Novel flexible electric field sensor based on all-solid-state structure and preparation method thereof

Abstract

The invention discloses a novel flexible electric field sensor based on an all-solid-state structure and a preparation method thereof, and relates to the technical field of electric field measurement. The structure of the sensor comprises an electrolyte region, an organic semiconductor region, an electrode and a substrate, the electrolyte region, the organic semiconductor region and the substrate are sequentially arranged from top to bottom, and the electrodes are arranged on the two sides of the organic semiconductor region; wherein the electrolyte region, the organic semiconductor region, the electrode and the substrate all adopt solid structures, and the substrate adopts a flexible material. The flexible electric field sensor of an all-solid-state structure can be designed, the solid polymer electrolyte is used for replacing traditional liquid electrolyte, the stability and durability of the sensor are improved, and the service life of the sensor is prolonged.

Description

Technical Field

[0001] The present invention relates to the field of electric field measurement technology, and in particular to a novel flexible electric field sensor based on an all-solid-state structure and a preparation method thereof. Background Art

[0002] With the rapid development of wearable devices, smart grids, environmental monitoring, and other fields, the demand for electric field sensors in various applications is growing. Traditional electric field sensors mostly use metal electrodes or liquid electrolytes as the sensing medium. Although these sensors have certain performance advantages, their rigid structure, easily leaky liquid electrolytes, and poor long-term stability limit their use in flexible and deformable applications. Especially in complex and dynamically changing environments, liquid electrolytes are not only susceptible to external perturbations, resulting in performance degradation, but also face problems such as volatilization, corrosion, and leakage, which affect the reliability and service life of the sensor.

[0003] With the advancement of flexible electronic technology, electric field sensors based on flexible materials have emerged. Researchers have successfully realized flexible electric field sensors with high sensitivity and adaptability by using flexible substrates and optimizing the combination of electrode and electrolyte materials. However, existing flexible electric field sensors mostly rely on liquid electrolytes. Although these designs perform well in terms of flexibility and wearability, they still have problems such as poor stability and easy leakage of liquid electrolytes. Solid polymer electrolytes (SPEs) have become a research hotspot for replacing liquid electrolytes due to their high electrochemical stability, mechanical strength and low volatility. However, there are still challenges in combining them with flexible substrates and improving sensor performance. Current technologies have not been able to completely solve the shortcomings of flexible electric field sensors in terms of long-term stability, sensitivity and adaptability. Summary of the Invention

[0004] The purpose of the present invention is to provide a new type of flexible electric field sensor based on an all-solid-state structure and a preparation method thereof, so as to design a flexible electric field sensor with an all-solid-state structure, utilize solid polymer electrolyte to replace traditional liquid electrolyte, and improve the stability, durability and service life of the sensor.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] A new flexible electric field sensor based on an all-solid-state structure includes: an electrolyte region, an organic semiconductor region, an electrode, and a substrate; the electrolyte region, the organic semiconductor region, and the substrate are arranged in sequence from top to bottom, and the electrodes are arranged on both sides of the organic semiconductor region; wherein the electrolyte region, the organic semiconductor region, the electrodes, and the substrate all adopt a solid-state structure, and the substrate adopts a flexible material.

[0007] Optionally, the electrolyte region uses a solid polymer electrolyte, and the solid polymer electrolyte serves as an electric field induction medium.

[0008] The present invention also provides a method for preparing a novel flexible electric field sensor based on an all-solid-state structure, which is used to prepare the sensor as described above, comprising:

[0009] Applying a protective coating on the surface of a flexible substrate and preparing the flexible substrate by heat treatment or cross-linking process; the flexible substrate is made of polydimethylsiloxane or polyparaxylene;

[0010] An electrolyte region and an organic semiconductor region are sequentially prepared on the prepared flexible substrate, and electrodes are prepared on both sides of the organic semiconductor region to obtain a preliminarily prepared flexible electric field sensor;

[0011] The edges of the device connection parts of the preliminarily prepared flexible electric field sensor are sealed with sealing materials to prevent moisture or other corrosive substances from penetrating into the interior of the sensor, thereby obtaining the finally prepared flexible electric field sensor.

[0012] Optionally, the electrolyte region adopts a composite material of a polymer matrix and an ionic electrolyte; wherein the material of the polymer matrix includes but is not limited to polyvinyl alcohol, polyvinyl fluoride and polyacrylonitrile; the material of the ionic electrolyte includes but is not limited to lithium chloride, ammonium sulfate and sodium chloride.

