Double-sliding-table linear module and control method

Abstract

The invention discloses a double-sliding-table linear module and a control method, and the double-sliding-table linear module comprises a base which is provided with an electromagnetic coil group on the inner surface; permanent magnet arrays are fixed at the bottoms of the first sliding table and the second sliding table, and the first sliding table and the second sliding table suspend above the base through electromagnetic force; the two ends of the elastic linkage rod are hinged to the two sliding tables through universal joints, and a piezoelectric ceramic sensor is arranged in the rod; the piezoelectric actuators are embedded into the four corners of the base and used for generating reverse damping waves to suppress vibration; and the vibration accelerometer is installed at the center of the sliding table, the FFT analysis module and the damping wave generation module are connected, and the damping wave generation module outputs a reverse phase signal to the piezoelectric actuator. According to the invention, the electromagnetic coil group and the permanent magnet array interact to generate suspension force, so that the sliding table is suspended on the base; the piezoelectric sensor detects deformation and triggers compensation; the piezoelectric actuator generates reverse mechanical waves to counteract vibration energy so as to construct a non-contact driving double-sliding-table infrastructure, friction is eliminated through magnetic suspension, and the elastic linkage rod reduces the cooperation error.

Description

Technical Field

[0001] This application relates to the technical field of linear modules, specifically a double-slide linear module and a control method thereof. Background Art

[0002] Traditional double-slide linear modules mostly adopt ball screws or belt drives, which have the following defects: Frictional loss: Mechanical contact causes wear, resulting in a decrease in accuracy after long-term use and requiring frequent maintenance; Synchronization error accumulation: The double slides generate position deviations due to transmission clearances or load differences, making it difficult to achieve high-precision coordinated motion; Vibration interference: Mechanical resonance during high-speed movement affects the positioning stability, and the error is significant especially in high-acceleration scenarios.

[0003] Existing technologies have tried to improve the performance by increasing the stiffness of the guide rails or optimizing the control algorithms, but have not fundamentally solved the problem of the coupling of friction and vibration. Summary of the Invention

[0004] In this embodiment, a double-slide linear module, a control method, an electronic device, and a storage medium are provided to solve the problems existing in the background art.

[0005] In a first aspect, an embodiment of the present invention provides a double-slide linear module, which includes: A base, on the inner surface of which an electromagnetic coil group is provided; A first slide and a second slide, with permanent magnet arrays fixed at the bottom, and suspended above the base by electromagnetic force; An elastic linkage rod, with both ends hinged to the two slides through universal joints, and a piezoelectric ceramic sensor is arranged inside the rod; Piezoelectric actuators, embedded at the four corners of the base, used to generate reverse damping waves to suppress vibration; A vibration accelerometer, installed at the center of the slide, connected to an FFT analysis module and a damping wave generation module, and a reverse phase signal is output from the damping wave generation module to the piezoelectric actuators.

[0006] In an optional embodiment, the electromagnetic coil group is arranged in a Halbach array, and the current directions of adjacent coils alternate by 90°.

[0007] In an optional embodiment, the elastic linkage rod includes a threaded sleeve and two screw rods. Opposite threads are machined inside the threaded sleeve, and the screw rods are threadedly engaged with the threaded sleeve. A stepping motor is arranged inside the threaded sleeve to drive the threaded sleeve to rotate.

[0008] In an optional embodiment, the polarization direction of the stacked ceramic sheets of the piezoelectric actuator is consistent with the vibration transmission direction of the base, and the response frequency range of the actuator is 10 Hz to 2 kHz.

[0009] In an alternative embodiment, a suspension gap sensor is further included, with the probe axis perpendicular to the plane of the permanent magnet array, and the detection signal is used to adjust the coil current through a PID controller.

[0010] In an alternative embodiment, a mechanical locking mechanism is provided on the side wall of the base, including a pneumatic bolt and a buffer rubber pad, and the bolt stroke covers the suspension gap of the slide table.

[0011] Compared with the prior art, the beneficial effects of the dual-slide linear module of the present invention are as follows: In the present invention, a suspension force is generated by the interaction between the electromagnetic coil group and the permanent magnet array, enabling the slide table to be suspended on the base; the elastic linkage rod transmits the force between the slide tables, and the piezoelectric sensor detects the deformation and triggers compensation; the piezoelectric actuator generates a reverse mechanical wave to cancel the vibration energy. Thus, a dual-slide infrastructure with contactless drive is constructed, eliminating friction through magnetic levitation and reducing the collaborative error by the elastic linkage rod. This solution provides a highly reliable motion control solution for fields such as ultra-precision machining and semiconductor packaging through the deep integration of magnetic levitation and intelligent compensation technologies.

