Internal and external trigger control excimer laser output system and control method thereof

Abstract

The invention discloses an internal and external trigger control excimer laser output system and a control method thereof. The system comprises a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch and a laser generation unit, the central control system comprises a single-chip microcomputer, a charging signal generation circuit, an external trigger signal generator, a central control power supply VCC and switches S1-S4. The single-chip microcomputer is connected with the high-voltage switch trigger through a switch S4 to transmit an internal trigger light emitting signal, controls the charging signal generation circuit to be connected with the high-voltage generator through a switch S2 to transmit an internal trigger charging signal, and is connected with the high-voltage generator to transmit a high-voltage flat top signal. An external trigger signal generator is connected with a high-voltage switch trigger through a switch S1 to transmit an external trigger light emitting signal, a central control power supply VCC is connected with a high-voltage generator through a switch S3 to transmit an external trigger charging signal, an internal trigger or external trigger light emitting mode of the laser generating unit is realized by connecting different switches, and control disorder is avoided.

Description

[Technical Field]

[0001] The present invention relates to the technical field of high-voltage switch control, and in particular to an internal and external trigger control excimer laser output system and its control method. [Background Art]

[0002] Excimer lasers need to operate at high voltage. High-voltage switches such as IGBTs and hydrogen thyratrons are two typical switches used in high-voltage circuits. Since a high-voltage switch will couple tens to thousands of volts of spike interference voltage into the trigger terminal during the conduction process. This spike interference voltage will interfere with and damage low-voltage components in the trigger circuit. At the same time, the invention patent with the publication number CN111416272B discloses a trigger and protection circuit for an excimer laser high-voltage switch, which can generate a trigger signal for the high-voltage switch and has the ability to resist high-voltage spike pulse interference, enabling the high-voltage switch to work stably for a long time. However, this trigger and protection circuit has the problem of chaotic trigger control mode, so that when the laser generating unit generates laser, both the energy storage device and the high-voltage switch of the laser generating unit need to bear a long high-voltage loading time, shortening the service life of the energy storage device and the high-voltage switch. [Summary of the Invention]

[0003] The present invention overcomes the deficiencies of the prior art and provides an internal and external trigger control excimer laser output system and its control method, which selects mutually exclusive internal trigger modes of charging and discharging immediately and external trigger modes of continuously applying high voltage according to the usage requirements, avoiding the chaotic trigger control mode causing both the energy storage device and the high-voltage switch to require long-term high-voltage loading during operation.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] An internal and external trigger control excimer laser output system, characterized in that: it includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch and a laser generating unit;

[0006] The grounding end of the high-voltage switch trigger is connected to the grounding end of the high-voltage switch, and the control output end of the high-voltage switch trigger is connected to the trigger end of the high-voltage switch;

[0007] The output end of the high-voltage generator is respectively connected to the collector end of the high-voltage switch and the laser generating unit, and the laser generating unit is used to generate laser;

[0008] The central control system includes a single-chip microcomputer, a charging signal generating circuit, an external trigger signal generator, a central control power supply VCC, switch S1, switch S2, switch S3 and switch S4;

[0009] The single-chip microcomputer is used to generate internal trigger light-emitting signals, charging signal generation circuit drive signals, and high-voltage flat-top signals. The charging signal generation circuit is used to generate internal trigger charging signals. The external trigger signal generator is used to generate external trigger light-emitting signals. The central control power supply VCC is used to generate external trigger charging signals;

[0010] The output terminal of the internal trigger light-emitting signal of the single-chip microcomputer is connected to one end of the switch S4, and the other end of the switch S4 is connected to the high-voltage switch trigger;

[0011] The output terminal of the charging signal generation circuit drive signal of the single-chip microcomputer is connected to the charging signal generation circuit. The output terminal of the charging signal generation circuit is connected to one end of the switch S2, and the other end of the switch S2 is connected to the high-voltage generator;

[0012] The output terminal of the high-voltage flat-top signal of the single-chip microcomputer is connected to the high-voltage generator;

[0013] The external trigger signal generator is connected to one end of the switch S1, and the other end of the switch S1 is connected to the high-voltage switch trigger;

[0014] The central control power supply VCC is connected to one end of the switch S3, and the other end of the switch S3 is connected to the high-voltage generator.

