Surface defect detection device and detection method for glass substrate

By designing a detection module that can automatically adjust the angle, the problem of difficulty in detecting arc surfaces or grinding uneven glass substrates in the prior art is solved, and a more efficient and reliable detection effect is achieved.

CN120195192AActive Publication Date: 2025-06-24QILIN ELECTRONIC SHENZHEN CO LTD
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Patent Information

Application Number
CN202510505524.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-22
Publication Date
2025-06-24
Estimated Expiration
2045-04-22

AI Technical Summary

Technical Problem

The existing glass substrate surface defect detection device is difficult to effectively detect glass substrates with arcuate surfaces or uneven surface grinding, resulting in light reflection interference affecting the detection result.

Method used

A detection module can form a surface defect detection device corresponding to the area to be tested on the glass substrate. By cooperating the adjustment component and the support component, the detection module can automatically adjust the angle to adapt to the arcuate surface or the uneven grinding of the glass substrate.

Benefits of technology

It effectively reduces the reflection effect caused by uneven grinding of arc surfaces or grinding, improves the reliability of detection effects and results, and is suitable for glass substrates of various thicknesses, especially glass substrates with uneven grinding of arc surfaces or surfaces.

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Abstract

The invention relates to the field of substrate detection devices, and discloses a glass substrate surface defect detection device and method.The detection device comprises a shell and a detection module used for defect detection, a conveying module used for conveying a glass substrate is arranged on the shell, and an adjusting assembly movably attached to the conveying module is arranged on the shell; the adjusting assembly is provided with a supporting assembly used for supporting the detection module. Through cooperation of the shell, the supporting assembly, the adjusting assembly and the like, the detection module can be inclined to adjust the angle, so that the detection module directly corresponds to the to-be-detected area of the glass substrate, the reflection influence caused by an arc-shaped surface or uneven grinding can be effectively reduced after positive correspondence is formed, the detection effect of the detection module can be further guaranteed, and the detection efficiency is improved. A reliable detection result is ensured; the device can be suitable for the existing plane glass substrate, and the effect is better when the device is suitable for the glass substrate with an arc-shaped surface or non-uniform surface grinding.
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Description

Technical Field

[0001] The present invention relates to the technical field of substrate detection devices, and particularly relates to a surface defect detection device and a detection method for a glass substrate. Background Art

[0002] During the production and transportation of glass substrates, defects such as cracks or dirt may appear on the surface, which may affect the performance of the glass. Therefore, defect detection of glass substrates is required in subsequent processes. During detection, the glass substrate is transported by a conveying system to be under the camera detection module for screening and marking defective parts.

[0003] For example, Chinese Patent Publication No. CN111208151A discloses an in-line detection device for internal defects of a glass substrate, including a base. The middle of the base is fixedly installed with a frame through bolts, and a front baffle is slidably installed on the frame. A limiting device for fixing the front baffle is installed on the frame, and a display and a controller are fixedly installed at the front end of the front baffle through bolts. It can ensure the uniform movement of the glass plate by cooperating with a toothed belt, a conveyor belt, and a pressing belt, effectively avoiding the phenomenon of collisions and other accidents caused by the easy slippage of the glass plate during traditional transportation only using the conveyor belt. It is beneficial to improve the transportation speed of the glass plate during detection, thereby facilitating the improvement of the detection efficiency. The adjustment of the conveying height distance between the conveyor belt of this device and the cooperating toothed belt and the pressing belt is convenient, and it can be applied to the detection and transportation of glass plates of various thicknesses, with better general performance.

[0004] This application uses a conveyor belt to transport the glass substrate and realizes in-line detection through a light transmittance detector. However, when applied to a glass substrate with a curved surface or uneven surface grinding, due to the non-flat surface, it is easy to cause reflective interference, which in turn affects the detection results of surface defects, and there are certain limitations in use.

[0005] Therefore, it is necessary to provide a surface defect detection device and a detection method for a glass substrate to solve the above technical problems. Summary of the Invention

[0006] The purpose of the present invention is to provide a surface defect detection device and a detection method for a glass substrate to solve the problems raised in the above background art.

[0007] To achieve the above purpose, a surface defect detection device and a detection method are designed in which the detection module can be exactly opposite to the area to be measured of the glass substrate, and thus it can be applied to glass substrates with curved surfaces or uneven surface grinding.

