Transport vehicle system

By using conveyor truck and controller control in different track directions in the conveyor truck system, the inefficiency problem caused by the fixed driving direction of the conveyor truck is solved, and an efficient conveyor truck system design is achieved.

CN120265559APending Publication Date: 2025-07-04MURATA MASCH LTD
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Patent Information

Application Number
CN202380081997.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-12-05
Filing Date
2023-09-06
Publication Date
2025-07-04

AI Technical Summary

Technical Problem

In the prior art, although the conveying source is physically close to the conveying destination, the driving direction of the ceiling conveying vehicle cannot be changed, resulting in low conveying efficiency.

Method used

The conveyor vehicle system with the first track and the second track is adopted. The conveyor vehicle travels in the opposite direction on different tracks. The controller controls its movements so that the objects to be conveyed are transferred in the same direction, and the driving direction is switched in the switching track to avoid rotational operations.

Benefits of technology

By using the first track and the second track separately, the conveying distance is shortened, the conveying efficiency is improved, the space is saved, and the number of conveying vehicles between the tracks is balanced, so as to achieve faster arrival at the destination.

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Abstract

The invention provides a transport vehicle system, which can improve the transport efficiency of a transported object. A transport vehicle system (1) is provided with: a first rail (10A) provided such that a placement site for an object to be transported (90) is positioned below; a second rail (10B); a plurality of transport vehicles (20) that travel along the first rail (10A) and the second rail (10B), respectively, and transport an object to be transported (90); and a controller (50) that controls the operation of each of the transport vehicles (20), the transport vehicle (20) being provided with: a gripping section (21) that grips an object to be transported (90); a movement mechanism (23) that moves the gripping part (21) directly above the placement site; and a lifting mechanism (22) that lifts and lowers the gripping part (21) located directly above the placement site relative to the placement site, the traveling direction of the transport vehicle (20) present at a specific delivery position in the first rail (10A) is different from the traveling direction of the transport vehicle (20) present at a specific delivery position in the second rail (10B), and the orientation of the objects to be transported (90) gripped by the transport vehicles (20) is the same.
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Description

Technical Field

[0001] The present invention relates to a transporter system. Background Art

[0002] Conventionally, a transporter system is known which transports a transported object such as a FOUP (Front Opening Unified Pod) containing a semiconductor wafer or an intermediate mask based on a transport instruction in a semiconductor device manufacturing factory or the like. In the transporter system, as one mode, the transported object is transported to a specified position where a processing device for processing the transported object is arranged. In Patent Document 1, a technique is disclosed in which an overhead transporter travels in the same traveling direction on two tracks arranged in the vertical direction. In Patent Document 1, by using two tracks, congestion of the overhead transporter can be suppressed.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Patent No. 6642577 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] In the prior art, even if the transport source and the transport destination of the transported object are physically close to each other, the traveling direction of the overhead transporter cannot be changed, and thus the transported object cannot be transported along the physically shortest path using the tracks. As a result, in the prior art, the transport efficiency of the transported object sometimes becomes low.

[0008] The present invention provides a transporter system capable of improving the transport efficiency of a transported object.

[0009] Means for Solving the Problems

[0010] The transporter system according to the aspect of the present invention includes: a first track provided such that a placement location of the transported object is below; a second track provided such that the placement location is below; a plurality of transporters that travel along the first track and the second track respectively to transport the transported object; and a controller that controls the operations of the plurality of transporters. Each transporter includes: a gripping portion that grips the transported object; a moving mechanism that moves the gripping portion to directly above the placement location; and a lifting mechanism that raises and lowers the gripping portion located directly above the placement location relative to the placement location. The traveling direction of the transporter present at the transfer position for transferring the transported object to a specific placement location in the first track is different from the traveling direction of the transporter present at the transfer position for transferring the transported object to a specific placement location in the second track, and the orientation of the transported object gripped by each transporter is the same.

[0011] Advantages of the Invention

[0012] In the transporter system according to the method of the present invention, the traveling directions of the transporters at the handover positions for handing over the objects to be transported to specific placement locations in each track are different, and the orientations of the objects to be transported held by the transporters are the same. Therefore, the objects to be transported can be placed on the placement location in the same orientation from any track. By separately using the first track and the second track, the transportation distance can be shortened and the transportation efficiency of the objects to be transported can be improved.

