Polarization-maintaining storage tank and etching machine equipment

Abstract

The polarization-maintaining storage groove comprises a groove body, the inner side of the first side wall of the groove body is connected with a plurality of positioning chucks, the second side wall of the groove body is connected with an overturning plate, the overturning plate is provided with a plurality of strip-shaped guide grooves, each strip-shaped guide groove is internally connected with a coordination chuck in a sliding mode, and the positioning chucks correspond to the coordination chucks one to one; the coordination chuck comprises a guide sliding block, the guide sliding block is in sliding fit with the strip-shaped guide groove, the upper end of the guide sliding block penetrates through the strip-shaped guide groove and is connected with a locking nut, one side of the guide sliding block is connected with a guide rod capable of moving vertically, the lower end of the guide rod is connected with a guide wheel, and a slope table inclining downwards towards the first side wall is arranged on the inner side of the second side wall of the groove body. The guide wheels are in rolling fit with the slope table; quartz rods with different lengths can be automatically and horizontally clamped, the automation degree is high, the manual operation and the adjusting process are greatly reduced, and the efficiency is improved; and under the condition that the efficiency is guaranteed, the liquid level control precision is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fiber preform etching, and particularly relates to a polarization-maintaining storage tank and an etching machine device. Background Art

[0002] The fiber preform, also known as the "optical rod", is a quartz glass rod with a specific refractive index profile and is used to manufacture optical fibers (abbreviated as optical fibers). Its diameter is generally several millimeters to dozens of millimeters, and the internal structure of the optical fiber is formed in the preform. The fiber preform is the main raw material for manufacturing optical fibers. Through the wire drawing process, it can be drawn into an optical fiber as thin as a hair, and two layers of acrylic resin are coated to protect the strength of the optical fiber. These manufactured optical fibers are further used for optical signal transmission in various optical cable structures.

[0003] The technology of fiber preforms is highly difficult and is the core competitive point in the fiber optic cable industry chain. The larger the diameter size is made, the higher the efficiency, but the difficulty also increases. Each increase of 1 millimeter requires a large amount of R & D investment. Therefore, the production of fiber preforms requires high-precision processes and equipment support to ensure the quality and performance of the products.

[0004] The etching machine is a special device used for etching fiber preforms. The etching process is an important step in the fiber manufacturing process. By precisely controlling the etching depth, shape, and uniformity, the performance and stability of the optical fiber can be optimized. Precise control of the etching depth is a technical difficulty. If the etching is too deep, it may damage the internal structure of the preform and affect the performance of the optical fiber; if the etching is too shallow, the expected surface morphology or structure may not be achieved, thus affecting the quality of the optical fiber. The existing etching machines have low automation levels and require a lot of manual operations and adjustments, which not only increases the operation difficulty and error rate, but also may affect the production efficiency and it is difficult to ensure both efficiency and accuracy at the same time. Summary of the Invention

[0005] The purpose of the present invention is to address the problems existing in the prior art and provide a polarization-maintaining storage tank and an etching machine device, which can automatically horizontally clamp quartz rods of different lengths, have a high degree of automation, greatly reduce the manual operation and adjustment process, improve the efficiency, and improve the control accuracy of the liquid level while ensuring the efficiency.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is:

[0007] A polarization-maintaining storage tank, comprising a tank body, wherein a plurality of positioning chucks are connected to the inner side of the first side wall of the tank body, the upper end of the second side wall of the tank body opposite to the first side wall is hingedly connected with a flip plate, the flip plate is provided with a plurality of parallel strip-shaped guide grooves, and a coordination chuck is slidably connected in each strip-shaped guide groove, and the positioning chucks and the coordination chucks are in one-to-one correspondence;

[0008] The coordination chuck includes a guide slider, the guide slider is slidably matched with the strip-shaped guide groove, the upper end of the guide slider passes through the strip-shaped guide groove and is connected with a locking nut, one side of the guide slider is connected with a vertically movable guide rod, the lower end of the guide rod is connected with a guide wheel, and a slope platform inclined downward towards the first side wall is arranged on the inner side of the second side wall of the tank body, and the guide wheel is in rolling cooperation with the slope platform.

