Semiconductor packaging jig calibration equipment

Abstract

The invention relates to the technical field of calibration equipment, and provides semiconductor packaging jig calibration equipment which can be matched with a semiconductor packaging jig to form calibration, and simulates the semiconductor packaging jig to form auxiliary positioning simulation on a packaged semiconductor product in a form of filling relative to a positioning hole in the semiconductor packaging jig. On one hand, position testing of positioning holes in the semiconductor packaging jig can be achieved, on the other hand, size detection can be conducted on the positioning holes in the semiconductor packaging jig, calibration detection data are richer, practicability is better, the device comprises a bearing plate and a packaging jig frame, the device further comprises a placing structure, and a main body frame is fixedly connected to the bearing plate; a storage and supply system is arranged in the main body frame, low-temperature wax oil is arranged in the storage and supply system, the placing structure comprises a mounting frame, the mounting frame is fixedly connected to the top end of the main body frame, a clamping assembly used for positioning the packaging jig frame is arranged in the mounting frame, and a lifting ring is slidably connected in the mounting frame.

Description

Technical Field

[0001] The present invention relates to the technical field of calibration equipment, and particularly relates to a calibration equipment for a semiconductor packaging fixture. Background Art

[0002] As is well known, a semiconductor packaging fixture is a tool used in the semiconductor packaging process, mainly as a tool to assist in controlling the position. Since the semiconductor packaging fixture itself has certain errors and these errors will change over time, it is necessary to calibrate the fixture regularly. Calibration plays a key role in ensuring the accuracy and performance of the semiconductor packaging fixture and thus guaranteeing the quality of semiconductor products. To facilitate the calibration of the fixture, we propose a calibration equipment for a semiconductor packaging fixture.

[0003] After retrieval, the patent with the Chinese patent publication number CN215578455U and the patent with the Chinese patent publication number CN222562665U respectively disclose a pressure calibration fixture for a chip mounting device and a calibration fixture and a semiconductor processing device. The former is roughly described as including a lower base plate, a sensor protection seat and an upper base plate. The lower base plate, the sensor protection seat and the upper base plate form a detachable connection structure. The sensor protection seat is located between the lower base plate and the upper base plate. A pressure sensor is installed on the lower base plate and is located within the sensor protection seat. An opening matching the pressure sensor is provided in the middle of the upper base plate. The upper part of the pressure sensor extends into the opening and its upper surface is not higher than the upper edge of the opening. When in use, the lower base plate, the sensor protection seat and the upper base plate are combined together, just encapsulating the pressure sensor inside, which can effectively protect the sensor from external forces other than the measured pressure during the pressure test, improve the test accuracy, and can effectively calibrate the nozzle pressure when switching between different chips for mounting. The latter is roughly described as including a first calibration member. The first calibration member includes a carrier plate and a connecting portion located on the first side of the carrier plate. A notch portion and a first clamping portion are provided on the carrier plate. Among them, the connecting portion is used for detachably connecting to a wafer carrier. The notch portion corresponds to the position of a first groove on the wafer carrier. A second calibration member, the second calibration member includes a second clamping portion and a third clamping portion. The second clamping portion is used for detachably clamping to the first clamping portion. The third clamping portion is used for detachably clamping to a robotic arm. When in use, the calibration fixture and the semiconductor processing device can realize the position calibration between the wafer carrier and the robotic arm.

[0004] Although the above-mentioned prior art solutions can assist in calibrating the position and movement form during the chip and semiconductor manufacturing processes, the targets they calibrate and align are respectively the position of the chip and the position between the wafer carrier and the robotic arm, and there are no effective and clear calibration measures for the fixture used for positioning. Therefore, it is difficult to apply to the detection of the fixture, and the size of the fixture is the core determining the packaging quality of semiconductor products. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides a semiconductor package fixture calibration device, which can cooperate with the semiconductor package fixture to form calibration, and adopts a form of filling the positioning holes in the semiconductor package fixture to simulate the auxiliary positioning of the semiconductor package fixture on the packaged semiconductor product. On the one hand, it can realize the position test of the positioning holes on the semiconductor package fixture, and on the other hand, it can also detect the size of the positioning holes on the semiconductor package fixture, and the calibration detection data is richer and more practical.

