Spherical lens surface shape automatic detection device based on Fizeau interferometer

Abstract

The invention relates to the technical field of lens laser detection, in particular to a spherical lens surface shape automatic detection device based on a Fizeau interferometer, which comprises the Fizeau interferometer, an automatic feeding device and an automatic discharging device are respectively arranged on the two sides of the Fizeau interferometer, the Fizeau interferometer is connected with a vertically arranged electric track through a connecting seat, and the connecting seat is connected with the automatic feeding device. A lens clamping seat is arranged below the Fizeau interferometer, the lower end of the electric track is connected with a bracket, the bracket is connected with a driving shaft fixedly connected with the lens clamping seat through a rotary damper, and the side face of a connecting seat is connected with a transmission assembly in transmission with the driving shaft; in the up-and-down moving process of the Fizeau interferometer, the lens clamping seat can be automatically driven to turn over through the transmission assembly, so that the two side faces of the lens can be conveniently and rapidly detected, and the convenience of lens detection is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of lens laser measurement, and particularly relates to an automatic spherical lens surface shape detection device based on a Fizeau interferometer. Background Art

[0002] Currently, when using a Fizeau interferometer to detect spherical lenses, the conventional operation process is to place the lens on a specific detection platform, and the interferometer emits coherent light. After the light is reflected by the lens surface, interference fringes are generated. Based on the characteristics of these interference fringes, the surface shape error of the lens is analyzed. However, when facing spherical lenses that need to detect both sides, since only one side of the lens can be detected each time, if both sides need to be detected, the lens needs to be removed from the detection device, flipped, reinstalled, and adjusted to ensure that the lens can be accurately matched with the Fizeau interferometer at the new detection position. This process is extremely cumbersome, not only consuming a large amount of time and increasing the manual operation cost, but also easily introducing new positioning errors and mechanical damages during the frequent disassembly, flipping, and reinstallation processes, seriously affecting the accuracy and consistency of the detection results.

[0003] Most of the existing solutions in the market that attempt to solve the lens flipping problem have deficiencies. For example, some simple manual flipping tools rely entirely on the experience and skills of the operator, and it is difficult to ensure the position accuracy of the lens after flipping, resulting in poor repeatability of the interferometer detection results. And some more complex automatic flipping devices, although improving the flipping accuracy to a certain extent, have defects in the collaborative work with the Fizeau interferometer. They cannot achieve seamless docking with the interferometer detection process, resulting in the entire detection process still not being smooth enough and the efficiency improvement being limited. Summary of the Invention

[0004] In view of the problems in the prior art, the present invention provides an automatic spherical lens surface shape detection device based on a Fizeau interferometer.

[0005] The technical solution adopted by the present invention to solve its technical problems is an automatic spherical lens surface shape detection device based on a Fizeau interferometer, including a Fizeau interferometer. An automatic feeding device and an automatic discharging device are respectively arranged on both sides of the Fizeau interferometer. The Fizeau interferometer is connected to a vertically arranged electric track through a connecting seat. A lens clamping seat is arranged below the Fizeau interferometer. The lower end of the electric track is connected to a bracket. The bracket is fixedly connected to a driving shaft of the lens clamping seat through a rotary damper. A transmission component that drives the driving shaft is connected to the side of the connecting seat.

[0006] Specifically, the transmission assembly includes a transmission rod and a driving gear. The upper end of the transmission rod is connected to the connecting seat. The transmission gear is rotatably connected to the end of the driving shaft away from the lens clamping seat through a one-way bearing. The transmission rod is provided with teeth that mesh with the driving gear.

[0007] Specifically, the lens clamping seat includes an annular seat, a support plate is distributed circumferentially below the annular seat, openings are distributed circumferentially on the edge of the annular seat, a spring shaft is connected to the support plate and rotatably connected to the inner wall of the opening, a toggle block is fixedly connected to the spring shaft, and a driving component for driving the toggle block to move is installed in the opening.

