High-order vibration fan

Abstract

The invention relates to the technical field of heat dissipation devices, in particular to a high-order vibration fan which comprises a first actuating plate and an opposite plate. The first actuating plate comprises at least one first actuating part and at least one driven part, and the two ends, in the extending direction from the first fixed end part to the first free end part, of the first actuating plate are fixed, so that the first piezoelectric plate can promote the driven part to generate high-order resonance mode vibration with at least two antinode through the first actuating part; in the vibration process of the driven part or the driven part and the oppositely-arranged plate, the hole parts independently suck and discharge air, and in the discharge stroke, the air is squeezed, so that the air flow finally sprayed out of the hole parts has high air pressure, and the large air volume is maintained; in addition, pressure airflow is formed in the thickness direction of the driven part, and application in the application scene that the pressure airflow needs to be formed in the thickness direction of the first actuating plate to generate ventilation and cooling effects is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of heat dissipation devices, and in particular to a high-order vibration fan. Background Art

[0002] The cantilever piezoelectric fan has a group of blades consisting of a single blade or multiple single blades arranged in an array. One end of the blade is fixed and the other end is suspended. The piezoelectric ceramic sheet is fixedly arranged on the blade near the fixed end. Since the piezoelectric material has an inverse piezoelectric effect, the alternating electrical signal acts on the piezoelectric ceramic sheet, causing the piezoelectric ceramic sheet to produce geometric deformations of elongation and contraction, thereby causing the blade to bend and vibrate. In the resonant state, the amplitude of the suspended end of the blade will increase significantly, thereby outputting high-speed, directional and stable airflow, producing ventilation and cooling effects. For example, the Chinese patent application with publication number CN101222832A and the US patent application with authorization announcement number US9705067B2 are all piezoelectric driven micro-volume fans of this structural type.

[0003] However, although this type of piezoelectric fan can generate a large directional air volume under resonant conditions, the fan blades are completely exposed to the environment and cannot squeeze the air, resulting in extremely low wind pressure. The fan is usually installed in a small space inside the terminal, and the gas flow must overcome flow resistance. It is difficult to maintain a large air volume with extremely low wind pressure, so the effective air volume that actually acts on the heat source is not large, and the heat dissipation effect is limited. In addition, due to structural principles, this type of fan can only generate directional airflow along the extension direction of the cantilever, and is not suitable for application scenarios that require the formation of pressure airflow along the thickness direction of the cantilever to produce ventilation and cooling effects. Summary of the invention

[0004] The technical problem to be solved by the present invention is: in order to solve the problem that the cantilever piezoelectric fan in the prior art has low wind pressure and is difficult to maintain a large air volume, and is also difficult to form a pressure airflow along the thickness direction of the cantilever, a high-order vibration fan is now provided.

[0005] The technical solution adopted by the present invention to solve its technical problem is: a high-order vibration fan comprises a first actuating plate and an opposing plate;

[0006] The first actuating plate comprises at least one first actuating portion and at least one driven portion, wherein the first actuating portion is provided with at least one first piezoelectric sheet on one side or both sides in the thickness direction of the first actuating plate, one end of the first actuating portion is fixed to form a first fixed end portion, and the other end is suspended to form a first free end portion, and the two ends of the first actuating plate in the extending direction from the first fixed end portion to the first free end portion are respectively the first fixed end portion and the second fixed end portion, and one end of the driven portion is formed as a first connecting end portion connected to the first free end portion, and the other end is fixed to form a second fixed end portion;

[0007] On one side or both sides of the first actuating plate in the thickness direction, at least one opposing plate is disposed opposite to the driven part, and there is a gap between the driven part and the opposing plate;

[0008] When the first piezoelectric sheet drives the first actuating part to vibrate, the first actuating part transmits the vibration signal to the driven part, causing the driven part to generate vibrations in a higher-order resonance mode with at least two antinodes. A hole part communicating with the gap penetrates through the region of the opposing plate or / and the driven part that is opposite to at least one first antinode position or the adjacent region of the first antinode position where the driven part vibrates.

[0009] Furthermore, hole parts communicating with the gap respectively penetrate through the regions of the opposing plate or / and the driven part that are opposite to at least two first antinode positions or the adjacent regions of the first antinode positions where the driven part vibrates.

