Large-stroke multi-degree-of-freedom piezoelectric nano probe station

Abstract

The invention relates to the technical field of micro-nano precision driving and positioning, and discloses a large-stroke multi-degree-of-freedom piezoelectric nano probe station, which comprises an X-axis linear piezoelectric motor platform, a Y-axis linear piezoelectric motor platform, a Z-axis linear piezoelectric motor platform, a rotary piezoelectric motor, a first adapter frame, a second adapter frame and a probe assembly. And the X-axis linear piezoelectric motor platform, the Y-axis linear piezoelectric motor platform and the Z-axis linear piezoelectric motor platform are respectively used for driving the probe assembly to linearly move along the X axis, the Y axis and the Z axis. The rotary piezoelectric motor is used for driving the probe assembly to rotate in the axial direction. According to the invention, a series connection structure of a plurality of linear piezoelectric motor platforms and rotary piezoelectric motors is adopted, so that the probe station realizes X-axis, Y-axis and Z-axis three-dimensional movement, and the probe realizes high-precision positioning of 360-degree rotation. The invention has the characteristics of high repeated positioning precision, high resolution, large stroke and stable operation, and realizes nano-scale positioning and millimeter-scale stroke.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-nano precision drive and positioning, and more specifically, relates to a multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke. Background Art

[0002] The probe stage is one of the very important precision detection devices in the fields of semiconductor manufacturing and biotechnology. At present, with the development of semiconductor chip manufacturing technology, the size of chips has gradually shrunk, having entered the 3-nanometer level from the 10-micron level, and the demand for chip detection has changed from two-dimensional detection to three-dimensional detection. In addition, application scenarios such as micro-nano processing and cell manipulation in biotechnology have put forward higher requirements for high-precision positioning and stable operation. Most of the existing probe stages are driven by servo motors or motors. Although these traditional driving methods can provide a certain degree of movement accuracy, there are obvious limitations in achieving nano-level precision positioning control.

[0003] In recent years, the newly developed piezoelectric drive technology has shown excellent advantages. High resolution, fast response speed, good electromagnetic compatibility, and compact and flexible structural design are its main advantages. Therefore, the piezoelectric drive technology has become an important type of drive element in ultra-precision instrument equipment. Generally speaking, the piezoelectric drive principle utilizes the inverse piezoelectric effect of piezoelectric materials to convert the input electrical energy into output mechanical energy. By regulating the magnitude of the input electrical quantity, the output mechanical quantity can be precisely adjusted, so very high positioning accuracy can be obtained. However, due to the often complex structure of a multi-degree-of-freedom probe stage, there are problems such as large motion coupling, low repeat positioning accuracy, poor operation stability, small stroke, and the resolution and response speed not meeting the requirements.

[0004] Based on the above, the problems to be solved currently are: to provide a multi-degree-of-freedom piezoelectric nano-probe stage with small motion coupling, high repeat positioning accuracy, high resolution, stable operation, and a large stroke. Summary of the Invention

[0005] The purpose of the present invention is to provide a multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke, aiming to solve the problems in the prior art that a multi-degree-of-freedom probe stage has large motion coupling, low repeat positioning accuracy, poor operation stability, small stroke, and the resolution and response speed not meeting the requirements.

[0006] The present invention is implemented as follows. A multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke includes an X-axis linear piezoelectric motor platform, a Y-axis linear piezoelectric motor platform, a Z-axis linear piezoelectric motor platform, a rotary piezoelectric motor, a first adapter frame, a second adapter frame, and a probe assembly;

[0007] The Y-axis linear piezoelectric motor platform is arranged above the X-axis linear piezoelectric motor platform, the Z-axis linear piezoelectric motor platform is connected to the Y-axis linear piezoelectric motor platform through the first adapter; the rotary piezoelectric motor is connected to the Z-axis linear piezoelectric motor platform through the second adapter; the rotary piezoelectric motor is connected to the probe assembly;

[0008] The X-axis linear piezoelectric motor platform, the Y-axis linear piezoelectric motor platform, and the Z-axis linear piezoelectric motor platform are used to drive the probe assembly to move linearly along the X-axis, the Y-axis, and the Z-axis respectively; the rotary piezoelectric motor is used to drive the probe assembly to rotate axially.

