Higher order vibratory fan

Abstract

The application relates to the technical field of heat dissipation devices, in particular to a high-order vibration fan which comprises a first actuating plate and an opposite plate; the first actuating plate comprises at least one first actuating part and at least one driven part, the first actuating plate is fixed at both ends in the extension direction from a first fixed end part to a first free end part, the first piezoelectric sheet can promote the driven part to generate a high-order resonance mode vibration with at least two wave nodes through the first actuating part, and the hole parts independently inhale and discharge gas during the vibration of the driven part or the driven part and the opposite plate; during the discharge stroke, the gas is extruded, so that the airflow finally sprayed by the hole parts has a high wind pressure and can maintain a large air volume; moreover, the application forms a pressure airflow along the thickness direction of the driven part, which is beneficial to the application in the application scene which needs to form a pressure airflow along the thickness direction of the first actuating plate to generate the effects of ventilation and cooling.

Description

Technical Field

[0001] This invention relates to the field of heat dissipation device technology, and more particularly to a high-order vibration fan. Background Technology

[0002] A cantilevered piezoelectric fan has a single blade or a group of blades arranged in an array. One end of the blade is fixed, and the other end is suspended. A piezoelectric ceramic plate is fixed on the blade near the fixed end. Due to the inverse piezoelectric effect of the piezoelectric material, an alternating electrical signal acts on the piezoelectric ceramic plate, causing it to elongate and contract geometrically, thus inducing bending vibration of the blade. In the resonant state, the amplitude of the suspended end of the blade increases significantly, thereby outputting a high-speed, directional, and stable airflow, producing ventilation and cooling effects. Examples include Chinese patent application CN101222832A and US patent application US9705067B2, both of which are piezoelectric-driven micro-volume fans of this structural type.

[0003] However, although this type of piezoelectric fan can generate a large directional airflow in the resonant state, the fan blades are completely exposed to the environment, which cannot compress the air and results in extremely low air pressure. Since the fan is usually installed in a small space inside the terminal, the air flow must overcome flow resistance. The extremely low air pressure makes it difficult to maintain a large airflow, so the effective airflow that actually acts on the heat source is not large, and the heat dissipation effect is limited. In addition, due to the limitations of the structural principle, this type of fan can only generate directional airflow along the extension direction of the cantilever, which is not suitable for application scenarios that require the formation of pressurized airflow along the thickness direction of the cantilever to achieve ventilation and cooling effects. Summary of the Invention

[0004] The technical problem to be solved by the present invention is: in order to solve the problem that the low air pressure of the existing cantilever piezoelectric fan makes it difficult to maintain a large air volume and also makes it difficult to form a pressure airflow along the thickness direction of the cantilever, a high-order vibration fan is provided.

[0005] The technical solution adopted by the present invention to solve its technical problem is: a high-order vibration fan, including a first actuator plate and an opposing plate;

[0006] The first actuating plate includes at least one first actuating part and at least one driven part. The first actuating part is provided with at least one first piezoelectric sheet on one or both sides in the thickness direction of the first actuating plate. One end of the first actuating part is fixed to form a first fixed end, and the other end is suspended to form a first free end. The two ends of the first actuating plate in the extension direction from the first fixed end to the first free end are the first fixed end and the second fixed end, respectively. One end of the driven part is formed to form a first connecting end connected to the first free end, and the other end is fixed to form a second fixed end.

[0007] At least one opposing plate is provided on one or both sides of the first actuating plate in the thickness direction opposite to the driven part, and there is a gap between the driven part and the opposing plate;

[0008] When the first piezoelectric element drives the first actuator to vibrate, the first actuator transmits the vibration signal to the driven part, causing the driven part to generate a high-order resonance mode vibration with at least two antinodes. A hole communicating with the gap is provided in the region of the opposing plate or / and the driven part opposite to at least one first antinode position or the adjacent region of the first antinode position of the driven part vibration.

[0009] Furthermore, holes communicating with the gap are respectively provided in the regions of the opposing plate and / or the driven part that are opposite to at least two first antinode positions or adjacent regions of the first antinode positions of the driven part vibration.

