Composite air floating platform deck line and intelligent double-platform LDI system

Abstract

The invention provides a composite air floating platform deck line and an intelligent double-platform LDI system, and belongs to the field of intelligent laser machining. The composite air floating platform deck line comprises a linear guide rail, a beam bridge driver, a composite air floating guide module and a bearing beam bridge; the lower part of the bearing beam bridge is mounted on a swallow-tailed linear guide rail in a driven manner through a beam bridge driver; the composite air flotation guide module comprises a rigid air flotation assembly and a flexible air flotation assembly, and the top and the two sides of the bearing beam bridge are supported on the linear guide rails through the different air flotation assemblies; the carrier line adopts a composite air floating mode, is more stable in transmission and higher in precision, guarantees the transmission precision of exposure imaging, improves the working efficiency, and is convenient to popularize and apply in the fields of IC carrier plates, soft plates, HDI plates, multi-layer plates, ceramic substrates, alloy plates and the like.

Description

Technical Field

[0001] The present invention belongs to the field of laser processing, and particularly relates to a composite air-floating stage line and an intelligent dual-platform LDI system. Background Art

[0002] A Laser Direct Imaging (LDI) machine is a device that uses a laser beam to precisely project a circuit pattern onto a photosensitive material, thereby forming a high-precision circuit board pattern. It is mainly used in the field of circuit board manufacturing, especially in the exposure process of PCB (Printed Circuit Board) technology.

[0003] Generally, a product to be processed needs to be set on a stage. However, the existing stage structure is fixed, and the drive uses mechanical transmission. The slight movement during the guiding and transfer process will cause a reduction in accuracy. Therefore, it is necessary to design a new type of stage line with high-stability transmission. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a composite air-floating stage line and an intelligent dual-platform LDI system, which can solve the above problems.

[0005] A composite air-floating stage line includes a linear guide rail, a beam bridge driver, a composite air-floating guiding module, and a bearing beam bridge; the lower part of the bearing beam bridge is driven and installed on the dovetail-shaped linear guide rail through the beam bridge driver; the composite air-floating guiding module includes a rigid air-floating component and a flexible air-floating component, and the top and both sides of the bearing beam bridge are supported on the linear guide rail by different air-floating components; Further, the top of the bearing beam bridge is air-floatingly supported on the top surface of the linear guide rail through the rigid air-floating component, and both sides of the bearing beam bridge are air-floatingly supported on the outer walls of both sides of the linear guide rail through the flexible air-floating component.

[0006] Further, the linear guide rail is in a dovetail shape with a wide top surface and a narrow bottom surface, and symmetrically inwardly converging from top to bottom on both sides, and a guide rail groove is opened along the transfer direction on the upper surface, and the fixed part of the beam bridge driver and the grating scale component are installed in the guide rail groove.

[0007] Further, the inner wall surfaces on both sides of the bearing beam bridge converge inwardly from top to bottom, match the dovetail-shaped structure of the linear guide rail, and air-floating installation holes are opened perpendicular to the top surface and the inner wall surfaces on both sides of the bearing beam bridge for installing the composite air-floating guiding module.

[0008] Further, the composite air-floating stage line further includes a stage adjustment module, and the stage adjustment module uses a lifting table or a rotating table.

[0009] Further, the composite air-floating stage line further includes a negative-pressure carrier plate module for adsorbing and positioning to carry products.

[0010] Further, both the rigid air-floating assembly and the flexible air-floating assembly include air-floating blocks, air-floating rods, and air-floating locking members. The air-floating rod of the rigid air-floating assembly is a rigid screw rod, and the air-floating rod of the flexible air-floating assembly is an elastic rod or a combination of an air-floating spring and a rigid end.

[0011] The present invention also provides an intelligent dual-platform LDI system, including an exposure station, a stage A, a stage B, an alignment module, and a peripheral module for controlling temperature, humidity, and pressure; the stage A and the stage B adopt the aforementioned composite air-floating stage line; the stage A and the stage B are arranged on both sides of the exposure station for alternating loading and unloading; two alignment modules straddle above the corresponding stage for pre-positioning of the material to be processed, and a post-positioning module is further provided at the exposure station for pre- and post-positioning of the material to be processed during processing.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: The stage line of the present application adopts a composite air-floating type, with more stable transmission and higher precision, ensuring the transmission precision of exposure imaging, improving work efficiency, and facilitating popularization and application in the fields of IC carrier boards, flexible boards, HDI boards, multi-layer boards, ceramic substrates, alloy boards, etc. Description of the Drawings

[0013] Figure 1 It is a schematic diagram of the composite air-floating stage line of the present invention; Figure 2 is Figure 1 a partial exploded schematic diagram of; Figure 3 is a partial assembled schematic diagram of the bearing beam bridge and the composite air-floating guiding module; Figure 4 is a schematic diagram of the intelligent dual-platform LDI system.