[0006] To achieve the above object, the present invention provides the following technical solution: A semiconductor package fixture calibration device includes a carrier plate and a package fixture frame, and further includes an installation structure. A main frame is fixedly connected to the carrier plate, a storage and supply system is arranged in the main frame, and low-temperature wax oil is arranged in the storage and supply system. The installation structure includes an installation frame, the installation frame is fixedly connected to the top of the main frame, a clamping component for positioning the package fixture frame is arranged in the installation frame, a lifting ring is slidably connected in the installation frame, and the lifting ring is used for supporting the package fixture frame. Two lifting vertical frames are slidably connected to the main frame, the tops of the two lifting vertical frames are slidably connected to a driving ring, two elastic springs are fixedly connected to each of the two lifting vertical frames, and the four elastic springs are all fixedly connected to the driving ring. A driving system and a transmission system are respectively installed in the main frame and the installation frame. The driving system is used to drive the operation of the storage and supply system, and the transmission system is used to drive the transmission between the driving ring and the clamping component. Two optical detectors are installed below the lifting ring, and a linkage system matching the lifting ring is installed in the main frame.

[0007] Preferably, the clamping component includes two first clamping rotating frames and two second clamping rotating frames. The two first clamping rotating frames and the two second clamping rotating frames are all rotatably connected to the installation frame. Two first driving screws and two second driving screws are slidably connected in the installation frame. Spiral plates are fixedly connected in the two first clamping rotating frames and the two second clamping rotating frames, and the four spiral plates are respectively matched with the two first driving screws and the two second driving screws.

[0008] Preferably, the transmission system includes two synchronous plates, two guiding sleeves are fixedly connected to the two synchronous plates, the two guiding sleeves are all slidably connected to the installation frame, vertical springs are fixedly connected in the two guiding sleeves, the tops of the two vertical springs are fixedly connected to push columns, the two push columns are respectively slidably connected to the two synchronous plates, two reset springs are fixedly connected to the two synchronous plates, the four reset springs are all fixedly connected to the top of the installation frame, and the two push columns are matched with the driving ring.

[0009] Preferably, the storage supply system includes an elastic storage bladder and a two-way temperature control tube. An installation plate is fixedly connected to the elastic storage bladder, and the installation plate is fixedly connected within the main frame through a plurality of assembly bolts. A plurality of normal heating rings are fixedly connected to the outside of the elastic storage bladder. The two-way temperature control tube is installed within the installation frame, and a plurality of wax passage holes are provided within the installation frame. The plurality of wax passage holes are arranged in a staggered manner with respect to the two-way temperature control tube. A settling groove is formed on the main frame, and a central hole is formed within the settling groove. The central hole matches the elastic storage bladder.

[0010] Preferably, the drive system includes a bottom support plate and two transmission connection frames. The top end of the bottom support plate is fixedly connected to the bottom end of the elastic storage bladder. The bottom support plate is slidably connected within the main frame. Transmission rods are fixedly connected to both ends of the bottom support plate. The two transmission rods are respectively connected to the two transmission connection frames. Both of the two transmission connection frames are rotatably connected to the main frame, and the two transmission connection frames are respectively connected to the two lifting vertical frames.

[0011] Preferably, installation cylinders are rotatably connected within both of the two lifting vertical frames. The two optical detectors are respectively connected to the two installation cylinders. Threaded rings are threadedly connected to the outside of the two installation cylinders. Both of the two threaded rings are fixedly connected to the lifting vertical frames.

