Processing liquid spraying nozzle

Abstract

The processing liquid ejection nozzle according to the present invention comprises: a body part including a mixing space formed so as to mix a processing liquid therein, a first inlet formed so as to communicate with the mixing space and through which a first processing liquid flows into the mixing space, a second inlet formed so as to communicate with the mixing space and through which a second processing liquid flows into the mixing space, and an ejection port formed so as to eject the processing liquid; a second inflow port formed so as to communicate with the mixing space and formed in a direction offset from the direction of the first inflow port so as to allow the second processing liquid to flow into the mixing space, and an ejection port formed at the lower end of the body part so as to communicate with the mixing space; and a rotational flow guide part which is vertically provided at both upper and lower ends in the mixing space so as to face the first inlet and the injection port, respectively, and which has a first inlet-side cross-sectional area larger than the injection port-side cross-sectional area. A first perforated plate coupled to the inner peripheral surface of the mixing space is formed on the upper side of the rotational flow guide, and a second perforated plate coupled to the inner peripheral surface of the mixing space is formed on the lower side of the rotational flow guide.

Description

Technical Field

[0001] The present invention relates to a processing liquid injection nozzle, and more particularly, to a processing liquid injection nozzle that constitutes a substrate processing apparatus and discharges two or more types of processing liquids onto a substrate after mixing them. Background Art

[0002] A substrate processing apparatus is an apparatus that performs evaporation, development, etching, or cleaning on substrates such as semiconductor wafers, display substrates, optical disk substrates, magnetic disk substrates, photomask substrates, ceramic substrates, and solar cell substrates using a processing liquid.

[0003] Among them, the cleaning process, as a process for removing foreign substances or particles present on the above-mentioned substrate, can typically be a process of rotating the substrate at a high speed while supporting it on a chuck base (rotating head) and supplying a processing liquid to the front or back surface of the substrate for processing.

[0004] As a representative example of the above-mentioned processing liquid, there can be a cleaning liquid for so-called sulfuric acid hydrogen peroxide mixture (SPM, Sulfuric Peroxide Mixture) cleaning in which sulfuric acid and hydrogen peroxide are mixed in a predetermined ratio for cleaning. Sulfuric acid and hydrogen peroxide flow separately into the processing liquid injection nozzle and are mixed and then sprayed onto the substrate.

[0005] Conventionally, a technique using a vortex has been disclosed for the smooth mixing and injection of the above-mentioned sulfuric acid and the above-mentioned hydrogen peroxide. For this purpose, a structure is configured to rotate the above-mentioned sulfuric acid and hydrogen peroxide in the above-mentioned processing liquid injection nozzle.

[0006] For example, a first supply pipe and a second supply pipe in a tangential direction are provided on the inner circumferential surface of a mixing space in a main body portion constituting the processing liquid injection nozzle, and sulfuric acid and hydrogen peroxide are introduced to form a vortex, thereby enabling smooth mixing and injection.

[0007] However, even if the above-mentioned sulfuric acid and hydrogen peroxide do not flow into the mixing space only in the tangential direction, mutual mixing still cannot be achieved smoothly due to the difference in specific gravity. When spraying onto the substrate, part of the processing is uneven, resulting in defects.

[0008] Prior Art Documents

[0009] Patent Documents

[0010] Patent Document 1: Korean Patent Publication No. 10-1042539 (June 13, 2011)

[0011] Patent Document 2: Korean Patent Laid-Open Publication No. 10-2011-0057679 (June 1, 2011) Summary of the Invention

[0012] The present invention is proposed to solve the problems of the above-mentioned prior art. The object of the present invention is to provide a processing liquid injection nozzle as follows. When two or more kinds of processing liquids flow in separately for mixing and injection, it can overcome the specific gravity difference and achieve uniform mixing, thereby preventing defects caused by injection.