[0009] Further, the end shaft of the positioning chuck is rotatably connected with the first side wall in the tank body, a first gear is fixedly sleeved on each end shaft of the positioning chuck, and two adjacent first gears are meshed with each other. The tank body is fixedly connected with a mounting seat, the mounting seat is fixedly connected with a flip driving motor, the output shaft of the flip driving motor is connected with a second gear, and the second gear is meshed with the first gear; a third gear is rotatably connected to the mounting seat, the third gear is meshed with the second gear, the third gear is connected with a detection plate, and the mounting seat is connected with a displacement sensor for detecting the position of the detection plate.

[0010] Further, it includes an electric heating tube, the electric heating tube is coiled and arranged at the bottom in the tank body, both ends of the electric heating tube extend out of the tank body and are connected with a fixed socket, and a mesh plate is arranged above the electric heating tube in the tank body.

[0011] Further, two first liquid level detection tubes are arranged on the outer side of the second side wall of the tank body, and each first liquid level detection tube is provided with a first liquid level detection device.

[0012] An etching machine device, comprising the above-mentioned polarization-maintaining storage tank; it also includes a temporary storage tank and an infusion pump; a first pipeline is connected between the temporary storage tank and the inlet end of the infusion pump, a second pipeline is connected between the temporary storage tank and the outlet end of the infusion pump, a third pipeline is connected between the tank body and the outlet end of the infusion pump, and a fourth pipeline is connected between the bottom of the tank body and the inlet end of the infusion pump; directional diaphragm valves are arranged on the above-mentioned respective pipelines.

[0013] Further, it includes a buffer tube fixedly arranged vertically. A fifth pipeline is connected between the upper end of the buffer tube and the outlet end of the infusion pump. A sixth pipeline is connected between the lower end of the buffer tube and the tank body. The height of the buffer tube is higher than that of the tank body. A second liquid level detection tube is arranged outside the buffer tube, and the second liquid level detection tube is connected with a second liquid level detection device.

[0014] Further, it includes a vehicle frame which includes a bottom plate and an operating platform. The bottom plate and the operating platform are supported by several columns; both the temporary storage box and the infusion pump are arranged between the bottom plate and the operating platform. The tank body is arranged on the upper end surface of the operating platform. The lower end of the buffer tube is fixed to the bottom plate, and the upper end of the buffer tube penetrates through the operating platform.

[0015] Further, a support frame is arranged on the upper end surface of the bottom plate. Several roller shafts are rotatably connected to the support frame. The temporary storage box is arranged above several roller shafts. A part of the first pipeline is set as a first flexible hose, and a part of the second pipeline is set as a second flexible hose. Both the first flexible hose and the second flexible hose are of spiral structures.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] When quartz rods of different lengths are placed in the tank body, only a simple covering operation of the flipping plate is needed to automatically clamp the quartz rods of different lengths horizontally. The degree of automation is high, greatly reducing the manual operation and adjustment process, improving the efficiency, ensuring the horizontality of the quartz rods, and ensuring the etching accuracy and stability;

[0018] By arranging two first liquid level detection tubes outside the tank body and setting different trigger values, it can not only ensure the efficient addition of acid solution but also ensure the precise control of the liquid level;

[0019] By arranging a buffer tube, the infusion pump first pumps the acid solution into the buffer tube, and the buffer tube slowly feeds the liquid into the tank body through the pressure difference principle. When it is detected that the liquid level in the tank body reaches the predetermined liquid level value, the directional diaphragm valve of the sixth pipeline is closed to achieve the precise liquid feeding of the tank body and ensure the precise control of the liquid level. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is the overall structure diagram of the polarization-maintaining storage tank in an embodiment of the present application;

[0021] Figure 2 It is the structure diagram of the polarization-maintaining storage tank in an embodiment of the present application (the tank body is hidden);

[0022] Figure 3 It is the connection structure diagram of the mounting seat, the flipping drive motor, the second gear, and the third gear in an embodiment of the present application;

[0023] Figure 4 Structural schematic diagrams of the positioning chuck and the coordination chuck in an embodiment of the present application (with a quartz rod clamped);

[0024] Figure 5 Overall structure diagram of an etching machine device in an embodiment of the present application;

[0025] Figure 6 Structural diagram of the pipeline part of the etching machine device in an embodiment of the present application (from a three-dimensional perspective);

[0026] Figure 7 Structural diagram of the pipeline part of the etching machine device in an embodiment of the present application (from a rear view perspective);

