Video acquisition assistance device, video acquisition assistance method, and storage medium storing program

Abstract

The invention provides a video acquisition assistance apparatus, a video acquisition assistance method, and a storage medium storing a program. Provided is a technique capable of efficiently acquiring a video of an operation of an operation screen of an operation device. A video acquisition assistance device (40) is provided with a control module (950) configured so as to control an operation device (30), and the control module executes a specific control process including: a video acquisition process for acquiring a video of an operation of an operation screen (30a) when an operator (OP) operates the operation screen (30a) of the operation device; a meta-information addition process for adding, to the acquired video, meta-information including at least the operation content operated by the operator on the operation screen; and a video storage process in which the acquired video is stored in a storage device (952) together with meta information added to the video.

Description

Technical Field

[0001] The present invention relates to a video acquisition assistance device, a video acquisition assistance method, and a storage medium storing a program. Specifically, it relates to a video acquisition assistance device for an operation screen of an operating device, a video acquisition assistance method, and a storage medium storing a program. This application claims priority based on Japanese Patent Application No. 2024-016076, filed on February 6, 2024. The entire disclosure of Japanese Patent Application No. 2024-016076, including the specification, claims, drawings, and abstract, is incorporated herein by reference in its entirety. Background Art

[0002] Conventionally, for example, a substrate processing apparatus configured to process a substrate is known (see Patent Document 1). Specifically, Patent Document 1 discloses a substrate processing apparatus configured to perform plasma processing on a substrate. Furthermore, conventionally, such a substrate processing apparatus includes an operating device having an operation screen operated by an operator.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2014-164482

[0004] Typically, operators need a certain period of time (training period) to learn how to operate the operation screen of an operating device. If it were possible to effectively capture a video of the operation screen, the operator could quickly learn how to operate the operation screen by, for example, watching the video during training. However, the technology for effectively capturing such a video of the operation screen has not been fully developed. Summary of the Invention

[0005] The present invention has been made in view of the above-mentioned circumstances, and one of its objects is to provide a technology capable of efficiently acquiring a video of an operation on an operation screen of an operation device.

[0006] (Method 1)

[0007] In order to achieve the above-mentioned purpose, a video acquisition auxiliary device involved in one embodiment of the present invention is a video acquisition auxiliary device of an operating device having an operating screen operated by an operator, and is characterized in that it has a control module configured in a manner for controlling the above-mentioned operating device, and the above-mentioned control module performs specific control processing, and the above-mentioned specific control processing includes: video acquisition processing, which acquires a video of the operation of the above-mentioned operating screen when the above-mentioned operator operates the above-mentioned operating screen of the above-mentioned operating device; meta-information appending processing, which appends meta-information of at least the operation content operated by the above-mentioned operator in the above-mentioned operating screen to the acquired video; and video storage processing, which stores the acquired video together with the above-mentioned meta-information appended to the video in a storage device.

[0008] According to this method, a video of the operation screen of the operating device when the operator operates the operation screen can be stored in the storage device together with meta-information including at least the details of the operation performed by the operator on the operation screen. This allows efficient acquisition of the video of the operation screen of the operating device.

[0009] (Method 2)

[0010] Alternatively, based on the above-mentioned method 1, the above-mentioned control module executes the above-mentioned specific control processing multiple times, so that the above-mentioned storage device stores multiple videos, and executes video display processing. The above-mentioned video display processing is based on the operation content operated by the above-mentioned operator in the above-mentioned operation screen, and selects the above-mentioned video associated with the operation content from the multiple videos stored in the above-mentioned storage device and displays the video on the display device.

[0011] According to this aspect, the operator can quickly learn how to operate the operation screen of the operating device by viewing and listening to the video displayed on the display device while operating the operation screen of the operating device.

[0012] (Method 3)

[0013] Alternatively, based on the above-mentioned method 2, the above-mentioned display device is configured to be able to input words, the above-mentioned meta-information includes the above-mentioned input words, and the above-mentioned control module selects the above-mentioned video associated with the above-mentioned input words in the above-mentioned video display processing and displays the video on the above-mentioned display device.

[0014] (Method 4)

[0015] Alternatively, based on the above-mentioned method 2 or 3, the above-mentioned display device is configured to be able to input operator identification information for identifying the above-mentioned operator operating the above-mentioned operating device, the above-mentioned meta-information includes the above-mentioned operator identification information, and the above-mentioned control module selects the above-mentioned video associated with the above-mentioned operator operating the above-mentioned operation screen of the above-mentioned operating device based on the above-mentioned operator identification information in the above-mentioned video display processing and displays the video on the above-mentioned display device.

[0016] (Method 5)

[0017] Alternatively, based on any one of the above-mentioned methods 1 to 4, the above-mentioned control module also performs external video reading processing, and the above-mentioned external video reading processing reads in the video of the operation of the above-mentioned operation screen of the above-mentioned operation device operated by the above-mentioned operator obtained by the external video acquisition device, that is, the external video.