[0010] Furthermore, holes communicating with the gap are respectively provided in the regions of the opposing plate and / or the driven part that are opposite to each first antinode position or the adjacent region of the first antinode position of the vibration of the driven part.

[0011] Furthermore, the driven part is configured to be more deformable than the first actuating part.

[0012] The scheme for achieving high-order resonance mode vibration of the opposing plate through the second actuation plate is as follows: it further includes a second actuation plate, the second actuation plate includes at least one second actuation part, the second actuation part is provided with at least one second piezoelectric sheet on one or both sides of the thickness direction of the second actuation plate, one end of the second actuation part is fixed to form a third fixed end, and the other end is suspended to form a second free end, the two ends of the second actuation plate in the extension direction from the third fixed end to the second free end are respectively the third fixed end and the fourth fixed end, one end of the opposing plate is formed to form a second connecting end connected to the second free end, and the other end is fixed to form a fourth fixed end;

[0013] When the second piezoelectric element drives the second actuator to vibrate, the second actuator transmits the vibration signal to the opposing plate, causing the opposing plate to vibrate in a higher-order resonance mode. The vibration generated by the opposing plate has the same mode shape as the vibration generated by the driven part, and has a phase difference of 90° to 180°.

[0014] Furthermore, the vibration generated by the opposing plate has the same mode shape as the vibration generated by the driven part, and has a phase difference of 180°, such that the first antinode position or the adjacent region of the first antinode position of the driven part vibration is directly opposite the second antinode position or the adjacent region of the second antinode position of the opposing plate vibration.

[0015] Furthermore, the opposing plate is configured to be more easily deformable than the second actuating part.

[0016] A scheme to enable the opposing plate to vibrate in a higher-order resonance mode by means of a first actuating plate, wherein there is one opposing plate, one end of the opposing plate is formed as a second connecting end, and the other end is fixedly formed as a fourth fixed end;

[0017] The first free end portion engages with the first connecting end portion on one side surface in the thickness direction of the first actuating part; the first free end portion engages with the second connecting end portion on the other side surface in the thickness direction of the first actuating part.

[0018] When the first piezoelectric element drives the first actuator to vibrate, the first actuator transmits the vibration signal to the driven part and the opposing plate, causing the driven part and the opposing plate to generate vibrations with at least two antinodes in a higher-order resonance mode. The vibration generated by the opposing plate is the same as the vibration mode generated by the driven part, and has a phase difference of 90° to 180°.

[0019] Furthermore, the vibration generated by the opposing plate has the same mode shape as the vibration generated by the driven part, and has a phase difference of 180°, such that the first antinode position or the adjacent region of the first antinode position of the driven part vibration is directly opposite the second antinode position or the adjacent region of the second antinode position of the opposing plate vibration.

[0020] Furthermore, the opposing plate is configured to be more deformable than the first actuating part.

[0021] Furthermore, the driven part is made of a polymer material or a composite material composed of a polymer material and a metal material.

[0022] The beneficial effects of this invention are:

[0023] 1) The high-order vibration fan of the present invention is fixed at both ends of the first actuating plate in the extension direction from the first fixed end to the first free end, so that the first piezoelectric sheet can cause the driven part to generate a high-order resonance mode vibration with at least two antinodes through the first actuating part. A hole with a communicating gap is provided in the region of the opposing plate or / and the driven part opposite to the first antinode position or the adjacent region of the first antinode position of the driven part vibration. During the vibration of the driven part or the driven part and the opposing plate, the effective volume of the region of the gap opposite to the adjacent region of the first antinode position of the driven part vibration periodically expands and shrinks. The holes provided on the opposing plate or / and the driven part opposite to the first antinode position or the adjacent region of the first antinode position of the driven part vibration are respectively independently drawn in and discharged. During the discharge stroke, the gas is compressed, so that the airflow finally ejected from the holes has a high wind pressure and can maintain a large air volume.

[0024] 2) The high-order vibration fan of the present invention has an air outlet hole provided in the thickness direction of the driven part and / or the opposing plate, so that the high-order vibration fan of the present invention can form a pressurized airflow along the thickness direction of the driven part, which is beneficial for applications that require the formation of a pressurized airflow along the thickness direction of the first actuating plate to produce ventilation and cooling effects.

