Magnetic suspension pump control method, device and equipment and storage medium

Abstract

The invention discloses a magnetic suspension pump control method, device and equipment and a storage medium. The torque of a driving shaft of the magnetic suspension pump is collected in real time in the operation process of the magnetic suspension pump, whether a medium in the magnetic suspension pump changes or not is judged based on the torque, and when the medium in the magnetic suspension pump changes, a two-dimensional sequence formed by the torque and the rotating speed of the driving shaft is collected; a target sequence sample matched with the two-dimensional sequence is determined from the medium characteristic database, a target medium corresponding to the target sequence sample is determined, the rotating speed of the driving shaft is adjusted based on the characteristics of the target medium, and it is ensured that the output flow and pressure of the magnetic suspension pump are maintained within the preset range; the problems that the process is unstable and the pump body is damaged due to sudden change of output flow and pressure of the magnetic suspension pump are solved, the response speed to medium conversion is increased, the process stability is improved, and the service life of the magnetic suspension pump is prolonged.

Description

Technical Field

[0001] The present invention relates to an automatic control technology, and more particularly to a magnetic suspension pump control method, device, equipment and storage medium. Background Art

[0002] The magnetic levitation pump is a high-performance fluid delivery device that uses magnetic levitation technology to achieve contactless support and drive. In semiconductor wet processes (such as wet cleaning, wet etching, CMP, electroplating / chemical plating, etc.), magnetic levitation pumps are widely used in the delivery of ultrapure water, acid and alkali solutions, grinding fluids, electroplating fluids and other media due to their characteristics of no mechanical wear and low pollution.

[0003] Wet processes often require the use of process media with different characteristics alternately, and the medium characteristics (viscosity, density, corrosiveness, etc.) vary significantly. Existing magnetic levitation pumps mostly use fixed parameter operation modes. When the process switch causes the medium to change, the outlet pressure and flow of the magnetic levitation pump will fluctuate violently due to the load change. For example, when switching from low-viscosity ultrapure water to high-viscosity media, the output flow and pressure of the pump will drop sharply; conversely, the output flow and pressure will be overloaded, which will not only affect the process stability, but may also damage the pump body.

[0004] Existing solutions achieve feedback regulation by adding flow sensors or pressure sensors, but there are problems such as response delay and multi-parameter coupling interference, making it difficult to quickly adapt to sudden changes in the medium. Summary of the invention

[0005] The present invention provides a magnetic suspension pump control method, device, equipment and storage medium to improve the response speed to medium conversion, improve process stability and extend the service life of the magnetic suspension pump.

[0006] In a first aspect, the present invention provides a magnetic suspension pump control method, comprising:

[0007] During the operation of the magnetic levitation pump, the torque of the driving shaft of the magnetic levitation pump is collected in real time;

[0008] Determining whether a medium in the magnetic levitation pump changes based on the torque;

[0009] When the medium in the magnetic levitation pump changes, a two-dimensional sequence consisting of the torque and rotation speed of the drive shaft is collected;

[0010] Determine a target sequence sample matching the two-dimensional sequence from a medium characteristic database, and determine a target medium corresponding to the target sequence sample, wherein the medium characteristic database stores sequence samples consisting of standard torques and standard rotation speeds of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media;

[0011] Adjust the rotational speed of the drive shaft based on the characteristics of the target medium to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range.

[0012] Optionally, determining whether the medium in the magnetic levitation pump has changed based on the torque includes:

[0013] Calculate the difference between the torque collected at the current acquisition moment and the torque collected at the previous acquisition moment;

[0014] Determine whether the difference is greater than a preset value;

[0015] If so, it is determined that the medium in the magnetic levitation pump has changed;

[0016] If not, it is determined that the medium in the magnetic levitation pump has not changed.

[0017] Optionally, determining a target sequence sample that matches the two-dimensional sequence from a medium characteristic database and determining the target medium corresponding to the target sequence sample includes:

[0018] Calculate the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database;

[0019] Take the sequence sample with the maximum matching degree as the target sequence sample and determine the target medium corresponding to the target sequence sample.

