Waste gas and tail gas emission device for photoresist production

Abstract

The invention discloses a waste gas and tail gas emission device for photoresist production, and relates to the technical field of waste gas and tail gas emission for photoresist production. Waste gas and tail gas for photoresist production are filtered through mutual cooperation of the filter cylinder, activated carbon in the filter cylinder and other filter substances, impurities in the waste gas and tail gas are prevented from being adsorbed and accumulated on the inner wall through mutual cooperation of the slag scraping mechanism and the impurity discharging mechanism, the use convenience of the exhaust device is improved, and the service life of the exhaust device is prolonged. Therefore, the function of removing impurities is realized; the analysis module is used for respectively testing the filtering efficiency of the single waste gas component and the mixed simulation waste gas, and comprehensively comparing and analyzing, so that the actual filtering efficiency of the filtering substances on different waste gas components can be more accurately judged, the optimal filtering substance combination can be selected, the filtering effect is improved, and the working efficiency is improved. And various pollutants in the waste gas can be effectively treated, so that the finally discharged waste gas better meets the environmental protection standard.

Description

Technical field

[0001] The present invention relates to the technical field of exhaust gas emission for photoresist production, and particularly to an exhaust gas emission device for photoresist production. Background technique

[0002] As a key material in the fields of semiconductor manufacturing and the like, various complex waste gases will be generated during the production process of photoresist. Volatile organic compounds such as benzene series and organic amines will volatilize during the raw materials and synthesis process of photoresist. These substances not only have pungent odors but also pose great harm to human health. Long-term exposure may cause respiratory diseases, nervous system damage, and even cancer;

[0003] However, traditional simple waste gas treatment methods, such as direct high-altitude emission or simple adsorption treatment, cannot meet the increasingly strict environmental protection regulations. Moreover, when the device treats waste gas for a long time, impurities in the waste gas are likely to be adsorbed on the inner wall, resulting in a reduction in the filtering effect;

[0004] Traditional waste gas treatment devices lack accurate analysis methods for the filtering efficiency of filtering substances, and it is difficult to judge the actual filtering effect differences of different filtering substances in single-component and mixed waste gases. At the same time, the monitoring of the performance of filtering substances is not scientific enough. Relying solely on manual experience or simple observation, it is impossible to detect the decline in the performance of filtering substances in time, resulting in a decrease in the filtering effect and unstable compliance of waste gas emissions. Moreover, when the filtering substances need to be replaced or adjusted, there is a lack of an automated and intelligent operation execution mechanism. Manual operation not only has low efficiency but is also prone to errors, unable to meet the increasingly strict environmental protection requirements and the needs of high-efficiency production;

[0005] Therefore, it is necessary to solve and handle the above technical problems. Summary of the invention

[0006] The purpose of the present invention is to solve the deficiencies existing in the prior art and propose an exhaust gas emission device for photoresist production.

[0007] To achieve the above purpose, the present invention adopts the following technical solution: An exhaust gas emission device for photoresist production, including an exhaust tank and a cover plate provided on the upper end of the exhaust tank. A cavity structure is provided inside the exhaust tank, and a fixed cylinder is fixedly connected to the lower end of the exhaust tank. A fixed block is fixedly connected to one side of the fixed cylinder, a transmission mechanism is installed inside the fixed block, a slag scraping mechanism is installed inside the fixed cylinder on one side of the transmission mechanism, a waste discharging mechanism is installed at the lower end of the slag scraping mechanism, and a filtering mechanism is horizontally installed on one side of the exhaust tank;

[0008] The controller of the first servo motor is internally provided with a control component, and the control component includes a collection module, an analysis module, and an execution module;

[0009] The collection module detects the components of the exhaust gas, detects the filtration efficiency of the corresponding filtering material inside the movable frame, detects the differential pressure data received by the movable frame, detects the flow rate data at the position of the movable frame, and transmits the detected data to the analysis module;

[0010] The analysis module processes and analyzes the filtration efficiency of the filtering material, determines the filtration efficiency of the corresponding filtering material for a certain exhaust gas component. If the outlet concentration data is greater than the outlet concentration corresponding to the emission standard, a signal for changing the plate is generated and transmitted to the execution module; processes and analyzes the differential pressure and flow rate data, determines whether the filtering material inside the movable frame needs to be replaced. If it is determined that replacement is needed, a signal for changing the material is generated and transmitted to the execution module;

[0011] The execution module receives the signal transmitted by the analysis module and then performs the corresponding operation.