[0025] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0027] Figure 1 This is a top view of the first actuation plate in this invention;

[0028] Figure 2 This is a front view schematic diagram of the first actuation plate in this invention;

[0029] Figure 3 This is a cross-sectional schematic diagram of the high-order vibration fan in Example 1;

[0030] Figure 4 This is a schematic diagram showing the driven part deforming in one direction when it vibrates in a second-order resonance mode;

[0031] Figure 5 This is a schematic diagram showing the driven part deforming in another direction when it vibrates in a second-order resonance mode;

[0032] Figure 6 This is a schematic diagram showing the driven part deforming in one direction when it vibrates in a third-order resonance mode;

[0033] Figure 7 This is a schematic diagram showing the driven part deforming in another direction when it vibrates in a third-order resonance mode;

[0034] Figure 8 This is a schematic diagram showing that each orifice independently draws in fluid during operation.

[0035] Figure 9 This is a schematic diagram showing that each orifice discharges fluid relatively independently during the working process;

[0036] Figure 10 This is a schematic diagram of the high-order vibration fan in Example 2;

[0037] Figure 11 This is a schematic diagram of the high-order vibration fan in Example 3.

[0038] In the figure: 1, first actuating plate; 11, first actuating part; 11-1, first fixed end; 11-2, first free end; 12, driven part; 12-1, first connecting end; 12-2, second fixed end; 1a, first main surface; 1b, second main surface;

[0039] 2. Second actuating plate; 21. Second actuating part; 21-1. Third fixed end; 21-2. Second free end;

[0040] 3. Opposing plate, 3-1. Second connecting end, 3-2. Fourth fixing end;

[0041] 4. Gap;

[0042] 5. Hole section;

[0043] 6. First piezoelectric element;

[0044] 7. Second piezoelectric element;

[0045] 8. Location of the first wave of the abdomen. Detailed Implementation

[0046] The invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention in a schematic manner. Therefore, they only show the components relevant to the invention, and the orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be limiting, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0047] Example 1

[0048] like Figures 1-4 As shown, a high-order vibration fan includes a first actuator plate 1 and an opposing plate 3;

[0049] The first actuating plate 1 has a first main surface 1a and a second main surface 1b arranged opposite to each other along the thickness direction. The first actuating plate 1 includes at least one first actuating part 11 and at least one driven part 12. The first actuating part 11 is provided with at least one first piezoelectric sheet 6 on one or both sides of the first actuating plate 1 in the thickness direction. The first piezoelectric sheet 6 can be a piezoelectric ceramic sheet. It can be a single piezoelectric ceramic sheet bonded to one side surface of the first actuating part 11 to form a single crystal first actuating part 11; it can also be two piezoelectric ceramic sheets bonded to the two sides surface of the first actuating part 11 respectively to form a double crystal first actuating part 11; it can also be multiple piezoelectric ceramic sheets bonded to one or both sides surface of the first actuating part 11 to form a composite type of first actuating part 11. In this embodiment, a single piezoelectric ceramic sheet bonded to one side surface of the first actuating part 11 is used for illustration, but it is not limited to this. The piezoelectric ceramic sheet causes the first actuating part 11 to vibrate under the excitation of an external electrical signal.

[0050] One end of the first actuating part 11 is fixed to form a first fixed end 11-1, and the other end is suspended to form a first free end 11-2. The first actuating plate 1 has two ends in the extension direction from the first fixed end 11-1 to the first free end 11-2, which are respectively the first fixed end 11-1 and the second fixed end 12-2. One end of the driven part 12 is formed as a first connecting end 12-1 connected to the first free end 11-2, and the other end is fixed to form a second fixed end 12-2. That is, the driven part 12 is engaged with the first actuating part 11 in the extension direction from the first fixed end 11-1 to the first free end 11-2. The connection between the first connecting end 12-1 of the driven part 12 and the first free end 11-2 of the first actuating part 11 can be achieved by welding, bonding, riveting, etc. Of course, the first actuating part 11 and the driven part 12 can also be integrally formed; this is not limited here. Figures 1-2 As shown.