[0020] Optionally, calculating the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database includes:

[0021] Calculate the Euclidean distance between each sampling point of the two-dimensional sequence and each sample point of the sequence sample;

[0022] Construct a distance matrix, where the position (i, j) of the distance matrix is used to store the Euclidean distance between the i-th sampling point and the j-th sample point, 1 ≤ i ≤ m, 1 ≤ j ≤ n, and i, j, m, and n are all positive integers;

[0023] Find the optimal path with the minimum sum of Euclidean distances from position (1, 1) to position (m, n) in the distance matrix, and use the sum of the Euclidean distances corresponding to the optimal path as the representation of the matching degree between the two-dimensional sequence and the sequence sample. The matching degree is inversely proportional to the sum of the Euclidean distances.

[0024] Optionally, adjusting the rotational speed of the drive shaft based on the characteristics of the target medium includes:

[0025] Based on the viscosity of the target medium, look up the corresponding rotational speed compensation value from a viscosity-rotational speed compensation value mapping table, where each viscosity has a corresponding rotational speed compensation value;

[0026] Compensate the current rotational speed of the drive shaft using the described rotational speed compensation value.

[0027] Optionally, while adjusting the rotational speed of the drive shaft based on the characteristics of the target medium, it further includes:

[0028] Compensate the outlet pressure of the magnetic levitation pump based on the viscosity of the target medium.

[0029] Optionally, after determining the target medium corresponding to the target sequence sample, it further includes:

[0030] Judge whether the target medium is corrosive;

[0031] If so, reduce the start-stop frequency of the magnetic levitation pump and enable the inert gas protection of the bearing chamber.

[0032] In a second aspect, the present invention further provides a magnetic levitation pump control device, including:

[0033] A torque acquisition module, configured to acquire the torque of the drive shaft of the magnetic levitation pump in real time during the operation of the magnetic levitation pump;

[0034] A medium change judgment module, configured to judge whether the medium in the magnetic levitation pump has changed based on the torque;

[0035] A two-dimensional sequence acquisition module, configured to acquire a two-dimensional sequence composed of the torque and rotational speed of the drive shaft when the medium in the magnetic levitation pump changes;

[0036] A target medium determination module, configured to determine a target sequence sample matching the two-dimensional sequence from a medium characteristic database, and determine the target medium corresponding to the target sequence sample, where the medium characteristic database stores sequence samples composed of the standard torque and standard rotational speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media;

[0037] A rotational speed adjustment module, configured to adjust the rotational speed of the drive shaft based on the characteristics of the target medium to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range.

[0038] In a third aspect, the present invention further provides an electronic device, including:

[0039] One or more processors;

[0040] A storage device, configured to store one or more programs;

[0041] When the one or more programs are executed by the one or more processors, the one or more processors implement the magnetic levitation pump control method provided in the first aspect of the present invention.

[0042] In a fourth aspect, the present invention further provides a computer-readable storage medium, on which a computer program is stored, and when the program is executed by a processor, it implements the magnetic levitation pump control method provided in the first aspect of the present invention.

[0043] The magnetic levitation pump control method provided by the present invention collects the torque of the drive shaft of the magnetic levitation pump in real time during the operation of the magnetic levitation pump, determines whether the medium in the magnetic levitation pump has changed based on the torque, and when the medium in the magnetic levitation pump has changed, collects a two-dimensional sequence composed of the torque and speed of the drive shaft, determines a target sequence sample matching the two-dimensional sequence from the medium characteristic database, and determines the target medium corresponding to the target sequence sample, where the medium characteristic database stores sequence samples composed of standard torque and standard speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media. Based on the characteristics of the target medium, the speed of the drive shaft is adjusted to ensure that the output flow and pressure of the magnetic levitation pump are maintained within a preset range, avoiding problems such as process instability and pump body damage caused by sudden changes in the output flow and pressure of the magnetic levitation pump, improving the response speed to medium transformation, improving process stability, and extending the service life of the magnetic levitation pump.