[0013] Optionally, the polymer matrix optimizes the electric field response by adjusting the degree of polymerization, molecular arrangement and cross-linking degree; and the ionic electrolyte matches the structure of the polymer matrix according to ion size, dissociation energy and charge distribution characteristics.

[0014] Optionally, the electrolyte region regulates the crystallization characteristics and molecular stacking structure of the polymer electrolyte by optimizing the selection of solvent, annealing temperature and film formation process parameters.

[0015] Optionally, the protective coating is a fluoride coating or a hydrophobic coating.

[0016] Optionally, the preparation process of the flexible substrate includes:

[0017] Prepare the solution: Use directly 5% Micro-90 solution;

[0018] Apply lubricating material: Spin coating or dip coating is used to form a uniform lubricating film on the rigid substrate;

[0019] Drying: Dry at room temperature for 1 hour to make the lubricating layer uniform and stable;

[0020] Spin coating flexible substrate materials: Spin coating PDMS or Parylene on the Micro-90 treated substrate;

[0021] Curing and stripping: The flexible substrate is cured according to the traditional curing process, and then stripped. After stripping, it is rinsed with deionized water to remove any residual surfactant of Micro-90.

[0022] According to the specific embodiments provided by the present invention, the present invention discloses the following technical effects:

[0023] The present invention discloses a novel flexible electric field sensor based on an all-solid-state structure and a method for fabricating the same. The sensor comprises an electrolyte region, an organic semiconductor region, electrodes, and a substrate. The electrolyte region, organic semiconductor region, and substrate are arranged sequentially from top to bottom, with the electrodes positioned on either side of the organic semiconductor region. The electrolyte region, organic semiconductor region, electrodes, and substrate all employ solid-state structures, and the substrate is constructed of a flexible material. This invention enables the design of an all-solid-state flexible electric field sensor that utilizes a solid polymer electrolyte instead of a traditional liquid electrolyte, improving the sensor's stability, durability, and service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 This is a schematic structural diagram of a novel flexible electric field sensor based on an all-solid-state structure according to the present invention;

[0026] Figure 2 Schematic diagram of the preparation process in this embodiment. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] The purpose of the present invention is to provide a new type of flexible electric field sensor based on an all-solid-state structure and a preparation method thereof, so as to design a flexible electric field sensor with an all-solid-state structure, utilize solid polymer electrolyte to replace traditional liquid electrolyte, and improve the stability, durability and service life of the sensor.

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Current electric field sensor technology faces major challenges, including the instability of liquid electrolytes, poor interfacial compatibility between flexible substrates and organic semiconductor materials, and performance fluctuations over long periods of operation. To address these issues, this paper proposes a novel flexible electric field sensor that utilizes an all-solid-state structure, a solid polymer electrolyte as the electric field sensing medium, and a combination of a solid polymer electrolyte and a flexible substrate. By optimizing material selection, interface design, and electrolyte structure, the sensor's stability, durability, and service life are improved by eliminating the need for traditional electrolytes in flexible devices. The device's fabrication process is also improved to prevent etching of the flexible substrate during wet processing.

[0031] Therefore, the present invention provides Figure 1 A new flexible electric field sensor based on an all-solid-state structure is shown, comprising: an electrolyte region, an organic semiconductor region, an electrode and a substrate; the electrolyte region, the organic semiconductor region and the substrate are arranged in sequence from top to bottom, and the electrodes are arranged on both sides of the organic semiconductor region; wherein the electrolyte region, the organic semiconductor region, the electrode and the substrate all adopt a solid-state structure, and the substrate adopts a flexible material.

[0032] Compared with liquid structures, micro electric field sensors with all-solid-state structures have higher stability and longer service life, are not affected by liquid volatilization, leakage and environmental changes, and are suitable for extreme working conditions. In addition, they are smaller in size, more integrated, and have faster response speeds, making them suitable for high-frequency and transient electric field measurements. A new type of flexible electric field sensor proposed in this embodiment adopts an all-solid-state structure and combines it with a flexible substrate design, enabling it to be widely used in a variety of complex environments, such as wearable devices, embedded applications in smart grids, etc. The sensor uses solid polymer electrolytes as electric field sensing media, avoiding the use of traditional electrolytes in flexible devices, and improving the stability, durability and service life of the sensor. The specific preparation scheme is as follows: Figure 2 As shown:

[0033] 1. All-solid-state structure design

[0034] This invention utilizes an all-solid-state design, using a solid polymer electrolyte as the electric field sensing medium, completely replacing traditional liquid electrolytes. Compared to traditional liquid electrolytes, solid polymer electrolytes not only avoid leakage and evaporation of liquid media in flexible devices, but also significantly improve the stability, durability, and service life of the sensor. The use of solid electrolytes effectively enhances mechanical strength and chemical stability, enabling it to withstand stress and corrosion under changing external environments.

