Conveying device for low-temperature cooling table

Abstract

The invention discloses a conveying device for a low-temperature cold table. The conveying device comprises a low-temperature cold head, a taking and conveying assembly and a sample table butt joint part. The sample table butt joint part is arranged in an electron microscope sample chamber with a vacuum environment inside, and the taking and conveying assembly is arranged on the outer wall of the electron microscope sample chamber in a sealed mode and used for conveying the low-temperature cold head to the sample table butt joint part so that the low-temperature cold head can be clamped with or disclamped from the sample table butt joint part. According to the invention, the low-temperature cold head can be quickly clamped or detached.

Description

Technical Field

[0001] The present invention relates to the technical field of electron microscopes, and particularly relates to a transmission device for a cryo-stage. Background Art

[0002] When using instruments such as scanning electron microscopes, transmission electron microscopes, and focused ion beam electron microscopes, it is sometimes necessary to cool the sample in order to obtain high-definition images and in-depth material analysis data. The prior art has solved the problem of cryogenic refrigeration, but during use, it is necessary to synchronously install a cryogenic refrigeration structure every time cryogenic refrigeration is performed, and it can only be used after the structure is synchronously installed. Similarly, when not in use, the cryogenic refrigeration structure needs to be removed, otherwise it will interfere with the use of other functions, and the overall operation process will be relatively cumbersome. The electron microscope sample chamber needs to be evacuated, and the operation time is relatively long. Summary of the Invention

[0003] In view of this, the present invention provides a transmission device for a cryo-stage, which can achieve quick clamping or disassembly of the cryo-cooler.

[0004] The technical solution adopted by the present invention is as follows:

[0005] A transmission device for a cryo-stage includes a cryo-cooler, a pick-up and delivery assembly, and a sample stage docking part;

[0006] The sample stage docking part is arranged in an electron microscope sample chamber with a vacuum environment inside, and the pick-up and delivery assembly is hermetically arranged on the outer wall of the electron microscope sample chamber. The pick-up and delivery assembly is used to transfer the cryo-cooler to the sample stage docking part to achieve clamping or unclamping of the cryo-cooler with it.

[0007] Further, the pick-up and delivery assembly includes a transmission fixed flange, an outer guide sleeve, a cold head transfer rod, a front-end support assembly, a rear-end support assembly, a guide handle, a coupling, and a rotary plug;

[0008] The transmission fixed flange is hermetically fixed on the outer wall of the electron microscope sample chamber. An outer guide sleeve is installed on the outer side of the transmission fixed flange in the axial direction, and a front-end support assembly is installed on the inner side in the axial direction; the front-end support assembly is hermetically connected to the transmission fixed flange; the front-end support assembly is in hole-shaft fit with the cold head transfer rod, and an O-ring is installed inside the front-end support assembly, which is in radial contact with the outer diameter of the cold head transfer rod, so as to achieve dynamic sealing of the cold head transfer rod during the transmission process;

[0009] The outer guide sleeve is internally provided with a rear-end support assembly, the rear end of the cold head transfer rod is fixedly connected to the rear-end support assembly, and a guide handle is fixedly installed on the rear-end support assembly at the same time. The guide handle can slide along a guide groove opened on the outer guide sleeve and matching the conveying path, so as to drive the rear-end support assembly and the cold head transfer rod to slide back and forth;

[0010] The front end of the cold head transfer rod is connected to the rotary plug through a coupling. The movement of the cold head transfer rod in and out and its rotation drive the in and out movement and rotation of the rotary plug, realizing the clamping and unclamping of the low-temperature cold head. At the same time, the in and out movement of the low-temperature cold head driven by the cold head transfer rod after the rotary plug is clamped to the low-temperature cold head enables the clamping and unclamping of the low-temperature cold head and the sample stage.

[0011] Further, the low-temperature cold head is provided with an in and out groove and a clamping groove. The in and out groove extends inward from the docking end face. The clamping groove is connected to the in and out groove, and the length directions of the in and out groove and the clamping groove are perpendicular to each other. The shape of the rotary plug matches the in and out groove and the clamping groove. After the rotary plug extends into the in and out groove, the cold head transfer rod is rotated by 90° to make the rotary plug match the clamping groove, realizing the clamping.