[0051] The driven part 12 is constructed to be more deformable than the first actuating part 11, meaning that the bending stiffness of the driven part 12 is smaller than that of the first actuating part 11. This makes the driven part 12 more easily excited and vibrates. This difference in mode can be achieved in several ways, including but not limited to the following: First, the first actuating part 11 and the driven part 12 can be constructed using different materials. For example, when stainless steel or nickel-iron alloy is used to construct the first actuating part 11, a polymer material or a composite material of polymer and other materials can be used to construct the driven part 12; Second, Firstly, the structural dimensions such as the thickness and width of the first actuating part 11 and the driven part 12 can be adjusted. For example, when the first actuating part 11 and the driven part 12 are made of the same metal material, the thickness of the driven part 12 can be designed to be smaller or much smaller than that of the first actuating part 11. Secondly, the entire or part of the first actuating part 11 and / or the driven part 12 can be deeply processed. For example, the driven part 12 can be made of a non-homogeneous material with local weakening. Of course, the above methods can be combined to achieve the purpose of forming the driven part 12 into a mode that is more prone to deformation than the first actuating part 11.

[0052] There is at least one opposing plate 3. At least one opposing plate 3 is provided on one or both sides of the first actuating plate 1 in the thickness direction opposite to the driven part 12. There is a gap 4 between the driven part 12 and the opposing plate 3. When the first piezoelectric sheet 6 drives the first actuating part 11 to vibrate, the first actuating part 11 transmits the vibration signal to the driven part 12, causing the driven part 12 to generate a high-order resonance mode vibration with at least two antinodes. A hole 5 with a connecting gap 4 is provided in the area of ​​the opposing plate 3 or / and the driven part 12 opposite to at least one first antinode position 8 of the driven part 12 or the adjacent area of ​​the first antinode position 8.

[0053] In this embodiment, there can be one opposing plate 3, disposed opposite to the driven part 12 on one side of the first actuating plate 1, that is, the opposing plate 3 and the driven part 12 are disposed opposite to each other on the first main surface 1a or the second main surface 1b of the first actuating plate 1; there can also be multiple opposing plates 3, such as two, disposed opposite to the driven part 12 on both sides of the first actuating plate 1, that is, the two opposing plates 3 are respectively located on the first main surface 1a and the second main surface 1b of the first actuating plate 1; in this embodiment, the opposing plate 3 is described as one, and the opposing plate 3 and the driven part 12 are disposed opposite to each other on the second main surface 1b of the first actuating plate 1, as follows. Figure 3 As shown, but not limited to.

[0054] Furthermore, the first piezoelectric sheet 6 attached to the first actuating plate 1 is excited by an external alternating electrical signal, causing the first actuating part 11 to vibrate. When the first actuating part 11 vibrates, it transmits a vibration signal to the driven part 12. Here, the vibration signal refers to the magnitude of the vibration energy and the vibration frequency. That is, the first actuating part 11 is formed as an excitation source to excite the driven part 12 to vibrate. When the natural frequency of the driven part 12 is the same as the excitation frequency of the excitation source, the driven part 12 is excited to generate a resonance mode vibration, which has defined antinodes and nodes that transmit vibration energy between adjacent antinodes. Further, when the excitation frequency of the excitation source is the same as the frequency corresponding to the higher-order vibration mode of the driven part 12, the driven part 12 is excited to generate a higher-order resonance mode vibration with at least two antinodes. The driven part 12 generates vibration along the thickness direction, which is perpendicular to the elongation direction of the first actuating plate 1.

[0055] When the first actuator 11 vibrates under the excitation of an electrical signal, it transmits the vibration signal to the driven part 12 to cause the driven part 12 to generate a higher-order resonance mode with at least two antinodes. The higher-order resonance mode generated by the driven part 12 can be, but is not limited to, a second-order resonance mode, a third-order resonance mode, a fourth-order resonance mode, a fifth-order resonance mode, a sixth-order resonance mode, a seventh-order resonance mode, an eighth-order resonance mode, or a ninth-order resonance mode. At least one hole 5 is formed in the opposing plate 3 and / or the region adjacent to at least one first antinode position 8 of the driven part 12. The region adjacent to the first antinode position 8 refers to the region near the side where the first antinode position 8 is located but not included in the first antinode position 8 within the interval between the node position of the driven part 12 and the first antinode position 8.