[0010] Furthermore, hole parts communicating with the gap respectively penetrate through the regions of the opposing plate or / and the driven part that are opposite to each first antinode position or the adjacent region of the first antinode position where the driven part vibrates.

[0011] Furthermore, the driven part is configured to be more deformable than the first actuating part.

[0012] The solution for enabling the opposing plate to achieve vibrations in a higher-order resonance mode through the second actuating plate is specifically as follows: It further includes a second actuating plate. The second actuating plate includes at least one second actuating part. On one side or both sides of the second actuating part in the thickness direction of the second actuating plate, at least one second piezoelectric sheet is provided. One end of the second actuating part is fixed to form a third fixed end part, and the other end is suspended to form a second free end part. The two ends of the second actuating plate in the extending direction from the third fixed end part to the second free end part are respectively the third fixed end part and the fourth fixed end part. One end of the opposing plate is formed as a second connection end part connected to the second free end part, and the other end is fixed to form a fourth fixed end part;

[0013] When the second piezoelectric sheet drives the second actuating part to vibrate, the second actuating part transmits the vibration signal to the opposing plate, causing the opposing plate to generate vibrations in a higher-order resonance mode. The vibration generated by the opposing plate has the same vibration mode as the vibration generated by the driven part and has a phase difference of 90° to 180°.

[0014] Furthermore, the vibration generated by the opposing plate has the same vibration mode as the vibration generated by the driven part and has a phase difference of 180°, such that the first antinode position or the adjacent region of the first antinode position where the driven part vibrates is directly opposite to the second antinode position or the adjacent region of the second antinode position where the opposing plate vibrates.

[0015] Further, the opposing plate is configured to be more deformable than the second actuating portion.

[0016] In the solution where the opposing plate realizes the vibration of the high-order resonance mode through the first actuating plate, there is one opposing plate, one end of the opposing plate is formed as a second connecting end portion, and the other end is fixedly formed as a fourth fixing end portion;

[0017] One surface of the first free end portion on one side in the thickness direction of the first actuating portion is joined to the first connecting end portion; the other surface of the first free end portion on the other side in the thickness direction of the first actuating portion is joined to the second connecting end portion;

[0018] When the first piezoelectric sheet drives the first actuating portion to vibrate, the first actuating portion transmits the vibration signal to the driven portion and the opposing plate, causing the driven portion and the opposing plate to respectively generate the vibration of the high-order resonance mode with at least two antinodes. The vibration generated by the opposing plate has the same vibration mode as the vibration generated by the driven portion and has a phase difference of 90° to 180°.

[0019] Further, the vibration generated by the opposing plate has the same vibration mode as the vibration generated by the driven portion and has a phase difference of 180°, so that the first antinode position of the vibration of the driven portion or the adjacent area of the first antinode position is opposite to the second antinode position of the vibration of the opposing plate or the adjacent area of the second antinode position.

[0020] Further, the opposing plate is configured to be more deformable than the first actuating portion.

[0021] Further, the driven portion is made of a polymer material or a composite material composed of a polymer material and a metal material.

[0022] The beneficial effects of the present invention are as follows:

[0023] 1), In the high-order vibration fan of the present invention, by fixing both ends of the first actuating plate in the extending direction from the first fixing end portion to the first free end portion, the first piezoelectric sheet can cause the driven portion to generate the vibration of the high-order resonance mode with at least two antinodes through the first actuating portion. There are hole portions with communicating gaps provided in the area of the opposing plate or / and the driven portion that is opposite to the first antinode position of the vibration of the driven portion or the adjacent area of the first antinode position. During the vibration of the driven portion or the driven portion and the opposing plate, the effective volume of the area of the gap that is opposite to any first antinode position of the vibration of the driven portion expands and contracts periodically. The hole portions provided on the opposing plate or / and the driven portion that are opposite to any first antinode position of the vibration of the driven portion or the adjacent area of the first antinode position independently suck in and discharge gas respectively. During the discharge stroke, the gas is compressed, so that the airflow finally ejected from the hole portions has a higher wind pressure and can maintain a large air volume.

[0024] 2), in the high-order vibration fan of the present invention, the hole portion serving as the air outlet is provided in the thickness direction of the driven portion and / or the opposed plate, so that the high-order vibration fan of the present invention can form a pressure air flow along the thickness direction of the driven portion, which is beneficial to the application scenarios that require ventilation and cooling effects by forming a pressure air flow along the thickness direction of the first actuating plate.

