Roll angle testing device and method based on interference measurement

Through the rolling angle test device based on interference measurement, the modular quick disassembly and multi-directional adjustment mechanism is adopted to solve the problem of single fixing method and unstable adjustment of the existing device, and efficient and flexible rolling angle testing is achieved, broadening the application range and improving the testing accuracy.

CN120445097AInactive Publication Date: 2025-08-08HUAIYIN TEACHERS COLLEGE
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Patent Information

Application Number
CN202510612873.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-13
Publication Date
2025-08-08
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing rolling angle measurement devices lack flexibility and modularity in the fixed mode, making them difficult to adapt to the testing needs of different types and environments. In addition, the micro-platform is prone to instability during the adjustment process, affecting the test accuracy and reliability.

Method used

The rolling angle test device based on interference measurement is adopted, and the modular quick disassembly mechanism, multi-point adjustment mechanism and up-top adjustment mechanism are used to realize rapid installation and disassembly and multi-directional adjustment. The signal processing is carried out in combination with the interference measurement method to improve the versatility and stability of the device.

Benefits of technology

It realizes flexible adaptation to the objects to be measured in different shapes, sizes and weights, reduces equipment downtime, improves test efficiency and accuracy, and enhances the load-bearing capacity and stability of the device.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a roll angle testing device and method based on interference measurement, and relates to the technical field of roll angle testing devices.The roll angle testing device comprises a first adjusting block, a second adjusting block is installed on the first adjusting block, a rotating disc is installed on the second adjusting block, an arc-shaped supporting block is installed on the rotating disc, and a clamping module is arranged on one side of the arc-shaped supporting block; the system further comprises a modular quick release mechanism, a multi-point adjusting mechanism and a pitching adjusting mechanism. According to the scheme, the five-fine-tuning platform can easily adapt to tested objects with different shapes, sizes and weights by arranging a mechanism capable of being rapidly mounted and dismounted, different test requirements such as roll angle test and translation test can be met by replacing different clamping jaws, the universality and flexibility of the test device are improved, and the test efficiency is improved. And the application range of the testing device is widened. Compared with traditional installation, the scheme has the advantages that the switching process is rapid, the downtime of equipment is greatly shortened, and the test can be continuously and efficiently carried out.
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Description

Technical Field

[0001] The present invention relates to the technical field of roll angle testing devices, and in particular to a roll angle testing device and a testing method based on interferometry. Background Art

[0002] Roll angle describes the angle of rotation of an object around its longitudinal axis (or a specific axis). It is commonly used in fields such as aerospace, robotics, and vehicle engineering to characterize an object's posture or motion. In aircraft, the roll angle reflects the tilt of the wings relative to the horizontal plane; in robotics, the roll angle describes the rotational attitude of the robot's body or components.

[0003] In existing roll angle measurement devices, there are generally limitations in the way the objects being tested are fixed. These devices often use a single fixed fixture to fix the object. This type of fixture design often lacks flexibility and modularity, and is usually set up as a non-removable or difficult-to-remove structure. This single, fixed fixture setting means that the measurement device can only adapt to objects of a specific type or size, and cannot be flexibly adjusted according to actual needs. The shortcomings of the existing design make the roll angle measurement device incapable of meeting the needs of multiple scenarios. For example, when performing roll angle tests in special environments such as high temperature or vacuum, because the fixture cannot be removed or replaced with a special fixture adapted to the special environment, the device often finds it difficult to meet the test requirements, thereby limiting its scope of application. Therefore, the singleness and fixedness of the fixture design of existing roll angle measurement devices have become key factors restricting their multi-scenario application capabilities and testing flexibility.

[0004] Furthermore, current micro-platforms used for roll angle testing have significant limitations during installation and adjustment. These platforms are typically only suitable for adjusting smaller loads, and their adjustment capabilities are limited when faced with larger loads. More critically, micro-platforms are prone to instability during adjustment, manifesting as shaking or vibration. This instability not only interferes with the accuracy of adjustment operations but can also directly adversely affect roll angle measurements, leading to deviations or errors in test results and reducing the reliability and effectiveness of the entire testing process.

