A stage for a small vertical plane interferometer

Abstract

The present invention relates to the technical field of optical element surface shape detection equipment, and in particular to a stage for a small vertical plane interferometer, comprising: a stage, a manual lifting and displacement stage, a pulling mechanism, and a base connected in sequence from top to bottom; the stage is used to carry a mirror to be inspected set on a processing tool; the length of the manual lifting and displacement stage is adjustable in the vertical direction to achieve height adjustment of the mirror to be inspected; the pulling mechanism comprises a static plate and a dynamic plate arranged in the vertical direction, the static plate is set on the base, and the side of the dynamic plate away from the static plate is connected to the bottom of the manual lifting and displacement stage, the pulling mechanism also comprises three threaded top assemblies and two elastic assemblies assembled between the dynamic plate and the static plate, and the length of each threaded top assembly is adjustable in the vertical direction to achieve tilt adjustment of the mirror to be inspected. The present invention is at least beneficial in reducing the structural complexity of the stage while ensuring that the stage has high stability and convenient adjustment.

Description

Technical Field

[0001] The invention belongs to the technical field of optical element surface shape detection equipment, and in particular relates to a stage of a small vertical plane interferometer. Background Art

[0002] Production lines that produce large quantities of optical components require in-process inspection of the large quantities of optical components being processed. For small and medium-caliber plane mirrors, using a small vertical plane interferometer for inspection is a fast and accurate method. In addition to the interferometer itself, a small vertical plane interferometer also includes accessories such as a stage for placing the mirror to be inspected, a vibration isolation platform, and a display. The stage for placing the mirror to be inspected generally needs to have features such as fixed mirrors, adjustable vertical height and tilt angle, and high stability.

[0003] Common laser plane interferometers on the market use a circular three-claw clamping mechanism to secure the mirror to be inspected, while the posture and height are controlled via a three-dimensional or two-dimensional adjustment frame in conjunction with a linear guide. Furthermore, existing interferometer stages are mostly designed for surface inspection of finished plane mirrors. To inspect a plane mirror during processing, the mirror must first be removed from the machining fixture, then reassembled to the fixture for continued processing. This is a cumbersome process, and most stages have complex structures. Imported stages often use electric control adjustments, which are costly and unsuitable for rapid inspection of mirrors to be inspected in ordinary workshops. Summary of the Invention

[0004] In view of this, the present invention aims to provide a stage for a small vertical plane interferometer, which is at least beneficial for reducing the structural complexity of the interferometer stage while ensuring that the interferometer stage has high stability and convenient adjustment.

[0005] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0006] The present invention provides a stage for a small vertical plane interferometer, comprising: a stage, a manual lifting and displacement stage, a pushing and pulling mechanism and a base connected in sequence from top to bottom; the stage is used to carry a mirror to be inspected set on a processing tool; the length of the manual lifting and displacement stage in the vertical direction is adjustable to achieve height adjustment of the mirror to be inspected; the pushing and pulling mechanism comprises a static plate and a dynamic plate arranged in the vertical direction, the static plate is set on the base, and the side of the dynamic plate away from the static plate is connected to the bottom of the manual lifting and displacement stage, the pushing and pulling mechanism also comprises three threaded top assemblies and two elastic assemblies assembled between the dynamic plate and the static plate, the two ends of each threaded top assembly are respectively connected to the dynamic plate and the static plate, the two ends of each elastic assembly are respectively connected to the dynamic plate and the static plate, each elastic assembly is in a compressed state, the elastic assembly applies a thrust to the dynamic plate away from the static plate, and the threaded top assembly applies a pulling force to the dynamic plate toward the static plate, and the length of each threaded top assembly in the vertical direction is adjustable to achieve tilt adjustment of the mirror to be inspected.

[0007] Furthermore, the stage of the small vertical plane interferometer also includes a detachable pad, which is located between the stage and the manual lifting platform. The detachable pad includes a lower top plate, an extension tube and an upper top plate arranged in sequence along the vertical direction, and the side of the lower top plate away from the upper top plate is connected to the top of the manual lifting platform, and the side of the upper top plate away from the lower top plate is connected to the bottom of the stage; wherein, the extension tube is detachable, and when the extension tube is assembled between the lower top plate and the upper top plate, the detachable pad has a first thickness, and when the lower top plate and the upper top plate are directly assembled, the detachable pad has a second thickness, and the first thickness is less than the second thickness.

