Evaporation automatic adjusting method, evaporation system and display panel

Abstract

The invention provides an automatic adjustment method for evaporation, an evaporation system and a display panel. The evaporation automatic adjusting method comprises the following steps: preparing a first light-emitting device on a substrate; measuring an actual optical parameter of the first light-emitting device; calculating an optimal optical parameter and an optimal evaporation parameter of the second light-emitting device according to the actual optical parameter of the first light-emitting device; acquiring actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device; and preparing the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device. According to the invention, the optical parameters of the prepared light-emitting device are measured, and the evaporation parameters of the subsequently prepared light-emitting device are subjected to simulation calculation and compensation according to the measurement result, so that the optical compensation effect and the overall display effect of the display panel are improved.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and particularly to an evaporation automatic adjustment method, an evaporation system, and a display panel. Background Art

[0002] An organic light-emitting diode (OLED) is an organic thin-film electroluminescent device, which has attracted great attention due to its advantages such as low power consumption, high brightness, wide viewing angle, high contrast, and flexible display, and is widely used in electronic display products.

[0003] In the process of preparing traditional display panels, the light-emitting pixel patterning is usually achieved through a fine metal mask (FMM). The FMM technology is mature and has rich mass production experience. However, the FMM technology also has problems such as limited precision, high development cost, and long development cycle. The fine metal mask-free technology eliminates the limitations of the traditional OLED process on the display screen size, resolution, and other screen body performances, and has the advantages of high performance, full-domain size, and agile delivery. Patents CN118251982A, CN116648095A, CN117062489A, CN118742138A, CN118678783A, CN118660598A, CN118675450A, CN118824188A, CN118781966A record the relevant content of the fine metal mask-free technology for reference.

[0004] However, the display effect of the current OLED display panel is still not ideal. Summary of the Invention

[0005] The purpose of the present invention is to provide an evaporation automatic adjustment method, an evaporation system, and a display panel to solve the problem that the display effect of the display panel in the related display technology is still not ideal.

[0006] To achieve the above purpose, the present invention provides an evaporation automatic adjustment method, and the evaporation automatic adjustment method includes: Preparing a first light-emitting device on a substrate; measuring the actual optical parameters of the first light-emitting device; calculating the optimal optical parameters and optimal evaporation parameters of a second light-emitting device according to the actual optical parameters of the first light-emitting device; obtaining the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device; and preparing the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device.

[0007] Further, before the step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device, it further includes: transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation equipment through a data transmission device. Preferably, in the step of transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation equipment through a data transmission device, it includes: transcoding the optimal evaporation parameters of the second light-emitting device and transmitting the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation equipment.

[0008] Further, the step of measuring the actual optical parameters of the first light-emitting device includes: lighting the first light-emitting device; obtaining the actual optical parameters of the first light-emitting device after lighting. Preferably, the step of obtaining the actual optical parameters of the first light-emitting device after lighting includes: obtaining the actual optical parameters of the first light-emitting device after lighting through a measuring device.

[0009] Further, the step of calculating the optimal optical parameters and the optimal evaporation parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device includes: calculating the optimal optical parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device; calculating the optimal evaporation parameters of the second light-emitting device according to the optimal optical parameters of the second light-emitting device.

[0010] Further, the step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device includes: obtaining the preset evaporation parameters of the second light-emitting device; correcting the preset evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device to obtain the actual evaporation parameters of the second light-emitting device. Preferably, the optimal evaporation parameters include the evaporation film thickness.

[0011] Further, after the step of fabricating the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device, it further includes: measuring the actual optical parameters of the second light-emitting device; calculating the optimal optical parameters and the optimal evaporation parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device; calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device; fabricating the third light-emitting device on the substrate according to the actual evaporation parameters of the third light-emitting device.

[0012] Further, before the step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device, it further includes: transcoding the optimal evaporation parameters of the third light-emitting device; transmitting the transcoded optimal evaporation parameters of the third light-emitting device to the evaporation equipment.

[0013] Further, the step of measuring the actual optical parameters of the second light-emitting device includes: turning on the second light-emitting device; obtaining the actual optical parameters of the second light-emitting device after being turned on. Preferably, the step of obtaining the actual optical parameters of the second light-emitting device after being turned on includes: obtaining the actual optical parameters of the second light-emitting device after being turned on through a measuring device.

[0014] Further, the step of calculating the optimal optical parameters and the optimal evaporation parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device includes: calculating the optimal optical parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device; calculating the optimal evaporation parameters of the third light-emitting device according to the optimal optical parameters of the third light-emitting device. Preferably, the step of calculating the optimal optical parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device includes: calculating the optimal optical parameters of the third light-emitting device by combining the actual optical parameters of the second light-emitting device with the actual optical parameters of the first light-emitting device.

[0015] Further, the step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device includes: obtaining the preset evaporation parameters of the third light-emitting device; correcting the preset evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device to obtain the actual evaporation parameters of the third light-emitting device.