[0013] In addition, in the transporter system of the above method, it may be that a plurality of transporters travel forward on one of the first track and the second track and travel backward on the other. According to this method, transporters with the same structure can be used in each track. In addition, in the transporter system of the above method, it may be that the second track is arranged below the first track. According to this method, the layout space of the transporter system can be saved. In addition, in the transporter system of the above method, it may be that there is an entry track connecting the first track and the second track and allowing the transporters to travel back and forth, and the transporters switch between forward and backward driving in the switching track included in the entry track. According to this method, the balance of the number of transporters between the first track and the second track can be achieved, and the transporters that can reach the destination faster can be used. In addition, in the transporter system of the above method, it may be that the switching track has a length that allows two or more transporters to enter at one time, and the controller causes two or more transporters to enter the switching track from one of the first track and the second track, and the transporters that enter the switching track later start to exit to the other track in sequence. According to this method, the transporters can travel back and forth between the first track and the second track in a shorter time. Description of the Drawings

[0014] Figure 1 It is a top view showing a configuration example of the transporter system according to the embodiment.

[0015] Figure 2 It is a front view showing a configuration example of the transporter according to the embodiment.

[0016] Figure 3 It is a diagram for explaining the orientation of the object to be transported by the transporter according to the embodiment.

[0017] Figure 4A It is a diagram for explaining an example of the transporter traveling back and forth between the tracks according to the embodiment.

[0018] Figure 4B It is a diagram for explaining an example of the transporter traveling back and forth between the tracks according to the embodiment.

[0019] Figure 4CThis is a diagram showing an example of a transporter traveling between tracks related to the embodiment.

[0020] Figure 4D This is a diagram showing an example of a transporter traveling between tracks related to the embodiment.

[0021] Figure 4E This is a diagram showing an example of a transporter traveling between tracks related to the embodiment.

[0022] Figure 5 This is a diagram showing an example of a switching track related to the embodiment.

[0023] Figure 6 This is a front view showing a configuration example of a track and a transporter related to the embodiment.

[0024] Figure 7 This is a front view showing a configuration example of a track and a transporter related to the embodiment.

[0025] Figure 8 This is a diagram showing an example of the transfer of an object to be transported related to the embodiment. Detailed Embodiment

[0026] Hereinafter, the embodiment will be described with reference to the accompanying drawings. The present invention is not limited to the embodiments described below. In the drawings, for the purpose of illustrating the embodiments, sometimes a part is enlarged, reduced, or emphasized, etc., and the scale is appropriately changed for representation.

[0027] Figure 1 This is a top view showing a configuration example of a transporter system related to the embodiment. As Figure 1 shown, the transporter system 1 includes a first track 10A, a second track 10B, a plurality of transporters 20A, a plurality of transporters 20B, a plurality of storage racks 40, and a controller 50. For example, the transporter system 1 is a system disposed in a manufacturing factory such as a semiconductor device factory. In addition, hereinafter, when the first track 10A and the second track 10B are not distinguished, they are simply referred to as "track 10". Similarly, hereinafter, when the transporter 20A and the transporter 20B are not distinguished, they are simply referred to as "transporter 20". Further, in the embodiment, the transporter 20 traveling on the first track 10A is called transporter 20A, and the transporter 20 traveling on the second track 10B is called transporter 20B.

[0028] The track 10 is the traveling area of the transporter 20, for example, a traveling track provided on the ceiling of a clean room or the like, and is provided adjacent to the processing device 100 (loading port 101), the storage rack 40, and the like. For example, the first track 10A and the second track 10B are arranged such that the placement locations of the objects to be transported 90 (for example, the storage rack 40, the loading port 101) are located below. In addition, in the embodiment, the track 10 provided at a higher position is set as the first track 10A, and the second track 10B is provided at a position lower than the first track 10A. Additionally, as one mode, the first track 10A and the second track 10B are arranged at positions that overlap when viewed from above. In Figure 1 etc., for the sake of easy explanation, the first track 10A (solid line) and the second track 10B (dashed line) are shown offset in the drawing.