[0012] Preferably, the linkage system includes two drive bar rods and two transmission bar rods. The two drive bar rods are respectively fixedly connected within the two lifting vertical frames. Guide extension frames are slidably connected to the outside of the two drive bar rods. Both of the two guide extension frames are fixedly connected to the main frame. Linkage bar frames are rotatably connected within both of the two guide extension frames. The two linkage bar frames are respectively connected to the two drive bar rods. The two transmission bar rods are respectively connected to the two linkage bar frames. Support lifting columns are slidably connected to the two transmission bar rods. Both of the two support lifting columns are fixedly connected to the lifting ring. Connection springs are fixedly connected within both of the two support lifting columns. The two connection springs are respectively connected to the two transmission bar rods.

[0013] Preferably, the spiral directions of the spiral plates within the first clamping rotating frame and the spiral plates within the two second clamping rotating frames are opposite.

[0014] Preferably, the support lifting columns are made of a transparent material. Inner drive bar openings and outer drive bar openings are formed within the linkage bar frames. Transmission columns are provided within both the inner drive bar openings and the outer drive bar openings. The two transmission columns are respectively fixedly connected to the drive bar rods and the transmission bar rods.

[0015] Preferably, the main frame and the bearing plate are fixedly connected through a plurality of connection bolts. Fixed installation ears are fixedly connected to the four corner positions of the bearing plate.

[0016] Compared with the prior art, the present invention provides a calibration device for a semiconductor packaging fixture, having the following beneficial effects: In the present invention, through the provision of the placement structure, a corresponding bracket and positioning structure are formed in cooperation with the packaging fixture rack to facilitate the subsequent calibration and detection of the packaging fixture rack.

[0017] In the present invention, through the design of the storage and supply system, the extrusion and injection of wax oil can be formed in cooperation with the packaging fixture rack, and then the positioning holes on the packaging fixture rack can be filled with wax oil for subsequent corresponding detection.

[0018] In the present invention, through the provision of the optical detector, the wax oil formed by injection molding relative to the packaging fixture rack can be correspondingly detected, and then the purpose of detecting and calibrating the packaging fixture rack can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a three-dimensional structural schematic diagram of a partial cross-section of the present invention; Figure 2 of the present invention Figure 1 is a partial enlarged structural schematic diagram of part A in; Figure 3 of the present invention Figure 1 is a partial enlarged structural schematic diagram of part B in; Figure 4 is a three-dimensional structural schematic diagram of the cooperation of the drive bar, guiding extension frame and linkage bar frame, etc. of the present invention; Figure 5 is an exploded three-dimensional structural schematic diagram of the cooperation of the drive bar, guiding extension frame and linkage bar frame, etc. of the present invention; Figure 6 is a three-dimensional structural schematic diagram of the whole of the present invention; Figure 7 is a three-dimensional structural schematic diagram of the whole after placing the packaging fixture rack of the present invention; Figure 8 is a structural schematic diagram of the main body frame of the present invention; Figure 9 is a three-dimensional structural schematic diagram of the cooperation of the mounting frame, the first clamping rotating frame and the second clamping rotating frame of the present invention; Figure 10 is a three-dimensional structural schematic diagram of the cooperation of the mounting frame, the spiral plate and the second clamping rotating frame, etc. of the present invention; Figure 11 is a three-dimensional structural schematic diagram of another angle of the whole of the present invention; Figure 12 is a three-dimensional structural schematic diagram of the whole looking up of the present invention; Figure 13 is a three-dimensional structural schematic diagram of the cooperation of the lifting vertical frame and the elastic spring of the present invention; Figure 14 This is a three-dimensional structure schematic diagram of the cross-section of the installation frame and the bidirectional temperature control pipe of the present invention; Figure 15 This is a three-dimensional structure schematic diagram of the partial cross-section of the synchronous plate, the guide sleeve, the vertical spring, etc. of the present invention.