[0056] In this embodiment, it is not limited to having at least one hole 5 penetrating at least one first antinode position 8 or adjacent region of the opposing plate 3 or / and the driven part 12 vibrating with the driven part 12; it is also possible to have at least one hole 5 penetrating at least two first antinode positions 8A or adjacent regions of the opposing plate 3 or / and the driven part 12 vibrating with the driven part 12; or it is possible to have at least one hole 5 penetrating at each first antinode position 8 or adjacent region of the opposing plate 3 or / and the driven part 12 vibrating with the driven part 12.

[0057] The vibration of the higher-order resonance mode generated by the driven part 12 can be a higher-order resonance mode other than the centrosymmetric vibration mode; for example, when the driven part 12 vibrates in a second-order resonance mode, there are two antinodes distributed along the elongation direction of the driven part 12, such as Figures 4-5 As shown, in Figure 4 and Figure 5The symbol "+" indicates that the driven part 12 protrudes and deforms towards the side where the first principal surface 1a of the first actuating plate 1 is located, and the symbol "-" indicates that the driven part 12 protrudes and deforms towards the side where the second principal surface 1b of the first actuating plate 1 is located. The difference between two adjacent double-dotted lines respectively indicates the region where the first antinode position 8 is located; when the driven part 12 vibrates in a third-order resonance mode, there are three antinodes distributed along the elongation direction of the driven part 12, such as Figures 6-7 As shown.

[0058] During operation, the first piezoelectric element 6, under the excitation of an electrical signal, causes the first actuating part 11 to vibrate, transmitting the vibration signal to the driven part 12. This causes the driven part 12 to generate a high-order resonance mode vibration with at least two antinodes. The holes 5 formed on the opposing plate 3 and / or the driven part 12 corresponding to the first antinode position 8 or the area adjacent to the first antinode position 8, independently draw in and discharge gas during operation. When the area where the hole 5 is located deforms towards one side of the thickness direction of the first actuating plate 1 (equivalent to when the area where the hole 5 is located deforms towards the side where the first main surface 1a of the first actuating plate 1 is located), the local volume within the gap 4 corresponding to the area of ​​the hole 5 increases, the pressure decreases, and external gas enters the gap 4 along the hole 5. Figure 8 As shown; when the area where the hole 5 is located deforms toward the other side of the thickness direction of the first actuating plate 1 (equivalent to when the area where the hole 5 is located deforms toward the side where the second main surface 1b of the first actuating plate 1 is located), the local volume of the area corresponding to the hole 5 in the gap 4 decreases, the pressure increases, and the gas that was sucked into the gap 4 in the previous process is discharged along the hole 5, and has a certain momentum. After the gas with a certain momentum is ejected from the hole 5, it forms a jet and can entrain the surrounding fluid, further increasing the output flow rate, such as Figure 9 As shown, this process repeats.

[0059] It should be noted that, under this structure, the height of the gap 4 formed between the driven part 12 and the opposing plate 3 along the thickness direction of the first actuating plate 1 can be greater than the maximum deformation displacement of the driven part 12 during vibration, so as to avoid interference between the driven part 12 and the opposing plate 3 during vibration and to make full use of vibration energy. In addition, under this structure, if the height of the gap 4 is too large, it will cause the gas pressure and flow rate discharged from the hole 5 to decrease, which will affect the formation of the jet, or even prevent the formation of the jet, and thus prevent the entrainment of the surrounding fluid, resulting in a decrease in the final output flow rate. Preferably, the height of the gap 4 is not greater than 10 times the maximum deformation displacement of the driven part 12 during vibration.