[0008] Based on the above idea, the present invention provides the following technical solution: A surface defect detection device for a glass substrate, including a housing and a detection module for defect detection. A conveying module for conveying the glass substrate is arranged on the housing. An adjusting component that is movably attached to the conveying module is arranged on the housing, and a supporting component for supporting the detection module is arranged on the adjusting component; when the glass substrate contacts the adjusting component, the adjusting component drives the detection module to tilt through the supporting component, so that the detection module is exactly corresponding to the area to be measured of the glass substrate.

[0009] As a further solution of the present invention: The adjusting component includes a column that is slidably matched with the housing. A ball that is movably attached to the conveying module is movably installed at the bottom of the column, and a round head that is slidably engaged with the supporting component is rotatably installed on the surface of the column.

[0010] As a further solution of the present invention: The column is slidably matched with the housing in the up and down direction. The number of round heads is an even number and they are symmetrically distributed on the front and rear sides of the column.

[0011] As a further solution of the present invention: The supporting component includes a slide rail that is slidably engaged with the round head and fixedly connected to the detection module, and first springs fixedly installed on both sides of the detection module. A groove for the round head to slide is formed inside the slide rail.

[0012] As a further solution of the present invention: The end of the first spring away from the detection module abuts against the side wall of the column.

[0013] As a further solution of the present invention: The number of the adjusting components is two groups and the detection module is located between the two columns.

[0014] As a further solution of the present invention: The number of the adjusting components is three groups, and the detection module is located between the second column and the third column. The first column can slide up and down and horizontally based on the housing. A rotating component is jointly arranged between the first column and the third column; through the rotating component, the first column and the third column can be lifted synchronously, and the distance between the first column and the third column can be adjusted through the rotating component.

[0015] As a further solution of the present invention: A side plate protrudes from the side wall of the housing, and a sliding groove for the first column to slide is formed on the surface of the side plate.

[0016] As a further solution of the present invention: The rotating component includes two spacer blocks, which are respectively fixedly installed on the first column and the third column. A long rod is threadedly sleeved on one of the spacer blocks, and the long rod is rotatably matched with the other spacer block.

[0017] The present invention also provides the following technical solution: A method for detecting surface defects of a glass substrate, using any one of the above detection devices, includes the following steps: S1. Convey the glass substrate through a conveying module; S2. When the glass substrate contacts the adjusting component, the adjusting component can move correspondingly and drive the detection module to tilt through the supporting component to adjust the angle, so that the detection module is exactly corresponding to the area to be measured of the glass substrate.

[0018] Compared with the prior art, the beneficial effects of the present invention are as follows: Through the cooperation among the housing, the supporting component, the adjusting component, etc., the detection module can be tilted to adjust the angle, so that it is exactly corresponding to the area to be measured of the glass substrate. After forming the exact correspondence, the reflection influence caused by the arc surface or uneven grinding can be effectively reduced, which can further ensure the detection effect of the detection module and ensure the reliability of the detection result; at the same time, this device can be applied to the existing flat glass substrates, and it has better effects when applied to the glass substrates with arc surfaces or uneven surface grinding. The overall application range and use effect are greatly improved, and the practicability is higher. Description of the Drawings

[0019] The present invention will be further described below with reference to the drawings and embodiments: Figure 1 It is a three-dimensional view of the overall structure of the present invention; Figure 2 It is a schematic diagram of the column, housing and ball structure of the present invention; Figure 3 It is a schematic diagram of the slide rail and groove structure of the present invention; Figure 4 It is a schematic diagram of the slide rail and round head structure of the present invention; Figure 5 It is a schematic diagram of the side plate and housing structure of the present invention; Figure 6 It is Figure 5 The enlarged view of the structure at A in Figure 7 It is a schematic diagram of the spacer block and long rod structure of the present invention; Figure 8 It is a schematic diagram of the conveying module and sliding component structure of the present invention; Figure 9 It is a schematic diagram of the base and push plate structure of the present invention; Figure 10 It is Figure 9 The enlarged view of the structure at B in