[0005] Therefore, a roll angle testing device and testing method based on interferometry are proposed to solve the above problems. Summary of the Invention

[0006] In view of this, the technical problem to be solved by the present invention is to propose a roll angle testing device and a testing method based on interferometry to solve the problems arising in the background technology.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solution: a roll angle test device and test method based on interferometry, comprising:

[0008] S1, system setup and initialization: Arrange the dual-frequency laser, polarization beam splitter, wave plate, reflector, and the rolling micro-platform to be measured in a symmetrical optical path. Fix the corner cube or plane reflector on the object to be measured to ensure that the reflective surface is perpendicular to the incident light. Install the photodetector (PD) and phase meter, and connect them to the computer data acquisition system.

[0009] S2, optical path alignment and calibration, make the optical path horizontal and parallel to the measured motion axis, block the measuring arm, adjust the reference arm reflector so that the interferometer outputs a zero phase difference signal, and use a five-dimensional micro-motion platform to fine-tune the optical path so that the optical path of the two interferometer arms is equal;

[0010] S3, roll angle induction and signal modulation, drives the object to be measured, makes it move linearly along the machine tool guide rail, and applies roll angle disturbance at the same time;

[0011] S4, signal acquisition and processing, the PD receives the interference signal, converts it into an electrical signal, and then inputs it into the phase meter to synchronously measure the linear displacement of the measured object. The displacement and roll angle error are separated by an algorithm and dynamic compensation is performed;

[0012] S5, data verification and error correction, repeat the same roll angle movement multiple times, and calculate the root mean square error of the measurement results.

[0013] The roll angle test method based on interferometry, said S3 specifically also includes:

[0014] S3.1, polarization modulation, the laser is divided into P light and S light by PBS, and enters the reference arm and measurement arm respectively. The optical path of the measurement arm passes through the wave plate twice, and the polarization state is rotated 85 degrees to 90 degrees, and after being combined with the reference light, heterodyne interference is formed.

[0015] S3.2, frequency difference generation, applies a frequency shift to the reference light through an acousto-optic modulator to generate a beat frequency signal.

[0016] The roll angle test device based on interferometric measurement includes a first adjustment block, a second adjustment block is mounted on the first adjustment block, a turntable is mounted on the second adjustment block, an arc-shaped support block is mounted on the turntable, a clamping module is provided on one side of the arc-shaped support block, and further includes a modular quick-release mechanism, a multi-point adjustment mechanism, and a pitch adjustment mechanism;

[0017] The modular quick-release mechanism is provided on the clamping module, and is used for quick disassembly and assembly of the clamping module;

[0018] The multi-point adjustment mechanism is arranged on the side of the modular quick-release mechanism close to the arc-shaped support block, and the multi-point adjustment mechanism is used to adjust the clamping module;

[0019] The pitch adjustment mechanism is arranged on the arc-shaped support block, and is used for controlling the pitch of the modular quick-release mechanism.

[0020] Preferably, the modular quick-release mechanism includes a chuck, a push ring is slidably mounted on the outer surface of one end of the chuck, the chuck and the push ring are connected by a reset spring, the reset spring is evenly arranged on the circumference of the chuck, the chuck is evenly provided with sliding grooves, and an insertion rod is slidably connected in the sliding grooves, a compression spring is sleeved on the outer surface of the insertion rod, one end of the compression spring is fixedly connected to the insertion rod, and the other end of the compression spring is fixedly connected in the sliding groove.

[0021] Preferably, one end of the insertion rod is fixedly connected to an extrusion block, the other end of the insertion rod is provided with an angled surface, and the push ring is provided with an angled extrusion surface on a side close to the extrusion block, and the push ring angled extrusion surface and the extrusion block angled surface squeeze each other.