[0020] In the figure: 1. Bearing plate; 2. Encapsulation fixture frame; 3. Main body frame; 4. Installation frame; 5. Lifting ring; 6. Lifting vertical frame; 7. Driving ring; 8. Elastic spring; 9. Optical detector; 10. First clamping rotating frame; 11. Second clamping rotating frame; 12. First driving screw; 13. Second driving screw; 14. Spiral plate; 15. Synchronous plate; 16. Guide sleeve; 17. Vertical spring; 18. Pushing column; 19. Reset spring; 20. Elastic storage bladder; 21. Bidirectional temperature control pipe; 22. Installation plate; 23. Assembly bolt; 24. Normal heating ring; 25. Wax passing hole; 26. Settlement tank; 27. Central hole; 28. Bottom support plate; 29. Transmission connection frame; 30. Transmission rod; 31. Installation cylinder; 32. Threaded ring; 33. Driving bar; 34. Transmission bar; 35. Guide extension frame; 36. Linkage bar frame; 37. Support lifting column; 38. Connecting bolt; 39. Fixed installation ear; 40. Transmission column. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] Embodiment, please refer to Figures 1 - 15, a semiconductor package fixture calibration device, including a carrier plate 1 and a package fixture frame 2, further including an installation structure. A main frame 3 is fixedly connected to the carrier plate 1. A storage and supply system is arranged inside the main frame 3. Low-temperature wax oil is arranged inside the storage and supply system. The storage and supply system includes an elastic storage bladder 20 and a two-way temperature control pipe 21. An installation plate 22 is fixedly connected to the elastic storage bladder 20. The installation plate 22 is fixedly connected inside the main frame 3 through a plurality of assembly bolts 23. A plurality of normal heating rings 24 are fixedly connected to the outside of the elastic storage bladder 20. The two-way temperature control pipe 21 is installed inside an installation frame 4. A plurality of wax passing holes 25 are arranged inside the installation frame 4. The plurality of wax passing holes 25 are arranged in a staggered manner with the two-way temperature control pipe 21. A settlement groove 26 is formed on the main frame 3. A central hole 27 is formed inside the settlement groove 26. The central hole 27 matches the elastic storage bladder 20. Through the design of the storage and supply system, it can cooperate with the package fixture frame 2 to form the extrusion and injection of wax oil, and then achieve the filling of the positioning holes on the package fixture frame 2 with wax oil for subsequent corresponding detection. The installation structure includes an installation frame 4. The installation frame 4 is fixedly connected to the top of the main frame 3. A clamping component for positioning the package fixture frame 2 is arranged inside the installation frame 4. The clamping component includes two first clamping rotating frames 10 and two second clamping rotating frames 11. The two first clamping rotating frames 10 and the two second clamping rotating frames 11 are both rotatably connected to the installation frame 4. Two first driving screws 12 and two second driving screws 13 are slidably connected inside the installation frame 4. A spiral plate 14 is fixedly connected inside each of the two first clamping rotating frames 10 and the two second clamping rotating frames 11. The four spiral plates 14 respectively match the two first driving screws 12 and the two second driving screws 13. The spiral directions of the spiral plates 14 inside the first clamping rotating frame 10 and the spiral plates 14 inside the two second clamping rotating frames 11 are opposite. A lifting ring 5 is slidably connected inside the installation frame 4. The lifting ring 5 is used for supporting the package fixture frame 2. Through the provision of the installation structure, it can cooperate with the package fixture frame 2 to form a corresponding support and positioning structure to facilitate the subsequent calibration and detection of the package fixture frame 2.