[0012] Preferably, an intake pipe is fixedly connected to the lower end of the fixed cylinder, a cross-shaped support plate is horizontally fixedly connected to the inner side of the intake pipe, and a suction fan is installed in the cross-shaped support plate.

[0013] Preferably, the slag scraping mechanism includes a first servo motor vertically installed in the middle of the upper end of the cover plate. The output end of the first servo motor penetrates through the cover plate and is sleeved on the upper end of the fixed plate. The fixed plate and the output end of the first servo motor are fixed by a fixing bolt, and positioning plates are installed and fixed at both ends of the fixed plate through bolts. A brush is equidistantly fixedly connected to one side of the positioning plate, and the brush is closely attached to the inner wall of the exhaust tank.

[0014] Preferably, the transmission mechanism includes a fixed block fixedly connected to one side of the fixed cylinder. The inner side of the fixed block is a cavity structure, and a second servo motor is installed on one side of the fixed block. The output end of the second servo motor penetrates through the fixed block and is fixedly connected to a worm.

[0015] Preferably, the impurity removal mechanism includes an external gear ring installed between the fixed cylinder and the exhaust tank. The external gear ring meshes with the worm, and a scraper is equidistantly fixedly connected to the inner side of the external gear ring. A slag discharge port is vertically opened on one side of the fixed cylinder at the lower end of the external gear ring. L-shaped limit blocks are fixedly connected to both sides of the fixed cylinder at the lower end of the slag discharge port, and a residue collection groove is slidably installed between the L-shaped limit blocks.

[0016] Preferably, the filtering mechanism includes an exhaust hole horizontally opened at the upper end of the exhaust tank. A connecting pipe is horizontally fixedly connected to the exhaust hole. A filtering cylinder is fixedly connected to the middle of the connecting pipe. Activated carbon and other filtering materials are installed inside the filtering cylinder, and an exhaust pipe is fixedly connected to the other end of the filtering cylinder. An exhaust fan is installed inside the exhaust pipe.

[0017] Preferably, a plurality of movable frames are arranged inside the filter cartridge. Different types of filtering substances are contained inside each movable frame, and a partition is arranged at the middle position of the movable frame. A support frame is installed at the position corresponding to the movable frame on the outer side of the filter cartridge. Electric push rods are installed at the position corresponding to each movable frame on the inner side of the support frame. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cartridge. The length of the movable frame is twice the diameter of the exhaust pipe.

[0018] Preferably, the analysis steps of the filtering efficiency of the filtering substances by the analysis module are as follows:

[0019] S1: Analyze the components of the waste gas tail gas, label each waste gas component, and then select a simulated gas with a set concentration of a certain single waste gas component and introduce it into the movable frame filled with the corresponding ordinary filtering substance. Keep other conditions the same. Use a high-precision analytical instrument to monitor the concentration of this component after filtration at the air outlet. By comparing the inlet concentration and the outlet concentration, and using the formula, Calculate the filtering efficiency DY of the corresponding ordinary filtering substance for this single waste gas component n , where n is the label of the corresponding waste gas component;

[0020] S2: After collecting the single filtering efficiency of each component in the waste gas from photoresist production, configure a mixed simulated waste gas according to the proportion of each component in the actual waste gas from photoresist production, introduce it into the movable frame filled with the corresponding ordinary filtering substance, and also conduct a comprehensive component analysis at the air outlet to obtain the filtering efficiency HS of each ordinary filtering substance for each component in the mixed waste gas n , where n is the label of the corresponding waste gas component;

