Throttle hole static pressure air flotation sensor design method, device and equipment and storage medium

By optimizing the geometric structural parameters of the throttle holes and pressure chambers and performing finite element analysis, the problems of large gas consumption, limited load capacity and unbalanced suspension in the sensor gas membrane suspension technology are solved, and more efficient and accurate sensor operation is achieved.

CN120163080APending Publication Date: 2025-06-17HENGYANG RAMON SCI & TECH CO LTD
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Patent Information

Application Number
CN202510191301.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-20
Publication Date
2025-06-17

AI Technical Summary

Technical Problem

The existing probe sensor gas membrane suspension technology has problems such as large gas consumption, limited load capacity and unbalanced suspension, which affects the accuracy of the detection results.

Method used

By optimizing the geometric structural parameters of the throttle holes and pressure chambers, an initial three-dimensional model is constructed, and the optimization results are obtained through finite element analysis to improve the uniform, stable distribution and bearing capacity of the gas film.

Benefits of technology

It effectively improves the air float performance of the sensor, improves the bearing capacity of the gas film, reduces the gas pressure requirement, and ensures the sensor's efficient and accurate operation.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to a throttling hole static pressure air flotation sensor design method, device and equipment and a storage medium, and the method comprises the steps: determining throttling hole to-be-optimized geometric structure parameters and pressure cavity to-be-optimized geometric structure parameters of a throttling hole static pressure air flotation sensor based on a three-dimensional structure of the throttling hole static pressure air flotation sensor; constructing an initial three-dimensional model based on an air gap layer with preset parameters between the throttling hole static pressure air flotation sensor and the steel plate, to-be-optimized geometric structure parameters of the throttling hole and to-be-optimized geometric structure parameters of the pressure cavity; a fluid domain model corresponding to the initial three-dimensional model is obtained, finite element analysis is conducted on the fluid domain model, and optimization results corresponding to the to-be-optimized geometric structure parameters of the throttling hole and the to-be-optimized geometric structure parameters of the pressure cavity are obtained; compared with the prior art, according to the technical scheme, the air floatation performance of the throttling hole static pressure air floatation sensor can be effectively improved by optimizing geometric structure parameters of the throttling hole and the pressure cavity.
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Description

Technical Field

[0001] This application relates to the technical field of sensor optimization design, and particularly relates to a design method, device, equipment and storage medium for a throttling orifice hydrostatic gas bearing sensor. Background Art

[0002] In the rapid development process of modern high-precision detection technologies, the requirements for the detection accuracy of steel plate defects by electromagnetic ultrasonic flaw detection technology continue to rise. The gas lubrication technology of probe sensors has attracted much attention due to its significant advantages such as high stability, no pollution and low friction. However, there are still many defects in the existing gas film suspension technology of probe sensors. For example, the gas consumption is large, which not only increases the operating cost, but also may have a certain impact on the environment; the load-bearing capacity is limited and it is difficult to meet the growing high-precision detection requirements; the suspension imbalance problem also occurs from time to time, seriously affecting the accuracy of detection results.

[0003] In-depth exploration shows that the suspension static performance of the sensor is affected by the interaction of multiple complex factors; among them, the geometric parameters of the throttling orifice and the operating conditions, etc.; making the geometric parameter design and optimization of the probe sensor face great challenges.

[0004] In the process of designing and optimizing the sensor, the core goal is to achieve a uniform and stable distribution of the gas film, maximize the gas film bearing capacity, and at the same time reduce the gas pressure requirement as much as possible, so as to ensure the efficient and accurate operation of the sensor; however, once the throttling orifice is designed unreasonably, it will cause the instability of the sensor gas bearing, and then lead to the ineffective realization of gas lubrication, having a very serious negative impact on key performance indicators such as load-bearing capacity, gas consumption and stability. Summary of the Invention

[0005] This application provides a design method, device, equipment and storage medium for a throttling orifice hydrostatic gas bearing sensor, which can effectively improve the gas bearing performance of the throttling orifice hydrostatic gas bearing sensor by optimizing the geometric structure parameters of the throttling orifice and the pressure chamber.

[0006] In a first aspect, this application provides a design method for a throttling orifice hydrostatic gas bearing sensor, including: based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, determining the geometric structure parameters to be optimized for the throttling orifice and the geometric structure parameters to be optimized for the pressure chamber of the throttling orifice hydrostatic gas bearing sensor; based on the preset parameter air gap layer between the throttling orifice hydrostatic gas bearing sensor and the steel plate, the geometric structure parameters to be optimized for the throttling orifice and the geometric structure parameters to be optimized for the pressure chamber, constructing an initial three-dimensional model; obtaining the fluid domain model corresponding to the initial three-dimensional model, and performing finite element analysis on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized for the throttling orifice and the geometric structure parameters to be optimized for the pressure chamber respectively.

[0007] In a possible implementation, based on the three-dimensional structure of the orifice hydrostatic gas-bearing sensor, the geometric structure parameters of the orifice to be optimized for the orifice hydrostatic gas-bearing sensor are determined, specifically including: based on the three-dimensional structure of the orifice hydrostatic gas-bearing sensor, the initial geometric structure of the orifice of the orifice hydrostatic gas-bearing sensor is determined; based on the initial geometric structure of the orifice, the orifice distance between orifices and the orifice diameter of the orifice are set as the geometric structure parameters of the orifice to be optimized.

[0008] In a possible implementation, based on the three-dimensional structure of the orifice hydrostatic gas-bearing sensor, the geometric structure parameters of the pressure chamber to be optimized for the orifice hydrostatic gas-bearing sensor are determined, specifically including: based on the three-dimensional structure of the orifice hydrostatic gas-bearing sensor, the initial geometric structure of the pressure chamber of the orifice hydrostatic gas-bearing sensor is determined; based on the initial geometric structure of the pressure chamber, the pressure chamber diameter and the pressure chamber depth of the pressure chamber are set as the geometric structure parameters of the pressure chamber to be optimized.

[0009] In a possible implementation, a design method for an orifice hydrostatic gas-bearing sensor provided in this application further includes: based on the optimization results corresponding to the geometric structure parameters of the orifice to be optimized and the geometric structure parameters of the pressure chamber to be optimized, determining the relationship between the geometric structure parameters of the orifice and the pressure chamber of the orifice hydrostatic gas-bearing sensor and the bottom bearing capacity and the inlet pressure of the orifice hydrostatic gas-bearing sensor.