[0013] To achieve the above object, the processing liquid injection nozzle of the present invention is characterized in that it includes: a main body portion including a mixing space, a first inlet, a second inlet, and an injection port respectively. The mixing space is formed in a manner of mixing the processing liquid inside. The first inlet is formed in a manner of communicating with the mixing space to allow the first processing liquid to flow into the mixing space. The second inlet is formed in a manner of communicating with the mixing space and is formed along a direction offset from the direction of the first inlet to allow the second processing liquid to flow into the mixing space. The injection port is communicated with the mixing space and is formed at the lower end of the main body portion; and a rotational flow guiding portion which is vertically provided in the mixing space with the upper and lower ends facing the first inlet and the injection port respectively. The cross-sectional area on the first inlet side is larger than the cross-sectional area on the injection port side. A first porous plate combined with the inner peripheral surface of the mixing space is formed on the upper side of the rotational flow guiding portion, and a second porous plate combined with the inner peripheral surface of the mixing space is formed on the lower side of the rotational flow guiding portion. The lateral cross-sectional area of the mixing space where the second porous plate is formed is smaller than the lateral cross-sectional area of the mixing space where the first porous plate is formed. The second inlet is arranged on the lower side of the first porous plate.

[0014] The present invention is characterized in that the mixing space includes: a first mixing space which is the space from the first porous plate to the lower end of the rotational flow guiding member; a second mixing space which is the space from the lower end of the first mixing space to the upper end of the injection port; and a third mixing space which is the space from the upper end to the lower end of the injection port. A second porous plate combined with the rotational flow guiding member is formed at the entrance of the second mixing space, and a third porous plate is formed at the entrance of the injection port.

[0015] The present invention is characterized in that the cross-sectional area of the entrance of the second mixing space is larger than the cross-sectional area of the entrance of the injection port.

[0016] The present invention is characterized in that a spiral protrusion or a spiral groove extending in the vertical direction is formed on the outer peripheral surface of the rotational flow guiding portion.

[0017] The present invention is characterized in that on the main body portion, a spiral protrusion or a spiral groove extending in the vertical direction is formed on the inner surface of the mixing space from the first porous plate to the lower end of the rotational flow guiding member.

[0018] The present invention is characterized in that a first internal inflow hole and a plurality of first internal outflow holes are formed in the above-mentioned rotational flow guiding portion. The first internal inflow hole extends inward along the vertical direction from the upper surface facing the first inlet, and the plurality of first internal outflow holes branch from the first internal inflow hole to the mixing space.

[0019] The present invention is characterized in that the first internal inflow hole is arranged at a position facing the first inlet.

[0020] The present invention is characterized in that a second internal inflow hole and a plurality of second internal outflow holes are formed in the above-mentioned main body portion. The second internal inflow hole extends inward along the vertical direction from the upper surface facing the upper-side space of the first porous plate, and the plurality of second internal outflow holes branch from the second internal inflow hole to the mixing space.

[0021] The present invention is characterized in that a first internal inflow hole and a plurality of first internal outflow holes are formed in the above-mentioned rotational flow guiding portion. The first internal inflow hole extends inward along the vertical direction from the upper surface facing the first inlet, and the plurality of first internal outflow holes branch from the first internal inflow hole to the mixing space. A second internal inflow hole and a plurality of second internal outflow holes are formed in the above-mentioned main body portion. The second internal inflow hole extends inward along the vertical direction from the upper surface facing the upper-side space of the first porous plate, and the plurality of second internal outflow holes branch from the second internal inflow hole to the mixing space.

[0022] The present invention is characterized in that the flow rate of the first treatment liquid is less than the flow rate of the second treatment liquid.

[0023] The present invention is characterized in that the porous plate is composed of a plate material or a mesh plate having a plurality of through holes.