[0022] Preferably, the multi-point adjustment mechanism includes a support plate, a positioning roller is installed on the inner circumference of the support plate, one end of the positioning roller is rotatably connected to a rotating gear plate, the outer surface of the rotating gear plate is rotatably connected to a protective cover, and the protective cover is fixedly mounted on the support plate.

[0023] Preferably, the other end of the positioning roller is fixedly connected to the chuck, the tooth surface below the rotating gear plate is engaged with meshing teeth, the meshing teeth are rotatably connected to the bottom of the support plate, the middle of the meshing teeth is fixedly connected to a turbine, the turbine tooth surface is engaged with a worm, and the middle of the worm is fixedly connected to an adjusting shaft.

[0024] Preferably, the pitch adjustment mechanism includes an arc frame, which is symmetrically fixed on both sides of the arc support block, and the arc frame is fixed by a fixed shaft. The arc support block is symmetrically installed with an arc limit plate, and an arc sliding tooth plate is slidably connected in the arc limit plate. The adjustment frame is fixedly installed on the side of the arc sliding tooth plate close to the arc frame.

[0025] Preferably, the adjusting frame is rotatably connected to the fixed shaft of the arc frame, a baffle is provided above the arc sliding gear plate, the baffle is fixedly mounted on the adjusting frame, the tooth surface of the arc sliding gear plate is engaged with a driving gear shaft, a damper is installed at the end of the driving gear shaft away from the arc sliding gear plate, the damper is used for damping adjustment, a positioning gear is installed at the end of the damper away from the arc limit plate, a self-locking threaded rod is engaged with the tooth surface of the positioning gear, an adjusting rod is fixedly connected to the middle of the self-locking threaded rod, and an adjusting knob is fixedly connected to the end of the adjusting rod away from the self-locking threaded rod.

[0026] Compared with the prior art, the present invention provides a roll angle test device and test method based on interferometry, which has the following beneficial effects:

[0027] 1. Compared to traditional fine-tuning platforms, this solution incorporates a mechanism that allows for quick installation and removal, allowing the five-stage fine-tuning platform to easily adapt to test objects of varying shapes, sizes, and weights. By replacing different grippers, it can meet diverse testing requirements, such as roll angle testing and translational testing. This improves the versatility and flexibility of the test device and broadens its application range. Compared to traditional installations, this solution significantly reduces equipment downtime due to its rapid switching process, enabling continuous and efficient testing.

[0028] 2. This solution adjusts the adjustment shaft, and the rotation of the adjustment shaft drives the meshing turbine to rotate synchronously. The rotation of the turbine drives the meshing teeth to drive the meshing rotating gear plate to start rotating. The rotation of the rotating gear plate drives the positioning roller to rotate on the inner ring of the support plate. The rotation of the positioning roller can drive the chuck to be adjusted synchronously and quickly. This solution can protect the rotating gear plate from dust through a protective cover. Compared with the traditional fine-tuning platform, when adjusting the angle, the dust and impurities in the air adhere to the tooth surface due to long-term use of the equipment, affecting the adjustment accuracy of the equipment. This solution can not only reduce the contact between the push ring tooth surface and the outside and prevent dust infestation through the setting of the protective cover, but also install a sealing gasket in the support plate to oil the support plate, thereby preventing the equipment from aging and rusting and improving the precise adjustment of the equipment.

[0029] 3. This solution significantly enhances the equipment's overall load-bearing capacity through the coordinated arrangement of curved sliding tooth plates and curved limit plates. Compared to traditional equipment, which is only suitable for installing and adjusting small devices, this solution's innovative design significantly increases the adjustable loads the equipment can withstand, effectively reducing the risk of damage and deformation under load.