[0009] Furthermore, the rotary piezoelectric motor includes a first body and a first table top; the first body is provided with a first rotating shaft, a first bearing sleeved on the first rotating shaft and a first piezoelectric driving mechanism abutting against the first bearing, the first table top is sleeved on the outer side of the first bearing, and the first piezoelectric driving mechanism is used to drive the first bearing to drive the first table top to rotate.

[0010] Furthermore, the first piezoelectric driving mechanism includes a stator, a piezoelectric ceramic and an insulating gasket, and the two ends of the piezoelectric ceramic are respectively connected to the first platform and the stator through the insulating gasket; the driving foot of the stator abuts against the outer wall of the first bearing, and the driving foot pushes the first bearing to drive the first table to rotate.

[0011] Furthermore, the stator further comprises an O-shaped elastic support, a serpentine elastic support and a first fixed end;

[0012] The first fixed end is connected to the driving end of the piezoelectric ceramic via an insulating gasket, and the side of the first fixed end facing away from the piezoelectric ceramic is connected to the O-shaped elastic support, and the O-shaped elastic support is used to add a preload force to the piezoelectric ceramic; the driving foot is connected to the first fixed end; the side of the driving foot facing away from the first bearing is connected to the serpentine elastic support, and the serpentine elastic support is used to add a preload force between the driving foot and the first bearing.

[0013] Further, the probe assembly includes an adapter, a second bearing, a bearing bracket, a probe sleeve and a probe;

[0014] The adapter portion includes a flange connected to the first table top and a second rotating shaft connected to the flange, the second bearing is sleeved on the outer side of the second rotating shaft, the bearing bracket is sleeved on the outer side of the second bearing, and the side of the bearing bracket away from the second bearing is connected to the second adapter frame; one end of the second rotating shaft away from the flange is connected to the probe sleeve, and the probe is clamped in the probe sleeve.

[0015] Furthermore, the angle θ between the axis of the probe assembly and the Z axis is 45°.

[0016] Furthermore, the first adapter frame includes a vertically connected horizontal plate, a vertical plate, and an inclined plate connected to the horizontal plate and the vertical plate, the bottom of the horizontal plate is connected to the Y-axis linear piezoelectric motor platform, and the side of the vertical plate is connected to the Z-axis linear piezoelectric motor platform.

[0017] Furthermore, the second adapter frame includes a fixed plate and a support frame arranged on the fixed plate, the fixed plate is connected to the Z-axis linear piezoelectric motor platform, and the support frame is connected to the rotary piezoelectric motor.

[0018] Furthermore, it also includes a base, the X-axis linear piezoelectric motor platform is arranged on the base, and a wire collection box is provided on the base. The wire collection box includes a wire trough and a wire pressing plate arranged on the wire trough.

[0019] Furthermore, the X-axis linear piezoelectric motor platform, the Y-axis linear piezoelectric motor platform, and the Z-axis linear piezoelectric motor platform respectively include a second platform body, a second table top, a guide rail, and a second piezoelectric drive mechanism, and the second piezoelectric drive mechanism drives the second table top to move linearly on the second platform body along the guide rail.

[0020] The beneficial effects of the large-stroke multi-degree-of-freedom piezoelectric nanoprobe station provided by the present invention are as follows:

[0021] 1. The present invention adopts an X-axis linear piezoelectric motor platform, a Y-axis linear piezoelectric motor platform, a Z-axis linear piezoelectric motor platform and a rotary piezoelectric motor series structure, so that the probe station can achieve three-dimensional movement of the X-axis, Y-axis and Z-axis, as well as high-precision positioning of 360-degree rotation of the probe. It has the characteristics of high repeatability, high resolution and large stroke, and realizes nanometer-level positioning and millimeter-level stroke.

[0022] 2. The structures of the first adapter frame and the second adapter frame are reasonable, simple and stable, which makes the connection between the Y-axis linear piezoelectric motor platform and the Z-axis linear piezoelectric motor platform, and the Z-axis linear piezoelectric motor platform and the rotary piezoelectric motor more stable, with less motion coupling and more stable overall operation.