[0024] The processing liquid injection nozzle of the present invention as described above includes: a main body portion including a mixing space, a first inlet, a second inlet, and an injection port respectively. The mixing space is formed in a manner of mixing the processing liquid inside. The first inlet is formed in a manner of communicating with the mixing space for allowing a first processing liquid to flow into the mixing space. The second inlet is formed in a manner of communicating with the mixing space and is formed along a direction offset from the direction of the first inlet for allowing a second processing liquid to flow into the mixing space. The injection port communicates with the mixing space and is formed at the lower end of the main body portion; and a swirling flow guiding portion which is vertically provided in the mixing space with the upper and lower ends facing the first inlet and the injection port respectively. The cross-sectional area on the first inlet side is larger than the cross-sectional area on the injection port side. A first porous plate combined with the inner peripheral surface of the mixing space is formed above the swirling flow guiding portion, and a second porous plate combined with the inner peripheral surface of the mixing space is formed below the swirling flow guiding portion. The second inlet is arranged on the lower side of the first porous plate. Thus, the first processing liquid flowing in through the first inlet collides with the upper end of the swirling flow guiding portion and diffuses in the radial direction, and uniformly descends through the first porous plate and meets the second processing liquid moving along the inner peripheral surface of the mixing space and naturally mixes. Moreover, the mixed processing liquid moves along the outer peripheral surface of the swirling flow guiding portion and generates a vortex. Therefore, smoother and more uniform mixing is achieved, and the liquid is smoothly discharged through the injection port.

[0025] Moreover, according to the present invention, the present invention provides the following effects. At least one porous plate is formed from the first porous plate formed between the first inlet and the mixing space and the lower end of the swirling flow guiding portion to the lower end of the injection port. Thus, the mixing efficiency of the first processing liquid and the second processing liquid can be further improved. Moreover, the flow of the mixed processing liquid is stabilized, and the contact surface area with the mixed processing liquid is increased, thereby preventing the accidental dripping phenomenon of the processing liquid.

[0026] Moreover, according to the present invention, the present invention provides the following effects. The mixing space is composed of a first mixing space, a second mixing space, and a third mixing space. A second porous plate is formed at the entrance of the second mixing space, and a third porous plate is formed at the entrance of the injection port. Thus, the first processing liquid and the second processing liquid can be further perfectly mixed and stably discharged.

[0027] Moreover, according to the present invention, the present invention provides the following effects. A spiral protrusion or a spiral groove extending in the vertical direction is formed on the outer peripheral surface of the above-mentioned rotational flow guiding portion, so that the surface area in contact with the mixed processing liquid phase will increase. Based on this, the rotational force of the vortex phenomenon can be increased. Moreover, due to the strengthening of the surface tension effect, when the processing liquid injection nozzle moves after injecting the processing liquid, the accidental dripping phenomenon of the processing liquid (water marks caused by the gradual dripping of the processing liquid) can be prevented.

[0028] Moreover, according to the present invention, the present invention provides the following effects. On the above-mentioned main body portion, a spiral protrusion or a spiral groove extending in the vertical direction is formed on the inner surface of the mixing space from the above-mentioned first porous plate to the lower end of the rotational flow guiding member, so that the vortex phenomenon for mixing the processing liquid can be further maximized.

[0029] Moreover, according to the present invention, the present invention provides the following effects. A first internal inflow hole and a plurality of first internal outflow holes are formed in the above-mentioned rotational flow guiding portion. The first internal inflow hole extends inward from the upper surface facing the above-mentioned first inflow port in the vertical direction, and the plurality of first internal outflow holes branch from the first internal inflow hole to the above-mentioned mixing space. The first processing liquid is supplied laterally through the first internal inflow hole and the first internal outflow hole formed inside the rotational flow guiding portion. Therefore, the energy for expanding with the above-mentioned second processing liquid can be greatly increased, and based on this, the mixing efficiency can be greatly improved.

[0030] Moreover, according to the present invention, the present invention provides the following effects. A second internal inflow hole and a plurality of second internal outflow holes are formed in the above-mentioned main body portion. The second internal inflow hole extends inward from the upper surface facing the upper side space of the above-mentioned first porous plate in the vertical direction, and the plurality of second internal outflow holes branch from the second internal inflow hole to the above-mentioned mixing space. Thus, when mixing with the above-mentioned second processing liquid, the vortex and turbulent flow phenomena can be greatly increased, and based on this, the mixing efficiency can be greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A schematic structural diagram showing an example of a substrate processing apparatus.