[0008] Furthermore, the upper top plate has a first protrusion at one end facing the lower top plate, and the outer diameter of the upper top plate is larger than the outer diameter of the first protrusion; the extension tube has a first groove at one end facing the upper top plate for cooperating with the first protrusion, and when the upper top plate is connected to the extension tube, the first protrusion is embedded in the first groove, and the extension tube has a second protrusion at one end facing the lower top plate, and the shape of the second protrusion is the same as the shape of the first protrusion; the lower top plate has a second groove at one end facing the upper top plate, and the shape of the second groove is the same as the shape of the first groove, and when the extension tube is connected to the lower top plate, the second protrusion is embedded in the second groove, and when the upper top plate is connected to the lower top plate, the first protrusion is embedded in the second groove.

[0009] Furthermore, the length of the manual lifting platform can be fixed to any length within a preset length range.

[0010] Furthermore, the movable plate has two first conical holes, the first conical holes pass through the movable plate, and the aperture of the first conical holes gradually increases from bottom to top; the static plate has two second conical holes, the second conical holes pass through the static plate, and the aperture of the second conical holes gradually increases from top to bottom; the elastic component includes a conical nut, a spring, a guide cylinder and a guide rod; the conical nut has a conical outer side surface that matches the first conical hole, and the conical nut is clamped in the first conical hole; the guide cylinder is cylindrical, and the guide cylinder includes an extension part and a conical part connected in sequence from top to bottom, the conical part has a conical outer side surface that matches the second conical hole, and the outer diameter of the extension part is the same as that of the conical part The minimum outer diameter is the same, the tapered portion is engaged in the second tapered hole, the extension portion extends from the tapered portion toward the movable plate, and the end of the extension portion away from the tapered portion has an opening, and the size of the opening is smaller than the inner diameter of the guide cylinder; the first end of the guide rod has a thread, and the second end of the guide rod has a limiting portion, the outer diameter of the limiting portion is larger than the outer diameter of the guide rod, and the size of the outer diameter of the limiting portion corresponds to the size of the inner diameter of the guide cylinder, the part of the guide rod adjacent to the limiting portion is arranged on the inner ring of the guide cylinder, and the remaining part of the guide rod extends from the opening, and the first end of the guide rod is screwed into the inner ring of the tapered nut through a thread; the spring is sleeved on the outer ring of the part of the guide rod located on the inner ring of the guide cylinder.

[0011] Furthermore, the movable plate has three first through holes, and the first through holes penetrate the movable plate; the static plate has three second through holes, and the second through holes penetrate the static plate, and the second through holes are screw holes. The static plate includes three first thickness areas and the remaining second thickness areas. The second through holes are located in the corresponding first thickness areas, and the thickness of the first thickness area is greater than the thickness of the second thickness area; the threaded top assembly includes a top cover, an adjusting screw and a second nut; the top cover includes a clamping part and a receiving part connected in sequence from top to bottom, the outer diameter of the clamping part corresponds to the diameter of the first through hole, and the outer diameter of the receiving part is greater than the outer diameter of the clamping part The accommodating portion has an accommodating groove, which extends from one end of the accommodating portion away from the clamping portion toward the clamping portion; the first end of the adjusting screw is a conical tip, which extends into the accommodating groove, and the conical tip is in point contact with the bottom surface of the accommodating groove. The middle part of the adjusting screw has a turntable with an outer diameter greater than the outer diameter of the adjusting screw, and the turntable is arranged on the outer ring of the adjusting screw. The second end of the adjusting screw has a thread, and the second end of the adjusting screw is screwed into the second through hole through the thread, and the second end of the adjusting screw extends from the second through hole, and the second nut is screwed on the part of the adjusting screw extending from the second through hole.

[0012] Furthermore, the connecting line of the three threaded top assemblies forms an equilateral triangle, one elastic assembly is located between two adjacent threaded top assemblies in one group, and another elastic assembly is located between two adjacent threaded top assemblies in another group.

[0013] Furthermore, the surface of the static plate away from the dynamic plate has two parallel sliding grooves, and the surface of the base facing the static plate has two parallel slide rails that cooperate with the sliding grooves, and the sliding grooves are engaged on the corresponding slide rails.