[0010] In a possible implementation, the relationship between the geometric structure parameters of the orifice and the pressure chamber of the orifice hydrostatic gas-bearing sensor and the bottom bearing capacity and the inlet pressure of the orifice hydrostatic gas-bearing sensor specifically includes: when the inlet flow rate of the orifice hydrostatic gas-bearing sensor is constant, the distance between orifices of the orifice is negatively correlated with the bottom bearing capacity, and the distance between orifices of the orifice is negatively correlated with the inlet pressure; when the inlet flow rate of the orifice hydrostatic gas-bearing sensor is constant, the pressure chamber depth of the pressure chamber is positively correlated with the bottom bearing capacity, and the pressure chamber depth of the pressure chamber is negatively correlated with the inlet pressure; when the inlet flow rate of the orifice hydrostatic gas-bearing sensor is constant, the pressure chamber diameter of the pressure chamber is negatively correlated with the bottom bearing capacity, and the pressure chamber diameter of the pressure chamber is negatively correlated with the inlet pressure; when the inlet flow rate of the orifice hydrostatic gas-bearing sensor is constant, the orifice diameter of the orifice is negatively correlated with the inlet pressure.

[0011] In a possible implementation, before performing finite element analysis on the fluid domain model, it further includes: setting boundary conditions for the fluid domain model, where the boundary conditions include setting the inlet of the orifice hydrostatic gas-lubricated sensor as a gas flow inlet, the outlet of the orifice hydrostatic gas-lubricated sensor as a pressure outlet, and the area part of the orifice hydrostatic gas-lubricated sensor as a no-slip wall surface.

[0012] In a possible implementation, finite element analysis is performed on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber. Specifically, it includes: selecting any target geometric structure parameter to be optimized from the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber; adjusting the target geometric structure parameter to be optimized, performing finite element analysis on the fluid domain model to obtain the target bottom bearing capacity and the target inlet air pressure of the target geometric structure parameter to be optimized under different parameter values, and determining the target parameter optimization result of the target geometric structure parameter to be optimized based on the target bottom bearing capacity and the target inlet air pressure; adjusting the parameters of the fluid domain model based on the target parameter optimization result to obtain an adjusted fluid domain model; reselecting another target geometric structure parameter to be optimized from the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber, and performing finite element analysis on the adjusted fluid domain model based on the reselected another target geometric structure parameter to be optimized until the optimization results corresponding to all the geometric structure parameters to be optimized in the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber are determined.

[0013] In a second aspect, the present application further provides an orifice hydrostatic gas-lubricated sensor design device, including: a geometric structure parameter to be optimized determination module, a three-dimensional model construction module, and a finite element analysis module; where the geometric structure parameter to be optimized determination module is used to determine the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber of the orifice hydrostatic gas-lubricated sensor based on the three-dimensional structure of the orifice hydrostatic gas-lubricated sensor; the three-dimensional model construction module is used to construct an initial three-dimensional model based on the air gap layer with preset parameters between the orifice hydrostatic gas-lubricated sensor and the steel plate, the geometric structure parameters to be optimized for the orifice, and the geometric structure parameters to be optimized for the pressure chamber; the finite element analysis module is used to obtain the fluid domain model corresponding to the initial three-dimensional model, perform finite element analysis on the fluid domain model, and obtain the optimization results corresponding to the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber respectively.

[0014] In a third aspect, an embodiment of the present application further provides a computer device, which includes a memory and a processor. A computer program is stored on the memory, and when the processor executes the computer program, the above-mentioned design method of the orifice static pressure air bearing sensor is implemented.

[0015] In a fourth aspect, an embodiment of the present application further provides a computer-readable storage medium. The storage medium stores a computer program, and when the computer program is executed by a processor, the above-mentioned design method of the orifice static pressure air bearing sensor can be implemented.

[0016] The embodiment of the present application provides a design method, device, equipment and storage medium for an orifice static pressure air bearing sensor, which has the following advantages compared with the prior art:

[0017] Based on the three-dimensional structure of the orifice static pressure air bearing sensor, determine the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber of the orifice static pressure air bearing sensor; based on the air gap layer with preset parameters between the orifice static pressure air bearing sensor and the steel plate, the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber, construct an initial three-dimensional model; obtain the fluid domain model corresponding to the initial three-dimensional model, and perform finite element analysis on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized for the orifice and the geometric structure parameters to be optimized for the pressure chamber respectively; compared with the prior art, the technical solution of the present application starts from the three-dimensional structure of the orifice static pressure air bearing sensor, constructs a fluid domain model, and considers the actual air gap layer and various geometric structure parameters in the process, which can accurately simulate the working state of the orifice static pressure air bearing sensor and make the design more in line with the actual working conditions; subsequently, through finite element analysis of the fluid domain model, the flow situation of the gas inside the orifice static pressure air bearing sensor can be deeply understood, so as to find the optimization results of the geometric structure parameters of the orifice and the geometric structure parameters of the pressure chamber that make the air film evenly and stably distributed, which can maximize the air film bearing capacity and at the same time reduce the gas pressure requirement, ensuring the efficient and accurate operation of the sensor. Description of the Drawings

[0018] The drawings here are incorporated into the specification and form a part of this specification, showing the embodiments that conform to the present invention, and are used together with the specification to explain the principles of the present invention.

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplary illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements, unless otherwise stated, and the drawings in the figures do not constitute a scale limitation.

[0021] Figure 1 It is a schematic flow diagram of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0022] Figure 2 It is a three-dimensional structure schematic diagram of a throttling orifice hydrostatic gas-bearing sensor of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0023] Figure 3 It is a bottom schematic diagram of a throttling orifice hydrostatic gas-bearing sensor of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0024] Figure 4 It is a schematic diagram of the positional relationship between the pressure chamber and the throttling orifice of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0025] Figure 5 It is a schematic diagram of the structure of a fluid domain model of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0026] Figure 6 A schematic diagram of the bottom bearing capacity curve at different longitudinal distances of the throttling orifice of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0027] Figure 7 It is a schematic diagram of the inlet air pressure at different longitudinal distances of the throttling orifice of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0028] Figure 8 A schematic diagram of the bottom bearing capacity curve at different depths of the pressure chamber of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0029] Figure 9 It is a schematic diagram of the inlet air pressure at different depths of the pressure chamber of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0030] Figure 10 A schematic diagram of the bottom bearing capacity curve at different diameters of the pressure chamber of an embodiment of a design method for a throttling orifice hydrostatic gas-bearing sensor provided by the present application;

[0031] Figure 11It is a schematic diagram of the inlet air pressure under different pressure chamber diameters in an embodiment of a design method for a throttling orifice hydrostatic gas bearing sensor provided by this application;

[0032] Figure 12 It is a schematic diagram of the bottom bearing capacity curve under different throttling orifice diameters in an embodiment of a design method for a throttling orifice hydrostatic gas bearing sensor provided by this application;

[0033] Figure 13 It is a schematic diagram of the inlet air pressure under different throttling orifice diameters in an embodiment of a design method for a throttling orifice hydrostatic gas bearing sensor provided by this application;

[0034] Figure 14 It is a schematic structural diagram of an embodiment of a design device for a throttling orifice hydrostatic gas bearing sensor provided by this application;

[0035] Figure 15 It is a schematic structural diagram of an electronic device provided by this application. Detailed implementation manners

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are some but not all of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of this application without creative efforts shall fall within the scope of protection of this application.