[0030] 4. Regarding adjustment, this solution abandons the traditional single-mode adjustment method and adopts a more flexible and efficient adjustment mechanism. Specifically, the operator simply turns the adjustment knob to drive the self-locking threaded rod, which drives the positioning gear to rotate. The rotation of the positioning gear then drives the curved sliding plate to slide on the curved limit plate. The sliding of the curved sliding plate directly drives the clamping module to precisely adjust the overall angle. This design not only enables flexible multi-directional adjustment of the equipment, but also greatly reduces instability caused by the adjustment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0032] Figure 2This is an auxiliary schematic diagram of the three-dimensional structure of the present invention;

[0033] Figure 3 This is a schematic diagram of the structural connection relationship of the modular quick-release mechanism of the present invention;

[0034] Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle;

[0035] Figure 5 This is a schematic diagram of the structural connection relationship of the multi-point adjustment mechanism of the present invention;

[0036] Figure 6 For the present invention Figure 5 Enlarged view of point B in the middle;

[0037] Figure 7 This is a schematic diagram of the structural connection relationship of the pitch adjustment mechanism of the present invention;

[0038] Figure 8 For the present invention Figure 7 Enlarged view of point C in the middle.

[0039] In the picture:

[0040] 1. First adjustment block; 11. Second adjustment block; 12. Turntable; 13. Arc support block; 14. Clamping module;

[0041] 2. Modular quick-release mechanism; 21. Chuck; 22. Push ring; 23. Return spring; 24. Extrusion block; 25. Insert rod; 26. Compression spring;

[0042] 3. Multi-point adjustment mechanism; 31. Support plate; 32. Positioning roller; 33. Rotating gear plate; 34. Protective cover; 35. Adjusting shaft; 36. Worm; 37. Worm wheel; 38. Meshing teeth;

[0043] 4. Pitch adjustment mechanism; 41. Arc frame; 42. Adjustment frame; 43. Baffle; 44. Arc sliding gear plate; 45. Arc limit plate; 46. Drive gear shaft; 47. Damper; 48. Positioning gear; 49. Self-locking threaded rod. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0045] Example 1:

[0046] Refer to the attached Figure 1 To the attached Figure 8 The roll angle test device based on interferometric measurement includes a first adjustment block 1, a second adjustment block 11 is mounted on the first adjustment block 1, a turntable 12 is mounted on the second adjustment block 11, an arc-shaped support block 13 is mounted on the turntable 12, a clamping module 14 is provided on one side of the arc-shaped support block 13, and further includes a modular quick-release mechanism 2, a multi-point adjustment mechanism 3 and a pitch adjustment mechanism 4;

[0047] The modular quick-release mechanism 2 is provided on the clamping module 14 and is used for quick disassembly and assembly of the clamping module 14 ;

[0048] The multi-point adjustment mechanism 3 is arranged on the side of the modular quick-release mechanism 2 close to the arc-shaped support block 13, and the multi-point adjustment mechanism 3 is used to adjust the clamping module 14;

[0049] The pitch adjustment mechanism 4 is provided on the arc-shaped support block 13 and is used to control the pitch of the modular quick-release mechanism 2;

[0050] Specifically, a push ring 22 is slidably mounted on the outer surface of one end of the chuck 21. The chuck 21 and the push ring 22 are connected by a return spring 23. The return spring 23 is evenly arranged on the circumference of the chuck 21. The chuck 21 is evenly provided with a slide groove, and an insertion rod 25 is slidably connected in the slide groove. A compression spring 26 is sleeved on the outer surface of the insertion rod 25. One end of the compression spring 26 is fixedly connected to the insertion rod 25, and the other end of the compression spring 26 is fixedly connected to the slide groove.

[0051] Among them, the clamping module 14 is evenly provided with card slots, and the size of the card slots is adapted to the size of the insertion rod 25. At the same time, the outer surface of the clamping module 14 is evenly provided with limit strips. The limit strips can enable the clamping module 14 to be quickly positioned and installed in the chuck 21 without rotation.

[0052] One end of the insertion rod 25 is fixedly connected to the extrusion block 24, and the other end of the insertion rod 25 is provided with an angled surface. The push ring 22 is provided with an angled extrusion surface on the side close to the extrusion block 24. The angled extrusion surface of the push ring 22 and the inclined surface of the extrusion block 24 are pressed against each other.