[0012] Further, a top sleeve and a compression spring are installed between the end of the rotary plug and the coupling. The top sleeve and the compression spring are both sleeved on the rotary plug, and both ends of the compression spring are respectively abutted against the coupling and the top sleeve. The diameter of the docking end face of the top sleeve and the low-temperature cold head is larger than the length of the in and out groove.

[0013] Further, the docking part of the sample stage includes a base, a support table, a top block, a first elastic component and a second elastic component;

[0014] The support table is installed in the upper part inside the base, and the top surface of the support table is exposed outside the upper end of the base for placing samples. The first elastic component is arranged on the inner bottom surface of the base, and a top block is installed at the upper end of the first elastic component. There is a gap between the top block and the support table, and the height of the gap is not greater than the thickness of the low-temperature cold head. The second elastic component is arranged on both inner side surfaces of the base for pressing against both side surfaces of the low-temperature cold head.

[0015] Further, the picking and sending component further includes a fixed flange. The fixed flange is installed on the outer cavity wall of the electron microscope sample chamber. An O-ring installation groove is provided on the inner installation surface of the fixed flange. The fixed flange and the electron microscope sample chamber are sealed by using an O-ring. The transmission fixed flange is fixed on the fixed flange, and an O-ring installation groove is provided on the installation flange surface of the transmission fixed flange. Its seal with the fixed flange is realized by using an O-ring.

[0016] Beneficial effects:

[0017] 1. The present invention transfers the low-temperature cold head to the docking part of the sample stage through the picking and sending component, realizing the clamping or unclamping of the low-temperature cold head and the docking part of the sample stage: when low-temperature refrigeration is needed, the low-temperature cold head is quickly inserted into the docking part of the sample stage to realize its refrigeration function; when low-temperature refrigeration is not needed, the low-temperature cold head is quickly disassembled without affecting the use of other functions. The overall operation process is fast and simple, and the electron microscope sample chamber does not need to remove the vacuum and can be directly operated on the atmosphere side.

[0018] 2. The present invention utilizes the inlet / outlet grooves and clamping grooves provided on the cryostat head to achieve quick clamping and unclamping with the rotary plug, featuring a simple structure and easy implementation.

[0019] 3. The present invention also provides a top sleeve and a compression spring, further enhancing the reliability of the clamping and fixing between the rotary plug and the cryostat head. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic structural diagram when the present invention is applied.

[0021] Figure 2 is Figure 1 a cross-sectional view.

[0022] Figure 3 It is a schematic structural diagram of the cryostat head of the present invention.

[0023] Figure 4 It is a cross-sectional view of the cryostat head of the present invention.

[0024] Wherein, 1 - pick-up and delivery assembly, 11 - fixed flange, 12 - transmission fixed flange, 13 - outer guide sleeve, 14 - front-end support assembly, 15 - rear-end support assembly, 16 - cryostat delivery rod, 17 - guide handle, 18 - coupling, 19 - rotary plug, 110 - top sleeve, 111 - compression spring;

[0025] 2 - sample stage docking part, 21 - support table, 22 - base, 23 - top block, 24 - first elastic component, 25 - second elastic component;

[0026] 3 - cryostat head, 31 - inlet / outlet groove, 32 - clamping groove;

[0027] 4 - refrigeration assembly;

[0028] 5 - electron microscope sample chamber. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] The following examples are provided in conjunction with the drawings to describe the present invention in detail.

[0030] The present invention provides a transmission device for a cryogenic cold stage, including a cryostat head 3, a pick-up and delivery assembly 1, and a sample stage docking part 2.

