Charged particle beam telescope device and use method thereof

Abstract

The invention relates to a charged particle beam telescope device and a use method thereof, the device comprises a trigger unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit and a data processing unit, the position detection unit comprises a plurality of silicon pixel detectors; the two trigger units are respectively arranged at the upstream and the downstream of the charged particle beam; the plurality of silicon pixel detectors are arranged between the two triggering units in a straight line, and a station for placing a detected position detector is arranged between every plurality of silicon pixel detectors; the trigger processing unit is used for receiving a signal from the trigger unit and generating a trigger signal according to a preset threshold or logic; the signal acquisition and reading unit is used for obtaining spatial position data of the processed charged particle beam; and the data processing unit is used for determining the positioning precision parameter of the detected position detector. The device can be widely applied to the technical field of particle physics and high-energy physics experiments.

Description

Technical Field

[0001] The present invention relates to the technical field of particle physics and high - energy physics experiments, and particularly to a charged particle beam telescope device and its usage method. Background Art

[0002] In the field of particle physics and nuclear physics experiments, as a core detection device, the position detector is used to accurately track and measure particle trajectories, and its performance directly determines the accuracy of particle trajectory reconstruction and the reliability of experimental data. With the continuous improvement of the requirements for detector resolution in high - energy physics experiments and the wide application of new detectors (such as silicon pixel detectors 21, micro - structure gas detectors, etc.), how to achieve high - precision calibration of the position detector has become a key technical problem to be solved urgently.

[0003] Currently, the mainstream particle position detectors include silicon microstrip detectors, gas drift chambers, scintillation detectors, etc., and there are significant differences in their technical principles and structural characteristics. For example, silicon microstrip detectors rely on the ionization effect in semiconductor materials to locate particle trajectories, while gas detectors calculate position information by measuring the drift time of ionized electrons in an electric field. This principle difference makes the inherent position resolution error characteristics of different detectors complex and difficult to evaluate uniformly. In addition, minor deviations in detector manufacturing processes (such as silicon wafer etching accuracy, gas chamber uniformity, etc.) and performance degradation during long - term operation (such as radiation damage, material aging, etc.) further exacerbate the uncertainty of position measurement accuracy.

[0004] The existing position detector calibration methods have the following technical bottlenecks: 1) Relying on simulation technology to establish an error model, but the simplified treatment of factors such as detector noise, environmental interference, and non - linearity of signal readout electronics during the simulation process leads to a significant deviation between the calibration result and the actual performance; 2) Using manual calibration, which depends on the operator's experience during the calibration process, there are subjective judgment errors, especially lacking the intelligent diagnosis ability for abnormal data of new detectors or under complex working conditions. Therefore, a device that can efficiently and accurately characterize the position detector is needed, which can significantly improve the accuracy and reliability of particle detectors and has important scientific research significance and application value. Summary of the Invention

[0005] Aiming at the above problems, the purpose of the present invention is to provide a charged particle beam telescope device and its usage method, which can significantly improve the accuracy and reliability of particle detectors and ensure the stability and high precision of the position detector in different experimental environments.

[0006] To achieve the above object, the present invention adopts the following technical solutions: On the one hand, a charged particle beam telescope device is provided, which includes a trigger unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit. Among them, the position detection unit includes a number of silicon pixel detectors;

[0007] The two trigger units are respectively arranged upstream and downstream of the charged particle beam. The two trigger units are used to generate signals related to particle energy loss when the charged particle beam passes through. A number of the silicon pixel detectors are arranged in a straight line between the two trigger units, and a working station for placing the detector to be measured is arranged between every multiple silicon pixel detectors. The silicon pixel detectors are used to obtain the spatial position signals when the charged particle beam passes through;

[0008] The trigger processing unit is used to receive the signals from the trigger unit and generate a trigger signal according to a preset threshold or logic;

[0009] The signal acquisition and readout unit is used to process the spatial position signals of the charged particle beam of each silicon pixel detector and the detector to be measured based on the trigger signal of the trigger processing unit, and obtain the processed spatial position data of the charged particle beam;

[0010] The data processing unit is used to analyze the processed spatial position data of the charged particle beam, calculate the position prediction value when the charged particle beam passes through the detector to be measured, and further determine the positioning accuracy parameters of the detector to be measured.