[0029] The transporter 20 is a ceiling transporter as follows: It travels along the track 10 based on an instruction from the controller 50, and transports objects to be transported 90 (for example, containers, articles) such as FOUPs containing semiconductor wafers for manufacturing semiconductor devices or intermediate mask boxes containing processing components such as intermediate masks. The transporter 20 travels along the track 10 while being suspended from the track 10. The transporter 20 appropriately sends its own status information to the controller 50. For example, the status information includes transporter identification information for identifying the transporter 20, and also includes information related to the current position, destination, traveling state, and the state of the object to be transported 90. The traveling state is information indicating the current speed of the transporter 20. The state of the object to be transported 90 is information indicating the presence or absence and type of the object to be transported 90. The controller 50 outputs an instruction to the transporter 20 based on the status information from the transporter 20. A plurality of transporters 20 travel forward on one of the first track 10A and the second track 10B and travel backward on the other. The transporter 20 has a front-rear direction, and in Figure 1 etc., the front direction of the transporter 20 is represented by a shape with a thinner front end. For example, as Figure 1 shown, the transporter 20A travels forward (solid arrow in the figure), and the transporter 20B travels backward (dashed arrow in the figure). The storage rack 40 is one of the placement locations of the objects to be transported 90 transported by the transporter 20, and stores the objects to be transported 90 transported by the transporter 20.

[0030] The controller 50 controls the respective operations of the transporters 20. Specifically, the controller 50, based on an instruction from an unillustrated upper controller, takes one or more islands as a unit (in Figure 1Among them are three islands) to control the operation of the transporter 20. For example, the upper controller sends the transport source (from) and the transport destination (to) to the controller 50 and determines which of the first track 10A and the second track 10B to use. The controller 50 receives information related to the transport source and the transport destination, as well as information indicating which of the first track 10A and the second track 10B to use, from the upper controller. Then, based on the conditions of the track 10 (such as congestion status, availability), the status information of the transporter 20, etc., the controller 50 determines the transporter 20 that can reach the transport destination faster from the transport source and outputs a transport instruction to the determined transporter 20.

[0031] The processing device 100 is, for example, an exposure device, a coating and developing machine, a film forming device, or an etching device, etc., and performs various processes on the semiconductor wafers in the transported object 90 transported by the transporter 20. The loading port 101 is one of the placement locations of the transported object 90 transported by the transporter 20. For example, when the transported object 90 placed on the loading port 101 is transferred to the processing device 100, the processing device 100 performs various processes on the stored semiconductor wafers. After the processing device 100 processes the semiconductor wafers, the transported object 90 is transferred to the loading port 101.

[0032] Use Figure 2 Describe the placement of the transported object 90 on the placement location and the acquisition of the transported object 90 from the placement location. Figure 2 It is a front view showing a configuration example of the transporter according to the embodiment. As Figure 2 shown, the transporter 20 has a gripping portion 21, a lifting mechanism 22, and a moving mechanism 23. The gripping portion 21 grips the transported object 90. Specifically, the gripping portion 21 is a device that grips and releases the flange portion 91 of the transported object 90. For example, when the transporter 20 acquires the transported object 90 from a placement location such as the storage shelf 40 or the loading port 101, the gripping portion 21 grips the flange portion 91 of the transported object 90. For example, when the transporter 20 places the transported object 90 on a placement location such as the storage shelf 40 or the loading port 101, the gripping portion 21 releases the flange portion 91 of the transported object 90.

[0033] The moving mechanism 23 moves the gripping portion 21 directly above the placement location. The lifting mechanism 22 raises and lowers the gripping portion 21 located directly above the placement location relative to the placement location. For example, the moving mechanism 23 is a device that moves the gripping portion 21 and the lifting mechanism 22 to both lateral sides from the transport vehicle 20. The moving mechanism 23 moves the gripping portion 21 and the lifting mechanism 22 directly above the placement location where the object to be transported 90 can be placed on the storage shelf 40, the loading opening 101, etc., or where the object to be transported 90 can be obtained from the placement location. For example, the lifting mechanism 22 is a device that raises and lowers the gripping portion 21 in the vertical direction. The lifting mechanism 22 includes a winding mechanism 22a and a belt 22b. The winding mechanism 22a is held by the moving mechanism 23 and can wind and unwind the belt 22b in the vertical direction. The belt 22b hangs down from the winding mechanism 22a and holds the gripping portion 21 at its lower end. The lifting mechanism 22 can wind and unwind the object to be transported 90 held by the gripping portion 21 at least to a distance that reaches the placement locations such as the storage shelf 40 and the loading opening 101.

