Square substrate coating uniformity control system based on ultrasonic nozzle array

Abstract

The present invention discloses a square substrate coating uniformity control system based on an ultrasonic nozzle array, which relates to the field of automated control technology, including obtaining the layout of ultrasonic nozzles and the working parameters of ultrasonic spraying, and obtaining the spraying data of the ultrasonic nozzle during spraying through a sensor; the present invention conducts in-depth analysis on the acquired spraying data, clarifies the correlation between the spraying amount and the spraying area and the spraying thickness, generates a spraying uniformity influence coefficient, and constructs a coating control model based on historical data, which can accurately output predicted coating uniformity data, control the coating effect in advance, judge the compliance and generate the difference, and predict the gap between the actual demand. The system dynamically adjusts the working parameters according to the coating uniformity difference, and ensures that the adjustment instructions take effect in time through a real-time execution mechanism, thereby effectively improving the coating uniformity. The automated process reduces manual intervention, improves production efficiency, and reduces quality risks caused by human factors.

Description

Technical Field

[0001] The present invention relates to the field of automation control technology, and in particular to a square substrate coating uniformity control system based on an ultrasonic nozzle array. Background Art

[0002] A coater is a mechanical device that applies coatings in the form of paste polymers, molten polymers or solutions to the surface of substrate materials such as paper, film, metal foil, etc. to achieve specific functions and effects. It is widely used in packaging, electronics, papermaking, automobiles and other industries. The coater uses a specific coating method to evenly apply the coating on the surface of the substrate material. The specific working principle varies according to the coating method. The ultrasonic nozzle coater is a device that uses ultrasonic technology for coating operations. It is widely used in many fields such as material surface treatment and electronic manufacturing. Its core component is the ultrasonic nozzle, which transports the liquid material to the ultrasonic nozzle. The ultrasonic nozzle breaks the liquid material into extremely small and uniform droplets through high-frequency vibration and applies them to the surface of the target substrate.

[0003] However, while ultrasonic nozzle arrays are advanced coating equipment, traditional control methods lack real-time monitoring and dynamic adjustment capabilities, making them difficult to cope with the complex and ever-changing coating process. Slight changes in the nozzle's spray distance can cause uneven coating distribution on a square substrate. Unstable spraying area can also result in excessive coating in some areas and insufficient coating in others. Fluctuations in operating parameters further complicate control of coating uniformity.

[0004] In view of the above technical defects, a solution is now proposed. Summary of the Invention

[0005] The purpose of the present invention is to: by constructing a coating control model, compare the predicted coating uniformity data with the actual required uniformity, judge the compliance and generate a coating uniformity difference, generate working parameter control data instructions, and automatically control the coating.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solutions: a square substrate coating uniformity control system based on an ultrasonic nozzle array, comprising a data acquisition module, a coating prediction module, and a coating execution module;

[0007] The data acquisition module is used to obtain the ultrasonic nozzle layout and ultrasonic spraying working parameters, and obtain the spraying data of the ultrasonic nozzle through the sensor. The spraying data includes the spraying distance, spraying area and the coating thickness data after coating on the square substrate;

[0008] The coating prediction module includes a coating analysis unit and a coating prediction unit. The coating analysis unit is used to obtain the spraying data of the ultrasonic nozzle, analyze the correlation between the spraying amount and the spraying area and the spraying thickness according to the spraying data, generate the spraying uniformity influence coefficient, and combine the operating parameters of the ultrasonic spraying during the coating to obtain the working parameter influence factor during the operation of the ultrasonic nozzle;

[0009] The coating prediction unit is used to obtain the historical working parameters of the ultrasonic nozzle layout and ultrasonic spraying, and to build a coating control model for uniformity prediction based on the spraying data to output the predicted coating uniformity data and send it to the coating analysis module;

[0010] The coating analysis module is used to obtain the predicted coating uniformity data, judge the conformity of the coating uniformity with the actual uniformity required according to the current actual uniformity requirement, generate the coating uniformity difference, dynamically adjust the operating parameters according to the coating uniformity difference, obtain the working parameter control data instruction during coating, and send it to the coating execution module;

[0011] The coating execution module is used to receive control instructions, transmit them to the control end of the ultrasonic nozzle in real time according to the control instructions, and adjust the working parameters of the ultrasonic nozzle;

[0012] Furthermore, a comprehensive feedback evaluation module is included, which is used to perform real-time analysis on the working parameters of the ultrasonic nozzle after adjustment, including the following steps:

[0013] Step 1: Obtain the working parameters of the adjusted ultrasonic nozzle and perform comparative analysis based on the actual measured uniformity data values;

[0014] Step 2: Use the standard deviation method to compare the actual measured data with the predicted data to conduct a comprehensive evaluation of the coating uniformity and generate the impact difference that needs to be corrected;

[0015] Step 3: Send the impact difference to the coating prediction module to adjust the relevant parameters of the influencing factors during the operation of the ultrasonic nozzle and make prediction corrections to the coating control model.