[0037] The following disclosure provides many different embodiments or examples for implementing different structures of this application. To simplify the disclosure of this application, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit this application. In addition, this application may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplification and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0038] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0039] It should also be understood that the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. As used in the specification of this application and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0040] It should be further understood that the term "and / or" used in the specification of this application and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0041] As used in this specification and the appended claims, the term "if" may be interpreted as "when", "once", "in response to determining", or "in response to detecting" depending on the context. Similarly, the phrase "if determined" or "if [the described condition or event] is detected" may be interpreted as meaning "once determined", "in response to determining", "once [the described condition or event] is detected", or "in response to detecting [the described condition or event]" depending on the context.

[0042] Example 1, see Figure 1 , Figure 1 is a schematic flow chart of an embodiment of a design method for a throttling orifice hydrostatic gas bearing sensor provided by this application. As Figure 1 shown, the method includes steps 101 - 103, specifically as follows:

[0043] Step 101: Based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, determine the geometric structure parameters to be optimized for the throttling orifice and the geometric structure parameters to be optimized for the pressure chamber of the throttling orifice hydrostatic gas bearing sensor.

[0044] In one embodiment, based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, determine the initial geometric structure of the throttling orifice of the throttling orifice hydrostatic gas bearing sensor; based on the initial geometric structure of the throttling orifice, set the distance between the throttling orifices and the diameter of the throttling orifice of the throttling orifice as the geometric structure parameters to be optimized for the throttling orifice.

[0045] Specifically, design the initial geometric structure of the throttling orifice based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, where the initial geometric structure of the throttling orifice includes, but is not limited to, the position of the throttling orifice, the number of throttling orifices, and the shape of the throttling orifice.

[0046] Preferably, based on the working conditions of electromagnetic ultrasonic flaw detection, the diameter of the internal flow channel of the sensor and the total gas volume provided by the device can also be obtained to design the initial geometric structure of the throttling orifice of the throttling orifice hydrostatic gas bearing sensor.

[0047] Specifically, the initial geometric structure of the throttle holes is to design 4 throttle holes at the bottom outlet of the sensor. The initially designed lateral distance between the 4 throttle holes is 46 mm, and the longitudinal distance between the throttle holes is 65 mm. Considering the internal structure and processing issues, the lateral distance between the throttle holes is set to be constant at 46 mm. For the structure of the 4 throttle holes, the initially designed diameter of the throttle holes is 3 mm, and the depth of the throttle holes is 2 mm. As Figure 2 shown, Figure 2 Figure 3 is a three-dimensional structure diagram of a throttle hole hydrostatic gas bearing sensor according to an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided in the present application; as Figure 3 shown, Figure 3 Figure 4 is a schematic diagram of the bottom of a throttle hole hydrostatic gas bearing sensor according to an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided in the present application.

[0048] Specifically, for the throttle holes, the distance between the throttle holes directly affects the gas distribution at the bottom of the sensor. If the distance between the throttle holes is too large, it may cause uneven gas distribution, affecting the stability and load-bearing capacity of the gas film. If the distance between the throttle holes is too small, it may cause mutual interference in gas flow, increasing gas consumption and pressure loss. The diameter of the throttle hole determines the gas flow rate and velocity passing through. A smaller throttle hole diameter will limit the gas flow rate and may not be able to provide sufficient gas film load-bearing capacity. A larger throttle hole diameter may cause the gas pressure to drop too quickly, affecting the gas bearing effect. That is, for the throttle holes, the distance between the throttle holes and the diameter of the throttle hole are key factors. Therefore, in the present application, based on the initial geometric structure of the throttle holes, the distance between the throttle holes and the diameter of the throttle hole of the throttle holes are set as the geometric structure parameters to be optimized for the throttle holes.

[0049] Preferably, since the lateral distance between the throttle holes is a constant parameter in this embodiment, the distance between the throttle holes refers to the longitudinal distance between the throttle holes.

[0050] Preferably, in addition to setting the distance between the throttle holes and the diameter of the throttle hole of the throttle holes as the geometric structure parameters to be optimized for the throttle holes, the depth of the throttle holes can also be set as the geometric structure parameter to be optimized for the throttle holes.

[0051] In one embodiment, when determining the geometric structure parameters to be optimized for the pressure chamber of the throttle hole hydrostatic gas bearing sensor based on the three-dimensional structure of the throttle hole hydrostatic gas bearing sensor, based on the three-dimensional structure of the throttle hole hydrostatic gas bearing sensor, the initial geometric structure of the pressure chamber of the throttle hole hydrostatic gas bearing sensor is determined; based on the initial geometric structure of the pressure chamber, the pressure chamber diameter and the pressure chamber depth of the pressure chamber are set as the geometric structure parameters to be optimized for the pressure chamber.

[0052] Specifically, the initial geometric structure of the pressure chamber is designed based on the three-dimensional structure of the throttle static pressure air flotation sensor, wherein the initial geometric structure of the pressure chamber includes but is not limited to the position of the pressure chamber, the number of pressure chambers and the shape of the pressure chamber.

[0053] Preferably, the initial geometric structure of the pressure chamber of the throttle static pressure flotation sensor can be designed by obtaining the internal flow channel diameter of the sensor and the total gas volume provided by the device based on the working conditions of the electromagnetic ultrasonic flaw detection.

[0054] Specifically, the initial geometric structure of the pressure chamber is to set the pressure chamber at the four throttle holes designed at the bottom outlet of the sensor, that is, the position and number of the pressure chamber are the same as the position and number of the throttle holes. As for the shape of the pressure chamber, the pressure chamber diameter is initially designed to be 10 mm and the pressure chamber depth is 1 mm; Figure 4 As shown, Figure 4 It is a schematic diagram of the positional relationship between a pressure chamber and a throttle hole in an embodiment of a throttle hole static pressure flotation sensor design method provided in the present application.

[0055] Specifically, for the pressure chamber, the diameter of the pressure chamber has a key influence on the flow and pressure distribution of the gas in the chamber; a larger diameter may reduce the flow rate of the gas in the chamber and make the pressure distribution more uniform, but may increase the overall volume and cost of the sensor; a smaller diameter may cause the gas flow rate to be too fast and the pressure to change drastically, affecting the stability of the gas film; and the depth of the pressure chamber will also change the storage and buffering effects of the gas; a deeper pressure chamber can store more gas, which helps to stabilize the gas pressure to a certain extent and improve the bearing capacity of the gas film; but a pressure chamber that is too deep may increase the flow resistance of the gas in the chamber, affecting the rapid response ability of the gas; that is, for the pressure chamber, the pressure chamber depth and the pressure chamber diameter are key factors. Therefore, in the present application, based on the initial geometric structure of the pressure chamber, the pressure chamber depth and the throttle hole diameter of the pressure chamber are set as the geometric structure parameters of the throttle hole to be optimized.

