A fully automatic electrodeposition perovskite solar cell preparation device and method

Abstract

The present invention discloses a fully automatic electrodeposition perovskite solar cell preparation device and method, belonging to the technical field of solar cell preparation devices. The device comprises: a base, a control module, and a motion slide assembly, a mechanical claw assembly, a power supply assembly, a reaction chamber, a liquid injection assembly, a liquid discharge assembly, an air blowing assembly, and a liquid level detector, each connected to the control module. The present invention not only facilitates the selection of electrochemical deposition time and conditions, but also enables the preparation of perovskite solar cells of different areas by changing the size of the reaction chamber. The device provided by the present invention is simple to operate, has a simple structure, low manufacturing cost, and a high degree of automation. It is very suitable for preparing large-area perovskite solar cells and promotes the development of large-area, low-cost, fully automatic perovskite solar cell preparation technology.

Description

Technical Field

[0001] The present invention belongs to the technical field of solar cell preparation devices, and specifically relates to a fully automatic electrodeposition perovskite solar cell preparation device and method. Background Art

[0002] Perovskite solar cells have the advantages of high photoelectric conversion efficiency, low cost, and flexible processing. In recent years, they have developed rapidly in the field of solar cells. The efficiency of their single-junction solar cells has surpassed that of single-junction silicon solar cells and is gradually developing towards commercial applications. In order to achieve the commercial application of perovskite solar cells, the development of low-cost large-area perovskite solar cell preparation equipment is imminent. In addition, the preparation of perovskite solar cells in the laboratory currently lacks the use of automated equipment, resulting in low reproducibility and unstable performance of perovskite solar cells. Electrodeposition-based perovskite solar cells have the advantages of low cost, simple process, and large-area preparation. They have shown certain application prospects in the large-area preparation of perovskite solar cells. However, the current electrodeposition-based perovskite solar cell preparation equipment is still manually operated, which limits its further development. Therefore, it is very necessary to develop a fully automatic electrodeposition-based perovskite solar cell preparation equipment to promote the commercial application and development of perovskite solar cells.

[0003] In addition, there is a huge demand for talent in all aspects of solar cell research and development, design, production, manufacturing, packaging and testing. Currently, some domestic universities and vocational and technical schools offer courses related to solar cell design, preparation and research and development. However, due to the high cost and large floor space occupied by industrial solar cell production equipment, many universities are unable to allow students to conduct experimental teaching close to solar cell industrial production. Therefore, the development of a low-cost, simple-structured, small-footprint, fully automatic electrodeposition perovskite solar cell preparation device can also be used for students' experimental teaching and popular science explanations, making up for the shortcomings of existing perovskite solar cell preparation devices.

[0004] In view of the above shortcomings, the present invention proposes a fully automatic electrodeposition perovskite solar cell preparation device and its use method to solve the above problems. Summary of the Invention

[0005] This invention provides a fully automated electrodeposition perovskite solar cell fabrication device and method. This device aims to integrate the electrochemical deposition and immersion steps of the perovskite cell fabrication process within a single device, allowing for the automated selection of parameters such as electrochemical deposition time, deposition voltage, deposition current, and immersion time. The device boasts simple operation, a simple structure, and low cost, making it suitable for fabricating multi-component perovskite solar cells using electrochemical deposition, and promoting their commercial application.

[0006] The present invention provides a fully automatic electrodeposition perovskite solar cell preparation device, which adopts the following technical solutions, including:

[0007] a base, wherein a reaction chamber is provided on the base;

[0008] Control module;

[0009] A motion slide assembly, a mechanical claw assembly, a power supply assembly, a liquid injection assembly, a liquid discharge assembly, an air blowing assembly, and a liquid level detector connected to the control module;

[0010] The motion slide assembly includes an X / Y / Z three-axis motion platform composed of multiple screw slide modules driven by motors;

[0011] The mechanical claw assembly is fixed on the Z-axis motion platform of the motion slide assembly and is used to grasp and move the substrate;

[0012] Each of the reaction chambers is provided with the liquid injection component, liquid discharge component and liquid level detector;

[0013] The air blowing assembly includes an air inlet pipe, an exhaust valve and an exhaust port. The air inlet pipe is arranged below the base and is controlled by the exhaust valve. The exhaust port is fixed to the mechanical claw assembly.