[0025] Other features and advantages of the present application will become clear from the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be further described below with reference to the drawings and embodiments.

[0027] Figure 1 It is a top view schematic diagram of the first actuating plate in the present invention;

[0028] Figure 2 It is a front view schematic diagram of the first actuating plate in the present invention;

[0029] Figure 3 It is a cross-sectional view schematic diagram of the high-order vibration fan in Embodiment 1;

[0030] Figure 4 It is a schematic diagram of the driven portion bulging and deforming in one direction when vibrating in the second-order resonance mode;

[0031] Figure 5 It is a schematic diagram of the driven portion bulging and deforming in the other direction when vibrating in the second-order resonance mode;

[0032] Figure 6 It is a schematic diagram of the driven portion bulging and deforming in one direction when vibrating in the third-order resonance mode;

[0033] Figure 7 It is a schematic diagram of the driven portion bulging and deforming in the other direction when vibrating in the third-order resonance mode;

[0034] Figure 8 It is a schematic diagram of the hole portions independently sucking fluid during the working process;

[0035] Figure 9 It is a schematic diagram of the hole portions independently discharging fluid during the working process;

[0036] Figure 10 It is a schematic diagram of the high-order vibration fan in Embodiment 2;

[0037] Figure 11 It is a schematic diagram of the high-order vibration fan in Embodiment 3.

[0038] In the figure: 1. First actuating plate, 11. First actuating part, 11-1. First fixed end, 11-2. First free end, 12. Driven part, 12-1. First connecting end, 12-2. Second fixed end, 1a. First main surface, 1b. Second main surface;

[0039] 2. Second actuating plate, 21. Second actuating part, 21-1. Third fixed end, 21-2. Second free end;

[0040] 3. Opposing plate, 3-1. Second connecting end, 3-2. Fourth fixed end;

[0041] 4. Gap;

[0042] 5. Hole part;

[0043] 6. First piezoelectric sheet;

[0044] 7. Second piezoelectric sheet;

[0045] 8. First antinode position. Detailed implementation mode

[0046] Now, the present invention will be further described in detail with reference to the accompanying drawings. These drawings are all simplified schematic diagrams, only schematically showing the basic structure of the present invention. Therefore, they only show the components related to the present invention. Directions and references (such as up, down, left, right, etc.) can only be used to help describe the features in the drawings. Therefore, the following detailed implementation mode is not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalent forms.

[0047] Embodiment 1

[0048] As Figures 1-4 shown, a high-order vibration fan includes a first actuating plate 1 and an opposing plate 3;

[0049] The first actuating plate 1 has a first main surface 1a and a second main surface 1b that are oppositely arranged in the thickness direction. The first actuating plate 1 includes at least one first actuating portion 11 and at least one driven portion 12. At least one first piezoelectric sheet 6 is provided on one side or both sides of the first actuating portion 11 in the thickness direction of the first actuating plate 1. The first piezoelectric sheet 6 can be a piezoelectric ceramic sheet. It can be a single piezoelectric ceramic sheet bonded to one side surface of the first actuating portion 11 to form a single-chip first actuating portion 11. It can also be two piezoelectric ceramic sheets respectively bonded to both side surfaces of the first actuating portion 11 to form a double-chip first actuating portion 11. It can also be multiple piezoelectric ceramic sheets bonded to one side or both side surfaces of the first actuating portion 11 to form a composite-type first actuating portion 11. In this embodiment, a single piezoelectric ceramic sheet bonded to one side surface of the first actuating portion 11 is used for illustration, but it is not limited thereto. The piezoelectric ceramic sheet causes the first actuating portion 11 to vibrate under the excitation of an external electrical signal.

[0050] One end of the first actuating portion 11 is fixed to form a first fixed end portion 11-1, and the other end is suspended to form a first free end portion 11-2. The two ends of the first actuating plate 1 in the extending direction from the first fixed end portion 11-1 to the first free end portion 11-2 are respectively the first fixed end portion 11-1 and the second fixed end portion 12-2. One end of the driven portion 12 is formed as a first connecting end portion 12-1 connected to the first free end portion 11-2, and the other end is fixed to form a second fixed end portion 12-2. That is to say, the driven portion 12 is joined in the extending direction of the first actuating portion 11 from the first fixed end portion 11-1 to the first free end portion 11-2. The connection between the first connecting end portion 12-1 of the driven portion 12 and the first free end portion 11-2 of the first actuating portion 11 can be achieved by welding, bonding, riveting, etc. Of course, it can also be that the first actuating portion 11 and the driven portion 12 are integrally formed, which is not limited herein. As Figures 1-2 shown.