[0016] Furthermore, the spray uniformity influence coefficient is generated, which includes the following:

[0017] S100, obtaining the collected spray distance, spray area, and coating thickness data during coating of the square base, removing obviously erroneous or abnormal data points, and performing data preprocessing operations;

[0018] S101. Spraying area and spraying thickness are independent variables, spraying amount is dependent variable, spraying area is used as horizontal coordinate, spraying amount is used as vertical coordinate, data points at different spraying distances are plotted on the same graph, and the variation of spraying amount with spraying area within a certain range is observed, and spraying distances are reasonably grouped according to actual conditions;

[0019] S102, using statistical methods to calculate the influence coefficient between the spraying amount, the spraying area, and the spraying thickness. The calculation process is as follows: the spraying area is preset to be A, the coating thickness is h, the spraying amount is m,

[0020] Preliminary calculation of different spray thickness deviation values ​​s: s ,U= , where U is the uniformity, K is the weight influence factor, and n is the number of acquired data. .

[0021] Furthermore, the influencing factors of the working parameters during the operation of the ultrasonic nozzle are obtained, which specifically include the following:

[0022] S200, obtaining the working parameters of the ultrasonic nozzle during operation and establishing a connection between the working parameters and the spraying data for generating the spraying uniformity influence coefficient, including the spraying distance d, the spraying area A, the coating thickness h, and the spraying amount m;

[0023] S201, grouping the ultrasonic nozzles according to their different operating parameters, dividing them into groups according to different frequencies, and calculating the correlation coefficient between each operating parameter and the spraying data based on the correlation analysis;

[0024] S202. Calculate the correlation between the working parameters of the ultrasonic nozzle during operation and the time of the spraying uniformity influence coefficient. The calculation process is as follows:

[0025] , where U is the uniformity, F is the working parameter influencing factor, are all weight coefficients, q is the set proportional constant, f is the ultrasonic frequency, P is the ultrasonic power, v is the nozzle movement speed, and i={1, 2, 3, …, n}.

[0026] Furthermore, a coating control model for uniformity prediction is constructed based on the spraying data, specifically including the following:

[0027] S300, obtaining the operating parameters and spraying data of the ultrasonic nozzle during operation and using them as a sample set for training. The spraying data and operating parameters are used as inputs of the coating control model, and the relationship between the spraying distance, spraying area, nozzle operating parameters and coating thickness is analyzed. The predicted future coating uniformity is used as output. The input data is used to analyze the data association through an algorithm to predict the result;

[0028] S301, the specific steps of algorithm analysis data association are as follows: , where C is the system setting constant, is the parameter influencing factor, Z is the ultrasonic amplitude, are the corresponding influence coefficients, t is the temperature variable, and I is the humidity variable.

[0029] Furthermore, the determination of the conformity between the coating uniformity and the uniformity required is specifically as follows:

[0030] S400, obtaining predicted coating uniformity data, judging the conformity of the coating uniformity with the actual uniformity requirement based on the current actual uniformity requirement, and obtaining the actual uniformity error;

[0031] S401, performing comparative analysis based on the obtained actual uniformity error and the set equipment standard error to obtain the error analysis status, including compliance and non-compliance;

[0032] S402: When the error analysis status does not meet the requirements, it is necessary to dynamically adjust the working parameters of the ultrasonic nozzle during operation.

[0033] Furthermore, the working parameter control data instructions during coating are obtained, which specifically include the following:

[0034] S400, dynamically adjusting the operating parameters according to the coating uniformity difference to obtain the operating parameter adjustment data instruction during coating;

[0035] S401. When the coating uniformity difference is less than the set error value, no working parameter control data instruction is generated; when the coating uniformity difference is greater than the set error value, a working parameter control data instruction is generated and transmitted to the device control end for practical control.

