A multi-stage filtration system and method for clean room

Abstract

The present invention discloses a multi-stage filtration system and method for clean rooms, the system comprising: a plurality of filter chambers arranged above an air transmission channel, an air inlet filter provided at the filter chamber connected to the air transmission channel's air inlet, an outlet air flow detection module provided at the filter chamber connected to the air outlet of the air transmission channel, a laser detection module provided on the side wall above the outlet air flow detection module, a dust cleaning channel provided on the air transmission channel, a grayscale detection module provided between the dust cleaning channel and the air inlet filter, and an oscillation module provided on the air inlet filter. The present invention uses the outlet air flow detection module, the laser detection module, and the grayscale detection module to detect the system's flux and dust accumulation status in real time, flexibly adjust operating parameters, and timely optimize the filtration process. Through the filtration control module, the Internet, and the on-site user module, timely intervention is carried out, and differentiated cleaning is flexibly and efficiently performed on filters with different degrees of contamination.

Description

Technical Field

[0001] The present invention relates to the field of air purification, and in particular to a multi-stage filtering system and method for a clean room. Background Art

[0002] Cleanrooms, specialized spaces with stringent requirements for air cleanliness, temperature, humidity, pressure, and other environmental parameters, play a vital role in numerous industries. In electronic chip manufacturing, even tiny dust particles can cause short circuits or performance degradation. Cleanrooms provide an ultra-clean environment for chip production, ensuring product quality and performance. In the biopharmaceutical industry, drug development and production processes are highly susceptible to microbial and particulate contamination. Cleanrooms effectively prevent this contamination, ensuring drug safety and effectiveness.

[0003] Currently, cleanrooms typically utilize a multi-stage filtration system to purify the air. Generally speaking, the primary filter, as the first stage, primarily removes larger impurities such as dust and hair from the air, effectively protecting subsequent filtration equipment. The medium-efficiency filter, located in the second stage, further removes smaller particles and reduces dust concentration. The high-efficiency filter, as the final stage, intercepts extremely fine airborne particles, ensuring that the air entering the cleanroom meets stringent cleanliness standards. For example, a common HEPA (high-efficiency air) filter can remove particles larger than 0.3 microns, with a filtration efficiency exceeding 99.97%.

[0004] Existing cleanroom multi-stage filtration systems have many problems. On the one hand, the internal detection of the system is not perfect, making it difficult to monitor the operating status of each level of filters in real time and accurately, such as the degree of filter blockage and the attenuation of filtration efficiency, and thus unable to detect potential fault hazards in a timely manner. On the other hand, due to the lack of effective detection data support, it is difficult for the system to flexibly adjust operating parameters according to actual conditions. When changes in the indoor and outdoor environment cause fluctuations in the concentration of air pollutants, the filtration process cannot be optimized in a timely manner. At the same time, when the filter needs to be cleaned or replaced, intervention cannot be carried out in time, and measures are often taken only after a significant performance degradation occurs. Moreover, during the cleaning process, it is difficult to flexibly and efficiently perform differentiated cleaning on filters with different levels of contamination, affecting the operating efficiency and stability of the entire cleanroom multi-stage filtration system. Summary of the Invention

[0005] Embodiments of the present invention provide a multi-stage filtration system and method for cleanrooms, addressing existing issues such as incomplete internal system detection and the difficulty in accurately monitoring the operating status of each filter stage in real time. This also hinders flexible adjustment of operating parameters based on actual conditions, preventing timely optimization of the filtration process. This inability to intervene promptly makes it difficult to flexibly and efficiently perform differentiated cleaning of filters with varying degrees of contamination, impacting the operational efficiency and stability of the entire cleanroom multi-stage filtration system.