[0011] Furthermore, the charged particle beam telescope device further includes a support platform, and the trigger unit, the position detection unit, and the detector to be measured are all arranged on the support platform.

[0012] Furthermore, the charged particle beam telescope device further includes a precision alignment and calibration unit;

[0013] A number of the precision alignment and calibration units are arranged at intervals on the support platform, and each precision alignment and calibration unit is provided with a silicon pixel detector or a detector to be measured. The precision alignment and calibration unit is used to precisely align and calibrate the position detection unit.

[0014] Furthermore, each precision alignment and calibration unit includes a fine-tuning base, a fixed mounting seat, and a rotary adjustment table arranged in sequence from bottom to top;

[0015] The fine-tuning base is arranged on the support platform and is used to provide micron-level linear position adjustment in the X, Y, and Z directions to ensure the precise displacement of the detector in the spatial straight line direction;

[0016] The rotation adjustment stage is used to achieve fine adjustment of the attitude of the detector in the X, Y, and Z axis directions;

[0017] The fixed mounting base is used to fix the silicon pixel detector or the detector at the position to be measured.

[0018] Furthermore, the charged particle beam telescope device further includes a device control and monitoring platform, and the device control and monitoring platform includes:

[0019] An operation control module, which is used to control the working mode and triggering conditions of the signal acquisition and readout unit;

[0020] A parameter configuration module, which is used to set the calibration parameters of the precision alignment and calibration unit;

[0021] A status monitoring module, which is used to monitor the key parameters of each silicon pixel detector in real time.

[0022] Furthermore, the signal acquisition and readout unit includes:

[0023] A preliminary processing module, which is used to perform preliminary processing on the analog signals from each silicon pixel detector and the detector at the position to be measured;

[0024] A filtering and calibration module, which is used to filter and calibrate the preliminarily processed analog signals;

[0025] An analog-to-digital converter, which is used to convert the filtered and calibrated analog signals into digital signals.

[0026] Furthermore, the data processing unit includes:

[0027] A trajectory calculation module, which is used to adopt a trajectory reconstruction algorithm and calculate the accurate trajectory of the charged particle beam in space according to the spatial position data of the charged particle beam corresponding to each silicon pixel detector;

[0028] A position prediction module, which is used to perform data fusion on the spatial position data of the charged particle beams from different silicon pixel detectors and calculate the position prediction value of the charged particle beam when passing through each detector at the position to be measured;

[0029] An accuracy characterization module, which is used to determine the positioning accuracy parameters of the detector at the position to be measured according to the calculated position prediction value and the actual position measurement value of the corresponding detector at the position to be measured.

[0030] On the other hand, a method for using a charged particle beam telescope device is provided, including:

[0031] Set up the charged particle beam telescope device and place the detector at the position to be measured at the corresponding work station;

[0032] When a charged particle beam passes through, two trigger units generate signals related to the energy loss of the particles and send them to the trigger processing unit;

[0033] The trigger processing unit receives the signals from the trigger units, generates a trigger signal according to a preset threshold or logic, and sends it to the signal acquisition and readout unit;

[0034] Each silicon pixel detector and the detector at the measured position respectively acquire the spatial position signals when the charged particle beam passes through, and send them to the signal acquisition and readout unit;

[0035] Based on the trigger signal from the trigger processing unit, the signal acquisition and readout unit processes the spatial position signals of the received charged particle beam, obtains the spatial position data of the processed charged particle beam, and sends it to the data processing unit;

[0036] The data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position value when the charged particle beam passes through the detector at the measured position, and further determines the positioning accuracy parameter of the detector at the measured position.

[0037] Further, before the test, it also includes:

[0038] The device control and monitoring platform controls the precision alignment and calibration unit to precisely align and calibrate the position detection unit.

[0039] Further, the data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position value when the charged particle beam passes through the detector at the measured position, and further determines the positioning accuracy parameter of the detector at the measured position, including:

[0040] Adopt a trajectory reconstruction algorithm, and calculate the precise trajectory of the charged particle beam in space according to the spatial position data of the charged particle beam corresponding to each silicon pixel detector;

[0041] Perform data fusion on the spatial position data of the charged particle beam from different silicon pixel detectors, and calculate the predicted position value when the charged particle beam passes through each detector at the measured position;

[0042] According to the calculated predicted position value and the actual position measurement value of the corresponding detector at the measured position, determine the positioning accuracy parameter of the detector at the measured position.