[0020] In the figure: 1, housing; 2, conveying module; 3, detection module; 4, support assembly; 5, adjustment assembly; 6, rotation assembly; 7, transmission assembly; 8, sliding assembly; 101, side plate; 102, chute; 401, slide rail; 402, groove; 403, first spring; 501, column; 502, ball; 503, round head; 601, spacer; 602, long rod; 701, tooth column; 702, tooth groove; 703, tooth rack; 801, base; 802, push plate; 803, second spring. Detailed implementation manners

[0021] Embodiment 1:

[0022] Please refer to Figures 1 to 4 , an embodiment of the present invention provides a surface defect detection device for a glass substrate. Aiming at the existing glass substrate with an arc surface (the top surface of the glass substrate is arc-shaped) or with uneven surface grinding, it reduces reflection and ensures the detection effect. The device includes a housing 1 and a detection module 3 for defect detection. A conveying module 2 for conveying the glass substrate is arranged on the housing 1. In this embodiment, the conveying module 2 adopts a conveyor belt method, and the detection module 3 adopts a CCD camera detection method. Both are existing mature technologies and will not be described in detail here.

[0023] Furthermore, an adjustment assembly 5 that is movably attached to the conveying module 2 is arranged on the housing 1, and a support assembly 4 for supporting the detection module 3 is arranged on the adjustment assembly 5. When the conveying module 2 drives the glass substrate to contact the adjustment assembly 5, the adjustment assembly 5 can drive the detection module 3 to automatically adjust the angle through the support assembly 4, so that the detection module 3 can be directly corresponding to the glass substrate, reducing the detection influence caused by the arc surface or uneven surface grinding.

[0024] Referring to Figures 2 to 4 , in this embodiment, preferably: the adjustment assembly 5 includes a column 501 that is slidably matched with the housing 1 up and down. A ball 502 that is movably attached to the conveying module 2 is movably installed at the bottom of the column 501. Round heads 503 that are slidably engaged with the support assembly 4 are rotatably installed on both the front and rear sides of the column 501. When the glass substrate is driven by the conveying module 2 to approach the column 501, the ball 502 can contact the glass substrate and move above the glass substrate. At this time, the ball 502 can drive the column 501 and the round head 503 to rise vertically along the housing 1. At this time, the round head 503 can drive the detection module 3 to automatically adjust the angle through the support assembly 4.

[0025] Further, in this embodiment, the number of the adjusting components 5 is two groups and they are symmetrically arranged left and right, and the detection module 3 is located in the middle of the two columns 501. After both columns 501 are located above the glass substrate, if the top surfaces of the glass substrate are on the arc surface or unevenly ground, the rising heights of the two balls 502 based on the glass substrate are different, and further the heights of the columns 501 and the round heads 503 on both sides are different.

[0026] Referring to Figures 2 to 4 , in this embodiment, preferably: The supporting component 4 includes a slide rail 401 that is slidably engaged with the round head 503 and fixedly connected to the detection module 3, and a first spring 403 fixedly installed on both sides of the detection module 3. A groove 402 for the round head 503 to slide is formed inside the slide rail 401. The adaptation of the groove 402 to the round head 503 enables the round head 503 to rotate in the groove 402 and slide left and right along the groove 402.

[0027] Among them, corresponding to the design of the round head 503 on the front and rear sides of the column 501, two front and rear slide rails 401 are also formed, which can provide good support for the detection module 3. At the same time, the end of the first spring 403 far from the detection module 3 is in movable contact with the side wall of the column 501. When the column 501 rises and falls based on the housing 1, it will not drive the corresponding end of the first spring 403 to rise and fall together. When the detection module 3 automatically adjusts the angle, it can drive the first spring 403 to change the angle synchronously.

[0028] Further, referring to Figure 4 , two groups of first springs 403 are provided on both sides of the detection module 3. In actual use, the number of groups of the first springs 403 on both sides can be correspondingly increased. At this time, after the detection module 3 adjusts the angle, the first springs 403 on both sides are respectively in contact with the side walls of the two columns 501, which can make the detection module 3 automatically translate horizontally to the middle position between the two columns 501.

[0029] During use, the conveying module 2 conveys the glass substrate towards the column 501, and the ball 502 can automatically rise along the housing 1 when it contacts the glass substrate. At this time, the ball 502 can drive the column 501 and the round head 503 to move synchronously, and the round head 503 can drive one side of the slide rail 401 to move synchronously through the groove 402. The overall angle of the slide rail 401 is inclined due to the height difference between the two columns 501, and further the detection module 3 automatically adjusts the angle, and at this time, the detection module 3 can be directly corresponding to the area to be measured of the glass substrate.

