Sample transfer device and vacuum interconnection system

Abstract

The invention discloses a sample transfer device and a vacuum interconnection system, and the sample transfer device comprises a transfer chamber, a sample placing table, a feeding cavity, a discharging cavity, a sample support, a first operating rod and a second operating rod. The transfer chamber comprises a feed port and a discharge port; the sample placing table is movably mounted in the transfer chamber along the axial direction of the transfer chamber; the feeding cavity is communicated with the feeding hole; the discharging cavity is communicated with the discharging opening; the sample support is detachably mounted on the sample placing table, and a first placing groove for placing the sample assembly is formed in the sample support; the first operating rod is movably arranged in the first direction, is opposite to the feeding cavity and is used for placing the sample assembly in the first placing groove from the feeding cavity; the second operating rod is movably arranged in the second direction and is opposite to the discharging cavity, and the second operating rod is used for conveying the sample support on which the sample assembly is placed to the discharging cavity from the sample placing table. According to the invention, the sample positioned in the sample support can be pressed, so that position deviation of the sample in the deposition equipment in the later period is prevented, and deposition defective products are effectively avoided.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum interconnection systems, and particularly relates to a sample transfer device and a vacuum interconnection system. Background Art

[0002] A vacuum interconnection system can provide an ultra-high vacuum environment, maximizing the exclusion of adverse effects of the atmosphere on samples, which is of great significance for the preparation, growth of specific materials, and scientific research. The dual-chamber MBE device has the advantages of being able to epitaxially grow a variety of III-V group semiconductors, being able to perform epitaxial growth simultaneously, having high epitaxial control accuracy, having many real-time monitoring devices, and having few impurities. It is suitable for devices with distinct growth interfaces and high component control accuracy and is crucial for epitaxial film-making technology. When the MBE device is in use, it rotates along its axis. When a conventional sample transfer device is used to transfer a sample into the MBE device, it is easy to cause the sample to shift in position in the MBE device, resulting in poor final epitaxial growth effects or even inability to perform epitaxial growth.

[0003] The information disclosed in this background art section is only intended to enhance the overall understanding of the present invention and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Invention

[0004] The purpose of the present invention is to provide a sample transfer device and a vacuum interconnection system, which can press the sample tightly to avoid the sample from shifting in position in the deposition device.

[0005] To achieve the above purpose, the technical solution provided by a specific embodiment of the present invention is as follows:

[0006] A sample transfer device, the sample transfer device includes:

[0007] A transfer chamber, the transfer chamber includes a feed port and a discharge port;

[0008] A sample placement table, which is movably installed in the transfer chamber along the axis of the transfer chamber;

[0009] A feed chamber, which is communicated with the feed port;

[0010] A discharge chamber, which is communicated with the discharge port;

[0011] A sample holder, which is detachably installed on the sample placement table, and a first placement groove for placing a sample assembly is provided on the sample holder;

[0012] A first operating rod, which is movably arranged in a first direction and is arranged opposite to the feed chamber, and is used to place the sample assembly from the feed chamber into the first placement groove;

[0013] A second operating rod is movably arranged along a second direction and is oppositely arranged to the discharge cavity, and is used to convey a sample tray with a sample assembly from a sample placing table to the discharge cavity.

[0014] In one or more embodiments of the present invention, the sample assembly includes a sample and a tablet placed above the sample. The first placement groove includes a first groove body and a second groove body located above the first groove body, and the inner diameter of the first groove body is smaller than the inner diameter of the second groove body.

[0015] In one or more embodiments of the present invention, the tablet is provided with ear portions, and the first placement groove includes limiting grooves that cooperate with the ear portions.

[0016] In one or more embodiments of the present invention, the first operating rod includes a first rod portion, and a first arm portion and a second arm portion rotatably mounted on the first rod portion. The first arm portion extends downward to be provided with a first clamping jaw, and the second arm portion extends downward to be provided with a second clamping jaw; the first operating rod includes a closed state and an open state. In the closed state, the distance between the inner walls of the first clamping jaw and the second clamping jaw is smaller than the outer diameter of the sample assembly, and the distance between the inner walls of the first arm portion and the second arm portion is larger than the outer diameter of the sample assembly; in the open state, the distance between the inner walls of the first clamping jaw and the second clamping jaw is larger than the outer diameter of the sample assembly.

[0017] In one or more embodiments of the present invention, the sample tray is further provided with a first receiving groove and a second receiving groove that communicate with the first placement groove and extend outward. In the open state, the distance between the outer wall of the first clamping jaw and the groove wall of the first receiving groove is greater than or equal to 0, and the distance between the outer wall of the second clamping jaw and the groove wall of the second receiving groove is greater than or equal to 0.