[0060] In this embodiment, during the vibration of the driven part 12, the effective volume of the area of ​​the gap 4 opposite to any first antinode position 8 or the adjacent area of ​​the first antinode position 8 of the driven part 12 vibrates periodically expands and shrinks. The holes 5 provided on the opposing plate 3 and / or the driven part 12 opposite to any first antinode position 8 or the adjacent area of ​​the first antinode position 8 of the driven part 12 vibrates independently draw in and discharge gas. During the discharge stroke, the gas is compressed, so that the airflow finally ejected from the holes 5 has a high wind pressure and can maintain a large air volume.

[0061] In addition, the hole 5, which serves as the air outlet, is provided in the thickness direction of the driven part 12 and / or the opposing plate 3, so that the high-order vibration fan of the present invention can form a pressurized airflow along the thickness direction of the first actuating plate 1, which is beneficial for applications that require the formation of a pressurized airflow along the thickness direction of the first actuating plate 1 to generate ventilation and cooling effects.

[0062] Example 2

[0063] This embodiment is basically the same in structure and principle as Embodiment 1, the difference being: Figure 10 As shown, it also includes a second actuation plate 2, which includes at least one second actuation part 21. The second actuation part 21 is provided with at least one second piezoelectric sheet 7 on one or both sides of the second actuation plate 2 in the thickness direction.

[0064] The second actuation plate 2 is provided with at least one second piezoelectric sheet 7. At least one second piezoelectric sheet 7 is attached to one or both sides of the second actuation part 21 in the thickness direction. The second piezoelectric sheet 7 can be a piezoelectric ceramic sheet. It can be a single second piezoelectric sheet 7 attached to one side surface of the second actuation part 21 to form a single-crystal second actuation part 21; it can also be two second piezoelectric sheets 7 respectively attached to the two side surfaces of the second actuation part 21 to form a double-crystal second actuation part 21; it can also be multiple second piezoelectric sheets 7 attached to one or both side surfaces of the second actuation part 21 to form a composite type of second actuation part 21. In this embodiment, a single second piezoelectric sheet 7 is attached to one side surface of the second actuation part 21 for description, but it is not limited to this. The second piezoelectric sheet 7 causes the second actuation part 21 to bend and vibrate under the excitation of an external electrical signal.

[0065] One end of the second actuating part 21 is fixed to form a third fixed end 21-1, and the other end is suspended to form a second free end 21-2. The two ends of the second actuating plate 2 in the extension direction from the third fixed end 21-1 to the second free end 21-2 are the third fixed end 21-1 and the fourth fixed end 3-2, respectively. One end of the opposing plate 3 is formed to form a second connecting end 3-1 connected to the second free end 21-2, and the other end is fixed to form a fourth fixed end 3-2.

[0066] The opposing plate 3 is constructed to be more easily deformable than the second actuating part 21. This difference can be achieved in several ways, including but not limited to the following: First, the second actuating part 21 and the opposing plate 3 can be constructed using different materials. For example, when stainless steel or nickel-iron alloy is used to construct the second actuating part 21, a polymer material or a composite material composed of polymer, metal, or other materials can be used to construct the opposing plate 3. Second, the structural dimensional parameters such as the thickness and width of the second actuating part 21 and the opposing plate 3 can be controlled. For example, when the second actuating part 21 and the opposing plate 3 are made of the same metal material, the thickness of the opposing plate 3 can be designed to be smaller or much smaller than that of the second actuating part 21. Third, the second actuating part 21 and / or the opposing plate 3 can be deeply processed, either as a whole or in parts. For example, a non-homogeneous material with local weakening can be used to construct the opposing plate 3. Of course, the above methods can be combined to achieve the purpose of making the opposing plate 3 more easily deformable than the second actuating part 21.