[0053] As shown in Table 1 below, this solution presses the push ring 22, and the mutual squeezing of the inclined surface of the push ring 22 and the inclined surface of the squeezing block 24 can drive the squeezing block 24 to drive the insertion rod 25 to separate from the card slot on the clamping module 14, thereby realizing quick disassembly. When the clamping module 14 needs to replace the clamping module 14 with different clamping claws according to the test requirements, at this time, by inserting the clamping module 14 into the chuck 21 along the limit bar, the clamping module 14 squeezes the inclined surface of the insertion rod 25 to drive the insertion rod 25 to move up and down, and at the same time, the compression spring 26 is compressed. When the insertion rod 25 and the card slot of the clamping module 14 are close to each other, the elastic action of the compression spring 26 will drive the insertion rod 25 to engage with the card slot of the clamping module 14, thereby realizing quick installation of the clamping module 14.

[0054] Compared to traditional fine-tuning platforms, this solution incorporates a mechanism that allows for quick installation and removal, allowing the platform to easily adapt to test objects of varying shapes, sizes, and weights. By replacing different grippers, it can meet diverse testing requirements, such as roll angle testing and translational testing. This improves the versatility and flexibility of the test device and broadens its application range. Compared to traditional installations, this solution significantly reduces equipment downtime due to its rapid switching process, enabling continuous and efficient testing.

[0055] index With quick switching device No quick-change device Replacement time <1 minute like snap-on grippers 5-10 minutes to remove the bolts Testing efficiency Continuous testing, downtime < 5% Downtime > 30% Accuracy consistency Automatic calibration, error <0.01° Manual installation, error> 0.1° Applicable Scenarios Supports multiple types of measured objects such as planes / spheres Only supports a single type Maintenance costs Low modular design, wearing parts can be replaced individually High overall disassembly, prone to collateral damage

[0056] Table 1, comparison of the difference between the presence and absence of the quick switching device

[0057] Specifically, as attached Figure 6 As shown, a positioning roller 32 is installed on the inner circumference of the support plate 31. One end of the positioning roller 32 is rotatably connected to a rotating gear plate 33. The outer surface of the rotating gear plate 33 is rotatably connected to a protective cover 34, and the protective cover 34 is fixedly mounted on the support plate 31. The other end of the positioning roller 32 is fixedly connected to the chuck 21. The tooth surface below the rotating gear plate 33 is meshed with meshing teeth 38. The meshing teeth 38 are rotatably connected to the bottom of the support plate 31. The middle part of the meshing teeth 38 is fixedly connected to a turbine 37. The worm on the tooth surface of the turbine 37 has a worm and worm. The middle part of the worm 36 is fixedly connected to an adjusting shaft 35.

[0058] A sealing gasket is installed in the support plate 31, and has good air tightness.

[0059] This solution adjusts the adjustment shaft 35, and the rotation of the adjustment shaft 35 drives the meshing turbine 37 to rotate synchronously. After the turbine 37 rotates, the meshing teeth 38 drive the meshing rotating gear plate 33 to start rotating. The rotation of the rotating teeth drives the positioning roller 32 to rotate on the inner ring of the support plate 31. The rotation of the positioning roller 32 can drive the chuck 21 to be adjusted synchronously and quickly. This solution can protect the rotating gear plate 33 from dust through the protective cover 34. Compared with the traditional fine-tuning platform, when adjusting the angle, the dust and impurities in the air adhere to the tooth surface due to the long-term use of the equipment, which affects the adjustment accuracy of the equipment. This solution can not only reduce the contact between the tooth surface of the push ring 22 and the outside through the setting of the protective cover 34, and prevent dust infestation, but also install a sealing gasket in the support plate 31 to oil the support plate 31, thereby preventing equipment aging and improving the precise adjustment of the equipment.

[0060] Specifically, the arc frame 41 is symmetrically fixed on both sides of the arc support block 13. The arc frame 41 is fixed by a fixed shaft. The arc support block 13 is symmetrically installed with an arc limit plate 45. The arc limit plate 45 is slidably connected to the arc sliding tooth plate 44. The adjustment frame 42 is fixedly installed on the side of the arc sliding tooth plate 44 close to the arc frame 41.