[0027] In the figure: 1, trough body; 2, positioning chuck; 3, flipping plate; 301, strip-shaped guide groove; 4, coordination chuck; 401, guiding slider; 402, locking nut; 403, guide rod; 404, guide wheel; 5, ramp platform; 6, first gear; 7, mounting seat; 8, flipping drive motor; 9, second gear; 10, third gear; 11, detection plate; 12, displacement sensor; 13, electric heating tube; 14, fixed socket; 15, mesh plate; 16, first liquid level detection tube; 17, temporary storage box; 18, infusion pump; 19, first pipeline; 191, first hose; 20, second pipeline; 201, second hose; 21, third pipeline; 22, fourth pipeline; 23, buffer tube; 24, fifth pipeline; 25, sixth pipeline; 26, second liquid level detection tube; 27, bottom plate; 28, operating table; 29, support frame; 30, roller shaft. Detailed implementation manners

[0028] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0029] In the description of the present invention, it should be noted that the orientation or positional relationships indicated by the terms "center", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships in which the products of the present invention are usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be construed as indicating or implying relative importance.

[0030] In addition, terms such as "horizontal" and "vertical" do not require the components to be absolutely horizontal or hanging vertically, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0031] In the description of the present invention, it should also be noted that, unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] The etching of the optical fiber preform is a key manufacturing process, mainly used in specific stages of optical fiber manufacturing. Etching is carried out by treating the optical fiber preform with a specific acid solution to achieve the required surface morphology or structure. During the etching process, the acid solution is kept in a circulating state, and by controlling the temperature of the acid solution and the concentration of various acids, it is ensured that these parameters remain stable. The immersion time of the quartz rod in the acid solution is also precisely controlled to achieve precise control of the etching thickness of the quartz rod surface.

[0033] Due to different length models of the quartz rod, different fixture parameters are required. The existing etching machines have a low degree of automation and require a lot of manual operations and adjustments to adapt to the clamping of quartz rods of various different length models. This not only increases the operation difficulty and error rate, but also may affect the production efficiency.

[0034] In the first aspect of the present application, as Figures 1 to 4 shown, a polarization-maintaining storage groove is provided, including a groove body 1. A plurality of positioning chucks 2 are connected to the inner side of the first side wall of the groove body 1. The upper end of the second side wall of the groove body 1 opposite to the first side wall is hingedly connected with a flip plate 3. The flip plate 3 is provided with a plurality of parallel strip-shaped guide grooves 301. A coordination chuck 4 is slidably connected in each strip-shaped guide groove 301, and the positioning chuck 2 corresponds to the coordination chuck 4 one by one; the coordination chuck 4 includes a guiding slider 401, the guiding slider 401 is slidably matched with the strip-shaped guide groove 301, the upper end of the guiding slider 401 passes through the strip-shaped guide groove 301 and is connected with a locking nut 402, one side of the guiding slider 401 is connected with a vertically movable guide rod 403, the lower end of the guide rod 403 is connected with a guide wheel 404, and a slope platform 5 inclined downward towards the first side wall is provided on the inner side of the second side wall of the groove body 1, and the guide wheel 404 is in rolling cooperation with the slope platform 5.

[0035] In the above solution, the positioning chuck 2 and the coordination chuck 4 clamp and position a quartz rod, so that the quartz rod is horizontally suspended in the groove body 1. The groove body 1 contains acid solution, which is used for etching the surface of the quartz rod. By controlling the etching time and the liquid level of the acid solution, the required etching thickness and shape can be controlled.

[0036] Specifically, open the turning plate 3, insert the positioning hole at the first end of each quartz rod into the protrusion of the corresponding positioning chuck 2, roughly level the quartz rod by hand, and then gradually cover the turning plate 3. During the process of covering the turning plate 3, drive each coordination chuck 4 to contact the corresponding quartz rod respectively, so that the protrusion of the coordination chuck 4 is inserted into the positioning hole at the second end of the quartz rod, realizing the clamping of both ends of the quartz rod and making the quartz rod in a horizontal state.

[0037] Specifically, during the process of covering the turning plate 3, the guide wheel 404 of the coordination chuck 4 first contacts the ramp 5. Under the downward pressing force of covering the turning plate 3 and the rolling of the guide wheel 404 along the ramp 5, the guide wheel 404 drives the guide rod 403 to move along the ramp 5, and the guide rod 403 drives the guiding slider 401 to slide along the strip-shaped guide groove 301. Since the guide rod 403 is constrained by the guiding slider 401 to be displaceable up and down, the up and down displacement of the guide rod 403 will not interfere with the movement of the guiding slider 401 along the strip-shaped guide groove 301; finally, tighten the locking nut 402 to fix the position of the coordination chuck 4 and realize the horizontal clamping of the quartz rod.