[0036] Furthermore, it also includes a real-time monitoring module, which is used to monitor the working status during coating, build a real-time monitoring mechanism, monitor the coating of the square substrate and the ultrasonic nozzle, and arrange multiple sensors near the coating area, including a laser thickness gauge, a temperature sensor, and an image sensor, to obtain multi-parameter data in real time during the coating process. A high-speed camera is used to capture real-time images of the coating area and transmit them to the data control terminal.

[0037] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0038] This square substrate coating uniformity control system based on an ultrasonic nozzle array conducts in-depth analysis of the acquired spraying data, clarifies the correlation between the spraying volume and the spraying area and spraying thickness, and generates a spraying uniformity influence coefficient. The coating control model constructed based on historical data can accurately output predicted coating uniformity data, control the coating effect in advance, judge the compliance and generate the difference, and predict the gap between the actual demand. The system dynamically adjusts the working parameters according to the coating uniformity difference, and ensures that the adjustment instructions take effect in time through a real-time execution mechanism, effectively improving the coating uniformity. The automated process reduces manual intervention, improves production efficiency, and reduces quality risks caused by human factors. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Shown is a schematic diagram of the overall external structure of the present invention. DETAILED DESCRIPTION

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0041] Example 1:

[0042] like Figure 1 As shown, a square substrate coating uniformity control system based on an ultrasonic nozzle array includes a data acquisition module, a coating prediction module, and a coating execution module;

[0043] The data acquisition module is used to obtain the ultrasonic nozzle layout and ultrasonic spraying working parameters, and obtain the spraying data of the ultrasonic nozzle through the sensor. The spraying data includes the spraying distance, spraying area and the coating thickness data after coating on the square substrate;

[0044] The coating prediction module includes a coating analysis unit and a coating prediction unit. The coating analysis unit is used to obtain the spraying data of the ultrasonic nozzle, analyze the correlation between the spraying amount and the spraying area and the spraying thickness according to the spraying data, generate the spraying uniformity influence coefficient, and combine the operating parameters of the ultrasonic spraying during the coating to obtain the working parameter influence factor during the operation of the ultrasonic nozzle;

[0045] The coating prediction unit is used to obtain the historical working parameters of the ultrasonic nozzle layout and ultrasonic spraying, and to build a coating control model for uniformity prediction based on the spraying data to output the predicted coating uniformity data and send it to the coating analysis module;

[0046] The coating analysis module is used to obtain the predicted coating uniformity data, judge the conformity of the coating uniformity with the actual uniformity required according to the current actual uniformity requirement, generate the coating uniformity difference, dynamically adjust the operating parameters according to the coating uniformity difference, obtain the working parameter control data instruction during coating, and send it to the coating execution module;

[0047] The coating execution module is used to receive control instructions, transmit them to the control end of the ultrasonic nozzle in real time according to the control instructions, and adjust the working parameters of the ultrasonic nozzle;

[0048] The system further includes a comprehensive feedback evaluation module, which is used for real-time analysis of the working parameters of the ultrasonic nozzle after adjustment, and includes the following steps:

[0049] Step 1: Obtain the working parameters of the adjusted ultrasonic nozzle and perform comparative analysis based on the actual measured uniformity data values;

[0050] Step 2: Use the standard deviation method to compare the actual measured data with the predicted data to conduct a comprehensive evaluation of the coating uniformity and generate the impact difference that needs to be corrected;

[0051] Step 3: Send the impact difference to the coating prediction module to adjust the relevant parameters of the influencing factors during the operation of the ultrasonic nozzle and make prediction corrections to the coating control model.

[0052] The ultrasonic nozzle array is located above the sprayed substrate. First, a pre-treatment and wetting treatment is performed on the square substrate, and a layer of photoresist thinner is spin-coated. According to the different lengths from the rotation center of the spin-coating station, a special film thickness is set for the glue output; the ultrasonic nozzle array is used to supply glue, so that the coating glue is formed into a film on the sprayed substrate before spin coating, so as to achieve high uniformity coating on the square substrate. The sprayed substrate is rotated to realize the functional integration of ultrasonic nozzle glue supply and spin coating. The control logic of glue uniformity is combined during spraying. Before glue supply, a layer of coating glue thinner is spin-coated on the substrate to increase the wettability of the coating glue and the substrate to increase the uniformity of the coating glue coating.