[0006] In one aspect, an embodiment of the present invention provides a multi-stage filtration system for a clean room, comprising:

[0007] An air transmission channel, a plurality of filter chambers are arranged above the air transmission channel, the number of the filter chambers is set corresponding to the cleanliness level of the clean room, the filter chamber is connected to the air inlet of the air transmission channel and is provided with an air inlet filter, the filter chamber is connected to the air outlet of the air transmission channel and is provided with an outlet air flow detection module, a laser detection module is provided on the side wall of the filter chamber above the outlet air flow detection module, a dust cleaning channel is provided at the position corresponding to the air inlet filter on the air transmission channel, a grayscale detection module is provided on the side wall of the air transmission channel between the dust cleaning channel and the air inlet filter, the detection head of the grayscale detection module faces the air inlet filter, an oscillation module is provided on the air inlet filter, the outlet air flow detection module, the laser detection module, the grayscale detection module and the oscillation module are connected to the filter control module through a wireless network signal, the filter control module is set on a cloud server, the filter control module is connected to the on-site user module through an Internet signal, the outlet air flow detection module, the laser detection module, the grayscale detection module and the oscillation module are powered by the circuit system of the clean room.

[0008] In a possible implementation, the air intake filter includes a filter and a filter frame. The air intake filter is provided with multiple specifications, and the filter of the air intake filter of multiple specifications has different pore sizes.

[0009] In a possible implementation, the aperture of the air intake filter is arranged to decrease in sequence from upstream to downstream along the air flow direction of the air transmission channel.

[0010] In a possible implementation, the outlet air flow detection module is an air flow rate sensor, and the outlet air flow detection module is used to detect the flow rate and flow rate of air flowing from the filter chamber into the air transmission channel.

[0011] In a possible implementation, the laser detection module is a laser emitter and a photosensor, and the laser detection module is used to detect the concentration of air particles in the filter chamber.

[0012] In a possible implementation, the grayscale detection module is a laser emitter and a photosensor, and the grayscale detection module is used to detect the attachment state of particulate matter on the surface of the air intake filter.

[0013] In a possible implementation, the oscillation module includes an oscillation motor and an oscillation hammer, and the oscillation hammer contacts the filter frame.

[0014] In another aspect, an embodiment of the present invention provides a multi-stage filtration method for a clean room, comprising:

[0015] According to the clean room cleanliness level and air flow direction, air inlet filters are arranged in order from large to small apertures in multiple filter chambers;

[0016] The user sets the alarm thresholds of all the outlet air flow detection modules, laser detection modules and grayscale detection modules in the filtration control module through the clean room cleanliness level and on-site user module;

[0017] The filter control module issues a cleaning warning and an oscillation warning according to the alarm threshold;

[0018] After receiving the vibration warning, the vibration module starts the vibration hammer through the vibration motor to vibrate the filter frame.

[0019] In a possible implementation, the user receives the cleaning warning through the on-site user module. After receiving the cleaning warning, the user cleans dust through a dust cleaning channel of the air transmission channel.

[0020] The multi-stage filtration system and method for a clean room in the present invention have the following advantages:

[0021] (1) Fine filtration is achieved through the multi-stage filter chambers set up according to the cleanliness level of the clean room. The system flux and dust accumulation status are detected in real time through the outlet flow detection module, laser detection module, and grayscale detection module. Potential fault hazards can be discovered in time, and operating parameters can be flexibly adjusted according to data parameters to optimize the filtration process in time.

[0022] (2) Through the filter control module, the Internet and the on-site user module, the sensor data information is received in a timely manner, timely intervention is carried out, and differentiated cleaning is carried out flexibly and efficiently for filters with different degrees of contamination, thereby improving the operating efficiency and stability of the clean room multi-stage filtration system. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 A structural diagram of a multi-stage filtration system for a clean room provided by an embodiment of the present invention;

[0025] Figure 2 A flow chart of a multi-stage filtration method for a clean room provided by an embodiment of the present invention;

[0026] Figure 3 A schematic diagram of a filter screen of a multi-stage filtration system for a clean room provided by an embodiment of the present invention.