[0015] An internal and external trigger control excimer laser output system as described above, characterized in that: the switches S1-S4 are all electronic switches and form a multiplexer selector;

[0016] The central control system further includes a multiplexer selector drive circuit;

[0017] The single-chip microcomputer is also used to generate multiplexer selector drive signals. The output terminals of the multiplexer selector drive signals of the single-chip microcomputer are respectively connected to the multiplexer selector drive circuit, the control terminal of the switch S1, and the control terminal of the switch S3;

[0018] The drive terminals of the multiplexer selector drive circuit are respectively connected to the control terminal of the switch S2 and the control terminal of the switch S4.

[0019] An internal and external trigger control excimer laser output system as described above, characterized in that: the multiplexer selector drive circuit includes a triode Q2. The collector of the triode Q2 is respectively connected to one end of the resistor R4, the control terminal of the switch S4, and the control terminal of the switch S2. The other end of the resistor R4 is connected to the central control power supply VCC. The base of the triode Q2 is respectively connected to the control terminal of the switch S1, the control terminal of the switch S3, and the output terminal of the multiplexer selector drive signal of the single-chip microcomputer through the resistor R5. The emitter of the triode Q2 is grounded.

[0020] An internal and external trigger control excimer laser output system as described above, characterized in that: it further includes a touch screen, which is used to generate an internal trigger control signal or an external trigger control signal, and the control signal output end of the touch screen is connected to a single-chip microcomputer to set the central control system to internal trigger control or external trigger control.

[0021] An internal and external trigger control excimer laser output system as described above, characterized in that: it further includes an optical fiber head FB1, an optical fiber head FB2, an optical fiber head FB3 and an optical fiber head FB4;

[0022] One end of switch S4 is connected to the optical fiber head FB4 provided at one input end of the high-voltage switch trigger through a fourth optical fiber line, and the fourth optical fiber line is used to transmit the internal trigger light emission signal generated by the single-chip microcomputer to the high-voltage switch trigger;

[0023] One end of switch S1 is connected to the optical fiber head FB1 provided at the other input end of the high-voltage switch trigger through a first optical fiber line, and the first optical fiber line is used to transmit the external trigger light emission signal generated by the external trigger signal generator to the high-voltage switch trigger;

[0024] The connection end of switch S2 and switch S3 is connected to the optical fiber head FB2 provided at one input end of the high-voltage generator through a second optical fiber line, and the second optical fiber line is used to transmit the internal trigger charging signal generated by the charging signal generation circuit or the external trigger charging signal generated by the central control power supply VCC to the high-voltage generator;

[0025] The high-voltage flat-top signal output end of the single-chip microcomputer is connected to the optical fiber head FB3 provided at the other input end of the high-voltage generator through a third optical fiber line, and the third optical fiber line is used to transmit the high-voltage flat-top signal generated by the single-chip microcomputer to the high-voltage generator.

[0026] An internal and external trigger control excimer laser output system as described above, characterized in that: it further includes an optical fiber head FB11, an optical fiber head FB21, an optical fiber head FB31 and an optical fiber head FB41;

[0027] The fourth optical fiber line is connected to the optical fiber head FB41 provided at one end of switch S4;

[0028] The first optical fiber line is connected to the optical fiber head FB11 provided at one end of switch S1;

[0029] The second optical fiber line is connected to the optical fiber head FB21 provided at the connection end of switch S2 and switch S3;

[0030] The third optical fiber line is connected to the optical fiber head FB31 provided at the high-voltage flat-top signal output end of the single-chip microcomputer.

[0031] An internal and external trigger control excimer laser output system as described above, characterized in that: the high-voltage switch is a thyratron, and the high-voltage switch trigger is a thyratron trigger.

[0032] An internal and external trigger control excimer laser output system as described above, characterized in that: the laser generating unit includes an energy storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode and an anode electrode;

[0033] The output end of the high-voltage generator is connected to one end of the energy storage capacitor Cs, and the other end of the energy storage capacitor Cs is respectively connected to one end of the inductor Ls, one end of the discharge capacitor Cd, and the cathode electrode. The other end of the inductor Ls, the other end of the discharge capacitor Cd, and the anode electrode are respectively grounded.

[0034] A control method for applying the above internal and external trigger control excimer laser output system, characterized in that: it includes

[0035] S1. Connect switch S4 and switch S2;

[0036] S2. The single-chip microcomputer controls the charging signal generation circuit to transmit the generated internal trigger charging signal to the high-voltage generator through switch S2, and at the same time the single-chip microcomputer transmits the generated high-voltage flat-top signal to the high-voltage generator;

[0037] S3. The high-voltage generator generates high voltage and charges the energy storage capacitor Cs of the laser generating unit;

[0038] S4. At the falling edge of the internal trigger charging signal, the single-chip microcomputer transmits the generated internal trigger light-emitting signal to the high-voltage switch trigger through switch S4, and the high-voltage switch trigger generates a negative bias positive pulse signal to trigger the high-voltage switch to conduct, so that the laser generating unit generates laser.