[0031] Such as Figure 1As shown in the figure, in specific applications, the peripheral device further includes a refrigeration component 4 and an electron microscope sample chamber 5. The inside of the electron microscope sample chamber 5 is in a vacuum environment. The sample stage docking part 2 is arranged inside the electron microscope sample chamber 5. The refrigeration component 4 has a corresponding refrigeration structure connected to the cryocooler 3 for refrigerating the cryocooler 3. The picking and transporting component 1 and the refrigeration component 4 are both hermetically arranged on the outer wall of the electron microscope sample chamber 5. The picking and transporting component 1 is used to transport the cryocooler 3 to the sample stage docking part 2 to realize the clamping or unclamping of the cryocooler 3 and the sample stage docking part 2. Thus, when it is necessary to refrigerate the sample, the picking and transporting component 1 is used to transport the cryocooler 3 to a predetermined position of the sample stage docking part 2. When refrigeration is not required, the picking and transporting component 1 is used to take out the cryocooler 3 and retract it to its original position, so as to realize the refrigeration function of the cryo-stage.

[0032] Specifically, as Figure 2 shown, the picking and transporting component 1 includes a fixed flange 11, a transmission fixed flange 12, an outer guide sleeve 13, a cold head transfer rod 16, a front-end support component 14, a rear-end support component 15, a guide handle 17, a coupling 18 and a rotary plug 19.

[0033] The fixed flange 11 is installed on the outer cavity wall of the electron microscope sample chamber 5. An O-ring installation groove is provided on the inner installation surface of the fixed flange 11, and an O-ring is used to realize the sealing between the fixed flange 11 and the electron microscope sample chamber 5. The transmission fixed flange 12 and the refrigeration component 4 are both fixed on the fixed flange 11, and O-ring installation grooves are provided on the installation flange surfaces of the transmission fixed flange 12 and the refrigeration component 4, and O-rings are used to realize their sealing with the fixed flange 11.

[0034] An outer guide sleeve 13 is installed axially outside the transmission fixed flange 12, and a front-end support component 14 is installed axially inside. An O-ring installation groove is designed on the installation end surface of the front-end support component 14, and an O-ring is used to realize the sealed connection between it and the transmission fixed flange 12. The front-end support component 14 is in hole-shaft fit with the cold head transfer rod 16. A through hole corresponding to the shaft diameter of the cold head transfer rod 16 is axially opened in the front-end support component 14 so that the cold head transfer rod 16 can axially pass through it. An O-ring is radially installed inside the front-end support component 14 and contacts the outer diameter of the cold head transfer rod 16, so as to realize the dynamic seal of the cold head transfer rod 16 during axial transmission.

[0035] A rear-end support component 15 is installed inside the outer guide sleeve 13. The rear end of the cold head transfer rod 16 is fixedly connected to the rear-end support component 15. A guide handle 17 is also fixed on the rear-end support component 15. The guide handle 17 can slide along a guide groove opened on the outer guide sleeve 13 and matching the conveying path, so as to drive the rear-end support component 15 and the cold head transfer rod 16 to slide back and forth.

[0036] The front end of the cold head transfer rod 16 is connected to the rotary plug 19 through a coupling 18. This coupling 18 changes the connection between the cold head transfer rod 16 and the rotary plug 19 from a rigid connection to an elastic connection, providing a certain degree of rotational and displacement freedom for the rotary plug 19. Through the movement in and out and rotation of the cold head transfer rod 16, the movement in and out and rotation of the rotary plug 19 are driven. After the rotary plug 19 is clamped with the cryogenic cold head 3, the movement in and out driven by the cold head transfer rod 16 realizes the transfer of the cryogenic cold head 3, enabling the connection and disengagement of the cryogenic cold head 3 with the base 22 of the docking part 2 of the sample stage.

[0037] As Figure 3 , Figure 4 shown, the cryogenic cold head 3 is provided with an in-out groove 31 and a clamping groove 32. The in-out groove 31 extends inward from the docking end face. The clamping groove 32 is connected to the in-out groove 31, and the length directions of the in-out groove 31 and the clamping groove 32 are perpendicular to each other. The shape of the rotary plug 19 matches that of the in-out groove 31 and the clamping groove 32. After the rotary plug 19 extends into the in-out groove 31, by rotating the cold head transfer rod 16 by 90°, the rotary plug 19 is matched with the clamping groove 32. At this time, the rotary plug 19 can fix the cryogenic cold head 3 from the inside, realizing the clamping of the rotary plug 19 and the cryogenic cold head 3.