[0016] The present invention also provides an evaporation system, which includes a measuring device and an evaporation device. The measuring device is used to obtain the actual optical parameters of the prepared light-emitting device, and calculate the optimal optical parameters and the optimal evaporation parameters of the unprepared light-emitting device according to the actual optical parameters. The evaporation device is data-connected to the measuring device, calculates the actual evaporation parameters of the light-emitting device according to the optimal evaporation parameters, and prepares the light-emitting device on the substrate according to the actual evaporation parameters.

[0017] The measuring device includes an acquisition module and a calculation module. The acquisition module is used to obtain the actual optical parameters of the prepared light-emitting device. The calculation module is used to calculate the optimal optical parameters and the optimal evaporation parameters of the unprepared light-emitting device.

[0018] Further, the evaporation device includes an evaporation module and a control module. The evaporation module is used to prepare the light-emitting device. The control module is data-connected to the measurement device, and the control module calculates the actual evaporation parameters according to the optimal evaporation parameters and the preset evaporation parameters, and controls the evaporation module according to the actual evaporation parameters. Preferably, the control module includes a memory and a processor, the memory is used to store the preset evaporation parameters and the actual evaporation parameters, and the processor is used to calculate the actual evaporation parameters. Preferably, the acquisition module of the measurement device includes an image sensor.

[0019] Furthermore, the evaporation system further includes a data transmission device, which is data-connected to the evaporation device and the measuring device, and is used to transcode the parameters calculated by the measuring device and transmit the transcoded parameters to the evaporation device. Preferably, the evaporation system further includes a transport device, which is used to transport the substrate between the evaporation device and the measuring device.

[0020] The present invention also includes a display panel, the display panel includes a substrate and a plurality of light-emitting devices, the light-emitting devices are arranged on one side of the substrate. The light-emitting devices are prepared by the above-mentioned automatic evaporation adjustment method; or, the light-emitting devices are prepared by the above-mentioned evaporation system.

[0021] Further, the substrate includes an array substrate and an isolation structure. The isolation structure is arranged on one side of the array substrate, and the isolation structure encloses a plurality of isolation openings, and at least part of the light-emitting device is located in the isolation opening. Preferably, the isolation structure includes a supporting portion and a blocking portion. The supporting portion is arranged on one side of the array substrate. The blocking portion is arranged on a side of the supporting portion away from the substrate, and the orthographic projection of the blocking portion on the substrate covers the orthographic projection of the supporting portion on the substrate. Preferably, the display panel also includes an encapsulation layer, and the encapsulation layer is arranged on a side of the light-emitting device away from the substrate.

[0022] The advantages of the present invention are: in an automatic evaporation adjustment method, an evaporation system, and a display panel provided by the present invention, the optical parameters of the prepared light-emitting device are measured, and the optimal evaporation parameters of the subsequently prepared light-emitting device are simulated and calculated according to the measurement structure to compensate for the actual evaporation parameters of the light-emitting device, thereby achieving separate optical compensation for light-emitting devices of different luminous colors to improve the effect of optical compensation, thereby reducing the deviation between the coordination of different light-emitting devices during the preset design and the actual production, improving the optical coordination between different light-emitting devices, and thereby improving the overall display effect of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those skilled in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0024] Figure 1 It is a structural block diagram of the evaporation system in the embodiment of the present invention; Figure 2 It is a schematic flow chart of the evaporation automatic adjustment method in the embodiment of the present invention; Figure 3 It is a schematic diagram of the layered structure of the substrate in the embodiment of the present invention; Figure 4 It is a schematic diagram of the layered structure of the display panel after preparing the first light-emitting device in the embodiment of the present invention; Figure 5 It is a schematic diagram of the layered structure of the display panel after step S10 in the embodiment of the present invention; Figure 6 It is a schematic diagram of the layered structure of the display panel after preparing the second light-emitting device in the embodiment of the present invention; Figure 7 It is a schematic diagram of the layered structure of the display panel after step S70 in the embodiment of the present invention; Figure 8 It is a schematic diagram of the layered structure of the display panel after preparing the third light-emitting device in the embodiment of the present invention; Figure 9 It is a schematic diagram of the layered structure of the display panel after step S110 in the embodiment of the present invention;

[0025] The components in the figure are represented as follows: Display panel 1; Substrate 10; Array substrate 11; Pixel definition layer 12; Pixel opening 13; Isolation structure 14; Isolation opening 15; First opening 15R; Second opening 15G; Third opening 15B; Support part 16; Blocking part 17; First light-emitting device 20R; Second light-emitting device 20G; Third light-emitting device 20B; First electrode 21; Light-emitting functional layer 22; Second electrode 23; Encapsulation layer 30; First encapsulation part 31; Second encapsulation part 32; Third encapsulation part 33. Detailed implementation manners

[0026] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings to prove that the present invention can be implemented. The embodiments of the invention can fully introduce the present invention to those skilled in the art, making its technical content clearer and easier to understand. The present invention can be embodied in many different forms of embodiments, and the protection scope of the present invention is not limited to the embodiments mentioned in the text.