[0008] Specifically, the driving assembly includes a piston cylinder horizontally arranged in an opening, the end of the piston cylinder away from the axis of the annular seat is closed, a piston plate is sealingly and slidably connected inside the piston cylinder, the end of the piston plate away from the axis of the annular seat is connected to a piston rod, the end of the piston rod away from the piston plate passes through the piston cylinder and is sealingly and slidably connected to the piston cylinder, the end of the piston cylinder away from the piston plate is connected to a toggle frame with an opening downward, and the toggle block is movably connected to the toggle frame.

[0009] Specifically, an annular installation groove is provided on the inner side of the annular seat, an expansion ring is installed in the annular installation groove, and the expansion ring is connected to an end of the piston cylinder away from the toggle frame.

[0010] Specifically, the driving shaft is a hollow structure, and a liquid supply ring connected to the inside of the driving shaft is installed on the side of the annular seat, and the liquid supply ring is connected to the end of the piston cylinder away from the center of the lens clamping seat, and the end of the driving shaft away from the center of the lens clamping seat is fixedly connected to the rotary joint connected to the inside of the driving shaft, and the upper part of the connecting seat is fixedly connected to a vertically arranged hydraulic cylinder, and the hydraulic cylinder is sealingly and slidingly connected to a movable plug, and the lower part of the movable plug is connected to the bottom of the inner side of the hydraulic cylinder through a spring, and the upper part of the movable plug is connected to a piston column, and the upper end of the piston column passes through the hydraulic cylinder and is sealingly and slidingly connected to the hydraulic cylinder, and the upper end of the piston column is connected to an extrusion plate, and the upper end of the electric rail is connected to a top plate corresponding to the extrusion plate, and the upper part of the hydraulic cylinder is connected to a rotary joint through a pipeline, and the upper inner side of the hydraulic cylinder is filled with hydraulic oil.

[0011] Specifically, the automatic loading device and the automatic unloading device both include an electric conveying track and a robotic arm designed on one side of the electric conveying track. A sliding seat is installed on the electric conveying track, an anti-slip support plate is installed on the sliding seat, and a spherical lens tray is provided on the anti-slip support plate.

[0012] Specifically, the robotic arm is connected to an electric-controlled suction cup, and positioning rods are provided on both sides of the electric conveying track. The positioning rods are slidably connected to a slider connected to the bottom of the anti-slip support plate, and the two ends of the electric conveying track are connected to side panels fixedly connected to the positioning rods, and the bottom of the side panels is connected to the support frame.

[0013] Specifically, an elastic light-shielding cover is connected to the bottom of the Fizeau interferometer, a traction plate is connected to the bottom of the elastic light-shielding cover, a winding shaft is arranged on the side of the Fizeau interferometer, a rope connected to the traction plate is wound on the winding shaft, a support plate fixedly connected to the side of the Fizeau interferometer and rotatably connected to the winding shaft is provided, and a rubber roller in frictional transmission with the side of the electric track is connected to one end of the winding shaft close to the electric track.

[0014] Advantages of the present invention:

[0015] (1) For the automatic spherical mirror surface shape detection device based on the Fizeau interferometer of the present invention, during the up and down movement of the Fizeau interferometer, the lens clamping seat can be automatically driven to flip through the transmission component, so as to facilitate and quickly detect the two sides of the lens, thereby improving the convenience of lens detection.

[0016] (2) For the automatic spherical mirror surface shape detection device based on the Fizeau interferometer of the present invention, after the Fizeau interferometer moves down, the clamping method of the lens clamping seat can be automatically switched, so as to realize the automatic switching from the bottom support of the lens to the edge clamping of the lens, thereby ensuring the stability of lens clamping and avoiding blocking the measurement path of the Fizeau interferometer.