[0038] Preferably, a top sleeve 110 and a compression spring 111 are installed between the end of the rotary plug 19 and the coupling 18. Both the top sleeve 110 and the compression spring 111 are sleeved on the rotary plug 19, and both ends of the compression spring 111 abut against the top sleeve 110 of the coupling 18 respectively. The diameter of the docking end face of the top sleeve 110 and the cryogenic cold head 3 is larger than the length of the in-out groove 31. Thus, when the rotary plug 19 enters the inside of the cryogenic cold head 3, due to the diameter of the top sleeve 110 being larger than the size of the in-out groove 31, the top sleeve 110 cannot enter the inside of the cryogenic cold head 3, and the top sleeve 110 receives the force exerted on it by the cryogenic cold head 3. This force is transmitted to the compression spring 111, causing the spring 111 to be compressed and pressing the top sleeve 110 against the docking end face of the cryogenic cold head 3. As the cryogenic cold head 3 advances, the pressed top sleeve 110 retreats under the resistance of the docking end face of the cryogenic cold head 3 and tightly abuts against the docking face of the cryogenic cold head 3 under the action of the spring force. After the rotary plug 19 enters the inside of the cryogenic cold head 3 and rotates 90 degrees, the rotary plug 19 is clamped in the internal clamping groove 32 of the cryogenic cold head 3, thus realizing the clamping and fixing of the rotary plug 19 and the cryogenic cold head 3.

[0039] The sample stage docking part 2 includes a base 22, a support table 21, a top block 23, a first elastic component 24 and a second elastic component 25; the support table 21 is made of copper, the support table 21 is installed in the upper part inside the base 22, and the top surface of the support table 21 is exposed at the upper end of the base 22 for placing samples; the first elastic component 24 is arranged on the inner bottom surface of the base 22, a top block 23 is installed at the upper end of the first elastic component 24, and there is a gap between the top block 23 and the support table 21, and the height of the gap is not greater than the thickness of the cryocooler 3; the second elastic component 25 is arranged on both inner side surfaces of the base 22 for pressing both side surfaces of the cryocooler 3.

[0040] When the cryocooler 3 is inserted into the inside of the base 22, due to the elastic component under the top block 23, under the action of the first elastic component 24, the top block 23 moves downward, the cryocooler 3 is inserted between the support table 21 and the top block 23, and at the same time, under the action of the elastic force of the first elastic component 24, the upper end surface of the cryocooler 3 fits with the bottom surface of the support table 21, realizing the heat conduction of the cryocooler 3 to the support table 21. At this time, the second elastic component 25 fixes the cryocooler 3 left and right from both side surfaces, thus preventing the cryocooler 3 from shaking left and right inside the sample stage docking part 2.

[0041] After the cryocooler 3 is fixed, rotate the cryocooler transfer rod 16 by 90°, and at this time the rotating plug 19 is parallel to the inlet and outlet groove 31 of the cryocooler 3. Pull out the cryocooler transfer rod 16, and the rotating plug 19 can be disengaged from the cryocooler 3 together with the cold stage transfer rod 16 and retracted to the inside of the electron microscope sample chamber 5.

[0042] So far, the refrigeration component 4 can be used to refrigerate the cryocooler 3, and the cryocooler 3 can transfer the cold quantity to the sample on the support table 21, thereby realizing the refrigeration of the sample.

[0043] The principle of the removal process of the cryocooler 3 is the same as that of the feeding process. By using the rotation and clamping of the rotating plug 19, the disengagement of the cryocooler 3 from the sample stage docking part 2 can be realized.

[0044] In another embodiment, the clamping method between the cryocooler 3 and the sample stage docking part 2 can also adopt mechanical clamping. Using the principle of the dead point of the four-bar mechanism to make it quickly clamp and unclamp, using the four-bar mechanism to replace the first elastic component 24 and the top block 23, making the four-bar mechanism in the dead point position to realize the positioning of the cryocooler 3, and the cryocooler 3 can be disengaged after the four-bar mechanism is unlocked from the dead point position.