[0039] A control method for applying the above internal and external trigger control excimer laser output system, characterized in that: it includes

[0040] S1. Connect switch S1 and switch S3;

[0041] S2. The central control power supply VCC transmits the generated external trigger charging signal to the high-voltage generator through switch S3, and at the same time the single-chip microcomputer transmits the generated high-voltage flat-top signal to the high-voltage generator;

[0042] S3. The high-voltage generator generates high voltage and continuously charges the energy storage capacitor Cs of the laser generating unit;

[0043] S4. The external trigger signal generator transmits the generated external trigger light-emitting signal to the high-voltage switch trigger through switch S1, and the high-voltage switch trigger generates a negative bias positive pulse signal to trigger the high-voltage switch to conduct, so that the laser generating unit generates laser.

[0044] The beneficial effects of the present invention are as follows:

[0045] 1. In the present invention, it is possible to set the switch S4 and the switch S2 in the multi-way switch selector to be connected, so as to realize the internal trigger mode of the laser generating unit that charges and discharges immediately, or set the switch S1 and the switch S3 in the multi-way switch selector to be connected, so as to realize the external trigger mode of the laser generating unit that continuously outputs laser. The internal trigger mode and the external trigger mode are mutually exclusive, avoiding the need for both the energy storage device and the high-voltage switch to be loaded with high voltage for a long time due to control disorders. At the same time, the trigger mode can be selected according to actual usage requirements, increasing the scope of use.

[0046] 2. In the internal trigger mode of the present invention, the energy storage device and the high-voltage switch of the laser generating unit adopt the immediate charge and discharge mode, and the signal generated by the central control system controls the generation of laser light pulses, effectively reducing the time for high voltage to be loaded on the energy storage capacitor and the high-voltage switch, and prolonging the service life of the energy storage capacitor and the high-voltage switch.

[0047] 3. In the external trigger mode of the present invention, the energy storage device and the high-voltage switch of the laser generating unit adopt the continuous high-voltage loading mode, and the external trigger generates an optical trigger signal to control the trigger conduction of the high-voltage switch, so that the laser generates a laser output with low jitter, and the laser can be configured as an amplifier. [Description of the Drawings]

[0048] Figure 1 It is a circuit schematic diagram of the present invention where the high-voltage switch is a thyratron;

[0049] Figure 2 It is a relationship diagram of the states of each device and each signal in the internal trigger mode of the present invention;

[0050] Figure 3 It is a delay waveform diagram between the falling edge of the charging signal and the laser in the internal trigger mode of the present invention;

[0051] Figure 4 It is a relationship diagram of the states of each device and each signal in the external trigger mode of the present invention;

[0052] Figure 5 It is a delay waveform diagram between the charging signal and the laser in the external trigger mode of the present invention;

[0053] Figure 6 It is a laser pulse signal measured at different voltages under the same trigger signal in the external trigger mode of the present invention; Figure 7 It is a comparison table of the delay time between the charging signal and the laser at different voltages in the external trigger mode of the present invention. [Detailed Embodiments]

[0054] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings.

[0055] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship, movement conditions, etc. between components in a specific posture (as shown in the attached drawings). If the specific posture changes, the directional indications will also change accordingly. In addition, the descriptions involving "preferred", "sub-preferred", etc. in the present invention are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "preferred" and "sub-preferred" may explicitly or implicitly include at least one such feature.

[0056] As Figure 1 shown, an internal and external trigger control excimer laser output system includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch, a laser generating unit, fiber optic head FB1, fiber optic head FB2, fiber optic head FB3, and fiber optic head FB4. Among them, the high-voltage switch is a thyratron, and the high-voltage switch trigger is a thyratron trigger; the laser generating unit includes an energy storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode, and an anode electrode.

[0057] In this case, the input end of the thyratron trigger is connected to fiber optic head FB1 and fiber optic head FB4, which are respectively used to receive the external trigger light trigger signal and the internal trigger light trigger signal; the input end of the high-voltage generator is connected to fiber optic head FB2 and fiber optic head FB3, which are respectively used to receive the charging signal and the power supply charging high-voltage flat-top signal.