[0017] (3) For the automatic spherical mirror surface shape detection device based on the Fizeau interferometer of the present invention, when the Fizeau interferometer moves down for measurement, the elastic light-shielding cover can be automatically unfolded, so as to block the measurement environment of the Fizeau interferometer, reduce the interference of external light sources, and improve the measurement accuracy. Description of the drawings

[0018] The present invention will be further described below with reference to the drawings and embodiments.

[0019] Figure 1 Is an isometric view of the present invention.

[0020] Figure 2 Is an isometric view of the Fizeau interferometer of the present invention.

[0021] Figure 3 Is Figure 2 Another perspective isometric view of.

[0022] Figure 4 Is Figure 2 An enlarged view of area A of.

[0023] Figure 5 Is Figure 3 An enlarged view of area B of.

[0024] Figure 6 Is Figure 3 An enlarged view of area C of.

[0025] Figure 7 Is an axonometric view of an electric conveying slide rail.

[0026] Figure 8 Is a partial sectional axonometric view of a piston cylinder;

[0027] Figure 9 Is a partial sectional axonometric view of a hydraulic cylinder.

[0028] In the figure: 1. Fizeau interferometer; 2. Connecting base; 3. Electric slide rail; 4. Carrying bracket; 5. Rotary damper; 6. Active drive shaft; 7. Linear transmission rod; 8. Active gear; 9. One-way bearing; 10. Annular mounting seat; 11. Support pallet; 12. Drive notch; 13. Elastic rotating shaft; 14. Drive block; 15. Piston cylinder; 16. Piston slider; 17. Piston rod; 18. Drive frame; 19. Annular mounting groove; 20. Elastic expansion ring; 21. Liquid supply ring; 22. Rotary joint; 23. Hydraulic cylinder; 24. Hydraulic piston; 25. Spring; 26. Hydraulic push rod; 27. Pressure plate; 28. Top support plate; 29. Electric conveying slide rail; 30. Robot arm; 31. Sliding bracket; 32. Anti-slip carrying tray; 33. Spherical lens carrying tray; 34. Electric control vacuum chuck; 35. Positioning guide rod; 36. Slide block; 37. Side support side plate; 38. Equipment support frame; 39. Flexible light-shielding cover; 40. Pulling plate; 41. Winding shaft; 42. Pulling rope; 43. Support backing plate; 44. Rubber friction roller. Detailed implementation manners

[0029] In order to make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0030] As an embodiment of the present invention, as Figures 1-9 shown, a spherical mirror surface shape automatic detection device based on a Fizeau interferometer includes a Fizeau interferometer 1. An automatic feeding device and an automatic discharging device are respectively arranged on both sides of the Fizeau interferometer 1. The Fizeau interferometer 1 is connected to a vertically arranged electric slide rail 3 through a connecting base 2. A lens clamping tooling is arranged below the Fizeau interferometer 1. The lower end of the electric slide rail 3 is connected to a carrying bracket 4. The carrying bracket 4 is connected to an active drive shaft 6 fixedly connected to the lens clamping tooling through a rotary damper 5. A transmission mechanism drivingly connected to the active drive shaft 6 is connected to the side of the connecting base 2.

[0031] In use, the feeding of the spherical lens is completed by the automatic feeding device. The spherical lens is placed and clamped in the lens clamping tooling. After the Fizeau interferometer 1 moves downwards, the surface shape detection of the spherical lens is carried out. After the single-sided detection is completed, the Fizeau interferometer 1 moves upwards. At this time, the driving mechanism drives the active drive shaft 6 to rotate by a certain degree, so as to flip the lens clamping tooling and make the other side of the spherical lens face upwards. Then the Fizeau interferometer 1 moves downwards again to complete the detection of the other side of the spherical lens. After the detection of the other side of the spherical lens is completed, the Fizeau interferometer 1 moves upwards again to reset. At this time, the lens clamping tooling is driven to flip again through the driving mechanism, so that the lens clamping tooling returns to the initial state. After the two sides of the spherical lens are detected, the detected spherical lens is taken out by the automatic unloading device. The rotation damper 5 can ensure the stability of the active drive shaft 6 after rotation, so as to ensure the stability of the lens clamping tooling.