[0038] Therefore, based on the above process principle, when quartz rods of different lengths are placed in the groove body 1, only by simply covering the turning plate 3, the quartz rods of different lengths can be automatically horizontally clamped, with a high degree of automation, greatly reducing the manual operation and adjustment process, improving the efficiency, ensuring the levelness, and ensuring the etching accuracy and stability.

[0039] In an embodiment, the end shaft of the positioning chuck 2 is rotatably connected to the first side wall in the groove body 1. A first gear 6 is fixedly sleeved on the end shaft of each positioning chuck 2, and two adjacent first gears 6 are meshed with each other. The groove body 1 is fixedly connected with a mounting seat 7, the mounting seat 7 is fixedly connected with a turning drive motor 8, the output shaft of the turning drive motor 8 is connected with a second gear 9, and the second gear 9 is meshed and matched with the first gear 6; the mounting seat 7 is rotatably connected with a third gear 10, the third gear 10 is meshed and matched with the second gear 9, the third gear 10 is connected with a detection plate 11, and the mounting seat 7 is connected with a displacement sensor 12 for detecting the position of the detection plate 11.

[0040] The flipping drive motor 8 drives the second gear 9 to rotate. The second gear 9 meshes with one of the first gears 6. Since the adjacent first gears 6 mesh with each other, all the first gears 6 are driven to rotate synchronously, that is, the flipping drive motor 8 can drive all the quartz rods to flip synchronously, improving the applicability. Specifically, for example, all the quartz rods can be driven to flip synchronously by 180 degrees to achieve symmetric etching up and down, thus meeting the process requirements, with a high degree of automation, avoiding the operation of manual unloading and reloading, and improving the safety.

[0041] In one embodiment, the polarization-maintaining storage tank further includes an electric heating tube 13. The electric heating tube 13 is coiled and arranged at the bottom inside the tank body 1. Both ends of the electric heating tube 13 extend out of the tank body 1 and are connected with a fixed socket 14. A mesh plate 15 is arranged above the electric heating tube 13 inside the tank body 1.

[0042] By arranging the electric heating tube 13 and coiling it at the bottom inside the tank body 1, uniform heating and precise temperature control of the liquid inside the tank body 1 are realized, ensuring that the etching temperature condition meets the process requirements, thereby ensuring the etching accuracy. By arranging the mesh plate 15, the fragments corroded during the etching process are prevented from falling and contacting the electric heating tube 13, thus playing a role in protecting the electric heating tube 13.

[0043] In one embodiment, two first liquid level detection tubes 16 are arranged on the outer side of the second side wall of the tank body 1. Each first liquid level detection tube 16 is provided with a first liquid level detection device. The first liquid level detection device is used to detect the liquid level in the first liquid level detection tube 16, thereby obtaining the liquid level in the tank body 1. Specifically, for example, the lower end of the first liquid level detection tube 16 communicates with the acid solution inside the tank body 1, and the upper end communicates with the air. By setting the tube body to be transparent and arranging a pair of sensors at a fixed position, when the pair of sensors detect the refraction of light, it means that the liquid level reaches the predetermined value, and an electrical signal is output.

[0044] By setting different trigger values for the two first liquid level detection tubes 16, the predetermined process requirements are met. For example, first, acid solution is roughly added into the tank body 1 until one of the first liquid level detection tubes 16 gives an early warning, and then the acid solution is precisely added until the other first liquid level detection tube 16 gives an early warning. Through this setting, both the efficient addition of the acid solution and the precise control of the liquid level can be ensured.

[0045] In the second aspect of the present application, as Figures 5 to 7As shown, an etching machine device is provided, including the above-mentioned polarization-maintaining storage tank; it also includes a temporary storage tank 17 and an infusion pump 18; a first pipeline 19 is connected between the temporary storage tank 17 and the inlet end of the infusion pump 18, a second pipeline 20 is connected between the temporary storage tank 17 and the outlet end of the infusion pump 18, a third pipeline 21 is connected between the tank body 1 and the outlet end of the infusion pump 18, and a fourth pipeline 22 is connected between the bottom of the tank body 1 and the inlet end of the infusion pump 18; each of the above pipelines is provided with a directional diaphragm valve.