[0034] That is, as Figure 2 shown by the hollow arrow in, the transport vehicle 20 operates the moving mechanism 23 and the lifting mechanism 22. By releasing the flange portion 91 held by the gripping portion 21, the object to be transported 90 can be placed on the placement location, and by causing the gripping portion 21 to hold the flange portion 91, the object to be transported 90 can be obtained from the placement location. In addition, as Figure 2 shown, the transport vehicle 20A and the transport vehicle 20B can place the object to be transported 90 on the placement locations such as the storage shelf 40 and the loading opening 101 from both sides, or obtain the object to be transported 90 from the placement location.

[0035] Use Figure 3 to illustrate the orientation of the object to be transported 90. Figure 3 is a diagram for illustrating the orientation of the object to be transported by the transport vehicle according to the embodiment. As Figure 3As shown, the traveling directions of the transfer vehicle 20A present at the transfer position for transferring the object to be transferred 90 to a specific placement location in the first track 10A and the transfer vehicle 20B present at the transfer position for transferring the object to be transferred 90 to a specific placement location in the second track 10B are different, but the orientations of the objects to be transferred 90 held by the respective transfer vehicles 20 are the same. As described above, the transfer vehicle 20A travels forward (solid arrow in the figure), and the transfer vehicle 20B travels backward (dashed arrow in the figure). When the object to be transferred 90 is placed on placement locations such as the storage shelf 40 and the loading port 101, it is preferably placed with the same orientation. Specifically, when the semiconductor wafer is processed by the processing device 100, on the premise that it is placed in a specified orientation, if the processing is performed in a state where it is not placed in the specified orientation, the processing result will be different from what is expected. In the case where it is not placed in the specified orientation, a mechanism for rotating it to the specified orientation is required. Therefore, in the present embodiment, a configuration that does not require a mechanism for rotating the object to be transferred 90 is adopted.

[0036] In addition, by moving the transfer vehicle 20 forward on one of the first track 10A and the second track 10B and backward on the other, the transfer efficiency of the object to be transferred 90 is improved. For example, when transferring the object to be transferred 90 by moving the transfer vehicle 20A and the transfer vehicle 20B forward, there is not much difference in the transfer time regardless of which track 10 is used (specifically, when using the track 10 provided above, the distance for lifting the object to be transferred 90 becomes longer, so it takes time). In contrast, when the transfer vehicle 20A travels forward and the transfer vehicle 20B travels backward, and the respective transfer vehicles 20 are present at the transfer positions for transferring the object to be transferred 90 to a specific placement location (the same placement location), the orientations of the objects to be transferred 90 held by the respective transfer vehicles 20 are the same, so the transfer time can be shortened. For example, in Figure 3 the example shown, when transferring the object to be transferred 90 from the storage shelf 40 provided below in the figure to the loading port 101 provided above in the figure, the transfer time becomes shorter if it is transferred by the transfer vehicle 20A. Similarly, when transferring the object to be transferred 90 from the storage shelf 40 provided above in the figure to the loading port 101 provided below in the figure, the transfer time becomes shorter if it is transferred by the transfer vehicle 20B. In this way, by moving one of the transfer vehicles 20 traveling on each track 10 forward and the other backward, the transfer efficiency of the object to be transferred 90 is improved.

[0037] In addition, the transfer vehicle 20 may be able to travel back and forth between the first track 10A and the second track 10B. When the transfer vehicle 20 travels back and forth between the first track 10A and the second track 10B, from the viewpoints of not using a mechanism for rotating the object to be transferred 90 and improving the transfer efficiency, forward and backward travel are switched. Figures 4A - 4EThis is a diagram showing an example of a transporter traveling back and forth between tracks. As Figures 4A - 4E shown, the transporter system 1 has an access track 15 that connects the first track 10A and the second track 10B and allows the transporter 20 to travel back and forth. In addition, in the switching track 15a included in the access track 15, the transporter 20 switches between forward and backward travel before switching. The transporter 20 travels by turning back in the switching track 15a, which is part of the access track 15, thereby switching between forward and backward travel before switching.