[0056] Step 102: construct an initial three-dimensional model based on the air gap layer with preset parameters between the throttle static pressure air flotation sensor and the steel plate, the throttle geometric structure parameters to be optimized, and the pressure chamber geometric structure parameters to be optimized.

[0057] In one embodiment, the air gap layer between the throttle static pressure air flotation sensor and the steel plate is one of the key areas for gas flow when the throttle static pressure air flotation sensor is working.

[0058] In one embodiment, a three-dimensional model of the air gap layer corresponding to the air gap layer is created based on the three-dimensional modeling software according to the preset parameters.

[0059] Specifically, the preset parameter refers to the air gap thickness of the air gap layer being 0.1 mm; this parameter is determined based on the actual working requirements and performance considerations of the orifice static pressure air bearing sensor.

[0060] Preferably, a spatial region model corresponding to the bottom of the sensor and the steel plate is created based on 3D modeling software, and the thickness of the spatial region model is set to 0.1 mm, and the spatial region model is used as the 3D model of the air gap layer.

[0061] In one embodiment, a 3D model of the orifice corresponding to the orifice to be optimized geometric structure parameters is constructed based on 3D modeling software.

[0062] Specifically, since the initial geometric structure of the orifice is to design 4 orifices at the outlet of the bottom of the sensor, the initial designed lateral distance of the 4 orifices is 46 mm, the longitudinal distance of the orifices is 65 mm, and the lateral distance of the orifices is set to be constantly 46 mm; and for the structure of the 4 orifices, the initial designed diameter of the 4 orifices is 3 mm, and the depth of the orifices is 2 mm; therefore, the 3D modeling software constructs the corresponding 3D model of the orifice based on the orifice to be optimized geometric structure parameters corresponding to the initial geometric structure of the orifice during the model construction process; ensuring that the position and shape of the constructed 3D model of the orifice meet the design requirements, so as to accurately simulate the gas flow process through the orifice subsequently.

[0063] In one embodiment, a 3D model of the pressure chamber corresponding to the pressure chamber to be optimized geometric structure parameters is constructed based on 3D modeling software.

[0064] Specifically, since the initial geometric structure of the pressure chamber is to set the pressure chamber at the 4 orifices designed at the outlet of the bottom of the sensor, that is, the position and number of the pressure chambers are the same as those of the orifices, for the shape of the pressure chamber, the initial designed diameter of the pressure chamber is 10 mm, and the depth of the pressure chamber is 1 mm; therefore, the 3D modeling software constructs the corresponding 3D model of the pressure chamber based on the pressure chamber to be optimized geometric structure parameters corresponding to the initial geometric structure of the pressure chamber during the model construction process; ensuring that the position and shape of the constructed 3D model of the pressure chamber meet the design requirements.

[0065] In one embodiment, after obtaining the 3D model of the air gap layer, the 3D model of the pressure chamber, and the 3D model of the orifice, based on the 3D structure of the orifice static pressure air bearing sensor, the 3D model of the air gap layer, the 3D model of the pressure chamber, and the 3D model of the orifice are respectively combined or spliced to obtain a complete initial 3D model; this initial 3D model can more accurately reflect the actual structure of the orifice static pressure air bearing sensor and the initial conditions of gas flow, providing a basis for subsequent fluid domain model extraction and finite element analysis.

[0066] Step 103: Obtain the fluid domain model corresponding to the initial three-dimensional model, and perform finite element analysis on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized for the throttle hole and the geometric structure parameters to be optimized for the pressure chamber respectively.

[0067] In one embodiment, when obtaining the fluid domain model corresponding to the initial three-dimensional model, non-influential components in the initial three-dimensional model are determined, where the non-influential components include, but are not limited to, components such as screws, chamfers, gaskets, holes, etc. that have no influence on the gas flow path; the non-influential components are removed from the initial three-dimensional model to obtain the fluid domain model; as Figure 5 shown, Figure 5 is a schematic diagram of the fluid domain model structure of an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided in the present application.

[0068] In one embodiment, before performing finite element analysis on the fluid domain model, boundary conditions are also set for the fluid domain model, where the boundary conditions include setting the inlet of the throttle hole hydrostatic gas bearing sensor as a gas flow inlet, the outlet of the throttle hole hydrostatic gas bearing sensor as a pressure outlet, and the regional part of the throttle hole hydrostatic gas bearing sensor as a no-slip wall surface.

[0069] Specifically, setting the inlet of the throttle hole hydrostatic gas bearing sensor as a gas flow inlet is to simulate the situation of gas entering the sensor during actual operation; in the finite element analysis software, this boundary condition is achieved by inputting corresponding flow rate values or velocity vector fields; it provides starting conditions for subsequent fluid dynamics calculations, enabling the finite element analysis software to solve information such as the velocity field and pressure field of the fluid according to basic physical laws such as the continuity equation, momentum equation, and energy equation of the fluid.

[0070] Specifically, setting the outlet as a pressure outlet takes into account the pressure state of the gas when it flows out from the outlet after passing through the internal structure of the sensor. In the actual system, the pressure at the outlet is usually affected by the external environment and the performance of the sensor. Setting a fixed pressure outlet can simulate the final pressure situation when the gas flows out of the sensor; in the finite element software, this boundary condition is generally represented by setting a fixed pressure value or pressure gradient; it helps to solve the flow and energy conversion generated by the pressure difference when the fluid passes through the internal structure of the sensor, as well as the influence on the performance of the sensor.

[0071] Specifically, certain areas of the throttle orifice hydrostatic gas bearing sensor are set as non-slip walls because in actual situations, when the gas contacts the sensor wall, due to viscous effects, the gas velocity at the wall is zero, that is, the gas does not slide on the wall; in finite element analysis, the non-slip wall condition is usually achieved by setting the velocity component at the wall to zero.

[0072] In one embodiment, when performing finite element analysis on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber, by selecting any one of the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber as the target geometric structure parameter to be optimized; by adjusting the target geometric structure parameter to be optimized, performing finite element analysis on the fluid domain model to obtain the target bottom bearing capacity and the target inlet air pressure of the target geometric structure parameter to be optimized under different parameter values, and based on the target bottom bearing capacity and the target inlet air pressure, determining the target parameter optimization result of the target geometric structure parameter to be optimized; based on the target parameter optimization result, performing parameter adjustment on the fluid domain model to obtain the adjusted fluid domain model; re-selecting another target geometric structure parameter to be optimized from the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber, and performing finite element analysis on the adjusted fluid domain model based on the re-selected another target geometric structure parameter to be optimized until the optimization results corresponding to all the geometric structure parameters to be optimized in the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber are determined.