[0032] In order to facilitate the automatic driving of the lens clamping tooling to flip when the Fizeau interferometer 1 moves upwards, as an embodiment of the present invention, the driving mechanism includes a linear driving rod 7 and an active gear 8. The upper end of the linear driving rod 7 is connected to the connecting base 2. The active gear 8 is rotatably connected to one end of the active drive shaft 6 away from the lens clamping tooling through a one-way bearing 9. The linear driving rod 7 is provided with teeth meshing with the active gear 8.

[0033] In use, when the Fizeau interferometer 1 moves downwards, the teeth mesh with the active gear 8. At this time, the one-way bearing 9 is relied on to prevent the linear driving rod 7 from driving the active drive shaft 6 to rotate. When the Fizeau interferometer 1 moves upwards, the teeth pass by the active gear 8. Relying on the one-way transmission of the one-way bearing 9, the active gear 8 can be driven to rotate by a certain degree, so as to drive the lens clamping tooling to flip by a certain degree, making the other side of the lens in the lens clamping tooling flip upwards, so as to facilitate the detection of the other side of the spherical lens. After the Fizeau interferometer 1 moves downwards again to complete the detection and then moves upwards, the lens clamping tooling can be driven to flip by a certain degree again through the teeth, so that the lens clamping tooling flips back to the initial state.

[0034] In order to facilitate the placement of the spherical lens into the lens clamping tooling, as an embodiment of the present invention, the lens clamping tooling includes an annular mounting seat 10. Support plates 11 are circumferentially distributed below the annular mounting seat 10, and drive notches 12 are circumferentially distributed at the edge of the annular mounting seat 10. Elastic rotating shafts 13 connected to the inner walls of the drive notches 12 are connected to the support plates 11. Driving blocks 14 are fixedly connected to the elastic rotating shafts 13, and a drive mechanism assembly for driving the driving blocks 14 to move is installed in the drive notches 12.

[0035] During use, the spherical lens can be placed in the annular mounting seat 10 and supported by the support plate 11, so as to facilitate the placement of the spherical lens in the lens clamping tooling. After the spherical lens is fixed in the annular mounting seat 10, the driving block 14 can be driven to move by the driving mechanism assembly, so as to drive the support plate 11 to swing downward and avoid the support plate 11 blocking the detection path of the spherical lens.

[0036] In order to facilitate the swinging of the support plate 11, as an embodiment of the present invention, the driving mechanism assembly includes a piston cylinder 15 horizontally arranged in the driving notch 12. One end of the piston cylinder 15 away from the axis of the annular mounting seat 10 is closed, and a piston slider 16 is hermetically and slidably connected in the piston cylinder 15. One end of the piston slider 16 away from the axis of the annular mounting seat 10 is connected to a piston rod 17, and one end of the piston rod 17 away from the piston slider 16 passes through the piston cylinder 15 and is hermetically and slidably connected to the piston cylinder 15. One end of the piston cylinder 15 away from the piston slider 16 is connected to a driving dial frame 18 with an opening downward, and the driving block 14 is movably connected to the driving dial frame 18.

[0037] During use, by pressurizing the end of the piston cylinder 15 away from the axis of the annular mounting seat 10, the piston slider 16 can be driven to move towards the axis of the annular mounting seat 10, thereby pulling the driving dial frame 18 to move towards the axis of the annular mounting seat 10, driving the driving block 14 to move, and driving the support plate 11 to swing downward, so as to avoid the support plate 11 blocking the detection path of the spherical lens.

[0038] In order to facilitate the fixing of the spherical lens in the annular mounting seat 10, as an embodiment of the present invention, an annular mounting groove 19 is formed on the inner side of the annular mounting seat 10, and an elastic expansion ring 20 is installed in the annular mounting groove 19. The elastic expansion ring 20 is communicated with the end of the piston cylinder 15 away from the driving dial frame 18.