[0012] In a second aspect, an embodiment of the present invention provides a control method for a dual-slide linear module, which is applied to the dual-slide linear module described in the first aspect, and includes the following steps: Detect the displacement difference ΔL between the two slide tables through a piezoelectric ceramic sensor, calculate the compensation amount ΔC = K·ΔL, where K is the stiffness coefficient of the elastic rod, and drive the threaded sleeve to adjust the rod length; After the vibration accelerometer signal is analyzed by FFT, the damping wave generation module outputs a reverse phase signal to the piezoelectric actuator.

[0013] In an alternative embodiment, during emergency braking, the mechanical locking mechanism completes the bolt extension and contacts the bottom surface of the slide table within 20 ms, and the braking deceleration ≥ 5g.

[0014] In an alternative embodiment, in the adaptive compensation algorithm, the electromagnetic coil current I is dynamically adjusted according to the following formula: I = α·(ΔL² + β·dΔL / dt); where α and β are coefficients related to the load mass.

[0015] In an alternative embodiment, the amplitude A of the reverse damping wave and the vibration acceleration a satisfy A = γ·∫a·dt, where γ is the attenuation coefficient of the base material, and the integration time window ≤ 1 ms.

[0016] In a third aspect, an embodiment of the present invention provides an electronic device, including a processor, a communication interface, a memory, and a bus. Among them, the processor, the communication interface, and the memory complete communication with each other through the bus. The processor can call the logical instructions in the memory to execute the steps of the method provided in the second aspect.

[0017] In a fourth aspect, an embodiment of the present invention provides a non-transitory computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, it implements the steps of the control method of the double-slide linear module as described in the second aspect.

[0018] Compared with the prior art, the beneficial effects of the control method, the electronic device, and the storage medium of the double-slide linear module of the present invention are the same as those of the double-slide linear module described in the first aspect, so they will not be elaborated here. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of the double-slide linear module in the embodiment of the present invention; Figure 2 It is a schematic structural diagram of the slide in the embodiment of the present invention; Figure 3 It is a schematic control diagram of the piezoelectric actuator in the embodiment of the present invention; Figure 4 It is a flowchart of the control method of the double-slide linear module in the embodiment of the present invention; Figure 5 It is a structural block diagram of the electronic device in the embodiment of the present invention. Detailed Embodiments

[0021] In order to more clearly understand the purpose, technical solution, and advantages of the present application, the present application will be described and explained below with reference to the drawings and embodiments.

[0022] Unless otherwise defined, technical terms or scientific terms involved in this application shall have the general meanings understood by those with ordinary skills in the technical field to which this application belongs. In this application, words such as "a", "an", "one kind", "the", "these", etc. do not indicate a limitation in quantity, and they can be singular or plural. The terms "comprising", "including", "having" and any variants thereof involved in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product or device comprising a series of steps or modules (units) is not limited to the listed steps or modules (units), but may include unlisted steps or modules (units), or may include other steps or modules (units) inherent in these processes, methods, products or devices. The words such as "connected", "coupled" and "joined" involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "plurality" involved in this application means two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, and B exists alone. Usually, the character " / " indicates that the objects associated before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific order for the objects.

[0023] In an embodiment of the present invention, a double-sliding-table linear module is provided. Figure 1 It is a schematic diagram of the double-sliding-table linear module of the present invention. As Figures 1 to 3 shown, the double-sliding-table linear module includes: A base 101, on the inner surface of which an electromagnetic coil group 502 is provided; A first sliding table 201 and a second sliding table 202, with a permanent magnet array 501 fixed at the bottom, and suspended above the base by electromagnetic force; An elastic linkage rod 601, with both ends hinged to the two sliding tables through universal joints 602, and a piezoelectric ceramic sensor 603 is arranged inside the rod; Piezoelectric actuators 701 are embedded at the four corners of the base for generating reverse damping waves to suppress vibrations; Vibration accelerometers 703 are installed at the centers of the sliding tables, connected to an FFT analysis module and a damping wave generation module 704, and a reverse-phase signal is output from the damping wave generation module 704 to the piezoelectric actuators 701. The electromagnetic coil group 502 and the permanent magnet array 501 interact to generate a suspension force, making the sliding tables suspended above the base; the elastic linkage rod 601 transmits the acting force between the sliding tables, and the piezoelectric sensor 603 detects the deformation and triggers compensation; the piezoelectric actuators 701 generate reverse mechanical waves to cancel the vibration energy. Thus, a double-sliding-table infrastructure with contactless drive is constructed, friction is eliminated through magnetic levitation, and the elastic linkage rod reduces the collaborative error.