[0073] Specifically, since the geometric structure parameters to be optimized for the throttle orifice include the throttle orifice distance between holes and the throttle orifice diameter, where the throttle orifice distance between holes is the longitudinal distance of the throttle orifice; the geometric structure parameters to be optimized for the pressure chamber include the pressure chamber diameter and the pressure chamber depth; therefore, select any one of the geometric structure parameters to be optimized, namely the longitudinal distance of the throttle orifice, the throttle orifice diameter, the pressure chamber depth, and the pressure chamber diameter, as the target geometric structure parameter to be optimized.

[0074] Specifically, when performing finite element analysis on the fluid domain model by adjusting the target geometric structure parameters to be optimized, all other geometric structure parameters to be optimized except the target geometric structure parameters to be optimized are fixed, and the inlet flow value of the constant throttle orifice hydrostatic gas bearing sensor is set; based on the value range corresponding to the target geometric structure parameters to be optimized, the target geometric structure parameters to be optimized are adjusted to obtain multiple target geometric structure parameters to be optimized with different values. Based on the variable parameter combinations corresponding to the multiple target geometric structure parameters with different values, finite element analysis is respectively performed on the fluid domain model to obtain the target bottom bearing capacity and the target inlet air pressure corresponding to each variable parameter combination. The target bottom bearing capacity and the target inlet air pressure are substituted into the preset objective function, and the objective function is optimized to determine the optimal variable parameter combination, and based on the optimal variable parameter combination, the optimization result corresponding to the target geometric structure parameters to be optimized is determined.

[0075] Preferably, the variable parameter combinations corresponding to the multiple target geometric structure parameters with different values are to only adjust the value of the target geometric structure parameters to be optimized, and the other geometric structure parameters to be optimized remain fixed.

[0076] Preferably, for the objective function, with the goal of increasing the bottom bearing capacity while reducing the inlet pressure, based on the relationships between the longitudinal distance of the throttle orifice, the diameter of the throttle orifice, the depth of the pressure chamber, and the diameter of the pressure chamber and the bottom bearing capacity and the inlet pressure respectively, an objective function is constructed, and corresponding value ranges are respectively set for the longitudinal distance of the throttle orifice, the diameter of the throttle orifice, the depth of the pressure chamber, and the diameter of the pressure chamber. Based on the value ranges, they are used as the constraint conditions of the objective function.

[0077] Preferably, the objective function can be expressed as F(x) = [f1(x), f2(x)], x = [d 节流孔纵向距离 , d 节流孔直径 , d 压力腔直径 , h 压力腔深度 , where f1(x) represents the bottom bearing capacity and f2(x) represents the inlet pressure.

[0078] Preferably, when optimizing the objective function, an optimization algorithm can be selected to perform optimization processing on the objective function to determine the optimal variable parameter combination.

[0079] Specifically, when adjusting the parameters of the fluid domain model based on the optimization result of the target parameter, determine the geometric structure parameters to be optimized corresponding to the optimization result of the target parameter. If the optimization result of the target parameter is different from the initial design value of the geometric structure parameter to be optimized corresponding thereto, then adjust the initial design value of the geometric structure parameter to be optimized corresponding to the optimization result of the target parameter in the fluid domain model to the value of the optimization result of the target parameter.

[0080] Specifically, select another target geometric structure parameter to be optimized from the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber, where the another target geometric structure parameter to be optimized is the geometric structure parameter to be optimized that has not been selected among all the geometric parameters to be optimized.

[0081] Specifically, when performing finite element analysis on the adjusted fluid domain model based on the reselected another target geometric structure parameter to be optimized, fix all the geometric structure parameters to be optimized except the another target geometric structure parameter to be optimized, and set a constant inlet flow value of the throttle hole static pressure air bearing sensor; based on the value range corresponding to the another target geometric structure parameter to be optimized, adjust the another target geometric structure parameter to be optimized to obtain multiple another target geometric structure parameters with different values, and perform finite element analysis on the fluid domain model respectively based on the variable parameter combinations corresponding to the multiple another target geometric structure parameters with different values to obtain the target bottom bearing capacity and the target inlet air pressure corresponding to each variable parameter combination respectively. Substitute the target bottom bearing capacity and the target inlet air pressure into the preset objective function, optimize the objective function, determine the optimal variable parameter combination, and based on the optimal variable parameter combination, determine the optimization result corresponding to the another target geometric structure parameter to be optimized; repeat the above operations until all the geometric structure parameters to be optimized are selected and the optimization results corresponding to all the geometric structure parameters to be optimized in the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber are obtained.

[0082] In this embodiment, an example is given to illustrate the process of performing finite element analysis on the fluid domain model to obtain the optimization results corresponding to the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber respectively:

[0083] When the inlet flow of the sensor is set to 0.0088 kg / s, select the longitudinal distance of the throttle hole as the target geometric structure parameter to be optimized. At this time, only adjust the value of the longitudinal distance of the throttle hole within its corresponding value range, and perform finite element analysis on the fluid domain model for different longitudinal distances of the throttle hole, and simulate the bottom bearing capacity and the inlet air pressure under different longitudinal distances of the throttle hole, as Figure 6 shown Figure 6It is a schematic diagram of the bottom bearing capacity curve at different longitudinal distances of the throttle hole in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application; as Figure 7 shown, Figure 7 It is a schematic diagram of the inlet air pressure at different longitudinal distances of the throttle hole in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application.

[0084] When the value of the optimized result of the target parameter of the longitudinal distance of the throttle hole is determined to be 60 mm, the inlet flow rate of the sensor is set to 0.0088 kg / s, the longitudinal distance of the throttle hole is set to 60 mm, and the pressure chamber depth is selected as another target geometric structure parameter to be optimized. At this time, only the value of the pressure chamber depth is adjusted within its corresponding value range, and for different pressure chamber depth distances, the fluid domain model is analyzed by finite element method to simulate the bottom bearing capacity and inlet air pressure at different pressure chamber depths, as Figure 8 shown, Figure 8 It is a schematic diagram of the bottom bearing capacity curve at different pressure chamber depths in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application; as Figure 9 shown, Figure 9 It is a schematic diagram of the inlet air pressure at different pressure chamber depths in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application.

