Disk drive suspension

Abstract

A disk drive suspension includes a slider arrangement portion (50) formed on a flexible member (22) of the suspension (1), a slider (51) being arranged on the slider arrangement portion. The slider arrangement portion (50) includes a hole portion (70). A hole portion (70) is formed on the metal base (40) of the flexible member (22). The hole portion (70) is provided at a position on which the slider (51) is provided. The hole portion (70) opens in the thickness direction of the metal base (40). The conductor portion (80) is embedded in the resin member (71) filling the hole portion (70). The slider support portion (90) is formed on a first surface (71a) of the resin member (71). The abutting portion (91) is formed on the second surface (71b) of the resin member (71). The abutting portion (91) contacts the protruding portion (30a) of the pit portion (30).

Description

Technical Field

[0001] The present invention relates to a disk drive suspension including a load beam, a flexure, and the like. Background Art

[0002] A disk drive is used in information processing devices such as personal computers. The disk drive includes a disk that rotates around a spindle, a carriage that pivots around a pivot, and the like. A disk drive suspension is provided on an arm of the carriage.

[0003] A disk drive suspension consists of a base plate, a load beam, and a flexure arranged along the load beam. The flexure comprises a metal base made of a thin stainless steel plate and a circuit section arranged along the metal base. Hereinafter, the disk drive suspension is simply referred to as the suspension.

[0004] A swingable gimbal structure is formed near the tip of the flexure. The gimbal structure includes a slider arrangement, on which the slider is arranged. The portion of the flexure that constitutes the slider arrangement is also called a tongue. The tongue is formed on a portion of the metal base. The gimbal structure is supported by a protrusion formed on the load beam. In industry, the protrusion is also called a dimple. The apex of the protrusion (the apex of the dimple) swingably supports the tongue.

[0005] A slider, serving as a magnetic head, is attached to the slider arrangement. The slider includes components for accessing data, such as reading or writing data stored on the magnetic disk. As the magnetic disk rotates, an air bearing is created between the slider and the disk. The distance between the slider's air bearing-forming surface and the magnetic disk surface (head-to-medium spacing) is, for example, 10 nm or less. This distance is very small.

[0006] JP 4993524B (Patent Document 1) discloses an example of a slider and a circuit section. The circuit section is connected to the slider. The circuit section in Patent Document 1 extends along the side surface and the other side surface of the slider in the longitudinal direction of the flexure. The slider is fixed to the metal base of the flexure by bonding or other methods. In this case, space for the circuit section is required on both sides of the slider. This configuration is not conducive to achieving a more compact suspension.

[0007] JP 5931624B (Patent Document 2) discloses another example of a suspension. The suspension includes a circuit section between the rear surface of the slider and a metal base. Specifically, the metal base, circuit section, and slider overlap in the thickness direction. In this case, an adhesive secures the rear surface of the slider to the circuit section. This configuration reduces the width of the slider-mounting portion, thus contributing to a more compact suspension.

[0008] In the suspension disclosed in Patent Document 2, the circuit section and the slider overlap in the thickness direction. The circuit section includes multiple independent conductors, each covered with a covering resin. Therefore, if these conductors and the covering resin are misaligned, the slider's orientation is inaccurate, which is disadvantageous. Furthermore, the metal base, circuit section, and slider overlap in the thickness direction. This configuration further disadvantageously increases the distance between the apex of the dimple and the slider's air bearing forming surface by the thickness of the circuit section.

[0009] The present invention is directed to providing a suspension capable of stabilizing the orientation of a slider provided on a slider arrangement portion. Summary of the Invention

[0010] One embodiment is a disk drive suspension including a load beam and a flexure. The flexure includes a metal base, a slider arrangement portion on which a slider is arranged, and a circuit portion electrically connected to the slider. The slider arrangement portion includes a hole portion formed in the metal base, a resin component filling the hole portion, and a conductor portion. The hole portion is formed at the position where the slider is arranged and is open in the thickness direction of the metal base. The conductor portion is part of the circuit portion and is embedded in the resin component. A slider support portion is formed on a first surface in the thickness direction of the resin component, and the slider is arranged on the slider support portion. An abutment portion is formed on a second surface in the thickness direction of the resin component, which abuts against a protruding portion (apex of a recessed portion) of the load beam.

[0011] One embodiment of the present invention can stabilize the orientation of a slider provided on a slider arrangement portion in a disk drive suspension including the slider, a circuit portion, and the like.