[0021] S3: Compare the detected filtering efficiency DY n and HS n . If the preset difference threshold a > |DY n - HS n |, it means that the filtering effect of the corresponding filtering substance on this waste gas component in single and mixed states is not very different, and it is determined that the filtering efficiency of the corresponding filtering substance on this waste gas component Otherwise, it means that the filtering effect of the corresponding filtering substance on this waste gas component in single and mixed states is quite different. It is determined that when the proportion of this waste gas component does not exceed the preset proportion of the mixed waste gas, the filtering efficiency GL of the corresponding filtering substance on this waste gas component n = HS n ; otherwise, a signal for changing the plate is generated and the signal for changing the plate is transmitted to the execution module;

[0022] S4: The filtering efficiency of a certain component in the waste gas by the filter cartridge with m movable frames is equal to the sum ZGL of the filtering efficiencies of the ordinary filtering substances in the m movable frames for this component n ; According to the filtering efficiency formula, the total sum ZGL of the filtering efficienciesn Calculate the outlet concentration data based on the inlet concentration data. If the outlet concentration data is greater than the outlet concentration corresponding to the emission standard, generate a signal for changing the plate and transmit the signal for changing the plate to the execution module;

[0023] S5: Detect the components of the waste gas tail gas at the position of the filter cartridge, then sort them in descending order according to the proportion of the detected components, mark the waste gas components whose proportion exceeds half of the mixed waste gas, generate a signal for changing the plate, and then transmit the signal for changing the plate to the execution module to adjust the filtration efficiency of the marked waste gas components.

[0024] Preferably, the steps for the analysis module to determine the performance of the filtering substance are as follows:

[0025] M1: The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow rate is Q0, and the flow rate at a certain moment is Q t ; the pressure difference change coefficient the flow rate change coefficient

[0026] M2: Considering the influence of both the flow rate and the pressure difference, obtain the comprehensive prediction coefficient K = w1*K ΔP +w2*K Q , when the preset comprehensive warning threshold K max ≤K, it is determined that the filtering substance inside the activity box needs to be replaced, generate a signal for changing the substance, and transmit the signal for changing the substance to the execution module.

[0027] Preferably, the steps for the execution module to perform operations are as follows:

[0028] N1: After receiving the signal for changing the plate, control the corresponding electric push rod on the activity box that generates the signal for changing the plate to shorten its length, the activity box moves upward by half, so that the high-efficiency filtering substance on the lower side of the activity box filters the components of the waste gas tail gas;

[0029] N2: After receiving the signal for changing the substance, control the corresponding electric push rod on the activity box that generates the signal for changing the substance to shorten its length, so that the activity box is completely pulled out, and emit a beeping warning through the beeping module inside the controller to inform the staff to replace the activity box.

[0030] Compared with the prior art, the beneficial effects of the present invention are:

[0031] 1. The waste gas and tail gas used in photoresist production are filtered through the cooperation of the filter cartridge with the activated carbon and other filtering substances inside. Then, through the cooperation of the slag scraping mechanism and the impurity discharging mechanism, it is convenient to prevent impurities in the waste gas and tail gas from adsorbing and accumulating on the inner wall, improving the convenience of using the exhaust device, and then realizing the function of impurity removal. Finally, the problems of not meeting the requirements of environmental protection regulations and reducing the filtering effect are solved;

[0032] 2. The analysis module conducts filtration efficiency tests on single waste gas components and mixed simulated waste gas respectively, and comprehensively compares and analyzes them, so as to more accurately determine the actual filtration efficiency of the filtering substances for different waste gas components, which helps to select the most suitable combination of filtering substances, improve the filtering effect, ensure that various pollutants in the waste gas can be effectively treated, and make the finally discharged waste gas more in line with environmental protection standards;