[0030] In summary, through the cooperation of structures such as the upright column 501, the ball 502, the slide rail 401, and the round head 503, the detection module 3 can be tilted to adjust the angle so that it forms a positive correspondence with the area to be measured of the glass substrate. After forming the positive correspondence, the reflection influence caused by the arc surface or uneven grinding can be effectively reduced, which can further ensure the detection effect of the detection module 3 and ensure the reliability of the detection result. At the same time, this device can be applied to the existing flat glass substrates, and it has a better effect when applied to glass substrates with arc surfaces or uneven surface grinding. The overall applicable range and use effect are greatly improved, and the practicability is higher.

[0031] Embodiment 2: Please refer to Figures 1 to 7 , on the basis of Embodiment 1, considering that when the glass substrate approaches the upright column 501, it will first drive the left upright column 501 to rise, while the right upright column 501 still remains in contact with the conveying module 2 and does not move. At this time, the detection module 3 will tilt and cannot form a positive correspondence with the right side edge of the glass substrate, thereby affecting the detection effect of the side edge of the glass substrate.

[0032] Therefore, the adjustment component 5 is improved: at this time, the number of the adjustment components 5 is three groups, and the detection module 3 is located between the second group of upright columns 501 and the third group of upright columns 501, while the upright column 501 of the first group of adjustment components 5 is movably sleeved with the housing 1. A rotating component 6 is jointly arranged between the upright column 501 of the first group of adjustment components 5 and the upright column 501 of the third group of adjustment components 5. Through the rotating component 6, the synchronous lifting of the first group of adjustment components 5 and the third group of adjustment components 5 can be realized, and the distance between the first group of adjustment components 5 and the third group of adjustment components 5 can be adjusted through the rotating component 6.

[0033] Correspondingly, based on Figure 6 , a side plate 101 protrudes from the surface of the housing 1 to the left. A sliding groove 102 for placing the first group of adjustment components 5 is formed on the surface of the side plate 101. The upright column 501 of the first group of adjustment components 5 can slide up and down and left and right relative to the housing 1 based on the sliding groove 102, and the rotating component 6 makes corresponding restrictions on the upright column 501 of the first group of adjustment components 5. In the above structure, it is equivalent to adding an additional group of upright columns 501 and balls 502 that can slide left and right and up and down on the left side on the basis of Embodiment 1.

[0034] Refer to Figure 6 and Figure 7, in this embodiment, preferably: the rotating assembly 6 includes two spacer blocks 601, which are respectively fixedly installed on the columns 501 of the first set of adjusting assemblies 5 and the third set of adjusting assemblies 5. A long rod 602 is sleeved on one of the spacer blocks 601 in a threaded manner, and the long rod 602 is rotatably matched with the other spacer block 601. When the long rod 602 is rotated, the distance between the two spacer blocks 601 can be adjusted, so that the first column 501 can be translated relative to the third column 501 to adjust the distance therebetween, so that the distance between the centers of the first ball 502 and the third ball 502 is adapted to the length dimension of the glass substrate, that is Figure 7 The displayed state.

[0035] During use, through structures such as the column 501, the ball 502, and the round head 503, the angle of the detection module 3 can be automatically adjusted to form a positive correspondence with the area to be measured of the glass substrate. The working process and effect of this part are the same as those in the first embodiment and will not be repeated here. The difference is that: before transporting the glass substrate, the long rod 602 can be rotated to adjust the distance between the two spacer blocks 601, so that the distance between the centers of the first ball 502 and the third ball 502 is adapted to the length dimension of the glass substrate, and then the glass substrate is transported. At this time, the glass substrate will contact the first ball 502 and drive the first column 501 to rise. The first column 501 drives the third column 501 and the third ball 502 to rise synchronously through the spacer block 601 and the long rod 602.

[0036] When the glass substrate contacts the second ball 502, it will drive the second column 501 to rise. At this time, the first ball 502 will contact the left edge of the glass substrate, so that the third ball 502 and the third column 501 still remain in the raised state. At this time, the detection module 3 can also form a positive correspondence with the right edge of the glass substrate.