[0053] Generate spray uniformity influence coefficient, including the following:

[0054] S100, obtaining the collected spray distance, spray area, and coating thickness data during coating of the square base, removing obviously erroneous or abnormal data points, and performing data preprocessing operations;

[0055] S101. Spraying area and spraying thickness are independent variables, spraying amount is dependent variable, spraying area is used as horizontal coordinate, spraying amount is used as vertical coordinate, data points at different spraying distances are plotted on the same graph, and the variation of spraying amount with spraying area within a certain range is observed, and spraying distances are reasonably grouped according to actual conditions;

[0056] S102, using statistical methods to calculate the influence coefficient between the spraying amount, the spraying area, and the spraying thickness. The calculation process is as follows: the spraying area is preset to be A, the coating thickness is h, the spraying amount is m,

[0057] Preliminary calculation of different spray thickness deviation values ​​s: s ,U= , where U is the uniformity, K is the weight influence factor, and n is the number of acquired data. .

[0058] The influencing factors of the working parameters during the operation of the ultrasonic nozzle are obtained, which are specifically as follows:

[0059] S200, obtaining the working parameters of the ultrasonic nozzle during operation and establishing a connection between the working parameters and the spraying data for generating the spraying uniformity influence coefficient, including the spraying distance d, the spraying area A, the coating thickness h, and the spraying amount m;

[0060] S201, grouping the ultrasonic nozzles according to their different operating parameters, dividing them into groups according to different frequencies, and calculating the correlation coefficient between each operating parameter and the spraying data based on the correlation analysis;

[0061] S202. Calculate the correlation between the working parameters of the ultrasonic nozzle during operation and the time of the spraying uniformity influence coefficient. The calculation process is as follows:

[0062] , where U is the uniformity, F is the working parameter influencing factor, are all weight coefficients, q is the set proportional constant, f is the ultrasonic frequency, P is the ultrasonic power, v is the nozzle movement speed, and i={1, 2, 3, …, n}.

[0063] A coating control model for uniformity prediction is constructed based on spraying data, specifically including the following:

[0064] S300, obtaining the operating parameters and spraying data of the ultrasonic nozzle during operation and using them as a sample set for training. The spraying data and operating parameters are used as inputs of the coating control model, and the relationship between the spraying distance, spraying area, nozzle operating parameters and coating thickness is analyzed. The predicted future coating uniformity is used as output. The input data is used to analyze the data association through an algorithm to predict the result;

[0065] S301, the specific steps of algorithm analysis data association are as follows: , where C is the system setting constant, is the parameter influencing factor, Z is the ultrasonic amplitude, are the corresponding influence coefficients, t is the temperature variable, and I is the humidity variable.

[0066] The specific methods for judging the conformity between coating uniformity and actual uniformity requirements include the following:

[0067] S400, obtaining predicted coating uniformity data, judging the conformity of the coating uniformity with the actual uniformity requirement based on the current actual uniformity requirement, and obtaining the actual uniformity error;

[0068] S401, performing comparative analysis based on the obtained actual uniformity error and the set equipment standard error to obtain the error analysis status, including compliance and non-compliance;

[0069] S402: When the error analysis status does not meet the requirements, it is necessary to dynamically adjust the working parameters of the ultrasonic nozzle during operation.

[0070] Obtaining the working parameter control data instructions during coating, specifically including the following:

[0071] S400, dynamically adjusting the operating parameters according to the coating uniformity difference to obtain the operating parameter adjustment data instruction during coating;

[0072] S401. When the coating uniformity difference is less than the set error value, no working parameter control data instruction is generated; when the coating uniformity difference is greater than the set error value, a working parameter control data instruction is generated and transmitted to the device control end for practical control.

[0073] It also includes a real-time monitoring module, which is used to monitor the working status during coating, build a real-time monitoring mechanism, monitor the coating of the square substrate and the ultrasonic nozzle, and arrange multiple sensors near the coating area, including a laser thickness gauge, a temperature sensor, and an image sensor to obtain multi-parameter data in real time. During the coating process, a high-speed camera is used to capture real-time images of the coating area and transmit them to the data control terminal.