[0018] (Method 6)

[0019] In order to achieve the above-mentioned purpose, a video acquisition assistance method involved in one embodiment of the present invention is a video acquisition assistance method for an operating device having an operation screen operated by an operator, which includes the following steps: a control module configured in a manner to control the above-mentioned operating device performs video acquisition processing, and in the above-mentioned video acquisition processing, a video of the operation of the above-mentioned operation screen when the above-mentioned operator operates the above-mentioned operation screen of the above-mentioned operating device is acquired; the above-mentioned control module performs meta-information addition processing, and in the above-mentioned meta-information addition processing, meta-information including at least the operation content operated by the above-mentioned operator in the above-mentioned operation screen is added to the acquired video; and the above-mentioned control module performs video storage processing, and in the above-mentioned video storage processing, the acquired video is stored in a storage device together with the above-mentioned meta-information attached to the video.

[0020] According to this method, a video of the operation screen of the operating device when the operator operates the operation screen can be stored in the storage device together with meta-information including at least the details of the operation performed by the operator on the operation screen. This allows efficient acquisition of the video of the operation screen of the operating device.

[0021] (Method 7)

[0022] In order to achieve the above-mentioned purpose, a storage medium for storing a program involved in one embodiment of the present invention enables a computer to perform specific control processing, and the above-mentioned specific control processing includes: video acquisition processing, which acquires a video of the operation of the above-mentioned operation screen when the operator operates the operation screen of the operation device; meta-information addition processing, which adds meta-information including at least the operation content of the operation performed by the above-mentioned operator on the above-mentioned operation screen to the acquired above-mentioned video; and video storage processing, which stores the acquired above-mentioned video together with the above-mentioned meta-information attached to the video in a storage device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is an overall configuration diagram of a substrate processing apparatus according to an embodiment.

[0024] Figure 2 It is a schematic diagram showing the overall structure of a video acquisition support device according to an embodiment.

[0025] Figure 3 It is a schematic diagram showing an example of an operation screen of an operating device and a display screen of a display device according to the embodiment.

[0026] Figure 4 Schematic diagram showing an example of changes in a display screen of a display device according to an embodiment.

[0027] Figure 5This is a schematic diagram showing an example of a worker list according to the embodiment.

[0028] Figure 6 This is an example of a flowchart for explaining a series of processes from the start of video acquisition to video storage according to the embodiment.

[0029] Figure 7 This is an example of a flowchart for explaining a process for displaying a video on a display device according to an embodiment.

[0030] Figure 8 This is an example of a flowchart for explaining processing related to reading of an external video according to Modification 1 of the embodiment.

[0031] Figure 9 It is a schematic diagram showing an example of the hardware configuration of a control module according to the embodiment.

[0032] Description of Reference Numerals

[0033] 1...substrate processing device; 30...operating device; 30a...operation screen; 40...video acquisition auxiliary device; 50...display device; 950...control module (or computer); 951...processor (or computer); 952...storage device; OP...operator. DETAILED DESCRIPTION

[0034] The following describes embodiments of the present invention with reference to the accompanying drawings. The drawings are schematic illustrations to facilitate understanding of the features of the embodiments and are not limited to the case where the dimensional ratios of the various components are identical to those in actual situations. Furthermore, several drawings illustrate X, Y, and Z orthogonal coordinates for reference purposes. The Z direction in these orthogonal coordinates corresponds to the upward direction, and the -Z direction corresponds to the downward direction (the direction in which gravity acts).

[0035] As an example, the video acquisition assistance device 40 of the operating device 30 according to this embodiment is applied to a substrate processing apparatus 1 configured to process a substrate WF. Specifically, the video acquisition assistance device 40 according to this embodiment is a device for assisting in capturing video of the operation screen 30a of the operating device 30 of the substrate processing apparatus 1. Therefore, the overview of the substrate processing apparatus 1 will be first described, followed by a description of the structure of the video acquisition assistance device 40.

[0036] Figure 1: This is an overall configuration diagram of a substrate processing apparatus 1 according to this embodiment. The specific type of substrate processing apparatus 1 is not particularly limited as long as it is an apparatus capable of processing substrates WF. However, in this embodiment, a plating apparatus 1000 that performs a plating process on substrates WF is used as an example of the substrate processing apparatus 1. However, the substrate processing apparatus 1 is not limited to the plating apparatus 1000. For example, a polishing apparatus that performs a polishing process on substrates WF, a plasma processing apparatus that performs a plasma process on substrates WF, or other well-known substrate processing apparatuses can be used as the substrate processing apparatus 1.

[0037] As Figure 1 The plating device 1000, which is an example of the illustrated substrate processing device 1, includes: a loading port 100, a conveying robot 110, a loading platform 120, an unloading platform 130, a loader 140, a fixing module 200, a storage module 300, an exchange module 310, a retaining rack cleaning module 320, a pre-wetting module 400, a pre-dip module 500, a pre-dip cleaning module 510, a plating module 600, a plating cleaning module 700, a blowing module 710, a temporary placement module 720, a cleaning module 800, a conveying device 900 and a control module 950.

