A gas flow control device

Abstract

This article provides a gas flow control device, comprising: a base, with an air inlet and an air outlet formed on both sides, a receiving groove formed on the top, and the air inlet and the air outlet are connected through the receiving groove; an integrated valve seat, arranged in the receiving groove, an air flow channel connected to the air inlet and the air outlet, and a sealing portion formed in the air flow channel; a support member, one end face of the support member abuts against the bottom face of the receiving groove; a first elastic member, fixedly arranged between the other end face of the support member and the sealing portion; a valve core, comprising: a first contact portion and a fixing portion, the top face of the contact portion abuts against the sealing portion, and the fixing portion passes through a first through hole; a transmission member, passing through the sealing portion and connected to the top face of the first contact portion, the outer diameter of the transmission member being smaller than the outer diameter of the air flow channel at the sealing portion; a diaphragm, arranged above the transmission member and the base, connected to the transmission member, and sealing the receiving groove. The above technical solution reduces potential leakage points and improves overall reliability and performance compared to a split valve seat.

Description

Technical Field

[0001] The present application belongs to the field of gas control technology, and in particular relates to a gas flow control device. Background Art

[0002] Gas flowmeters are important measuring instruments in industrial production. The airtightness of their core component, the valve core, directly affects the flowmeter's measurement accuracy and service life. Currently, the valve seat structure of gas flowmeters typically achieves airtightness by pressing two upper and lower components together.

[0003] However, if there are installation errors between the upper and lower parts of the valve core, or if the surface of the parts is scratched during the installation process, the valve seat structure after installation will lead to poor air tightness, affecting the normal use of the flow meter.

[0004] In addition, after long-term use, the gas flow meter is affected by factors such as gas pressure, temperature changes, and mechanical vibrations, and the upper and lower parts of the valve seat are prone to loosening or deformation, resulting in a decrease in air tightness, which in turn affects the measurement accuracy of the flow meter.

[0005] In order to solve the above problems, the present invention proposes an improved gas flow control device, which aims to improve the air tightness, reliability and service life of a fluid control valve. Summary of the Invention

[0006] In view of the above problems in the prior art, the purpose of this article is to provide a gas flow control device to solve the problem of poor air tightness of the fluid control valve in the prior art.

[0007] In order to solve the above technical problems, the specific technical solution of this article is as follows: A gas flow control device, comprising:

[0008] The base has an air inlet and an air outlet formed on both sides, and an open receiving groove formed on the top, and the air inlet and the air outlet are connected through the receiving groove;

[0009] an integrated valve seat disposed in the accommodating groove, wherein the integrated valve seat forms an air flow channel communicating with the air inlet and the air outlet, and a sealing portion is formed in the air flow channel;

[0010] a support member disposed in the air flow channel, wherein one end surface of the support member abuts against the bottom surface of the accommodating groove;

[0011] a first elastic member fixedly disposed between the other end surface of the support member and the sealing portion, wherein the first elastic member is formed with a first through hole for the valve core to pass through;

[0012] The valve core comprises: a first contact portion and a fixing portion, wherein a top surface of the first contact portion abuts against the sealing portion, and the fixing portion passes through the first through hole;

[0013] a transmission member passing through the sealing portion and connected to the top surface of the contact portion, wherein the outer diameter of the transmission member is smaller than the outer diameter of the air flow channel at the sealing portion;

[0014] The diaphragm is arranged above the transmission member and the base, is connected to the transmission member, and seals the receiving groove.

[0015] Furthermore, it also includes: a first sealing member, which is arranged between the integrated valve seat and the accommodating groove, and the first sealing member is arranged on the outer periphery of the support member.

[0016] Furthermore, a limiting groove matching the supporting member is formed on the bottom surface of the accommodating groove.

[0017] Furthermore, it also includes: a second elastic member;

[0018] The second elastic member is disposed between the transmission member and the integrated valve seat.