[0038] As Figure 4A and Figure 4B shown, the transporter 20 (the transporter 20A traveling forward on the first track 10A) enters the access track 15. Then, as Figure 4C shown, when the transporter 20 travels to the switching track 15a, it switches from forward travel to backward travel. After that, as Figure 4D and Figure 4E shown, the transporter 20 travels on the access track 15 by moving backward and travels backward on the second track 10B as the transporter 20B. In this way, the transporter 20 switches between forward and backward travel in the access track 15 (switching track 15a) that connects the first track 10A and the second track 10B, thereby improving the transportation efficiency without using a mechanism that rotates the object to be transported 90 degrees. In Figures 4A - 4E an example of the transporter 20 moving from the first track 10A to the second track 10B is given, but in the case of moving from the second track 10B to the first track 10A, it also travels by turning back, thereby switching from backward travel to forward travel. In addition, the access track 15 provided for moving from the first track 10A to the second track 10B and the access track 15 provided for moving from the second track 10B to the first track 10A are set in different places and cannot be shared. When setting the access track 15 (switching track 15a), the transporter 20 can also select a path that reaches the destination faster while avoiding the unusable track 10 and the congested track 10 for the travel path via the unusable track 10 and the congested track 10.

[0039] In addition, the switching track 15a may have a length that allows two or more transporters 20 to enter at once. At this time, the controller 50 causes two or more transporters 20 to enter the switching track 15a from one of the first track 10A and the second track 10B, and the transporters 20 that enter the switching track 15a later start to exit to the other track 10 in sequence. Figure 5 This is a diagram showing an example of the switching track according to the embodiment. For example, as Figure 5As shown, the switching track 15a has a length that allows two or more carriers 20A to enter from the first track 10A at once. When two or more carriers 20 can enter at once, the controller 50 causes two or more carriers 20A to enter the switching track 15a from the first track 10A, and the carriers 20A that enter the switching track 15a later start to exit to the second track 10B in sequence. In the carrier system 1, by allowing two or more carriers 20 to enter the switching track 15a at once, it is possible to suppress the occurrence of congestion in the track 10 and improve the conveyance efficiency of the carriers 20 for the conveyed object 90.

[0040] In addition, in Figure 1 etc., an example is given where the first track 10A and the second track 10B are arranged at positions that overlap in a top view. In the present embodiment, the first track 10A and the second track 10B may not be arranged at positions that overlap in a top view. Figure 6 It is a front view showing a configuration example of the track and the carrier according to the embodiment. As Figure 6 shown, the first track 10A is arranged such that the storage shelf 40, which is one of the placement places for the conveyed object 90, is located directly below. In this case, the carrier 20A does not operate the moving mechanism 23, but operates the gripping portion 21 and the lifting mechanism 22, thereby placing the conveyed object 90 on the storage shelf 40 or obtaining the conveyed object 90 from the storage shelf 40. In addition, the first track 10A is arranged such that the loading port 101, which is one of the placement places for the conveyed object 90, is located directly below. In this case, the carrier 20A does not operate the moving mechanism 23, but operates the gripping portion 21 and the lifting mechanism 22, thereby placing the conveyed object 90 on the loading port 101 or obtaining the conveyed object 90 from the loading port 101. The second track 10B is the same as Figure 1 etc., and is arranged such that the storage shelf 40 and the loading port 101, which are the placement places for the conveyed object 90, are located below. The carrier 20B operates the gripping portion 21, the moving mechanism 23, and the lifting mechanism 22, moves the gripping portion 21 directly above the placement place, and raises and lowers the gripping portion 21 directly above the placement place relative to the placement place, thereby placing the conveyed object 90 on the placement place or obtaining the conveyed object 90 from the placement place.