[0085] When the value of the optimized result of the target parameter of the pressure chamber depth is determined to be 1 mm, the inlet flow rate of the sensor is set to 0.0088 kg / s, the longitudinal distance of the throttle hole is set to 60 mm, the pressure chamber depth is set to 1 mm, and the pressure chamber diameter is selected as another target geometric structure parameter to be optimized. At this time, only the value of the pressure chamber diameter is adjusted within its corresponding value range, and for different pressure chamber diameter distances, the fluid domain model is analyzed by finite element method to simulate the bottom bearing capacity and inlet air pressure at different pressure chamber diameters, as Figure 10 shown, Figure 10 It is a schematic diagram of the bottom bearing capacity curve at different pressure chamber diameters in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application; as Figure 11 shown, Figure 11 It is a schematic diagram of the inlet air pressure at different pressure chamber diameters in an embodiment of a design method for a throttle hole hydrostatic gas bearing sensor provided by this application.

[0086] When the value of the optimized result of the target parameter of the pressure chamber diameter is determined to be 14 mm, the inlet flow rate of the sensor is set to 0.0088 kg / s, the longitudinal distance of the throttle orifice is set to 60 mm, the depth of the pressure chamber is set to 1 mm, the diameter of the pressure chamber is set to 14 mm, and the diameter of the throttle orifice is selected as another target geometric structure parameter to be optimized. At this time, only the value of the throttle orifice diameter is adjusted within its corresponding value range, and for different throttle orifice diameters, a finite element analysis is performed on the fluid domain model to simulate the bottom bearing capacity and inlet air pressure at different throttle orifice diameters, as Figure 12 shown, Figure 12 FIG. is a schematic diagram of the bottom bearing capacity curve at different throttle orifice diameters in an embodiment of a design method for a throttle orifice hydrostatic gas bearing sensor provided by the present application; as Figure 13 shown, Figure 13 FIG. is a schematic diagram of the inlet air pressure at different throttle orifice diameters in an embodiment of a design method for a throttle orifice hydrostatic gas bearing sensor provided by the present application.

[0087] After the optimized result of the target parameter of the throttle orifice diameter is determined, since all the geometric structure parameters to be optimized are selected, the optimized results corresponding to the geometric structure parameter to be optimized of the throttle orifice and the geometric structure parameter to be optimized of the pressure chamber can be directly output.

[0088] By using the finite element method to simulate the internal structure of the sensor, the gas bearing phenomenon under the actual working conditions of the sensor can be accurately simulated, and the optimal parameters can be quickly determined: combined with the optimal throttle orifice spacing parameter, the optimal design values of other parameters can be quickly determined, thereby improving the accuracy and reliability of the design; reducing material waste: through accurate simulation analysis, material waste caused by improper design can be reduced; and the optimized design helps to reduce the energy consumption of the sensor suspension system and reduce the operating cost.

[0089] In one embodiment, based on the optimized results corresponding to the geometric structure parameter to be optimized of the throttle orifice and the geometric structure parameter to be optimized of the pressure chamber, the relationship between the geometric structure parameters of the throttle orifice and the pressure chamber of the throttle orifice hydrostatic gas bearing sensor and the bottom bearing capacity and inlet pressure of the throttle orifice hydrostatic gas bearing sensor is determined.

[0090] Specifically, the relationships include, but are not limited to, that when the inlet flow rate of the orifice static pressure air bearing sensor is constant, the distance between orifices of the orifice has a negative correlation with the bottom bearing capacity, and the distance between orifices of the orifice has a negative correlation with the inlet pressure; when the inlet flow rate of the orifice static pressure air bearing sensor is constant, the depth of the pressure chamber has a positive correlation with the bottom bearing capacity, and the depth of the pressure chamber has a negative correlation with the inlet pressure; when the inlet flow rate of the orifice static pressure air bearing sensor is constant, the diameter of the pressure chamber has a negative correlation with the bottom bearing capacity, and the diameter of the pressure chamber has a negative correlation with the inlet pressure; when the inlet flow rate of the orifice static pressure air bearing sensor is constant, the diameter of the orifice has a negative correlation with the inlet pressure.

[0091] Preferably, based on only adjusting a single geometric structure parameter to be optimized and the optimization results of the geometric structure parameters to be optimized in the finite element analysis model, the following conclusions can be obtained:

[0092] (1) When the inlet flow rate of the orifice static pressure air bearing sensor is set to be constant, by shortening the longitudinal distance of the orifice, it is beneficial to improve the bottom bearing capacity of the sensor, but the inlet pressure of the sensor will increase. By simulating and viewing the pressure distribution on the bottom surface of the sensor, the pressure on the bottom surface of the sensor is mainly distributed between 4 orifice holes.

[0093] (2) When the inlet flow rate of the orifice static pressure air bearing sensor is set to be constant, by deepening the depth of the pressure chamber at the bottom outlet of the sensor, it is beneficial to improve the bottom bearing capacity of the sensor and reduce the inlet pressure of the sensor.

[0094] (3) When the inlet flow rate of the orifice static pressure air bearing sensor is set to be constant, by increasing the diameter of the pressure chamber at the bottom outlet of the sensor, the bottom bearing capacity of the sensor can be reduced and the inlet pressure of the sensor can be reduced.

[0095] (4) When the inlet flow rate of the orifice static pressure air bearing sensor is set to be constant, by increasing the diameter of the orifice at the bottom outlet of the sensor, the influence on the bottom bearing capacity of the sensor is small, but the inlet pressure of the sensor can be reduced.

[0096] Example 2, see Figure 14 , Figure 14It is a schematic block diagram of a throttling orifice hydrostatic gas bearing sensor design device provided by an embodiment of the present application. Corresponding to the above throttling orifice hydrostatic gas bearing sensor design method, the present application also provides a throttling orifice hydrostatic gas bearing sensor design device. The throttling orifice hydrostatic gas bearing sensor design device includes modules for executing the above throttling orifice hydrostatic gas bearing sensor design method, and the throttling orifice hydrostatic gas bearing sensor design device can be configured in terminals such as desktop computers, tablet computers, laptops, etc.; specifically, the throttling orifice hydrostatic gas bearing sensor design device includes a to-be-optimized geometric structure parameter determination module 201, a three-dimensional model construction module 202, and a finite element analysis module 203.

[0097] The to-be-optimized geometric structure parameter determination module 201 is used to determine the to-be-optimized geometric structure parameters of the throttling orifice and the to-be-optimized geometric structure parameters of the pressure chamber of the throttling orifice hydrostatic gas bearing sensor based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor.

[0098] The three-dimensional model construction module 202 is used to construct an initial three-dimensional model based on the air gap layer with preset parameters between the throttling orifice hydrostatic gas bearing sensor and the steel plate, the to-be-optimized geometric structure parameters of the throttling orifice, and the to-be-optimized geometric structure parameters of the pressure chamber.

[0099] The finite element analysis module 203 is used to obtain the fluid domain model corresponding to the initial three-dimensional model, perform finite element analysis on the fluid domain model, and obtain the optimization results corresponding to the to-be-optimized geometric structure parameters of the throttling orifice and the to-be-optimized geometric structure parameters of the pressure chamber respectively.