[0051] The driven part 12 is configured to be more deformable than the first actuating part 11. That is to say, the flexural rigidity of the driven part 12 is smaller than that of the first actuating part 11, making the driven part 12 more likely to be excited to generate vibration. The difference in this mode can be achieved by including but not limited to the following methods. First, the first actuating part 11 and the driven part 12 can be made of different materials. For example, when the first actuating part 11 is made of stainless steel or Invar alloy, a polymer material or a polymer, or a composite material composed of a polymer material and other materials can be used to form the driven part 12. Second, the structural dimension parameters such as the thickness and width of the first actuating part 11 and the driven part 12 can be adjusted. For example, when the first actuating part 11 and the driven part 12 are made of the same metal material, the thickness of the driven part 12 can be designed to be smaller or much smaller than that of the first actuating part 11. Third, the whole or part of the first actuating part 11 or / and the driven part 12 can be deeply processed. For example, a non-uniform material with local weakening can be used to form the driven part 12. Of course, the above methods can be combined to achieve the purpose of forming the driven part 12 into a mode that is more likely to generate deformation compared to the first actuating part 11.

[0052] There is at least one opposed plate 3. At least one opposed plate 3 is disposed opposite to the driven part 12 on one or both sides in the thickness direction of the first actuating plate 1. There is a gap 4 between the driven part 12 and the opposed plate 3. When the first piezoelectric sheet 6 drives the first actuating part 11 to vibrate, the first actuating part 11 transmits the vibration signal to the driven part 12, prompting the driven part 12 to generate vibration in a higher-order resonance mode with at least two antinodes. A hole part 5 communicating with the gap 4 penetrates through the region of the opposed plate 3 or / and the region of the driven part 12 opposite to at least one first antinode position 8 of the vibration of the driven part 12 or the adjacent region of the first antinode position 8.

[0053] Among them, there can be one opposed plate 3, which is disposed opposite to the driven part 12 on one side of the first actuating plate 1, that is, the opposed plate 3 is disposed opposite to the driven part 12 on the first main surface 1a side or the second main surface 1b side of the first actuating plate 1. There can also be multiple opposed plates 3, such as two, which are respectively disposed opposite to the driven part 12 on both sides of the first actuating plate 1, that is, the two opposed plates 3 are respectively located on the first main surface 1a side and the second main surface 1b side of the first actuating plate 1. In this embodiment, taking there being one opposed plate 3 and the opposed plate 3 being disposed opposite to the driven part 12 on the second main surface 1b of the first actuating plate 1 as an example, as Figure 3 shown, but not limited thereto.

[0054] In addition, the first piezoelectric sheet 6 joined to the first actuating plate 1 causes the first actuating portion 11 to vibrate under the excitation of an external alternating electric signal. When the first actuating portion 11 vibrates, it transmits the vibration signal to the driven portion 12. Here, the vibration signal refers to the magnitude of vibration energy and the vibration frequency. That is to say, the first actuating portion 11 is formed as an excitation source that stimulates the driven portion 12 to generate vibration. When the natural frequency of the driven portion 12 is the same as the excitation frequency of the excitation source, the driven portion 12 is excited to generate vibration in a resonance mode, having a definite antinode and a node that transmits vibration energy between adjacent antinodes. Further, when the excitation frequency of the excitation source is the same as the frequency corresponding to the higher-order vibration mode of the driven portion 12, the driven portion 12 is excited to generate vibration in a higher-order resonance mode with at least two antinodes. The driven portion 12 generates vibration in the thickness direction, perpendicular to the elongation direction of the first actuating plate 1.

