Underwater sound sensing assembly and device
By using a phonon crystal structure that selectively transmits sound waves within the target frequency range in the water acoustic sensor, the interference problem of noise acoustic waves on the water acoustic sensor is solved, the signal-to-noise ratio and reliability are improved, and the performance in high-voltage environments is enhanced.
Patent Information
- Application Number
- CN202510488290.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-18
- Publication Date
- 2025-08-01
AI Technical Summary
The water acoustic sensor chip is disturbed by noise sound waves outside the target frequency range, affecting the signal-to-noise ratio and performance reliability.
A phonon crystal structure selectively transmits sound waves within the target frequency range is used as a sound-transmissive membrane, and combined with a sound-transmissive medium, it filters noise sound waves outside the target frequency range to reduce interference to the water acoustic sensor chip.
It improves the signal-to-noise ratio and reliability of the water acoustic sensing components and enhances the working ability in high-voltage environments.
Smart Images
Figure CN120405637A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of underwater acoustic sensors, and particularly to an underwater acoustic sensing component and device. Background Art
[0002] An underwater acoustic sensor is a transducer that converts acoustic signals into electrical signals and is used to receive acoustic signals in water. Underwater acoustic sensors are widely used in scenarios such as underwater communication, detection, target positioning, and tracking. They are important components of devices such as sonars and play important roles in underwater detection, identification, communication, as well as marine environmental monitoring and marine resource development.
[0003] In related technologies, an underwater acoustic sensing component includes a substrate and an underwater acoustic sensor chip disposed on the substrate. Among them, the underwater acoustic sensor chip receives acoustic waves of various frequencies.
[0004] However, the underwater acoustic sensor chip needs to operate within a specified target frequency range to achieve more ideal performance. There are acoustic waves within the target frequency range and noise acoustic waves outside the target frequency range in the external acoustic signal. The noise acoustic waves will interfere with the underwater acoustic sensor chip, affecting the signal-to-noise ratio, and thus affecting the performance and reliability of the underwater acoustic sensing component. Summary of the Invention
[0005] The present disclosure provides an underwater acoustic sensing component and device, which can reduce the interference of noise acoustic waves on the underwater acoustic sensor chip after passing through the sound-transmitting membrane and the sound-transmitting medium in the first cavity, improve the signal-to-noise ratio, and thus improve the performance and reliability of the underwater acoustic sensing component. The technical solution at least includes the following:
[0006] On the one hand, an underwater acoustic sensing component is provided, including: a substrate; a sound-transmitting membrane disposed on the substrate and forming a first cavity with the substrate, the first cavity being filled with a sound-transmitting medium, the sound-transmitting membrane being a phononic crystal structure that selectively transmits acoustic waves within a target frequency range; and an underwater acoustic sensor chip disposed in the first cavity for receiving acoustic waves within the target frequency range.
[0007] Optionally, the phononic crystal structure includes a frame and a plurality of ring column structures. The frame includes a plurality of regular hexagonal cylinder structures arranged in a honeycomb array, and the axes of the regular hexagonal cylinder structures are parallel to the surface of the underwater acoustic sensor chip; each ring column structure is correspondingly disposed in one of the regular hexagonal cylinder structures and is coaxially disposed with the corresponding regular hexagonal cylinder structure. A second cavity is formed between the ring column structure and the corresponding regular hexagonal cylinder structure, and a third cavity is formed inside the ring column structure. The second cavity and the third cavity are filled with the sound-transmitting medium.
[0008] Optionally, the distance between the axes of two adjacent regular hexagonal cylinder structures is from 0.1 mm to 10 mm.
[0009] Optionally, the wall thickness of the frame is from 0.03 mm to 3 mm; the wall thickness of the circular column structure is from 0.03 mm to 3 mm.
[0010] Optionally, the material of the phononic crystal structure is one of tungsten, platinum, copper, iron, and stainless steel.
[0011] Optionally, in the thickness direction of the sound-transmitting membrane, the number of repetition periods of the regular hexagonal cylinder structure is from 5 to 15.
[0012] Optionally, the sound transmission loss of the sound wave within the target frequency range passing through the sound-transmitting membrane is less than 1 dB.