[0027] Explanation of the numbers in the figure: 1. Air transmission channel; 2. Filter chamber; 21. Air inlet filter; 22. Air outlet flow detection module; 23. Laser detection module; 24. Dust cleaning channel; 25. Grayscale detection module; 26. Oscillation module; 211. Filter; 212. Filter frame; 261. Oscillation motor; 262. Oscillation hammer. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] Figure 1 A structural diagram of a multi-stage filtration system for a clean room provided in an embodiment of the present invention; an embodiment of the present invention provides a multi-stage filtration system for a clean room, comprising:

[0030] Air transmission channel 1, a plurality of filter chambers 2 are arranged above the air transmission channel 1, the number of the filter chambers 2 corresponds to the cleanliness level of the clean room, the filter chamber 2 is connected to the air inlet of the air transmission channel 1 and is provided with an air inlet filter 21, the filter chamber 2 is connected to the air outlet of the air transmission channel 1 and is provided with an outlet air flow detection module 22, a laser detection module 23 is provided on the side wall of the filter chamber 2 above the outlet air flow detection module 22, a dust cleaning channel 24 is provided on the air transmission channel 1 corresponding to the position of the air inlet filter 21, the air transmission channel 1 between the dust cleaning channel and the air inlet filter 21 A grayscale detection module 25 is provided on the side wall, and the detection head of the grayscale detection module 25 faces the air intake filter 21. The air intake filter 21 is provided with an oscillation module 26. The outlet air flow detection module 22, the laser detection module 23, the grayscale detection module 25 and the oscillation module 26 are connected to the filter control module 3 through a wireless network signal. The filter control module 3 is set on a server in the cloud. The filter control module 3 is connected to the on-site user module 4 through an Internet signal. The outlet air flow detection module 22, the laser detection module 23, the grayscale detection module 25 and the oscillation module 26 are powered by the circuit system of the clean room.

[0031] The air intake filter 21 includes a filter 211 and a filter frame 212 . The air intake filter 21 is provided with multiple specifications, and the pore sizes of the filter 211 of the air intake filter 21 of multiple specifications are different.

[0032] The apertures of the air intake filter 21 are arranged to decrease in sequence from upstream to downstream along the air flow direction of the air transmission channel 1 .

[0033] The outlet air flow detection module 22 is an air flow rate sensor, and the outlet air flow detection module 22 is used to detect the flow rate and flow rate of the air flowing from the filter chamber 2 into the air transmission channel 1.

[0034] The laser detection module 23 is a laser emitter and a photosensor, and is used to detect the concentration of air particles in the filter chamber 2 .

[0035] The grayscale detection module 25 is a laser emitter and a photosensor, and is used to detect the state of particle attachment on the surface of the air intake filter 21 .

[0036] The oscillation module 26 includes an oscillation motor 261 and an oscillation hammer 262 . The oscillation hammer 262 contacts the filter frame 212 .

[0037] For example, Figure 1 、 3As shown, the air transmission channel 1 is divided into multiple sections, and an opening is provided at the top of the end of each section as the air inlet of the filter chamber 2, and an air intake filter 21 is provided on the air inlet. A grayscale detection module 25 is provided on the channel wall at the end of this section of the air transmission channel 1. The grayscale detection module 25 contains a laser emitter and a photosensor. The degree of particle adhesion on the filter 21 is measured by continuously detecting the laser reflected by the filter 211 of the air intake filter 21. When the rate of change of the laser power reflected by the filter 21 is higher than the threshold or the power value is lower than the threshold, the grayscale detection module 25 can alarm through the filter control module 3. An oscillation module 26 is provided on the air intake filter 21. The oscillation hammer 262 of the oscillation module 26 contacts the filter frame 212 of the air intake filter 21. When the oscillation module Upon receiving instructions from the filter control module 3, the filter housing 212 is vibrated by the oscillating motor 261, which drives the oscillating hammer 262 to vibrate the filter frame 212 for dust removal. Dust, under the action of gravity, falls to the dust removal channel 24 on the air transmission channel 1 directly below the intake filter 21. The dust removal channel 24 can be cleaned regularly or immediately based on the detection results of the air flow detection module 22 and the laser detection module 23. The laser detection module 23 is located on the side wall of the filter chamber 2 and emits a laser beam. The intensity of the reflected laser beam is used to detect the concentration of suspended particulate matter in the filter chamber 2. The air flow detection module 22 is located at the air outlet of the filter chamber 2 connecting to the next section of the air transmission channel 1. The air flow detection module 22 and the laser detection module 23 are used in conjunction with each other. By analyzing the detection data of the air flow detection module 22 and the laser detection module 23, the operating status of the intake filter 21 can be adjusted and repaired.The filtration apertures of the air inlet filters 21 of the multiple filter chambers 2 decrease in sequence, so the detection data processing and data thresholds of the grayscale detection module 25, the air flow detection module 22 and the laser detection module 23 are also set accordingly. The filter control module 3 is set on the cloud server, and receives the detection data of the grayscale detection module 25, the air flow detection module 22 and the laser detection module 23 through the Internet, and then analyzes the detection data through data analysis, specifically through feature extraction and recognition through a recurrent neural network (RNN). The filter control module 3 first processes the detection data of the grayscale detection module 25, the air flow detection module 22 and the laser detection module 23. Preprocessing is performed to clean and normalize the detection data of the grayscale detection module 25, the airflow detection module 22 and the laser detection module 23, and then the data of dust accumulation and reduced flux of the air intake filter 21 are selected as feature data from the detection data of the grayscale detection module 25, the airflow detection module 22 and the laser detection module 23. Considering the continuity of the detection data, the time-frequency domain features of the detection data are extracted, and the features are extracted through the pre-trained ResNet (a type of convolutional neural network model). Specifically, the last fully connected layer of the ResNet model is first removed for feature extraction. PyTorch is used as an example:

[0038] #Data Preprocessing

[0039] transform=transforms.Compose([

[0040] transforms.Resize(256),

[0041] transforms.CenterCrop(224),

[0042] transforms.ToTensor(),

[0043] transforms.Normalize(mean=[0.485,0.456,0.406],std=[0.229,0.224,0.225])])

[0044] #Load the sample image

[0045] image=Image.open('example.jpg')

[0046] image=transform(image).unsqueeze(0)

[0047] #Extract features with torch.no_grad():

[0048] features=feature_extractor(image)

[0049] features=features.view(features.size(0),-1)

[0050] print(features.shape)

[0051] The preprocessed data is divided into training set, validation set and test set. The training set is used to train the model, the validation set is used to adjust the model's hyperparameters, and the test set is used to evaluate the model's performance.

[0052] Build an appropriate RNN model based on the characteristics of the data and the requirements of the problem. An RNN typically consists of an input layer, a pattern layer, a summation layer, and an output layer. The input layer receives preprocessed data features, the pattern layer performs nonlinear transformations on the input features, the summation layer sums the outputs of the pattern layer, and the output layer provides the final classification results.

[0053] The RNN model is trained using the training set. By adjusting the model's parameters (weights, thresholds, etc.), the model is able to accurately classify the training data. During the training process, stochastic gradient descent and optimization algorithms can be used to minimize the loss function.

[0054] The validation set is used to adjust and optimize the model's hyperparameters, such as learning rate, number of hidden layer nodes, smoothing parameters, etc. The grid search method is used to find the optimal hyperparameter combination.

[0055] Use the test set to evaluate the trained RNN model and calculate the model's accuracy, recall rate, F1 value and other evaluation indicators to measure the performance of the model.

[0056] The trained RNN model is applied to feature recognition and analysis of real-world data. For new data such as laser reflection power, air velocity, and flux, the model can quickly and accurately identify the characteristic categories, and immediately trigger an alarm when data features indicating dust accumulation and blockage are identified.

[0057] The filter control module 3 transmits the alarm information to the on-site user module 4 in the user's hand through the Internet, informing the user to perform equipment maintenance and dust cleaning.

[0058] Figure 2 A flowchart of a multi-stage filtration method for a clean room provided in an embodiment of the present invention; an embodiment of the present invention provides a multi-stage filtration method for a clean room, the method comprising:

[0059] According to the clean room cleanliness level and air flow direction, the air intake filters 21 are arranged in order from large to small apertures in the multiple filter chambers 2;

[0060] The user sets the alarm thresholds of all the outlet air flow detection modules 22, laser detection modules 23 and grayscale detection modules 25 in the filter control module 3 through the clean room cleanliness level and on-site user module 4;

[0061] The filter control module 3 issues a cleaning warning and a shock warning according to the alarm threshold;

[0062] After receiving the vibration warning, the vibration module 26 activates the vibration hammer 262 through the vibration motor 261 to vibrate the filter frame 212 .