[0033] 3. By using the pressure difference and the flow change coefficient to calculate the comprehensive prediction coefficient and real-time monitoring the performance of the filtering substances, once the comprehensive prediction coefficient reaches the preset threshold, the system automatically generates a signal for replacing the filtering substances, prompting the staff to replace the filtering substances in time, realizing the dynamic monitoring and intelligent early warning of the performance of the filtering substances, avoiding poor waste gas treatment effect caused by the decline of the performance of the filtering substances, and ensuring the stable operation of the waste gas emission device. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings described herein are used to provide a further understanding of the present invention and form a part of this application. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0035] Figure 1 is a schematic three-dimensional structure diagram of the whole proposed by the present invention;

[0036] Figure 2 is a schematic bottom three-dimensional structure diagram of the whole proposed by the present invention;

[0037] Figure 3 is a schematic three-dimensional structure diagram of the other side of the whole proposed by the present invention;

[0038] Figure 4 is a schematic diagram of the internal structure from the first perspective proposed by the present invention;

[0039] Figure 5 is a schematic diagram of the internal structure from the second perspective proposed by the present invention;

[0040] Figure 6 is a schematic side sectional structure diagram of the whole proposed by the present invention;

[0041] Figure 7 is a system flow chart of the whole proposed by the present invention.

[0042] Reference numerals in the figure: 1. Exhaust tank; 2. Cover plate; 3. Fixed cylinder; 4. Inlet pipe; 5. Residue collection tank; 6. First servo motor; 7. Filter cylinder; 8. Exhaust pipe; 9. Suction fan; 10. Fixed block; 11. Second servo motor; 12. Fixed plate; 13. Fixed bolt; 14. Positioning plate; 15. Brush; 16. Outer gear ring; 17. Discharge port; 18. Worm; 19. Activated carbon; 20. Exhaust fan. Detailed implementation manner

[0043] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0044] Embodiment: Refer to Figures 1-7 , an exhaust gas tail gas emission device for photoresist production in the present invention, includes an exhaust tank 1 and a cover plate 2 covering the upper end of the exhaust tank 1. A cavity structure is provided inside the exhaust tank 1, and a fixed cylinder 3 is fixedly connected to the lower end of the exhaust tank 1. A fixed block 10 is fixedly connected to one side of the fixed cylinder 3. A transmission mechanism is installed inside the fixed block 10. A slag scraping mechanism is installed inside the fixed cylinder 3 on one side of the transmission mechanism, and a waste discharging mechanism is installed at the lower end of the slag scraping mechanism. A filtering mechanism is horizontally installed on one side of the exhaust tank 1. Through the exhaust tank 1 and the cover plate 2, it is convenient to form the overall shell of the exhaust device; a fixed cylinder 3 is fixedly connected to the lower end of the inlet pipe 4, and a cross support plate is horizontally fixedly connected inside the inlet pipe 4. A suction fan 9 is installed in the cross support plate. Through the inlet pipe 4 and the suction fan 9, it is convenient to suck the exhaust gas tail gas to be treated.

[0045] In the present invention, the slag scraping mechanism includes a first servo motor 6 vertically installed in the middle of the upper end of the cover plate 2. The output end of the first servo motor 6 penetrates through the cover plate 2 and is sleeved on the upper end of the fixed plate 12. The fixed plate 12 and the output end of the first servo motor 6 are fixed by a fixed bolt 13, and positioning plates 14 are installed at both ends of the fixed plate 12 by bolts. A brush 15 is fixedly connected at equal intervals on one side of the positioning plate 14. The brush 15 is closely attached to the inner wall of the exhaust tank 1. Through the positioning plate 14 and the brush 15, it is convenient to scrape the impurities adsorbed on the inner wall of the exhaust tank 1; the transmission mechanism includes a fixed block 10 fixedly connected to one side of the fixed cylinder 3. The inside of the fixed block 10 is a cavity structure, and a second servo motor 11 is installed on one side of the fixed block 10. The output end of the second servo motor 11 penetrates through the fixed block 10 and is fixedly connected with a worm 18. Through the second servo motor 11 and the worm 18, it is convenient to provide power for the internal waste discharging mechanism.