[0044] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. Description of the Drawings

[0045] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0046] Figure 1 It is a flowchart of a magnetic levitation pump control method provided by the present invention;

[0047] Figure 2 It is a schematic diagram of a distance matrix provided by an embodiment of the present invention;

[0048] Figure 3 It is a schematic diagram of a distance matrix provided by an embodiment of the present invention;

[0049] Figure 4A schematic structural diagram of an electronic device provided by an embodiment of the present invention.

[0050] Through the above-mentioned drawings, specific embodiments of the present application have been shown, and more detailed descriptions will be given later. These drawings and textual descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. Detailed implementation manners

[0051] In order to enable those skilled in the art of the present technology to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0052] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that such used data may be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0053] Figure 1 A flowchart of a magnetic levitation pump control method provided by the present invention. This embodiment is applicable to adjusting the speed of the magnetic levitation pump according to different media when a medium mutation occurs during the operation of the magnetic levitation pump, so as to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range. This method can be executed by the magnetic levitation pump control device provided by the present invention. The device can be implemented in software and / or hardware, and is usually configured in an electronic device, such as Figure 1 As shown, the magnetic levitation pump control method includes the following steps:

[0054] S101. During the operation of the magnetic levitation pump, collect the torque of the drive shaft of the magnetic levitation pump in real time.

[0055] In the embodiments of the present invention, the magnetic levitation pump uses non-contact electromagnetic bearings to support the rotor and achieves high-speed operation through a variable-frequency drive motor. The pump body is made of corrosion-resistant materials (such as PFA, ceramic coating), and the internal flow channel is optimized by fluid mechanics design to reduce the flow resistance of the medium, making it suitable for the transportation of various corrosive and highly viscous media in semiconductor wet processes. A high-precision torque sensor can be set on the drive shaft of the magnetic levitation pump to collect the torque of the drive shaft in real time. The torque sensor uses the strain gauge or magneto-elastic principle to convert the torque into an electrical signal, and the sampling frequency can reach the millisecond level to ensure rapid capture of torque fluctuations at the moment of medium switching. Exemplarily, during the operation of the magnetic levitation pump, the torque sensor collects the torque of the drive shaft at a frequency of 1000 Hz. After converting the torque into an electrical signal, noise reduction and filtering processing can also be performed on the torque to improve the authenticity of the data. The present invention does not make any limitations in this regard.

[0056] S102. Determine whether the medium in the magnetic levitation pump has changed based on the torque.

[0057] In the embodiments of the present invention, different media have different viscosities, and changes in viscosity will cause changes in the torque of the drive shaft. Therefore, when the medium in the magnetic levitation pump changes, at the moment of change, it is possible to determine whether the medium in the magnetic levitation pump has changed based on the collected torque.

[0058] Exemplarily, in some embodiments of the present invention, calculate the difference between the torque collected at the current sampling moment and the torque collected at the previous sampling moment, and determine whether the difference is greater than a preset value. If so, it is determined that the medium in the magnetic levitation pump has changed; if not, it is determined that the medium in the magnetic levitation pump has not changed.

[0059] S103. Collect the two-dimensional sequence composed of the torque and speed of the drive shaft.

[0060] When it is determined that the medium in the magnetic levitation pump has changed, continue to collect the two-dimensional sequence composed of the torque and speed of the drive shaft. Exemplarily, the torque of the drive shaft can be collected by a torque sensor, and the speed of the drive shaft at the same moment can be collected by a speed sensor to obtain a two-dimensional array composed of torque and speed. Then, the two-dimensional arrays collected at multiple sampling moments are sorted according to the time data to obtain the two-dimensional sequence composed of the torque and speed of the drive shaft.

[0061] When it is determined that the medium in the magnetic levitation pump has not changed, the step of collecting the torque of the drive shaft of the magnetic levitation pump can be returned for execution.

[0062] S104. Determine the target sequence sample matching the two-dimensional sequence from the medium characteristic database, and determine the target medium corresponding to the target sequence sample.

[0063] In an embodiment of the present invention, a medium characteristic database may be established in advance, and the medium characteristic database stores a sequence sample composed of a plurality of standard torques and standard rotational speeds of a drive shaft under different medium conditions. Exemplarily, a magnetic levitation pump is connected to the pipeline of a wet process machine tool, and the control unit is started. The user imports a medium list and corresponding sequence samples through a human-machine interface to complete the configuration of the medium characteristic database.