[0023] 3. The rotary piezoelectric motor drives the first bearing to rotate through the first piezoelectric drive mechanism, and the first bearing drives the first table to rotate, which has the characteristics of fast response speed and high resolution. The first piezoelectric drive mechanism adopts piezoelectric ceramic actuation and combines the structural design of the stator, and the overall structure is compact and small in size.

[0024] 4. Multiple second piezoelectric drive mechanisms are respectively integrated in the X-axis linear piezoelectric motor platform, the Y-axis linear piezoelectric motor platform, and the Z-axis linear piezoelectric motor platform, with a compact structure and high reliability.

[0025] 5. The structure of the probe assembly enables the probe to rotate at any angle and can accurately penetrate into a detection stage with a narrow space and a certain distance. The operation is flexible and the applicable range is wider. The adapter part and the bearing bracket make the connection of the probe assembly stable and the operation more reliable. Description of the Drawings

[0026] Figure 1 Schematic three-dimensional structure diagram of the large-stroke multi-degree-of-freedom piezoelectric nano-probe stage provided by the present invention;

[0027] Figure 2 Exploded view of the rotary piezoelectric motor provided by the present invention;

[0028] Figure 3 Front view of the rotary piezoelectric motor provided by the present invention;

[0029] Figure 4 Provided by the present invention Figure 3 Sectional view taken along the A-A direction;

[0030] Figure 5 Provided by the present invention Figure 3 Sectional view taken along the B-B direction;

[0031] Figure 6 Front view of the first adapter bracket provided by the present invention;

[0032] Figure 7 Front view of the second adapter bracket provided by the present invention;

[0033] Figure 8 Front view of the probe assembly provided by the present invention;

[0034] Figure 9 Provided by the present invention Figure 8 Sectional view taken along the C-C direction;

[0035] Figure 10 Schematic three-dimensional structure diagram of the X-axis linear piezoelectric motor platform provided by the present invention;

[0036] In the figure: 1-X-axis linear piezoelectric motor platform; 11-second platform body; 12-second platform surface; 13-guide rail; 2-Y-axis linear piezoelectric motor platform; 3-Z-axis linear piezoelectric motor platform; 4-rotary piezoelectric motor; 41-first platform body; 411-upper cover; 42-first platform surface; 43-first rotating shaft; 44-first bearing; 45-first piezoelectric driving mechanism; 451-stator; 4511-driving foot; 4512-O-type elastic support; 4513-snake-shaped elastic support; 451 4-first fixed end; 452-piezoelectric ceramic; 453-insulating gasket; 5-first adapter frame; 51-horizontal plate; 52-vertical plate; 53-inclined plate; 6-second adapter frame; 61-fixed plate; 62-support frame; 621-connecting surface; 7-probe assembly; 71-adapter; 711-flange; 712-second rotating shaft; 72-second bearing; 73-bearing bracket; 74-probe sleeve; 75-probe; 8-base; 81-junction box; 9-top screw; 10-bolt. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0038] The implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0039] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0040] Reference Figure 1-10 The figure shows a preferred embodiment of the present invention.

[0041] A large-stroke multi-degree-of-freedom piezoelectric nanoprobe station includes an X-axis linear piezoelectric motor platform 1, a Y-axis linear piezoelectric motor platform 2, a Z-axis linear piezoelectric motor platform 3, a rotary piezoelectric motor 4, a first adapter 5, a second adapter 6 and a probe assembly 7, referring to Figure 1Preferably, the X-axis linear piezoelectric motor platform 1, the Y-axis linear piezoelectric motor platform 2, and the Z-axis linear piezoelectric motor platform 3 respectively include a second body 11 and a second tabletop 12 provided on the second body 11. Refer to Figure 10 A guide rail 13 and a second piezoelectric driving mechanism are provided between the second body 11 and the second tabletop 12. The second piezoelectric driving mechanism pushes the guide rail 13 to move linearly, and the guide rail 13 drives the second tabletop 12 to move linearly on the second body 11.

[0042] The bottom surface of the Y-axis linear piezoelectric motor platform 2 is connected to the second tabletop 12 of the X-axis linear piezoelectric motor platform 1, and the guide rails 13 of the Y-axis linear piezoelectric motor platform 2 and the X-axis linear piezoelectric motor platform 1 are perpendicular to each other, that is, the second tabletop 12 of the Y-axis linear piezoelectric motor platform 2 moves linearly along the Y-axis, and the second tabletop 12 of the X-axis linear piezoelectric motor platform 1 moves linearly along the X-axis.