[0024] In this embodiment, the electromagnetic coil group 502 is arranged in a Halbach array, and the current directions of adjacent coils alternate by 90°. In the Halbach array, the current directions of adjacent coils alternate by 90°, enhancing the magnetic field intensity on one side, reducing the magnetic leakage on the back side, and reducing the energy consumption by more than 20%. Optimize the magnetic field distribution and improve the driving efficiency.

[0025] The elastic linkage rod 601 includes a threaded sleeve and two screw rods. Opposite threads are machined in the threaded sleeve, and the screw rods are in threaded fit with the threaded sleeve. A stepper motor 604 is arranged in the threaded sleeve for driving the threaded sleeve to rotate. The stepper motor 604 drives the threaded sleeve to change the effective length of the rod body, and the compensation amount ΔC = K·ΔL, where ΔL is the displacement difference detected by the piezoelectric sensor.

[0026] The polarization direction of the stacked ceramic sheets of the piezoelectric actuator 701 is consistent with the vibration transmission direction of the base. The response frequency range of the actuator is 10 Hz to 2 kHz. The stacked piezoelectric ceramics generate reverse deformation in the frequency band of 10 Hz to 2 kHz, and its polarization direction is consistent with the vibration transmission direction of the base, maximizing the energy cancellation efficiency to cover a wide range of vibration suppression.

[0027] It further includes a suspension gap sensor 503. The axis of its probe is perpendicular to the plane of the permanent magnet array 501, and the detection signal adjusts the coil current through a PID controller. The suspension gap sensor 503 detects the distance between the slide table and the base, and the PID controller adjusts the coil current in real time according to the error to maintain the gap at 50 ± 5 μm, accurately maintaining the stability of the suspension gap.

[0028] A mechanical locking mechanism 803 is provided on the side wall of the base 101, including a pneumatic bolt and a buffer rubber pad. The stroke of the bolt covers the suspension gap of the slide table. The pneumatic bolt extends within 20 ms, and the buffer rubber pad absorbs the impact kinetic energy. The tungsten carbide stop block 804 at the end of the bolt makes hard contact with the bottom surface of the slide table for braking. Quickly lock the slide table in an emergency to prevent collision damage.

[0029] As Figure 4 shown, the embodiment of the present invention further provides a control method for a double-slide linear module, including the following steps: Detect the displacement difference ΔL between the two slide tables through the piezoelectric ceramic sensor 603, calculate the compensation amount ΔC = K·ΔL, where K is the stiffness coefficient of the elastic rod, and drive the threaded sleeve 604 to adjust the rod length; After the signal of the vibration accelerometer 703 is analyzed by FFT, the damping wave generation module 704 outputs a reverse phase signal to the piezoelectric actuator 701.

[0030] The laminated piezoelectric actuator 701 is fixed in the mounting cavities 702 at the four corners of the base, and the polarization direction is along the diagonal of the base; the vibration accelerometer 703 is adsorbed at the center of the top of the slide table, and the XYZ-axis signals are connected to the FFT analysis module.

[0031] During emergency braking, the mechanical locking mechanism 803 completes the pin extension and contacts the bottom surface of the slide table within 20 ms, and the braking deceleration ≥ 5g.

[0032] In the adaptive compensation algorithm, the electromagnetic coil current I is dynamically adjusted according to the following formula: I = α·(ΔL² + β·dΔL / dt); where α and β are coefficients related to the load mass.

[0033] The amplitude A of the reverse damping wave and the vibration acceleration a satisfy A = γ·∫a·dt, where γ is the attenuation coefficient of the base material, and the integration time window ≤ 1 ms.