[0038] The load port 100 is a module used to load substrates (WF) stored in a cassette (not shown) such as a FOUP (Front Opening Unify Pod) into the plating apparatus 1000, or to unload substrates (WF) from the plating apparatus 1000. In this embodiment, four load ports 100 are arranged horizontally, but the number and arrangement of load ports 100 are arbitrary. The transfer robot 110 is a robot used to transport substrates (WF) horizontally and is configured to transfer substrates (WF) between the load ports 100 and the loading platform 120.

[0039] The loading station 120 is a workstation for transferring substrates WF before plating between the transfer robot 110 and the loader 140. The unloading station 130 is a workstation for transferring substrates WF after plating between the transfer robot 110 and the loader 140. The loader 140 is a robot for horizontally transferring substrates WF and is configured to transfer substrates WF between the loading station 120, the unloading station 130, the fixing module 200, and the cleaning module 800.

[0040] The fixing module 200 is a module for attaching a substrate WF to a substrate holder 210 or for removing a substrate WF from the substrate holder 210. The storage module 300 is a module for storing the substrate holder 210 in a vertical position. The exchange module 310 is a module for temporarily storing substrate holders 210 that need to be replaced or maintained, and is configured to allow the substrate holders 210 to be brought in and out. The substrate holder 210 removed from the exchange module 310 can be maintained within the plating apparatus 1000 or taken out for maintenance outside the plating apparatus 1000, allowing the maintained substrate holder 210 or a new substrate holder 210 to be brought into the exchange module 310. The holder cleaning module 320 is a module for cleaning the substrate holder 210.

[0041] The pre-wet module 400 is a module for wetting the plated surface of a substrate WF prior to plating with a process liquid such as pure water or degassed water, thereby replacing the air within the pattern formed on the substrate surface with the process liquid. The pre-wet module 400 is configured to perform a pre-wet treatment that facilitates the supply of the plating liquid into the pattern by replacing the process liquid within the pattern with the plating liquid during plating.

[0042] The pre-dip module 500 is configured to perform a pre-dip treatment, which uses a treatment solution such as sulfuric acid or hydrochloric acid to etch away a highly resistive oxide film, such as that formed on the surface of a seed layer on the plated surface of a substrate (WF) prior to plating, thereby cleaning or activating the surface of the plated base. The pre-dip cleaning module 510 is a module for cleaning substrates (WF) that have undergone the pre-dip treatment.

[0043] The plating module 600 is a module for performing a plating process on the substrate WF. The plating cleaning module 700 is a module for cleaning the substrate WF in order to remove the plating liquid and the like remaining on the substrate WF after the plating process. In this embodiment, three plating modules 600 and plating cleaning modules 700 are arranged horizontally, but the number and configuration of the plating modules 600 and the plating cleaning modules 700 are arbitrary. The blowing module 710 is a module for drying the substrate WF after the cleaning process. The temporary placement module 720 is a module for temporarily placing the substrate holder 210 mounted with the substrate WF in order to transfer it between multiple conveying devices 900. In this embodiment, the number of substrate holders 210 that can be accommodated in the temporary placement module 720 is one, but its number is arbitrary.

[0044] The cleaning module 800 is a module used to clean and dry the substrates WF after plating, removing any residual plating solution and the like from the substrates WF after removal from the substrate holder 210. In this embodiment, two cleaning modules 800 are arranged horizontally with the loading station 120 and the unloading station 130 interposed between them, but the number and arrangement of the cleaning modules 800 are arbitrary. The transport device 900 is a device used to vertically transport the substrate holder 210 between the multiple modules within the plating apparatus 1000. In this embodiment, three transport devices 900 are arranged in parallel, but the number and arrangement of the transport devices 900 are arbitrary.

[0045] The control module 950 is configured to control a plurality of modules of the plating apparatus 1000 and can be configured by, for example, a general computer or a dedicated computer having an input / output interface between the control module 950 and an operator.

[0046] An example of a plating process sequence using the plating apparatus 1000 will be described. First, substrates WF stored in a cassette are loaded into the load port 100. Next, the transport robot 110 removes the substrates WF from the cassette in the load port 100 and places them on the loading platform 120. The loader 140 receives the substrates WF from the loading platform 120 and transfers them to the fixing module 200.

[0047] The fixing module 200 mounts the substrate WF on the substrate holder 210. The conveying device 900 conveys the substrate holder 210 with the substrate WF mounted thereon to the pre-wet module 400. The pre-wet module 400 performs a pre-wet treatment on the substrate WF. The conveying device 900 conveys the substrate holder 210 with the substrate WF that has undergone the pre-wet treatment mounted thereon to the pre-preg module 500. The pre-preg module 500 performs a pre-preg treatment on the substrate WF. The conveying device 900 conveys the substrate holder 210 with the substrate WF that has undergone the pre-preg treatment mounted thereon to the pre-preg cleaning module 510. The pre-preg cleaning module 510 cleans the substrate WF. The conveying device 900 conveys the substrate holder 210 with the substrate WF that has undergone the cleaning treatment mounted thereon to the plating module 600. The plating module 600 performs a plating treatment on the substrate WF.