[0014] Furthermore, the loading plate includes a protective pad and a main board connected in sequence from top to bottom. The bottom surface of the protective pad facing the main board has a plurality of strip-shaped protrusions arranged at intervals, and the top surface of the main board facing the protective pad has a strip-shaped groove matching the strip-shaped protrusions, and the strip-shaped protrusions are embedded in the strip-shaped grooves.

[0015] Compared with the prior art, the invention can achieve the following beneficial effects: in order to solve the problem that the existing vertical interferometer stage occupies a large space and is high in cost, the present invention provides a stage for a small vertical plane interferometer, which uses a stage plate to carry the mirror to be inspected with a processing tool, uses a manual lifting and translation stage to achieve manual height adjustment, and uses a pulling mechanism including three threaded top assemblies and two elastic assemblies to achieve manual tilt adjustment. It has low cost, simple and compact structure, and is easy to adjust while having high stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0017] Figure 1 A side view of the stage of the small vertical plane interferometer according to an embodiment of the present invention;

[0018] Figure 2 A schematic structural diagram of the carrier plate according to an embodiment of the present invention;

[0019] Figure 3 A cross-sectional view of a detachable spacer according to an embodiment of the present invention;

[0020] Figure 4 This is a structural diagram of the base and the push-pull mechanism described in the embodiment of the present invention;

[0021] Figure 5 This is a schematic structural diagram of the base and part of the lifting and pulling mechanism according to an embodiment of the present invention;

[0022] Figure 6 A schematic structural diagram of the static plate according to an embodiment of the present invention;

[0023] Figure 7 A cross-sectional view of a threaded top assembly is provided for the jacking and pulling mechanism according to an embodiment of the present invention;

[0024] Figure 8A cross-sectional view of the elastic component of the push-pull mechanism according to an embodiment of the present invention;

[0025] Figure 9 A schematic structural diagram of a threaded top assembly according to an embodiment of the present invention;

[0026] Figure 10 A schematic structural diagram of a portion of a threaded top assembly according to an embodiment of the present invention;

[0027] Figure 11 This is a schematic structural diagram of the elastic component described in an embodiment of the present invention.

[0028] Explanation of reference numerals: 10, loading plate; 30, manual lifting platform; 40, lifting and pulling mechanism; 50, base; 42, static plate; 41, moving plate; 44, threaded top assembly; 43, elastic assembly; 20, detachable pad; 23, lower top plate; 22, extension tube; 21, upper top plate; 24, first protrusion; 25, first groove; 26, second protrusion; 27, second groove; 112, first tapered hole; 114, second tapered hole; 431, tapered nut; 432, Spring; 433, guide cylinder; 434, guide rod; 106, extension portion; 107, tapered portion; 105, limiting portion; 111, first through hole; 113, second through hole; 108, first thickness area; 109, second thickness area; 440, top cover; 441, adjusting screw; 442, second nut; 101, engaging portion; 102, accommodating portion; 104, tapered tip; 103, turntable; 51, slide rail; 11, protective pad; 12, main board; 60, reserved hole. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0030] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0032] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0033] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0034] refer to Figures 1 to 11The present invention provides a stage for a small vertical plane interferometer, comprising: a stage 10, a manual lifting platform 30, a top-pull mechanism 40 and a base 50 connected in sequence from top to bottom; the stage 10 is used to carry a mirror to be inspected set on a processing tool, so that the mirror to be inspected does not need to be disassembled from the processing tool, which is conducive to improving the inspection efficiency; the length of the manual lifting platform 30 is adjustable in the vertical direction to achieve manual height adjustment of the mirror to be inspected; the top-pull mechanism 40 includes a static plate 42 and a dynamic plate 41 arranged in the vertical direction, the static plate 42 is set on the base 50, and the side of the dynamic plate 41 away from the static plate 42 is connected to the manual lifting platform 3 0 is connected to the bottom of the movable plate 41, the pulling mechanism 40 also includes three threaded top assemblies 44 and two elastic assemblies 43 assembled between the movable plate 41 and the static plate 42, the two ends of each threaded top assembly 44 are respectively connected to the movable plate 41 and the static plate 42, the two ends of each elastic assembly 43 are respectively connected to the movable plate 41 and the static plate 42, each elastic assembly 43 is in a compressed state, the elastic assembly 43 applies a thrust to the movable plate 41 away from the static plate 42, and the threaded top assembly 44 applies a pulling force to the movable plate 41 toward the static plate 42, and the length of each threaded top assembly 44 in the vertical direction is adjustable to achieve tilt adjustment of the mirror to be inspected.