[0046] In the present invention, the impurity removal mechanism includes an external gear ring 16 installed between the fixed cylinder 3 and the exhaust tank 1. The external gear ring 16 meshes with the worm 18, and scraping plates are fixedly connected at equal intervals inside the external gear ring 16. A slag discharge port 17 is vertically opened on one side of the fixed cylinder 3 at the lower end of the external gear ring 16. L-shaped limit blocks are fixedly connected to both sides of the fixed cylinder 3 at the lower end of the slag discharge port 17. A residue collection tank 5 is slidably installed between the L-shaped limit blocks. Through the external gear ring 16 and the scraping plates, impurities are easily discharged from the slag discharge port 17. The filtering mechanism includes an exhaust hole horizontally opened at the upper end of the exhaust tank 1. A connecting pipe is fixedly connected to the exhaust hole. A filter cylinder 7 is fixedly connected to the middle of the connecting pipe. Activated carbon 19 and other filtering substances are installed inside the filter cylinder 7. The other end of the filter cylinder 7 is fixedly connected to an exhaust pipe 8. An exhaust fan 20 is installed inside the exhaust pipe 8. Through the filter cylinder 7 and the exhaust fan 20, the exhaust gas and tail gas are easily filtered and discharged.

[0047] m movable frames are arranged inside the filter cylinder 7. Different types of filtering substances are contained in each movable frame. A partition is arranged at the middle position of the movable frame. The filtering substance below the partition is a common filtering substance. The filtering substance above the partition is selected according to the components of the exhaust gas and tail gas. The filtering effect of each selected filtering substance on a certain component in the exhaust gas and tail gas components is efficient, so that the filtering substances on both sides will not affect each other during the filtering operation. Support frames are installed at the positions corresponding to the movable frames on the outside of the filter cylinder 7. Electric push rods are installed at the positions corresponding to each movable frame inside the support frames. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cylinder 7. The length of the movable frame is twice the diameter of the exhaust pipe.

[0048] A control component is arranged inside the controller of the first servo motor 6. The control component includes a collection module, an analysis module, and an execution module.

[0049] Analyze the components of the exhaust gas and tail gas, label each exhaust gas component, and then introduce a simulated gas with a set concentration of a single exhaust gas component into the movable frame filled with the corresponding common filtering substance. Keep other conditions the same. Use a high-precision analysis instrument to monitor the concentration of this component after filtration at the air outlet. By comparing the inlet concentration and the outlet concentration and using the formula, Calculate the filtration efficiency DY of the corresponding common filtering substance for this single exhaust gas component n , where n is the label of the corresponding exhaust gas component;

[0050] After completing the collection of the single filtration efficiency of each component in the photoresist production exhaust gas, configure a mixed simulated exhaust gas according to the proportion of each component in the actual photoresist production exhaust gas, introduce it into the movable frame filled with the corresponding common filtering substance, and also conduct a comprehensive component analysis at the air outlet to obtain the filtration efficiency HS of each common filtering substance for each component in the mixed exhaust gas n , where n is the label of the corresponding exhaust gas component;

[0051] Compare the detected filtration efficiency DY n with HS n If the preset difference threshold a > |DY n - HS n |, it means that the filtration effect of the corresponding filtering substance on this exhaust gas component when it is single and mixed is not very different, and it is determined that the filtration efficiency of the corresponding filtering substance on this exhaust gas component On the contrary, it means that the filtration effect of the corresponding filtering substance on this exhaust gas component when it is single and mixed is quite different. It is determined that when the proportion of this exhaust gas component does not exceed the preset proportion of the mixed exhaust gas, the filtration efficiency GL of the corresponding filtering substance on this exhaust gas component n = HS n ; On the contrary, a signal for changing the plate is generated and the signal for changing the plate is transmitted to the execution module;