[0018] In one or more embodiments of the present invention, the first clamping jaw includes a first claw portion and a second claw portion arranged oppositely. The first receiving groove includes a first groove and a second groove that respectively cooperate with the first claw portion and the second claw portion; the second clamping jaw includes a third claw portion and a fourth claw portion arranged oppositely. The second receiving groove includes a third groove and a fourth groove that respectively cooperate with the third claw portion and the fourth claw portion.

[0019] In one or more embodiments of the present invention, the depths of the first receiving groove and the second receiving groove are both greater than the depth of the first placement groove.

[0020] In one or more embodiments of the present invention, an avoidance groove is formed in the sample placing table along the second direction. The second operating rod includes a second rod portion and a sampling portion extending along the second direction, and the width of the sampling portion is smaller than the width of the avoidance groove.

[0021] In one or more embodiments of the present invention, a second placement groove that cooperates with the sample holder is provided on the sampling portion.

[0022] The technical solution provided by another specific embodiment of the present invention is as follows:

[0023] A vacuum interconnection system, the vacuum interconnection system includes:

[0024] A deposition device;

[0025] The sample transfer device as described above, and the discharge chamber of the sample transfer device is in communication with the deposition device.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The present invention provides a sample transfer device and a vacuum interconnection system. Through the cooperative setting of the sample assembly and the sample holder, the sample can be tightly pressed, and the sample holder with the sample assembly can be reliably and smoothly transferred to the discharge chamber or the deposition device through the setting of the first operating rod and the second operating rod, avoiding the position deviation of the sample during the transfer process, preventing the position deviation of the sample in the deposition device in the later stage, and effectively avoiding the generation of defective deposition products. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0029] Figure 1 It is a schematic three-dimensional structure diagram of the sample transfer device in an embodiment of the present invention;

[0030] Figure 2 For Figure 1 The enlarged partial structure diagram at A in;

[0031] Figure 3 It is a schematic three-dimensional structure diagram of the sample assembly in an embodiment of the present invention;

[0032] Figure 4 It is a schematic three-dimensional structure diagram of the sample holder in an embodiment of the present invention;

[0033] Figure 5 It is a schematic three-dimensional structure diagram of the first operating rod in an embodiment of the present invention;

[0034] Figure 6 It is a schematic three-dimensional structure diagram of the sample holder in another embodiment of the present invention;

[0035] Figure 7 This is a three-dimensional structural schematic diagram of the second operating lever in an embodiment of the present invention. Detailed implementation manners

[0036] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0038] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments may be combined with each other.

[0039] It should be noted that the "first direction" in the text of this application is the direction marked by the M axis in the Figure 1 drawing, and the "second direction" is the direction marked by the N axis in the Figure 1 drawing. The terms used in the description of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0040] The technical solutions in the present invention will be described below in conjunction with the accompanying drawings.

[0041] Refer to Figure 1 、 Figure 2As shown in the figure, the sample transfer device in an embodiment of the present invention includes: a transfer chamber 1, a sample placement table 2, a feeding chamber 3, a discharging chamber 4, a sample tray 5, a first operating rod 6, and a second operating rod 7. The transfer chamber 1 includes a feeding port and a discharging port; the sample placement table 2 is movably installed along the axial direction of the transfer chamber 1 in the transfer chamber 1; the feeding chamber 3 is communicated with the feeding port; the discharging chamber 4 is communicated with the discharging port; the sample tray 5 is detachably installed on the sample placement table 2, and a first placement groove 51 for placing the sample assembly 8 is provided on the sample tray 5; the first operating rod 6 is movably arranged along a first direction and is oppositely arranged with the feeding chamber 3, and is used for placing the sample assembly 8 from the feeding chamber 3 into the first placement groove 51; the second operating rod 7 is movably arranged along a second direction and is oppositely arranged with the discharging chamber 4, and is used for conveying the sample tray 5 with the sample assembly 8 placed thereon from the sample placement table 2 to the discharging chamber 4. According to this design, through the cooperative setting of the pressing piece 82 and the sample tray 5, the sample 81 located in the sample tray 5 can be tightly pressed. When the sample assembly 8 carried by the sample tray 5 is sent into the deposition device together, it can prevent the sample 81 from shifting in position in the deposition device later, effectively avoiding the generation of defective deposition products.

[0042] Specifically, in order to facilitate placing the sample assembly 8 into the first placement groove 51, referring to Figures 2 to 4 As shown in the figure, the sample assembly 8 in this embodiment includes a sample 81 and a pressing piece 82 placed above the sample 81. The first placement groove 51 includes a first groove body 511 and a second groove body 512 located above the first groove body 511. The inner diameter of the first groove body 511 is smaller than the inner diameter of the second groove body 512. Since the outer diameter of the sample 81 is smaller than the outer diameter of the pressing piece 82, the first groove body 511 can stably place the sample 81, and the second groove body 512 places the pressing piece 82, thereby tightly pressing the sample 81.