[0013] Optionally, the material of the sound-transmitting medium is air or water.
[0014] Optionally, the underwater acoustic sensing component further includes a sound-transmitting housing having a fourth cavity filled with the sound-transmitting medium, and the substrate, the sound-transmitting membrane, and the underwater acoustic sensor chip are disposed within the fourth cavity.
[0015] On the other hand, there is provided an underwater acoustic sensing device including any one of the foregoing underwater acoustic sensing components.
[0016] The beneficial effects brought by the technical solutions provided in the embodiments of the present disclosure at least include:
[0017] In the embodiments of the present disclosure, by providing a sound-transmitting membrane on a substrate, the sound-transmitting membrane is a phononic crystal structure that selectively transmits sound waves within a target frequency range. That is, when an external sound signal passes through the sound-transmitting membrane, the sound-transmitting membrane can transmit sound waves within the target frequency range and has a certain filtering effect on noise sound waves outside the target frequency range. Therefore, it is possible to reduce the interference caused by noise sound waves to the underwater acoustic sensor chip after passing through the sound-transmitting membrane and the sound-transmitting medium in the first cavity, improve the signal-to-noise ratio, and thus improve the performance and reliability of the underwater acoustic sensing component. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.
[0019] Figure 1 is a schematic structural diagram of an underwater acoustic sensing component provided by an embodiment of the present disclosure;
[0020] Figure 2 It is a schematic structural diagram of a sound-transmitting film provided by an embodiment of the present disclosure;
[0021] Figure 3 It is a schematic partial structural diagram of a phononic crystal structure provided by an embodiment of the present disclosure;
[0022] Figure 4 It is a schematic frequency response diagram when a sound signal passes through the underwater acoustic sensing component in the first embodiment;
[0023] Figure 5 It is a schematic frequency response diagram when a sound signal passes through the underwater acoustic sensing component in the second embodiment;
[0024] Figure 6 It is a schematic frequency response diagram when a sound signal passes through the underwater acoustic sensing component in the third embodiment.
[0025] Reference numerals:
[0026] 10: Substrate; 20: Sound-transmitting film; 21: Frame; 211: Regular hexagonal cylinder structure; 22: Circular cylinder structure; 30: Underwater acoustic sensor chip; 40: First cavity; 41: Second cavity; 42: Third cavity; 43: Fourth cavity; 50: Sound-transmitting housing. Detailed implementation manners
[0027] Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the field to which the present disclosure belongs. The "first", "second", "third" and similar terms used in the specification and claims of the present patent application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, terms such as "a" or "one" do not indicate a quantity limitation, but indicate the existence of at least one. The terms "including" or "comprising" and the like mean that the elements or objects appearing before "including" or "comprising" cover the elements or objects listed after "including" or "comprising" and their equivalents, and do not exclude other elements or objects. The terms "connected" or "coupled" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms "upper", "lower", "left", "right" and the like are only used to indicate relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationships may also change accordingly. A and / or B means there are three cases: A, B, and A and B.
[0028] To make the objectives, technical solutions and advantages of the present disclosure clearer, the following will further describe the embodiments of the present disclosure in detail with reference to the accompanying drawings.
[0029] Figure 1It is a schematic structural diagram of an underwater acoustic sensing component provided by an embodiment of the present disclosure. As Figure 1 shown, the underwater acoustic sensing component includes: a substrate 10; a sound-transmitting membrane 20 disposed on the substrate 10 and forming a first cavity 40 therebetween, the first cavity 40 being filled with a sound-transmitting medium, and the sound-transmitting membrane 20 being a phononic crystal structure that selectively transmits sound waves within a target frequency range; and an underwater acoustic sensor chip 30 disposed within the first cavity 40 for receiving sound waves within the target frequency range.