[0027] In the drawings, components with the same structure are denoted by the same numeral labels, and components with similar structures or functions everywhere are denoted by similar numeral labels. The dimensions and thicknesses of each component shown in the drawings are arbitrarily shown, and the present invention does not limit the dimensions and thicknesses of each component. To make the illustration clearer, the thicknesses of some components in the drawings are appropriately exaggerated.

[0028] In addition, the following descriptions of the embodiments of the invention refer to the attached drawings, which are used to illustrate specific embodiments in which the present invention can be implemented. The directional terms mentioned in the present invention, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., are only references to the directions of the attached drawings. Therefore, the directional terms used are for better and clearer illustration and understanding of the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0029] When some components are described as "on" another component, the component can be directly placed on the other component; there can also be an intermediate component, the component is placed on the intermediate component, and the intermediate component is placed on another component. When a component is described as "mounted to" or "connected to" another component, the two can be understood as being directly "mounted" or "connected", or a component is indirectly "mounted to" or "connected to" another component through an intermediate component.

[0030] In related display technologies, in order to achieve high resolution and colorization of OLED (Organic Light-Emitting Diode), and to better solve problems such as low resolution of the OLED electrode film layer and low device yield, an isolation structure is introduced, that is, a metal mask template is not used in device preparation, but an isolation structure is fabricated on the substrate before depositing the organic thin film and the metal electrode, and different pixels of the device are separated by the isolation structure to form a pixel array. However, the inventor found that due to the deviation between actual production and pre-design in the display panel with the isolation structure, the luminous effects between different light-emitting devices cannot be well coordinated, resulting in an unsatisfactory display effect of the display panel.

[0031] Based on the problems found in the above-mentioned related display technologies, on the one hand, an evaporation system is provided in an embodiment of the present invention. The evaporation system is used to prepare a display panel. As Figure 1 shown in the figure, the evaporation system includes a measurement device and an evaporation device that is data-connected to the measurement device. The measurement device includes an acquisition module and a calculation module, which can acquire the optical parameters of the fabricated light-emitting devices and calculate the optimal optical parameters and the optimal evaporation parameters of the unfabricated light-emitting devices based on the acquired optical data. The evaporation device can perform subsequent fabrication of the light-emitting devices according to the optimal evaporation parameters calculated by the measurement device, so as to adjust the deviation between the actual production and the pre-design, improve the optical matching degree between different light-emitting devices, and further improve the overall display effect of the display panel.

[0032] Specifically, the measurement device includes an acquisition module and a calculation module. The acquisition module includes an image sensor, such as a CCD (Charge Coupled Device) camera or a CMOS (Complementary Metal Oxide Semiconductor) camera, which can acquire the actual optical parameters of the fabricated light-emitting devices on the substrate in the lit state. Further, the acquisition module of the measurement device further includes a lighting device. After the substrate enters the measurement device, it can be electrically connected to an external power supply through the lighting device, so as to light at least some of the fabricated light-emitting devices on the substrate. The image sensor can acquire the actual optical parameters of the light-emitting devices on the substrate when they are emitting light by photographing the lit substrate. The calculation module is data-connected to the acquisition module, and the actual optical parameters acquired by the acquisition module are sent to the calculation module. The calculation module calculates the optimal optical parameters of the unfabricated light-emitting devices based on the actual optical parameters of the fabricated light-emitting devices in the lit state, and calculates the optimal evaporation parameters of the unfabricated light-emitting devices through the optimal optical parameters. Among them, the actual optical parameters and the optimal optical parameters of the light-emitting devices respectively include optical parameters such as brightness and contrast, and the optimal evaporation parameters of the light-emitting devices include film thickness and the like. That is: the measurement device can calculate the optimal optical parameters such as brightness and contrast of the unfabricated light-emitting devices when achieving the best display effect through the actual optical parameters such as brightness and contrast of the fabricated light-emitting devices when they are lit, and calculate the optimal evaporation parameters such as the film thickness (the film thickness can be the film thickness of the light-emitting functional layer in the light-emitting device, that is, the thickness of the film layer containing the light-emitting material in the light-emitting device) required for the unfabricated light-emitting devices during fabrication, so as to adjust the fabrication situation of the unfabricated light-emitting devices according to the actual light-emitting situation of the fabricated light-emitting devices, so as to prompt the subsequently fabricated light-emitting devices to adjust their own parameters according to the actual effects of the fabricated light-emitting devices to achieve the best display effect.