[0048] The transport device 900 transports the substrate holder 210, on which the plated substrate WF is mounted, to the plating cleaning module 700. The plating cleaning module 700 performs a cleaning process on the substrate WF and the substrate holder 210. The transport device 900 transports the substrate holder 210, on which the cleaned substrate WF is mounted, to the blowing module 710. The blowing module 710 performs a drying process on the substrate WF. The transport device 900 transports the substrate holder 210, on which the dried substrate WF is mounted, to the temporary placement module 720. Another transport device 900 transports the substrate holder 210 from the temporary placement module 720 to the fixing module 200. The fixing module 200 removes the substrate WF from the substrate holder 210.

[0049] The loader 140 transports the plated substrates WF, removed from the substrate holder 210, to the cleaning module 800. The cleaning module 800 performs cleaning and drying on the substrates WF. The loader 140 places the cleaned and dried substrates WF on the unloading station 130. The transfer robot 110 receives the substrates WF from the unloading station 130 and transfers them to a cassette on the load port 100. Finally, the cassette containing the substrates WF is unloaded from the load port 100.

[0050] The substrate holder 210 from which the substrate WF has been removed in the fixing module 200 is loaded with the next substrate WF or returned to the storage module 300 by the transfer device 900. The substrate holder 210 not holding the substrate WF is cleaned by the holder cleaning module 320 as needed.

[0051] Furthermore, the substrate processing apparatus 1 (as an example, the plating apparatus 1000) according to the present embodiment includes an operating device 30 that can be operated by an operator OP. Specifically, the operating device 30 includes an operating screen 30a that can be operated by the operator OP. An example of the operating screen 30a is shown in FIG. Figure 2 、 Figure 3 The operating device 30 is electrically connected to the control module 950. Operation information on the operation screen 30a of the operating device 30 is transmitted to the control module 950. The details of the operating device 30 will be described later.

[0052] The control module 950 involved in this embodiment includes a microcomputer. The microcomputer of the control module 950 may also be as follows Figure 9As shown in the example, the control module 950 includes a processor 951, a storage device 952 as an example of a non-transitory storage medium, and the like. The storage device 952 may also include, for example, a ROM (Read Only Memory) 953, a RAM (Random Access Memory) 954, and the like. The control module 950 controls the controlled portion of the substrate processing apparatus 1 (for example, the plating apparatus 1000) by causing the processor 951 to operate according to instructions of a program stored in the storage device 952.

[0053] In addition, the following Figure 6 、 Figure 7 、 Figure 8 Each step of the flowchart is implemented by causing the control module 950 (specifically, the processor 951), which is an example of a computer, to execute a program stored in, for example, a storage device 952, which is an example of a storage medium. Alternatively, the storage medium storing the program may be, for example, a CD-ROM (Compact Disk Read Only Memory), a USB (Universal Serial Bus) memory, or any other known storage medium.

[0054] The structure of the substrate processing apparatus 1 described above is merely an example, and the structure of the substrate processing apparatus 1 is not limited to the above structure. Furthermore, the substrate processing apparatus 1 according to this embodiment is configured to be switchable between an "automatic mode" in which the series of substrate processing (e.g., plating processing) described above is automatically performed under the control of the control module 950, and a "manual mode" in which the series of substrate processing is performed based on the operation of the operator OP.

[0055] Next, the video acquisition support device 40 will be described. Figure 2 : is a schematic diagram showing the overall structure of the video acquisition auxiliary device 40. Figure 2 An example of a situation in which an operator OP operates an operation screen 30 a of an operation device 30 of a video acquisition support device 40 described later is also schematically illustrated. Figure 3 1 is a schematic diagram showing an example of the operation screen 30 a of the operation device 30 and the display screen of the display device 50 .

[0056] Reference Figure 2 The video acquisition auxiliary device 40 includes a display device 50 and a control module 950. In addition, the video acquisition auxiliary device 40 may also be as follows Figure 2 As shown in the example, an imaging device 41 is provided.

[0057] The camera 41 is configured to capture video of the operator OP's operation on the operation screen 30a of the operation device 30. For example, a known camera capable of capturing video can be used as the camera 41. The camera 41 is electrically connected to the control module 950. The operation of the camera 41 is controlled by the control module 950. The video captured by the camera 41 is stored in, for example, the storage device 952. This allows the control module 950 to capture video of the operation on the operation screen 30a.

[0058] In addition, the photographing device 41 may also be as follows Figure 2 As shown in the example, it is fixed to a predetermined location (e.g., a predetermined location of a building where the operating device 30 is installed). However, the present invention is not limited to this structure. For example, the imaging device 41 may be installed on an accessory that can be installed by the operator OP (e.g., a hat, a helmet, goggles, etc.).