[0039] During use, by pressurizing the end of the piston cylinder 15 away from the axis of the annular mounting seat 10, the piston slider 16 can be driven to move towards the axis of the annular mounting seat 10. At this time, the piston slider 16 squeezes the gas in the piston cylinder 15 into the elastic expansion ring 20, thereby driving the elastic expansion ring 20 to expand. After the elastic expansion ring 20 expands, it clamps the edge of the spherical lens, thereby improving the clamping stability of the spherical lens. At the same time, the piston rod 17 pulls the driving dial frame 18 and the driving block 14 to move, thereby driving the support plate 11 to swing downward, so as to avoid the support plate 11 blocking the detection path of the spherical lens and facilitating the detection of the spherical lens.

[0040] For the convenience of supplying pressure into the piston cylinder 15, as an embodiment of the present invention, the active drive shaft 6 is of a hollow structure; a liquid supply ring 21 communicating with the inside of the active drive shaft 6 is installed on the side of the annular mounting seat 10, and the liquid supply ring 21 is communicated with one end of the piston cylinder 15 away from the center of the lens clamping tooling; a rotary joint 22 communicating with the inside of the active drive shaft 6 is fixedly connected to one end of the active drive shaft 6 away from the center of the lens clamping tooling; a vertically arranged hydraulic cylinder 23 is fixedly connected to the upper part of the connection base 2, and a hydraulic piston 24 is hermetically and slidably connected in the hydraulic cylinder 23; the lower part of the hydraulic piston 24 is connected to the inner bottom of the hydraulic cylinder 23 through a spring 25, and the upper part of the hydraulic piston 24 is connected to a hydraulic push rod 26; the upper end of the hydraulic push rod 26 passes through the hydraulic cylinder 23 and is hermetically and slidably connected to the hydraulic cylinder 23, and the upper end of the hydraulic push rod 26 is connected to a pressure acting plate 27; the upper end of the electric slide rail 3 is connected to a top support plate 28 corresponding to the pressure acting plate 27, the upper part of the hydraulic cylinder 23 is communicated with the rotary joint 22 through a pipeline, and hydraulic oil is filled in the upper part inside the hydraulic cylinder 23.

[0041] During use, when the Fizeau interferometer 1 moves downward, the hydraulic cylinder 23 automatically resets and extends by relying on the spring 25, the hydraulic oil in the hydraulic cylinder 23 is extruded and supplied into the rotary joint 22, and is supplied into the piston cylinder 15 through the liquid supply ring 21, so as to drive the piston slider 16 to move towards the axis of the annular mounting seat 10, thereby pulling the driving dial frame 18 to move towards the axis of the annular mounting seat 10, so as to drive the driving block 14 to move, and drive the support tray 11 to swing downward, so as to prevent the support tray 11 from blocking the detection path of the spherical lens; meanwhile, the piston slider 16 extrudes the gas in the piston cylinder 15 into the elastic expansion ring 20, so as to drive the elastic expansion ring 20 to expand; after the elastic expansion ring 20 expands, it clamps the edge of the spherical lens, so as to improve the clamping stability of the spherical lens.

[0042] For the convenience of automatic loading and unloading of the spherical lens, as an embodiment of the present invention, both the automatic loading device and the automatic unloading device include an electric conveying slide rail 29 and a robotic arm 30 designed on one side of the electric conveying slide rail 29; sliding brackets 31 are installed on the electric conveying slide rail 29, an anti-slip carrying tray 32 is installed on the sliding bracket 31, and a spherical lens carrying tray 33 is arranged on the anti-slip carrying tray 32.

[0043] During use, the spherical lens to be detected is supported by the spherical lens carrier plate 33, and the spherical lens carrier plate 33 is placed on the anti-slip carrier tray 32. The electric slide rail 3 is used to drive the sliding bracket 31 to move, so as to drive the spherical lens to be detected to move to the side of the Fizeau interferometer 1. Then, the mechanical arm 30 is used to take out the spherical lens to be detected and place the spherical lens on the lens clamping tooling. After the detection is completed, another set of mechanical arms 30 takes out the detected spherical lens and places the spherical lens on the spherical lens carrier plate 33 on the other side of the Fizeau interferometer 1, and the electric conveying slide rail 29 drives the sliding bracket 31 to move, so as to send out the detected spherical lens.