[0033] The evaporation coating equipment includes an evaporation coating module and a control module. The evaporation coating module includes an evaporation source, and this evaporation coating module can evenly evaporate and coat materials onto the surface of the substrate, thereby forming multiple light-emitting devices on one side of the substrate. The control module is respectively connected to the measuring device and the evaporation coating module. The control module includes a memory and a processor. The memory is used to store the preset evaporation coating parameters and the actual evaporation coating parameters of all the light-emitting devices. The processor is respectively data-connected to the memory and the measuring device. The measuring device sends the optimal evaporation coating parameters of the light-emitting devices not yet prepared to the processor. At the same time, the processor obtains the preset evaporation coating parameters of the corresponding light-emitting devices from the memory, and corrects its preset evaporation coating parameters according to the optimal evaporation coating parameters of the light-emitting devices not yet prepared, so as to obtain the actual evaporation coating parameters of the light-emitting devices not yet prepared. The control module controls the evaporation coating module according to the actual evaporation coating parameters. Among them, the preset evaporation coating parameters and the actual evaporation coating parameters of the light-emitting devices include evaporation rate, evaporation duration, etc. That is: this evaporation coating equipment can adjust the preset evaporation coating parameters such as evaporation rate and evaporation duration of the light-emitting devices according to the optimal optical parameters such as the film thickness that can achieve the best display effect for the light-emitting devices not yet prepared, so as to obtain the evaporation rate, evaporation duration, etc. of the actual evaporation coating parameters that need to be executed during the actual preparation process of the light-emitting devices, and prepare the light-emitting devices according to the actual evaporation coating parameters, so that the light-emitting devices prepared subsequently can cooperate with the light-emitting devices prepared previously to achieve the best display effect.

[0034] Furthermore, the evaporation coating system further includes a data transmission device and a transportation device.

[0035] The data transmission device has an input end and an output end. The input end is data-connected to the measuring device, and the output end is data-connected to the evaporation coating equipment. The optimal evaporation coating parameters sent by the measuring device enter the data transmission device through the input end. The data transmission device transcodes the received parameters, thereby converting the data format of the measuring device into a data format that can be recognized and processed by the processor of the evaporation coating equipment, and sends the transcoded optimal evaporation coating parameters to the evaporation coating equipment through its output end. Optionally, the data transmission device can be a Computer Integrated Making (CIM) device. The data transmission device can integrate all data information such as product design, manufacturing, management, and quality management to improve production efficiency and quality, reduce costs, and achieve automation and intelligence.

[0036] The transportation device can be at least one of devices such as a robotic arm and a conveyor belt. The transportation device is used to transport the substrate between the evaporation coating equipment and the measuring device to save manpower and improve the automation of the production line.

[0037] Based on the problems found in the above-mentioned related display technologies, on the other hand, an evaporation automatic adjustment method is also provided in an embodiment of the present invention. The evaporation system can use this evaporation automatic adjustment method to prepare a display panel with an isolation structure. This evaporation automatic adjustment method adjusts the preparation data of the subsequent light-emitting devices to be prepared by measuring the relevant data of the already prepared light-emitting devices when preparing different light-emitting devices, so as to adjust the deviation between the actual production and the pre-design, improve the optical cooperation between different light-emitting devices, and further improve the overall display effect of the display panel.

[0038] Specifically, Figure 2 The flow of this evaporation automatic adjustment method is shown in. This evaporation automatic adjustment method includes steps S10 - S110.

[0039] Step S10) Prepare the first light-emitting device on the substrate: Prepare a substrate, as Figure 3 shown in, this substrate 10 is an array substrate 11 provided with an isolation structure 14. The array substrate 11 is provided with a plurality of thin film transistors (TFTs) arranged in an array and signal traces. The isolation structure 14 encloses a plurality of isolation openings 15. The isolation structure 14 includes a support portion 16 and a blocking portion 17. The support portion 16 is provided on one side of the substrate 10, and the blocking portion 17 is stacked on the side of the support portion 16 facing away from the substrate 10. The isolation opening 15 sequentially penetrates through the support portion 16 and the blocking portion 17. Among them, the isolation opening 15 includes a first opening 15R for accommodating the first light-emitting device, a second opening 15G for accommodating the second light-emitting device, and a third opening 15B for accommodating the third light-emitting device.

[0040] In the evaporation equipment, the memory of the control module stores the preset evaporation parameters of the first light-emitting device. The control module retrieves the preset evaporation parameters of the first light-emitting device stored in the memory and controls the evaporation module according to the preset evaporation parameters, so as to prompt the evaporation module to uniformly deposit the materials of the first light-emitting device on the surface of one side of the substrate 10 provided with the isolation structure 14 according to parameters such as the evaporation rate and evaporation duration in the preset evaporation parameters. Among them, part of the materials of the first light-emitting device are deposited in the isolation opening 15, and the connection of the materials of the first light-emitting device in adjacent isolation openings 15 is interrupted by the isolation structure 14, forming independent first light-emitting devices 20R as Figure 4 shown in.