[0043] Furthermore, in order to prevent the pressing piece 82 from rotating in the second groove body 512, referring to Figure 3 、 Figure 4 As shown in the figure, the pressing piece 82 in this embodiment is provided with ear portions 821, and the first placement groove 51 includes a limiting groove 513 that cooperates with the ear portions 821. Through the cooperative setting of the ear portions 821 and the limiting groove 513, the axial rotation of the pressing piece 82 is prevented.

[0044] In order to facilitate taking or placing the sample assembly 8 through the first operating rod 6, referring to Figure 5As shown, the first operating lever 6 in this embodiment includes a first rod portion 61, and a first arm portion 62 and a second arm portion 63 rotatably mounted on the first rod portion 61. The first arm portion 62 extends downward to be provided with a first jaw 64, and the second arm portion 63 extends downward to be provided with a second jaw 65. The first operating lever 6 has a closed state and an open state. In the closed state, the distance between the inner walls of the first jaw 64 and the second jaw 65 is less than the outer diameter of the sample assembly 8, and the distance between the inner walls of the first arm portion 62 and the second arm portion 63 is greater than the outer diameter of the sample assembly 8. The sample assembly 8 can be placed above a partial structure of the first jaw 64 and the second jaw 65. In the open state, the distance between the inner walls of the first jaw 64 and the second jaw 65 is greater than the outer diameter of the sample assembly 8, and there is no contact between the first jaw 64 and the second jaw 65 and the sample assembly 8. The lower ends of the first jaw 64 and the second jaw 65 can be lowered below the sample assembly 8, so that when the first operating lever 6 changes from the open state to the closed state, the sample assembly 8 can be clamped by the lower ends of the first jaw 64 and the second jaw 65.

[0045] Preferably, referring to Figure 4 , Figure 5 As shown, the sample holder 5 in this embodiment is further provided with a first receiving groove 52 and a second receiving groove 53 that are connected to the first placement groove 51 and extend outward. In the open state, the distance between the outer wall of the first jaw 64 and the groove wall of the first receiving groove 52 is greater than or equal to 0, and the distance between the outer wall of the second jaw 65 and the groove wall of the second receiving groove 53 is greater than or equal to 0. According to this design, it is convenient to lower the lower ends of the first jaw 64 and the second jaw 65 below the sample assembly 8, and the sample holder 5 will not interfere with the switching process of the first jaw 64 and the second jaw 65 between the open state and the closed state.

[0046] Optionally, referring to Figure 6 As shown, in another embodiment, the first jaw 64 includes a first claw portion 641 and a second claw portion 642 that are oppositely arranged. The first receiving groove 52 includes a first groove 521 and a second groove 522 that are respectively matched with the first claw portion 641 and the second claw portion 642. The second jaw 65 includes a third claw portion 651 and a fourth claw portion 652 that are oppositely arranged. The second receiving groove 53 includes a third groove 531 and a fourth groove 532 that are respectively matched with the third claw portion 651 and the fourth claw portion 652. According to this design, the area for turning the first receiving groove 52 and the second receiving groove 53 can be reduced, so as to facilitate the machining of the first receiving groove 52 and the second receiving groove 53.

[0047] In order to avoid interfering with the lowering of the first jaw 64 and the second jaw 65 and ensure that the first operating lever 6 can place the sample assembly 8 in the first placement groove 51, referring to Figure 4 or Figure 6As shown, the depths of the first receiving groove 52 and the second receiving groove 53 are both greater than the depth of the first placing groove 51.

[0048] Referring to Figure 2 and in combination with Figure 7 As shown, in this embodiment, an avoidance groove 21 is formed in the placing table 2 along the second direction. The second operating rod 7 includes a second rod portion 71 and a sampling portion 72 extending along the second direction. The width of the sampling portion 72 is smaller than the width of the avoidance groove 21. It can be understood that after the sample tray 5 is placed with the sample assembly 8, the second operating rod 7 is required to transfer the sample tray 5 with the sample assembly 8 placed thereon to the discharge cavity 4. When in a vacuum interconnection system, the second operating rod 7 can transfer the sample tray 5 with the sample assembly 8 placed thereon to the deposition equipment. Therefore, the sampling portion 72 can freely extend into the avoidance groove 21, so as to take the sample tray 5 off the placing table 2.

[0049] Referring to Figure 7 As shown, preferably, a second placing groove 721 matching the sample tray 5 is provided on the sampling portion 72 of this embodiment. According to this design, the sample tray 5 can be placed stably and firmly in the sampling portion 72 of the second operating rod 7, facilitating the transfer of the sample tray 5.