[0035] In the pulling mechanism 40, the elastic component 43 applies a pulling force to the movable plate 41, and the threaded top component 44 applies a pushing force to the movable plate 41, and the length of the threaded top component 44 is adjustable. In this way, it is possible to adjust the degree of inclination and ensure that the movable plate 41 always has a high stability, thereby preventing the movable plate 41 from shaking during the adjustment process and affecting the positioning of the mirror to be inspected on the loading plate 10.

[0036] In some examples, the mirror to be inspected may be a plane mirror.

[0037] Furthermore, the stage of the small vertical plane interferometer also includes a removable pad 20, which is located between the stage 10 and the manual lifting platform 30. The removable pad 20 includes a lower top plate 23, an extension tube 22 and an upper top plate 21 arranged in sequence along the vertical direction. The side of the lower top plate 23 away from the upper top plate 21 is connected to the top of the manual lifting platform 30, and the side of the upper top plate 21 away from the lower top plate 23 is connected to the bottom of the stage 10; wherein, the extension tube 22 is removable, and when the extension tube 22 is assembled between the lower top plate 23 and the upper top plate 21, the removable pad 20 has a first thickness, and when the lower top plate 23 and the upper top plate 21 are directly assembled, the removable pad 20 has a second thickness, and the first thickness is less than the second thickness. In this way, when a large stroke height adjustment is required, the large stroke height adjustment can be achieved by removing the extension tube 22, and then the manual lifting displacement platform 30 can be used to achieve fine height adjustment, so that the height adjustment stroke is greatly expanded, and the structural setting is simple, easier to implement, and the setting cost is low.

[0038] In some examples, the manual lifting platform 30 and the detachable spacer 20 can be fixedly connected by four screws.

[0039] Furthermore, the upper top plate 21 has a first protrusion 24 at one end facing the lower top plate 23, and the outer diameter of the upper top plate 21 is larger than the outer diameter of the first protrusion 24; the extension tube 22 has a first groove 25 at one end facing the upper top plate 21 for cooperating with the first protrusion 24. When the upper top plate 21 is connected to the extension tube 22, the first protrusion 24 is embedded in the first groove 25, and the extension tube 22 has a second protrusion 26 at one end facing the lower top plate 23. The shape of the second protrusion 26 is the same as that of the first protrusion 24; the lower top plate 23 has a second groove 27 at one end facing the upper top plate 21, and the shape of the second groove 27 is the same as that of the first groove 25. When the extension tube 22 is connected to the lower top plate 23, the second protrusion 26 is embedded in the second groove 27. When the upper top plate 21 is connected to the lower top plate 23, the first protrusion 24 is embedded in the second groove 27.

[0040] In some embodiments, the outer side of the first protrusion 24 and the outer side of the second protrusion 26 are both threaded, and the side of the first groove 25 and the side of the second groove 27 are also threaded. When the upper top plate 21 is connected to the lower top plate 23, the upper top plate 21 and the lower top plate 23 are connected by threads. When the upper top plate 21, the extension tube 22, and the lower top plate 23 are connected in sequence, the upper top plate 21 and the extension tube 22 are connected by threads, and the extension tube 22 and the lower top plate 23 are also connected by threads. In this way, the various components of the detachable spacer 20 not only have high disassembly flexibility, but the fixed connection between the various components is also more stable, which is conducive to improving stability and assembly flexibility.

[0041] Furthermore, the length of the manual lift platform 30 can be fixed to any length within a preset length range, which is the maximum travel range of the manual lift platform 30 .

[0042] In some examples, the bottom of the manual lifting platform 30 and the top of the lifting and pulling mechanism 40 can be fixedly connected together by four screws.