[0064] In practical applications, a target sequence sample matching the two-dimensional sequence is determined from the medium characteristic database, and a target medium corresponding to the target sequence sample is determined. The target sequence sample is one of the plurality of sequence samples, and the target medium is one of the plurality of media. Among them, the matching may refer to the highest similarity between the two-dimensional sequence and the target sequence sample. Exemplarily, in an embodiment of the present invention, taking the wet process (such as wet cleaning, wet etching, chemical mechanical polishing, electroplating / electroless plating, etc.) in the semiconductor manufacturing process as an example, the medium may include ultrapure water, sulfuric acid, potassium hydroxide, photoresist developer, polishing liquid, electroplating solution, etc., which are not limited in the present invention.

[0065] In some embodiments of the present invention, the above step S104 includes the following sub-steps:

[0066] S1041. Calculate the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database.

[0067] In some embodiments of the present invention, the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database is calculated. Exemplarily, the matching degree can be characterized by similarity, and the higher the similarity, the higher the matching degree.

[0068] The problem of misalignment that may exist between the two-dimensional sequence and the sequence sample in the time dimension may cause the similarity between the two to be unable to be directly calculated. To solve this problem, the two-dimensional sequence and the sequence sample can be aligned in the time dimension, and the matching degree can be calculated. The specific process is as follows:

[0069] 1. Calculate the Euclidean distance between each sampling point of the two-dimensional sequence and each sample point in the sequence sample.

[0070] In an embodiment of the present invention, the Euclidean distance between each sampling point of the two-dimensional sequence and each sample point in the sequence sample can be calculated.

[0071] 2. Construct a distance matrix, and the position (i, j) of the distance matrix is used to store the Euclidean distance d between the i-th sampling point and the j-th sample point ij , 1 ≤ i ≤ m, 1 ≤ j ≤ n, where i, j, m, and n are all positive integers.

[0072] Figure 2 FIG. is a schematic diagram of a distance matrix provided by an embodiment of the present invention, as Figure 2As shown, in the embodiments of the present invention, an m×n distance matrix is constructed, and the position (i, j) of the distance matrix is used to store the Euclidean distance d between the i-th sampling point and the j-th sample point ij , where 1≤i≤m, 1≤j≤n, and i, j, m, and n are all positive integers.

[0073] 3. Find the optimal path with the minimum sum of Euclidean distances from position (1, 1) to position (m, n) in the distance matrix, and use the sum of the corresponding Euclidean distances of the optimal path as the representation of the matching degree between the two-dimensional sequence and the sequence sample. The matching degree is inversely proportional to the sum of the Euclidean distances.

[0074] In some embodiments of the present invention, starting from position (1, 1) as the starting position and position (m, n) as the ending position, find an optimal path from the starting position to the ending position. The sum of the corresponding Euclidean distances passed by the optimal path is the smallest, and use the sum of the corresponding Euclidean distances of the optimal path as the representation of the matching degree between the two-dimensional sequence and the sequence sample. The matching degree is inversely proportional to the sum of the Euclidean distances. The positions passed by the optimal path represent the alignment of the sampling points in the two-dimensional sequence with the sample points in the sequence sample. In this way, the two-dimensional sequence and the sequence sample are aligned in the time dimension. Exemplarily, as Figure 2 shown, the optimal path ( Figure 2 shown by the shaded part in

[0075] passes through (1, 1), (2, 2), (3, 2), etc., indicating that the first sampling point in the two-dimensional sequence is aligned with the first sample point in the sequence sample, the second sampling point in the two-dimensional sequence is aligned with the second sample point in the sequence sample, the third sampling point in the two-dimensional sequence is aligned with the second sample point in the sequence sample, and so on. It should be noted that the sampling points in the two-dimensional sequence and the sample points in the sequence sample must correspond one by one, and cannot be skipped or missing, but one sampling point can correspond to multiple sample points, or multiple sampling points can correspond to one sample point.

[0076] 1. The starting position to the starting position is determined, and the path must start from the lower left corner of the distance matrix and end at the upper right corner.