[0041] Further, in this step S10, it also includes: depositing a packaging material on the side of the first light-emitting device 20R away from the substrate 10 to form a first packaging portion 31; removing the first light-emitting device 20R and the first packaging portion 31 outside the first opening 15R region through an etching process, and only retaining the first light-emitting device 20R and the first packaging portion 31 corresponding to the first opening 15R, so as to form a panel layered structure as shown in Figure 5 in the figure.

[0042] Step S20) Measuring the actual optical parameters of the first light-emitting device: Transfer the substrate with the first light-emitting device prepared thereon from the evaporation device to the measuring device through a transportation device; in this measuring device, light up the first light-emitting device on the substrate through the lighting device in its acquisition module, and acquire the actual optical parameters of the first light-emitting device after lighting through the image sensor in its acquisition module, such as the actual optical parameters such as the brightness and contrast of the first light-emitting device after lighting.

[0043] Step S30) Calculating the optimal optical parameters and optimal evaporation parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device: The acquisition module transmits the actual optical parameters of the first light-emitting device obtained to the calculation module of this measuring device, and this calculation module calculates the optimal optical parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device, and calculates the optimal evaporation parameters of the second light-emitting device according to the optimal optical parameters of the second light-emitting device.

[0044] For example: This calculation module can calculate the optimal optical parameters such as the brightness and contrast that can make the final product present the best display effect of the second light-emitting device according to the actual optical parameters of the first light-emitting device after lighting, and further calculate the optimal evaporation parameters such as the film thickness that the second light-emitting device can achieve this best display effect according to this optimal optical parameter.

[0045] Step S40) Transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device through a data transmission device: The data transmission device receives the optimal evaporation parameters of the second light-emitting device sent by the calculation module of the measuring device through its input end, and this data transmission device transcodes the received optimal evaporation parameters of the second light-emitting device, converts the optimal evaporation parameters into a data format that the evaporation device can recognize and process, and sends the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation device through its output end.

[0046] Step S50) Obtaining the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device: The evaporation equipment obtains the optimal evaporation parameters of the second light-emitting device calculated by the measurement equipment through the data transmission equipment. Meanwhile, the transportation equipment transports the substrate back from the measurement equipment to the evaporation equipment. In the evaporation equipment, the processor of the control module obtains the preset evaporation parameters of the second light-emitting device from the memory, and corrects the preset evaporation parameters according to the optimal evaporation parameters of the second light-emitting device, so as to obtain the actual evaporation parameters of the second light-emitting device.

[0047] For example: the control module can adjust the preset evaporation rate, evaporation duration and other preset evaporation parameters of the second light-emitting device through the optimal evaporation parameters such as the film thickness at which the second light-emitting device can achieve the best display effect, so as to obtain the actual evaporation rate, evaporation duration and other actual evaporation parameters that the evaporation module needs to actually execute, and a second light-emitting device that can achieve the best display effect can be produced according to the actual evaporation parameters.

[0048] Step S60): Prepare the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device: The control module of the evaporation equipment controls the evaporation module according to the actual evaporation parameters of the second light-emitting device, so that the evaporation module can uniformly deposit the materials of the second light-emitting device on the surface of one side of the substrate 10 provided with the isolation structure 14 according to the evaporation rate, evaporation duration and other parameters in the actual evaporation parameters. Among them, part of the materials of the second light-emitting device 20G are deposited in the isolation opening 15, and the connection of the materials of the second light-emitting device 20G in adjacent isolation openings 15 is interrupted by the isolation structure 14, forming an independent second light-emitting device 20G as shown in Figure 6 in the figure.

[0049] Furthermore, in this step S60, it also includes: depositing a packaging material on the side of the second light-emitting device 20G facing away from the substrate 10 to form a second packaging part 32; removing the second light-emitting device 20G and the second packaging part 32 outside the second opening 15G area through an etching process, and only retaining the second light-emitting device 20G and the second packaging part 32 corresponding to the second opening 15G, forming a panel layer structure as shown in Figure 7 in the figure.

[0050] Step S70): Measure the actual optical parameters of the second light-emitting device: The substrate prepared with the first light-emitting device and the second light-emitting device is transported from the evaporation equipment to the measurement equipment through the transportation equipment; in the measurement equipment, the second light-emitting device on the substrate is lit by the lighting device in its acquisition module, and the actual optical parameters of the second light-emitting device after lighting are obtained through the image sensor in its acquisition module, such as the actual optical parameters such as the brightness and contrast of the second light-emitting device after lighting.

[0051] Step S80) Calculate the optimal optical parameters and optimal evaporation parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device: The acquisition module transmits the actual optical parameters of the second light-emitting device obtained to the calculation module of the measurement device. The calculation module calculates the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device, and calculates the optimal evaporation parameters of the third light-emitting device based on the optimal optical parameters of the third light-emitting device.

[0052] For example: The calculation module can calculate the optimal optical parameters such as brightness and contrast that enable the final product to present the best display effect for the third light-emitting device based on the actual optical parameters of the second light-emitting device after lighting, and further calculate the optimal evaporation parameters such as film thickness that can achieve the best display effect for the third light-emitting device based on the optimal optical parameters.