[0055] When the first actuating portion 11 vibrates under the excitation of an electric signal, it transmits the vibration signal to the driven portion 12 to cause the driven portion 12 to generate vibration in a higher-order resonance mode with at least two antinodes. The vibration in the higher-order resonance mode generated by the driven portion 12 can be, but is not limited to, vibration in a second-order resonance mode, a third-order resonance mode, a fourth-order resonance mode, a fifth-order resonance mode, a sixth-order resonance mode, a seventh-order resonance mode, an eighth-order resonance mode, or a ninth-order resonance mode. At least one hole portion 5 is formed in the counter plate 3 or / and in the adjacent region of at least one first antinode position 8 or the first antinode position 8 where the driven portion 12 vibrates. The adjacent region of the first antinode position 8 refers to the region within the interval between the node position where the driven portion 12 vibrates and the first antinode position 8, close to the side where the first antinode position 8 is located but not including the first antinode position 8.

[0056] In this embodiment, it is not limited that at least one hole portion 5 penetrates through the counter plate 3 or / and in the adjacent region of at least one first antinode position 8 or the first antinode position 8 where the driven portion 12 vibrates. It can also be that at least one hole portion 5 penetrates through the counter plate 3 or / and in the adjacent regions of at least two first antinode positions 8A or the first antinode position 8 where the driven portion 12 vibrates respectively. It can also be that at least one hole portion 5 penetrates through the counter plate 3 or / and in the adjacent regions of each first antinode position 8 or the first antinode position 8 where the driven portion 12 vibrates respectively.

[0057] The vibration in the higher-order resonance mode generated by the driven portion 12 can be a vibration in a higher-order resonance mode other than the centrosymmetric vibration mode. For example, when the driven portion 12 vibrates in a second-order resonance mode, there are two antinodes distributed along the elongation direction of the driven portion 12, as Figures 4-5 shown, at Figure 4 and Figure 5In the figure, the symbol "+" indicates that the driven part 12 bulges and deforms toward the side where the first main surface 1a of the first actuating plate 1 is located, and the symbol "-" indicates that the driven part 12 bulges and deforms toward the side where the second main surface 1b of the first actuating plate 1 is located. The differences between adjacent two-dot dash lines respectively represent the regions where the first antinode positions 8 are located; when the driven part 12 vibrates in the third-order resonance mode, there are three antinodes distributed along the elongation direction of the driven part 12, as Figures 6-7 shown.

[0058] During operation, the first piezoelectric sheet 6 causes the first actuating part 11 to vibrate under the excitation of an electrical signal, and transmits the vibration signal to the driven part 12, so as to cause the driven part 12 to generate vibrations in a high-order resonance mode with at least two antinodes. The hole parts 5 formed at the positions corresponding to the first antinode position 8 or the adjacent regions of the first antinode position 8 on the opposed plate 3 or / and the driven part 12 respectively inhale and discharge gas independently during the working process. When the region where the hole part 5 is located deforms toward one side in the thickness direction of the first actuating plate 1 (equivalent to the region where the hole part 5 is located deforms toward the side where the first main surface 1a of the first actuating plate 1 is located), the local volume of the gap 4 corresponding to the region of the hole part 5 becomes larger, and the pressure decreases. External gas enters the gap 4 along the hole part 5, as Figure 8 shown; when the region where the hole part 5 is located deforms toward the other side in the thickness direction of the first actuating plate 1 (equivalent to the region where the hole part 5 is located deforms toward the side where the second main surface 1b of the first actuating plate 1 is located), the local volume of the gap 4 corresponding to the region of the hole part 5 becomes smaller, and the pressure increases. The gas inhaled into the gap 4 in the previous process is discharged along the hole part 5 and has a certain momentum. The gas with a certain momentum forms a jet after spraying out of the hole part 5, and can entrain the surrounding fluid, further increasing the output flow rate, as Figure 9 shown, and so on.

[0059] It should be noted that in this structure, the height of the gap 4 formed between the driven part 12 and the opposed plate 3 along the thickness direction of the first actuating plate 1 can be greater than the maximum deformation displacement of the driven part 12 during vibration, so as to avoid interference between the driven part 12 and the opposed plate 3 during vibration and make full use of the vibration energy. In addition, in this structure, if the height of the gap 4 is too large, the pressure and flow rate of the gas discharged from the hole part 5 will decrease, which will affect the formation of the jet, and even the jet cannot be formed, and thus the surrounding fluid cannot be entrained, resulting in a decrease in the final output flow rate. Preferably, the height of the gap 4 is not greater than 10 times the maximum deformation displacement of the driven part 12 during vibration.