[0043] Due to the adoption of the above technical solutions, the present invention has the following advantages:

[0044] 1. High precision: The present invention adopts high-resolution silicon pixel detectors, which can accurately record the position data of charged particles. Combined with an advanced trajectory reconstruction algorithm, it ensures high precision of the measurement results.

[0045] 2. Flexible arrangement: The present invention supports the flexible adjustment of the number of position detectors to be measured to meet different experimental requirements, and can comprehensively and meticulously characterize the accuracy of various types of position detectors, thus ensuring a comprehensive characterization of different types of position detectors.

[0046] 3. Efficient operation: In the present invention, the data acquisition and processing unit of each silicon pixel detector can work independently, and cooperate with the optimized data transmission and processing process to ensure an efficient signal processing and data analysis process, significantly shortening the experimental cycle.

[0047] 4. Real-time calibration: The present invention is equipped with a complete precision alignment and calibration unit, which can calibrate each silicon pixel detector regularly or as needed during use, eliminate potential systematic errors in a timely manner, and maintain the high-precision measurement ability of the device in the long term.

[0048] 5. The present invention is mainly used to calibrate and characterize the position accuracy of various types of position detectors (such as silicon microstrip detectors, silicon pixel detectors, etc.) in experiments.

[0049] In summary, the present invention can be widely applied to fields such as particle physics experiments, accelerator physics, and medical imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] By reading the following detailed description of the preferred embodiments, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present invention. Throughout the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0051] Figure 1 is a schematic structural diagram of the device provided by an embodiment of the present invention;

[0052] Figure 2 is a schematic structural diagram of the support platform provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0053] The following will describe the exemplary embodiments of the present invention in more detail with reference to the drawings. Although the exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0054] It should be understood that the terms used herein are for the purpose of describing particular example embodiments only and are not intended to be limiting. Unless the context clearly dictates otherwise, the singular forms "a", "an", and "the" as used herein may also include the plural forms. The terms "comprising", "including", "containing", and "having" are inclusive and thus specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless an execution order is explicitly stated. It should also be understood that additional or alternative steps may be used.

[0055] Although the terms first, second, third, etc. may be used herein to describe multiple elements, components, regions, layers, and / or sections, these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or section from another. Unless the context clearly indicates otherwise, terms such as "first", "second", and other numerical terms when used herein do not imply an order or sequence. Thus, a first element, component, region, layer, or section discussed below may be referred to as a second element, component, region, layer, or section without departing from the teachings of the example embodiments.

[0056] At present, the existing position detector calibration methods have the following technical bottlenecks: 1) Relying on simulation technology to establish an error model, but the simplified processing of factors such as detector noise, environmental interference, and non-linearity of signal readout electronics during the simulation process results in a significant deviation between the calibration result and the actual performance; 2) Using manual calibration, relying on the operator's experience during the calibration process, there are subjective judgment errors, especially lacking the intelligent diagnosis ability for abnormal data of new detectors or under complex working conditions. Therefore, a device capable of efficiently and accurately characterizing the position detector is needed, which can significantly improve the accuracy and reliability of the particle detector and has important scientific research significance and application value. An embodiment of the present invention provides a charged particle beam telescope device, including a trigger unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit. Among them, the position detection unit includes a number of silicon pixel detectors; two trigger units are respectively arranged upstream and downstream of the charged particle beam, and the two trigger units are used to generate signals related to the energy loss of particles when the charged particle beam passes through; a number of silicon pixel detectors are arranged in a straight line between the two trigger units, and a working station for placing the position detector to be measured is arranged between every multiple silicon pixel detectors. The silicon pixel detectors are used to obtain the spatial position signals when the charged particle beam passes through; the trigger processing unit is used to receive the signals from the trigger unit and generate a trigger signal according to a preset threshold or logic; the signal acquisition and readout unit is used to process the spatial position signals of the charged particle beam of each silicon pixel detector and the position detector to be measured based on the trigger signal of the trigger processing unit to obtain the spatial position data of the processed charged particle beam; the data processing unit is used to analyze the spatial position data of the processed charged particle beam, calculate the position prediction value when the charged particle beam passes through the position detector to be measured, and further determine the positioning accuracy parameters of the position detector to be measured. The present invention realizes the quantitative evaluation and calibration of its position accuracy by accurately reconstructing the trajectory of the charged particle beam and comparing and analyzing it with the response of the detector to be measured, and is applicable to accurately characterizing the position accuracy of various position detectors (such as silicon microstrip, silicon pixel detectors, etc.). At the same time, the present invention has the characteristics of high precision, flexible layout, efficient operation, real-time calibration, and accurate trigger-based data acquisition, and can be widely applied to the performance evaluation and optimization of position detectors in the fields of particle physics experiments, accelerator physics, medical imaging, etc.