[0043] The Z-axis linear piezoelectric motor platform 3 is connected to the Y-axis linear piezoelectric motor platform 2 through a first adapter 5. The first adapter 5 includes a horizontal plate 51, a vertical plate 52 connected vertically, and an inclined plate 53 connected to the horizontal plate 51 and the vertical plate 52. Refer to Figure 6 The bottom of the horizontal plate 51 is connected to the Y-axis linear piezoelectric motor platform 2. The side surface of the vertical plate 52 is connected to the Z-axis linear piezoelectric motor platform 3. The guide rails 13 of the Z-axis linear piezoelectric motor platform 3 are respectively perpendicular to the guide rails 13 of the X-axis linear piezoelectric motor platform 1 and the Y-axis linear piezoelectric motor platform 2, that is, the second tabletop 12 of the Z-axis linear piezoelectric motor platform 3 moves linearly along the Z-axis. The X-axis, Y-axis, and Z-axis are a spatial rectangular coordinate system.

[0044] The rotary piezoelectric motor 4 is connected to the Z-axis linear piezoelectric motor platform 3 through a second adapter 6. Preferably, the second adapter 6 includes a fixing plate 61 and a support frame 62 provided on the fixing plate 61. The connection between the fixing plate 61 and the Z-axis linear piezoelectric motor platform 3 is referred to Figure 7 The support frame 62 is connected to the rotary piezoelectric motor 4. The side of the rotary piezoelectric motor 4 away from the support frame 62 is connected to the probe assembly 7. Preferably, the angle θ between the axis of the probe assembly 7 and the Z-axis is 45°, and this design is convenient for matching with the 45-degree conical surface at the front end of the electron microscope to avoid interference. Of course, the angle θ is set to 0 ≤ θ ≤ 90° according to the needs of the usage scenario.

[0045] The X-axis linear piezoelectric motor platform 1, the Y-axis linear piezoelectric motor platform 2, and the Z-axis linear piezoelectric motor platform 3 respectively drive the probe assembly 7 to move linearly along the X-axis, Y-axis, and Z-axis. The rotary piezoelectric motor 4 is used to drive the probe assembly 7 to achieve a 360-degree rotation along the axial direction. The X-axis linear piezoelectric motor platform 1, the Y-axis linear piezoelectric motor platform 2, the Z-axis linear piezoelectric motor platform 3, and the rotary piezoelectric motor 4 are connected in series to achieve the three-dimensional movement and 360-degree rotation functions of the large-stroke multi-degree-of-freedom piezoelectric nanoprobe stage. Preferably, the rotary piezoelectric motor 4 includes a first body 41 and a first tabletop 42, referring to Figure 2 . A first rotating shaft 43, a first bearing 44 sleeved on the first rotating shaft 43, and a first piezoelectric driving mechanism 45 abutting against the first bearing 44 are provided in the first body 41. The first tabletop 42 is sleeved on the outside of the first bearing 44. The lower part of the first bearing 44 abuts against the first piezoelectric driving mechanism 45, and the upper part is connected to the first body 41. The first piezoelectric driving mechanism 45 drives the first bearing 44 to rotate, and the first bearing 44 drives the first tabletop 42 to rotate together. A top cover 411 is further provided on the first body 41, and the top cover 411 is used to encapsulate the first piezoelectric driving mechanism 45 in the first body 41.

[0046] The first piezoelectric driving mechanism 45 includes a stator 451, a piezoelectric ceramic 452, and an insulating gasket 453, referring to Figures 3-5 . The piezoelectric ceramic 452 is used to drive the stator 451 to move. Both ends of the piezoelectric ceramic 452 are respectively connected to the side wall of the first body 41 and the stator 451 through the insulating gasket 453. The stator 451 includes driving feet 4511. The driving feet 4511 abut against the outer side wall of the first bearing 44. The driving feet 4511 push the first bearing 44 to rotate, so that the first tabletop 42 realizes a 360-degree rotation above the first body 41.