[0035] 2. Selection and optimization of solid polymer electrolyte materials

[0036] (1) Material selection: The selected solid polymer electrolyte is composed of a composite material of a polymer matrix and an ionic electrolyte. The polymer matrix material can be polyvinyl alcohol (PVA), polyvinyl fluoride (PVDF), polyacrylonitrile (PAN), etc., which have good electrical conductivity and chemical stability. The ionic electrolyte material can be lithium chloride (LiCl), ammonium sulfate (NH 42 Ionic compounds with different dissociation energies and charge distributions, such as SO4 and sodium chloride (NaCl), can form stable ion conductive channels in solid polymers.

[0037] (2) Microstructure optimization: The selection of the polymer matrix should take into account its polarity and structural properties. The electric field response can be optimized by adjusting the degree of polymerization, molecular arrangement, and cross-linking. Polymers with high polymerization degrees can increase the dispersion of ionic electrolytes and improve ionic conductivity. The selection of ionic electrolytes should match the structure of the polymer matrix based on their ion size, dissociation energy, and charge distribution characteristics to ensure optimal ion migration rate and electric field sensitivity.

[0038] (3) Solution preparation and film formation process: The crystallization characteristics and molecular stacking structure of the polymer electrolyte are regulated by optimizing the solvent selection, annealing temperature, and film formation process parameters. Reasonable solvent selection and annealing process can improve the mechanical properties and ionic conductivity of the electrolyte membrane. By adjusting the ratio of polymer matrix to ionic electrolyte, the ionic conductivity of the polymer electrolyte can be adjusted to meet the needs of different application scenarios.

[0039] 3. Selection and Preparation of Flexible Substrates

[0040] (1) Material selection: The substrate is made of flexible materials such as polydimethylsiloxane (PDMS) or parylene. PDMS has good flexibility, transparency, and biocompatibility, making it ideal for wearable devices and embedded sensors. Parylene has better chemical stability and water resistance, making it suitable for applications that require long-term exposure to harsh environments.

[0041] (2) Preparation process: In the process of preparing flexible devices, it is usually necessary to coat a layer of surfactant on a non-flexible substrate (such as glass, silicon wafer), and then spin-coat the flexible substrate material so that the flexible device can be smoothly peeled off. This patent selects Micro-90 as a water-based surfactant for the peeling layer in the preparation of flexible devices to reduce the adhesion between the flexible substrate and the non-flexible substrate, facilitating subsequent peeling. Its advantages include excellent wettability, water solubility, chemical mildness, and compatibility with a variety of substrates. The specific operation when using it is as follows:

[0042] Preparation of solution: Directly use 5% Micro-90 solution.

[0043] Apply lubricating material: Use spin coating (1000 rpm, 30 s) or dip coating to form a uniform lubricating film on the rigid substrate.

[0044] Drying: Dry at room temperature for 1 hour to make the lubricating layer uniform and stable.

[0045] Spin coating flexible substrate materials: Spin coating flexible materials such as PDMS and Parylene on the Micro-90 treated substrate.

[0046] Cure and peel: Cure the flexible substrate according to the normal curing process, then gently peel it off. After peeling, rinse with deionized water to remove any residual surfactant from Micro-90.

[0047] 4. Technology to prevent corrosion of flexible substrates during device fabrication

[0048] (1) Surface coating technology: Applying a protective coating (such as a fluoride coating or a hydrophobic coating) on the surface of a flexible substrate can effectively prevent the corrosion of the substrate by chemicals during the wet processing step. The coating can also increase the hydrophobicity of the substrate, avoiding the influence of liquids and moisture.

[0049] (2) Sealing technology: Use sealing materials (such as polytetrafluoroethylene (PTFE) film or epoxy resin) to seal the edges of the device's connection parts to prevent moisture or other corrosive substances from penetrating into the sensor.