[0032] Figure 2 A perspective view showing the processing liquid injection nozzle of the present invention.

[0033] Figure 3 A longitudinal sectional view showing the processing liquid injection nozzle of the present invention.

[0034] Figure 4 For showing Figure 3 A longitudinal sectional view of another embodiment of the inner side surface of the mixing space of the main body portion of

[0035] Figure 5 A longitudinal sectional view of another embodiment showing that the first processing liquid that can be is supplied through the inside of the above-mentioned main body portion.

[0036] Figure 3 A longitudinal sectional view of another embodiment showing Figure 6 the rotating flow guiding portion.

[0037] Figure 3 A longitudinal sectional view of another embodiment showing that the first processing liquid that can be Figure 7 is supplied through the inside of the above-mentioned rotating flow guiding portion.

[0038] Figure 3 A perspective view showing the structure of the first porous plate, the second porous plate, and the third porous plate of Figure 8 and another embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0039] Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in detail.

[0040] As Figure 3 shown, generally, the substrate processing apparatus T includes a processing liquid ejection unit 10, a bowl-shaped assembly 20, and a substrate support device S.

[0041] The above-mentioned processing liquid ejection unit 10 supplies a processing liquid for processing the substrate W such as cleaning, and when the process is performed, the substrate support device S rotates the substrate W while supporting it.

[0042] As Figure 1 shown, the processing liquid ejection nozzle 1000 of the present invention includes: a main body portion 100 including a mixing space 110, a first inlet 120, a second inlet 130, and an ejection port 140, respectively, the mixing space 110 being formed to mix the processing liquid inside; the first inlet 120 being formed to communicate with the mixing space 110 for allowing the first processing liquid 910 to flow into the mixing space 110, the second inlet 130 being formed to communicate with the mixing space 110 and formed in a direction offset from the direction of the first inlet 120 for allowing the second processing liquid 920 to flow into the mixing space 110, the ejection port 140 communicating with the mixing space 110 and formed at the lower end of the main body portion 100; and a rotating flow guiding portion 200 erected in the mixing space 110 with the upper and lower ends facing the first inlet 120 and the ejection port 140, respectively, the cross-sectional area on the first inlet 120 side being larger than the cross-sectional area on the ejection port 140 side.

[0043] According to this structure, the first processing liquid 910 flowing in from the first liquid inlet 120 is sprayed onto the upper end of the rotary flow guiding portion 200 and diffuses in all directions. After the second processing liquid 920 flowing in from the second liquid inlet 130 flows along the inner circumferential surface of the mixing space 110 in the tangential direction, it rotates along the inner circumferential surface of the mixing space 110 and further smooth eddy currents occur through the rotary flow guiding portion 200, thereby improving the mixing efficiency.

[0044] That is, the first processing liquid 910 that collides with the upper end of the rotary flow guiding portion 200 and diffuses in the radial direction meets and naturally mixes with the second processing liquid 920 that rotates and moves along the inner circumferential surface of the mixing space 110. Moreover, these processing liquids move along the outer circumferential surface of the rotary flow guiding portion 200 located in the central portion of the mixing space 110 and eddy currents occur, so that smoother and more uniform mixing is further achieved and discharged smoothly through the ejection port 140.

[0045] Moreover, preferably, the flow rate of the first processing liquid 910 is less than the flow rate of the second processing liquid 920. This is because only when the flow rate of the second processing liquid 920 flowing in from the second liquid inlet 130 is large can the rotational force based on the rotary flow guiding portion 200 be increased, thereby smoothly mixing with the first processing liquid 910.

[0046] As described above, the main body portion 100 includes respectively: a mixing space 110 formed in a manner of mixing processing liquids inside; a first liquid inlet 120 formed in a manner of communicating with the mixing space 110 for allowing the first processing liquid 910 to flow into the mixing space 110; a second liquid inlet 130 formed in a manner of communicating with the mixing space 110 and formed along a direction offset from the direction of the first liquid inlet 120 for allowing the second processing liquid 920 to flow into the mixing space 110; and an ejection port 140 communicating with the mixing space 110 and formed at the lower end of the main body portion 100.