[0023] It should be further noted that two lifting vertical frames 6 are slidably connected to the main body frame 3, a driving ring 7 is slidably connected to the tops of the two lifting vertical frames 6, two elastic springs 8 are fixedly connected to each of the two lifting vertical frames 6, and the four elastic springs 8 are all fixedly connected to the driving ring 7. A driving system and a transmission system are respectively installed inside the main body frame 3 and the installation frame 4. The driving system is used to drive the operation of the supply system. The driving system includes a bottom support plate 28 and two transmission connecting frames 29. The top of the bottom support plate 28 is fixedly connected to the bottom end of the elastic storage bag 20. The bottom support plate 28 is slidably connected inside the main body frame 3. Transmission rods 30 are fixedly connected to both ends of the bottom support plate 28. The two transmission rods 30 are respectively connected to the two transmission connecting frames 29. The two transmission connecting frames 29 are both rotatably connected to the main body frame 3. The two transmission connecting frames 29 are respectively connected to the two lifting vertical frames 6. The transmission system is used for the transmission drive between the driving ring 7 and the clamping assembly. The transmission system includes two synchronous plates 15. Guide sleeves 16 are fixedly connected to both of the two synchronous plates 15. The two guide sleeves 16 are both slidably connected to the installation frame 4. Vertical springs 17 are fixedly connected inside the two guide sleeves 16. Push columns 18 are fixedly connected to the tops of the two vertical springs 17. The two push columns 18 are respectively slidably connected to the two synchronous plates 15. Two return springs 19 are fixedly connected to both of the two synchronous plates 15. The four return springs 19 are all fixedly connected to the top of the installation frame 4. The two push columns 18 are matched with the driving ring 7. Two optical detectors 9 are installed below the lifting ring 5. Installation cylinders 31 are rotatably connected inside the two lifting vertical frames 6. The two optical detectors 9 are respectively connected to the two installation cylinders 31. Threaded rings 32 are threadedly connected to the outsides of the two installation cylinders 31. The two threaded rings 32 are both fixedly connected to the lifting vertical frames 6. By equipping with the optical detectors 9, it is possible to perform corresponding detection on the wax oil for injection molding relative to the encapsulation jig frame 2, and then achieve the purpose of detecting and calibrating the encapsulation jig frame 2.

[0024] It should be further noted that a linkage system matching the lifting ring 5 is installed in the main body frame 3. The linkage system includes two driving bar rods 33 and two transmission bar rods 34. The two driving bar rods 33 are respectively fixedly connected in the two lifting vertical frames 6. Guide extension frames 35 are slidably connected to the outside of the two driving bar rods 33. The two guide extension frames 35 are both fixedly connected to the main body frame 3. Linkage bar frames 36 are rotatably connected in the two guide extension frames 35. The two linkage bar frames 36 are respectively connected to the two driving bar rods 33. The two transmission bar rods 34 are respectively connected to the two linkage bar frames 36. Support lifting columns 37 are slidably connected to the two transmission bar rods 34. The two support lifting columns 37 are both fixedly connected to the lifting ring 5. Connecting springs are fixedly connected in the two support lifting columns 37. The two connecting springs are respectively connected to the two transmission bar rods 34. The support lifting columns 37 are made of transparent materials. Inner driving bar openings and outer driving bar openings are formed in the linkage bar frames 36. Transmission columns 40 are arranged in both the inner driving bar openings and the outer driving bar openings. The two transmission columns 40 are respectively fixedly connected to the driving bar rod 33 and the transmission bar rod 34. The main body frame 3 and the bearing plate 1 are fixedly connected by a plurality of connecting bolts 38. Fixed installation ears 39 are fixedly connected to the four corner positions of the bearing plate 1.

[0025] The optical detector 9, the normal heating ring 24, the electric switching valve and the control host in this embodiment are all conventional devices well-known to those skilled in the art and purchased on the market. In the present invention, we only use them and do not improve their structures and functions. For those skilled in the art, their setting methods, installation methods and electrical connection methods can be debugged and operated as long as the requirements in their operation manuals are followed, and thus will not be elaborated herein.