[0058] In this case, the central control system is used to generate the internal trigger light signal, the external trigger light signal, the charging signal, and the high-voltage flat-top signal. As Figure 1 shown, the central control system includes a single-chip microcomputer, a charging signal generating circuit, an external trigger signal generator, a central control power supply VCC, a multiplexer driver circuit, switch S1, switch S2, switch S3, and switch S4. Among them, switches S1-S4 are all electronic switches and constitute a multiplexer.

[0059] One end of switch S4 in the central control system is connected to fiber optic head FB4 disposed at one input end of the high-voltage switch trigger through the fourth optical fiber line, and the fourth optical fiber line is used to transmit the internal trigger light signal generated by the single-chip microcomputer to the high-voltage switch trigger;

[0060] One end of switch S1 in the central control system is connected to fiber optic head FB1 disposed at the other input end of the high-voltage switch trigger through the first optical fiber line, and the first optical fiber line is used to transmit the external trigger light signal generated by the external trigger signal generator to the high-voltage switch trigger;

[0061] The connection terminals of switch S2 and switch S3 in the central control system are connected to the optical fiber head FB2 arranged at one input end of the high-voltage generator through a second optical fiber line. The second optical fiber line is used to transmit the internal trigger charging signal generated by the charging signal generation circuit or the external trigger charging signal generated by the central control power supply VCC to the high-voltage generator;

[0062] The high-voltage flat-top signal output terminal of the single-chip microcomputer in the central control system is connected to the optical fiber head FB3 arranged at the other input end of the high-voltage generator through a third optical fiber line. The third optical fiber line is used to transmit the high-voltage flat-top signal generated by the single-chip microcomputer to the high-voltage generator.

[0063] As Figure 1-3 shown, when the internal trigger mode is selected, the single-chip microcomputer in the central control system controls the switches S4 and S2 in the multiplexer to be connected through the multiplexer driver circuit, and makes the switches S1 and S3 not connected. At this time, the single-chip microcomputer controls the charging signal generator circuit to transmit the internal trigger charging signal to the high-voltage generator through the switch S2 of the multiplexer and the second optical fiber line. The single-chip microcomputer transmits the internal trigger light-emitting signal to the thyratron through the switch S4 of the multiplexer and the fourth optical fiber line. At the same time, the single-chip microcomputer transmits the power supply charging high-voltage flat-top signal to the high-voltage generator through the third optical fiber line. When the high-voltage generator receives the control signals of the second optical fiber line and the third optical fiber line, it generates high voltage and charges the energy storage capacitor Cs. The high-voltage state of the energy storage capacitor Cs is as Figure 2 shown. At the falling edge of the internal trigger charging signal, the single-chip microcomputer emits an internal trigger light-emitting signal, and the thyratron trigger generates a negative bias positive pulse signal to trigger the thyratron to conduct, so that the subsequent laser generates laser. By emitting light in the internal trigger mode, through actual measurement, the delay between the rising edge of the charging signal and the laser is about 20.00346 ms, and the jitter is several hundred microseconds. The delay between the falling edge of the charging signal and the laser is about 3.46 microseconds, and the jitter is 200 nanoseconds, effectively reducing the time for high voltage to be applied to the energy storage capacitor and the thyratron, and prolonging the service life of the energy storage capacitor and the thyratron.

[0064] As Figures 4-7 shown, when the external trigger mode is selected, the single-chip microcomputer in the central control system controls the switches S1 and S3 in the multiplexer to be connected through the multiplexer driver circuit, and makes the switches S4 and S2 not connected. At this time, the external trigger charging signal generated by the central control power supply VCC is transmitted to the high-voltage generator through the switch S3 of the multiplexer and the second optical fiber line as a continuous external trigger charging signal. The single-chip microcomputer transmits the power supply charging high-voltage flat-top signal to the high-voltage generator through the third optical fiber line. When the high-voltage generator receives the control signals of the second optical fiber line and the third optical fiber line, it generates high voltage and continuously charges the energy storage capacitor Cs. The high-voltage state of the energy storage capacitor Cs is as Figure 4As shown in the figure. The external trigger signal generated by the external trigger signal generator is transmitted to the thyratron trigger as an external trigger light emission signal through the switch S1 of the multiplexer selector and the first optical fiber line. After receiving this signal, the thyratron trigger triggers the thyratron to conduct, so that the subsequent laser generates laser light. After a delay of about 706 - 726 ns between the external trigger signal and the laser light emission optical pulse signal, the laser emits light. The laser pulse width is about 11 - 12 ns, and the jitter is less than 2 ns, realizing low-jitter laser output of the laser.