[0014] The liquid injection assembly includes a liquid inlet pipeline, a liquid inlet valve and a liquid outlet, wherein the liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve, and the liquid outlet is arranged inside the reaction chamber;

[0015] The drainage assembly includes a drainage pipe, a drainage valve and a liquid pump. The liquid extraction port of the drainage pipe is arranged at the bottom of the reaction chamber, and the drainage port extends to the outside of the reaction chamber and is connected to the liquid extraction pump through the drainage valve.

[0016] The liquid level detector is used to monitor the liquid level in the reaction chamber;

[0017] The power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface and a cathode interface. The anode interface is connected to the mechanical claw assembly, and the cathode interface is connected to the inside of the reaction chamber to form a current loop for electrochemical deposition.

[0018] Furthermore, the control module includes a main control module, a motor drive module, a power supply control module, a liquid injection and discharge control module and an air blowing control module. The main control module is used to centrally control the motor drive module, the power supply control module, the liquid injection and discharge control module and the air blowing control module. The motor control drive module controls the movement of the motion slide assembly and the opening and closing of the mechanical claw assembly. The power supply control module is used to control the opening and closing of the power supply assembly. The liquid injection and discharge module controls the liquid injection assembly and the liquid discharge assembly based on the liquid level detector. The air blowing control module is used to control the blowing of the blowing assembly.

[0019] Furthermore, the screw slide module includes a screw and a slide, the slide is screwed onto the screw, the screw is connected to the output end of the motor, and a position detection sensor is provided on the slide.

[0020] Furthermore, the mechanical claw assembly includes a driving component and a clamping component. The clamping component is made of conductive, acid-resistant and oxidation-resistant material and is electrically connected to the anode interface of the power supply component.

[0021] Furthermore, the liquid level detector is installed on the side wall of the reaction chamber and is height-adjustable. A detachable platinum electrode is provided underneath it, and the platinum electrode is electrically connected to the cathode interface of the power supply assembly; the liquid injection assembly and the liquid discharge assembly are respectively arranged on the side wall and bottom of the reaction chamber.

[0022] Furthermore, the blowing component blows inert gas toward the surface of the substrate clamped by the mechanical claws before electrochemical deposition or after cleaning until no liquid remains on the surface of the substrate.

[0023] Furthermore, the base is provided with a plurality of reaction chamber mounting grooves and drainage channels corresponding to the liquid extraction ports, so as to adapt to reaction chambers of different sizes; the base is also provided with a plurality of mounting holes for mounting the motion slide assembly.

[0024] Furthermore, a method for using a fully automatic electrodeposition perovskite solar cell preparation device comprises the following steps:

[0025] S1. When preparing a perovskite battery, the control module controls the motion slide assembly to move the mechanical claw assembly to the feeding area of the base, and controls the mechanical claw assembly to clamp the substrate to be processed;

[0026] S2. After clamping, the control module controls the air blowing assembly to perform a pre-cleaning step on the substrate surface;

[0027] S3. After the pre-cleaning is completed, the gripped substrate is moved into the reaction chamber for electrochemical deposition by moving the mechanical claw assembly. The control module controls the liquid injection assembly to inject the electrochemical deposition liquid and controls the power supply assembly to perform the electrochemical deposition step.

[0028] S4, after the electrochemical deposition is completed, the control module controls the substrate to move into a reaction chamber for cleaning to perform a cleaning step;

[0029] S5. After the cleaning is completed, the air blowing assembly is controlled to remove the cleaning liquid from the surface of the substrate;

[0030] S6, after the cleaning step is completed, the control module controls the substrate to move to the reaction chamber for soaking to perform the soaking step, and after the preset soaking time is reached, the cleaning step is performed;

[0031] S7, after cleaning is completed, the perovskite film generated by the reaction is moved to a reaction chamber for soaking in a conductive carbon slurry by a mechanical claw;

[0032] S8. After the soaking is completed, the sample is moved to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, the control module controls the drainage component to drain the liquid until it is empty.