[0060] During the vibration of the driven part 12 in this embodiment, the effective volume of the region of the gap 4 that faces any first antinode position 8 of the vibration of the driven part 12 or the adjacent region of the first antinode position 8 periodically expands and contracts. The hole parts 5 provided on the opposing plate 3 and / or the driven part 12 that face any first antinode position 8 of the vibration of the driven part 12 or the adjacent region of the first antinode position 8 respectively and independently suck in and discharge gas. During the discharge stroke, the gas is squeezed, so that the air flow finally ejected from the hole part 5 has a relatively high wind pressure and can maintain a large air volume.

[0061] In addition, the hole part 5 serving as the air outlet is provided in the thickness direction of the driven part 12 and / or the opposing plate 3, so that the high-order vibration fan of the present invention can form a pressure air flow along the thickness direction of the first actuating plate 1, which is beneficial to the application in application scenarios where ventilation and cooling effects are required by forming a pressure air flow along the thickness direction of the first actuating plate 1.

[0062] Embodiment 2

[0063] The structural principle of this embodiment is basically the same as that of Embodiment 1, the difference is that: as Figure 10 shown, it further includes a second actuating plate 2. The second actuating plate 2 includes at least one second actuating part 21, and at least one second piezoelectric sheet 7 is provided on one side or both sides of the second actuating part 21 in the thickness direction of the second actuating plate 2;

[0064] The second actuating plate 2 is provided with at least one second piezoelectric sheet 7, and at least one second piezoelectric sheet 7 is joined to one side or both sides in the thickness direction of the second actuating part 21. The second piezoelectric sheet 7 can be a piezoelectric ceramic sheet. It can be that a single second piezoelectric sheet 7 is joined to one side surface of the second actuating part 21 to form a single-crystal wafer second actuating part 21; it can also be that two second piezoelectric sheets 7 are respectively joined to the two side surfaces of the second actuating part 21 to form a double-crystal wafer second actuating part 21; it can also be that multiple second piezoelectric sheets 7 are joined to one side or both side surfaces of the second actuating part 21 to form a composite-type second actuating part 21. In this embodiment, a single second piezoelectric sheet 7 joined to one side surface of the second actuating part 21 is used for illustration, but not limited thereto. The second piezoelectric sheet 7 causes the second actuating part 21 to generate bending vibration under the excitation of an external electrical signal;

[0065] One end of the second actuating part 21 is fixed to form a third fixed end 21-1, and the other end is suspended to form a second free end 21-2. The two ends of the second actuating plate 2 in the extending direction from the third fixed end 21-1 to the second free end 21-2 are respectively the third fixed end 21-1 and the fourth fixed end 3-2. One end of the opposing plate 3 is formed as a second connection end 3-1 connected to the second free end 21-2, and the other end is fixed to form a fourth fixed end 3-2;

[0066] The opposing plate 3 is configured to be more deformable than the second actuating portion 21. This difference can be achieved in the following ways, including but not limited to: First, the second actuating portion 21 and the opposing plate 3 can be made of different materials. For example, when stainless steel or invar is used to form the second actuating portion 21, a polymer material or a polymer, or a composite material composed of a polymer material and a metal material or other materials can be used to form the opposing plate 3. Second, the structural dimension parameters such as the thickness and width of the second actuating portion 21 and the opposing plate 3 can be adjusted. For example, when the second actuating portion 21 and the opposing plate 3 are made of the same metal material, the thickness of the opposing plate 3 can be designed to be smaller or much smaller than that of the second actuating portion 21. Third, the whole or part of the second actuating portion 21 or / and the opposing plate 3 can be further processed. For example, a non-uniform material with local weakening can be used to form the opposing plate 3. Of course, the above methods can be combined to achieve the purpose of making the opposing plate 3 more easily deformed than the second actuating portion 21.