[0047] And, a first porous plate 300 is disposed between the first liquid inlet 120 and the mixing space 110, and a plurality of through holes 310 are formed for guiding the first processing liquid 910 to the mixing space. One or more porous plates 400, 500 are disposed from the lower end of the rotary flow guiding portion 200 to the lower end of the ejection port 140.

[0048] That is, preferably, the first porous plate 300 and the porous plates 400, 500 are respectively located above and below the rotary flow guiding portion 200 in the mixing space 110, and are respectively arranged along the direction crossing the ejection direction of the first processing liquid 910, and the outer circumferential surfaces of the first porous plate 300 and the porous plates 400, 500 are combined with the inner circumferential surface of the mixing space 110.

[0049] Specifically, the above-mentioned mixing space 110 includes a first mixing space 111 from the above-mentioned first porous plate 300 to the lower end of the rotary flow guide 200, a second mixing space 112 from the lower end of the first mixing space 111 to the upper end of the injection port 140, and a third mixing space 113 from the upper end to the lower end of the injection port 140. A second porous plate 400 combined with the rotary flow guide 200 is formed at the entrance of the second mixing space 112, and a third porous plate 500 is formed at the entrance of the injection port 140.

[0050] That is, a first porous plate 300 combined with the inner peripheral surface of the first mixing space 111 is formed on the upper side of the rotary flow guide portion 200, and a second porous plate 400 combined with the inner peripheral surface of the second mixing space 112 is formed on the lower side of the rotary flow guide portion 200.

[0051] The first mixing space 111 is a space for flowing in the first processing liquid 910 and the second processing liquid 920 to mix them with each other. The cross-sectional area of the space where the first processing liquid 910 and the second processing liquid 920 flow in and mix is larger than the cross-sectional area on the discharge port side, so as to ensure the time for naturally and uniformly mixing different processing liquids, and then the mixed liquid is discharged to the second mixing space 112.

[0052] In this case, the second inlet 130 is arranged on the lower side of the first porous plate 300. The first processing liquid 910 flowing in through the first inlet 120 collides with the upper end of the rotary flow guide portion 200 and diffuses in the radial direction, and uniformly descends through the first porous plate 300 and naturally mixes with the second processing liquid 920 moving along the inner peripheral surface of the first mixing space 111 through the second inlet 130. Moreover, the mixed processing liquid moves along the outer peripheral surface of the rotary flow guide portion 200 and generates a vortex. Therefore, smoother and more uniform mixing is achieved, and it is smoothly discharged through the injection port 140.

[0053] The second mixing space 112 is a space for additionally mixing the processing liquid that has not been mixed in the first mixing space 111. By making the cross-sectional area of the discharge port side of the first mixing space 111 larger than the cross-sectional area of the discharge port side of the second mixing space 112, the fluid naturally flows.

[0054] The third mixing space 113 combines the mixed processing liquids discharged in multiple strands through the third porous plate 500 into one, guides re-mixing inside it, and realizes injection through the injection port 140 in a state where the flow is stabilized.

[0055] Moreover, the diameter D3 of the above-mentioned third mixing space 113 is smaller than the diameter D2 of the second mixing space 112, and the diameter D2 of the second mixing space 112 is smaller than the diameter D1 of the first mixing space 111.

[0056] That is, the cross-sectional area of the inlet of the second mixing space 112 is larger than the cross-sectional area of the inlet of the injection port 140.

[0057] In other words, the mixing space 110 has a stepped structure in which the flow cross-sectional area gradually decreases from the first inlet 120 to the injection port 140.

[0058] As described above, by increasing the contact surface area of the first processing liquid 910 and the second processing liquid 920 through a structure with a sequentially decreasing flow cross-sectional area, the phenomenon of unwanted spraying of the processing liquid can be avoided. Therefore, further perfect mixing and stable discharge can be achieved.