[0033] Beneficial effects of the present invention:

[0034] 1. The present invention coordinates various components through the control module to achieve fully automated operation of process steps such as electrodeposition, cleaning, soaking, and purging, significantly improving production efficiency and consistency.

[0035] 2. The liquid level detector is combined with the linkage control of the liquid injection / drainage components to ensure that the reaction liquid level is accurately maintained within the set range, avoiding liquid overflow or shortage and ensuring the quality of thin film deposition.

[0036] 3. The adjustable regulated DC power supply and the position feedback system of the three-axis motion platform enable precise control of deposition voltage, current and mechanical positioning to optimize the uniformity and optoelectronic properties of the perovskite film.

[0037] 4. The device provided by the present invention can conveniently realize electrochemical deposition and immersion operation in the process of preparing perovskite batteries based on the electrochemical deposition method, and can conveniently and accurately complete the preparation of perovskite films according to the needs of teaching experiments.

[0038] 5. Compared with the devices currently used in the industrial production process of perovskite batteries, the device provided by the present invention is simple to operate, has a simple structure, and has controllable volume. More importantly, it can complete the fully automatic one-stop production of perovskite films and can also be used for teaching experiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] For ease of explanation, the present invention is described in detail with reference to the following specific implementations and accompanying drawings.

[0040] Figure 1 It is a structural schematic diagram of the present invention;

[0041] Figure 2 Schematic diagram of the internal structure of the reaction chamber of the present invention;

[0042] Figure 3 is a schematic diagram of a control module of the present invention.

[0043] In the figure: 1. Motion slide assembly; 2. Reaction chamber; 3. Base; 4. Mechanical claw assembly; 5. Exhaust valve; 6. Air inlet pipe; 7. Exhaust port; 8. Liquid level detector; 9. Liquid injection assembly; 10. Liquid discharge assembly; 11. Clamping claw assembly; 12. Slide. DETAILED DESCRIPTION

[0044] The following are specific embodiments of the present invention, which, in conjunction with the accompanying drawings, further describe the technical solutions of the present invention. However, the present invention is not limited to these embodiments. In the following description, specific details such as specific configurations and components are provided only to facilitate a comprehensive understanding of the embodiments of the present invention. Therefore, it should be clear to those skilled in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present invention. In addition, for the sake of clarity and brevity, descriptions of known functions and structures have been omitted.

[0045] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other.

[0046] like Figures 1 to 2 A specific embodiment of a fully automatic electrodeposition perovskite solar cell preparation device shown includes: a base 3, a control module, and a motion slide assembly 1, a mechanical claw assembly 4, a power supply assembly, a reaction chamber 2, a liquid injection assembly 9, a liquid discharge assembly 10, a blowing assembly and a liquid level detector 8 respectively connected to the control module.

[0047] Specifically, the base 3 is provided with a plurality of reaction chamber 2 mounting grooves and drainage channels corresponding to the liquid extraction ports, which are used to adapt to reaction chambers 2 of different sizes; the base 3 is also provided with a plurality of mounting holes for installing the motion slide assembly 1.

[0048] Specifically, the motion slide assembly 1 includes an X / Y / Z three-axis motion platform composed of multiple motor-driven screw slide modules. The screw slide module includes a screw and a slide 12. The slide is screwed onto the screw, and the screw is connected to the motor output end. A position detection sensor is provided on the slide 12. The X-axis motion platform is composed of two groups of screw slide modules, and the Y-axis motion platform and the Z-axis motion platform are both composed of a group of screw slide modules. The Y-axis motion platform is fixed on the two slides 12 of the X-axis motion platform to achieve synchronous X-axis motion; the Z-axis motion platform is fixed on the slide 12 of the Y-axis motion platform to achieve Y-axis motion; the mechanical claw assembly 4 is fixed on the slide 12 of the Z-axis motion platform to achieve Z-axis motion.