[0067] When the second piezoelectric sheet 7 drives the second actuating portion 21 to vibrate, the second actuating portion 21 transmits the vibration signal to the opposing plate 3, causing the opposing plate 3 to generate vibrations in a higher-order resonance mode. The vibration generated by the opposing plate 3 has the same vibration mode as the vibration generated by the driven portion 12 and has a phase difference of 90° to 180°. Preferably, the vibration generated by the opposing plate 3 has a phase difference of 180° from the vibration generated by the driving portion, so that the first antinode position 8 of the vibration of the driven portion 12 or the adjacent region of the first antinode position 8 is directly opposite to the second antinode position of the vibration of the opposing plate 3 or the adjacent region of the second antinode position. The adjacent region of the second antinode position refers to the region within the interval between the node position and the second antinode position of the vibration of the opposing plate 3, which is close to the side where the second antinode position is located but does not include the second antinode position. Due to the existence of the phase difference, a larger volume change can occur in the region between the first antinode position 8 of the driven portion 12 or the adjacent region of the first antinode position 8 and the corresponding second antinode position of the opposing plate 3 in the gap 4. More gas is inhaled and discharged through the hole portion 5. When the gas flows into the gap 4, a stronger squeezing effect will be generated, thereby further increasing the gas pressure and flow rate in the final ejection channel.

[0068] Embodiment 3

[0069] The structural principle of this embodiment is basically the same as that of Embodiment 1 and Embodiment 2, except that, as Figure 11 shown, there is one opposing plate 3. One end of the opposing plate 3 is formed as a second connecting end portion 3-1, and the other end is fixedly formed as a fourth fixed end portion 3-2;

[0070] The first free end portion 11-2 is joined to the first connecting end portion 12-1 on one surface in the thickness direction of the first actuating portion 11; the first free end portion 11-2 is joined to the second connecting end portion 3-1 on the other surface in the thickness direction of the first actuating portion 11; the opposing plate 3 is configured to be more deformable than the first actuating portion 11. When the first piezoelectric sheet 6 drives the first actuating portion 11 to vibrate, the first actuating portion 11 transmits the vibration signal to the driven portion 12 and the opposing plate 3, causing the driven portion 12 and the opposing plate 3 to respectively generate vibrations in a higher-order resonance mode with at least two antinodes. The vibration generated by the opposing plate 3 has the same vibration mode as the vibration generated by the first actuating portion 11 and has a phase difference of 90° to 180°. Preferably, the vibration generated by the opposing plate 3 has a phase difference of 180° from the vibration generated by the driven portion 12, such that the first antinode position 8 of the vibration of the driven portion 12 or the adjacent region of the first antinode position 8 is directly opposite to the first antinode position 8 of the vibration of the opposing plate 3 or the adjacent region of the first antinode position 8;

[0071] In this embodiment, the driven portion 12 and the opposing plate 3 are simultaneously excited by the first actuating portion 11. The driven portion 12 and the opposing plate 3 are both joined to the first free end portion 11-2 of the first actuating portion 11, and the structure is more compact. Due to the existence of the phase difference, a larger volume change can occur in the region between the first antinode position 8 of the driven portion 12 or the adjacent region of the first antinode position 8 and the corresponding second antinode position of the opposing plate 3 or the adjacent region of the second antinode position within the gap 4. More gas is inhaled and discharged through the hole portion 5. When the gas flows into the gap 4, a stronger squeezing effect will be generated, thereby further increasing the gas pressure and flow rate of the final ejection channel.

[0072] Based on the inspiration of the ideal embodiment of the present invention described above, through the above description, relevant workers can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A high-order vibration fan, characterized in that: It comprises a first actuating plate (1) and an opposing plate (3); The first actuating plate (1) comprises at least one first actuating portion (11) and at least one driven portion (12); the first actuating portion (11) is provided with at least one first piezoelectric sheet (6) on one side or both sides in the thickness direction of the first actuating plate (1); one end of the first actuating portion (11) is fixed to form a first fixed end portion (11-1), and the other end is suspended to form a first free end portion (11-2); the two ends of the first actuating plate (1) in the extension direction from the first fixed end portion (11-1) to the first free end portion (11-2) are respectively the first fixed end portion (11-1) and the second fixed end portion (12-2); one end of the driven portion (12) is formed as a first connecting end portion (12-1) connected to the first free end portion (11-2), and the other end is fixed to form a second fixed end portion (12-2); At least one opposing plate (3) is provided on one or both sides of the first actuating plate (1) in the thickness direction, opposite to the driven part (12), and a gap (4) is provided between the driven part (12) and the opposing plate (3); When the first piezoelectric sheet (6) drives the first actuating part (11) to vibrate, the first actuating part (11) transmits a vibration signal to the driven part (12), causing the driven part (12) to generate a vibration in a high-order resonance mode having at least two antinodes. A hole (5) communicating with the gap (4) is provided through an area of ​​the opposing plate (3) or / and the driven part (12) that is opposite to at least one first antinode position (8) of the vibrating driven part (12) or an area adjacent to the first antinode position (8).