[0067] When the second piezoelectric element 7 drives the second actuator 21 to vibrate, the second actuator 21 transmits the vibration signal to the opposing plate 3, causing the opposing plate 3 to vibrate in a higher-order resonance mode. The vibration generated by the opposing plate 3 has the same mode shape as the vibration generated by the driven part 12, and has a phase difference of 90° to 180°. Preferably, the vibration generated by the opposing plate 3 has a phase difference of 180° with the vibration generated by the driven part, such that the first antinode position 8 of the driven part 12 or the adjacent area of ​​the first antinode position 8 is directly opposite the second antinode position or the adjacent area of ​​the second antinode position of the opposing plate 3. The near region refers to the area within the interval between the vibration node position of the opposing plate 3 and the second antinode position, which is close to the side where the second antinode position is located but does not include the second antinode position. Due to the existence of the phase difference, the area between the first antinode position 8 or the adjacent area of ​​the first antinode position 8 of the driven part 12 and the corresponding second antinode position or the adjacent area of ​​the second antinode position of the opposing plate 3 can generate a larger volume change. More gas is drawn in and discharged by the orifice 5, and the gas flowing into the gap 4 will generate a stronger squeezing effect, thereby further increasing the gas pressure and flow rate of the final ejection channel.

[0068] Example 3

[0069] This embodiment is basically the same in structure and principle as Embodiments 1 and 2, the difference being that, Figure 11 As shown, there is one opposing plate 3, one end of the opposing plate 3 is formed as the second connecting end 3-1, and the other end is fixedly formed as the fourth fixing end 3-2;

[0070] The first free end 11-2 engages with the first connecting end 12-1 on one side surface in the thickness direction of the first actuating part 11; the first free end 11-2 engages with the second connecting end 3-1 on the other side surface in the thickness direction of the first actuating part 11; the opposing plate 3 is configured to be more deformable than the first actuating part 11. When the first piezoelectric sheet 6 drives the first actuating part 11 to vibrate, the first actuating part 11 transmits the vibration signal to the driven part 12 and the opposing plate 3, causing the driven part 12 and the opposing plate 3 to generate vibrations with at least two antinodes in the higher-order resonance modes, respectively. The vibration generated by the opposing plate 3 is the same as the vibration mode generated by the first actuating part 11 and has a phase difference of 90° to 180°. Preferably, the vibration generated by the opposing plate 3 has a phase difference of 180° with the vibration generated by the driven part 12, so that the first antinode position 8 or the adjacent area of ​​the first antinode position 8 of the driven part 12 is directly opposite to the first antinode position 8 or the adjacent area of ​​the first antinode position 8 of the opposing plate 3.

[0071] In this embodiment, the driven part 12 and the opposing plate 3 are simultaneously excited by the first actuating part 11. Both the driven part 12 and the opposing plate 3 are connected to the first free end 11-2 of the first actuating part 11, making the structure more compact. Due to the existence of the phase difference, the area between the first antinode position 8 of the driven part 12 or the adjacent area of ​​the first antinode position 8 and the corresponding second antinode position or the adjacent area of ​​the second antinode position of the opposing plate 3 can generate a larger volume change. More gas is drawn in and discharged by the orifice 5. The gas flowing into the gap 4 will generate a stronger squeezing effect, thereby further increasing the gas pressure and flow rate of the final ejection channel.

[0072] The above description, based on the preferred embodiments of the present invention, provides inspiration. Those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification but must be determined according to the claims.

Claims

1. A high-order vibration fan, characterized in that: Includes a first actuating plate (1) and an opposing plate (3); The first actuating plate (1) includes at least one first actuating part (11) and at least one driven part (12). The first actuating part (11) has at least one first piezoelectric sheet (6) on one or both sides in the thickness direction of the first actuating plate (1). One end of the first actuating part (11) is fixedly formed as a first fixed end (11-1), and the other end is suspended as a first free end (11-2). The two ends of the first actuating plate (1) in the extension direction from the first fixed end (11-1) to the first free end (11-2) are the first fixed end (11-1) and the second fixed end (12-2), respectively. One end of the driven part (12) is formed as a first connecting end (12-1) connected to the first free end (11-2), and the other end is fixedly formed as a second fixed end (12-2). The first actuating plate (1) has at least one opposing plate (3) on one or both sides in the thickness direction opposite to the driven part (12), and there is a gap (4) between the driven part (12) and the opposing plate (3); When the first piezoelectric element (6) drives the first actuator (11) to vibrate, the first actuator (11) transmits the vibration signal to the driven part (12), causing the driven part (12) to generate a high-order resonance mode vibration with at least two antinodes. A hole (5) communicating with the gap (4) is passed through the area of ​​the opposing plate (3) or / and the driven part (12) opposite to at least one first antinode position (8) of the driven part (12) or the adjacent area of ​​the first antinode position (8).