[0030] In an embodiment of the present disclosure, by disposing the sound-transmitting membrane 20 on the substrate 10, the sound-transmitting membrane 20 is a phononic crystal structure that selectively transmits sound waves within a target frequency range. That is, when an external sound signal passes through the sound-transmitting membrane 20, the sound-transmitting membrane 20 can transmit sound waves within the target frequency range and has a certain filtering effect on noise sound waves outside the target frequency range. Therefore, the interference caused by the noise sound waves to the underwater acoustic sensor chip 30 after passing through the sound-transmitting membrane 20 and the sound-transmitting medium in the first cavity 40 can be reduced, the signal-to-noise ratio can be improved, and thus the performance and reliability of the underwater acoustic sensing component can be improved.
[0031] Optionally, the substrate 10 may be a printed circuit board (PCB), and the underwater acoustic sensor chip 30 is disposed on the surface of the substrate 10 and electrically connected to the substrate 10. After the underwater acoustic sensor chip 30 converts the received sound signal into an electrical signal, the PCB can perform signal processing and transmission.
[0032] Optionally, the underwater acoustic sensor chip 30 may be a micro-electro-mechanical system (MEMS) underwater acoustic sensor chip. The MEMS underwater acoustic sensor chip has the advantages of high sensitivity, miniaturization, and low power consumption, and can effectively reduce costs based on mass production processes.
[0033] Figure 2 It is a schematic structural diagram of a sound-transmitting membrane provided by an embodiment of the present disclosure. Figure 3 It is a partial structural schematic diagram of a phononic crystal structure provided by an embodiment of the present disclosure. Refer to Figures 1 to 3, in the sound transmission membrane 20, the phononic crystal structure includes a frame 21 and a plurality of circular column structures 22. Among them, the frame 21 includes a plurality of regular hexagonal cylinder structures 211 arranged in a honeycomb array, and the axis of the regular hexagonal cylinder structure 211 is parallel to the surface of the underwater acoustic sensor chip 30. Each circular column structure 22 is correspondingly arranged in a regular hexagonal cylinder structure 211 and is coaxially arranged with the corresponding regular hexagonal cylinder structure 211. A second cavity 41 is formed between the circular column structure 22 and the corresponding regular hexagonal cylinder structure 211, and a third cavity 42 is formed inside the circular column structure 22. The second cavity 41 and the third cavity 42 are filled with a sound transmission medium.
[0034] A phononic crystal is a structure in which the density and elastic constant are periodically distributed. Under the action of the periodic structure of the phononic crystal, when an elastic wave propagates in the phononic crystal, a band structure will be generated. In a certain frequency range, the elastic wave is prohibited from propagating (forbidden band), while in other frequency ranges, it can propagate without loss (pass band). These frequency ranges where the elastic wave cannot propagate are called the band gaps of the phononic crystal. By setting the phononic crystal structure in this way, the sound transmission membrane 20 can effectively filter out some sound waves outside the target frequency range, that is, the sound waves in the forbidden band, and the sound waves within the target frequency range, that is, the sound waves in the pass band, can pass through the sound transmission membrane 20 without loss. In addition, by setting the frame 21 in the phononic crystal structure as a plurality of regular hexagonal cylinder structures 211 arranged in a honeycomb array, the pressure resistance performance of the sound transmission membrane 20 can be ensured, and the probability of damage to the underwater acoustic sensor chip 30 arranged in the first cavity 40 in a high-pressure environment such as the deep sea can be reduced, thereby improving the working ability and reliability of the underwater acoustic sensing component in a high-pressure environment.
[0035] Exemplarily, a plurality of regular hexagonal cylinder structures 211 arranged in a honeycomb array and a plurality of circular column structures 22 are fixed by a support plate structure. For example, in the axial direction of the regular hexagonal cylinder structure 211 and the circular column structure 22, the support plate structure can be arranged at both ends of the circular column structure 22 and the regular hexagonal cylinder structure 211.
[0036] Exemplarily, the distance (lattice constant of the phononic crystal) a between the axes of two adjacent regular hexagonal cylinder structures 211 is close to the wavelength λ of the sound wave within the target frequency range. That is to say, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 can be set according to the wavelength λ of the sound wave within the target frequency range, a≈λ, so that the sound wave within the target frequency range can pass through the sound transmission membrane 20 without loss.
[0037] Exemplarily, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 can be adjusted by finite element simulation so that the target frequency range is within the pass band.