2. The high-order vibration fan according to claim 1, characterized in that: Holes (5) communicating with the gap (4) are respectively penetrated in the opposing plate (3) or / and the driven part (12) in areas opposite to at least two first antinode positions (8) of vibration of the driven part (12) or areas adjacent to the first antinode positions (8).

3. The high-order vibration fan according to claim 1, characterized in that: A hole portion (5) communicating with the gap (4) is respectively penetrated through an area of ​​the opposing plate (3) or / and the driven part (12) that is opposite to each first antinode position (8) of the vibration of the driven part (12) or an area adjacent to the first antinode position (8).

4. The high-order vibration fan according to claim 1, characterized in that: The driven portion (12) is configured to be more easily deformed than the first actuating portion (11).

5. The high-order vibration fan according to any one of claims 1 to 4, characterized in that: The invention also comprises a second actuating plate (2), wherein the second actuating plate (2) comprises at least one second actuating portion (21), wherein the second actuating portion (21) is provided with at least one second piezoelectric sheet (7) on one side or both sides in the thickness direction of the second actuating plate (2), wherein one end of the second actuating portion (21) is fixed to form a third fixed end portion (21-1), and the other end is suspended to form a second free end portion (21-2), and the two ends of the second actuating plate (2) in the extension direction from the third fixed end portion (21-1) to the second free end portion (21-2) are respectively the third fixed end portion (21-1) and a fourth fixed end portion (3-2), and one end of the opposing plate (3) is formed as a second connecting end portion (3-1) connected to the second free end portion (21-2), and the other end is fixed to form a fourth fixed end portion (3-2); When the second piezoelectric sheet (7) drives the second actuating part (21) to vibrate, the second actuating part (21) transmits a vibration signal to the opposing plate (3), causing the opposing plate (3) to generate vibrations in a high-order resonance mode. The vibration generated by the opposing plate (3) has the same vibration mode as the vibration generated by the driven part (12), and has a phase difference of 90° to 180°.

6. The high-order vibration fan according to claim 5, characterized in that: The vibration generated by the opposing plate (3) and the vibration generated by the driven part (12) have the same vibration mode and have a phase difference of 180°, so that the first antinode position (8) of the vibration of the driven part (12) or the adjacent area of ​​the first antinode position (8) is directly opposite to the second antinode position of the vibration of the opposing plate (3) or the adjacent area of ​​the second antinode position.

7. The high-order vibration fan according to claim 5, characterized in that: The opposing plate (3) is configured to be more easily deformed than the second actuating portion (21).

8. The high-order vibration fan according to any one of claims 1 to 4, characterized in that: There is one opposing plate (3), one end of which is formed as a second connecting end portion (3-1), and the other end of which is fixedly formed as a fourth fixed end portion (3-2); One side surface of the first free end portion (11-2) in the thickness direction of the first actuating portion (11) is joined to the first connecting end portion (12-1); the other side surface of the first free end portion (11-2) in the thickness direction of the first actuating portion (11) is joined to the second connecting end portion (3-1); When the first piezoelectric sheet (6) drives the first actuating part (11) to vibrate, the first actuating part (11) transmits a vibration signal to the driven part (12) and the opposing plate (3), causing the driven part (12) and the opposing plate (3) to respectively generate vibrations in a high-order resonance mode having at least two wave nodes, wherein the vibration generated by the opposing plate (3) has the same vibration mode shape as the vibration generated by the driven part (12) and has a phase difference of 90° to 180°.

9. The high-order vibration fan according to claim 8, characterized in that: The vibration generated by the opposing plate (3) and the vibration generated by the driven part (12) have the same vibration mode and have a phase difference of 180°, so that the first antinode position (8) of the vibration of the driven part (12) or the adjacent area of ​​the first antinode position (8) is directly opposite to the second antinode position of the vibration of the opposing plate (3) or the adjacent area of ​​the second antinode position.

10. The high-order vibration fan according to claim 8, characterized in that: The opposing plate (3) is configured to be more easily deformed than the first actuating portion (11).

11. The high-order vibration fan according to claim 1, characterized in that: The driven part (12) is made of a polymer material, or a composite material consisting of a polymer material and a metal material.

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