[0019] Furthermore, a first recessed platform for abutment of the second elastic member is formed on the top surface of the integrated valve seat.

[0020] Furthermore, the air flow channel includes: an axial first flow channel, a second flow channel formed by the top surface of the integrated valve seat and the diaphragm, and a third flow channel perpendicular to the second flow channel;

[0021] The air inlet is sequentially connected to the first flow channel, the second flow channel, the third flow channel and the air outlet.

[0022] Furthermore, the end surface of the transmission member away from the valve core is a spherical surface.

[0023] Furthermore, an inverted cone-shaped vent hole is formed at one end of the sealing portion close to the transmission member.

[0024] Furthermore, it also includes: a driving member, which is arranged above the diaphragm and is used to provide a driving force for the diaphragm to move downward.

[0025] Furthermore, the end portion of the sealing portion that contacts the valve core is arc-shaped.

[0026] This technical solution adopts an integrated valve seat structure to replace the traditional multi-part splicing design. The structural integrity and sealing performance are enhanced through the overall molding process, which completely eliminates the leakage risks formed by the traditional assembly interface and significantly improves the airtight reliability and long-term stability of the gas flow control device. At the same time, the split structure of the diaphragm and the transmission parts gives the system dynamic self-adaptation capabilities. That is, when there is a radial offset in the force applied by the drive mechanism, the diaphragm assembly can form dynamic compensation with the transmission parts through flexible deformation, automatically correct the direction of force, and ensure that the driving force is strictly transmitted along the axis of the valve core. This force transmission mechanism effectively avoids the problem of off-load wear that is prone to occur in traditional rigid transmission structures, makes the positioning accuracy of the valve core opening and closing stroke more accurate, and provides reliable guarantee for high-precision regulation of gas flow.

[0027] In order to make the above and other purposes, features and advantages of this article more obvious and easy to understand, the following specifically cites preferred embodiments and provides detailed descriptions in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of this article or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of this article. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 A schematic cross-sectional view of a gas flow control device according to an embodiment of the present invention is shown;

[0030] Figure 2 A schematic cross-sectional view of a gas flow control device in a closed state according to an embodiment of the present invention is shown;

[0031] Figure 3 A schematic structural diagram of an integrated valve seat according to an embodiment of the present invention is shown;

[0032] Figure 4 A schematic cross-sectional structure diagram of an integrated valve seat according to an embodiment of the present invention is shown;

[0033] Figure 5 A cross-sectional schematic diagram of the connection between a diaphragm and a transmission member according to an embodiment of the present invention is shown;

[0034] Figure 6 A schematic structural diagram of a diaphragm according to an embodiment of the present invention is shown;

[0035] Figure 7 A schematic diagram showing the force direction of the action part in a scenario where the driving force and the action part are not coaxial in an embodiment of this invention is shown;

[0036] Figure 8A schematic cross-sectional structure diagram of a gas flow control device in an open state according to an embodiment of the present invention is shown;

[0037] Figure 9 A schematic structural diagram of a support member according to an embodiment of the present invention is shown;

[0038] 1-integrated valve seat, 11-limiting portion, 12-sealing portion, 13-first sinking platform, 14-second sinking platform, 15-vent, 16-second contact portion, 17-first flow channel, 18-third flow channel, 19-fourth flow channel;

[0039] 2-valve core, 21-first contact portion, 22-fixed portion;

[0040] 3-first elastic member;

[0041] 4- support member;

[0042] 5- transmission parts;

[0043] 6-diaphragm, 61-deformation part, 62-force-bearing part;

[0044] 7- driving member;

[0045] 8- second elastic member;

[0046] 9-base, 91-air inlet, 92-air outlet; 101-first sealing member, 102-second sealing member; DETAILED DESCRIPTION

[0047] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in the embodiments of this document. Obviously, the embodiments described are only part of the embodiments of this document, not all of the embodiments. Based on the embodiments of this document, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this document.

[0048] It should be noted that the terms "first," "second," and the like in the specification and claims herein and in the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, apparatus, product, or device comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to these processes, methods, products, or devices.