[0044] In order to ensure the stable operation of the automatic feeding device and the automatic discharging device, as an embodiment of the present invention, an electric control vacuum chuck is connected to the mechanical arm 30. Positioning guide rods 35 are provided on both sides of the electric conveying slide rail 29, and sliders 36 connected to the bottom of the anti-slip carrier tray 32 are slidably connected to the positioning guide rods 35. The two ends of the electric conveying slide rail 29 are connected to side support side plates 37 fixedly connected to the positioning guide rods 35, and the bottom of the side support side plates 37 is connected to the equipment support frame 38.

[0045] During use, through the electric control vacuum chuck, the mechanical arm 30 can easily and quickly grab the spherical lens; the stability of the movement of the anti-slip carrier tray 32 is further improved by the positioning guide rods 35 and the sliders 36.

[0046] As an embodiment of the present invention, a flexible light-shielding cover 39 is connected to the bottom of the Fizeau interferometer 1, and a pulling plate 40 is connected to the bottom of the flexible light-shielding cover 39. A winding shaft 41 is provided on the side of the Fizeau interferometer 1, and a traction rope 42 connected to the pulling plate 40 is wound around the winding shaft 41. A support backing plate 43 fixedly connected to the side of the Fizeau interferometer 1 and rotatably connected to the winding shaft 41 is provided on the side of the Fizeau interferometer 1, and a rubber friction roller 44 in frictional transmission with the side of the electric slide rail 3 is connected to one end of the winding shaft 41 close to the electric slide rail 3.

[0047] During use, during the downward movement of the Fizeau interferometer 1, the rubber friction roller 44 rolls into contact with the side of the electric slide rail 3, so as to drive the winding shaft 41 to rotate and release the traction rope 42, thereby moving the pulling plate 40 downward to unfold the flexible light-shielding cover 39. After the pulling plate 40 moves downward, it comes into contact with the lens clamping tooling, so as to perform light-shielding protection on the detection environment of the Fizeau interferometer 1, thereby further improving the accuracy of the detection work of the Fizeau interferometer 1; conversely, as the Fizeau interferometer 1 moves upward, it can automatically drive the winding shaft 41 to rotate, thereby driving the pulling plate 40 to move upward, so as to facilitate the reset of the flexible light-shielding cover 39. It should be noted that in order to prevent the pulling plate 40 from coming into contact with the swung support plate 11 after moving downward and affecting the unfolding effect of the flexible light-shielding cover 39, a slot matching the position of the support plate 11 can be provided on the pulling plate 40, or the specification of the pulling plate 40 can be reduced.

[0048] When the present invention is in use, the spherical lens carrier 33 is used to support the spherical lens to be detected, and the spherical lens carrier 33 is placed on the anti-slip carrier tray 32. The electric slide rail 3 is used to drive the sliding bracket 31 to move, so as to drive the spherical lens to be detected to move to the side of the Fizeau interferometer 1. The robotic arm 30 of the automatic feeding device is used to grab the spherical lens to complete the feeding of the spherical lens, and the spherical lens can be placed in the annular mounting seat 10 and supported by the supporting plate 11.

[0049] During the downward movement of the Fizeau interferometer 1, the rubber friction roller 44 makes rolling contact with the side of the electric slide rail 3, so as to drive the winding shaft 41 to rotate and release the traction rope 42, thereby causing the pulling plate 40 to move downward to unfold the flexible light-shielding cover 39. After the pulling plate 40 moves downward, it contacts the lens clamping tooling, so as to perform light-shielding protection on the detection environment of the Fizeau interferometer 1, thereby further improving the accuracy of the detection work of the Fizeau interferometer 1.