[0077] 2. When the two-dimensional sequence and the sequence sample are aligned, there will be no omission or skipping a certain point for alignment.

[0078] 3. The points on the path must be monotonic with time.

[0079] S1042. Take the sequence sample with the maximum matching degree as the target sequence sample, and determine the target medium corresponding to the target sequence sample.

[0080] In an embodiment of the present invention, the sequence sample with the largest matching degree (or the smallest sum of Euclidean distances) is used as the target sequence sample, and the target medium corresponding to the target sequence sample is determined.

[0081] S105. Based on the characteristics of the target medium, adjust the rotational speed of the drive shaft to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range.

[0082] After determining the target medium, based on the characteristics of the target medium, adjust the rotational speed of the drive shaft to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range. Exemplarily, a corresponding rotational speed compensation value can be set for each target medium. After determining the target medium, use the rotational speed compensation value corresponding to the target medium to compensate the current rotational speed of the drive shaft. After the present invention determines that the medium has changed, it can quickly identify the target medium through the two-dimensional sequence composed of the torque and rotational speed of the drive shaft, and then based on the characteristics of the target medium, adjust the rotational speed of the drive shaft to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range, avoiding the delay problem caused by traditional flow / pressure feedback regulation and improving the response speed.

[0083] Exemplarily, in some embodiments of the present invention, the characteristics of the medium include viscosity. A viscosity-rotational speed compensation value mapping table can be pre-constructed, and each viscosity has a corresponding rotational speed compensation value. After determining the target medium, based on the viscosity of the target medium, look up the corresponding rotational speed compensation value from the viscosity-rotational speed compensation value mapping table, and then use the rotational speed compensation value to compensate the current rotational speed of the drive shaft. Exemplarily, when the target medium is determined to be a high-viscosity medium, increase the rotational speed of the drive shaft of the magnetic levitation pump by 20%.

[0084] In some embodiments of the present invention, while adjusting the rotational speed of the drive shaft based on the characteristics of the target medium, the outlet pressure of the magnetic levitation pump can also be compensated based on the viscosity of the target medium. Similarly, a viscosity-pressure compensation value mapping table can be pre-constructed, and each viscosity has a corresponding pressure compensation value. After determining the target medium, based on the viscosity of the target medium, look up the corresponding pressure compensation value from the viscosity-pressure compensation value mapping table, and then use the pressure compensation value to compensate the outlet pressure of the magnetic levitation pump. Exemplarily, when the target medium is determined to be a high-viscosity medium, open the pressure compensation valve at the outlet of the magnetic levitation pump for pressure compensation.

[0085] In some embodiments of the present invention, after determining the target medium corresponding to the target sequence sample, it can be further determined whether the target medium is corrosive (for example, the target medium is an acidic or alkaline medium, such as concentrated sulfuric acid, potassium hydroxide, etc.). If so, reduce the start-stop frequency of the magnetic levitation pump and enable the inert gas protection of the bearing chamber to avoid corrosion inside the magnetic levitation pump.

[0086] The magnetic levitation pump control method provided by the present invention collects the torque of the drive shaft of the magnetic levitation pump in real time during the operation of the magnetic levitation pump, determines whether the medium in the magnetic levitation pump has changed based on the torque, and when the medium in the magnetic levitation pump has changed, collects a two-dimensional sequence composed of the torque and rotational speed of the drive shaft, determines a target sequence sample matching the two-dimensional sequence from a medium characteristic database, and determines a target medium corresponding to the target sequence sample, where the medium characteristic database stores sequence samples composed of the standard torque and standard rotational speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media. Based on the characteristics of the target medium, the rotational speed of the drive shaft is adjusted to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range, avoiding problems such as process instability and pump body damage caused by sudden changes in the output flow rate and pressure of the magnetic levitation pump, improving the response speed to medium transformation, improving process stability, and extending the service life of the magnetic levitation pump.