[0037] Correspondingly, if you want to further ensure the positive correspondence between the detection module 3 and the left edge of the glass substrate, the adjusting assembly 5 can be set to four groups, and a rotating assembly 6 is also arranged between the second set of adjusting assemblies 5 and the fourth set of adjusting assemblies 5, so that the second column 501 and the fourth column 501 rise synchronously, and the fourth column 501 can be translated relative to the second column 501 to adjust the left and right distances. In this way, when the second ball 502 contacts the left edge of the glass substrate, the fourth ball 502 just contacts the right side corresponding to the glass substrate.

[0038] Compared with the first embodiment, through the cooperation of structures such as the column 501, the spacer block 601, the long rod 602, and the ball 502, the detection module 3 can also form a positive correspondence with the margin of the glass substrate, thereby ensuring the overall detection quality of the glass substrate. The overall solution is combined with the setting of the adjustment component 5 and does not affect the transportation of the glass substrate by the transportation module 2, with stronger applicability.

[0039] Embodiment Three: Please refer to Figures 1 to 10 , on the basis of the second embodiment, considering that the glass substrate may not be aligned front and back after being placed on the transportation module 2. At this time, when the ball 502 moves along the surface of the glass substrate, it will wrongly drive the column 501 to move, thereby affecting the positive correspondence between the subsequent detection module 3 and the glass substrate.

[0040] Therefore, the first column 501 is improved: at this time, a sliding component 8 that is movably attached to the transportation module 2 is provided on the housing 1, and a transmission component 7 is jointly provided between the first column 501, the housing 1, and the sliding component 8. When the first column 501 rises, the sliding component 8 can be driven to move forward through the transmission component 7 to provide a pushing effect on the glass substrate, so that the glass substrate forms a state of being flush front and back.

[0041] Refer to Figures 8 to 10 , in this embodiment, preferably: the sliding component 8 includes a base 801 that is slidably engaged with the housing 1 in the front and back directions. The front surface of the base 801 is elastically connected to a push plate 802 for pushing the glass substrate through a second spring 803. Among them, the base 801 is fixedly connected to the transmission component 7, and the base 801 is driven to move through the transmission component 7, and then the push plate 802 is driven to move forward through the second spring 803.

[0042] Refer to Figures 8 to 10 , in this embodiment, preferably: the transmission component 7 includes a tooth column 701 rotatably installed on the side plate 101, a tooth rack 703 that is slidably engaged with the side plate 101 in the front and back directions and is fixedly connected to the base 801, and a tooth groove 702 opened on the first column 501. Both the tooth groove 702 and the tooth rack 703 are in meshing transmission with the tooth column 701. Therefore, when the first column 501 drives the tooth groove 702 to rise, the tooth rack 703 can be driven to move forward through the tooth column 701.

[0043] In the above structure, the tooth rack 703 and the tooth groove 702 are arranged in a staggered manner based on the tooth column 701. The tooth groove 702 is meshed with the tooth column 701 up and down, and the tooth rack 703 is meshed with the tooth column 701 in the front and back directions. And the length dimension of the tooth column 701 in the axial direction is greater than the length dimension of the sliding groove 102 in the axial direction of the tooth column 701, so that the first column 501 will not interfere with the tooth rack 703 when moving along the sliding groove 102.

[0044] In this embodiment, the movable sleeving of the ball 502 and the column 501 can be set to be movable sleeved front and back and also movable sleeved left and right at the same time. When the push plate 802 drives the glass substrate to move, the ball 502 can roll back and forth to form an avoidance, so as to avoid damaging the top surface of the glass substrate.

[0045] During use, through structures such as the column 501, the ball 502, and the round head 503, the angle of the detection module 3 can be automatically adjusted to form a positive correspondence with the area to be measured of the glass substrate; through structures such as the column 501, the spacer 601, and the long rod 602, the detection module 3 can also form a positive correspondence with the margin of the glass substrate. The working process and effects of this part are the same as those in the second embodiment and will not be repeated here. The difference is that when the distance between the first column 501 and the third column 501 is adjusted by the long rod 602, the tooth groove 702 on the first column 501 can translate along the tooth column 701, and the two will not interfere with each other. When the first column 501 contacts and rises with the glass substrate, it can drive the tooth groove 702 to move synchronously. The tooth groove 702 drives the tooth rack 703 to move forward through the tooth column 701. The tooth rack 703 drives the push plate 802 to move forward through the base 801 and the second spring 803, and then the glass substrate is pushed forward through the push plate 802, making the front and back of the glass substrate flush.