[0046] The infusion pump 18 extracts the acid solution from the temporary storage tank 17 through the first pipeline 19 and injects the acid solution into the tank body 1 through the third pipeline 21 to achieve automatic liquid inlet; after the etching is completed, the infusion pump 18 extracts the acid solution from the bottom of the tank body 1 through the fourth pipeline 22 and then injects the acid solution into the temporary storage tank 1 through the second pipeline 20 to achieve automatic acid supply, with high safety and realizing the recycling of the acid solution.

[0047] Each pipeline is equipped with a directional diaphragm valve. During the above-mentioned acid supply process, the directional diaphragm valves of each pipeline are opened and closed adaptively according to requirements, which is easy for those skilled in the art to do and will not be elaborated here.

[0048] In one embodiment, the etching machine device further includes a buffer pipe 23 fixedly arranged vertically. A fifth pipeline 24 is connected between the upper end of the buffer pipe 23 and the outlet end of the infusion pump 18, and a sixth pipeline 25 is connected between the lower end of the buffer pipe 23 and the tank body 1. The height of the buffer pipe 23 is higher than that of the tank body 1, and a second liquid level detection pipe 26 is arranged outside the buffer pipe 23, and the second liquid level detection pipe 26 is connected with a second liquid level detection device.

[0049] By setting the buffer pipe 23, the precise liquid inlet of the acid solution is realized, and the specific process is as follows:

[0050] The infusion pump 18 extracts the acid solution from the temporary storage tank 17 through the first pipeline 19 and injects the acid solution into the buffer pipe 23 through the fifth pipeline 24 until it reaches the first predetermined liquid level to achieve the rough liquid inlet of the buffer pipe 23;

[0051] The infusion pump 18 extracts the acid solution from the temporary storage tank 17 through the first pipeline 19 and injects the acid solution into the tank body 1 through the third pipeline 21 until it reaches the first predetermined liquid level to achieve the rough liquid inlet of the tank body 1;

[0052] The infusion pump 18 extracts the acid solution from the temporary storage tank 17 through the first pipeline 19 and injects the acid solution into the buffer pipe 23 through the fifth pipeline 24 until it slightly exceeds the second predetermined liquid level to achieve the precise liquid inlet of the buffer pipe 23;

[0053] Open the directional diaphragm valve of the sixth pipeline 25 between the buffer pipe 23 and the tank body 1, and realize the slow feeding of the buffer pipe 23 to the tank body 1 through the principle of pressure difference. When it is detected that the liquid level in the tank body 1 reaches the second predetermined liquid level value, close the directional diaphragm valve of the sixth pipeline 25 to realize the feeding of the tank body 1.

[0054] By setting the buffer pipe 23 and implementing the above scheme process, the accurate control of the acid liquid level in the tank body 1 is realized, thereby improving the etching accuracy.

[0055] In one embodiment, it further includes a vehicle frame, which includes a bottom plate 27 and an operating platform 28, and the bottom plate 27 and the operating platform 28 are supported by several columns; the temporary storage box 17 and the infusion pump 18 are both arranged between the bottom plate 27 and the operating platform 28, the tank body 1 is arranged on the upper end surface of the operating platform 28, the lower end of the buffer pipe 23 is fixed to the bottom plate 27, and the upper end of the buffer pipe 23 penetrates through the operating platform 28. The vehicle frame provides a movable installation platform for the whole equipment.

[0056] In one embodiment, a support frame 29 is provided on the upper end surface of the bottom plate 27, and several roller shafts 30 are rotatably connected to the support frame 29. The temporary storage box 17 is arranged above the several roller shafts 30. A part of the first pipeline 19 is set as the first hose 191, and a part of the second pipeline 20 is set as the second hose 201. Both the first hose 191 and the second hose 201 are spiral structures. After the acid liquid is circulated multiple times, it is necessary to drain the waste liquid and refill the acid liquid. By arranging the temporary storage box 17 above the several roller shafts 30, it is convenient to draw out and place the temporary storage box 17, so as to facilitate the removal and filling of the waste liquid; by setting the first hose 191 and the second hose 201 and being spiral structures, when the temporary storage box 17 is drawn out and placed, there is no need to disassemble the pipeline, realizing more flexible and convenient taking and placing.