[0087] Figure 3 FIG. is a schematic structural diagram of a magnetic levitation pump control device provided by the present invention, as Figure 3 shown, the magnetic levitation pump control device includes:

[0088] A torque acquisition module 201, configured to collect the torque of the drive shaft of the magnetic levitation pump in real time during the operation of the magnetic levitation pump;

[0089] A medium change judgment module 202, configured to determine whether the medium in the magnetic levitation pump has changed based on the torque;

[0090] A two-dimensional sequence acquisition module 203, configured to collect a two-dimensional sequence composed of the torque and rotational speed of the drive shaft when the medium in the magnetic levitation pump has changed;

[0091] A target medium determination module 204, configured to determine a target sequence sample matching the two-dimensional sequence from a medium characteristic database, and determine a target medium corresponding to the target sequence sample, where the medium characteristic database stores sequence samples composed of the standard torque and standard rotational speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media;

[0092] A rotational speed adjustment module 205, configured to adjust the rotational speed of the drive shaft based on the characteristics of the target medium to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range.

[0093] In some embodiments of the present invention, the medium change judgment module 202 includes:

[0094] A torque difference calculation sub-module, configured to calculate the difference between the torque collected at the current acquisition moment and the torque collected at the previous acquisition moment;

[0095] A judgment sub-module, configured to judge whether the difference is greater than a preset value;

[0096] A first determination sub-module, configured to determine that the medium in the magnetic levitation pump has changed when the difference is greater than the preset value;

[0097] A first determination sub-module, configured to determine that the medium in the magnetic levitation pump has not changed when the difference is not greater than the preset value.

[0098] In some embodiments of the present invention, the target medium determination module 204 includes:

[0099] A matching degree calculation sub-module, configured to calculate the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database;

[0100] A target medium determination sub-module, configured to use the sequence sample with the maximum matching degree as the target sequence sample, and determine the target medium corresponding to the target sequence sample.

[0101] In some embodiments of the present invention, the matching degree calculation sub-module includes:

[0102] A distance calculation unit, configured to calculate the Euclidean distance between each sampling point of the two-dimensional sequence and each sample point in the sequence sample;

[0103] A matrix construction unit, configured to construct a distance matrix, where the position (i, j) of the distance matrix is used to store the Euclidean distance between the i-th sampling point and the j-th sample point, 1 ≤ i ≤ m, 1 ≤ j ≤ n, and i, j, m, and n are all positive integers;

[0104] A path optimization unit, configured to find the optimal path with the minimum sum of Euclidean distances from the position (1, 1) to the position (m, n) in the distance matrix, and use the sum of the Euclidean distances corresponding to the optimal path as the representation of the matching degree between the two-dimensional sequence and the sequence sample, and the matching degree is inversely proportional to the sum of the Euclidean distances.

[0105] In some embodiments of the present invention, the rotational speed adjustment module 205 includes:

[0106] A compensation value lookup sub-module, configured to look up the corresponding rotational speed compensation value from the viscosity-rotational speed compensation value mapping table based on the viscosity of the target medium, where each viscosity has a corresponding rotational speed compensation value;

[0107] A rotational speed compensation sub-module, configured to compensate the current rotational speed of the drive shaft with the rotational speed compensation value.

[0108] In some embodiments of the present invention, the magnetic levitation pump control device further includes:

[0109] A pressure compensation device is used to adjust the rotational speed of the drive shaft based on the characteristics of the target medium, and at the same time, compensate the outlet pressure of the magnetic levitation pump based on the viscosity of the target medium.

[0110] In some embodiments of the present invention, the magnetic levitation pump control device further includes:

[0111] A corrosiveness judgment module is used to judge whether the target medium is corrosive after determining the target medium corresponding to the target sequence sample;

[0112] A protection module is used to reduce the start-stop frequency of the magnetic levitation pump and enable the inert gas protection of the bearing cavity when the target medium is corrosive.

[0113] The above magnetic levitation pump control device can execute the magnetic levitation pump control method provided by the foregoing embodiments of the present invention, and has corresponding functional modules and beneficial effects for executing the magnetic levitation pump control method.

[0114] Figure 4 It is a schematic structural diagram of an electronic device provided by an embodiment of the present invention. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or claimed herein.