[0059] Furthermore, the method for acquiring a video of the operation on the operation screen 30a of the operation device 30 is not limited to the method using the aforementioned camera 41. The control module 950 may acquire a video of the operation screen 30a of the operation device 30 by performing a so-called "video capture process (or "screen capture process")" instead of the method using the camera 41, or may acquire a video of the operation screen 30a of the operation device 30 by performing a so-called "video capture process (or "screen capture process")" in addition to this method.

[0060] The video capture process is a process of acquiring and storing a series of image information displayed on a monitor as a video, and is a widely known technology in the field of personal computers, for example.

[0061] Reference Figure 2 and Figure 3 The display device 50 is a device for displaying predetermined information. The display device 50 is electrically connected to the control module 950. The operation of the display device 50 is controlled by the control module 950. Information input to the display device 50 is transmitted to the control module 950.

[0062] In this embodiment, as an example, the operating device 30 and the display device 50 are integrated. Furthermore, the operating device 30 (specifically, the operating screen 30a) and the display device 50 according to this embodiment are composed of a display having, for example, a touchscreen. Specifically, in this case, a predetermined area of the display functions as the operating screen 30a, while another predetermined area of the display functions as the display device 50.

[0063] However, the present invention is not limited to the above configuration, and for example, the display device 50 may be configured as a device independent of the operation screen 30 a of the operation device 30 .

[0064] Furthermore, when capturing video of an operation using video capture processing, the imaging device 41 (camera) is not required. Furthermore, in this case, the video capture assisting device 40, the operating device 30, and the display device 50 may be configured, for example, by a single personal computer (e.g., a personal computer with a display (display device 50)). Furthermore, the video capture assisting device 40 (or the personal computer serving as the video capture assisting device 40) may also include, for example, a keyboard 60 and a mouse 61.

[0065] Reference Figure 2 As an example, the control module 950 of this embodiment serves as the control module for the substrate processing apparatus 1 and also serves as the control module for the video acquisition assisting device 40. The control module 950 operates via a processor 951 according to instructions from a program stored in a storage device 952, thereby controlling the operating device 30, the display device 50, and the imaging device 41. Alternatively, the video acquisition assisting device 40 may be configured as a separate control module dedicated to the substrate processing apparatus 1, comprising a dedicated control module for the video acquisition assisting device 40.

[0066] Alternatively, the video acquisition support device 40 may include an "external storage device 23" provided separately from the storage device 952 as a "storage device" for storing videos, etc. For example, a known memory device (hard disk drive, solid-state drive, etc.) or a known server may be used as the external storage device 23. Furthermore, when a server is used as the external storage device 23, the server may be connected to the control module 950 via, for example, the Internet.

[0067] Reference Figure 3 As an example, the operation screen 30 a of the operation device 30 according to the present embodiment displays at least an operation unit 31 and a status display unit 32 .

[0068] A plurality of operation icons 33 are displayed on the operation unit 31. The plurality of operation icons 33 include an "operation start icon" and an "operation end icon" for each component of the substrate processing apparatus 1. For example, when operating the substrate processing apparatus 1 in manual mode, the operator OP can operate these icons to transmit operation start and stop commands for each component of the substrate processing apparatus 1 to the control module 950.

[0069] The status display unit 32 is configured to display, for example, the operating status of the substrate processing apparatus 1. For example, the status display unit 32 can display the name of the currently operating component of the substrate processing apparatus 1, or can illuminate the icon corresponding to the component. This allows the operator OP to easily understand which component is currently operating.

[0070] Furthermore, the status display unit 32 may be configured to display an alarm when a malfunction occurs in the substrate processing apparatus 1 , for example.

[0071] As an example, the display device 50 is configured to display a word input unit 51 and a display unit 52 .

[0072] The word input unit 51 is configured so that the operator OP can input a predetermined word (eg, a search word) using an input device such as a touch pen or keyboard 60 . Alternatively, the word input unit 51 may be configured not by the display device 50 but by the keyboard 60 .

[0073] The display unit 52 is configured to display at least a video. Figure 4 As illustrated, the display unit 52 according to this embodiment is configured to display a plurality of video lists 53 (i.e., video candidates). When the operator OP selects (touches) a desired video list 53 (e.g., video list No. 1) from the plurality of video lists 53, the selected video is displayed on the display unit 52.

[0074] Note that “selection by the operator O” is not limited to such a touch on the screen, and may be performed by, for example, clicking the mouse 61 (this also applies to the following description).

[0075] Furthermore, as an example, the display device 50 according to the present embodiment is configured to be capable of inputting "operator identification information" for identifying the operator OP who operates the operating device 30. For example, if the operator OP operates a predetermined operation icon 33 (an operation icon for displaying an operator list), Figure 5 The plurality of operator lists 55 as exemplified are displayed on, for example, the display unit 52. The plurality of operator lists 55 correspond to "operator identification information."

[0076] The operator OP selects (touches) the operator list 55 in which his / her own name is written from the plurality of operator lists 55. In this way, the operator OP who actually operates the operation screen 30a of the operation device 30 can be selected. That is, the action of selecting the operator list 55 corresponds to the "action of inputting operator identification information."