[0041] Figure 7 It is a front view showing a configuration example of the track and the carrier according to the embodiment. Figure 8 It is to explain Figure 7 Examples of the transfer of the conveyed object in Figure 7As shown, the first track 10A is arranged such that the storage shelf 40, which is one of the placement locations for the object to be conveyed 90, is located directly below. In this case, the transporter 20A does not operate the moving mechanism 23, but operates the gripping portion 21 and the lifting mechanism 22 to place the object to be conveyed 90 on the storage shelf 40 or retrieve the object to be conveyed 90 from the storage shelf 40. The second track 10B is arranged such that the storage shelf 40, which is the placement location for the object to be conveyed 90, is located below. The transporter 20B operates the gripping portion 21, the moving mechanism 23, and the lifting mechanism 22, moves the gripping portion 21 directly above the placement location, raises and lowers the gripping portion 21 located directly above the placement location relative to the placement location, places the object to be conveyed 90 on the placement location, or retrieves the object to be conveyed 90 from the placement location. Here, as Figure 8 shown, for the storage shelf 40 provided directly below the first track 10A, one of the opposing storage shelves 40 is used as a loading area for loading the object to be conveyed 90, and the other is used as an unloading area for unloading the object to be conveyed 90. In addition, the transporter 20A and the transporter 20B travel on the first track 10A and the second track 10B in the order of the loading area and the unloading area. That is, a loading area is provided on the upstream side of the transporter 20, and an unloading area is provided on the downstream side of the transporter 20. By providing such a configuration, for any one of the transporters 20, it is possible to efficiently transfer the object to be conveyed 90 without changing the orientation of the object to be conveyed 90, and as a whole, the transportation efficiency of the transportation vehicle system 1 can be improved.

[0042] Thus, according to the transporter system 1 according to the embodiment, the traveling directions of the transporters 20A and 20B existing at the handover position for handing over the object to be transported 90 to a specific placement location are different, and the orientations of the objects to be transported 90 held by the respective transporters 20 are the same. Therefore, the object to be transported 90 can be placed on the placement location from any one of the tracks 10 in the same orientation. By separately using the first track 10A and the second track 10B, the transport distance can be shortened and the transport efficiency of the object to be transported 90 can be improved. In addition, according to the transporter system 1, the transporter 20 travels forward on one of the first track 10A and the second track 10B and travels backward on the other, so that the transporters 20 having the same structure can be used in each track 10. In addition, according to the transporter system 1, the second track 10B is provided below the first track 10A, so that the layout space of the transporter system 1 can be saved. In addition, according to the transporter system 1, in the switching track 15a included in the incoming track 15 that connects the first track 10A and the second track 10B and allows the transporter 20 to travel back and forth, the transporter 20 travels forward and backward before switching, so that the balance of the number of transporters 20 between the first track 10A and the second track 10B can be achieved, and the transporter 20 that reaches the destination faster can be used. In addition, according to the transporter system 1, the switching track 15a having a length that allows two or more transporters 20 to enter at one time is provided, so that the transporters 20 can travel back and forth between the first track 10A and the second track 10B in a shorter time.

[0043] In addition, regarding the description of the above embodiment, the following supplementary notes are also disclosed.

[0044] (Supplementary Note 1) A transporter system having:

[0045] A first track provided such that the placement location of the object to be transported is below;

[0046] A second track provided such that the above placement location is below;

[0047] A plurality of transporters that respectively travel along the first track and the second track to transport the object to be transported; and

[0048] A controller that controls the actions of the plurality of transporters respectively,

[0049] The above transporter includes:

[0050] A gripping portion that grips the object to be transported;

[0051] A moving mechanism that moves the gripping portion directly above the placement location; and

[0052] Lifting mechanism that raises and lowers the gripping portion directly above the placement location relative to the placement location.

[0053] The traveling directions of the transport vehicles present at the handover positions for handing over the conveyed object to a specific placement location in the first track and the transport vehicles present at the handover positions for handing over the conveyed object to the specific placement location in the second track are different, and the orientations of the conveyed objects held by the respective transport vehicles are the same.

[0054] (Supplementary Note 2) In the transport vehicle system described in Supplementary Note 1,

[0055] The plurality of transport vehicles travel forward on one of the first track and the second track and travel backward on the other.

[0056] (Supplementary Note 3) In the transport vehicle system described in Supplementary Note 1 or Supplementary Note 2,

[0057] The second track is provided below the first track.