[0026] In summary, the working principle of the semiconductor package fixture calibration device is as follows. When in use, first install the semiconductor package fixture calibration device at the location where it is required. Connect the normal heating ring 24 to the control power supply. The normal heating ring 24 uses a resistance wire for constant-temperature normal heating. Connect the external refrigerating gas and heating gas to the two-way temperature control tube 21, and install an electric switching valve corresponding to the two-way temperature control tube 21 to achieve the operation control of refrigeration and heating inside the two-way temperature control tube 21. Install a control host for the optical detector 9 to analyze and store the information collected by the optical detector 9 through the control host. Then place the package fixture rack 2 to be detected on the lifting ring 5. Next, apply a downward pressure to the driving ring 7. When the driving ring 7 is forced to fall, it will push the two lifting vertical frames 6 to fall synchronously through the elastic spring 8. The two falling lifting vertical frames 6 will drive the two transmission connecting frames 29 to move respectively. When the two transmission connecting frames 29 rotate relative to the main body frame 3, they will drive the two transmission rods 30 to move respectively. The movement of the two transmission rods 30 will drive the bottom support plate 28 to rise inside the main body frame 3. Due to the elastic effect of the elastic storage bladder 20 and the gravity of the bottom support plate 28, the elastic spring 8 will be elastically compressed at the initial stage of the transmission between the driving ring 7 and the lifting vertical frame 6, that is, the driving ring 7 falls while the lifting vertical frame 6 remains at the original height unchanged until the force generated by the compression amount of the elastic spring 8 is sufficient to compress the elastic storage bladder 20 and lift the bottom support plate 28. When the driving ring 7 is pressed down, it will drive the threaded ring 32 to fall synchronously. Under the threaded connection between the threaded ring 32 and the mounting cylinder 31, the mounting cylinder 31 will be rotationally driven relative to the lifting vertical frame 6, thereby achieving the rotational adjustment of the detection area of the optical detector 9. When the relative movement of the threaded connection between the threaded ring 32 and the mounting cylinder 31 reaches the limit state, the energy storage of the elastic spring 8 is also completed. After that, when the driving ring 7 continues to be pushed down, it will push the lifting vertical frame 6 to fall. When the two lifting vertical frames 6 continue to fall, the bottom support plate 28 will be lifted upward, thereby realizing the extrusion of the elastic storage bladder 20. Since the paraffin oil in the elastic storage bladder 20 will be in a liquid state after the normal heating ring 24 is powered on, when the elastic storage bladder 20 is extruded, the paraffin oil inside it will be squeezed into the central hole 27. When the paraffin oil fills the central hole 27, it will flow into the settling tank 26. When the paraffin oil in the settling tank 26 is filled, it will enter the upper side of the mounting frame 4 through the wax passage hole 25.