[0077] The location where the operator list 55 is displayed is not limited to the display unit 52. For example, in the case where the display is configured by integrating the operating device 30 and the display device 50 as in the present embodiment, the operator list 55 may be displayed at any location on the display (i.e., any location on the display device 50 or any location on the operation screen 30a).

[0078] Furthermore, for example, to ensure security, when an operator enters operator identification information such as an operator name and password into the operating device 30 (login) at the start of use of the operating device 30, the information entered during login (login information) may be used as the operator identification information. In this case, the operator list 55 may not be displayed.

[0079] Figure 6 This is an example of a flowchart for explaining a series of processes from the start of video acquisition to video storage. Figure 6 The flowchart of the "specific control process" executed by the control module 950 according to this embodiment is shown. That is, the "specific control process" according to this embodiment includes steps S10 to S40 described later. Figure 6 This is also a flowchart of the “video acquisition assistance method” executed by the control module 950 according to this embodiment.

[0080] In step S10, the control module 950 starts a "video acquisition process" for acquiring a video of the operation on the operation screen 30a when the operator OP operates the operation screen 30a of the operating device 30. The control module 950 can start the video acquisition process when, for example, the operator OP operates (clicks) the operation icon 33 corresponding to the "video acquisition start command" for starting video acquisition.

[0081] In this embodiment, specifically, the "video of the operation on the operation screen 30a" is a video including an image of the "operation icon 33 on the operation screen 30a" operated by the operator OP. Furthermore, it is preferable that the video also includes an image displayed on the operation screen 30a when the operator OP operates the operation icon 33.

[0082] Specifically, in step S10 , as an example, the control module 950 acquires (ie, records) the operation screen 30 a operated by the operator OP through the aforementioned “video capture process”.

[0083] As a specific example, if the operator OP sequentially operates the plurality of operation icons 33 on the operation screen 30a in order to operate the substrate processing apparatus 1, in step S10, the control module 950 captures the operations of the plurality of operation icons 33 as a video. More specifically, the control module 950 captures the images of the plurality of operation icons 33 operated by the operator OP in a time series as a video.

[0084] The specific execution content of step S10 is not limited to the above content. For example, in step S10, the control module 950 may capture a video of the operation on the operation screen 30a by using the camera 41.

[0085] Furthermore, in step S10, information related to the operation content of the operation screen 30a is transmitted to the control module 950. The control module 950 temporarily stores the information in the storage device 952, for example.

[0086] Next, the control module 950 ends the video acquisition process (step S20). Specifically, the control module 950 ends the video acquisition process when the operator OP operates (clicks) the operation icon 33 corresponding to the "video acquisition end instruction" indicating the end of video acquisition.

[0087] Next, the control module 950 performs a "meta-information addition process" (step S30) to add predetermined meta-information to the video acquired during the video acquisition process. "Adding meta-information to a video" specifically means associating the video (specifically, video information) with the meta-information, i.e., establishing an association between the video and the meta-information. Furthermore, step S30 preferably allows for not only the addition of meta-information but also the modification of the meta-information.

[0088] In this embodiment, the "meta-information" involved in step S30 specifically includes at least the content of the operation performed by the operator OP on the operation screen 30a (for example, information related to the operated operation icon 33). In other words, this meta-information includes information related to the type of operation icon 33 operated by the operator OP, information related to the operation order of the operated operation icons 33, etc.

[0089] Furthermore, the meta-information may also include information related to the title of the acquired video. Specifically, in this case, when the operator OP inputs the title of the video acquired through the video acquisition process into the word input unit 51 in step S20, the control module 950 attaches the input title to the video as meta-information in step S30.

[0090] Furthermore, the meta-information may include information related to an alarm. Specifically, in this case, the control module 950 adds the alarm generated when the operator OP operates the operation screen 30a to the video as meta-information.

[0091] Alternatively, the meta-information may include information related to a video search word. Specifically, in this case, when the operator OP inputs a video search word into the word input unit 51 in step S20, the control module 950 adds the input video search word as meta-information to the video in step S30.

[0092] Furthermore, the meta-information may include information related to the operator identification information. Specifically, in this case, when the operator OP inputs the operator identification information in step S20, the control module 950 adds the input operator identification information as meta-information to the video in step S30.

[0093] Next, in step S40, the control module 950 executes a "video storage process" to store the acquired video together with the meta-information attached to the video in the storage device 952. Through step S40, the video associated with the meta-information can be stored (i.e., saved) in the storage device 952.

[0094] The control module 950 executes the above multiple times Figure 6 A series of steps (i.e., “specific control processing”) are performed, thereby storing multiple videos associated with the operations on the operation screen 30a in the storage device 952.

[0095] Thus, it is possible to store "the situation in which the operator OP (including the developer of the operating device 30) who is skilled in operating the operating device 30 operates the operating device 30" as a video. As a result, by executing the following Figure 7 The flowchart of FIG. 3 can be viewed and listened by an operator OP who is not skilled in operation. Thus, an operator OP who is not skilled in operation can easily operate the operating device 30 by referring to the video.