[0043] Furthermore, the movable plate 41 has two first conical holes 112, the first conical holes 112 pass through the movable plate 41, and the aperture of the first conical holes 112 gradually increases from bottom to top; the static plate 42 has two second conical holes 114, the second conical holes 114 pass through the static plate 42, and the aperture of the second conical holes 114 gradually increases from top to bottom; the elastic component 43 includes a conical nut 431, a spring 432, a guide cylinder 433 and a guide rod 434; the conical nut 431 has a conical outer side surface that cooperates with the first conical hole 112, and the conical nut 431 is engaged in the first conical hole 112; the guide cylinder 433 is cylindrical, and the guide cylinder 433 includes an extension portion 106 and a conical portion 107 connected in sequence from top to bottom, the conical portion 107 has a conical outer side surface that cooperates with the second conical hole 114, and the outer diameter of the extension portion 106 is the same as that of the conical portion 1 07 has the same minimum outer diameter, the conical portion 107 is engaged in the second conical hole 114, the extension portion 106 extends from the conical portion 107 toward the movable plate 41, and the end of the extension portion 106 away from the conical portion 107 has an opening, the size of the opening is smaller than the inner diameter of the guide cylinder 433; the first end of the guide rod 434 has a thread, and the second end of the guide rod 434 has a limiting portion 105, the outer diameter of the limiting portion 105 is larger than the outer diameter of the guide rod 434, and the size of the outer diameter of the limiting portion 105 corresponds to the size of the inner diameter of the guide cylinder 433, the part of the guide rod 434 adjacent to the limiting portion 105 is arranged on the inner ring of the guide cylinder 433, and the remaining part of the guide rod 434 extends from the opening, and the first end of the guide rod 434 is screwed into the inner ring of the conical nut 431 through a thread; the spring 432 is sleeved on the outer ring of the part of the guide rod 434 located on the inner ring of the guide cylinder 433.

[0044] Among them, the spring 432, the guide rod 434 and the guide cylinder 433 are all coaxially arranged, and the two ends of the spring 432 in the vertical direction are respectively restricted by the guide rod 434 and the guide cylinder 433. During use, the spring 432 remains in a compressed state, and the elastic component 43 plays a pre-tightening role to prevent the moving plate from separating from the static plate. The overall structure of the elastic component 43 has low friction and high precision, which ensures that the spring 432 will not move, which is conducive to improving stability.

[0045] It should be noted that the cooperation of the first conical hole 112, the conical nut 431 and the guide rod 434 can ensure that the top surface of the conical nut 431 and the top surface of the guide rod 434 are not higher than the top surface of the movable plate 41 away from the static plate 42, thereby avoiding the elastic component 43 protruding from the movable plate 41. In this way, the elastic component 43 is avoided from affecting the installation of the manual lifting platform 30, thereby avoiding restrictions on the size of the manual lifting platform 30, and realizing the selection of manual lifting platforms 30 of more sizes. Specifically, a suitable manual lifting platform 30 can be selected according to the size and weight of the mirror to be inspected.

[0046] Furthermore, the movable plate 41 has three first through holes 111, and the first through holes 111 pass through the movable plate 41; the static plate 42 has three second through holes 113, and the second through holes 113 pass through the static plate 42, and the second through holes 113 are screw holes. The static plate 42 includes three first thickness areas 108 and the remaining second thickness areas 109, and the second through holes 113 are located in the corresponding first thickness areas 108, and the thickness of the first thickness area 108 is greater than the thickness of the second thickness area 109; the threaded top assembly 44 includes a top cover 440, an adjusting screw 441 and a second nut 442; the top cover 440 includes a clamping portion 101 and a receiving portion 102 connected in sequence from top to bottom, the outer diameter of the clamping portion 101 corresponds to the diameter of the first through hole 111, the clamping portion 101 is arranged in the first through hole 111, the outer diameter of the receiving portion 102 is greater than the outer diameter of the clamping portion 101, and the receiving portion 1 02 has a accommodating groove, which extends from one end of the accommodating portion 102 away from the locking portion 101 toward the locking portion 101; the first end of the adjusting screw 441 is a conical tip 104, which extends into the accommodating groove, and the conical tip 104 is in point contact with the bottom surface of the accommodating groove. In this way, the contact area between the adjusting screw 441 and the accommodating portion 102 is small, and when the adjusting screw 441 rotates, the friction force is small. The middle part of the adjusting screw 441 has a turntable 103 with an outer diameter larger than the outer diameter of the adjusting screw 441, and the turntable 103 is arranged on the outer ring of the adjusting screw 441. The second end of the adjusting screw 441 has a thread, and the second end of the adjusting screw 441 is screwed into the second through hole 113 through a thread, and the second end of the adjusting screw 441 extends from the second through hole 113, and the second nut 442 is screwed on the part of the adjusting screw 441 extending from the second through hole 113.