[0061] The adjusting frame 42 is rotatably connected to the fixed shaft of the arc frame 41. A baffle 43 is provided above the arc-shaped sliding gear plate 44. The baffle 43 is fixedly mounted on the adjusting frame 42. The tooth surface of the arc-shaped sliding gear plate 44 is meshed with a driving gear shaft 46. A damper 47 is mounted on the end of the driving gear shaft 46 away from the arc-shaped sliding gear plate 44. The damper 47 is used for damping adjustment. A positioning gear 48 is mounted on the end of the damper 47 away from the arc-shaped limit plate 45. The tooth surface of the positioning gear 48 is meshed with a self-locking threaded rod 49. The middle of the self-locking threaded rod 49 is fixedly connected to an adjusting rod, and the end of the adjusting rod away from the self-locking threaded rod 49 is fixedly connected to an adjusting knob.

[0062] The adjustment frame 42 is fixedly mounted on the support plate 31 .

[0063] This solution significantly enhances the overall load-bearing capacity of the equipment through the coordinated arrangement of the curved sliding tooth plate 44 and the curved limiting plate 45. Compared to traditional equipment that is only suitable for installing and adjusting small devices, this solution's innovative design significantly increases the adjustable load that the equipment can withstand, effectively reducing the risk of damage and deformation under load.

[0064] This solution abandons the traditional single-step adjustment method and adopts a more flexible and efficient adjustment mechanism. Specifically, the operator simply turns the adjustment knob to activate the self-locking threaded rod 49, which drives the positioning gear 48 to rotate. The rotation of the positioning gear 48 then drives the curved sliding plate 44 to slide on the curved limit plate 45. The sliding of the curved sliding plate 44 directly drives the clamping module 14 to precisely adjust the overall angle. This design not only enables flexible, multi-directional adjustment of the device, but also greatly reduces instability during the adjustment process.

[0065] Furthermore, the overall design of this device fully considers ease of use and flexibility. Its compact structure and light weight make it excellent during portability, installation, and operation, greatly enhancing the user experience. In summary, this solution, through its innovative structural design and adjustment mechanism, provides the device with a higher load capacity, more flexible adjustment methods, and a more convenient user experience.

[0066] Example 2:

[0067] 1. Device installation composition.

[0068] Laser light source: emits stable linearly polarized light, such as He-Ne laser, with a wavelength of 632.8nm;

[0069] Interferometer, using Michelson interferometer or Mach-Zehnder interferometer for beam splitting and interference;

[0070] Prism group: The first prism group: contains 1-2 steering prisms, used to guide the light beam to the object to be measured.

[0071] The second prism group: contains 1-2 reflecting prisms, used to guide the reflected light back to the interferometer;

[0072] Reflector: fixed on the surface of the object being measured and rolls with the object.

[0073] Photodetector: receives the interference signal and converts it into an electrical signal (such as a photodiode or CCD);

[0074] Data processing system: Analyzes the signal and calculates the roll angle (such as a computer or embedded system);

[0075] Specific implementation steps;

[0076] Device installation and calibration;

[0077] First, fix the laser light source, interferometer, prism group, reflector and photodetector on the optical platform according to the optical path diagram to ensure the coaxial optical path. At the same time, adjust the direction of the laser light source so that the light beam passes through the interferometer beam splitter to form two coherent light beams. Guide one beam of light to the reflector through the first prism group, and adjust the angle of the reflector so that the reflected light returns along the original path.

[0078] Use the second prism group to guide the reflected light into the other arm of the interferometer, where it interferes with the reference light. The interference fringes are observed on the photodetector, and the position of the prism group is fine-tuned to maximize the fringe contrast.