[0065] This external trigger control method provides low-jitter control of the trigger signal and the laser optical pulse. Using this control method, the laser can be configured as an amplifier. After solid-state laser frequency doubling, high-quality narrow-linewidth seed light is generated, and then injected into the amplifier for amplification, so as to obtain narrow-linewidth excimer laser in the order of dozens of millijoules.

[0066] As Figure 1 As shown in the figure, an internal and external trigger control excimer laser output system further includes a touch screen. The touch screen is used to generate an internal trigger control signal or an external trigger control signal. The touch screen control signal output terminal is connected to the single-chip microcomputer to set the central control system to internal trigger control or external trigger control. The principle is to realize the internal trigger control mode or the external trigger control mode of the laser selected by the touch screen by controlling the output of high level or low level of the RA5 port of the single-chip microcomputer. When the RA5 port outputs 5V, the switches S1 and S3 of the multiplexer selector are closed and connected, and the switches S4 and S2 are disconnected, selecting the external trigger control mode. When the RA5 port outputs 0V, the switches S1 and S3 of the multiplexer selector are disconnected, and the switches S4 and S2 are closed and connected, selecting the internal trigger control mode. In this case, the internal trigger control mode and the external trigger control mode are mutually exclusive, avoiding control chaos and extending the service life of the laser.

[0067] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. All equivalent structural transformations made under the inventive concept of the present invention by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. An internal and external trigger control excimer laser output system, characterized in that: It includes a central control system, a high-voltage switch trigger, a high-voltage generator, a high-voltage switch and a laser generating unit; The ground terminal of the high-voltage switch trigger is connected to the ground terminal of the high-voltage switch, and the control output terminal of the high-voltage switch trigger is connected to the trigger terminal of the high-voltage switch; The output end of the high voltage generator is respectively connected to the collector end of the high voltage switch and the laser generating unit, and the laser generating unit is used to generate laser; The central control system includes a single chip microcomputer, a charging signal generating circuit, an external trigger signal generator, a central control power supply VCC, a switch S1, a switch S2, a switch S3 and a switch S4; The single chip microcomputer is used to generate the internal trigger light output signal, the charging signal generating circuit driving signal and the high voltage flat top signal. The charging signal generating circuit is used to generate the internal trigger charging signal. The external trigger signal generator is used to generate the external trigger light output signal. The central control power supply VCC is used to generate the external trigger charging signal. The internal trigger light signal output terminal of the single chip microcomputer is connected to one end of the switch S4, and the other end of the switch S4 is connected to the high voltage switch trigger; The charging signal generating circuit driving signal output end of the single chip microcomputer is connected to the charging signal generating circuit, the output end of the charging signal generating circuit is connected to one end of the switch S2, and the other end of the switch S2 is connected to the high voltage generator; The high-voltage flat-top signal output terminal of the single-chip microcomputer is connected to the high-voltage generator; The external trigger signal generator is connected to one end of the switch S1, and the other end of the switch S1 is connected to the high-voltage switch trigger; The central control power supply VCC is connected to one end of the switch S3, and the other end of the switch S3 is connected to the high voltage generator.

2. The excimer laser output system for internal and external triggering control according to claim 1, characterized in that: Switches S1-S4 are all electronic switches and constitute a multi-way switch selector; The central control system also includes a multi-way switch selector drive circuit; The single chip microcomputer is also used to generate a multi-way switch selector drive signal, and the multi-way switch selector drive signal output terminal of the single chip microcomputer is respectively connected to the multi-way switch selector drive circuit, the control terminal of the switch S1 and the control terminal of the switch S3; The driving end of the multi-way switch selector driving circuit is connected to the control end of the switch S2 and the control end of the switch S4 respectively.

3. The excimer laser output system for internal and external triggering control according to claim 2, characterized in that: The multi-way switch selector driving circuit includes a transistor Q2, the collector of the transistor Q2 is respectively connected to one end of a resistor R4, a control end of a switch S4, and a control end of a switch S2, the other end of the resistor R4 is connected to a central control power supply VCC, the base of the transistor Q2 is respectively connected to the control end of a switch S1, a control end of a switch S3, and a multi-way switch selector driving signal output end of a single-chip computer through a resistor R5, and the emitter of the transistor Q2 is grounded.