[0047] In some embodiments, the outer side surface of the engaging portion 101 has threads, and the inner side surface of the first through hole 111 also has threads. The engaging portion 101 and the movable plate 41 are fixedly connected by threads, which helps to improve the stability of the structure.

[0048] The adjusting screw 441 is also fixed to the static plate 42 by a threaded connection, and the second nut can be used to prevent loosening. The operator can rotate the turntable 103 to move the adjusting screw 441 in the vertical direction relative to the static plate 42 to adjust the height of the top cover 440. Since the top cover 440 and the movable plate 41 are fixedly connected, the tilt angle of the movable plate 41 can be adjusted by rotating the three adjusting screws 441, thereby adjusting the tilt angle of the stage. The conical tip 104 in the threaded top assembly 44 is in point contact with the bottom surface of the receiving groove, making the force on the three threaded top assemblies 44 more uniform, and the friction between the top cover 440 and the adjusting screw 441 is small, which is conducive to improving the adjustment accuracy. The various components in the threaded top assembly 44 are easy to disassemble, and the tilt adjustment can be achieved by rotating the turntable 103, saving time and effort.

[0049] It should be noted that the top surface of the top cover 440 is not higher than the top surface of the movable plate 41 away from the static plate 42, thereby avoiding the threaded top assembly 44 protruding from the movable plate 41, and thus avoiding the threaded top assembly 44 affecting the installation of the manual lifting platform 30, thereby avoiding restrictions on the size of the manual lifting platform 30, and allowing the selection of manual lifting platforms 30 of more sizes. Specifically, a suitable manual lifting platform 30 can be selected according to the size and weight of the mirror to be inspected.

[0050] Furthermore, the connecting line of the three thread top assemblies 44 forms an equilateral triangle, one elastic assembly 43 is located between two adjacent thread top assemblies 44 in one group, and another elastic assembly 43 is located between two adjacent thread top assemblies 44 in another group.

[0051] The threaded top assembly and the elastic assembly allow a larger adjustment range for the distance between the static plate and the moving plate. When the adjustment stroke of the manual lifting translation stage is not enough, the threaded top assembly can be used to adjust the distance between the moving plate and the static plate, so that the height adjustment stroke of the stage is further increased, which is conducive to further improving the flexibility of height adjustment.

[0052] Furthermore, the surface of the static plate 42 facing away from the movable plate 41 has two parallel sliding grooves, and the surface of the base 50 facing the static plate 42 has two parallel slide rails 51 that cooperate with the sliding grooves. The slide grooves engage with the corresponding slide rails 51. In this way, the static plate 42 can slide linearly on the base 50, thereby driving the mirror to be inspected on the carrier plate 10 to move horizontally.

[0053] In some examples, the slide groove may be a V-shaped groove. When the slide groove is used for sliding, lubricating oil is required at the connection between the slide groove and the slide rail 51 .

[0054] In some examples, the material of the slide trough and the material of the slide rail are both cast iron.

[0055] Furthermore, the loading plate 10 includes a protective pad 11 and a main plate 12, connected sequentially from top to bottom. The bottom surface of the protective pad 11, facing the main plate 12, has a plurality of spaced-apart strip-shaped protrusions. The top surface of the main plate 12, facing the protective pad 11, has strip-shaped grooves that mate with the protrusions. The protrusions fit within the grooves. This helps prevent the protective pad 11 from falling off the main plate 12 during posture adjustment.

[0056] In some embodiments, the material of the protective pad 11 can be POM (Polyoxymethylene, polyoxymethylene resin) engineering plastic. In this way, the protective pad 11 has a good buffering effect, high wear resistance, and is softer, which can prevent the mirror to be inspected from being scratched by the metal mainboard.

[0057] In some embodiments, the loading plate 10 and the detachable spacer 20 can be fixed together by three screws.