[0057] Embodiment 1

[0058] As Figure 1 shown, this embodiment provides a charged particle beam telescope device, including a trigger unit 1, a position detection unit 2, a trigger processing unit 3, a signal acquisition and readout unit 4, and a data processing unit 5. Among them, the position detection unit 2 includes a number of silicon pixel detectors 21, which can provide high-resolution position measurement of the charged particle beam.

[0059] Two trigger units 1 are respectively arranged upstream and downstream of the charged particle beam. The two trigger units 1 are used to generate signals related to the energy loss of particles when the charged particle beam passes through, so as to detect the arrival of the charged particle beam. A number of silicon pixel detectors 21 are arranged in a straight line between the two trigger units 1, and a work station 22 is arranged between every three silicon pixel detectors 21 for placing the detector 23 at the measured position. Through this layout, it is possible to simultaneously measure and characterize multiple position detectors. The silicon pixel detectors 21 are used to obtain the spatial position signals when the charged particle beam passes through and the energy loss when passing through the silicon pixel detectors 21, so as to provide data for subsequent precision analysis.

[0060] The trigger processing unit 3 is used to receive the signals from the trigger unit 1, generate trigger signals according to preset thresholds or logics, and send them to the signal acquisition and readout unit 4 to control the synchronous readout of data.

[0061] The signal acquisition and readout unit 4 is used to receive the spatial position signals of the charged particle beam from each silicon pixel detector 21 and the detector 23 at the measured position, and based on the trigger signals of the trigger processing unit 3, process the received signals to obtain the spatial position data of the processed charged particle beam.

[0062] The data processing unit 5 is used to analyze the spatial position data of the charged particle beam from the signal acquisition and readout unit 4, calculate the position prediction value when the charged particle beam passes through the detector 23 at the measured position, and compare it with the actual position measurement value of the detector 23 at the measured position, so as to perform the positioning accuracy parameters of the detector 23 at the measured position.

[0063] In a preferred embodiment, the charged particle beam telescope device further includes a support platform 6. The trigger unit 1, the position detection unit 2 and the detector 23 at the measured position are all arranged on the support platform 6. The support platform 6 can provide stable physical support for the entire charged particle beam telescope device.

[0064] Specifically, as Figure 2 shown, the support platform 6 includes a Y-axis platform 61, an X-axis platform 62, a guide rail 63 and a motor drive mechanism to adjust the measurement area to meet different experimental requirements. Two Y-axis platforms 61 are arranged in parallel, and guide rails 63 are respectively arranged at the tops of the two Y-axis platforms 61. The X-axis platform 62 is slidably arranged on the two guide rails 63. The motor drive mechanism is used to drive the X-axis platform 62 to slide on the guide rail 63. The support platform 6 adopts precise guide rails 63 and a motor drive mechanism, which can ensure smooth movement and reduce the influence of vibration on measurement.

[0065] In a preferred embodiment, the charged particle beam telescope device further includes a precision alignment and calibration unit 7. The precision alignment and calibration unit 7 is disposed on the support platform 6 and is used to precisely align and calibrate the position detection unit 2, ensuring that the positional relationship of each silicon pixel detector 21 of the position detection unit 2 in the spatial coordinate system is known and precise. During use, potential systematic errors can be eliminated by periodically calibrating each silicon pixel detector 21 in the position detection unit 2, ensuring the measurement accuracy of the device.

[0066] Specifically, as Figure 2 shown, a number of precision alignment and calibration units 7 are spacedly disposed on the X-axis platform 62, and each precision alignment and calibration unit 7 is provided with a silicon pixel detector 21 or a position detector 23 to be measured.