[0049] Specifically, the mechanical claw assembly 4 is fixed on the Z-axis motion platform of the motion slide assembly 1, realizing three-axis motion. The three-axis motion platform drives the mechanical claw assembly to accurately position in three-dimensional space based on the feedback information of the position sensor.

[0050] Specifically, each reaction chamber 2 is provided with a liquid injection component 9, a liquid discharge component 10 and a liquid level detector 8. Different liquids are injected into the reaction chamber 2 through the liquid injection component 9, thereby realizing reaction chambers with different functions.

[0051] Specifically, the blowing assembly includes an air inlet pipe 6, an exhaust valve 5 and an exhaust port 7. The air inlet pipe 6 is arranged under the base 3 and is controlled by the exhaust valve 5. The exhaust port 7 is fixed on the mechanical claw assembly 4. The blowing assembly blows inert gas toward the surface of the substrate clamped by the mechanical claw assembly 4 before electrochemical deposition or after cleaning until there is no liquid residue on the surface of the substrate.

[0052] Specifically, the liquid injection assembly 9 includes a liquid inlet pipeline, a liquid inlet valve, and a liquid outlet. The liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve, and the liquid outlet is arranged inside the reaction chamber. One end of the liquid inlet pipeline is connected to the liquid outlet, and the other end is connected to the liquid source.

[0053] Specifically, the drainage assembly 10 includes a drainage pipe, a drainage valve, and a liquid pump. The drainage pipe includes a liquid extraction port and a liquid discharge port. The liquid extraction port of the drainage pipe is located at the bottom of the reaction chamber 2, and the liquid discharge port extends to the outside of the reaction chamber 2. The liquid discharge port is connected to the liquid discharge pump through the drainage valve. By starting the liquid discharge pump and opening the drainage valve, the liquid inside the reaction chamber 2 is evacuated through the liquid extraction port.

[0054] Specifically, the liquid level detector 8 is used to monitor the height of the liquid level in the reaction chamber 2 , and the amount of liquid injected by the liquid injection component 9 is controlled by the liquid level detector 8 .

[0055] Specifically, the power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface and a cathode interface. The anode interface is connected to the mechanical claw assembly 4, and the cathode interface is connected to the inside of the reaction chamber 2. When the mechanical claw assembly 4 clamps the substrate into the reaction chamber 2, the power switch is started by the control module to form a current loop consisting of the power anode, the mechanical claw assembly 4, the substrate, the reaction liquid, the reaction chamber 2, and the power cathode. The deposition voltage and deposition time of the electrochemical deposition step are controlled by the control module.

[0056] Specifically, such as Figure 3As shown, the control module includes a master control module, a motor drive module, a power supply control module, a liquid injection and discharge control module, and an air blowing control module. The master control module is used to centrally control the motor drive module, the power supply control module, the liquid injection and discharge control module, and the air blowing control module. The motor control drive module is electrically connected to the motor and the drive components, and controls the movement of the motion slide assembly 1 by controlling the rotation of the motor and controls the opening and closing of the clamping assembly 11 by controlling the drive components of the mechanical claw assembly 4; the power supply control module is electrically connected to the power switch to control the on and off of the power supply assembly; the liquid injection and discharge module is electrically connected to the liquid inlet valve, the liquid discharge valve, and the liquid pump, and controls the operation of the liquid injection assembly 9 and the liquid discharge assembly 10 based on the data of the liquid level detector 8; the air blowing control module is electrically connected to the exhaust valve 5 to control the air blowing of the air blowing assembly.

[0057] In other preferred embodiments, the mechanical claw assembly 4 includes a driving component and a clamping component 11. The clamping component is made of conductive, acid-resistant and oxidation-resistant material and is electrically connected to the anode interface of the power supply component.

[0058] Specifically, the clamping jaw member 11 directly serves as the anode without the need for additional independent electrodes, thereby reducing the complexity of the equipment and avoiding current fluctuations caused by poor electrode contact.

[0059] Specifically, the clamping jaws 11 are in direct physical contact with the substrate (rather than indirect conduction through a solution), ensuring the shortest current transmission path and the smallest resistance, thereby improving the electrodeposition efficiency.