[0115] As Figure 4 shown, the electronic device includes at least one processor 11, and a memory communicatively connected to at least one processor 11, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc. Among them, the memory stores a computer program executable by at least one processor, and the processor 11 can execute various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 12 or the computer program loaded from the storage unit 18 into the random access memory (RAM) 13. In the RAM 13, various programs and data required for the operation of the electronic device can also be stored. The processor 11, the ROM 12, and the RAM 13 are connected to each other through a bus 14. The input / output (I / O) interface 15 is also connected to the bus 14.

[0116] Multiple components in the electronic device are connected to the I / O interface 15, including: an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a magnetic disk, an optical disc, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the electronic device to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0117] The processor 11 can be various general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the processor 11 include but are not limited to a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The processor 11 executes the various methods and processes described above, such as the magnetic levitation pump control method.

[0118] In some embodiments, the magnetic levitation pump control method can be implemented as a computer program, which is tangibly contained in a computer-readable storage medium, such as the storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed onto the electronic device via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the magnetic levitation pump control method described above can be executed. Alternatively, in other embodiments, the processor 11 can be configured to execute the magnetic levitation pump control method by any other suitable means (e.g., by means of firmware).

[0119] The various embodiments of the systems and techniques described above in this document can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-chip (SOCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments can include: being implemented in one or more computer programs, which can be executed and / or interpreted on a programmable system including at least one programmable processor, the programmable processor can be a special or general-purpose programmable processor, can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit the data and instructions to the storage system, the at least one input device, and the at least one output device.

[0120] A computer program for implementing the method of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, such that the computer programs, when executed by the processor, cause the functions / operations specified in the flowchart and / or block diagram to be implemented. The computer program may be executed entirely on the machine, partly on the machine, as a stand-alone software package partly on the machine and partly on a remote machine or entirely on the remote machine or server.

[0121] In the context of the present invention, a computer-readable storage medium may be a tangible medium that can contain, or store a computer program for use by or in connection with an instruction execution system, apparatus, or device. The computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the foregoing. Alternatively, the computer-readable storage medium may be a machine-readable signal medium. More specific examples of the machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0122] In order to provide interaction with a user, the systems and techniques described herein may be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball) by which the user can provide input to the electronic device. Other kinds of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0123] The systems and techniques described herein can be implemented in a computing system including backend components (e.g., as a data server), or a computing system including middleware components (e.g., an application server), or a computing system including frontend components (e.g., a user computer having a graphical user interface or a web browser through which a user can interact with an implementation of the systems and techniques described herein), or a computing system including any combination of such backend components, middleware components, or frontend components. The components of the system can be interconnected to each other by digital data communication in any form or medium (e.g., a communication network). Examples of communication networks include: local area network (LAN), wide area network (WAN), blockchain network, and the Internet.

[0124] A computing system can include clients and servers. Clients and servers are generally far from each other and typically interact through a communication network. The client-server relationship is created by computer programs running on respective computers and having a client-server relationship with each other. A server can be a cloud server, also known as a cloud computing server or cloud host, which is a host product in the cloud computing service system, solving the defects of difficult management and weak business scalability existing in traditional physical hosts and VPS services.

[0125] An embodiment of the present invention also provides a computer program product, including a computer program which, when executed by a processor, implements the magnetic levitation pump control method provided in any embodiment of the present application.

[0126] In the process of implementing the computer program product, computer program code for performing the operations of the present invention can be written in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, executed as a stand-alone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any type of network - including a local area network (LAN) or a wide area network (WAN) - or can be connected to an external computer (e.g., by connecting through the Internet using an Internet service provider).

[0127] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps recited in the present invention can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved, and no limitation is made herein.

[0128] The above specific embodiments do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic levitation pump control method, characterized in that, Including: During the operation of the magnetic levitation pump, the torque of the drive shaft of the magnetic levitation pump is collected in real time; Based on the torque, it is judged whether the medium in the magnetic levitation pump has changed; When the medium in the magnetic levitation pump changes, a two-dimensional sequence composed of the torque and rotational speed of the drive shaft is collected; A target sequence sample matching the two-dimensional sequence is determined from a medium characteristic database, and a target medium corresponding to the target sequence sample is determined. Wherein, the medium characteristic database stores sequence samples composed of standard torque and standard rotational speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media; Based on the characteristics of the target medium, the rotational speed of the drive shaft is adjusted to ensure that the output flow and pressure of the magnetic levitation pump are maintained within a preset range.