[0100] In one embodiment, the to-be-optimized geometric structure parameter determination module 201 is used to determine the to-be-optimized geometric structure parameters of the throttling orifice of the throttling orifice hydrostatic gas bearing sensor based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, specifically including: determining the initial geometric structure of the throttling orifice of the throttling orifice hydrostatic gas bearing sensor based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor; setting the orifice-to-orifice distance and the throttling orifice diameter of the throttling orifice as the to-be-optimized geometric structure parameters of the throttling orifice based on the initial geometric structure of the throttling orifice.

[0101] In one embodiment, the to-be-optimized geometric structure parameter determination module 201 is used to determine the to-be-optimized geometric structure parameters of the pressure chamber of the throttling orifice hydrostatic gas bearing sensor based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor, specifically including: determining the initial geometric structure of the pressure chamber of the throttling orifice hydrostatic gas bearing sensor based on the three-dimensional structure of the throttling orifice hydrostatic gas bearing sensor; setting the pressure chamber diameter and the pressure chamber depth of the pressure chamber as the to-be-optimized geometric structure parameters of the pressure chamber based on the initial geometric structure of the pressure chamber.

[0102] In one embodiment, a throttling orifice hydrostatic gas bearing sensor design device provided by the present application further includes: a relationship determination module.

[0103] In one embodiment, the relationship determination module is configured to determine the relationship between the geometric structure parameters of the throttling orifice and the pressure chamber of the throttling orifice hydrostatic gas bearing sensor and the bottom bearing capacity and the inlet pressure of the throttling orifice hydrostatic gas bearing sensor based on the respective optimization results of the geometric structure parameters to be optimized of the throttling orifice and the geometric structure parameters to be optimized of the pressure chamber.

[0104] In one embodiment, the relationship between the geometric structure parameters of the throttling orifice and the pressure chamber of the throttling orifice hydrostatic gas bearing sensor in the relationship determination module and the bottom bearing capacity and the inlet pressure of the throttling orifice hydrostatic gas bearing sensor specifically includes: when the inlet flow rate of the throttling orifice hydrostatic gas bearing sensor is constant, the inter-orifice distance of the throttling orifice is negatively correlated with the bottom bearing capacity, and the inter-orifice spacing of the throttling orifice is negatively correlated with the inlet pressure; when the inlet flow rate of the throttling orifice hydrostatic gas bearing sensor is constant, the depth of the pressure chamber of the pressure chamber is positively correlated with the bottom bearing capacity, and the depth of the pressure chamber of the pressure chamber is negatively correlated with the inlet pressure; when the inlet flow rate of the throttling orifice hydrostatic gas bearing sensor is constant, the diameter of the pressure chamber of the pressure chamber is negatively correlated with the bottom bearing capacity, and the diameter of the pressure chamber of the pressure chamber is negatively correlated with the inlet pressure; when the inlet flow rate of the throttling orifice hydrostatic gas bearing sensor is constant, the diameter of the throttling orifice of the throttling orifice is negatively correlated with the inlet pressure.

[0105] In one embodiment, before performing finite element analysis on the fluid domain model, the finite element analysis module 203 further includes: setting boundary conditions for the fluid domain model, where the boundary conditions include setting the inlet of the throttling orifice hydrostatic gas bearing sensor as a gas flow inlet, the outlet of the throttling orifice hydrostatic gas bearing sensor as a pressure outlet, and the regional part of the throttling orifice hydrostatic gas bearing sensor as a non-slip wall surface.

[0106] In one embodiment, the finite element analysis module 203 is configured to perform finite element analysis on the fluid domain model to obtain optimization results corresponding to the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber, specifically including: selecting any target geometric structure parameter to be optimized from the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber; performing finite element analysis on the fluid domain model by adjusting the target geometric structure parameter to be optimized to obtain the target bottom bearing capacity and the target inlet air pressure of the target geometric structure parameter to be optimized at different parameter values, and determining the target parameter optimization result of the target geometric structure parameter to be optimized based on the target bottom bearing capacity and the target inlet air pressure; adjusting the parameters of the fluid domain model based on the target parameter optimization result to obtain an adjusted fluid domain model; reselecting another target geometric structure parameter to be optimized from the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber, and performing finite element analysis on the adjusted fluid domain model based on the reselected another target geometric structure parameter to be optimized until the optimization results corresponding to all the geometric structure parameters to be optimized in the geometric structure parameters to be optimized for the throttle orifice and the geometric structure parameters to be optimized for the pressure chamber are determined.

[0107] The above throttle orifice hydrostatic gas bearing sensor design device can implement the throttle orifice hydrostatic gas bearing sensor design method in the above method embodiment. The optional items in the above method embodiment are also applicable to this embodiment and will not be elaborated here.

[0108] As Figure 15 shown, Figure 15 FIG. is a schematic structural diagram of an electronic device provided by the present application; it includes a processor 111, a communication interface 112, a memory 113, and a communication bus 114. Among them, the processor 111, the communication interface 112, and the memory 113 complete mutual communication through the communication bus 114, and the memory 113 is used to store a computer program.

[0109] In an embodiment of the present application, when the processor 111 is configured to execute the program stored on the memory 113, it implements the throttle orifice hydrostatic gas bearing sensor design method provided in any one of the foregoing method embodiments.

[0110] Those of ordinary skill in the art can understand that all or part of the processes of implementing the methods in the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a storage medium, and the storage medium is a computer-readable storage medium. The computer program is executed by at least one processor in the computer system to implement the process steps of the method embodiments.

[0111] Therefore, the embodiments of the present application also provide a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the throttling orifice hydrostatic gas-bearing sensor design method provided in any of the foregoing method embodiments are implemented.

[0112] The storage medium is a physical and non-transitory storage medium. For example, it can be various physical storage media such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a magnetic disk, or an optical disc, etc., which can store program codes. The computer-readable storage medium can be non-volatile or volatile.

[0113] Those of ordinary skill in the art can realize that the units and algorithm steps of the examples described in combination with the embodiments disclosed herein can be implemented by electronic hardware, computer software, or a combination of the two. To clearly illustrate the interchangeability of hardware and software, the components and steps of the examples have been generally described according to their functions in the above description. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the present application.

[0114] In several embodiments provided by the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of each unit is only a logical function division, and there can be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0115] The steps in the method embodiments of the present application can be adjusted, combined, and deleted according to actual needs. The units in the device embodiments of the present application can be combined, divided, and deleted according to actual needs. In addition, in each embodiment of the present application, the functional units can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit.

[0116] When the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a terminal, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application.

[0117] In the above embodiments, the descriptions of the various embodiments each have their own emphases. For the parts not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0118] Obviously, those skilled in the art can make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, provided that these modifications and variations of this application fall within the scope of the claims of this application and their equivalent technologies, this application is also intended to include these changes and modifications.