[0052] The filtration efficiency of the filter cartridge 7 with m active frames on a certain component in the exhaust gas is equal to the total ZGL of the filtration efficiencies of the ordinary filtering substances on this component in the m active frames n ; According to the filtration efficiency formula, the total ZGL of the filtration efficiency n and the intake concentration data, the outlet concentration data is calculated. If the outlet concentration data is greater than the outlet concentration corresponding to the emission standard, a signal for changing the plate is generated and the signal for changing the plate is transmitted to the execution module.

[0053] Detect the exhaust gas tail components at the position of the filter cartridge 7, then sort them in descending order according to the proportion of the detected components, mark the exhaust gas components whose proportion exceeds half of the mixed exhaust gas, generate a signal for changing the plate, and then transmit the signal for changing the plate to the execution module to adjust the filtration efficiency of the marked exhaust gas components.

[0054] The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow rate is Q0, and the flow rate at a certain moment is Q t ; As the filtering substance adsorbs more impurities, the pressure difference will increase and the remaining filtering effect will decrease. The pressure difference change coefficient As the performance of the filtering substance decreases, the resistance increases and the flow rate decreases. The flow rate change coefficient Combining the influences of both the flow rate and the pressure difference, the comprehensive prediction coefficient K = w1 * K ΔP + w2 * K Q , when the preset comprehensive warning threshold K max ≤ K, it is determined that the filtering substance inside the active frame needs to be replaced, a signal for changing the substance is generated, and the signal for changing the substance is transmitted to the execution module.

[0055] Working principle: When the present invention is in use, first, through the intake pipe 4 and the suction fan 9, it is convenient to absorb the exhaust gas and tail gas during the production of photoresist. Then, through the fixed cylinder 3 and the exhaust tank 1, it is convenient to store the exhaust gas and tail gas during the production of photoresist. Moreover, the temperature of the inhaled exhaust gas and tail gas is relatively high. Therefore, when the exhaust gas and tail gas come into contact with the inner walls of the exhaust tank 1 and the fixed cylinder 3 with lower temperatures, particles with strong adsorption in the exhaust gas and tail gas will adsorb to form a dirt layer. Then, through the filter cylinder 7, the activated carbon 19 and other filtering substances, it is convenient to filter the exhaust gas and tail gas. Then, through the exhaust pipe 8 and the exhaust fan 20, it is convenient to discharge the filtered exhaust gas and tail gas from the device. Then, through the cover plate 2 and the first servo motor 6, it is convenient to drive the fixing plate 12 to rotate, and the fixing bolt 13 is used to prevent the device from falling off during operation. Then, through the positioning plate 14 and the brush 15, it is convenient to scrape off the adsorbed particles on the inner wall of the exhaust tank 1. Then, through the second servo motor 11 and the worm 18, it is convenient to engage with the external gear ring 16, so that the scraping plate on the external gear ring 16 discharges the adsorbed particles from the slag discharge port 17. Then, the adsorbed particles are collected through the residue collection tank 5. Then, the fixing block 10 is used to protect the transmission mechanism.

[0056] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.