[0045] In summary, the above is only the preferred embodiment of the present invention and is not used to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A transmission device for a low temperature cold stage, characterized in that: It includes a low temperature cold head, a pick-up and delivery component, and a sample stage docking part; The sample stage docking part is arranged in an electron microscope sample chamber whose interior is a vacuum environment, and the pick-up and delivery assembly is sealed and arranged on the outer wall of the electron microscope sample chamber. The pick-up and delivery assembly is used to transfer the low-temperature cold head to the sample stage docking part to realize the connection or disconnection of the low-temperature cold head with it.

2. The transmission device for a low temperature cold stage according to claim 1, characterized in that: The pick-up and delivery assembly includes a transmission fixing flange, an outer guide sleeve, a cold head delivery rod, a front end support assembly, a rear end support assembly, a guide handle, a coupling and a rotating plug; The transmission fixed flange is sealed and fixed on the outer wall of the electron microscope sample chamber, an outer guide sleeve is installed on the axial outer side of the transmission fixed flange, and a front end support assembly is installed on the axial inner side; the front end support assembly is sealed and connected with the transmission fixed flange; the front end support assembly cooperates with the hole axis of the cold head transmission rod, and an O-ring is installed inside the front end support assembly, which is in radial contact with the outer diameter of the cold head transmission rod, so as to realize the dynamic sealing of the cold head transmission rod during the transmission process; A rear end support assembly is installed inside the outer guide sleeve, and the rear end of the cold head conveying rod is fixedly connected to the rear end support assembly. A guide handle is also fixed on the rear end support assembly. The guide handle can slide along a guide groove provided on the outer guide sleeve and matching the conveying path, thereby driving the rear end support assembly and the cold head conveying rod to slide forward and backward; The front end of the cold head conveying rod is connected to the rotating plug through a coupling. The in-out and rotation of the cold head conveying rod drives the in-out and rotation of the rotating plug to achieve engagement and disengagement with the low-temperature cold head. At the same time, after the rotating plug is engaged with the low-temperature cold head, the in-out movement driven by the cold head conveying rod enables the low-temperature cold head to be engaged and disengaged from the sample stage.

3. The transmission device for a low temperature cold stage according to claim 1, characterized in that: The low-temperature cold head is provided with an entry and exit groove and a clamping groove, the entry and exit groove extends inward from the butt end surface, the clamping groove is connected to the entry and exit groove, and the length directions of the entry and exit groove and the clamping groove are perpendicular to each other, and the shape of the rotating plug matches the entry and exit groove and the clamping groove; after the rotating plug is extended into the entry and exit groove, the cold head delivery rod is rotated 90° to make the rotating plug match the clamping groove to achieve clamping.

4. The transmission device for a low temperature cold stage according to claim 3, characterized in that: A top sleeve and a compression spring are installed between the end of the rotating plug and the coupling. The top sleeve and the compression spring are both mounted on the rotating plug, and the two ends of the compression spring are respectively abutted against the coupling and the top sleeve; the diameter of the butt end surface between the top sleeve and the low-temperature cold head is larger than the length of the inlet and outlet grooves.

5. The transmission device for a low temperature cold stage according to claim 3 or 4, characterized in that: The sample stage docking part includes a base, a support platform, a top block, a first elastic component and a second elastic component; The support is installed on the upper inner part of the base, and the top surface of the support is exposed at the upper end of the base, which is used to place the sample; the first elastic component is arranged on the inner bottom surface of the base, and a top block is installed on the upper end of the first elastic component, and a gap is left between the top block and the support, and the height of the gap is not greater than the thickness of the low-temperature cold head; the second elastic component is arranged on the two side surfaces inside the base, which is used to crimp the two side surfaces of the low-temperature cold head.

6. The transmission device for a low temperature cold stage according to claim 2, characterized in that: The pick-up and delivery assembly also includes a fixed flange, which is installed on the outer cavity wall of the electron microscope sample chamber. The inner mounting surface of the fixed flange is provided with an O-ring mounting groove, and the O-ring is used to achieve sealing between the fixed flange and the electron microscope sample chamber; the transmission fixed flange is fixed on the fixed flange, and the mounting flange surface of the transmission fixed flange is provided with an O-ring mounting groove, and the O-ring is used to achieve sealing between it and the fixed flange.

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