[0012] In the suspension of this embodiment, the resin component may include a base resin layer and an embedding resin. The base resin layer is formed within the hole portion. The embedding resin fills the hole portion. The embedding resin overlaps the base resin layer that embeds the conductor portion. An auxiliary component that contacts the protruding portion may be provided on the abutment portion. The thickness of the resin component may be smaller than that of the metal base.

[0013] The resin component may include: a base resin layer formed within the hole portion; an embedding resin; and the base resin. The embedding resin overlaps a surface of the base resin layer in which the conductor portion is embedded. The base resin overlaps an opposing surface of the base resin layer. The resin component may consist solely of the embedding resin. The resin component may include the embedding resin and the base resin overlapping the embedding resin.

[0014] The base resin layer of the resin component may include a first portion and a second portion thinner than the first portion. The conductor portion may include a first conductor disposed on the first portion and a second conductor disposed on the second portion. A portion of the first conductor may be exposed to the first surface of the resin component. A portion of the second conductor may be exposed to the second surface of the resin component.

[0015] A connecting conductor may be provided for electrically connecting the first conductor and the second conductor. A grounding conductor may be provided for electrically connecting the metal base and the conductor portion. The base member may be disposed on the slider support portion. The slider may be disposed on the base member. A base member integral with the resin member may be disposed on the resin member. The slider may be disposed on the base member.

[0016] Other objects and advantages of the present invention will be set forth in the following description, and in part will be obvious from the description, or may be learned through practice of the present invention. The objects and advantages of the present invention may be realized and obtained through the instruments and combinations particularly pointed out below. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the general description given above and the detailed description of the embodiments given below, serve to explain the principles of the invention.

[0018] Figure 1 It is a perspective view of the suspension according to the first embodiment.

[0019] Figure 2 is a plan view showing a portion of the suspension.

[0020] Figure 3 is a cross-sectional view illustrating an example of a magnetic disk drive.

[0021] Figure 4 It is along Figure 2 Cross-sectional view of the slider arrangement section along the F4-F4 line.

[0022] Figure 5 It is along Figure 4 Cross-sectional view of the slider arrangement section along the F5-F5 line.

[0023] Figure 6 is a cross-sectional view of a slider arrangement portion of the second embodiment.

[0024] Figure 7 is a cross-sectional view of a slider arrangement portion of the third embodiment.

[0025] Figure 8 is a cross-sectional view of a slider arrangement portion of a fourth embodiment.

[0026] Figure 9 is a cross-sectional view of a slider arrangement portion of a fifth embodiment.

[0027] Figure 10 is a cross-sectional view of a slider arrangement portion of a sixth embodiment.

[0028] Figure 11is a cross-sectional view of a slider arrangement portion of a seventh embodiment.

[0029] Figure 12 is a cross-sectional view of a slider arrangement portion of an eighth embodiment.

[0030] Figure 13 is a cross-sectional view of a slider arrangement portion of a ninth embodiment.

[0031] Figure 14 is a cross-sectional view of a slider arrangement portion of a tenth embodiment.

[0032] Figure 15 is a cross-sectional view of a slider arrangement portion of an eleventh embodiment.

[0033] Figure 16 is a cross-sectional view of a slider arrangement portion of a twelfth embodiment.

[0034] Figure 17 is a cross-sectional view of a slider arrangement portion of a thirteenth embodiment.

[0035] Figure 18 is a cross-sectional view of a slider arrangement portion of a fourteenth embodiment.

[0036] Figure 19 is a cross-sectional view of a slider arrangement portion of a fifteenth embodiment.

[0037] Figure 20 is a cross-sectional view of a slider arrangement portion of a sixteenth embodiment. DETAILED DESCRIPTION

[0038] [First embodiment]

[0039] The following reference Figures 1 to 5 A suspension including the slider arrangement portion of the first embodiment is described.

[0040] Figure 1 It is a perspective view of the suspension 1. Figure 2 It is a plan view of a portion of the suspension 1 . Figure 1 The double-headed arrow X1 in FIG. 1 represents the length direction of the suspension 1 . Figure 1 The double-headed arrow Y1 in FIG. 1 represents the width direction of the suspension 1 .

[0041] Figure 3 1 is a cross-sectional view schematically illustrating an example of a disk drive 10. Disk drive 10 includes a housing 11 (partially shown), a disk 12 that rotates about a spindle, a carriage 14, a positioning motor 15, and the like. Carriage 14 pivots about a pivot 13. Motor 15 drives carriage 14. A cover tightly seals housing 11. Suspension 1 is attached to the tip of an arm 16 of carriage 14.