[0014] In the figure, 10. Linear guide rail; 11. Guide rail groove; 20. Beam bridge driver; 21. Stator assembly; 22. Rotor assembly; 30. Composite air-floating guiding module; 31. Rigid air-floating assembly; 32. Flexible air-floating assembly; 40. Bearing beam bridge; 41. Arch bridge; 42. Bridge plate; 43. Air-floating mounting hole; 50. Grating scale assembly; 60. Stage adjustment module; 70. Negative-pressure carrier plate module; 80. Buffer stop mechanism; 90. Machine platform frame; 100. Exposure station; 200. Stage A; 300. Stage B; 400. Alignment module; 500. Exposure calibration module; 600. Temperature control module; 700. Water chiller; 800, dryer; 900, air storage tank; 1000, blower. Specific embodiments

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0016] Compound air flotation stage line A composite air-floating stage line, see Figures 1 - 3 , the composite air-floating stage line includes a linear guide rail 10, a beam bridge driver 20, a composite air-floating guiding module 30, and a load-bearing beam bridge 40.

[0017] The lower part of the load-bearing beam bridge 40 is driven and installed on the dovetail-shaped linear guide rail 10 through the beam bridge driver 20; the composite air-floating guiding module 30 includes a rigid air-floating component 31 and a flexible air-floating component 32. The top and both sides of the load-bearing beam bridge 40 are supported on the linear guide rail 10 by different air-floating components; the top of the load-bearing beam bridge 40 is air-floating supported on the top surface of the linear guide rail 10 through the rigid air-floating component 31, and both sides of the load-bearing beam bridge 40 are air-floating supported on the outer walls on both sides of the linear guide rail 10 through the flexible air-floating component 32.

[0018] Among them, the linear guide rail 10 is in a dovetail shape with a wide top surface and a narrow bottom surface, and both sides are symmetrically inwardly converging from top to bottom. A guide rail groove 11 is opened on the upper surface along the transfer direction, and the fixed part of the beam bridge driver 20 and the grating scale assembly 50 are installed in the guide rail groove 11.

[0019] Among them, the beam bridge driver 20 uses a linear motor. The stator assembly 21 of the linear motor is installed along the driving direction to the bottom of the guide rail groove 11, and the mover assembly 22 of the linear motor is installed on the lower wall surface of the top wall of the load-bearing beam bridge 40.

[0020] Among them, both the rigid air-floating component 31 and the flexible air-floating component 32 include air-floating blocks, air-floating rods, and air-floating locking parts. The air-floating rod of the rigid air-floating component 31 is a rigid screw rod, and the air-floating rod of the flexible air-floating component 32 is an elastic rod or a combination of an air-floating spring and a rigid end.

[0021] Among them, the inner wall surfaces on both sides of the load-bearing beam bridge 40 are inwardly converging from top to bottom, matching the dovetail structure of the linear guide 10, and air-floating mounting holes 43 are provided perpendicular to the top surface and the inner wall surfaces on both sides of the load-bearing beam bridge 40 for mounting the composite air-floating guiding module 30.

[0022] The top surface of the load-bearing beam bridge 40 is sunken, and the connection between the top surface and the side surface is designed with an arc. It can be an integral design, such as integrally cast; it can also be a split design. For the split design, the preferred solution is to splice in the way that the two ends are arch bridges 41 and the middle is a bridge board 42.

[0023] Furthermore, the grating scale assembly 50 is installed on the inner side wall surface of the guide rail groove 11.

[0024] Furthermore, the composite air-floating load platform line further includes a load platform adjustment module 60, and the load platform adjustment module 60 adopts a lifting platform or a rotating platform.

[0025] In a specific example, the load platform adjustment module 60 adopts a lifting platform. Refer to our company's patents CN 202010723771.9, CN202110121481.1, and CN202110134122.X for details, which will not be elaborated here.

[0026] Furthermore, the composite air-floating load platform line further includes a negative pressure load plate module 70, which adsorbs and positions the carried products.

[0027] In a specific example, the negative pressure load plate module 70 adopts our company's patents CN202410945386.7 and CN202311374732.2 for details, which will not be elaborated here.

[0028] Buffer stop mechanisms 80 are provided at both ends of the linear guide 10 and the ends of the load-bearing beam bridge 40.

[0029] Refer to Figure 1 , and the linear guide 10 is arranged on a machine table frame 90.

[0030] In the illustrated example, two sets of beam bridge drivers 20, composite air-floating guiding modules 30, load-bearing beam bridges 40, grating scale assemblies 50, load platform adjustment modules 60, and negative pressure load plate modules 70 are arranged on one linear guide 10. To achieve a double-load platform on one line.

[0031] Intelligent dual-platform LDI system An intelligent dual-platform LDI system, refer to Figure 4, including an exposure station 100, a stage for Material A 200, a stage for Material B 300, an alignment module 400, and a peripheral module for controlling temperature, humidity, and pressure; the stages for Material A 200 and Material B 300 adopt the composite air-floating stage line described in any one of claims 1-8; the stage for Material A 200 and the stage for Material B 300 are arranged on both sides of the exposure station 100 and perform loading and unloading alternately; two alignment modules 400 straddle above the corresponding stage for pre-aligning the material to be processed, and a post-alignment module is further provided at the exposure station 100 for pre- and post-alignment of the material to be processed.