[0050] After the Fizeau interferometer 1 moves downward, the hydraulic cylinder 23 automatically resets and extends by relying on the spring 25. The hydraulic oil in the hydraulic cylinder 23 is squeezed and supplied into the rotary joint 22, and is supplied into the piston cylinder 15 through the liquid supply ring 21, so as to drive the piston slider 16 to move towards the axis of the annular mounting seat 10, thereby pulling the driving dial frame 18 to move towards the axis of the annular mounting seat 10, so as to drive the driving block 14 to move, and drive the supporting plate 11 to swing downward, so as to prevent the supporting plate 11 from blocking the detection path of the spherical lens; at the same time, the piston slider 16 squeezes the gas in the piston cylinder 15 into the elastic expansion ring 20, thereby driving the elastic expansion ring 20 to expand; after the elastic expansion ring 20 expands, it clamps the edge of the spherical lens, thereby improving the clamping stability of the spherical lens.

[0051] After the Fizeau interferometer 1 moves downward, the surface shape detection work of the spherical lens is carried out; after the single-sided detection is completed, the Fizeau interferometer 1 moves upward. When the Fizeau interferometer 1 moves upward, the tooth passes through the driving gear 8, and relying on the one-way transmission of the one-way bearing 9, it can drive the driving gear 8 to rotate by a certain degree, thereby driving the lens clamping tooling to flip by a certain degree, so that the other side of the lens in the lens clamping tooling flips upward, so as to facilitate the detection work on the other side of the spherical lens; after the Fizeau interferometer 1 moves downward again to complete the detection and then moves upward, it can drive the lens clamping tooling to flip by a certain degree again through the tooth, so that the lens clamping tooling flips back to the initial state.

[0052] After the two sides of the spherical lens are detected, the robotic arm 30 of the automatic unloading device grabs the spherical lens, takes out the detected spherical lens, and places the spherical lens on the spherical lens carrier 33 of the automatic unloading device.

[0053] The foregoing has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and the above-described embodiments and descriptions in the specification are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and all these changes and improvements fall within the scope of the present invention claimed. The scope of the present invention claimed is defined by the appended claims and their equivalents.

Claims

1. An automated spherical mirror surface shape detection device based on a Fizeau interferometer, characterized in that It includes a Fizeau interferometer (1). An automatic loading device and an automatic unloading device are respectively arranged on both sides of the Fizeau interferometer (1). The Fizeau interferometer (1) is connected to a vertically arranged electric slide rail (3) through a connecting base (2). A lens clamping tooling is arranged below the Fizeau interferometer (1). The lower end of the electric slide rail (3) is connected to a carrying bracket (4). The carrying bracket (4) is connected to a driving shaft (6) that is fixedly connected to the lens clamping tooling through a rotary damper (5). A transmission mechanism that drives the driving shaft (6) is connected to the side of the connecting base (2).

2. The automated spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 1, wherein The transmission mechanism includes a linear transmission rod (7) and a driving gear (8). The upper end of the linear transmission rod (7) is connected to the connecting base (2). The driving gear (8) is rotatably connected to one end of the driving shaft (6) away from the lens clamping tooling through a one-way bearing (9). Teeth that mesh with the driving gear (8) are arranged on the linear transmission rod (7).

3. The automatic spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 1, wherein The lens clamping tooling includes an annular mounting base (10). Support plates (11) are circumferentially distributed below the annular mounting base (10). Driving notches (12) are circumferentially distributed on the edge of the annular mounting base (10). Elastic rotating shafts (13) that are rotatably connected to the inner walls of the driving notches (12) are connected to the support plates (11). Driving blocks (14) are fixedly connected to the elastic rotating shafts (13). A driving mechanism assembly for driving the driving blocks (14) to move is installed in the driving notches (12).