[0038] Optionally, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 is 0.1 mm to 10 mm. This is beneficial for making the target frequency range in which the underwater acoustic sensor chip 30 operates fall within the passband.
[0039] Exemplarily, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 can be 0.1 mm, 0.12 mm, 1.2 mm, 5 mm, 10 mm, etc.
[0040] Exemplarily, the size parameters of the phononic crystal structure can be adjusted by finite element simulation so that the stopband can cover all the acoustic waves in the frequency range that needs to be filtered. Here, the size parameters of the phononic crystal can include the wall thickness H1 of the frame 21, the wall thickness H2 of the ring column structure 22, the inner radius R1 of the ring column structure 22, and the outer radius R2 of the ring column structure 22, etc.
[0041] Optionally, the wall thickness H1 of the frame 21 is 0.03 mm to 3 mm.
[0042] Exemplarily, the wall thickness H1 of the frame 21 can be 0.03 mm, 0.04 mm, 0.4 mm, 1.5 mm, 3 mm, etc.
[0043] Optionally, the wall thickness H2 of the ring column structure 22 is 0.03 mm to 3 mm.
[0044] Exemplarily, the wall thickness H2 of the ring column structure 22 can be 0.03 mm, 0.04 mm, 0.4 mm, 1.5 mm, 3 mm, etc.
[0045] Optionally, the inner radius R1 of the ring column structure 22 is 0.04 mm to 0.4 mm.
[0046] Exemplarily, the inner radius R1 of the ring column structure 22 can be 0.04 mm, 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, etc.
[0047] Optionally, the outer radius R2 of the ring column structure 22 is 0.06 mm to 0.6 mm.
[0048] Exemplarily, the outer radius R2 of the ring column structure 22 can be 0.06 mm, 0.2 mm, 0.4 mm, 0.6 mm, etc.
[0049] Exemplarily, the parameters of the material of the phononic crystal structure can be adjusted by finite element simulation, such as adjusting the density of the material and the propagation speed of sound in the material, so that the acoustic waves in the stopband are more attenuated. Materials with a higher density have a better filtering effect on the acoustic waves in the stopband, and the influence of the propagation speed of sound in the material is smaller.
[0050] Optionally, the material of the phononic crystal structure is one of tungsten, platinum, copper, iron, and stainless steel. Using these materials for the phononic crystal structure can effectively ensure a relatively large attenuation of sound waves in the forbidden band.
[0051] In other embodiments, the material of the phononic crystal structure can also be selected as other materials according to needs, and the present disclosure places no restrictions thereon.
[0052] Optionally, in the thickness direction of the sound-transmitting film 20, the number of repetition periods of the regular hexagon cylindrical structure 211 is 5 to 15. This can ensure a relatively large number of repetition periods, thereby ensuring a better filtering effect of the sound-transmitting film 20 on sound waves in the forbidden band.
[0053] Exemplarily, in the thickness direction of the sound-transmitting film 20, the number of repetition periods of the regular hexagon cylindrical structure 211 can be 5, 6, 10, or 15, etc. In other embodiments, the number of repetition periods of the regular hexagon cylindrical structure 211 can be set according to the packaging size limitations of the underwater acoustic sensing component, and the present disclosure places no restrictions thereon.
[0054] Optionally, the sound transmission loss of sound waves in the target frequency range passing through the sound-transmitting film 20 is less than 1 dB. This can ensure that the underwater acoustic sensor chip 30 can receive sound waves in the target frequency range with relatively high quality, which is beneficial to improving the signal-to-noise ratio.
[0055] It should be noted that after setting the material of the phononic crystal structure, the distance a between the axes of two adjacent regular hexagon cylindrical structures 211, the wall thickness H1 of the frame 21, the wall thickness H2 of the circular cylindrical structure 22, the inner radius R1 of the circular cylindrical structure 22, the outer radius R2 of the circular cylindrical structure 22, etc., the filtering performance of the sound-transmitting film 20 can be tested. By measuring the transmission and attenuation characteristics of sound signals in a specific frequency range, the filtering effect of the sound-transmitting film 20 can be verified.