[0049] In prior art, such as patent CN115479128A, the fluid control valve provided therein comprises a spring guide member, a valve body return spring, a valve body, a valve seat member, an actuator, and a brake, arranged from bottom to top within the base cavity. When the fluid control valve is open (i.e., the valve body and valve seat member are separated, opening the airflow path), gas flows sequentially through the upstream flow channel, the first internal flow channel, the third internal flow channel, the second internal flow channel, and the downstream flow channel.

[0050] Since the spring guide component and the valve seat component are split (i.e., the two are sealed only by contact), and the outer diameters of the spring guide component and the valve seat component are in contact with the second internal flow channel, when the fluid control valve is not opened (i.e., the valve body and the valve seat component are in sealing contact, closing the air flow channel), the gas path pressure of the upstream flow channel will be greater than the gas path pressure of the downstream flow channel, and there is a risk that the gas in the upstream flow channel will flow to the downstream flow channel through the gap between the spring guide component and the valve seat component.

[0051] In addition, in the above solution, the sealing ring between the base and the spring guide member is in direct contact with the flow gas. If the gas is corrosive, the sealing ring in direct contact with the gas will be at risk of being corroded.

[0052] Furthermore, in the above-mentioned solution, the actuator, as the component that transmits the driving force, adopts an integrated structure. The integrated actuator comprises a top force-receiving member, a diaphragm, and a drive shaft, which are fixedly connected to each other. Because the actuator is an integrated structure, if the driving force received by the top force-receiving member is eccentric, the force transmitted to the bottom end of the drive shaft will be laterally offset. As the length of the actuator increases, the lateral offset of the force transmitted to the bottom end of the drive shaft increases, causing the actuator to tilt (non-axially perpendicular). As a result, the force acting on the valve body is offset. When the force acting on the valve body is non-axially perpendicular, the valve body will tilt only in the direction opposite to the offset. In the field of gas flow control, very strict control precision is often required. As mentioned above, if the valve body tilts, the flow control accuracy will be reduced, affecting product performance. Furthermore, if the lateral offset of the actuator is too large, the drive shaft at the bottom end of the actuator may contact and wear with the valve seat member, forming metal debris. In the semiconductor field, metal debris seriously affects chip yield.

[0053] In order to solve the above problems, the embodiments of this document provide a gas flow control device that can effectively shut off the gas flow, reduce potential leakage points, and improve overall reliability and performance. Figure 1-9The schematic diagram of the structure of a gas flow control device in the embodiment of this invention is shown, but it may include more or fewer operating components based on conventional or non-creative work. The present application provides a gas flow control device, including: a base 9, an integrated valve seat 1, a support member 4, a first elastic member 3, a valve core 2, a transmission member 5, a diaphragm 6, a first sealing member 101, a driving member 7 and other components. Its specific working states include: closed state and open state. Figure 1 and 2 As shown, in the closed state, the valve core 2 is in sealing contact with the sealing portion 12, isolating the air inlet 91 and the air outlet 92; Figure 9 As shown, in the open state, the valve core 2 is driven by the driving force provided by the driving member 7 transmitted through the transmission member 5, and the valve core 2 moves downward, connecting the air inlet 91 and the air outlet 92 through the air flow channel in the integrated valve seat 1.

[0054] Each part is described in detail below.

[0055] Base 9: Specifically, Figure 1 As shown, the base 9 may be formed with air inlets 91 (a first air inlet, a second air inlet, and a third air inlet connected in sequence). The first air inlet can be used to connect to an external gas storage device such as a gas tank, and the third air inlet can be connected to a receiving groove defined on the top surface of the base 9. The receiving groove can be cylindrical in shape, with the third air inlet formed approximately in the center of the receiving groove. The outer diameter of the third air inlet should be smaller than the inner diameter of the receiving groove to provide space for the support member 4 described below.