[0058] (Supplementary Note 4) In the transport vehicle system described in Supplementary Note 2 or Supplementary Note 3,

[0059] The transport vehicle system has an access track that connects the first track and the second track and allows the transport vehicles to travel back and forth.

[0060] The transport vehicle travels forward and backward in the switching track included in the access track before switching.

[0061] (Supplementary Note 5) In the transport vehicle system described in Supplementary Note 4 or Supplementary Note 5,

[0062] The switching track has a length that allows two or more of the transport vehicles to enter at once.

[0063] The controller causes two or more of the transport vehicles to enter the switching track from one of the first track and the second track, and starting from the transport vehicle that enters the switching track later, they sequentially exit to the other track.

[0064] As described above, the embodiments of the present invention have been explained, but the technical scope of the present invention is not limited to the above embodiments. It is obvious that various changes or improvements can be made to the above embodiments by those skilled in the art. In addition, the embodiments to which such changes or improvements are applied are also included in the technical scope of the present invention. Sometimes one or more of the elements described in the above embodiments and the like are omitted. In addition, the elements described in the above embodiments and the like can be appropriately combined. In addition, within the scope permitted by law, the disclosures of Japanese Patent Application No. 2022-194270 and all the documents cited in the above embodiments and the like are incorporated herein by reference as part of the present disclosure.

[0065] Description of Reference Numerals:

[0066] 1: Conveyor vehicle system; 10: Track; 10A: First track; 10B: Second track; 20, 20A, 20B: Conveyor vehicles; 40: Storage rack; 50: Controller; 90: Object to be conveyed; 100: Processing device; 101: Loading port.

Claims

1. A transporter system, comprising: A first track, arranged such that the placement location of the object to be transported is below; A second track, arranged such that the above-mentioned placement location is below; A plurality of transporters, each traveling along the above-mentioned first track and the above-mentioned second track to transport the object to be transported; and A controller, controlling the actions of each of the above-mentioned plurality of transporters, The above-mentioned transporter comprises: A gripping portion, gripping the object to be transported; A moving mechanism, moving the above-mentioned gripping portion to directly above the placement location; and A lifting mechanism, lifting and lowering the above-mentioned gripping portion located directly above the placement location relative to the placement location, In the traveling direction of the transporter existing at the handover position for handing over the object to be transported to a specific placement location in the above-mentioned first track, and the traveling direction of the transporter existing at the handover position for handing over the object to be transported to the above-mentioned specific placement location in the above-mentioned second track are different, and the orientation of the object to be transported gripped by each transporter is the same.

2. The transporter system according to claim 1, wherein The above-mentioned plurality of transporters travel forward on one of the above-mentioned first track and the above-mentioned second track and travel backward on the other.

3. The transporter system according to claim 1 or 2, wherein The above-mentioned second track is arranged below the above-mentioned first track.

4. The transporter system according to claim 2, wherein The above-mentioned transporter system has an access track that connects the above-mentioned first track and the above-mentioned second track and allows the above-mentioned transporter to travel back and forth, The above-mentioned transporter travels forward and backward before switching in the switching track included in the above-mentioned access track.

5. The transporter system according to claim 3, wherein The above-mentioned transporter system has an access track that connects the above-mentioned first track and the above-mentioned second track and allows the above-mentioned transporter to travel back and forth, The above-mentioned transporter travels forward and backward before switching in the switching track included in the above-mentioned access track.

6. The transporter system according to claim 4, wherein The above-mentioned switching track has a length that allows two or more of the above-mentioned transporters to enter at one time, The above-mentioned controller causes two or more of the above-mentioned transporters to enter the above-mentioned switching track from one of the above-mentioned first track and the above-mentioned second track, and starting from the transporter that enters the above-mentioned switching track last, they are sequentially withdrawn to the other track.

7. The transporter system according to claim 5, wherein The above-mentioned switching track has a length that allows two or more of the above-mentioned transporters to enter at one time, The above-mentioned controller causes two or more of the above-mentioned transporters to enter the above-mentioned switching track from one of the above-mentioned first track and the above-mentioned second track, and starting from the transporter that enters the above-mentioned switching track last, they are sequentially withdrawn to the other track.