[0067] More specifically, each precision alignment and calibration unit 7 includes a fine-tuning base, a fixed mounting base, and a rotary adjustment table that are sequentially arranged from bottom to top, forming a hierarchical structure. The fine-tuning base is disposed on the support platform 6 and is used to provide micron-level linear position adjustment in the X, Y, and Z directions, ensuring the precise displacement of the detector in the spatial straight line direction. The rotary adjustment table is used to realize the attitude fine-tuning of the detector around the X, Y, and Z axes (i.e., θx, θy, θz) to meet the high-precision adjustment requirements for the installation angle of the detector. The fixed mounting base is used to fix the silicon pixel detector 21 or the position detector 23 to be measured.

[0068] More specifically, the precision alignment and calibration unit 7 can be realized by manual adjustment or electric adjustment. Further, position feedback devices such as a laser interferometer and an optical encoder can be combined to form a closed-loop control to realize the precise alignment and position calibration of the detector.

[0069] More specifically, the fine-tuning base can be realized by a screw fine-tuning structure, a slide rail type displacement mechanism, a piezoelectric driving device, etc. The rotary adjustment table can be constructed by a flexible hinge structure, a precision angle adjuster, a universal adjustment platform, etc. The fixed mounting base can adopt a high-rigidity metal structure with a precisely machined mounting surface and positioning holes to ensure the stability and repeatable positioning of the detector during the adjustment process.

[0070] In a preferred embodiment, the charged particle beam telescope device further includes a device control and monitoring platform 8. Among them, the device control and monitoring platform 8 includes an operation control module, a parameter configuration module, and a status monitoring module.

[0071] The operation control module is used to control the working mode and triggering conditions of the signal acquisition and readout unit 4.

[0072] The parameter configuration module is used to set the calibration parameters of the precision alignment and calibration unit 7, including the initial alignment position of the detector, the position compensation factor, and the error correction coefficient. The configured calibration parameters are used to control the precision alignment and calibration unit 7 to perform precise position adjustment and calibration operations.

[0073] The status monitoring module is used to monitor in real time the key parameters such as the temperature, voltage, and position of the station 22 of each silicon pixel detector 21 in the position detection unit 2.

[0074] In a preferred embodiment, the signal acquisition and readout unit 4 includes a preliminary processing module, a filtering and calibration module, and an analog-to-digital converter. The preliminary processing module is used to perform preliminary processing such as amplification and shaping on the analog signals from each silicon pixel detector 21 and the position detector 23 to be measured. The filtering and calibration module is used to filter and calibrate the preliminarily processed analog signals to ensure the accuracy and consistency of the data. The analog-to-digital converter is used to convert the filtered and calibrated analog signals into digital signals for subsequent data analysis.

[0075] In a preferred embodiment, the data processing unit 5 includes a trajectory calculation module, a position prediction module, and an accuracy characterization module.

[0076] The trajectory calculation module is used to adopt a trajectory reconstruction algorithm and calculate the precise trajectory of the charged particle beam in space according to the spatial position data of the charged particle beam corresponding to each silicon pixel detector 21.

[0077] The position prediction module is used to perform data fusion on the spatial position data of the charged particle beams from different silicon pixel detectors 21 and calculate the position prediction values of the charged particle beams when passing through each position detector 23 to be measured.

[0078] The accuracy characterization module is used to determine the positioning accuracy parameters of the position detector 23 to be measured, such as calculating the position resolution, positioning error, etc., according to the calculated position prediction values and the actual position measurement values of the corresponding position detector 23 to be measured. This module can be used to characterize the positioning error and position resolution of the position detector 23 to be measured by statistically analyzing the mean and standard deviation of the residuals. In addition, the accuracy characterization module can also output accuracy evaluation indicators such as the residual distribution curve and the proportion of outliers to comprehensively reflect the positioning performance of the position detector 23 to be measured. The above statistical analysis can be implemented by histogram statistics, Gaussian fitting, or other statistical methods.

[0079] Embodiment 2

[0080] This embodiment provides a method for using a charged particle beam telescope device, including the following steps:

[0081] 1) Set up the charged particle beam telescope device of Embodiment 1 and place the position detector 23 to be measured at the corresponding station 22.

[0082] 2) The device control and monitoring platform 8 controls the precision alignment and calibration unit 7 to precisely align and calibrate the position detection unit 2, ensuring that the positional relationship of each silicon pixel detector 21 of the position detection unit 2 in the spatial coordinate system is known and precise.