[0056] An air outlet 92 is formed on the other side of the base 9, and the air outlet 92 is arranged on the bottom surface of the accommodating groove. An air flow channel of the integrated valve seat 1 is arranged between the air inlet 91 and the air outlet 92. In order to ensure that the air inlet and the air outlet 92 are not directly connected, a first sealing member 101 can be provided between the integrated valve seat 1 and the accommodating groove so that the air inlet 91 and the air outlet 92 can only be connected through the air flow channel of the integrated valve seat 1.

[0057] In the above scenario, the first seal 101 will still come into contact with the gas at the gas outlet 92, potentially corroding it. To avoid this problem, a circular boss structure can be formed on the outer periphery of the bottom surface of the receiving groove, and the gas outlet 92 can be located at the circular boss structure. At the same time, the bottom surface of the integrated valve seat 1 is annularly chamfered so that when the integrated valve seat 1 is installed on the base 9, the annular chamfer can abut against the circular boss structure, thereby effectively preventing the first seal 101 from contacting the gas at the gas outlet 92.

[0058] It can be understood that the position of the air inlet 91 in the receiving groove is lower than the position of the air outlet 92 in the receiving groove.

[0059] The receiving groove may also be formed with a limiting groove for fixing the support member 4 described below, and the size, shape, depth, etc. of the limiting groove may be determined based on the shape of the support member 4. The limiting groove may be formed between the air inlet 91 and the air outlet 92 on the bottom surface of the receiving groove.

[0060] like Figure 3 and 4 As shown, the integrated valve seat 1 can be a cylindrical structure that matches the receiving groove. A first flow channel 17 communicating with the air inlet 91 is formed therein. The first flow channel 17 is oriented in the axial direction of the integrated valve seat 1. A sealing portion 12 can be formed within the first flow channel 17. The sealing portion 12 can abut against the valve core 2 to seal the first flow channel 17, thereby isolating the air inlet 91 from the air outlet 92.

[0061] Among them, the sealing part 12 can be a sheet-like structure, and a vent hole 15 for gas to pass through is provided in the sheet-like structure. The size of the vent hole 15 can be set according to the flow rate and the outer diameter of the transmission part 5, that is, the inner diameter of the vent hole 15 is larger than the outer diameter of the transmission part 5 to ensure that the transmission part 5 can pass through the vent hole 15 and contact the valve core 2.

[0062] The vent hole 15 can be configured as an inverted cone-shaped structure. The inverted cone-shaped structure can effectively prevent the transmission member 5 from contacting the inner wall of the vent hole 15. At the same time, the inverted cone-shaped vent hole 15 can improve the efficiency of airflow when in the open state, quickly adjust the air pressure of the air inlet 91 and the air outlet 92, and effectively reduce the driving force required in the open state.

[0063] It can be understood that when in the closed state, the valve core 2 is subjected to the pressure of the air inlet 91. When in the open state, if the pressure of the air inlet 91 and the air outlet 92 are not equal, the valve core 2 will still be subjected to the pressure difference between the air inlet 91 and the air outlet 92. By setting the air vent 15 with an inverted cone structure, the gas pressure of the air inlet 91 and the air outlet 92 can be quickly equalized, thereby reducing the driving force provided by the driving member 7 and saving resources.

[0064] In order to improve the sealing between the sealing part 12 and the top surface of the valve core 2, a second contact part 16 protruding from the sheet-like structure can be provided on the side of the sealing part 12 of the sheet-like structure close to the valve core 2. The second contact part 16 can be annular, and the end surface of the second contact part 16 in contact with the valve core 2 can be arc-shaped, that is, the contact form of the second contact part 16 and the valve core 2 is line contact, so as to improve the sealing of the two through the above-mentioned line contact.

[0065] The valve core 2 may include a first contact portion 21 and a fixing portion 22. The first contact portion 21 may be cylindrical, and the surface area of the top surface of the first contact portion 21 is larger than the area of the opening of the vent 15 near the bottom surface of the receiving groove. When the second contact portion 16 is provided on the sealing portion 12, the area of the first contact portion 21 is larger than that of the second contact portion 16.