[0119] As described above, the above are only the specific implementation manners of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed by this application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims

1. A design method for a throttle static pressure flotation sensor, characterized in that: include: Based on the three-dimensional structure of the throttle static pressure air flotation sensor, determining the geometric structural parameters of the throttle hole to be optimized and the geometric structural parameters of the pressure chamber to be optimized of the throttle static pressure air flotation sensor; An initial three-dimensional model is constructed based on the air gap layer with preset parameters between the throttle static pressure air flotation sensor and the steel plate, the geometric structure parameters of the throttle to be optimized, and the geometric structure parameters of the pressure chamber to be optimized; A fluid domain model corresponding to the initial three-dimensional model is obtained, and a finite element analysis is performed on the fluid domain model to obtain optimization results corresponding to the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber.

2. The design method of the throttle static pressure air flotation sensor according to claim 1 is characterized in that: Based on the three-dimensional structure of the throttle static pressure air flotation sensor, the geometric structure parameters of the throttle of the throttle static pressure air flotation sensor to be optimized are determined, specifically including: Based on the three-dimensional structure of the throttle static pressure air flotation sensor, determining the initial geometric structure of the throttle of the throttle static pressure air flotation sensor; Based on the initial geometric structure of the throttle hole, the distance between throttle holes and the throttle hole diameter of the throttle hole are set as the geometric structure parameters of the throttle hole to be optimized.

3. The design method of the throttle static pressure air flotation sensor according to claim 1 is characterized in that: Based on the three-dimensional structure of the throttle static pressure air flotation sensor, the geometric structure parameters of the pressure chamber of the throttle static pressure air flotation sensor to be optimized are determined, specifically including: Based on the three-dimensional structure of the throttle static pressure air flotation sensor, determining the initial geometric structure of the pressure chamber of the throttle static pressure air flotation sensor; Based on the initial geometric structure of the pressure chamber, the pressure chamber diameter and the pressure chamber depth of the pressure chamber are set as the geometric structure parameters of the pressure chamber to be optimized.

4. The design method of the throttle static pressure air flotation sensor as described in claim 1, characterized in that: Also includes: Based on the optimization results corresponding to the throttle hole geometric structure parameters to be optimized and the pressure chamber geometric structure parameters to be optimized, the relationship between the throttle hole geometric structure parameters and the pressure chamber geometric structure parameters of the throttle hole static pressure flotation sensor and the bottom bearing capacity and inlet pressure of the throttle hole static pressure flotation sensor is determined.

5. The design method of the throttle static pressure air flotation sensor as described in claim 4, characterized in that: The relationship between the geometrical parameters of the throttle hole and the geometrical parameters of the pressure chamber of the throttle hole static pressure air flotation sensor and the bottom bearing capacity and inlet pressure of the throttle hole static pressure air flotation sensor specifically includes: When the inlet flow rate of the throttle static pressure flotation sensor is constant, the distance between the throttle holes of the throttle holes is negatively correlated with the bottom bearing capacity, and the distance between the throttle holes is negatively correlated with the inlet pressure; When the inlet flow rate of the throttle static pressure air flotation sensor is constant, the pressure chamber depth of the pressure chamber is positively correlated with the bottom bearing capacity, and the pressure chamber depth of the pressure chamber is negatively correlated with the inlet pressure; When the inlet flow rate of the throttle static pressure air flotation sensor is constant, the pressure cavity diameter of the pressure cavity is negatively correlated with the bottom bearing capacity, and the pressure cavity diameter of the pressure cavity is negatively correlated with the inlet pressure; When the inlet flow rate of the throttle static pressure flotation sensor is constant, the throttle diameter of the throttle is negatively correlated with the inlet pressure.

6. The design method of the throttle static pressure air flotation sensor as described in claim 1, characterized in that: Before performing finite element analysis on the fluid domain model, the method further includes: Boundary conditions are set for the fluid domain model, wherein the boundary conditions include setting the inlet of the throttle static pressure flotation sensor as a gas flow inlet, the outlet of the throttle static pressure flotation sensor as a pressure outlet, and the area of ​​the throttle static pressure flotation sensor as a no-slip wall.

7. The design method of the throttle static pressure air flotation sensor as described in claim 1, characterized in that: Finite element analysis is performed on the fluid domain model to obtain optimization results corresponding to the geometric structure parameters of the throttle hole to be optimized and the geometric structure parameters of the pressure chamber to be optimized, which specifically include: Select any target geometric structure parameter to be optimized from the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber; By adjusting the target geometric structure parameters to be optimized, a finite element analysis is performed on the fluid domain model to obtain a target bottom bearing capacity and a target inlet air pressure of the target geometric structure parameters to be optimized at different parameter values, and based on the target bottom bearing capacity and the target inlet air pressure, a target parameter optimization result of the target geometric structure parameters to be optimized is determined; Based on the target parameter optimization result, adjusting the parameters of the fluid domain model to obtain an adjusted fluid domain model; Reselect another target geometric structure parameter to be optimized from the throttle hole geometric structure parameters to be optimized and the pressure chamber geometric structure parameters to be optimized, and perform finite element analysis on the adjusted fluid domain model based on the reselected another target geometric structure parameter to be optimized, until the optimization results corresponding to all the geometric structure parameters to be optimized in the throttle hole geometric structure parameters to be optimized and the pressure chamber geometric structure parameters to be optimized are determined.

8. A throttle static pressure flotation sensor design device, characterized in that: include: Module for determining the parameters of the geometric structure to be optimized, module for building a three-dimensional model and module for finite element analysis; The module for determining geometric structure parameters to be optimized is used to determine the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber of the throttle hole static pressure air flotation sensor based on the three-dimensional structure of the throttle hole static pressure air flotation sensor; The three-dimensional model building module is used to build an initial three-dimensional model based on the air gap layer with preset parameters between the throttle static pressure air flotation sensor and the steel plate, the geometric structure parameters of the throttle to be optimized, and the geometric structure parameters of the pressure chamber to be optimized; The finite element analysis module is used to obtain the fluid domain model corresponding to the initial three-dimensional model, perform finite element analysis on the fluid domain model, and obtain the optimization results corresponding to the geometric structure parameters to be optimized of the throttle hole and the geometric structure parameters to be optimized of the pressure chamber.

9. A computer device, characterized in that: The computer device includes a memory and a processor, wherein a computer program is stored in the memory, and when the processor executes the computer program, the throttle static pressure flotation sensor design method according to any one of claims 1 to 7 is implemented.

10. A computer-readable storage medium, characterized in that: The storage medium stores a computer program, and when the computer program is executed by a processor, the method for designing a throttle static pressure flotation sensor according to any one of claims 1 to 7 can be implemented.