2. The magnetic levitation pump control method according to claim 1, wherein Based on the torque, judging whether the medium in the magnetic levitation pump has changed includes: Calculating the difference between the torque collected at the current collection moment and the torque collected at the previous collection moment; Judging whether the difference is greater than a preset value; If so, it is determined that the medium in the magnetic levitation pump has changed; If not, it is determined that the medium in the magnetic levitation pump has not changed.

3. The magnetic levitation pump control method according to claim 1, characterized in that, Determining a target sequence sample matching the two-dimensional sequence from a medium characteristic database and determining a target medium corresponding to the target sequence sample includes: Calculating the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database; Taking the sequence sample with the largest matching degree as the target sequence sample, and determining the target medium corresponding to the target sequence sample.

4. The magnetic levitation pump control method according to claim 3, characterized in that, Calculating the matching degree between the two-dimensional sequence and each sequence sample in the medium characteristic database includes: Calculating the Euclidean distance between each sampling point of the two-dimensional sequence and each sample point of the sequence sample; Constructing a distance matrix, where the position (i, j) of the distance matrix is used to store the Euclidean distance between the i-th sampling point and the j-th sample point, 1 ≤ i ≤ m, 1 ≤ j ≤ n, and i, j, m, n are all positive integers; Finding the optimal path with the minimum sum of Euclidean distances from position (1, 1) to position (m, n) in the distance matrix, and taking the sum of the corresponding Euclidean distances of the optimal path as the representation of the matching degree between the two-dimensional sequence and the sequence sample, and the matching degree is inversely proportional to the sum of the Euclidean distances.

5. The magnetic levitation pump control method according to claim 1, characterized in that Based on the characteristics of the target medium, adjusting the rotational speed of the drive shaft includes: Based on the viscosity of the target medium, looking up the corresponding rotational speed compensation value from a viscosity-rotational speed compensation value mapping table, where each viscosity has a corresponding rotational speed compensation value; Compensating the current rotational speed of the drive shaft with the rotational speed compensation value.

6. The magnetic levitation pump control method according to claim 1, characterized in that While adjusting the rotational speed of the drive shaft based on the characteristics of the target medium, it also includes: Compensating the outlet pressure of the magnetic levitation pump based on the viscosity of the target medium.

7. The magnetic levitation pump control method according to claim 1, wherein After determining the target medium corresponding to the target sequence sample, it also includes: Judging whether the target medium is corrosive; If so, reducing the start-stop frequency of the magnetic levitation pump and enabling inert gas protection for the bearing chamber.

8. A magnetic levitation pump control device, characterized in that, Including: A torque acquisition module, configured to acquire in real time the torque of the drive shaft of the magnetic levitation pump during the operation of the magnetic levitation pump; A medium change judgment module, configured to judge whether the medium in the magnetic levitation pump has changed based on the torque; A two-dimensional sequence acquisition module, configured to acquire a two-dimensional sequence composed of the torque and rotational speed of the drive shaft when the medium in the magnetic levitation pump changes; A target medium determination module, configured to determine a target sequence sample matching the two-dimensional sequence from a medium characteristic database, and determine a target medium corresponding to the target sequence sample, wherein the medium characteristic database stores sequence samples composed of standard torque and standard rotational speed of the drive shaft under multiple medium conditions, the target sequence sample is one of the multiple sequence samples, and the target medium is one of the multiple media; A rotational speed adjustment module, configured to adjust the rotational speed of the drive shaft based on the characteristics of the target medium to ensure that the output flow rate and pressure of the magnetic levitation pump are maintained within a preset range.

9. An electronic device, characterized in that, Comprising: One or more processors; A storage device, configured to store one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors implement the magnetic levitation pump control method according to any one of claims 1-7.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the program is executed by the processor, it implements the magnetic levitation pump control method according to any one of claims 1-7.

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