[0066] In practical applications, the surface hardness of the area where the valve core 2 contacts the second contact portion 16 is less than the surface hardness of the second contact portion 16. When the two contact, the surface of the valve core 2 can form a slight deformation, thereby improving the sealing of the air flow channel. For example, a resin film can be formed on the surface of the valve core 2.

[0067] It is understandable that the top surface of the first contact portion 21 or the bottom surface of the second contact portion 16 may be slightly deformed, thereby improving the sealing performance of the two.

[0068] The fixing portion 22 may be a cylindrical structure that can pass through the through hole of the first elastic member 3. The outer diameter of the through hole of the first elastic member 3 is larger than the outer diameter of the fixing portion 22 and smaller than the outer diameter of the first contact portion 21, so that the first contact portion 21 in the valve core 2 is stably disposed above the first elastic member 3.

[0069] The end surface of the valve core 2 in contact with the sealing portion 12 is perpendicular to the axis of the inlet of the air flow channel, so that the pressure of the gas entering the air inlet 91 can be transmitted to the sealing portion 12 through the valve core 2, thereby ensuring air tightness.

[0070] like Figure 9 As shown, the support member 4 can be a circular ring structure, and the height of the support member 4 is greater than the height from the sealing portion 12 to the bottom surface of the integrated valve seat 1, that is, when the support member 4 is arranged inside the integrated valve seat 1, the support member 4 protrudes from the bottom surface of the integrated valve seat 1. In this scenario, one end of the support member 4 is fixed to the bottom surface of the receiving groove or inside the limiting groove in the receiving groove, and the other end of the support member 4 abuts the first elastic member 3. The valve core 2 is arranged above the first elastic member 3, and the valve core 2 contacts the sealing portion 12 to achieve sealing of the air inlet 91 and the air outlet 92. In the open state, the valve core 2 moves downward, and the first elastic member 3 produces a downward deformation. When switched to the closed state, the first elastic member 3 provides a rebound force to abut the valve core 2 against the sealing portion 12. At the same time, the gas pressure of the air inlet 91 further acts on the bottom surface of the valve core 2, thereby better ensuring the sealing performance.

[0071] In an optional embodiment, the integrated valve seat 1 can be provided with a limiting portion 11 abutting against the top surface of the first elastic member 3, and the limiting portion 11 is located below the second contact portion 16 and / or the sealing portion 12. The limiting portion 11 is used to fix the first elastic member 3 between the support member 4 and the limiting portion 11 to further improve the stability of the first elastic member 3.

[0072] The first elastic member 3 is also formed with a through hole for gas to pass through.

[0073] The top surface of the integrated valve seat 1 also has a first recessed platform 13 against which the second elastic member 8 abuts, thereby radially limiting the movement of the second elastic member 8. The depth of the first recessed platform 13 is equal to the sum of the height of the second elastic member 8 and the height of the transmission member 5 above the second elastic member 8. As a result, after the transmission member 5 and the second elastic member 8 are installed on the integrated valve seat 1, the top surface of the transmission member 5 and the top surface of the integrated valve seat 1 are approximately flush.

[0074] It is understandable that the second elastic member 8 and the first elastic member 3 can be springs. The structures of the two are basically the same and will not be described in detail.

[0075] A second recessed platform 14 is also defined on the outer periphery of the top surface of the integrated valve seat 1. Its projection on the bottom surface of the integrated valve seat 1 is located outside the first recessed platform 13. After the integrated valve seat 1 and diaphragm 6 are mounted on the base 9, a second flow channel is formed between the bottom surface of the second recessed platform 14 and the diaphragm 6. At least one third flow channel 18 is defined in the second recessed platform 14, running roughly parallel to the first flow channel 17. A fourth flow channel 19 is also defined on the side of the integrated valve seat 1, communicating with the third flow channel 18 and with the aforementioned air outlet 92.