[0060] Specifically, the jaw component 11 is in contact with the acidic electrodeposition liquid for a long time, and the acid-resistant material can prevent corrosion and prevent metal ions from dissolving and contaminating the reaction liquid; the antioxidant property prevents the jaw component 11 from oxidative passivation during the electrochemical reaction, maintains long-term conductive stability, and extends the service life.

[0061] In other preferred embodiments, the liquid level detector 8 is installed on the side wall of the reaction chamber 2 and is height-adjustable. A detachable platinum electrode is provided underneath it, and the platinum electrode is electrically connected to the cathode interface of the power supply assembly; the liquid injection assembly 9 and the liquid discharge assembly 10 are respectively arranged on the side wall and bottom of the reaction chamber.

[0062] Specifically, the power control module is controlled by the main control module, the power switch is turned on, and a current loop is formed by the power anode, the clamping part of the mechanical claw assembly 4, the substrate, the reaction liquid, the platinum electrode, and the power cathode. The deposition voltage and deposition time of the electrochemical deposition step are controlled by the control module.

[0063] Specifically, sidewall injection can prevent the liquid from directly impacting the substrate surface, prevent the formed film from being damaged by the impact of water flow, and improve the yield.

[0064] Specifically, the bottom liquid extraction port combined with the liquid extraction pump can quickly empty the reaction waste liquid, reduce the interference of residual liquid on subsequent steps, and ensure process consistency.

[0065] Specifically, by adjusting the height of the liquid level detector 8, the injection amount of the reaction liquid can be accurately controlled to adapt to substrates of different sizes or reaction chamber capacities and meet diverse preparation needs.

[0066] Specifically, platinum sheets are highly corrosion-resistant, suitable for acidic or oxidizing reaction environments, and can work stably for a long time; their detachable design facilitates regular maintenance or replacement, avoiding performance degradation due to electrode loss.

[0067] A method for using a fully automatic electrodeposition perovskite solar cell preparation device comprises the following steps:

[0068] S1. When preparing a perovskite battery, the control module controls the motion slide assembly 1 to move the mechanical claw assembly 4 to the feeding area of the base 3, and controls the mechanical claw assembly 4 to clamp the substrate to be processed;

[0069] S2. After the substrate is clamped, the control module controls the blowing assembly to perform a pre-cleaning step on the substrate surface;

[0070] S3. After the pre-cleaning is completed, the gripped substrate is moved into the reaction chamber 2 for electrochemical deposition by moving the mechanical claw assembly 4. The control module controls the liquid injection assembly 9 to inject the electrochemical deposition liquid and controls the power supply assembly to perform the electrochemical deposition step.

[0071] S4. After the electrochemical deposition is completed, the control module controls the substrate to move to the reaction chamber 2 for cleaning (the reaction chamber into which the cleaning liquid is injected by the liquid injection component) to perform the cleaning step;

[0072] S5. After cleaning is completed, the air blowing component is controlled to remove the cleaning liquid from the surface of the substrate;

[0073] S6, after the cleaning step is completed, the control module controls the substrate to move to the reaction chamber 2 for soaking (the reaction chamber into which the soaking liquid is injected by the liquid injection component) for soaking. After the preset soaking time is reached, the cleaning step is performed;

[0074] S7, after cleaning is completed, the perovskite film generated by the reaction is moved to the reaction chamber 2 for soaking in the conductive carbon slurry by the mechanical claw assembly 4;

[0075] S8. After the soaking is completed, the sample is moved to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, the control module controls the drainage component to drain the liquid until it is empty.

[0076] Specifically, in an embodiment of a perovskite MAPbI3 solar cell produced based on this device:

[0077] S1. Place the transparent conductive ITO substrate with SnO2 thin film on the feed area of the base, and at the same time, the injection assembly 9 in each reaction chamber 2 starts to inject the reaction liquid until it reaches the height set by the liquid level detector 8;

[0078] S2, control the mechanical claw assembly 4 to move to the feeding area and clamp the substrate; then the blowing assembly blows out inert gas to remove dust on the surface of the substrate, the gas pressure is 0.3 MPa, and the time is 3 seconds;

[0079] S3. After the air blowing is completed, the mechanical claw assembly 4 carries the substrate to the reaction chamber 2 for electrodeposition to perform the PbO2 thin film electrodeposition step. The deposition liquid is an acidic aqueous solution mixed with Pb(CH3COO)2 and NaNO3. The electrodeposition voltage is set to 1.8 V and the deposition time is 18 s.