[0056] Optionally, the underwater acoustic sensing component further includes a sound-transmitting housing 50. The sound-transmitting housing 50 has a fourth cavity 43 filled with a sound-transmitting medium. The substrate 10, the sound-transmitting film 20, and the underwater acoustic sensor chip 30 are disposed in the fourth cavity 43. The sound-transmitting housing 50 can effectively protect the substrate 10, the sound-transmitting film 20, and the underwater acoustic sensor chip 30, enabling the underwater acoustic sensing component to better adapt to different environments. Moreover, filling the fourth cavity 43 with a sound-transmitting medium will not affect the quality of the sound waves received by the underwater acoustic sensor chip 30.
[0057] Exemplarily, the sound-transmitting housing 50 is a hemispherical housing, and the substrate 10 is disposed on the bottom surface of the hemispherical housing.
[0058] Exemplarily, the material of the sound-transmitting housing 50 can be polydimethylsiloxane (PDMS).
[0059] Optionally, the material of the sound-transmitting medium is air or water. This can enable the underwater acoustic sensing component to better adapt to different environments and will not affect the quality of the sound waves received by the underwater acoustic sensor chip 30.
[0060] Exemplarily, the material of the sound-transmitting medium can be air or seawater. In other embodiments, the material of the sound-transmitting medium can also be adjusted as needed, and the present disclosure does not limit this.
[0061] The following will describe in conjunction with the frequency response when the sound signal passes through the underwater acoustic sensing components of different embodiments.
[0062] Embodiment 1:
[0063] In Figures 1 to 3 the shown underwater acoustic sensing component, the material of the phononic crystal structure is tungsten, the density of tungsten is 19.4 g / cm 3 ³, the sound propagation speed in tungsten is 4610 m / s, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 is 1.2 mm, the wall thickness H1 of the frame 21 is 0.4 mm, the outer radius R2 of the circular cylinder structure 22 is 0.6 mm, and the inner radius R1 of the circular cylinder structure 22 is 0.4 mm.
[0064] Figure 4 Figure is the frequency response schematic diagram when the sound signal passes through the underwater acoustic sensing component in Embodiment 1. As Figure 4 shown, when the sound signal passes through this underwater acoustic sensing component, the sound transmission loss of the sound waves with a frequency below 20 kHz is less than 1 dB, that is, the sound-transmitting membrane can transmit the sound waves with a target frequency range below 20 kHz, while the sound transmission loss of the sound waves with a frequency above 22 kHz is greater than 70 dB, that is, the sound-transmitting membrane can filter at least part of the sound waves outside the target frequency range.
[0065] Embodiment 2:
[0066] In Figures 1 to 3 the shown underwater acoustic sensing component, the material of the phononic crystal structure is stainless steel, the density of stainless steel is 7.7 g / cm 3 ³, the sound propagation speed in stainless steel is 5664 m / s, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 is 0.12 mm, the wall thickness H1 of the frame 21 is 0.04 mm, the outer radius R2 of the circular cylinder structure 22 is 0.06 mm, and the inner radius R1 of the circular cylinder structure 22 is 0.04 mm.
[0067] Figure 5 Figure is the frequency response schematic diagram when the sound signal passes through the underwater acoustic sensing component in Embodiment 2. As Figure 5As shown, when the acoustic signal passes through the underwater acoustic sensing component, the transmission loss of sound waves with a frequency below 3 MHz is less than 1 dB. That is to say, the sound transmission membrane can transmit sound waves with a frequency below the target frequency range of 3 MHz, while the transmission loss of sound waves with a frequency in the range of 3.5 MHz to 5 MHz and 8 MHz to 9 MHz is greater than 60 dB. That is to say, the sound transmission membrane can filter out some sound waves outside the target frequency range.
[0068] Embodiment Three:
[0069] In Figures 1 to 3 the underwater acoustic sensing component shown, the material of the phononic crystal structure is copper, and the density of copper is 8.9 g / cm 3 , the sound propagation speed in copper is 3810 m / s, the distance a between the axes of two adjacent regular hexagonal cylinder structures 211 is 1.2 mm, the wall thickness H1 of the frame 21 is 0.4 mm, the outer radius R2 of the circular cylinder structure 22 is 0.6 mm, and the inner radius R1 of the circular cylinder structure 22 is 0.4 mm.