[0059] That is, the mixing efficiency is improved by the effect that the processing liquid flows from a wider space to a narrower space and closely adheres to each other.

[0060] And, as Figures 2 to 8 shown, the mixing space 110 of the main body 100 may have a structure of a conical inclined surface 101 in which the flow cross-sectional area gradually decreases from the discharge port of the first inlet 120 to the injection port 140.

[0061] That is, an inclined surface 101 with a width gradually decreasing from the upper part along the lower part is formed on the inner side surface of the mixing space 110. Thus, the vortex phenomenon of the first processing liquid 910 and the second processing liquid 920 and the fluidity of the fluid toward the injection port 140 can be further concentrated for mixing. Based on this, smooth and stable injection can be achieved.

[0062] Moreover, the inclined surface 101 can also be formed at an angle parallel to the slope of the outer peripheral surface of the rotational flow guiding part 200.

[0063] In addition, the inner side surface of the mixing space 110 of the main body 100 can adopt a stepped shape or a mixed shape of a stepped shape and a conical shape, etc.

[0064] Meanwhile, in the main body 100, a spiral protrusion or a spiral groove 101a extending in the vertical direction can be formed on the inner surface of the first mixing space 111 from the first porous plate 300 to the lower end of the rotational flow guiding member 200.

[0065] The shape of the spiral protrusion or the spiral groove 101a can be formed into a circular shape or various angular shapes.

[0066] Such a spiral protrusion or spiral groove 101a provides an effect of further maximizing the eddy current phenomenon for mixing the processing liquid.

[0067] And, as Figure 4 shown, a second internal inflow hole 102a extending inward in the vertical direction along the upper surface facing the upper side space of the first porous plate 300 and a plurality of second internal outflow holes 102b branching from the second internal inflow hole 102a to the first mixing space 111 are formed in the main body portion 100.

[0068] That is, the first processing liquid 910 supplied to the first inlet 120 of the main body portion 100 is supplied laterally through the second internal inflow hole 102a and the second internal outflow holes 102b. Thus, when mixed with the second processing liquid 930, the eddy current and turbulent flow phenomena can be greatly increased, thereby greatly improving the mixing efficiency.

[0069] In other words, the first processing liquid 910 supplied from the first inlet 120 of the main body portion 100 is basically ejected in the vertical direction through the first porous plate 300, and at the same time, is branched through the second internal inflow hole 102a and the second internal outflow holes 102b formed inside the main body portion 100, so as to be ejected and supplied in two directions for the horizontal direction.

[0070] On the other hand, preferably, the upper and lower ends of the rotational flow guiding portion 200 are erected in the mixing space 110 in a manner facing the first inlet 120 and the ejection port 140 respectively, have a circular lateral cross-sectional shape, and are in a partial conical shape with the cross-sectional area on the first inlet 120 side being larger than the cross-sectional area on the ejection port 140 side.

[0071] That is, the rotational flow guiding portion 200 is in a shape where the diameter gradually decreases from the upper end to the lower end, and the eddy current is further concentrated toward the ejection port 140, thereby enabling smooth and stable ejection.

[0072] And, as [[ID=2l]] Figure 5 shown, a spiral protrusion 201a or a spiral groove 201b extending in the vertical direction is formed on the outer peripheral surface of the rotational flow guiding portion 200.

[0073] That is, when a spiral protrusion 201a or a spiral groove 201b is formed in the rotational flow guiding portion, the surface area in contact with the mixed processing liquid will increase. Therefore, the rotational force can be increased as the eddy current is formed. Moreover, due to the enhanced surface tension effect, when the processing liquid ejection nozzle moves after ejecting the processing liquid, the phenomenon of the processing liquid dripping (water marks occurring on the substrate due to the processing liquid dripping little by little) can be avoided.

[0074] AsFigure 6 As shown, the spiral protrusion 201a or the spiral groove 201b formed on the outer peripheral surface of the above-mentioned rotational flow guiding portion 200 can be formed into a cross-sectional shape of various shapes and forms such as circular, elliptical, quadrilateral, polygonal, triangular, etc.