[0080] S4. After the electrodeposition is completed, the first cleaning step of the film begins. The mechanical claw assembly 4 moves to the top of the reaction chamber 2 for cleaning, and repeatedly moves up and down to remove the residual deposition liquid on the surface of the PbO2 film. The cleaning liquid is deionized water.

[0081] S5, the blowing component blows out inert gas to remove the residual cleaning liquid on the surface of the film. The gas pressure is 0.3 Mpa and the blowing time is 5 s. After the blowing is completed, the first film cleaning is completed;

[0082] S6. Furthermore, the deposited PbO2 film is moved to the immersion reaction chamber 2 by the mechanical claw assembly 4 for a immersion step. The immersion solution is MAI solution, the solvent is isopropyl alcohol, the concentration is 60 mg / ml, and the immersion time is 7 minutes. After the immersion is completed, the film is moved to the upper part of the cleaning reaction chamber 2 for a second cleaning step. The cleaning liquid is isopropyl alcohol, the gas pressure is 0.1 MPa, and the blowing time is 8 seconds.

[0083] S7. After the second cleaning is completed, the MAPbI3 film generated by the reaction is moved to the reaction chamber 2 for soaking by the mechanical claw assembly 4, and a soaking step is performed. The soaking solution is a conductive carbon paste, and the soaking time is 30 s.

[0084] S8. After the soaking is completed, the mechanical claw assembly 4 moves to the top of the reaction chamber 2 used for soaking, and then the blowing assembly blows out inert gas to slowly dry the carbon slurry. The gas pressure is 0.1 Mpa, and the blowing time is 2 min. After the blowing is completed, all preparation steps are completed. Subsequently, the substrate is moved to the annealing table through the mechanical claw assembly 4 and annealed at 70°C for 3 min to obtain a perovskite MAPbI3 solar cell. After the step is completed, the liquid injection and drainage module 10 is controlled by the main control module to open the drainage valve and the liquid pump to drain until it is empty.

[0085] Specifically, the device provided by the present invention can realize electrochemical deposition and immersion operations in the process of preparing perovskite batteries based on electrochemical deposition. The deposition voltage, deposition current and deposition time required in the electrochemical deposition process, and the immersion time in the immersion process can all be precisely controlled by the control module of the device. Compared with the devices used in the industrial production process of perovskite batteries, the device provided by the present invention is simple to operate, simple in structure, and low in cost. More importantly, it can complete the one-stop preparation of perovskite solar cells, and is very suitable for large-area perovskite solar cell preparation and teaching experiments.

[0086] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0087] In the description of the present invention, it should be understood that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0088] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0089] Those skilled in the art may make various modifications or additions to the described embodiments or replace them with similar methods without departing from the spirit of the present invention or exceeding the scope defined by the appended claims.

Claims

1. A fully automatic electrodeposition perovskite solar cell preparation device, characterized in that: include: a base, wherein a reaction chamber is provided on the base; Control module; A motion slide assembly, a mechanical claw assembly, a power supply assembly, a liquid injection assembly, a liquid discharge assembly, an air blowing assembly, and a liquid level detector connected to the control module; The motion slide assembly includes an X / Y / Z three-axis motion platform composed of multiple screw slide modules driven by motors; The mechanical claw assembly is fixed on the Z-axis motion platform of the motion slide assembly and is used to grasp and move the substrate; Each of the reaction chambers is provided with the liquid injection component, liquid discharge component and liquid level detector; The air blowing assembly includes an air inlet pipe, an exhaust valve and an exhaust port. The air inlet pipe is arranged below the base and is controlled by the exhaust valve. The exhaust port is fixed to the mechanical claw assembly. The liquid injection assembly includes a liquid inlet pipeline, a liquid inlet valve and a liquid outlet, wherein the liquid inlet pipeline is arranged outside the reaction chamber and is controlled by the liquid inlet valve, and the liquid outlet is arranged inside the reaction chamber; The drainage assembly includes a drainage pipe, a drainage valve and a liquid pump. The liquid extraction port of the drainage pipe is arranged at the bottom of the reaction chamber, and the drainage port extends to the outside of the reaction chamber and is connected to the liquid extraction pump through the drainage valve. The liquid level detector is used to monitor the liquid level in the reaction chamber; The power supply assembly includes an adjustable regulated DC power supply, a power switch, an anode interface and a cathode interface. The anode interface is connected to the mechanical claw assembly, and the cathode interface is connected to the inside of the reaction chamber to form a current loop for electrochemical deposition.

2. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The control module includes a main control module, a motor drive module, a power supply control module, a liquid injection and discharge control module and an air blowing control module. The main control module is used to centrally control the motor drive module, the power supply control module, the liquid injection and discharge control module and the air blowing control module. The motor drive module controls the movement of the motion slide assembly and the opening and closing of the mechanical claw assembly. The power supply control module is used to control the switching of the power supply assembly. The liquid injection and discharge control module controls the liquid injection assembly and the liquid discharge assembly based on the liquid level detector. The air blowing control module is used to control the blowing of the blowing assembly.

3. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The screw slide module includes a screw and a slide. The slide is screwed onto the screw. The screw is connected to the output end of the motor. A position detection sensor is provided on the slide.

4. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The mechanical claw assembly includes a driving component and a clamping component. The clamping component is made of conductive, acid-resistant and oxidation-resistant material and is electrically connected to the anode interface of the power supply component.

5. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The liquid level detector is installed on the side wall of the reaction chamber and is height-adjustable. A detachable platinum electrode is provided underneath it, and the platinum electrode is electrically connected to the cathode interface of the power supply component; the injection component and the drainage component are respectively arranged on the side wall and bottom of the reaction chamber.

6. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The blowing assembly blows inert gas toward the surface of the substrate clamped by the mechanical claws before electrochemical deposition or after cleaning until no liquid remains on the surface of the substrate.

7. The fully automatic electrodeposition perovskite solar cell preparation device according to claim 1, characterized in that: The base is provided with a plurality of reaction chamber mounting grooves and a liquid discharge channel corresponding to the liquid extraction port, which is used to adapt to reaction chambers of different sizes; the base is also provided with a plurality of mounting holes for installing the motion slide assembly.

8. A method for using a fully automatic electrodeposition perovskite solar cell preparation device according to any one of claims 1 to 7, characterized in that: The following steps are involved: S1. When preparing a perovskite battery, the control module controls the motion slide assembly to move the mechanical claw assembly to the feeding area of the base, and controls the mechanical claw assembly to clamp the substrate to be processed; S2. After clamping, the control module controls the air blowing assembly to perform a pre-cleaning step on the substrate surface; S3. After the pre-cleaning is completed, the gripped substrate is moved into the reaction chamber for electrochemical deposition by moving the mechanical claw assembly. The control module controls the liquid injection assembly to inject the electrochemical deposition liquid and controls the power supply assembly to perform the electrochemical deposition step. S4, after the electrochemical deposition is completed, the control module controls the substrate to move into a reaction chamber for cleaning to perform a cleaning step; S5. After the cleaning is completed, the air blowing assembly is controlled to remove the cleaning liquid from the surface of the substrate; S6, after the cleaning step is completed, the control module controls the substrate to move to the reaction chamber for soaking to perform the soaking step, and after the preset soaking time is reached, the cleaning step is performed; S7, after cleaning is completed, the perovskite film generated by the reaction is moved to a reaction chamber for soaking in a conductive carbon slurry by a mechanical claw; S8. After the soaking is completed, the sample is moved to the annealing table for annealing. After the annealing is completed, the preparation of the perovskite solar cell based on electrochemical deposition is completed. Then, the control module controls the drainage component to drain the liquid until it is empty.

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