[0053] Furthermore, in the step of calculating the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device, the actual optical parameters of the first light-emitting device can also be added to calculate the optimal optical parameters of the third light-emitting device, that is, calculate the optimal optical parameters of the third light-emitting device by combining the actual optical parameters of the first light-emitting device and the actual optical parameters of the second light-emitting device. By integrating the actual light-emitting conditions of all the prepared light-emitting devices in the previous process, the cooperation between the third light-emitting device and other light-emitting devices can be better improved, and the overall display effect of the display panel can be further improved.

[0054] Step S90) Transmit the optimal evaporation parameters of the third light-emitting device to the evaporation device through the data transmission device: The data transmission device receives the optimal evaporation parameters of the third light-emitting device sent by the calculation module of the measurement device through its input end, and the data transmission device transcodes the received optimal evaporation parameters of the third light-emitting device, converts the optimal evaporation parameters into a data format that the evaporation device can recognize and process, and sends the transcoded optimal evaporation parameters of the third light-emitting device to the evaporation device through its output end.

[0055] Step S100) Calculate the actual evaporation parameters of the third light-emitting device based on the optimal evaporation parameters of the third light-emitting device: The evaporation device obtains the optimal evaporation parameters of the third light-emitting device calculated by the measurement device through the data transmission device. At the same time, the transportation device transports the substrate back from the measurement device to the evaporation device. In the evaporation device, the processor of its control module obtains the preset evaporation parameters of the third light-emitting device from the memory, and corrects the preset evaporation parameters according to the optimal evaporation parameters of the third light-emitting device, so as to obtain the actual evaporation parameters of the third light-emitting device.

[0056] For example, the control module can adjust the preset evaporation rate, evaporation duration, and other preset evaporation parameters of the third light-emitting device according to the optimal evaporation parameters such as the film thickness that can achieve the best display effect by the third light-emitting device, so as to obtain the actual evaporation rate, evaporation duration, and other actual evaporation parameters that the evaporation module needs to actually execute, and the actual evaporation parameters can produce a third light-emitting device that can achieve the best display effect.

[0057] Step S110): Prepare the third light-emitting device on the substrate according to the actual evaporation parameters of the third light-emitting device: The control module of the evaporation equipment controls the evaporation module according to the actual evaporation parameters of the third light-emitting device, so that the evaporation module can uniformly deposit the materials of the third light-emitting device on the one-side surface of the substrate 10 provided with the isolation structure 14 according to the evaporation rate, evaporation duration, and other parameters in the actual evaporation parameters. Among them, part of the materials of the third light-emitting device are deposited in the isolation opening 15, and the connection of the materials of the third light-emitting device in adjacent isolation openings 15 is interrupted by the isolation structure 14, forming an independent third light-emitting device 20B as shown in Figure 8 Figure 20B.

[0058] Furthermore, in this step S110, it also includes: depositing a packaging material on the side of the third light-emitting device 20B facing away from the substrate 10 to form a third packaging portion 33; removing the third light-emitting device 20B and the third packaging portion 33 outside the third opening 15B region through an etching process, and only retaining the third light-emitting device 20B and the third packaging portion 33 corresponding to the third opening 15B, finally forming a panel layer structure as shown in Figure 9 Figure 20C.

[0059] In the evaporation automatic adjustment method and evaporation system provided in the embodiments of the present invention, the optical parameters of the prepared light-emitting device are measured, and the optimal evaporation parameters of the subsequently prepared light-emitting device are simulated and calculated according to the optical parameters of the prepared light-emitting device, and the actual evaporation parameters of the light-emitting device are compensated according to the calculation results, so as to realize the optical compensation for the light-emitting devices of different emission colors separately, improve the effect of optical compensation, reduce the deviation between the cooperation of different light-emitting devices in the preset design and actual production, improve the optical cooperation degree between different light-emitting devices, and further improve the overall display effect of the display panel.