[0096] Figure 7 This is an example of a flowchart for explaining a process for displaying a video on the display device 50. Figure 7 The flowchart may be executed, for example, when the operator OP actually operates the operation screen 30 a (for example, during training of the operator OP on the operation of the operation screen 30 a ).

[0097] exist Figure 7In step S100, the control module 950 executes an "operation content acquisition process" to acquire the content of the operation performed by the operator OP on the operation screen 30a. For example, the operator OP operates the operation icon 33 corresponding to a "transport start command" that initiates transport of a substrate WF by the transport robot 110 of the substrate processing apparatus 1. Alternatively, operating the operation icon 33 may include moving a pointer displayed on the screen to the operation icon 33 corresponding to the operation start command. In this case, in step S100, the control module 950 acquires information indicating that the operation icon 33 corresponding to the transport start command has been operated.

[0098] As another example, the operator OP operates the operation icon 33 corresponding to the "resume command" for resuming substrate processing by the substrate processing apparatus 1. In this case, in step S100, the control module 950 obtains information indicating that the operation icon 33 corresponding to the resume command has been operated.

[0099] Next, in step S110, the control module 950 performs "video list display processing", which is a processing of displaying a "video list" of at least one video associated with the operation content of the operator OP obtained in step S100 from multiple videos stored in the storage device 952.

[0100] For example, when the operation icon 33 corresponding to the "transport start instruction" is operated in step S100, the control module 950 displays the video to which the meta-information related to the operation icon 33 corresponding to the transport start instruction is added as a video list 53 on the display device 50 (refer to the aforementioned Figure 4 As another example, in step S100, when the operation icon 33 corresponding to the "resume command" has been operated, the control module 950 causes the display device 50 to display the videos to which the meta-information related to the operation icon 33 corresponding to the resume command is attached as a video list 53.

[0101] Next, in step S120, the control module 950 obtains information related to the video selection made by the operator OP. Specifically, the operator OP selects a video to view from the plurality of video lists 53 displayed on the display device 50. In step S120, the control module 950 obtains the type of video selected by the operator OP.

[0102] Next, in step S130, the control module 950 executes a "selected video display process" for displaying the video selected by the operator OP in step S120 on the display device 50. For example, referring to the aforementioned Figure 4 When the operator OP selects the No. 1 video list 53 , the control module 950 displays the video 54 (ie, the selected video) corresponding to the selected No. 1 video list 53 on the display device 50 in step S130 .

[0103] In addition, steps S110, S120 and S130 are an example of "video display processing of selecting a video associated with the operation content from multiple videos stored in the storage device 952 based on the operation content of the operation screen 30a operated by the operator OP and displaying it on the display device 50."

[0104] Reference Figure 7 Alternatively, in step S140, the control module 950 updates the meta-information. Specifically, in this case, the control module 950 adds "viewing-related information" such as the number of times the video has been viewed and the viewing history to the viewed video as meta-information and stores it in the storage device 952.

[0105] Alternatively, for example, in step S100, if the operator OP inputs a word for video search (including a video title) into the word input unit 51, the control module 950 may acquire information related to the input word in step S100. In this case, in step S110, the control module 950 may select a video associated with the input word from the videos in the storage device 952 and display it as the video list 53.

[0106] Alternatively, in step S100, if the operator OP inputs operator identification information (or, as described above, if the operator identification information is input when logging into the operating device 30), the control module 950 may acquire the input operator identification information in step S100. In this case, in step S110, the control module 950 may select a video associated with the input operator identification information and display it as the video list 53. This allows the video list 53 corresponding to the operator OP operating the operation screen 30a to be displayed.

[0107] According to the present embodiment as described above, the aforementioned Figure 6 The flowchart shown as an example allows the operator OP to store a video of the operation on the operation screen 30a of the operation device 30 together with meta-information including the details of the operation performed by the operator OP on the operation screen 30a in the storage device 952. Thus, the video of the operation on the operation screen 30a of the operation device 30 can be efficiently acquired.

[0108] Furthermore, according to this embodiment, the aforementioned Figure 7 As shown in the flowchart, based on the operation content of the operation screen 30a operated by the operator OP, a video associated with the operation content can be displayed on the display device 50. As a result, when the operator OP operates the operation screen 30a of the operating device 30, he or she can watch and hear the video displayed on the display device 50, thereby quickly learning how to operate the operation screen 30a of the operating device 30.

[0109] (Variation 1)

[0110] In the above embodiment, the video acquisition auxiliary device 40 may also be configured to read an "external video". Specifically, the external video is a video of the operation screen 30a of the operation device 30 operated by the operator OP, and is obtained by the external video acquisition device 40a (the reference numeral is shown in FIG). Figure 2 ) obtained. In addition, the external video acquisition device 40a is a device that can pre-acquire a video of the operation screen 30a of the operation device 30 operated by the operator OP.