Claims

1. An exhaust gas emission device for photoresist production, comprising an exhaust gas tank (1) and a cover plate (2) provided on the upper end of the exhaust gas tank (1), characterized in that: A cavity structure is provided inside the exhaust tank (1), and a fixed cylinder (3) is fixedly connected to the lower end of the exhaust tank (1). A fixed block (10) is fixedly connected to one side of the fixed cylinder (3). A transmission mechanism is installed inside the fixed block (10). A slag scraping mechanism is installed inside the fixed cylinder (3) on one side of the transmission mechanism. A waste discharging mechanism is installed at the lower end of the slag scraping mechanism. A filtering mechanism is horizontally installed on one side of the exhaust tank (1). A control component is provided inside the controller of the first servo motor (6). The control component includes a collection module, an analysis module, and an execution module. The collection module detects the composition of the waste gas, detects the filtering efficiency of the corresponding filtering substance inside the movable frame, detects the pressure difference data received by the movable frame, detects the flow data at the position of the movable frame, and transmits the detected data to the analysis module. The analysis module processes and analyzes the filtering efficiency of the filtering substance, determines the filtering efficiency of the corresponding filtering substance for a certain waste gas component. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a signal for changing the plate is generated and transmitted to the execution module. The pressure difference and flow data are processed and analyzed to determine whether the filtering substance inside the movable frame needs to be replaced. If it is determined that replacement is needed, a signal for changing the substance is generated and transmitted to the execution module. The execution module receives the signal transmitted by the analysis module and then performs the corresponding operation.

2. The exhaust gas tail gas emission device for photoresist production according to claim 1, wherein: An air inlet pipe (4) is fixedly connected to the lower end of the fixed cylinder (3). A cross support plate is horizontally fixedly connected inside the air inlet pipe (4), and an air suction fan (9) is installed in the cross support plate.

3. The exhaust gas emission device for photoresist production according to claim 1, wherein: The slag scraping mechanism includes a first servo motor (6) vertically installed in the middle of the upper end of the cover plate (2). The output end of the first servo motor (6) penetrates through the cover plate (2) and is sleeved on the upper end of the fixed plate (12). The fixed plate (12) and the output end of the first servo motor (6) are fixed by a fixing bolt (13). Positioning plates (14) are installed at both ends of the fixed plate (12) through bolts. A brush (15) is fixedly connected at equal intervals on one side of the positioning plate (14), and the brush (15) is closely attached to the inner wall of the exhaust tank (1).

4. An exhaust gas tail gas emission device for photoresist production according to claim 3, characterized in that: The transmission mechanism includes a fixed block (10) fixedly connected to one side of the fixed cylinder (3). The inside of the fixed block (10) is a cavity structure, and a second servo motor (11) is installed on one side of the fixed block (10). The output end of the second servo motor (11) penetrates through the fixed block (10) and is fixedly connected to a worm (18).

5. An exhaust gas emission device for photoresist production according to claim 4, characterized in that: The waste discharging mechanism includes an external gear ring (16) installed between the fixed cylinder (3) and the exhaust tank (1). The external gear ring (16) meshes with the worm (18). Scrapers are fixedly connected at equal intervals inside the external gear ring (16). A slag discharging port (17) is vertically opened on one side of the lower end of the fixed cylinder (3) of the external gear ring (16). L-shaped limit blocks are fixedly connected to both sides of the fixed cylinder (3) at the lower end of the slag discharging port (17), and a residue collection tank (5) is slidably installed between the L-shaped limit blocks.

6. An exhaust gas tail gas emission device for photoresist production according to claim 5, characterized in that: The filtering mechanism includes an exhaust tank (1) with an exhaust hole horizontally opened at the upper end. The exhaust hole is horizontally fixedly connected with a connecting pipe. A filter cylinder (7) is fixedly connected to the middle of the connecting pipe. Activated carbon (19) and other filtering substances are installed inside the filter cylinder (7), and the other end of the filter cylinder (7) is fixedly connected with an exhaust pipe (8). An exhaust fan (20) is installed inside the exhaust pipe (8).

7. An exhaust gas emission device for photoresist production according to claim 6, characterized in that: Multiple movable frames are arranged inside the filter cylinder (7). Different types of filtering substances are contained in each movable frame, and a partition is arranged at the middle position of the movable frame. A support frame is installed at the position corresponding to the movable frame on the outer side of the filter cylinder (7). Electric push rods are installed at the position corresponding to each movable frame inside the support frame. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cylinder (7). The length of the movable frame is twice the diameter of the exhaust pipe.