[0070] Figure 6 is a schematic diagram of the frequency response when the acoustic signal passes through the underwater acoustic sensing component in Embodiment Three. As Figure 6 shown, when the acoustic signal passes through this underwater acoustic sensing component, the transmission loss of sound waves with a frequency below 300 kHz is less than 1 dB. That is to say, the sound transmission membrane can transmit sound waves with a frequency below the target frequency range of 300 kHz, while the transmission loss of sound waves with a frequency in the range of 308 kHz to 525 kHz and 762 kHz to 871 kHz is greater than 50 dB. That is to say, the sound transmission membrane can filter out some sound waves outside the target frequency range.
[0071] It should be noted that Figures 4 to 6 in the schematic diagram of the frequency response shown, there are two or more absorption peaks outside the target frequency range.
[0072] The embodiments of the present disclosure also provide an underwater acoustic sensing device, and this underwater acoustic sensing device includes the aforementioned underwater acoustic sensing component.
[0073] Optionally, this underwater acoustic sensing device can be an electro-acoustic resonator, such as an acoustic-electric coupling resonator, etc.
[0074] The above are only optional embodiments of the present disclosure, and are not intended to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.
Claims
1. An underwater acoustic sensing component, characterized in that Comprising: A substrate; An acoustic transmission film, disposed on the substrate, and a first cavity is formed between the acoustic transmission film and the substrate. The first cavity is filled with an acoustic transmission medium, and the acoustic transmission film is a phononic crystal structure that selectively transmits sound waves within a target frequency range; And An underwater acoustic sensor chip, disposed within the first cavity, for receiving sound waves within the target frequency range.
2. The underwater acoustic sensing component according to claim 1, characterized in that, The phononic crystal structure includes a frame and a plurality of circular column structures, The frame includes a plurality of regular hexagonal cylinder structures arranged in a honeycomb array, and the axes of the regular hexagonal cylinder structures are parallel to the surface of the underwater acoustic sensor chip; Each of the circular column structures is correspondingly disposed within one of the regular hexagonal cylinder structures and is coaxially disposed with the corresponding regular hexagonal cylinder structure. A second cavity is formed between the circular column structure and the corresponding regular hexagonal cylinder structure, and a third cavity is formed within the circular column structure. The second cavity and the third cavity are filled with the acoustic transmission medium.
3. The underwater acoustic sensing component according to claim 2, characterized in that, The distance between the axes of two adjacent regular hexagonal cylinder structures is 0.1 mm to 10 mm.
4. The underwater acoustic sensing component according to claim 2, wherein The wall thickness of the frame is 0.03 mm to 3 mm; The wall thickness of the circular column structure is 0.03 mm to 3 mm.
5. The underwater acoustic sensing component according to claim 2, wherein The material of the phononic crystal structure is one of tungsten, platinum, copper, iron, and stainless steel.
6. The underwater acoustic sensing component according to any one of claims 2 to 5, characterized in that In the thickness direction of the acoustic transmission film, the number of repetition periods of the regular hexagonal cylinder structures is 5 to 15.
7. The underwater acoustic sensing component according to any one of claims 1 to 5, characterized in that, The sound transmission loss of the sound waves within the target frequency range passing through the acoustic transmission film is less than 1 dB.
8. The underwater acoustic sensing component according to any one of claims 1 to 5, characterized in that The material of the acoustic transmission medium is air or water.
9. The underwater acoustic sensing component according to any one of claims 1 to 5, characterized in that, The underwater acoustic sensing assembly further includes an acoustic transmission housing having a fourth cavity filled with the acoustic transmission medium, and the substrate, the acoustic transmission film, and the underwater acoustic sensor chip are disposed within the fourth cavity.
10. An underwater acoustic sensing device, characterized in that, An underwater acoustic sensing assembly comprising the underwater acoustic sensing assembly according to any one of claims 1 to 9.