2. The high-order vibration fan according to claim 1, characterized in that: A hole (5) communicating with the gap (4) is passed through the area of ​​the opposing plate (3) or / and the driven part (12) opposite to the area of ​​the adjacent region of the at least two first antinode positions (8) of the driven part (12) vibrating.

3. The high-order vibration fan according to claim 1, characterized in that: A hole (5) communicating with the gap (4) is passed through the region of the opposing plate (3) or / and the driven part (12) opposite to each first antinode position (8) or adjacent region of the first antinode position (8) of the vibration of the driven part (12).

4. The high-order vibration fan according to claim 1, characterized in that: The driven part (12) is configured to be more deformable than the first actuating part (11).

5. The high-order vibration fan according to any one of claims 1-4, characterized in that: It also includes a second actuating plate (2), which includes at least one second actuating part (21). The second actuating part (21) has at least one second piezoelectric sheet (7) on one or both sides of the thickness direction of the second actuating plate (2). One end of the second actuating part (21) is fixed to form a third fixed end (21-1), and the other end is suspended to form a second free end (21-2). The two ends of the second actuating plate (2) in the extension direction from the third fixed end (21-1) to the second free end (21-2) are respectively the third fixed end (21-1) and the fourth fixed end (3-2). One end of the opposing plate (3) is formed to form a second connecting end (3-1) connected to the second free end (21-2), and the other end is fixed to form a fourth fixed end (3-2). When the second piezoelectric element (7) drives the second actuator (21) to vibrate, the second actuator (21) transmits the vibration signal to the opposing plate (3), causing the opposing plate (3) to generate a high-order resonance mode vibration. The vibration generated by the opposing plate (3) has the same mode shape as the vibration generated by the driven part (12) and has a phase difference of 90° to 180°.

6. The high-order vibration fan according to claim 5, characterized in that: The vibration generated by the opposing plate (3) has the same mode shape as the vibration generated by the driven part (12) and has a phase difference of 180°, such that the first antinode position (8) of the driven part (12) or the adjacent area of ​​the first antinode position (8) is directly opposite to the second antinode position or the adjacent area of ​​the second antinode position of the opposing plate (3).

7. The high-order vibration fan according to claim 5, characterized in that: The opposing plate (3) is configured to be more easily deformable than the second actuating part (21).

8. The high-order vibration fan according to any one of claims 1-4, characterized in that: The opposing plate (3) is one, one end of the opposing plate (3) is formed as a second connecting end (3-1), and the other end is fixedly formed as a fourth fixing end (3-2); The first free end (11-2) engages with the first connecting end (12-1) on one side surface of the first actuating part (11) in the thickness direction; the first free end (11-2) engages with the second connecting end (3-1) on the other side surface of the first actuating part (11) in the thickness direction. When the first piezoelectric element (6) drives the first actuator (11) to vibrate, the first actuator (11) transmits the vibration signal to the driven part (12) and the opposing plate (3), causing the driven part (12) and the opposing plate (3) to generate vibrations with at least two antinodes in the higher-order resonance modes, respectively. The vibration generated by the opposing plate (3) is the same as the vibration mode generated by the driven part (12) and has a phase difference of 90° to 180°.

9. The high-order vibration fan according to claim 8, characterized in that: The vibration generated by the opposing plate (3) has the same mode shape as the vibration generated by the driven part (12) and has a phase difference of 180°, such that the first antinode position (8) of the driven part (12) or the adjacent area of ​​the first antinode position (8) is directly opposite to the second antinode position or the adjacent area of ​​the second antinode position of the opposing plate (3).

10. The high-order vibration fan according to claim 8, characterized in that: The opposing plate (3) is configured to be more deformable than the first actuating part (11).

11. The high-order vibration fan according to claim 1, characterized in that: The driven part (12) is made of polymer material or a composite material composed of polymer material and metal material.

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