[0111] Figure 8 This is an example of a flowchart for explaining the process related to reading an external video according to this modification. In step S200, the control module 950 according to this modification executes "external video reading process" for reading an external video.

[0112] Specifically, for example, when the operator OP operates the operation icon 33 corresponding to the "external video reading start instruction" indicating the start of reading of the external video, the control module 950 executes the external video reading process.

[0113] Specifically, in step S200, the control module 950 may cause the external video previously acquired and stored in the external video acquisition device 40a to be stored in, for example, the storage device 952 and / or the external storage device 23. Alternatively, if the external video is stored in, for example, the external storage device 23 before step S200 is executed, the control module 950 may read the external video stored in the external storage device 23 into the storage device 952 in step S200.

[0114] Alternatively, in step S200 , the control module 950 may read not only the external video but also data related to manual operation of the operating device 30 (this may also include text data, image data, video data, etc.).

[0115] Alternatively, if a built-in camera or the like is included in the components of the substrate processing apparatus 1, and if an image captured by the built-in camera exists, the control module 950 may read the image. Alternatively, if the operator OP utilizes augmented reality, mixed reality, or other technologies when operating the operation screen 30a of the operation device 30, the control module 950 may read the image used when utilizing augmented reality or mixed reality. These images are also examples of external video.

[0116] Next, in step S210 , the control module 950 executes “external video meta information adding processing” of adding external video meta information to the read external video.

[0117] Specifically, the external video meta-information includes the content of the operation performed by the operator OP on the operation screen 30a when acquiring the external video (for example, information on the operated operation icon 33).

[0118] Alternatively, for example, the control module 950 may obtain the external video meta-information from the control module (computer) of the external video acquisition device 40 a and attach it to the external video.

[0119] Next, in step S220 , the control module 950 executes “external video storage processing” for storing the read external video together with the external video meta-information added to the external video in the storage device 952 .

[0120] The control module 950 involved in this modification is, for example, Figure 7 In the "video display processing" involved in steps S110 to S130, based on the operation content of the operation screen 30a of the operation device 30 operated by the operator OP, an external video associated with the operation content is selected and displayed on the display device 50. Figure 7 The external video is displayed on the display device 50.

[0121] According to the present modification as described above, since an external video can be read, it is possible to effectively assist the operator OP in quickly learning to operate the operation screen 30 a of the operation device 30 .

[0122] While the embodiments and modifications of the present invention have been described in detail above, the present invention is not limited to such specific embodiments and modifications, and various modifications and alterations are possible within the scope of the gist of the present invention described in the claims.

Claims

1. A video acquisition assisting device, comprising an operating device having an operation screen operated by an operator, wherein: A control module configured to control the operating device is provided. The control module performs a specific control process, and the specific control process includes: a video acquisition process of acquiring a video of an operation on the operation screen when the operator operates the operation screen of the operation device; a meta-information adding process of adding meta-information including at least the content of the operation performed by the operator on the operation screen to the acquired video; and The video storage process stores the acquired video together with the meta information added to the video in a storage device.

2. The video acquisition auxiliary device according to claim 1, characterized in that The control module executes the specific control process multiple times, thereby causing the storage device to store multiple videos. Furthermore, a video display process is executed, wherein, based on the content of the operation performed by the operator on the operation screen, the video associated with the operation content is selected from the plurality of videos stored in the storage device and displayed on the display device.

3. The video acquisition auxiliary device according to claim 2, characterized in that The display device is configured to enable word input, The meta information includes the input word, The control module selects the video associated with the input word in the video display process and displays the video on the display device.

4. The video acquisition auxiliary device according to claim 2, characterized in that The display device is configured to be capable of inputting operator identification information for identifying the operator operating the operating device. The meta information includes the operator identification information, The control module selects the video associated with the operator who operates the operation screen of the operation device based on the operator identification information in the video display process and displays the video on the display device.

5. The video acquisition auxiliary device according to claim 1, characterized in that The control module further executes an external video reading process for reading an external video, which is a video of the operation on the operation screen of the operation device operated by the operator, acquired by an external video acquisition device.

6. A video acquisition assisting method for an operating device having an operation screen operated by an operator, characterized in that: The steps include: A control module configured to control the operating device executes a video acquisition process, wherein the video acquisition process acquires a video of an operation on the operating screen when the operator operates the operating screen of the operating device; The control module executes a meta-information adding process, wherein the meta-information adding process adds meta-information including at least the content of the operation performed by the operator on the operation screen to the acquired video; as well as The control module executes a video storage process in which the acquired video is stored in a storage device together with the meta-information attached to the video.

7. A storage medium for storing a program, characterized in that: causing the computer to execute a specific control process, the specific control process including: Video acquisition processing of acquiring a video of an operation on an operation screen of an operating device when an operator operates the operation screen; a meta-information adding process of adding meta-information including at least the content of the operation performed by the operator on the operation screen to the acquired video; and The video storage process stores the acquired video together with the meta information added to the video in a storage device.

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