[0063] In a possible embodiment, the user receives the cleaning warning through the on-site user module 4 , and after receiving the cleaning warning, the user cleans the dust through the dust cleaning channel 24 of the air transmission channel 1 .

[0064] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including all changes and modifications that fall within the scope of the present invention and the preferred embodiments.

[0065] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A multi-stage filtration system for a clean room, characterized in that: include: An air transmission channel (1) is provided with a plurality of filter chambers (2) above the air transmission channel (1), the number of the filter chambers (2) corresponding to the cleanliness level of the clean room, an air inlet of the filter chamber (2) connected to the air transmission channel (1) is provided with an air inlet filter (21), an air outlet flow detection module (22) connected to the air outlet of the filter chamber (2) is provided, a laser detection module (23) is provided on the side wall of the filter chamber (2) above the air outlet flow detection module (22), a dust cleaning channel (24) is provided at a position corresponding to the air inlet filter (21) on the air transmission channel (1), and the air transmission channel (24) between the dust cleaning channel and the air inlet filter (21) is provided. 1) is provided with a grayscale detection module (25) on the side wall, the detection head of the grayscale detection module (25) faces the air inlet filter (21), the air inlet filter (21) is provided with an oscillation module (26), the outlet air flow detection module (22), the laser detection module (23), the grayscale detection module (25) and the oscillation module (26) are connected to the filter control module (3) via a wireless network signal, the filter control module (3) is provided on a cloud server, the filter control module (3) is connected to the on-site user module (4) via an Internet signal, and the outlet air flow detection module (22), the laser detection module (23), the grayscale detection module (25) and the oscillation module (26) are powered by the circuit system of the clean room; The laser detection module (23) is a laser emitter and a photosensor, and the laser detection module (23) is used to detect the concentration of air particles in the filter chamber (2); The grayscale detection module (25) is a laser emitter and a photosensor, and is used to detect the state of particle attachment on the surface of the air intake filter (21).

2. A multi-stage filtration system for a clean room according to claim 1, characterized in that: The air intake filter (21) comprises a filter (211) and a filter frame (212). The air intake filter (21) is provided with a plurality of specifications, and the pore sizes of the filter (211) of the air intake filter (21) of the plurality of specifications are different.

3. A multi-stage filtration system for a clean room according to claim 2, characterized in that: The apertures of the air intake filter (21) are arranged to decrease in sequence from upstream to downstream along the air flow direction of the air transmission channel (1), and the filter apertures of the air intake filter (21) of the plurality of filter chambers (2) decrease in sequence.

4. The multi-stage filtration system for a clean room according to claim 1, characterized in that: The outlet air flow detection module (22) is an air flow rate sensor, and the outlet air flow detection module (22) is used to detect the flow rate and flow rate of air flowing from the filter chamber (2) into the air transmission channel (1).

5. The multi-stage filtration system for a clean room according to claim 2, characterized in that: The oscillation module (26) comprises an oscillation motor (261) and an oscillation hammer (262), and the oscillation hammer (262) contacts the filter frame (212).

6. A multi-stage filtration method for a clean room, applied to the multi-stage filtration system for a clean room according to claim 5, characterized in that: include: According to the clean room cleanliness level and air flow direction, air inlet filters (21) are arranged in order of aperture from large to small in the plurality of filter chambers (2); The user sets the alarm thresholds of all the outlet air flow detection modules (22), the laser detection module (23) and the grayscale detection module (25) in the filter control module (3) through the clean room cleanliness level and the on-site user module (4); The filter control module (3) issues a cleaning warning and a shock warning according to the alarm threshold; After receiving the vibration warning, the vibration module (26) activates the vibration hammer (262) via the vibration motor (261) to vibrate the filter frame (212).

7. A multi-stage filtration method for a clean room according to claim 6, characterized in that: The user receives the cleaning warning through the on-site user module (4), and after receiving the cleaning warning, the user cleans the dust through the dust cleaning channel (24) of the air transmission channel (1).

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