[0027] Further, since the drive bar 33 inside the lifting vertical frame 6 will also fall when the height of the lifting vertical frame 6 drops, under the transmission action of the drive bar 33, the linkage bar frame 36, and the transmission bar 34, that is, the falling of the drive bar 33 drives the linkage bar frame 36 to rotate relative to the linkage bar frame 36, and the rotating and falling linkage bar frame 36 will drive the transmission bar 34 to fall. During this process, the falling drive bar 33 will cause the transmission bar 34 to fall, and the rising transmission bar 34 will drive the support lifting column 37 to decrease in height. And due to the variable-speed transmission of the linkage bar frame 36, the descending speed of the support lifting column 37 will be faster than the falling speed of the drive bar 33. Therefore, the lifting ring 5 can quickly descend into the installation frame 4. When the lifting ring 5 descends into the installation frame 4, when the drive ring 7 is further pushed down, the connecting spring will be compressed to facilitate the further downward movement of the drive ring 7. The further pushed-down drive ring 7 will contact the push column 18, and the pushed push column 18 will drive the synchronous plate 15 to fall. The first drive screw 12 and the second drive screw 13 connected to the synchronous plate 15 will fall synchronously. Under the transmission action between the spiral plate 14 and the first drive screw 12 and the transmission action between the second drive screw 13 and the spiral plate 14, the corresponding first clamping turntable 10 and the second clamping turntable 11 will rotate relatively. The rotating first clamping turntable 10 and the second clamping turntable 11 will cooperate to form clamping and positioning with the encapsulation fixture frame 2 inside the installation frame 4. Then, continuing to press down to drive the drive ring 7 will further compress the elastic storage bladder 20. Due to the reasonable spatial setting of the central hole 27 and the sedimentation groove 26, when the encapsulation fixture frame 2 forms clamping and positioning inside the installation frame 4 and the drive ring 7 is further pushed down, the wax oil in the elastic storage bladder 20 will surge through the wax passage hole 25. The wax oil surging to the upper side of the installation frame 4 will fill the encapsulation fixture frame 2. When the wax oil forms a suitable filling relative to the encapsulation fixture frame 2, stop pressing down the drive ring 7 and maintain the height of the drive ring 7. Then, control the electric switching valve to allow the external refrigerating gas to pass into the two-way temperature control tube 21 to control the wax oil in the wax passage hole 25 and the wax oil surging to the upper side of the installation frame 4 to cool down and solidify this part of the wax oil. Then, gradually reduce the downward pressure acting on the drive ring 7 to make the drive ring 7 move and rise. During this process, the positioning and clamping function of the encapsulation fixture frame 2 will first fail and then rise and separate relative to the wax oil. Then, the optical detector 9 will swing in the reverse direction to detect the corresponding dimensions of the solidified wax oil. Since the solidified wax oil forms a reverse mold for the positioning holes on the encapsulation fixture frame 2, by detecting the structure formed by the solidified wax oil, the dimensional shape of the encapsulation fixture can be analyzed, and then the purpose of calibrating and inspecting the encapsulation fixture can be achieved. Finally, remove the encapsulation fixture frame 2 from the lifting ring 5, and control the electric switching valve to allow the external heating gas to pass into the two-way temperature control tube 21 to heat and melt the wax oil on the upper side of the installation frame 4. The melted wax oil will flow back into the elastic storage bladder 20 under the action of its own gravity for the next use.

[0028] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor package fixture calibration device, comprising a carrier plate (1) and a package fixture rack (2), characterized in that, It also includes an installation structure. A main frame (3) is fixedly connected to the carrier plate (1). A storage and supply system is arranged inside the main frame (3), and low-temperature wax oil is arranged inside the storage and supply system. The installation structure includes an installation frame (4). The installation frame (4) is fixedly connected to the top end of the main frame (3). A clamping assembly for positioning and encapsulating the jig frame (2) is arranged inside the installation frame (4). A lifting ring (5) is slidably connected inside the installation frame (4), and the lifting ring (5) is used for supporting the encapsulating jig frame (2). Two lifting vertical frames (6) are slidably connected to the main frame (3). The top ends of the two lifting vertical frames (6) are slidably connected to a driving ring (7). Two elastic springs (8) are fixedly connected to each of the two lifting vertical frames (6). All four elastic springs (8) are fixedly connected to the driving ring (7). A driving system and a transmission system are respectively installed inside the main frame (3) and inside the installation frame (4). The driving system is used for driving the operation of the storage and supply system, and the transmission system is used for driving the transmission between the driving ring (7) and the clamping assembly. Two optical detectors (9) are installed below the lifting ring (5), and a linkage system matching the lifting ring (5) is installed inside the main frame (3).

2. The semiconductor package fixture calibration device according to claim 1, characterized in that, The clamping assembly includes two first clamping rotating frames (10) and two second clamping rotating frames (11). Both the two first clamping rotating frames (10) and the two second clamping rotating frames (11) are rotatably connected to the installation frame (4). Two first driving screws (12) and two second driving screws (13) are slidably connected inside the installation frame (4). Spiral plates (14) are fixedly connected inside both the two first clamping rotating frames (10) and the two second clamping rotating frames (11). The four spiral plates (14) respectively match the two first driving screws (12) and the two second driving screws (13).

3. The semiconductor package fixture calibration device according to claim 2, characterized in that, The transmission system includes two synchronous plates (15). Guide sleeves (16) are fixedly connected to both the two synchronous plates (15). Both the two guide sleeves (16) are slidably connected to the installation frame (4). Upright springs (17) are fixedly connected inside both the two guide sleeves (16). Push columns (18) are fixedly connected to the top ends of the two upright springs (17). The two push columns (18) are respectively slidably connected to the two synchronous plates (15). Two return springs (19) are fixedly connected to both the two synchronous plates (15). All four return springs (19) are fixedly connected to the top end of the installation frame (4). The two push columns (18) match the driving ring (7).