[0057] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A polarization-maintaining storage slot, characterized in that It includes a groove body (1). A number of positioning chucks (2) are connected to the inner side of the first side wall of the groove body (1). The upper end of the second side wall of the groove body (1) opposite to the first side wall is hingedly connected with a turning plate (3). The turning plate (3) is provided with a number of parallel strip-shaped guide grooves (301). A coordination chuck (4) is slidably connected in each strip-shaped guide groove (301). The positioning chucks (2) and the coordination chucks (4) are in one-to-one correspondence; The coordination chuck (4) includes a guiding slider (401). The guiding slider (401) is slidably matched with the strip-shaped guide groove (301). The upper end of the guiding slider (401) passes through the strip-shaped guide groove (301) and is connected with a locking nut (402). One side of the guiding slider (401) is connected with a vertically movable guide rod (403). The lower end of the guide rod (403) is connected with a guide wheel (404). An inclined downward slope platform (5) is provided on the inner side of the second side wall of the groove body (1) facing the first side wall. The guide wheel (404) is in rolling cooperation with the slope platform (5).

2. The polarization-maintaining storage groove according to claim 1, characterized in that, The end shaft of the positioning chuck (2) is rotatably connected to the first side wall in the groove body (1). A first gear (6) is fixedly sleeved on the end shaft of each positioning chuck (2). Adjacent two first gears (6) are meshed with each other. The groove body (1) is fixedly connected with a mounting seat (7). The mounting seat (7) is fixedly connected with a turning driving motor (8). The output shaft of the turning driving motor (8) is connected with a second gear (9). The second gear (9) is meshed and matched with the first gear (6); The mounting seat (7) is rotatably connected with a third gear (10). The third gear (10) is meshed and matched with the second gear (9). The third gear (10) is connected with a detection plate (11). The mounting seat (7) is connected with a displacement sensor (12) for detecting the position of the detection plate (11).

3. A polarization-maintaining storage groove according to claim 1, wherein, It includes an electric heating tube (13). The electric heating tube (13) is coiled and arranged at the bottom in the groove body (1). Both ends of the electric heating tube (13) extend out of the groove body (1) and are connected with fixed sockets (14). A mesh plate (15) is provided above the electric heating tube (13) in the groove body (1).

4. A polarization-maintaining storage groove according to claim 1, wherein Two first liquid level detection tubes (16) are provided on the outer side of the second side wall of the groove body (1). Each first liquid level detection tube (16) is provided with a first liquid level detection device.

5. An etching machine device, characterized in that, It includes the polarization-maintaining storage tank described in any one of claims 1 to 4; it further includes a temporary storage tank (17) and an infusion pump (18); a first pipeline (19) is connected between the temporary storage tank (17) and the inlet end of the infusion pump (18), a second pipeline (20) is connected between the temporary storage tank (17) and the outlet end of the infusion pump (18), a third pipeline (21) is connected between the tank body (1) and the outlet end of the infusion pump (18), and a fourth pipeline (22) is connected between the bottom of the tank body (1) and the inlet end of the infusion pump (18); directional diaphragm valves are provided in each of the above pipelines.

6. An etching machine device according to claim 5, characterized in that, It includes a buffer pipe (23) fixedly arranged vertically. The upper end of the buffer pipe (23) is connected to the outlet end of the infusion pump (18) by a fifth pipeline (24), the lower end of the buffer pipe (23) is connected to the tank body (1) by a sixth pipeline (25). The height of the buffer pipe (23) is higher than that of the tank body (1). A second liquid level detection pipe (26) is arranged outside the buffer pipe (23), and the second liquid level detection pipe (26) is connected with a second liquid level detection device.

7. An etching machine device according to claim 6, characterized in that, It includes a vehicle frame, and the vehicle frame includes a bottom plate (27) and an operation table (28). The bottom plate (27) and the operation table (28) are supported by several columns; both the temporary storage tank (17) and the infusion pump (18) are arranged between the bottom plate (27) and the operation table (28), the tank body (1) is arranged on the upper end surface of the operation table (28), the lower end of the buffer pipe (23) is fixed to the bottom plate (27), and the upper end of the buffer pipe (23) penetrates through the operation table (28).

8. An etching machine device according to claim 7, characterized in that, A support frame (29) is arranged on the upper end surface of the bottom plate (27). Several roller shafts (30) are rotatably connected to the support frame (29). The temporary storage tank (17) is arranged above several roller shafts (30). A part of the first pipeline (19) is set as a first flexible hose (191), and a part of the second pipeline (20) is set as a second flexible hose (201). Both the first flexible hose (191) and the second flexible hose (201) are spiral structures.

Images