[0079] Optical path optimization;

[0080] Affix positioning marks to the surface of the reflector to ensure that the light beam always illuminates the center area, move the object to be measured to the initial position, and record the initial phase of the interference signal; compensate for optical path deviation by fine-tuning the prism group (such as using a precision rotation stage) to ensure that the light beam is stable during the rolling process.

[0081] Roll angle measurement;

[0082] Start the object under test to roll (such as through a rotating table or actual moving parts). The photoelectric detector collects the interference signal in real time and outputs the electrical signal to the data processing system. The data processing system calculates the phase change Δφ of the interference signal. The formula is:

[0083]

[0084] Where Δθ is the roll angle, λ is the laser wavelength, and d is the change in the optical path difference from the reflector to the interferometer.

[0085] 4. Data Processing and Calibration

[0086] The collected phase data is filtered (e.g., low-pass filtered) to remove noise, and a mapping relationship between the phase difference and the roll angle is established using a known roll angle (e.g., calibrated using a high-precision turntable). The roll angle value is displayed in real time, and a roll curve is generated.

[0087] Environmental compensation

[0088] Integrated temperature and humidity sensors monitor environmental parameters and correct optical path difference based on the refractive index change formula:

[0089] d 修正 =d·(1+α·(T-T0)+β·(H-H0))

[0090] Where: α and β are temperature and humidity coefficients, and T and H are real-time environmental parameters.

[0091] This method converts roll angle into optical path difference through the geometry of the prism system, combining it with the high sensitivity of an interferometer to achieve precise measurement. Implementation requires careful attention to optical path calibration, prism selection, and environmental control. The specific formula should be tailored to the prism type. In practical applications, it can be combined with a micro-motion stage to flexibly adapt to varying workpiece sizes.

[0092] It should be noted that the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0093] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A roll angle test method based on interferometry, characterized in that: include: S1, system construction and initialization: Arrange the dual-frequency laser, polarization beam splitter, wave plate, reflector, and the rolling micro-platform to be measured in a symmetrical optical path. Fix the corner cube or plane reflector on the object to be measured so that the reflective surface is perpendicular to the incident light. Install the photodetector and phase meter, and connect them to the computer data acquisition system. S2, optical path alignment and calibration, make the optical path horizontal and parallel to the measured motion axis, block the measuring arm, adjust the reference arm reflector so that the interferometer outputs a zero phase difference signal, and use a five-dimensional micro-motion platform to fine-tune the optical path so that the optical path of the two interferometer arms is equal; S3, roll angle induction and signal modulation, drives the object to be measured, makes it move linearly along the machine tool guide rail, and applies roll angle disturbance at the same time; S4, signal acquisition and processing, the PD receives the interference signal, converts it into an electrical signal, and then inputs it into the phase meter to synchronously measure the linear displacement of the measured object. The displacement and roll angle error are separated by an algorithm and dynamic compensation is performed; S5, data verification and error correction, repeat the same roll angle movement multiple times, and calculate the root mean square error of the measurement results.

2. The roll angle test method based on interferometry according to claim 1, characterized in that: Said S3 specifically also includes: S3.1, polarization modulation: The laser is divided into P light and S light by PBS, and enters the reference arm and measurement arm respectively. The measurement arm optical path passes through the wave plate twice, and the polarization state is rotated 85 degrees to 90 degrees. After combining with the reference light beam, heterodyne interference is formed; S3.2, frequency difference generation, applies a frequency shift to the reference light through an acousto-optic modulator to generate a beat frequency signal.

3. A roll angle test device based on interferometry, suitable for the roll angle test method based on interferometry according to any one of claims 1 to 2, characterized in that: The invention comprises a first adjustment block (1), a second adjustment block (11) being mounted on the first adjustment block (1), a turntable (12) being mounted on the second adjustment block (11), an arc-shaped support block (13) being mounted on the turntable (12), a clamping module (14) being provided on one side of the arc-shaped support block (13), and further comprising a modular quick-release mechanism (2), a multi-point adjustment mechanism (3) and a pitch adjustment mechanism (4); The modular quick-release mechanism (2) is arranged on the clamping module (14), and the modular quick-release mechanism (2) is used for quick assembly and disassembly of the clamping module (14); The multi-point adjustment mechanism (3) is arranged on a side of the modular quick-release mechanism (2) close to the arc-shaped support block (13), and the multi-point adjustment mechanism (3) is used to adjust the clamping module (14); The pitch adjustment mechanism (4) is arranged on the arc-shaped support block (13), and the pitch adjustment mechanism (4) is used to control the pitch of the modular quick-release mechanism (2).