[0060] The evaporation automatic adjustment method and evaporation system provided in the embodiments of the present invention can be used for the preparation and production of the display panel 1 with the isolation structure 14. Specifically, Figure 9The layered structure of the display panel 1 is shown. The display panel 1 includes a substrate 10, which includes an array substrate 11, a pixel definition layer 12 and an isolation structure 14 disposed on one side of the array substrate 11. The pixel definition layer 12 includes a plurality of pixel openings 13. The isolation structure 14 encloses to form a plurality of isolation openings 15. At least part of the light-emitting devices are received in the isolation openings 15, so that adjacent light-emitting devices are separated by the isolation structure 14. The isolation structure 14 includes a support portion 16 and a blocking portion 17. The blocking portion 17 is located on the side of the support portion 16 away from the array substrate 11. The orthographic projection of the support portion 16 on the array substrate 11 is located within the orthographic projection of the blocking portion 17 on the array substrate 11. Among them, the light-emitting devices may include a first light-emitting device 20R, a second light-emitting device 20G, and a third light-emitting device 20B for emitting light of different colors. Correspondingly, the above isolation openings 15 also include a first opening 15R, a second opening 15G, and a third opening 15B for receiving different light-emitting devices respectively. Along the thickness direction of the display panel 1, the light-emitting device includes a first electrode 21, a light-emitting functional layer 22, and a second electrode 23 that are sequentially stacked. The first electrode 21 is disposed between the array substrate 11 and the pixel definition layer 12, and at least part of the first electrode 21 is exposed in the corresponding pixel opening 13. The light-emitting functional layer 22 is located on the side of the first electrode 21 away from the array substrate 11, covers the exposed surface of the first electrode 21 in the pixel opening 13, and extends from the surface of the first electrode 21 to the side of the pixel definition layer 12 away from the array substrate 11. The second electrode 23 is stacked on the side of the light-emitting functional layer 22 away from the array substrate 11, and extends from the side of the light-emitting functional layer 22 away from the array substrate 11 to the surface of the isolation structure 14 facing the isolation opening 15, so as to electrically connect the second electrode 23 to the isolation structure 14. The second electrode 23 can obtain a power signal through the isolation structure 14. Among them, the first electrode 21 is an anode and the second electrode 23 is a cathode.

[0061] Further, a packaging layer 30 is provided on the light-emitting device. The packaging layer 30 includes a first packaging portion 31, a second packaging portion 32, and a third packaging portion 33. The first packaging portion 31 is located on the side of the first light-emitting device 20R facing away from the substrate 10. The second packaging portion 32 is located on the side of the second light-emitting device 20G facing away from the substrate 10. The third packaging portion 33 is located on the side of the third light-emitting device 20B facing away from the substrate 10. Each packaging portion covers the surface of the corresponding light-emitting device facing away from the substrate 10, and extends from the light-emitting device to cover the sidewall of the isolation structure 14 and a partial surface of the isolation structure 14 facing away from the substrate 10, and lapping with the side of the blocking portion 17 facing away from the substrate 10. Among them, the materials of the first packaging portion 31, the second packaging portion 32, and the third packaging portion 33 are the same, and at least one of an inorganic material and a metal oxide material is used. For example, the material of the packaging layer 30 includes at least one of silicon nitride, silicon oxide, silicon oxynitride, and aluminum oxide. The packaging layer 30 is used to package and protect the light-emitting device and other electronic devices in the display panel, and prevent water and oxygen from invading and corroding the light-emitting device.

[0062] In the display panel provided in the embodiment of the present invention, it can be prepared by the above-mentioned evaporation automatic adjustment method and evaporation system, and the optical compensation for light-emitting devices of different emission colors can be realized separately through the above-mentioned evaporation automatic adjustment method and evaporation system, so as to improve the effect of optical compensation for different light-emitting devices, thereby improving the optical cooperation degree between different light-emitting devices, and further improving the overall display effect of the display panel.

[0063] Although the present invention has been described herein with reference to specific embodiments, it should be understood that these embodiments are merely examples of the principles and applications of the present invention. Therefore, it should be understood that many modifications can be made to the exemplary embodiments, and other arrangements can be designed, as long as they do not deviate from the spirit and scope of the present invention defined by the appended claims. It should be understood that the different dependent claims and the features described herein can be combined in a manner different from that described in the original claims. It should also be understood that the features described in connection with a single embodiment can be used in other described embodiments.

Claims

1. A method for automatic adjustment of evaporation, characterized in that: include: preparing a first light emitting device on a substrate; measuring actual optical parameters of the first light-emitting device; Calculating optimal optical parameters and optimal evaporation parameters of the second light-emitting device according to actual optical parameters of the first light-emitting device; Acquiring actual evaporation parameters of the second light-emitting device according to optimal evaporation parameters of the second light-emitting device; The second light emitting device is prepared on the substrate according to actual evaporation parameters of the second light emitting device.

2. The automatic adjustment method for vapor deposition according to claim 1, characterized in that: Before the step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device, the step further includes: Transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device through the data transmission device; The step of transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device through the data transmission device includes: transcoding the optimal evaporation parameters of the second light-emitting device, and transmitting the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation device.

3. The automatic adjustment method for vapor deposition according to claim 1, characterized in that: The step of measuring the actual optical parameters of the first light emitting device comprises: Lighting up the first light emitting device; Acquire actual optical parameters of the first light-emitting device after lighting; The step of obtaining actual optical parameters of the first light-emitting device after lighting includes: obtaining actual optical parameters of the first light-emitting device after lighting by using a measuring device.

4. The automatic adjustment method for vapor deposition according to claim 1, characterized in that: The step of calculating the optimal optical parameters and the optimal evaporation parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device comprises: Calculating the optimal optical parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device; Calculate optimal evaporation parameters of the second light-emitting device according to the optimal optical parameters of the second light-emitting device.