[0075] As Figure 6 shown, in the above-mentioned rotational flow guiding portion 200, a first internal inflow hole 202a extending inward in the vertical direction from the upper surface facing the first inflow port 120 and a plurality of first internal outflow holes 202b branching from the first internal inflow hole 202a to the first mixing space 111 can be formed.

[0076] Moreover, preferably, the first internal inflow hole 202a is disposed at a position facing the first inflow hole 120.

[0077] That is, the first processing liquid 910 supplied to the first inflow port 120 of the main body portion 100 is supplied laterally through the first internal inflow hole 202a and the first internal outflow holes 202b formed inside the rotational flow guiding portion 200. Thus, the energy of collision with the second processing liquid 920 can be greatly increased to greatly improve the mixing efficiency.

[0078] On the other hand, as Figure 7 shown, a first porous plate 300, a second porous plate 400, and a third porous plate 500 are disposed on the upper sides of the first mixing space 111, the second mixing space 112, and the third mixing space 113, respectively.

[0079] The first porous plate 300 can cause the first processing liquid 910 flowing in through the first inflow port 120 to collide with the upper surface of the first porous plate 300, disperse and diffuse in the radial direction, and then vertically drip through the first through holes 310 formed in the first porous plate 300 and be discharged into the first mixing space 111 with uniform pressure and flow rate. In the first mixing space 111, during the process of mutual mixing of the first processing liquid 910 and the second processing liquid 920, it prevents a part of the mixed processing liquid from flowing back to the side of the first inflow port 120.

[0080] And, through the first through holes 310 formed in the first porous plate 300, the first processing liquid 910 vertically drips with uniform pressure and flow rate. Therefore, it naturally and uniformly mixes with the second processing liquid 920 continuously flowing in laterally and improves the mixing efficiency.

[0081] And, as described above, the uniformly mixed processing liquid directly enters the periphery of the rotational flow guiding portion 200 disposed in the first mixing space 111 along the tangential direction. Therefore, a greatly improved mixing efficiency based on the formation of eddy currents can be obtained.

[0082] The second porous plate 400 is disposed at the entrance of the second mixing space 112. The mixed treatment liquid mixed in the first mixing space 111 is stabilized with a stable pressure through a plurality of second through holes 410. At the same time, the contact surface area with the mixed treatment liquid is increased, thereby preventing the accidental dripping of the treatment liquid after the spraying is completed.

[0083] The third porous plate 500 is disposed at the entrance of the third mixing space 113. The flow of the mixed liquid flowing into the second mixing space 112 is stabilized with a uniform pressure through a plurality of third through holes 510, and the contact surface area with the mixed liquid is increased again, thereby preventing the accidental dripping of the treatment liquid after the spraying is completed.

[0084] The diameters, numbers, distribution shapes, etc. of the first through holes 310, second through holes 410, and third through holes 510 of the first porous plate 300, second porous plate 400, and third porous plate 500 can be combined in various ways.

[0085] As described above, through the first porous plate 300, second porous plate 400, and third porous plate 500 respectively formed in the first mixing space 111, second mixing space 112, and third mixing space 113 where the flow profile areas decrease in sequence, the flows of the first treatment liquid 910 and the second treatment liquid 920 are homogenized or stabilized. Thereby, the effect of improving the mixing efficiency can be achieved. Moreover, the dripping of the remaining treatment liquid can be prevented. Thus, the treatment liquid completely mixed through the injection port 140 is stably discharged and injected, thereby achieving uniform substrate treatment.

[0086] And, as Figure 3 Figure 8 shown, the porous plates 300, 400, and 500 can be composed of a plate or a mesh plate having a plurality of through holes 310, 410, and 510.

[0087] The embodiments of the present invention are only exemplary embodiments. As long as they are ordinary technical personnel in the technical field to which the present invention pertains, various deformations and other equivalent embodiments can be made within the scope of the following invention claims.