4. The roll angle test device based on interferometry according to claim 3, characterized in that: The modular quick-release mechanism (2) includes a chuck (21), a push ring (22) is slidably mounted on the outer surface of one end of the chuck (21), the chuck (21) and the push ring (22) are connected via a return spring (23), the return spring (23) is evenly arranged on the chuck (21), a sliding groove is evenly opened on the chuck (21), and an insertion rod (25) is slidably connected in the sliding groove, a compression spring (26) is sleeved on the outer surface of the insertion rod (25), one end of the compression spring (26) is fixedly connected to the insertion rod (25), and the other end of the compression spring (26) is fixedly connected to the sliding groove.

5. The roll angle test device based on interferometry according to claim 4, characterized in that: One end of the insert rod (25) is fixedly connected to the extrusion block (24), and the other end of the insert rod (25) is provided with an oblique angle surface. The push ring (22) is provided with an oblique angle extrusion surface on a side close to the extrusion block (24). The oblique angle extrusion surface of the push ring (22) and the oblique surface of the extrusion block (24) are mutually extruded.

6. The roll angle test device based on interferometry according to claim 5, characterized in that: The multi-point adjustment mechanism (3) comprises a support plate (31), a positioning roller (32) is mounted on the inner circumference of the support plate (31), one end of the positioning roller (32) is rotatably connected to a rotating gear plate (33), an outer surface of the rotating gear plate (33) is rotatably connected to a protective cover (34), and the protective cover (34) is fixedly mounted on the support plate (31).

7. The roll angle test device based on interferometry according to claim 6, characterized in that: The other end of the positioning roller (32) is fixedly connected to the chuck (21); the tooth surface below the rotating gear plate (33) is meshed with meshing teeth (38); the meshing teeth (38) are rotatably connected to the bottom of the support plate (31); the middle of the meshing teeth (38) is fixedly connected to a turbine (37); the tooth surface of the turbine (37) is meshed with a worm (36); the middle of the worm (36) is fixedly connected to an adjusting shaft (35).

8. The roll angle test device based on interferometry according to claim 3, characterized in that: The pitch adjustment mechanism (4) includes an arc frame (41), the arc frame (41) is symmetrically fixedly installed on both sides of the arc support block (13), the arc frame (41) is fixed by a fixed shaft, the arc support block (13) is symmetrically installed with an arc limiting plate (45), the arc limiting plate (45) is slidably connected with an arc sliding tooth plate (44), and the arc sliding tooth plate (44) is fixedly installed with an adjustment frame (42) on one side close to the arc frame (41).

9. The roll angle test device based on interferometry according to claim 8, characterized in that: The adjusting frame (42) is rotatably connected to the fixed shaft of the arc frame (41); a baffle (43) is provided above the arc-shaped sliding tooth plate (44); the baffle (43) is fixedly mounted on the adjusting frame (42); a driving gear shaft (46) is meshed with a tooth surface of the arc-shaped sliding tooth plate (44); a damper (47) is mounted on one end of the driving gear shaft (46) away from the arc-shaped sliding tooth plate (44); the damper (47) is used for damping adjustment; a positioning gear (48) is mounted on one end of the damper (47) away from the arc-shaped limiting plate (45); a self-locking threaded rod (49) is meshed with a tooth surface of the positioning gear (48); an adjusting rod is fixedly connected to the middle of the self-locking threaded rod (49); and an adjusting knob is fixedly connected to one end of the adjusting rod away from the self-locking threaded rod (49).