5. The automatic adjustment method for vapor deposition according to claim 1, characterized in that: The step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device comprises: Obtaining preset evaporation parameters of the second light-emitting device; Correcting preset evaporation parameters of the second light-emitting device according to optimal evaporation parameters of the second light-emitting device to obtain actual evaporation parameters of the second light-emitting device; The optimal evaporation parameters include the evaporation film thickness.

6. The automatic adjustment method for vapor deposition according to claim 1, characterized in that: After the step of preparing the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device, the step further includes: measuring actual optical parameters of the second light-emitting device; Calculating optimal optical parameters and optimal evaporation parameters of the third light-emitting device according to actual optical parameters of the second light-emitting device; Calculating actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device; The third light emitting device is prepared on the substrate according to actual evaporation parameters of the third light emitting device.

7. The automatic adjustment method for vapor deposition according to claim 6, wherein: Before the step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device, the method further includes: Transcoding the optimal evaporation parameters of the third light-emitting device; The transcoded optimal evaporation parameters of the third light-emitting device are transmitted to the evaporation equipment.

8. The automatic adjustment method for vapor deposition according to claim 6, characterized in that: The step of measuring the actual optical parameters of the second light emitting device comprises: lighting up the second light emitting device; Acquire actual optical parameters of the second light-emitting device after lighting; The step of obtaining the actual optical parameters of the second light-emitting device after lighting includes: obtaining the actual optical parameters of the second light-emitting device after lighting by using a measuring device.

9. The automatic adjustment method for vapor deposition according to claim 6, wherein: The step of calculating the optimal optical parameters and the optimal evaporation parameters of the third light emitting device according to the actual optical parameters of the second light emitting device comprises: Calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device; The optimal evaporation parameters of the third light-emitting device are calculated according to the optimal optical parameters of the third light-emitting device.

10. The automatic adjustment method for vapor deposition according to claim 9, characterized in that: The step of calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device includes: calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device and combining the actual optical parameters of the first light emitting device.

11. The automatic vapor deposition adjustment method according to claim 6, wherein: The step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device comprises: Acquiring preset evaporation parameters of the third light-emitting device; The preset evaporation parameters of the third light-emitting device are corrected according to the optimal evaporation parameters of the third light-emitting device to obtain the actual evaporation parameters of the third light-emitting device.

12. A vapor deposition system, characterized in that: include: A measuring device for obtaining actual optical parameters of a prepared light-emitting device and calculating optimal optical parameters and optimal evaporation parameters of an unprepared light-emitting device based on the actual optical parameters; an evaporation device connected to the measurement device in data communication, and calculating actual evaporation parameters of the light-emitting device according to the optimal evaporation parameters, and preparing the light-emitting device on a substrate according to the actual evaporation parameters; The measuring equipment includes: An acquisition module, used to acquire actual optical parameters of the prepared light-emitting device; The calculation module is used to calculate the optimal optical parameters and the optimal evaporation parameters of the unfabricated light-emitting device.

13. The evaporation system according to claim 12, characterized in that: The evaporation equipment comprises: An evaporation module, used for preparing the light-emitting device; A control module, connected to the measurement device by data, wherein the control module calculates the actual evaporation parameters according to the optimal evaporation parameters and the preset evaporation parameters, and controls the evaporation module according to the actual evaporation parameters; The control module includes a memory and a processor, the memory is used to store the preset evaporation parameters and the actual evaporation parameters, and the processor is used to calculate the actual evaporation parameters; The acquisition module of the measuring device includes an image sensor.

14. The evaporation system according to claim 12, characterized in that: Also includes: A data transmission device is data-connected to the evaporation device and the measuring device, and is used to transcode the parameters calculated by the measuring device and transmit the transcoded parameters to the evaporation device.

15. The evaporation system according to claim 12, characterized in that: Also includes: A transport device is used to transport the substrate between the evaporation device and the measurement device.

16. A display panel, characterized in that: include: substrate; A plurality of light emitting devices are arranged on one side of the substrate; The light-emitting device is prepared by the evaporation automatic adjustment method according to any one of claims 1 to 11; or, The light-emitting device is prepared by the evaporation system according to any one of claims 12 to 15.

17. The display panel according to claim 16, wherein: The substrate comprises: An array substrate; An isolation structure, disposed on one side of the array substrate, the isolation structure encloses a plurality of isolation openings, and at least a portion of the light emitting device is located in the isolation openings; The isolation structure comprises: A supporting portion, disposed on one side of the array substrate; a blocking portion, disposed on a side of the supporting portion away from the array substrate, wherein the orthographic projection of the blocking portion on the array substrate covers the orthographic projection of the supporting portion on the array substrate; The display panel further includes an encapsulation layer, and the encapsulation layer is disposed on a side of the light emitting device away from the substrate.

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