device 100.

[0113] [Example of presumption of error cause]

[0114] (1) Consider the case where an error signal detecting an abnormality in the filament current is output. Figure 10 It is a schematic coordinate diagram showing an example of two pieces of device information within a specified time including the time before and after the moment when the error signal is output. Figure 10 The two pieces of device information in refer to the feedback values (analog voltage signal outputs) of the filament current and the bias voltage. In Figure 10 , an error signal detecting an abnormality in the filament current is output.

[0115] When an error signal detecting an abnormality in the filament current is output, the cause of the abnormality in the filament current is unknown in the prior art. However, in the case where, as in the example of the present invention, the filament current and the bias voltage are set as device information and the device information within a specified time including the time before and after the moment when the error signal is output is recorded, it is possible to presume that the cause of the abnormality in the filament current is due to a disorder in the bias voltage.

[0116] (2) Consider the case where an error signal is output detecting an increase in the tube current component other than the thermoelectrons generated from the filament, or a decrease in the tube voltage accompanying this, that is, an abnormality in the tube current or the tube voltage (hereinafter referred to as discharge). Figure 11A , Figure 11B are respectively schematic coordinate diagrams showing an example of two pieces of device information within a specified time including the time before and after the moment when the error signal is output.Figure 11A , Figure 11B The two pieces of device information in Figure 11B refer to the measured vacuum pressure output value inside the tube ball and the feedback value of the tube current (analog voltage signal output). In Figure 11A , Figure 11B , what is output are error signals detecting the occurrence of discharge.

[0117] In Figure 11A , when an error signal is output, the vacuum pressure temporarily increases (the degree of vacuum deteriorates). In contrast, in Figure 11B , the vacuum pressure does not increase when an error signal is output. By comprehensively evaluating the discharge and the vacuum pressure, in Figure 11A , it is possible to infer that discharge has occurred inside the tube ball. Additionally, in Figure 11B , it is possible to infer that discharge has occurred outside the tube ball such as in the power supply unit.

[0118] In the case where an error signal detecting the occurrence of discharge is output, in the prior art, the cause of the discharge is unknown. However, in the case of a device that sets the vacuum pressure and the tube current as device information and records the device information for a specified time including the time before and after the moment when the error signal is output as in the example of the present invention, the cause of the error can be inferred through the above - mentioned comprehensive evaluation. Furthermore, in Figure 11A and Figure 11B , the reason for the decrease in the vacuum pressure after the output of the error signal is that the state has become such that X - rays are not generated due to the error.

[0119] Based on the above, the recording device, system, method, and program of the present invention can record the device information for a specified time including the time before and after the moment when the error signal is output. Additionally, the cause of the error can be inferred based on the recorded device information.

[0120] The present invention is of course not limited to the above - described embodiments. The scope of the present invention encompasses various modifications and equivalents included in the technical idea of the present invention. Additionally, the names, structures, shapes, quantities, positions, sizes, etc. of the constituent elements shown in each drawing are for the convenience of explanation and can be appropriately changed.

[0121] Furthermore, this application claims priority based on Japanese Patent Application No. 2023 - 209967 filed on December 13, 2023, and the entire contents of Japanese Patent Application No. 2023 - 209967 are incorporated herein by reference.

Claims

1. A recording device for recording device information for estimating the cause of an error of a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs, characterized in that: have: a device information acquisition unit that acquires the plurality of device information from the monitored device; an error signal acquisition unit that acquires the error signal from the monitored device; a retention information indicating unit for indicating the device information to be retained based on the error signal; as well as A device information recording unit records the device information for a predetermined time period including a time period before and after a time period when the error signal is output based on an instruction from the information retention instruction unit.

2. The recording device according to claim 1, characterized in that The device further includes an error estimating unit for estimating a cause of an error based on the device information recorded in the device information recording unit.

3. The recording device according to claim 2, characterized in that The error estimating unit estimates the cause of the error using a machine learning model that outputs a score indicating the possibility of the cause of the error in response to the input of the device information recorded in the device information recording unit.

4. The recording device according to claim 3, characterized in that The machine learning model is created based on teacher data that takes various device information as input and outputs error causes corresponding to the input.

5. The recording device according to claim 1, characterized in that There are many kinds of error signals. The retained information instruction unit at least instructs retention of the device information corresponding to the acquired error signal.

6. The recording device according to claim 1, characterized in that The monitoring target device is an X-ray analysis device including an X-ray generation unit for generating X-rays, a sample stand for placing a sample, and a detector for detecting the X-rays.

7. The recording device according to claim 6, characterized in that The device information includes two or more of tube voltage, tube current, vacuum degree, filament current, discharge times or bias voltage.

8. A system, characterized in that: have: an analysis device having a function of analyzing a sample and outputting the device information and the error signal; and The recording device according to any one of claims 1 to 7, The monitoring target device is the analyzing device.

9. A method, a method applied to a recording device, the recording device being a recording device for recording device information for estimating a cause of an error of a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred when an error has occurred, the method comprising: A step of obtaining a plurality of pieces of device information from the monitored device; A step of obtaining the error signal from the monitored device; A step of indicating the device information to be maintained based on the error signal; and A step of recording the device information for a predetermined time including time before and after the time when the error signal is output based on the instruction.

10. A recording medium, which is a computer-readable and non-transitory recording medium recording a program, characterized in that: The program is a program for recording the device information for estimating the cause of an error of a monitoring target device having a function of outputting the device information and an error signal indicating that an error has occurred when an error has occurred, and causes a computer to execute: A process of acquiring a plurality of pieces of device information from the monitoring target device; obtaining the error signal from the monitored device; instructing, based on the error signal, to perform processing of the retained device information; as well as A process of recording the device information for a predetermined time including time before and after the time when the error signal is output based on the instruction.

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