Claims

1. A treatment liquid spray nozzle, characterized in that: include: a main body portion, comprising a mixing space, a first inlet, a second inlet, and an injection port, wherein the mixing space is formed so as to mix the treatment liquid therein, the first inlet is formed so as to communicate with the mixing space and is used to allow the first treatment liquid to flow into the mixing space, the second inlet is formed so as to communicate with the mixing space and is formed in a direction staggered from the direction of the first inlet so as to allow the second treatment liquid to flow into the mixing space, and the injection port is communicated with the mixing space and is formed at the lower end of the main body portion; and The rotating flow guide is vertically arranged in the mixing space at its upper and lower ends so as to face the first inlet and the injection port respectively, and the cross-sectional area on the first inlet side is larger than the cross-sectional area on the injection port side. A first porous plate coupled to the inner circumferential surface of the mixing space is formed on the upper side of the rotating flow guide portion, a second porous plate coupled to the inner circumferential surface of the mixing space is formed on the lower side of the rotating flow guide portion, and the second inlet is arranged on the lower side of the first porous plate.

2. The treatment liquid spray nozzle according to claim 1, characterized in that The aforementioned hybrid spaces include: The first mixing space is the space from the first porous plate to the lower end of the rotating flow guide; The second mixing space is the space from the lower end of the first mixing space to the upper end of the injection port; and The third mixing space is the space from the upper end to the lower end of the injection port. A second porous plate coupled to the swirling flow guide is formed at the inlet of the second mixing space, and a third porous plate is formed at the inlet of the injection port.

3. The processing liquid ejection nozzle according to claim 2, wherein The cross-sectional area of the inlet of the second mixing space is larger than the cross-sectional area of the inlet of the injection port.

4. The processing liquid injection nozzle according to claim 1, characterized in that, A spiral protrusion or a spiral groove extending in the vertical direction is formed on the outer peripheral surface of the swirling flow guide.

5. The processing liquid ejection nozzle according to claim 1, wherein The main body may have a spiral protrusion or a spiral groove extending in the vertical direction formed on the inner surface of the mixing space from the first porous plate to the lower end of the swirling flow guide.

6. The processing liquid ejection nozzle according to any one of claims 1 to 5, characterized in that, A first internal inflow hole and a plurality of first internal outflow holes are formed in the rotating flow guide portion. The first internal inflow hole extends inwardly from the upper surface facing the first inlet along the up and down directions. The plurality of first internal outflow holes branch from the first internal inflow hole to the mixing space.

7. The processing liquid ejection nozzle according to claim 6, characterized in that, The first internal inflow hole is arranged at a position facing the first inflow port.

8. The processing liquid injection nozzle according to any one of claims 1 to 5, characterized in that, A second internal inflow hole and a plurality of second internal outflow holes are formed in the main body. The second internal inflow hole extends inwardly along the up-down direction from the upper surface facing the upper side space of the first porous plate. The plurality of second internal outflow holes branch from the second internal inflow hole to the mixing space.

9. The treatment liquid spray nozzle according to any one of claims 1 to 5, characterized in that: A first internal inflow hole and a plurality of first internal outflow holes are formed in the above-mentioned rotational flow guiding portion. The first internal inflow hole extends inward from the upper surface facing the first inlet along the vertical direction, and the plurality of first internal outflow holes branch from the first internal inflow hole to the mixing space. A second internal inflow hole and a plurality of second internal outflow holes are formed in the above-mentioned main body portion. The second internal inflow hole extends inward from the upper surface facing the upper side space of the first porous plate along the vertical direction, and the plurality of second internal outflow holes branch from the second internal inflow hole to the mixing space.

10. The processing liquid ejection nozzle according to any one of claims 1 to 5, characterized in that, The flow rate of the first processing liquid is less than the flow rate of the second processing liquid.

11. The processing liquid ejection nozzle according to any one of claims 1 to 5, characterized in that, The porous plate is composed of a plate material or a mesh plate having a plurality of through holes.

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