8. An exhaust gas tail gas emission device for photoresist production according to claim 7, characterized in that: The analysis steps of the filtering efficiency of the filtering substances by the analysis module are as follows: S1: Analyze the components of the waste gas tail gas, label each waste gas component, then select a simulated gas with a set concentration of a certain single waste gas component and introduce it into the movable frame equipped with the corresponding ordinary filtering material. Keep other conditions the same. Use a high-precision analytical instrument to monitor the concentration of this component after filtration at the air outlet. By comparing the inlet concentration and the outlet concentration and using the formula, Calculate the filtration efficiency DY of the corresponding ordinary filtering material for this single waste gas component n , where n is the label of the corresponding waste gas component; S2: After collecting the single filtration efficiency of each component in the waste gas from photoresist production, configure a mixed simulated waste gas according to the proportion of each component in the actual waste gas from photoresist production, and introduce it into the movable frame equipped with the corresponding ordinary filtering substance. Also, conduct a comprehensive component analysis at the outlet to obtain the filtration efficiency HS of each ordinary filtering substance for each component in the mixed waste gas. n , where n is the label of the corresponding waste gas component; S3: Compare the detected filtration efficiency DY n with HS n and if the preset difference threshold a > |DY n - HS n |, it means that the filtration effect of the corresponding filtering substance on this exhaust gas component when it is single and mixed is not very different, and it is determined that the filtration efficiency of the corresponding filtering substance on this exhaust gas component On the contrary, it means that the filtration effect of the corresponding filtering substance on this exhaust gas component when it is single and mixed is quite different. It is determined that when the proportion of this exhaust gas component does not exceed the preset proportion of the mixed exhaust gas, the filtration efficiency GL of the corresponding filtering substance on this exhaust gas component n = HS n ; On the contrary, a signal for changing the plate is generated and the signal for changing the plate is transmitted to the execution module; S4: The filtration efficiency of the filter cartridge (7) with m active frames for a certain component in the waste gas is equal to the total filtration efficiency ZGL of the ordinary filter materials in the m active frames for this component. n ; According to the filtration efficiency formula and the total filtration efficiency ZGL n and the inlet concentration data, calculate the outlet concentration data. If the outlet concentration data is greater than the outlet concentration corresponding to the emission standard, generate a plate replacement signal and transmit the plate replacement signal to the execution module; S5: Detect the components of the waste gas and tail gas at the position of the filter cylinder (7), then sort them from largest to smallest according to the proportion of the detected components. Mark the waste gas components whose proportion exceeds half of the mixed waste gas, generate a signal for changing the plate, and then transmit the signal for changing the plate to the execution module to adjust the filtering efficiency of the waste gas components with marks.

9. An exhaust gas tail gas emission device for photoresist production according to claim 8, characterized in that: The determination steps of the performance of the filtering substances by the analysis module are as follows: M1: The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow rate is Q0, and the flow rate at a certain moment is Q t ; the pressure difference change coefficient the flow rate change coefficient M2: By combining the effects of both the comprehensive flow rate and the pressure difference, the comprehensive prediction coefficient K = w1 * K ΔP + w2 * K Q , when the preset comprehensive warning threshold K max ≤ K, it is determined that the filtering substance inside the activity box needs to be replaced, a signal for replacement is generated, and the signal for replacement is transmitted to the execution module.

10. An exhaust gas tail gas emission device for photoresist production according to claim 9, characterized in that: The execution steps of the execution module are as follows: N1: After receiving the signal for changing the plate, control the electric push rod corresponding to the movable frame that generates the signal for changing the plate to shorten its length, and the movable frame moves upward by half, so that the high-efficiency filtering substances on the lower side of the movable frame filter the components of the waste gas and tail gas; N2: After receiving the signal for changing the substance, control the electric push rod corresponding to the movable frame that generates the signal for changing the substance to shorten its length, so that the movable frame is completely pulled out, and a beeping warning is issued through the beeping module inside the controller to inform the staff to replace the movable frame.

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