[0032] The peripheral module includes a temperature control module 600, a water chiller 700, a dryer 800, an air storage tank 900, and a blower 1000, which are used to regulate the exposure station 100 to be in a constant temperature, constant humidity, and constant pressure working environment.

[0033] Alternating exposure method for LDI system Exposure operation instructions of the DI system. The alternating exposure method is implemented based on the aforementioned intelligent dual-platform LDI system and includes the following steps (executed repeatedly).

[0034] S1. Loading on the stage for Material A is completed, and the stage for Material B is waiting for loading.

[0035] S2. Alignment starts on the stage for Material A, and loading is in progress on the stage for Material B.

[0036] S3. Alignment on the stage for Material A is completed and ready for exposure, and loading is in progress on the stage for Material B.

[0037] S4. Exposure on the stage for Material A is completed (schematic of odd-numbered strips), and the stage for Material B is waiting for alignment.

[0038] S5. The stage for Material A returns to zero (the last strip of the even-numbered strips is exposed), and alignment starts on the stage for Material B.

[0039] S6. Return to zero on the stage for Material A is completed and ready for loading, and alignment on the stage for Material B is completed and ready for exposure.

[0040] S7. Loading is in progress on the stage for Material A, and exposure on the stage for Material B is completed (schematic of odd-numbered strips).

[0041] S8. Alignment starts on the stage for Material A, and the stage for Material B returns to zero (the last strip of the even-numbered strips is exposed).

[0042] S9. Alignment on the stage for Material A is completed, and return to zero on the stage for Material B is completed and ready for loading.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A composite air-floating stage line, characterized in that: The composite air-floating platform line comprises a linear guide rail (10), a beam bridge driver (20), a composite air-floating guide module (30) and a load-bearing beam bridge (40); The lower part of the load-bearing beam bridge (40) is driven by the beam bridge driver (20) and installed on a dovetail-shaped linear guide rail (10); the composite air-floating guide module (30) comprises a rigid air-floating component (31) and a flexible air-floating component (32); the top and both sides of the load-bearing beam bridge (40) are supported on the linear guide rail (10) by different air-floating components.

2. The composite air-floating stage line according to claim 1, characterized in that: The top of the load-bearing beam bridge (40) is air-floated and supported on the top surface of the linear guide rail (10) through a rigid air-floating assembly (31), and the two sides of the load-bearing beam bridge (40) are air-floated and supported on the two side outer walls of the linear guide rail (10) through flexible air-floating assemblies (32).

3. The composite air-floating stage line according to claim 1, characterized in that: The linear guide rail (10) is in the shape of a dovetail with a wide upper top surface and a narrow lower bottom surface, and is symmetrically dovetailed from top to bottom. A guide rail groove (11) is provided on the upper surface along the transfer direction, and a fixing portion of the beam bridge driver (20) and a grating scale assembly (50) are installed in the guide rail groove (11).

4. The composite air-floating stage line according to claim 3, characterized in that: The beam bridge driver (20) adopts a linear motor, the stator assembly (21) of the linear motor is installed to the bottom of the guide rail groove (11) along the driving direction, and the mover assembly (22) of the linear motor is installed on the lower wall surface of the top wall of the bearing beam bridge (40).

5. The composite air-floating stage line according to claim 3, characterized in that: The inner wall surfaces on both sides of the load-bearing bridge (40) are inwardly contracted from top to bottom to match the dovetail structure of the linear guide rail (10), and air-floating installation holes (43) are provided perpendicular to the top surface and the inner wall surfaces on both sides of the load-bearing bridge (40) for installing the composite air-floating guide module (30).

6. The composite air-floating stage line according to claim 1, characterized in that: The composite air-floating stage line further comprises a stage adjustment module (60), wherein the stage adjustment module (60) adopts a lifting platform or a rotating platform.

7. The composite air-floating stage line according to claim 1, characterized in that: The composite air-floating carrier line also includes a negative pressure carrier plate module (70) for positioning the carrier product by adsorption.

8. The composite air-floating stage line according to claim 1, characterized in that: The rigid air flotation component (31) and the flexible air flotation component (32) both comprise an air flotation block, an air flotation rod and an air flotation locking piece. The air flotation rod of the rigid air flotation component (31) is a rigid screw rod, and the air flotation rod of the flexible air flotation component (32) is a combination of an elastic rod or an air flotation spring and a rigid end.

9. An intelligent dual-platform LDI system, characterized in that: It comprises an exposure station (100), a material stage A (200), a material stage B (300), an alignment module (400), and a peripheral module for controlling temperature, humidity, and pressure; the material stage A (200) and the material stage B (300) adopt the composite air-floating stage line according to any one of claims 1 to 8; The A material table (200) and the B material table (300) are arranged on both sides of the exposure station (100) to alternately load and unload materials; two alignment modules (400) are arranged across the material tables on the corresponding sides and are used for front positioning of the materials to be processed. The exposure station (100) is also provided with a rear positioning module for front and rear positioning of the materials to be processed.

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