[0083] 3) When the charged particle beam passes through, two trigger units 1 on the support platform 6 generate signals related to the energy loss of the particles and send them to the trigger processing unit 3.

[0084] 4) The trigger processing unit 3 receives the signals from the trigger units 1, generates a trigger signal according to a preset threshold or logic, and sends it to the signal acquisition and readout unit 4.

[0085] 5) Each silicon pixel detector 21 and the position detector under test 23 respectively acquire the spatial position signals when the charged particle beam passes through and send them to the signal acquisition and readout unit 4.

[0086] 6) The signal acquisition and readout unit 4 processes the spatial position signals of the received charged particle beam based on the trigger signal from the trigger processing unit 3, obtains the spatial position data of the processed charged particle beam, and sends it to the data processing unit 5.

[0087] 7) The data processing unit 5 analyzes the spatial position data of the charged particle beam, calculates the predicted position value of the charged particle beam when passing through the position detector under test 23, and compares it with the actual position measurement value of the position detector under test 23, thereby obtaining the positioning accuracy parameters of the position detector under test 23, specifically:

[0088] 7.1) The trajectory calculation module uses a trajectory reconstruction algorithm to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector 21.

[0089] 7.2) The position prediction module performs data fusion on the spatial position data of the charged particle beam from different silicon pixel detectors 21 and calculates the predicted position value of the charged particle beam when passing through each position detector under test 23:

[0090] 7.2.1) The position prediction module performs data fusion on the spatial position data of the charged particle beam from different silicon pixel detectors 21.

[0091] 7.2.2) The position prediction module uses a trajectory fitting algorithm (such as least squares fitting, Kalman filtering, or other trajectory reconstruction methods) to estimate the motion trajectory of the charged particle beam based on the fused data.

[0092] 7.2.3) The position prediction module calculates the predicted position values of the charged particle beam when passing through each detector 23 to be measured based on the estimated motion trajectory. The predicted position values can be used to compare with the actually measured positions for device position calibration, deviation detection, or accuracy characterization.

[0093] 7.3) The accuracy characterization module calculates the positioning accuracy parameters of the detector 23 to be measured according to the calculated predicted position values and the actually measured position values of the corresponding detector 23 to be measured:

[0094] 7.3.1) The accuracy characterization module compares the predicted position values calculated by the position prediction module with the actually measured position values of the corresponding detector 23 to be measured, and calculates the difference (residual) between the two.

[0095] 7.3.2) The accuracy characterization module performs statistical analysis on the calculated residuals to obtain the positioning accuracy parameters of the detector 23 to be measured.

[0096] The above embodiments are only used to illustrate the present invention. The structures, connection methods, manufacturing processes, etc. of each component can be changed. Any equivalent transformation and improvement based on the technical solution of the present invention should not be excluded from the protection scope of the present invention.

Claims

1. A charged particle beam telescope device, characterized in that, It includes a trigger unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit. Among them, the position detection unit includes a number of silicon pixel detectors; The two trigger units are respectively arranged upstream and downstream of the charged particle beam. The two trigger units are used to generate signals related to the energy loss of particles when the charged particle beam passes through. A number of the silicon pixel detectors are arranged in a straight line between the two trigger units, and a work station for placing the detector under test is arranged between every multiple silicon pixel detectors. The silicon pixel detectors are used to obtain the spatial position signals when the charged particle beam passes through; The trigger processing unit is used to receive the signals from the trigger unit and generate a trigger signal according to a preset threshold or logic; The signal acquisition and readout unit is used to process the spatial position signals of the charged particle beam of each silicon pixel detector and the detector under test based on the trigger signal of the trigger processing unit to obtain the processed spatial position data of the charged particle beam; The data processing unit is used to analyze the processed spatial position data of the charged particle beam, calculate the position prediction value when the charged particle beam passes through the detector under test, and further determine the positioning accuracy parameters of the detector under test.

2. The charged particle beam telescope device according to claim 1, characterized in that, The charged particle beam telescope device further includes a support platform, and the trigger unit, the position detection unit, and the detector under test are all arranged on the support platform.