[0034] Figure 5 It is a structural block diagram of the electronic device provided by the embodiment of the present invention. As Figure 5 shown, the electronic device may include: a processor 610, a communications interface 620, a memory 630, and a communication bus 640. Among them, the processor 610, the communications interface 620, and the memory 630 complete mutual communication through the communication bus 640. The processor 610 can call the logical instructions in the memory 630 to execute the following methods: Detect the displacement difference ΔL between the two slide tables through the piezoelectric ceramic sensor, calculate the compensation amount ΔC = K·ΔL, where K is the stiffness coefficient of the elastic rod, and drive the threaded sleeve to adjust the rod length; After the vibration accelerometer signal is analyzed by FFT, the reverse phase signal is output from the damping wave generation module to the piezoelectric actuator.

[0035] In addition, when the logical instructions in the above-mentioned memory 630 can be implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or a part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM, Read-Only Memory), random access memories (RAM, Random Access Memory), magnetic disks, or optical discs that can store program codes.

[0036] An embodiment of the present invention also provides a non-transitory computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, it is configured to execute the methods provided in the above-mentioned various embodiments.

[0037] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on such an understanding, the above technical solution, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disks, optical discs, etc., and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the methods of each embodiment or some parts of the embodiments.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of each embodiment of the present invention.

Claims

1. A double-slide linear module, characterized in that, The double-slide linear module includes: A base (101) with an electromagnetic coil group (502) provided on its inner surface; A first slide (201) and a second slide (202), with a permanent magnet array (501) fixed to the bottom, suspended above the base by electromagnetic force; An elastic linkage rod (601), with both ends hinged to the two slides through universal joints (602), and a piezoelectric ceramic sensor (603) provided inside the rod; Piezoelectric actuators (701), embedded at the four corners of the base, used to generate reverse damping waves to suppress vibrations; Vibration accelerometers (703), installed at the center of the slides, connected to an FFT analysis module and a damping wave generation module (704), and a reverse phase signal is output from the damping wave generation module (704) to the piezoelectric actuators (701).

2. The double-slide linear module according to claim 1, wherein, The electromagnetic coil group (502) is arranged in a Halbach array, and the current directions of adjacent coils alternate by 90°.

3. The double-slider linear module according to claim 1, wherein The elastic linkage rod (601) includes a threaded sleeve and two screw rods. Opposite threads are machined inside the threaded sleeve, and the screw rods are thread-fitted inside the threaded sleeve. A stepper motor (604) is provided inside the threaded sleeve to drive the threaded sleeve to rotate.

4. The double-slide linear module according to claim 1, characterized in that The polarization direction of the laminated ceramic sheets of the piezoelectric actuator (701) is consistent with the vibration transmission direction of the base, and the response frequency range of the actuator is 10Hz to 2kHz.

5. The double-slide linear module according to claim 1, wherein It also includes a suspension gap sensor (503), whose probe axis is perpendicular to the plane of the permanent magnet array (501), and the detection signal adjusts the coil current through a PID controller.

6. The double-slide linear module according to claim 1, wherein, A mechanical locking mechanism (803) is provided on the side wall of the base (101), including a pneumatic bolt and a buffer rubber pad, and the stroke of the bolt covers the suspension gap of the slide.

7. A control method for a double-sliding table linear module, applied to the double-sliding table linear module according to any one of claims 1 to 6, characterized in that, It includes the following steps: Detect the displacement difference ΔL between the two slides through the piezoelectric ceramic sensor (603), calculate the compensation amount ΔC = K·ΔL, where K is the stiffness coefficient of the elastic rod, and drive the threaded sleeve (604) to adjust the rod length; After the signal of the vibration accelerometer (703) is analyzed by FFT, a reverse phase signal is output from the damping wave generation module (704) to the piezoelectric actuator (701).

8. The control method according to claim 7, characterized in that, During emergency braking, the mechanical locking mechanism (803) completes the bolt extension and contacts the bottom surface of the slide within 20ms, and the braking deceleration ≥ 5g.

9. The control method according to claim 7, characterized in that, In the adaptive compensation algorithm, the electromagnetic coil current I is dynamically adjusted according to the following formula: I = α·(ΔL² + β·dΔL / dt); where α and β are coefficients related to the load mass.

10. The control method according to claim 7, characterized in that The amplitude A of the reverse damping wave and the vibration acceleration a satisfy A = γ·∫a·dt, where γ is the attenuation coefficient of the base material, and the integration time window ≤ 1ms.

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