[0076] like Figure 5 As shown, the structure of the transmission member 5 is essentially the same as that of the valve core 2. In some possible embodiments, the end surface of the transmission member 5 that contacts the diaphragm 6 is spherical. The spherical structure of the transmission member 5 can adaptively adjust the direction of the force when subjected to a deflection force, ensuring that the force is transmitted along the axial direction of the transmission member.

[0077] Specifically, the end surface of the transmission member 5 is spherical, meaning it has a smoothly curved surface. This spherical design ensures that the applied force is transmitted directly to the target point along the shortest path, avoiding energy loss or force dispersion caused by improper angles. Furthermore, compared to flat designs, a spherical surface is easier to maneuver in complex environments and less likely to get stuck. In particular, in the presence of small particles or other impurities, the spherical surface can reduce the accumulation of these substances, further reducing the possibility of jamming.

[0078] like Figure 2 As shown, an annular groove for accommodating the second sealing member 102 is opened on the outside of the accommodating groove. After the second sealing member 102 is arranged in the annular groove, the fourth flow channel 19 can be isolated from the outside through the diaphragm 6 arranged above.

[0079] In some optional embodiments, the outer periphery of the top surface of the integrated valve seat 1 can be set as an annular structure that matches the annular groove, so that after the integrated valve seat 1 is installed in the accommodating groove, the annular structure of the integrated valve seat 1 can abut against the annular groove, thereby fixing the second seal 102 between the outside of the annular structure of the integrated valve seat 1, below the diaphragm 6 and the inner wall of the annular groove, reducing the risk of gas contacting the second seal 102.

[0080] It can be understood that the first seal 101 and the second seal 102 are both in a relatively closed space. Even if the sealing between the integrated valve seat 1 and the base 9 is poor, during the gas flow process, the internal air pressure is relatively stable, and there will be no continuous gas flowing through the surfaces of the first seal 101 and the second seal 102, thereby improving the stability of the first seal 101 and the second seal 102.

[0081] In the prior art, the action part needs to produce the ejector pin, diaphragm 6 and transmission member 5 coaxially during production. Coaxial production has high requirements for coaxial process, resulting in high production difficulty. In addition, since the diaphragm 6 is very thin, it is often damaged and needs to be replaced. When the action part needs to be replaced, it can only be replaced in its entirety, which is more expensive than separate maintenance. In addition, when the force applied by the ejector pin and the upstream drive member 7 is not coaxial with the ejector pin, transmission member 5 and diaphragm 6, the force applied by the drive member 7 will directly act on the integrated transmission mechanism (ejector pin, transmission member and diaphragm). Due to the length of the integrated transmission mechanism, the horizontal component force applied by the drive member will increase the lateral offset at the end of the transmission member 5 (near the end of the vent 15), which will cause the transmission member 5 to be stuck in the vent 15. Specifically, Figure 7 As shown, the solid line represents the offset of the actuating portion when the driving force provided by the driver 7 is coaxial with the actuating portion (the ejector pin, transmission member 5, and diaphragm 6 are integrated). The dashed line represents the offset when the driving force provided by the driver 7 is not coaxial with the actuating portion. It can be seen that there is lateral offset, which causes the force applied to the valve core 2 to be offset from the center point, causing the valve core 2 to deviate laterally and affecting control accuracy.

[0082] In order to overcome the above technical problems, in this embodiment, the transmission member 5 and the diaphragm 6 are in a separate form.

[0083] The diaphragm 6 includes a deformation portion 61 and a force-bearing portion 62 . The deformation portion 61 is arranged around the force-bearing portion 62 and does not contact the integrated valve seat 1 . The force-bearing portion 62 is thicker than the thick bottom of the deformation portion 61 .

[0084] One end of the force-bearing portion 62 abuts against the driving member 7 , and the other end of the force-bearing portion 62 abuts against the transmission member 5 , so that the deformation portion 61 transmits the driving force of the driving member 7 to the transmission member 5 after deformation.