[0047] The stator 451 also includes an O-shaped elastic support 4512, a serpentine elastic support 4513 and a first fixed end 4514. The first fixed end 4514 is connected to the driving end of the piezoelectric ceramic 452 through an insulating gasket 453. The side of the first fixed end 4514 away from the piezoelectric ceramic 452 is connected to the O-shaped elastic support 4512, and the side of the O-shaped elastic support 4512 away from the piezoelectric ceramic 452 is connected to the first platform 41, and the O-shaped elastic support 4512 is used to add a preload force to the piezoelectric ceramic 452. The driving foot 4511 is connected to the first fixed end 4514, and the first fixed end 4514 drives the driving foot 4511 to move. The side of the driving foot 4511 away from the first bearing 44 is connected to the serpentine elastic support 4513. The serpentine elastic support 4513 is used to add a preload force between the driving foot 4511 and the first bearing 44. A top screw 9 is provided between the serpentine elastic support 4513 and the side wall of the first platform 41, and the top screw 9 is used to adjust the preload. One side of the serpentine elastic support 4513 is connected to the first platform 41 by a bolt 10. Preferably, the first bearing 44 and the first platform 42 are higher than the first platform 41.

[0048] The probe assembly 7 includes a transfer portion 71, a second bearing 72, a bearing bracket 73, a probe sleeve 74 and a probe 75, as shown in FIG. Figures 8-9 . The adapter 71 includes a flange 711 connected to the first table 42 and a second rotating shaft 712 connected to the flange 711. The second bearing 72 is sleeved on the outer side of the second rotating shaft 712. The bearing bracket 73 is sleeved on the outer side of the second bearing 72. The side of the bearing bracket 73 away from the second bearing 72 is connected to the second adapter frame 6 for supporting the bearing 72. One end of the second rotating shaft 712 away from the flange 711 passes through the second bearing 72 and is connected to the probe sleeve 74. The two ends of the probe sleeve 74 are respectively sleeved on the outer sides of the second bearing 712 and the probe 75, and the probe sleeve 74 and the second bearing 712 are pressed against each other by the top screw 9. Preferably, the support frame 62 includes a connecting surface 621 connected to the rotary piezoelectric motor 4. The angle between the connecting surface 621 and the fixed plate 61 is β, 0≤β≤90°, so that the probe 75 can be oriented in any direction as needed, which is more convenient to operate and can meet the needs of application scenarios.

[0049] Preferably, a positioning protrusion is provided on the side of the flange 711 facing away from the second rotating shaft 712 , and a positioning hole is provided on the first table top 42 corresponding to the positioning protrusion, so as to facilitate the positioning and installation of the adapter 71 and the first table top 42 .

[0050] Furthermore, a base 8 is provided at the bottom of the X-axis linear piezoelectric motor platform 1. Figure 1The base 8 serves to fix the X-axis linear piezoelectric motor platform 1. At the same time, a junction box 81 for accommodating power supply lines is provided on the base 8. The junction box 81 includes a wire slot and a wire pressing plate provided on the wire slot. After passing through the junction box 81, the power supply lines respectively supply power to the X-axis linear piezoelectric motor platform 1, the Y-axis linear piezoelectric motor platform 2, the Z-axis linear piezoelectric motor platform 3 and the rotary piezoelectric motor 4.

[0051] The present invention is not limited thereto; any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke, characterized in that, It comprises an X-axis linear piezoelectric motor platform (1), a Y-axis linear piezoelectric motor platform (2), a Z-axis linear piezoelectric motor platform (3), a rotary piezoelectric motor (4), a first adapter frame (5), a second adapter frame (6) and a probe assembly (7); The Y-axis linear piezoelectric motor platform (2) is arranged above the X-axis linear piezoelectric motor platform (1); the Z-axis linear piezoelectric motor platform (3) is connected to the Y-axis linear piezoelectric motor platform (2) via the first adapter frame (5); the rotary piezoelectric motor (4) is connected to the Z-axis linear piezoelectric motor platform (3) via the second adapter frame (6); the rotary piezoelectric motor (4) is connected to the probe assembly (7); The X-axis linear piezoelectric motor platform (1), the Y-axis linear piezoelectric motor platform (2), and the Z-axis linear piezoelectric motor platform (3) are used to drive the probe assembly (7) to move linearly along the X-axis, the Y-axis, and the Z-axis, respectively; and the rotary piezoelectric motor (4) is used to drive the probe assembly (7) to rotate axially.

2. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that The rotary piezoelectric motor (4) comprises a first platform (41) and a first platform surface (42); a first rotating shaft (43), a first bearing (44) sleeved on the first rotating shaft (43), and a first piezoelectric driving mechanism (45) abutting against the first bearing (44) are arranged inside the first platform (41); the first platform surface (42) is sleeved on the outer side of the first bearing (44); and the first piezoelectric driving mechanism (45) is used to drive the first bearing (44) to drive the first platform surface (42) to rotate.

3. The large-stroke multi-degree-of-freedom piezoelectric nano-probe stage according to claim 2, characterized in that, The first piezoelectric drive mechanism (45) comprises a stator (451), a piezoelectric ceramic (452) and an insulating gasket (453); two ends of the piezoelectric ceramic (452) are respectively connected to the first platform (41) and the stator (451) via the insulating gasket (453); a driving foot (4511) of the stator (451) abuts against an outer side wall of the first bearing (44); the driving foot (4511) pushes the first bearing (44) to drive the first platform (42) to rotate.

4. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 3, characterized in that, The stator (451) further comprises an O-shaped elastic support (4512), a serpentine elastic support (4513) and a first fixed end (4514); The first fixed end (4514) is connected to the driving end of the piezoelectric ceramic (452) via an insulating gasket (453); the side of the first fixed end (4514) facing away from the piezoelectric ceramic (452) is connected to the O-shaped elastic support (4512), and the O-shaped elastic support (4512) is used to apply a preload force to the piezoelectric ceramic (452); the driving foot (4511) is connected to the first fixed end (4514); the side of the driving foot (4511) facing away from the first bearing (44) is connected to the serpentine elastic support (4513), and the serpentine elastic support (4513) is used to apply a preload force between the driving foot (4511) and the first bearing (44).

5. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that The probe assembly (7) comprises a transition portion (71), a second bearing (72), a bearing bracket (73), a probe sleeve (74) and a probe (75); The adapter part (71) comprises a flange (711) connected to the first table (42) and a second rotating shaft (712) connected to the flange (711); the second bearing (72) is sleeved on the outer side of the second rotating shaft (712); the bearing bracket (73) is sleeved on the outer side of the second bearing (72); the side of the bearing bracket (73) away from the second bearing (72) is connected to the second adapter frame (6); the end of the second rotating shaft (712) away from the flange (711) is connected to the probe sleeve (74); the probe (75) is clamped in the probe sleeve (74).

6. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that, The angle θ between the axis of the probe assembly (7) and the Z axis is 45°.

7. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that The first adapter frame (5) comprises a horizontal plate (51) and a vertical plate (52) connected vertically, and an inclined plate (53) connected to the horizontal plate (51) and the vertical plate (52), the bottom of the horizontal plate (51) is connected to the Y-axis linear piezoelectric motor platform (2), and the side of the vertical plate (52) is connected to the Z-axis linear piezoelectric motor platform (3).

8. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that The second adapter frame (6) comprises a fixed plate (61) and a support frame (62) arranged on the fixed plate (61), the fixed plate (61) is connected to the Z-axis linear piezoelectric motor platform (3), and the support frame (62) is connected to the rotary piezoelectric motor (4).

9. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that It also comprises a base (8), the X-axis linear piezoelectric motor platform (1) is arranged on the base (8), a wiring collection box (81) is arranged on the base (8), and the wiring collection box (81) comprises a wire groove and a wire pressing plate arranged on the wire groove.

10. The multi-degree-of-freedom piezoelectric nano-probe stage with a large stroke according to claim 1, characterized in that The X-axis linear piezoelectric motor platform (1), the Y-axis linear piezoelectric motor platform (2), and the Z-axis linear piezoelectric motor platform (3) respectively comprise a second platform body (11), a second table top (12), a guide rail (13), and a second piezoelectric drive mechanism, wherein the second piezoelectric drive mechanism drives the second table top (12) to move linearly on the second platform body (11) along the guide rail (13).

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