[0058] In some embodiments, a reserved hole 60 is provided on the movable plate 41 , so that an operator can pull the lifting mechanism 40 through the reserved hole 60 to move in a horizontal direction.

[0059] In some embodiments, the carrier plate 10 has a central hole for positioning the mirror to be inspected with the processing tool.

[0060] The method of using the stage of the small vertical plane interferometer provided by the present invention is as follows: the operator can pull the part of the stage of the small vertical plane interferometer other than the base 50 out of the detection position along the slide rail 51 by pulling the reserved hole 60 on the movable plate 41, the operator inserts the mirror to be inspected with the processing tooling into the central hole of the stage 10 to achieve positioning, pushes the part outside the base 50 back to the detection position along the slide rail 51 to adjust the height, and the height adjustment within a small stroke range can be achieved by manually adjusting the manual lifting displacement stage 30, and can be self-locking at any height within the stroke range. The height adjustment within a large stroke range requires pulling the reserved hole 60 on the movable plate 41 to pull the part outside the base 50 out of the detection position along the slide rail 51, manually unscrew the extension tube 22, push the part outside the base 50 back to the detection position along the slide rail 51, and then use the manual lifting displacement stage 30 for fine adjustment, and finally manually rotate the threaded top assembly 44 to adjust the posture of the stage 10 to make the interference image clear.

[0061] The stage of the small vertical plane interferometer provided by the present invention has a compact structure, is simple and easy to use, has a low processing cost, is highly reliable and can be promoted on a large scale, so that the overall space occupied by the vertical plane interferometer is small, and the inspection can be achieved by placing the mirror to be inspected in the center of the stage 10, without the need for additional tooling and fixtures, and the stage has a simple structure, which can more conveniently place the mirror to be inspected with processing tooling, and the stage 10, the manual lifting displacement stage 30, and the detachable pad 20 can all be replaced according to test requirements. The bottom of the stage adopts a single-sided slide rail, which has a simple structure, is easy to install, and has a relatively low cost. The slide trough and the slide rail are both cast iron, with high strength and hardness, good durability, and strong scalability.

[0062] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0063] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A stage for a small vertical plane interferometer, characterized in that: include: The loading plate, manual lifting platform, lifting and pulling mechanism and base are connected in sequence from top to bottom; The loading plate is used to carry the mirror to be inspected which is set on the processing tooling; The length of the manual lifting platform in the vertical direction is adjustable to achieve height adjustment of the mirror to be inspected; The lifting and pulling mechanism includes a static plate and a movable plate arranged in a vertical direction, the static plate is arranged on the base, and the movable plate is connected to the bottom of the manual lifting displacement platform on a side away from the static plate, and the lifting and pulling mechanism also includes three threaded top assemblies and two elastic assemblies assembled between the movable plate and the static plate, two ends of each threaded top assembly are respectively connected to the movable plate and the static plate, and two ends of each elastic assembly are respectively connected to the movable plate and the static plate, and each elastic assembly is in a compressed state, and the elastic assembly applies a thrust to the movable plate away from the static plate, and the threaded top assembly applies a pulling force to the movable plate toward the static plate, and the length of each threaded top assembly in the vertical direction is adjustable to achieve tilt adjustment of the mirror to be inspected; The movable plate has three first through holes, and the first through holes pass through the movable plate; the static plate has three second through holes, and the second through holes pass through the static plate, and the second through holes are screw holes; the threaded top assembly includes a top cover, an adjusting screw and a second nut; the top cover includes a clamping portion and a receiving portion connected in sequence from top to bottom, the outer diameter of the clamping portion corresponds to the diameter of the first through hole, the outer diameter of the receiving portion is larger than the outer diameter of the clamping portion, and the receiving portion has a receiving groove, and the receiving groove extends from one end of the receiving portion away from the clamping portion to the end of the clamping portion direction; the first end of the adjusting screw is a conical tip, the conical tip extends into the accommodating groove, the conical tip is in point contact with the bottom surface of the accommodating groove, the middle part of the adjusting screw has a turntable with an outer diameter greater than the outer diameter of the adjusting screw, the turntable is arranged on the outer ring of the adjusting screw, the second end of the adjusting screw has a thread, the second end of the adjusting screw is screwed into the second through hole through the thread, and the second end of the adjusting screw extends from the second through hole, and the second nut is screwed on the part of the adjusting screw extending from the second through hole.

2. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The stage of the miniature vertical plane interferometer further includes a detachable pad, which is located between the stage and the manual lifting platform. The detachable pad includes a lower top plate, an extension tube, and an upper top plate arranged in sequence along a vertical direction. The side of the lower top plate away from the upper top plate is connected to the top of the manual lifting platform, and the side of the upper top plate away from the lower top plate is connected to the bottom of the stage. In which, the extension tube is detachable. When the extension tube is assembled between the lower top plate and the upper top plate, the detachable pad has a first thickness. When the lower top plate and the upper top plate are directly assembled, the detachable pad has a second thickness, and the first thickness is smaller than the second thickness.

3. The stage of the small vertical plane interferometer according to claim 2, characterized in that: The upper top plate has a first protrusion at one end thereof facing the lower top plate, and the outer diameter of the upper top plate is larger than the outer diameter of the first protrusion; The end of the extension tube facing the upper top plate has a first groove for cooperating with the first protrusion. When the upper top plate and the extension tube are connected, the first protrusion is embedded in the first groove. The end of the extension tube facing the lower top plate has a second protrusion. The shape of the second protrusion is the same as that of the first protrusion. The lower top plate has a second groove at one end facing the upper top plate, and the shape of the second groove is the same as that of the first groove. When the extension tube is connected to the lower top plate, the second protrusion is embedded in the second groove. When the upper top plate is connected to the lower top plate, the first protrusion is embedded in the second groove.

4. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The length of the manual lifting platform can be fixed to any length within a preset length range.

5. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The movable plate has two first tapered holes, the first tapered holes penetrate the movable plate, and the apertures of the first tapered holes gradually increase from bottom to top; The static plate has two second tapered holes, the second tapered holes penetrate the static plate, and the apertures of the second tapered holes gradually increase from top to bottom; The elastic component includes a conical nut, a spring, a guide cylinder and a guide rod; The conical nut has a conical outer surface that matches the first conical hole, and the conical nut is engaged in the first conical hole; The guide cylinder is cylindrical and includes an extension portion and a tapered portion connected sequentially from top to bottom, the tapered portion having a tapered outer side surface that matches the second tapered hole, the outer diameter of the extension portion being the same as the minimum outer diameter of the tapered portion, the tapered portion being engaged in the second tapered hole, the extension portion extending from the tapered portion toward the movable plate, an end of the extension portion away from the tapered portion having an opening, the size of the opening being smaller than the inner diameter of the guide cylinder; The first end of the guide rod has a thread, and the second end of the guide rod has a limiting portion, the outer diameter of the limiting portion is larger than the outer diameter of the guide rod, and the size of the outer diameter of the limiting portion corresponds to the size of the inner diameter of the guide cylinder, the portion of the guide rod adjacent to the limiting portion is arranged on the inner ring of the guide cylinder, and the remaining portion of the guide rod extends from the opening, and the first end of the guide rod is screwed into the inner ring of the tapered nut via a thread; The spring is sleeved on the outer ring of the guide rod located at the inner ring of the guide cylinder.

6. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The static plate includes three first thickness regions and the remaining second thickness region. The second through holes are located in corresponding first thickness regions. The thickness of the first thickness region is greater than that of the second thickness region.

7. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The connecting line of the three thread top assemblies forms an equilateral triangle, one elastic assembly is located between two adjacent thread top assemblies in one group, and another elastic assembly is located between two adjacent thread top assemblies in another group.

8. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The surface of the static plate away from the dynamic plate has two parallel sliding grooves, and the surface of the base facing the static plate has two parallel sliding rails that cooperate with the sliding grooves, and the sliding grooves are engaged on the corresponding sliding rails.

9. The stage of the small vertical plane interferometer according to claim 1, characterized in that: The loading plate includes a protective pad and a main board connected in sequence from top to bottom. The bottom surface of the protective pad facing the main board has a plurality of strip-shaped protrusions arranged at intervals. The top surface of the main board facing the protective pad has a strip-shaped groove that cooperates with the strip-shaped protrusions, and the strip-shaped protrusions are embedded in the strip-shaped grooves.

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