[0050] Another embodiment of the present invention also discloses a vacuum interconnection system (not shown in the drawings). The vacuum interconnection system in the another embodiment includes: a deposition equipment and the sample 81 transfer device as described above, and the discharge cavity 4 of the sample 81 transfer device is communicated with the deposition equipment. The deposition equipment such as an MBE equipment can transfer the sample tray 5 with the sample assembly 8 placed thereon to the MBE equipment through the second operating rod 7, so that when the MBE equipment rotates, the sample 81 can be pressed tightly in the first placing groove 51 of the sample tray 5 by the pressing piece 82, preventing the sample 81 from shifting in position under the action of centrifugal force and effectively avoiding the generation of defective deposition products.

[0051] It can be seen from the above technical solutions that the present invention has the following beneficial effects:

[0052] The present invention provides a sample transfer device and a vacuum interconnection system. Through the cooperative setting of the sample assembly and the sample tray, the sample can be pressed tightly, and through the setting of the first operating rod and the second operating rod, the sample tray with the sample assembly placed thereon can be reliably and smoothly transferred to the discharge cavity or the deposition equipment, avoiding the position shift of the sample during the transfer process, preventing the position shift of the sample in the deposition equipment later, and effectively avoiding the generation of defective deposition products.

[0053] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this application is customarily placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0054] In the description of the embodiments of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "couple" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0055] In the description of the embodiments of the present invention, it should also be noted that the use of "first", "second", etc. in this article does not particularly refer to the meaning of order or sequence, nor is it used to limit this case. It is only used to distinguish components or operations described with the same technical terms.

[0056] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0057] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample transfer device, characterized in that, The sample transfer device includes: A transfer chamber, which includes a feed inlet and a discharge outlet; A sample placing table, which is movably installed in the transfer chamber along the axial direction of the transfer chamber; A feed cavity, which is communicated with the feed inlet; A discharge cavity, which is communicated with the discharge outlet; A sample holder, which is detachably installed on the sample placing table, and a first placing groove for placing the sample assembly is provided on the sample holder; A first operating rod, which is movably arranged in a first direction and is opposite to the feed cavity, and is used for placing the sample assembly from the feed cavity into the first placing groove; A second operating rod, which is movably arranged in a second direction and is opposite to the discharge cavity, and is used for conveying the sample holder with the sample assembly placed thereon from the sample placing table to the discharge cavity.

2. The sample transfer device according to claim 1, wherein The sample assembly includes a sample and a pressing sheet placed above the sample. The first placing groove includes a first groove body and a second groove body located above the first groove body, and the inner diameter of the first groove body is smaller than that of the second groove body.

3. The sample transfer device according to claim 2, wherein, The pressing sheet is provided with ears, and the first placing groove includes a limiting groove matched with the ears.

4. The sample transfer device according to claim 1, wherein, The first operating rod includes a first rod portion, and a first arm portion and a second arm portion rotatably installed on the first rod portion. The first arm portion extends downward to be provided with a first clamping jaw, and the second arm portion extends downward to be provided with a second clamping jaw; the first operating rod includes a closed state and an open state. In the closed state, the distance between the inner walls of the first clamping jaw and the second clamping jaw is smaller than the outer diameter of the sample assembly, and the distance between the inner walls of the first arm portion and the second arm portion is larger than the outer diameter of the sample assembly; in the open state, the distance between the inner walls of the first clamping jaw and the second clamping jaw is larger than the outer diameter of the sample assembly.

5. The sample transfer device according to claim 4, characterized in that, The sample holder is further provided with a first receiving groove and a second receiving groove that are communicated with the first placing groove and extend outward. In the open state, the distance between the outer wall of the first clamping jaw and the groove wall of the first receiving groove is greater than or equal to 0, and the distance between the outer wall of the second clamping jaw and the groove wall of the second receiving groove is greater than or equal to 0.

6. The sample transfer device according to claim 5, wherein, The first clamping jaw includes a first claw portion and a second claw portion arranged oppositely. The first receiving groove includes a first groove and a second groove respectively matched with the first claw portion and the second claw portion; the second clamping jaw includes a third claw portion and a fourth claw portion arranged oppositely. The second receiving groove includes a third groove and a fourth groove respectively matched with the third claw portion and the fourth claw portion.

7. The sample transfer device according to claim 5, characterized in that, The depths of the first receiving groove and the second receiving groove are both greater than the depth of the first placing groove.

8. The sample transfer device according to claim 1, characterized in that A relief groove is formed on the sample placing table along the second direction. The second operating rod includes a second rod portion and a sampling portion extending along the second direction, and the width of the sampling portion is smaller than the width of the relief groove.

9. The sample transfer device according to claim 8, wherein, A second placing groove matched with the sample holder is provided on the sampling portion.

10. A vacuum interconnection system, characterized in that, The vacuum interconnection system includes: A deposition device; The sample transfer device according to any one of claims 1 to 9, and the discharge cavity of the sample transfer device is communicated with the deposition device.

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