3. The charged particle beam telescope device according to claim 2, wherein, The charged particle beam telescope device further includes a precision alignment and calibration unit; A number of the precision alignment and calibration units are arranged at intervals on the support platform, and each precision alignment and calibration unit is provided with a silicon pixel detector or a detector under test. The precision alignment and calibration unit is used to precisely align and calibrate the position detection unit.

4. The charged particle beam telescope device according to claim 3, wherein Each precision alignment and calibration unit includes a fine-tuning base, a fixed mounting seat, and a rotary adjustment table arranged in sequence from bottom to top; The fine-tuning base is arranged on the support platform and is used to provide micron-level linear position adjustment in the X, Y, and Z directions to ensure the precise displacement of the detector in the spatial straight line direction; The rotary adjustment table is used to realize the attitude fine-tuning of the detector around the X, Y, and Z axes; The fixed mounting seat is used to fix the silicon pixel detector or the detector under test.

5. The charged particle beam telescope device according to claim 3, wherein The charged particle beam telescope device further includes a device control and monitoring platform, and the device control and monitoring platform includes: An operation control module, which is used to control the working mode and trigger conditions of the signal acquisition and readout unit; A parameter configuration module, which is used to set the calibration parameters of the precision alignment and calibration unit; A status monitoring module, which is used to monitor the key parameters of each silicon pixel detector in real time.

6. The charged particle beam telescope device according to claim 1, characterized in that, The signal acquisition and readout unit includes: A preliminary processing module, which is used to preliminarily process the analog signals from each silicon pixel detector and the detector under test; A filtering and calibration module, which is used to filter and calibrate the preliminarily processed analog signals; An analog-to-digital converter, which is used to convert the filtered and calibrated analog signals into digital signals.

7. A charged particle beam telescope device according to claim 1, characterized in that, The data processing unit includes: A trajectory calculation module, which uses a trajectory reconstruction algorithm to calculate the precise trajectory of the charged particle beam in space according to the spatial position data of the charged particle beam corresponding to each silicon pixel detector; A position prediction module, which performs data fusion on the spatial position data of the charged particle beams from different silicon pixel detectors and calculates the position prediction values of the charged particle beam when passing through each detector at the position to be measured; An accuracy characterization module, which determines the positioning accuracy parameters of the detector at the position to be measured according to the calculated position prediction values and the actual position measurement values of the corresponding detector at the position to be measured.

8. A method for using a charged particle beam telescope device, characterized in that, It includes: Set up the charged particle beam telescope device as described in any one of claims 1 to 7, and place the detector at the position to be measured at the corresponding work station; When the charged particle beam passes through, two trigger units generate signals related to the energy loss of the particles and send them to the trigger processing unit; The trigger processing unit receives the signals from the trigger units, generates a trigger signal according to a preset threshold or logic, and sends it to the signal acquisition and readout unit; Each silicon pixel detector and the detector at the position to be measured respectively acquire the spatial position signals when the charged particle beam passes through and send them to the signal acquisition and readout unit; Based on the trigger signal from the trigger processing unit, the signal acquisition and readout unit processes the received spatial position signals of the charged particle beam to obtain the processed spatial position data of the charged particle beam and sends it to the data processing unit; The data processing unit analyzes the spatial position data of the charged particle beam, calculates the position prediction values of the charged particle beam when passing through the detector at the position to be measured, and further determines the positioning accuracy parameters of the detector at the position to be measured.

9. The method of using a charged particle beam telescope device as described in claim 8, characterized in that, Before the test, it further includes: The device control and monitoring platform controls the precision alignment and calibration unit to perform precise alignment and calibration on the position detection unit.

10. The method of using a charged particle beam telescope device according to claim 8, characterized in that, The data processing unit analyzes the spatial position data of the charged particle beam, calculates the position prediction values of the charged particle beam when passing through the detector at the position to be measured, and further determines the positioning accuracy parameters of the detector at the position to be measured, including: Using a trajectory reconstruction algorithm to calculate the precise trajectory of the charged particle beam in space according to the spatial position data of the charged particle beam corresponding to each silicon pixel detector; Performing data fusion on the spatial position data of the charged particle beams from different silicon pixel detectors and calculating the position prediction values of the charged particle beam when passing through each detector at the position to be measured; According to the calculated position prediction values and the actual position measurement values of the corresponding detector at the position to be measured, determining the positioning accuracy parameters of the detector at the position to be measured.

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