4. The semiconductor package fixture calibration device according to claim 3, characterized in that, The storage supply system includes an elastic storage bladder (20) and a two-way temperature control pipe (21). An installation plate (22) is fixedly connected to the elastic storage bladder (20). The installation plate (22) is fixedly connected within the main body frame (3) through a plurality of assembly bolts (23). A plurality of normal heating rings (24) are fixedly connected to the outside of the elastic storage bladder (20). The two-way temperature control pipe (21) is installed within the installation frame (4). A plurality of wax passing holes (25) are provided within the installation frame (4). The plurality of wax passing holes (25) and the two-way temperature control pipe (21) are arranged in a staggered manner. A settlement groove (26) is formed on the main body frame (3). A central hole (27) is formed within the settlement groove (26). The central hole (27) matches the elastic storage bladder (20).

5. The semiconductor package fixture calibration device according to claim 4, characterized in that, The drive system includes a bottom support plate (28) and two transmission connecting frames (29). The top end of the bottom support plate (28) is fixedly connected to the bottom end of the elastic storage bladder (20). The bottom support plate (28) is slidably connected within the main body frame (3). Transmission rods (30) are fixedly connected to both ends of the bottom support plate (28). The two transmission rods (30) are respectively connected to the two transmission connecting frames (29). The two transmission connecting frames (29) are both rotatably connected to the main body frame (3). The two transmission connecting frames (29) are respectively connected to the two lifting vertical frames (6).

6. The semiconductor package fixture calibration device according to claim 5, characterized in that, Installation cylinders (31) are rotatably connected within the two lifting vertical frames (6). The two optical detectors (9) are respectively connected to the two installation cylinders (31). Threaded rings (32) are threadedly connected to the outside of the two installation cylinders (31). The two threaded rings (32) are both fixedly connected to the lifting vertical frames (6).

7. The semiconductor package fixture calibration device according to claim 6, characterized in that, The linkage system includes two drive bar rods (33) and two transmission bar rods (34). The two drive bar rods (33) are respectively fixedly connected within the two lifting vertical frames (6). Guide extension frames (35) are slidably connected to the outside of the two drive bar rods (33). The two guide extension frames (35) are both fixedly connected to the main body frame (3). Linkage bar frames (36) are rotatably connected within the two guide extension frames (35). The two linkage bar frames (36) are respectively connected to the two drive bar rods (33). The two transmission bar rods (34) are respectively connected to the two linkage bar frames (36). Support lifting columns (37) are slidably connected to the two transmission bar rods (34). The two support lifting columns (37) are both fixedly connected to the lifting ring (5). Connecting springs are fixedly connected within the two support lifting columns (37). The two connecting springs are respectively connected to the two transmission bar rods (34).

8. The semiconductor package fixture calibration device according to claim 7, characterized in that, The spiral directions of the spiral plates (14) within the first clamping rotating frame (10) and the spiral plates (14) within the two second clamping rotating frames (11) are opposite.

9. The semiconductor package fixture calibration device according to claim 8, characterized in that, The supporting lifting column (37) is made of a transparent material. An inner driving strip opening and an outer driving strip opening are formed in the linkage bar frame (36). Transmission columns (40) are arranged in both the inner driving strip opening and the outer driving strip opening. The two transmission columns (40) are fixedly connected to the driving strip rod (33) and the transmission strip rod (34) respectively.

10. The semiconductor package fixture calibration device according to claim 9, characterized in that, The main body frame (3) and the bearing plate (1) are fixedly connected by a plurality of connecting bolts (38). Fixed mounting ears (39) are fixedly connected to the four corner positions of the bearing plate (1).

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