[0050] (3) Heat treatment and cross-linking: For PDMS and other flexible materials, the chemical stability of the material is improved through heat treatment or cross-linking process, making it less susceptible to environmental corrosion during long-term use.

[0051] It can be seen that this embodiment has the following beneficial effects:

[0052] The all-solid-state flexible electric field sensor of the present invention significantly improves the stability, durability and sensitivity of the sensor by adopting a combination of a solid polymer electrolyte and a flexible substrate. The solid polymer electrolyte replaces the traditional liquid electrolyte, avoiding problems such as leakage, volatilization and corrosion, thereby ensuring the electrochemical stability of the sensor in long-term use, while having a faster response speed and being suitable for high-frequency and transient electric field measurements. In addition, the flexible substrate enables the sensor to adapt to complex and dynamic application environments, and is particularly suitable for embedded applications in wearable devices and smart grids, with high flexibility and adaptability. By optimizing the selection of materials and interface bonding, the present invention not only improves the performance and reliability of the sensor, but also simplifies the manufacturing process, enhances its feasibility of large-scale production, and meets the multiple requirements of modern electric field sensors in terms of performance, stability and adaptability.

[0053] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0054] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A new flexible electric field sensor based on an all-solid-state structure, characterized in that: include: An electrolyte region, an organic semiconductor region, an electrode and a substrate; the electrolyte region, the organic semiconductor region and the substrate are arranged in sequence from top to bottom, and the electrodes are arranged on both sides of the organic semiconductor region; wherein the electrolyte region, the organic semiconductor region, the electrode and the substrate all adopt a solid structure, and the substrate adopts a flexible material.

2. The novel flexible electric field sensor based on an all-solid-state structure according to claim 1 is characterized in that: The electrolyte region uses a solid polymer electrolyte, which serves as an electric field induction medium.

3. A method for preparing a novel flexible electric field sensor based on an all-solid-state structure, for preparing the sensor according to any one of claims 1-2, characterized in that: include: Applying a protective coating on the surface of the flexible substrate and preparing the flexible substrate by heat treatment or cross-linking process; The flexible substrate is made of polydimethylsiloxane or polyparaxylene; An electrolyte region and an organic semiconductor region are sequentially prepared on the prepared flexible substrate, and electrodes are prepared on both sides of the organic semiconductor region to obtain a preliminarily prepared flexible electric field sensor; The edges of the device connection parts of the preliminarily prepared flexible electric field sensor are sealed with sealing materials to prevent moisture or other corrosive substances from penetrating into the interior of the sensor, thereby obtaining the finally prepared flexible electric field sensor.

4. The method for preparing a novel flexible electric field sensor based on an all-solid-state structure according to claim 3, characterized in that: The electrolyte region adopts a composite material composed of a polymer matrix and an ionic electrolyte; wherein the material of the polymer matrix includes but is not limited to polyvinyl alcohol, polyvinyl fluoride and polyacrylonitrile; the material of the ionic electrolyte includes but is not limited to lithium chloride, ammonium sulfate and sodium chloride.

5. The method for preparing a novel flexible electric field sensor based on an all-solid-state structure according to claim 4, characterized in that: The polymer matrix optimizes the electric field response by adjusting the degree of polymerization, molecular arrangement and cross-linking degree; the ion electrolyte matches the structure of the polymer matrix according to ion size, dissociation energy and charge distribution characteristics.

6. The method for preparing a novel flexible electric field sensor based on an all-solid-state structure according to claim 3, characterized in that: The electrolyte region regulates the crystallization characteristics and molecular stacking structure of the polymer electrolyte by optimizing the selection of solvent, annealing temperature and film formation process parameters.

7. The method for preparing a novel flexible electric field sensor based on an all-solid-state structure according to claim 3, characterized in that: The protective coating is a fluoride coating or a hydrophobic coating.

8. The method for preparing a novel flexible electric field sensor based on an all-solid-state structure according to claim 3, characterized in that: The preparation process of the flexible substrate includes: Prepare the solution: Use directly 5% Micro-90 solution; Apply lubricating material: Spin coating or dip coating is used to form a uniform lubricating film on the rigid substrate; Drying: Dry at room temperature for 1 hour to make the lubricating layer uniform and stable; Spin coating flexible substrate materials: Spin coating PDMS or Parylene on the Micro-90 treated substrate; Curing and stripping: The flexible substrate is cured according to the traditional curing process, and then stripped. After stripping, it is rinsed with deionized water to remove any residual surfactant of Micro-90.

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