[0085] For details, see Figure 6 The deformation part 61 can be an annular structure, which is arranged around the force-bearing part 62 at the center. The thickness of the force-bearing part 62 is higher than that of the deformation part 61. The thickness of the deformation part 61 is less than or equal to 0.05mm, preferably 0.02mm. The diaphragm 6 can be a circular structure as a whole. The thickness of the contact area between the diaphragm 6 and the base 9 is greater than the thickness of the groove opened in the base for accommodating the diaphragm 6, so that the diaphragm can be fixed in the base by pressing. Figure 1 shown.

[0086] Furthermore, the deformable portion 61 of the conventional diaphragm 6 is manufactured using a turning process, which inevitably generates a significant amount of heat during machining, causing a local temperature rise in the material, resulting in slight but significant deformation of the deformable portion 61. These pre-existing micro-deformations gradually intensify over time and under repeated stress during actual operation. This can easily lead to a decline in the overall performance of the diaphragm 6, shortening its service life and affecting control accuracy, especially for the thin deformable portion 61.

[0087] To overcome these issues, the deformable portion 61 of the diaphragm 6 in this application is formed using metal etching technology. This effectively avoids the risk of thermal damage associated with traditional turning processes, ensuring that the deformable portion 61 does not experience any adverse pre-deformation due to overheating during the manufacturing phase. Metal etching technology enables precise and controlled adjustments to the material, not only ensuring the dimensional accuracy and surface quality of the deformable portion 61, but also significantly improving the overall stability and durability of the diaphragm 6, extending its service life, and enhancing the reliability and efficiency of the fluid control system.

[0088] It is understandable that the transmission member 5 and the diaphragm 6 in the present application are arranged in a separate manner. When the force applied by the driver 7 is not coaxial with the diaphragm 6 and / or the transmission member 5, since the various components are arranged separately, the lateral offset caused by the horizontal component of the force applied to the corresponding components is lower than that of the integrated action part. In addition, the horizontal component of the force applied to the corresponding components can also cause the corresponding components to produce a small lateral movement, further reducing the distance that the end of the transmission member 5 (the end near the vent) moves lateraly due to non-coaxial installation, thereby preventing the end of the transmission member 5 from being stuck in the vent 15 and improving the reliability of the fluid control valve. Furthermore, even if the direction of the force applied by the driver 7 is not coaxial with the transmission member 5, the lateral limit of the second elastic member 8 can ensure that the transmission member moves vertically in the vent 15, thereby reducing the risk of the transmission member 5 being stuck in the vent 15.

[0089] In actual applications, there are often processing errors. When the actual height of the valve core 2 and the support member 4 is higher than the design height, the processing error can be compensated by adding the first elastic member 3. Compared with the existing technology, this application has better adaptability.

[0090] The driver 7 can be a solenoid valve, piezoelectric valve, or other actuator. It provides the driving force to move the transmission member 5 and valve core 2, thereby opening the airflow channel. It is understood that the diaphragm 6 isolates the airflow channel from the driver 7, preventing gas from leaking into the driver 7 and protecting the electronic components within the driver 7 from gas corrosion. Furthermore, since the driver 7 does not directly contact the working medium (gas), the risk of damage to the driver 7 due to impurities in the medium is reduced, thereby improving the stability and reliability of the entire system.

[0091] The driving force provided by the driving member 7 can act directly on the force-bearing part, or can be Figure 5 As shown, by disposing a ejector pin between the driving member and the diaphragm, the ejector pin can cover the force-bearing portion 62 to extend the displacement of the driving member.