4. The excimer laser output system for internal and external triggering control according to claim 2, characterized in that: It also includes a touch screen, which is used to generate an internal trigger control signal or an external trigger control signal. The control signal output end of the touch screen is connected to the single-chip microcomputer so that the central control system is set to internal trigger control or external trigger control.

5. The excimer laser output system for internal and external triggering control according to claim 1, characterized in that: It also includes an optical fiber head FB1, an optical fiber head FB2, an optical fiber head FB3 and an optical fiber head FB4; One end of the switch S4 is connected to an optical fiber head FB4 provided at one of the input ends of the high-voltage switch trigger through a fourth optical fiber line, and the fourth optical fiber line is used to transmit the internal trigger light signal generated by the single-chip microcomputer to the high-voltage switch trigger; One end of the switch S1 is connected to an optical fiber head FB1 arranged at another input end of the high-voltage switch trigger through a first optical fiber line, and the first optical fiber line is used to transmit the external trigger light signal generated by the external trigger signal generator to the high-voltage switch trigger; The connection ends of the switches S2 and S3 are connected to an optical fiber head FB2 provided at one of the input ends of the high-voltage generator through a second optical fiber line, and the second optical fiber line is used to transmit the internal trigger charging signal generated by the charging signal generating circuit or the external trigger charging signal generated by the central control power supply VCC to the high-voltage generator; The high-voltage flat-top signal output end of the single-chip microcomputer is connected to the optical fiber head FB3 arranged at another input end of the high-voltage generator through a third optical fiber line. The third optical fiber line is used to transmit the high-voltage flat-top signal generated by the single-chip microcomputer to the high-voltage generator.

6. The excimer laser output system for internal and external triggering control according to claim 5, characterized in that: It also includes an optical fiber head FB11, an optical fiber head FB21, an optical fiber head FB31 and an optical fiber head FB41; The fourth optical fiber line is connected to the optical fiber head FB41 arranged at one end of the switch S4; The first optical fiber line is connected to the optical fiber head FB11 arranged at one end of the switch S1; The second optical fiber line is connected to the optical fiber head FB21 provided at the connection end of the switch S2 and the switch S3; The third optical fiber line is connected to the optical fiber head FB31 arranged at the high-voltage flat-top signal output end of the single-chip microcomputer.

7. An internal and external triggering control excimer laser output system according to any one of claims 1 to 6, characterized in that: The high voltage switch is a thyristor, and the high voltage switch trigger is a thyristor trigger.

8. The excimer laser output system for internal and external triggering control according to claim 7, characterized in that: The laser generating unit includes a storage capacitor Cs, an inductor Ls, a discharge capacitor Cd, a cathode electrode and an anode electrode; The output end of the high voltage generator is connected to one end of the energy storage capacitor Cs, and the other end of the energy storage capacitor Cs is respectively connected to one end of the inductor Ls, one end of the discharge capacitor Cd, and the cathode electrode, and the other end of the inductor Ls, the other end of the discharge capacitor Cd, and the anode electrode are grounded respectively.

9. A control method for an excimer laser output system using any one of 1 to 8, characterized in that: Included S1, connect switch S4 and switch S2; S2, the single-chip microcomputer controls the charging signal generating circuit to transmit the generated internal trigger charging signal to the high-voltage generator through the switch S2, and the single-chip microcomputer transmits the generated high-voltage flat-top signal to the high-voltage generator; S3, the high voltage generator generates high voltage and charges the energy storage capacitor Cs of the laser generating unit; S4, at the falling edge of the internal trigger charging signal, the single chip transmits the generated internal trigger light output signal to the high voltage switch trigger through switch S4, and the high voltage switch trigger generates a negative bias positive pulse signal, triggering the high voltage switch to turn on, so that the laser generating unit generates laser.

10. A control method for an excimer laser output system using any one of 1 to 8, characterized in that: Included S1, connect switch S1 and switch S3; S2, the central control power supply VCC transmits the generated external trigger charging signal to the high voltage generator through the switch S3, and at the same time, the single chip microcomputer transmits the generated high voltage flat top signal to the high voltage generator; S3, the high voltage generator generates high voltage and continuously charges the energy storage capacitor Cs of the laser generating unit; S4, the external trigger signal generator transmits the generated external trigger light signal to the high-voltage switch trigger through the switch S1, and the high-voltage switch trigger generates a negative bias positive pulse signal to trigger the high-voltage switch to turn on, so that the laser generating unit generates laser.

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