4. The automatic spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 3, wherein The driving mechanism assembly includes a piston cylinder (15) horizontally arranged in the driving notch (12). One end of the piston cylinder (15) away from the axis of the annular mounting base (10) is closed. A piston slider (16) is hermetically and slidably connected in the piston cylinder (15). One end of the piston slider (16) away from the axis of the annular mounting base (10) is connected to a piston rod (17). One end of the piston rod (17) away from the piston slider (16) passes through the piston cylinder (15) and is hermetically and slidably connected to the piston cylinder (15). A driving frame (18) with an opening downward is connected to one end of the piston cylinder (15) away from the piston slider (16). The driving block (14) is movably connected to the driving frame (18).

5. An automatic spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 4, characterized in that An annular mounting groove (19) is formed inside the annular mounting base (10). An elastic expansion ring (20) is installed in the annular mounting groove (19). The elastic expansion ring (20) is communicated with one end of the piston cylinder (15) away from the driving frame (18).

6. The automated spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 5, wherein The active drive shaft (6) is of a hollow structure. A liquid supply ring (21) communicating with the inside of the active drive shaft (6) is installed on the side of the annular mounting base (10). The liquid supply ring (21) communicates with one end of the piston cylinder (15) away from the center of the lens clamping tooling. One end of the active drive shaft (6) away from the center of the lens clamping tooling is fixedly connected with a rotary joint (22) communicating with the inside of the active drive shaft (6). The upper part of the connection base (2) is fixedly connected with a vertically arranged hydraulic cylinder (23). A hydraulic piston (24) is sealingly and slidably connected in the hydraulic cylinder (23). The lower part of the hydraulic piston (24) is connected to the inner bottom of the hydraulic cylinder (23) through a spring (25). The upper part of the hydraulic piston (24) is connected with a hydraulic push rod (26). The upper end of the hydraulic push rod (26) passes through the hydraulic cylinder (23) and is sealingly and slidably connected with the hydraulic cylinder (23). The upper end of the hydraulic push rod (26) is connected with a pressure acting plate (27). The upper end of the electric slide rail (3) is connected with a top support plate (28) corresponding to the pressure acting plate (27). The upper part of the hydraulic cylinder (23) is communicated with the rotary joint (22) through a pipeline. The upper part inside the hydraulic cylinder (23) is filled with hydraulic oil.

7. An automated spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 6, characterized in that Both the automatic loading device and the automatic unloading device include an electric conveying slide rail (29) and a robotic arm (30) designed on one side of the electric conveying slide rail (29). A sliding bracket (31) is installed on the electric conveying slide rail (29). An anti-slip loading tray (32) is installed on the sliding bracket (31). A spherical lens loading tray (33) is provided on the anti-slip loading tray (32).

8. An automatic spherical mirror surface shape detection device based on a Fizeau interferometer according to claim 7, characterized in that, An electric control vacuum suction cup is connected to the robotic arm (30). Positioning guide rods (35) are provided on both sides of the electric conveying slide rail (29). A slider (36) connected to the bottom of the anti-slip loading tray (32) is slidably connected to the positioning guide rods (35). Both ends of the electric conveying slide rail (29) are connected with side support side plates (37) fixedly connected to the positioning guide rods (35). The bottom of the side support side plates (37) is connected with an equipment support frame (38).

9. An automated spherical mirror surface shape detection device based on a Fizeau interferometer according to any one of claims 1 to 8, characterized in that, The bottom of the Fizeau interferometer (1) is connected with a flexible light-shielding cover (39). The bottom of the flexible light-shielding cover (39) is connected with a pulling plate (40). A winding shaft (41) is provided on the side of the Fizeau interferometer (1). A traction rope (42) connected to the pulling plate (40) is wound around the winding shaft (41). A support backing plate (43) rotatably connected to the winding shaft (41) is fixedly connected to the side of the Fizeau interferometer (1). One end of the winding shaft (41) close to the electric slide rail (3) is connected with a rubber friction roller (44) frictionally driving the side of the electric slide rail (3).

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