[0092] In the implementation of the embodiments of this specification, compared with the split valve seat, the present application adopts an integrated valve seat, which reduces potential leakage points and improves overall reliability and performance. In addition, the rebound force provided by the first elastic member helps maintain close contact between the valve core and the sealing part, and can maintain a good sealing state even after long-term use. The design of the support member not only provides stable support for the first elastic member, but also increases the mechanical stability of the entire device and extends its service life. The combined design of the integrated valve seat and the diaphragm simplifies the overall structure, reduces the number of parts, and reduces the difficulty of assembly and maintenance costs. At the same time, it solves the assembly problems caused by manufacturing errors and improves the usability and maintainability of the product.

[0093] It should also be understood that in the embodiments herein, the term "and / or" merely describes an association between associated objects, indicating that three possible relationships exist. For example, "A and / or B" could represent: A alone, A and B together, or B alone. Furthermore, the character " / " in this document generally indicates an "or" relationship between the associated objects.

[0094] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the above description has generally described the composition and steps of each example according to function. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this document.

[0095] Those skilled in the art will clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0096] In the several embodiments provided herein, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices, or units, or can be an electrical, mechanical, or other form of connection.

[0097] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected based on actual needs to achieve the objectives of the embodiments herein.

[0098] Specific embodiments are used in this article to illustrate the principles and implementation methods of this article. The description of the above embodiments is only used to help understand the methods and core ideas of this article. At the same time, for those skilled in the art, based on the ideas of this article, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation to this article.

Claims

1. A gas flow control device, characterized in that: include: The base (9) is formed with an air inlet (91) and an air outlet (92) on both sides, and an open receiving groove is formed on the top, the air inlet (91) and the air outlet (92) are connected through the receiving groove, and a limiting groove is provided on the bottom surface of the receiving groove; an integrated valve seat (1) disposed in the accommodating groove, wherein the integrated valve seat (1) forms an air flow channel communicating with the air inlet (91) and the air outlet (92), and a sealing portion (12) is formed in the air flow channel; A support member (4) is arranged in the integrated valve seat (1), and one end surface of the support member abuts against the bottom surface of the limiting groove, so that the support member (4) is located between the sealing portion (12) and the accommodating groove; a first elastic member (3) fixedly arranged between the other end surface of the support member (4) and the sealing portion (12), the first elastic member (3) being formed with a first through hole for the valve core (2) to pass through; The valve core (2) comprises: a first contact portion (21) and a fixing portion (22), wherein the top surface of the first contact portion (21) abuts against the sealing portion (12), and the fixing portion (22) passes through the first through hole; a transmission member (5) passing through the sealing portion (12) and connected to the top surface of the first contact portion (21); the outer diameter of the transmission member (5) is smaller than the outer diameter of the air flow channel at the sealing portion (12); a diaphragm (6), disposed above the transmission member (5) and the base (9), connected to the transmission member (5), and sealing the receiving groove; a second elastic member (8), the second elastic member (8) being arranged between the transmission member (5) and the integrated valve seat (1), the top surface of the integrated valve seat (1) being provided with a first sink (13) for the second elastic member (8) to abut against; A first sealing member (101), the first sealing member (101) being disposed between the integrated valve seat (1) and the accommodating groove, and the first sealing member (101) being disposed on the periphery of the support member (4); Wherein, the end surface of the transmission member (5) away from the valve core (2) is a spherical surface.

2. The gas flow control device according to claim 1, characterized in that: The air flow channel comprises: an axial first flow channel (17), a second flow channel formed by the top surface of the integrated valve seat (1) and the diaphragm (6), and a third flow channel (18) perpendicular to the second flow channel; The air inlet is sequentially connected to the first flow channel (17), the second flow channel, the third flow channel (18) and the air outlet (92).

3. The gas flow control device according to claim 1, wherein: An inverted cone-shaped vent hole (15) is formed at one end of the sealing portion (12) close to the transmission member (5).

4. The gas flow control device according to claim 1, wherein: It also includes a driving member (7), which is arranged above the diaphragm (6) and is used to provide a driving force for the diaphragm (6) to move downward.

5. The gas flow control device according to claim 1, wherein: The end portion of the sealing portion (12) that contacts the valve core (2) is arc-shaped.

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