[0046] Compared with the second embodiment, through the cooperation of structures such as the column 501, the tooth column 701, the base 801, and the push plate 802, when the first column 501 rises, it can drive the push plate 802 to move forward, push the glass substrate forward, making the glass substrate in a state where the front and back are flush. Furthermore, the second ball 502 and the third ball 502 can accurately contact the arc surface or the uneven grinding area, thereby ensuring the correct adjustment of the angle of the subsequent detection module 3 and further ensuring the accuracy of the detection result. The overall solution is combined with the movement of the column 501, which is beneficial to the contact between the ball 502 and the arc surface and the uneven grinding area, and also realizes the front and back positioning of the glass substrate, meeting more requirements in actual use.

[0047] Embodiment 4: Please refer to Figures 1 to 10 , an embodiment of the present invention provides a method for detecting surface defects of a glass substrate. This embodiment adopts any one of Embodiments 1 to 3, so it also has corresponding beneficial effects.

[0048] Specifically, first place the glass substrate on the conveying module 2 for conveying. When the conveying module 2 drives the glass substrate to contact the adjusting component 5, the adjusting component 5 can correspondingly rise and drive the detection module 3 to tilt through the supporting component 4 to adjust the angle, so that the detection module 3 can form a positive correspondence with the area to be measured of the glass substrate.

Claims

1. A surface defect detection device for a glass substrate, comprising a housing and a detection module for defect detection, wherein a conveying module for conveying the glass substrate is arranged on the housing, characterized in that: The shell is provided with an adjusting component that is movably fitted with the conveying module, and the adjusting component is provided with a supporting component for supporting the detection module; when the glass substrate contacts the adjusting component, the adjusting component drives the detection module to tilt through the supporting component, so that the detection module is in positive correspondence with the area to be detected of the glass substrate.

2. The surface defect detection device for a glass substrate according to claim 1, characterized in that: The adjustment component includes a column that is slidably matched with the shell, a ball that is movably mounted on the bottom of the column and movably fits with the conveying module, and a round head that is rotatably mounted on the surface of the column and slidably engages with the support component.

3. The surface defect detection device for a glass substrate according to claim 2, characterized in that: The column is slidably matched with the shell body up and down, and the number of round heads is an even number and is symmetrically distributed on the front and rear sides of the column.

4. The surface defect detection device for a glass substrate according to claim 2, characterized in that: The support assembly comprises a slide rail which is slidably engaged with the round head and fixedly connected to the detection module, and a first spring which is fixedly installed on both sides of the detection module. A groove is provided inside the slide rail for the round head to slide.

5. The surface defect detection device for a glass substrate according to claim 4, characterized in that: The end of the first spring away from the detection module abuts against the side wall of the column.

6. The surface defect detection device for a glass substrate according to any one of claims 2 to 5, characterized in that: The number of the adjustment components is two groups and the detection module is located between two columns.

7. The surface defect detection device for a glass substrate according to any one of claims 2 to 5, characterized in that: The number of the adjustment components is three, and the detection module is located between the second column and the third column. The first column can slide up and down and horizontally based on the shell, and a rotating component is commonly provided between the first column and the third column. The rotating component can realize synchronous lifting and lowering of the first column and the third column, and the rotating component can adjust the distance between the first column and the third column.

8. The surface defect detection device for a glass substrate according to claim 7, characterized in that: The side wall of the shell is protruded to form a side plate, and the surface of the side plate is provided with a sliding groove for the first column to slide.

9. The surface defect detection device and detection method of the glass substrate according to claim 7, characterized in that: The rotating assembly comprises two spacers, which are respectively fixedly mounted on the first column and the third column. A long rod is threadedly sleeved on one of the spacers, and the long rod is rotatably matched with the other spacer.

10. A method for detecting surface defects of a glass substrate, comprising the surface defect detection device according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, conveying the glass substrate through a conveying module; S2. When the glass substrate contacts the adjustment component, the adjustment component can move accordingly and drive the detection module to tilt through the support component to adjust the angle, so that the detection module is in direct correspondence with the area to be detected on the glass substrate.

Citation Information

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