Driving system for piezoelectric motor and control method

CN120476541APending Publication Date: 2025-08-12PHYSIK INSTRUMENTE (PI) GMBH & CO KG
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Patent Information

Application Number
CN202380087434.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-12-20
Filing Date
2023-11-15
Publication Date
2025-08-12

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Abstract

The invention relates to a drive system and a method for controlling a piezoelectric motor for such a drive system. The transmit inductor is conductively connected to the at least two switching elements. The control device is adapted to convert the periodic drive signal into a pulse width modulation (PWM) signal and pass it to the transmit inductor by switching the at least two switching elements. A receiving inductor and a capacitive piezoelectric actuator forming a low-pass filter are located within the chamber. At least one wall of the chamber is configured in the form of a solid dielectric barrier, and the transmitting inductor is adapted to inductively transmit the PWM signal to the receiving inductor through the solid dielectric barrier. Systems and methods provided enable wireless transmission of signals in a sealed environment, such as a vacuum environment.
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Citation Information

Patent Citations

  • Efficient drive for piezoelectric inertial motors

    DE102020132640B3