[0074] In this solution, the data acquisition module comprehensively collects key data: it can obtain the ultrasonic nozzle layout and ultrasonic spraying working parameters, which is the basic data support for the operation of the entire system;

[0075] Real-time monitoring of spraying status: The sensor can obtain spraying data such as spraying distance, spraying area and coating thickness in real time, so that the system can understand the actual spraying situation in time;

[0076] The coating prediction module generates a spray uniformity influence coefficient by analyzing the correlation between the spray volume, spray area, and spray thickness. It deeply understands the influence of various factors on spray uniformity, considers the influence of operating parameters, and combines the ultrasonic spray operating parameters to obtain the working parameter influence factor. It comprehensively evaluates the effect of different parameters on the final coating effect during the operation of the ultrasonic nozzle, enabling the system to perform more accurate analysis and control under the condition of comprehensive multi-factor integration.

[0077] The coating prediction unit uses historical data modeling to obtain the historical working parameters of the ultrasonic nozzle layout and ultrasonic spraying, and build a coating control model. It makes full use of past data experience and can predict future coating uniformity based on historical conditions.

[0078] Output prediction data to guide work Output predicted coating uniformity data so that the system can understand the coating effect in advance, so as to make corresponding adjustments before the actual coating process, and improve the accuracy and controllability of coating uniformity;

[0079] The coating analysis module accurately determines the degree of compliance. After obtaining the predicted coating uniformity data, it compares it with the actual required uniformity, accurately judging the compliance between the two and clarifying the gap between the current coating situation and the target;

[0080] Dynamically adjust operating parameters to generate coating uniformity differences, and dynamically adjust operating parameters accordingly. This enables the system to adjust operating parameters in real time according to actual conditions to achieve better coating uniformity, improving the system's adaptability and flexibility.

[0081] The coating execution module responds to control instructions in real time, receives control instructions and transmits them to the control end of the ultrasonic nozzle in real time. It can quickly adjust the working parameters of the ultrasonic nozzle to ensure that the system's control instructions can be executed in time, thereby quickly correcting uneven problems that occur during the coating process and ensuring coating quality.

[0082] The size of the interval and threshold is set to facilitate comparison. The size of the threshold depends on the amount of sample data and the number of bases set by technical personnel in this field for each set of sample data; as long as it does not affect the proportional relationship between the parameter and the quantized value.

[0083] The above formulas are all dimensionless and numerical calculations. The formulas are obtained by collecting a large amount of data and performing software simulation to obtain the most recent real situation. The preset parameters in the formulas are set by those skilled in the art according to actual conditions.

[0084] In the two embodiments provided in this application, it should be understood that the disclosed system can be implemented in other ways. For example, the system embodiments described above are merely illustrative. For example, the module division is merely a logical function division. In actual implementation, other division methods may be used. For example, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not implemented. In addition, the mutual coupling or direct coupling or communication connection shown or discussed may be through some interfaces, and the indirect coupling or communication connection between modules may be electrical, mechanical or other forms.

[0085] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A square substrate coating uniformity control system based on an ultrasonic nozzle array, characterized in that: Including data acquisition module, coating prediction module, coating analysis module, coating execution module; The data acquisition module is used to obtain the ultrasonic nozzle layout and ultrasonic spraying working parameters, and obtain the spraying data of the ultrasonic nozzle through the sensor. The spraying data includes the spraying distance, spraying area and the coating thickness data after coating on the square substrate; The coating prediction module includes a coating analysis unit and a coating prediction unit. The coating analysis unit is used to obtain the spraying data of the ultrasonic nozzle, analyze the correlation between the spraying amount and the spraying area and the spraying thickness according to the spraying data, generate the spraying uniformity influence coefficient, and combine the operating parameters of the ultrasonic spraying during the coating to obtain the working parameter influence factor during the operation of the ultrasonic nozzle; The coating prediction unit is used to obtain the historical working parameters of the ultrasonic nozzle layout and ultrasonic spraying, and to build a coating control model for uniformity prediction based on the spraying data to output the predicted coating uniformity data and send it to the coating analysis module; The coating analysis module is used to obtain the predicted coating uniformity data, judge the conformity of the coating uniformity with the actual uniformity required according to the current actual uniformity requirement, generate the coating uniformity difference, dynamically adjust the operating parameters according to the coating uniformity difference, obtain the working parameter control data instruction during coating, and send it to the coating execution module; The coating execution module is used to receive control instructions, transmit the control instructions to the control end of the ultrasonic nozzle in real time, and adjust the working parameters of the ultrasonic nozzle.

2. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: The system further includes a comprehensive feedback evaluation module, which is used for real-time analysis of the working parameters of the ultrasonic nozzle after adjustment, and includes the following steps: Step 1: Obtain the working parameters of the adjusted ultrasonic nozzle and perform comparative analysis based on the actual measured uniformity data values; Step 2: Use the standard deviation method to compare the actual measured data with the predicted data to conduct a comprehensive evaluation of the coating uniformity and generate the impact difference that needs to be corrected; Step 3: Send the impact difference to the coating prediction module to adjust the relevant parameters of the influencing factors during the operation of the ultrasonic nozzle and make prediction corrections to the coating control model.

3. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: Generate spray uniformity influence coefficient, including the following: S100, obtaining the collected spray distance, spray area, and coating thickness data during coating of the square base, removing obviously erroneous or abnormal data points, and performing data preprocessing operations; S101. Spraying area and spraying thickness are independent variables, spraying amount is dependent variable, spraying area is used as horizontal coordinate, spraying amount is used as vertical coordinate, data points at different spraying distances are plotted on the same graph, and the variation of spraying amount with spraying area within a certain range is observed, and spraying distances are reasonably grouped according to actual conditions; S102, using statistical methods to calculate the influence coefficient between the spraying amount, the spraying area, and the spraying thickness. The calculation process is as follows: the spraying area is preset to be A, the coating thickness is h, the spraying amount is m, Preliminary calculation of different spray thickness deviation values ​​s: s ,U= , where U is the uniformity, K is the weight influence factor, and n is the number of acquired data. .

4. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: The influencing factors of the working parameters during the operation of the ultrasonic nozzle are obtained, which are specifically as follows: S200, obtaining the working parameters of the ultrasonic nozzle during operation and establishing a connection between the working parameters and the spraying data for generating the spraying uniformity influence coefficient, including the spraying distance d, the spraying area A, the coating thickness h, and the spraying amount m; S201, grouping the ultrasonic nozzles according to their different operating parameters, dividing them into groups according to different frequencies, and calculating the correlation coefficient between each operating parameter and the spraying data based on the correlation analysis; S202. Calculate the correlation between the working parameters of the ultrasonic nozzle during operation and the time of the spraying uniformity influence coefficient. The calculation process is as follows: , where U is the uniformity, F is the working parameter influencing factor, are all weight coefficients, q is the set proportional constant, f is the ultrasonic frequency, P is the ultrasonic power, v is the nozzle movement speed, and i={1, 2, 3, …, n}.

5. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: A coating control model for uniformity prediction is constructed based on spraying data, specifically including the following: S300, obtaining the operating parameters and spraying data of the ultrasonic nozzle during operation and using them as a sample set for training. The spraying data and operating parameters are used as inputs of the coating control model, and the relationship between the spraying distance, spraying area, nozzle operating parameters and coating thickness is analyzed. The predicted future coating uniformity is used as output. The input data is used to analyze the data association through an algorithm to predict the result; S301, the specific steps of algorithm analysis data association are as follows: , where C is the system setting constant, is the parameter influencing factor, Z is the ultrasonic amplitude, are the corresponding influence coefficients, t is the temperature variable, and I is the humidity variable.

6. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: The specific methods for judging the conformity between coating uniformity and actual uniformity requirements include the following: S400, obtaining predicted coating uniformity data, judging the conformity of the coating uniformity with the actual uniformity requirement based on the current actual uniformity requirement, and obtaining the actual uniformity error; S401, performing comparative analysis based on the obtained actual uniformity error and the set equipment standard error to obtain the error analysis status, including compliance and non-compliance; S402: When the error analysis status does not meet the requirements, it is necessary to dynamically adjust the working parameters of the ultrasonic nozzle during operation.

7. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: Obtaining the working parameter control data instructions during coating, specifically including the following: S400, dynamically adjusting the operating parameters according to the coating uniformity difference to obtain the operating parameter adjustment data instruction during coating; S401. When the coating uniformity difference is less than the set error value, no working parameter control data instruction is generated; when the coating uniformity difference is greater than the set error value, a working parameter control data instruction is generated and transmitted to the device control end for practical control.

8. The square substrate coating uniformity control system based on ultrasonic nozzle array according to claim 1, characterized in that: It also includes a real-time monitoring module, which is used to monitor the working status during coating, build a real-time monitoring mechanism, monitor the coating of the square substrate and the ultrasonic nozzle, and arrange multiple sensors near the coating area, including a laser thickness gauge, a temperature sensor, and an image sensor to obtain multi-parameter data in real time. During the coating process, a high-speed camera is used to capture real-time images of the coating area and transmit them to the data control terminal.

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