[0042] like Figure 1and Figure 2 As shown, the suspension 1 includes a base plate 20, a load beam 21, and a flexible member 22. The base plate 20 is formed of, for example, a stainless steel plate. The boss portion 23 of the base plate 20 is fixed to the bracket 14 (e.g., Figure 3 As shown in FIG. 1 , for example, the thickness of the substrate 20 is 100 to 300 μm. The thickness is not limited to these values.

[0043] The load beam 21 extends in the longitudinal direction of the suspension 1. For example, the thickness of the load beam 21 is 20 to 40 μm. The thickness is not limited to these values. The load beam 21 has a first surface 21 a on which the flexure 22 is provided, and a second surface 21 b opposite the first surface 21 a.

[0044] A recessed portion 30 is formed near the tip of the load beam 21. The recessed portion 30 includes a protruding portion 30a. The protruding portion 30a protrudes from the first surface 21a of the load beam 21 toward the flexure 22. The recessed portion 30 is curved inward from the second surface 21b of the load beam 21. Therefore, the protruding portion 30a is also referred to as a recess in the industry. The protruding portion 30a protrudes toward the flexure 22.

[0045] The flexible member 22 is connected by welding portions 35 and 36 ( Figure 1 and Figure 2 The flexure 22 is fixed to the load beam 21 (partially shown in the middle). The flexure 22 extends along the load beam 21 in the longitudinal direction of the suspension 1. The flexure 22 includes a metal base 40 and a circuit portion 41. The metal base 40 is formed of a stainless steel plate that is thinner than the load beam 21. The circuit portion 41 is arranged on the surface of the metal base 40. The thickness of the metal base 40 is, for example, 20 μm (12 to 25 μm). The thickness is not limited to these values.

[0046] A slider arrangement portion 50 is formed near the tip of the flexure 22. A slider 51 serving as a magnetic head is provided on the slider arrangement portion 50. The slider 51 is provided with elements for magnetically recording data on the magnetic disk 12, elements for reading data recorded on the magnetic disk 12, and the like.

[0047] The slider arrangement 50 includes a plate portion 55 formed from a portion of the metal base 40. The plate portion 55 is also referred to in the industry as a tongue. The plate portion 55 of this embodiment is supported by arms 56 and 57, stoppers 58 and 59, and the like, allowing the plate portion 55 to swing relative to the load beam 21. The plate portion 55 includes a first plate 55a and a second plate 55b. Each of the first plate 55a and the second plate 55b is slightly movable relative to the slit 55c in the width direction of the suspension 1.

[0048] The actuator elements 61 and 62 are provided on the respective sides of the slider 51. Each of the actuator elements 61 and 62 is formed of a piezoelectric body such as zirconate titanate (PTZ). When a voltage is applied to the actuator elements 61 and 62, the piezoelectric body expands and contracts according to the applied voltage. Therefore, the tip side of the slider 51 can be adjusted in the width direction ( Figure 1 The slider 51 is slightly moved in the direction indicated by the double-headed arrow Y1. The element for reading and writing data is provided on the tip side of the slider 51.

[0049] Figure 4 It is along Figure 2 FIG. 5 is a cross-sectional view of the slider arrangement portion 50 taken along line F4-F4. Figure 5 It is along Figure 4 The cross-sectional view of the slider arrangement portion 50 taken along the line F5-F5 in FIG. The slider arrangement portion 50 includes a hole portion 70 formed in the metal base 40. The hole portion 70 is formed at a position where the slider 51 is provided and is open toward the thickness direction of the metal base 40. The width W1 of the hole portion 70 (e.g., Figure 4 The length L1 of the hole portion 70 (as shown) is greater than the width of the slider 51. Figure 5 shown) is longer than the length of the slider 51.

[0050] A resin member 71 formed of an electrically insulating resin is formed in the hole portion 70. The resin member 71 of this embodiment includes a base resin layer 72 and an embedding resin 73. The base resin layer 72 is formed inside the hole portion 70. The embedding resin 73 overlaps with the base resin layer 72 in the hole portion 70. Each of the base resin layer 72 and the embedding resin 73 is formed of an electrically insulating resin such as polyimide.

[0051] like Figure 4 and Figure 5 As shown, the conductor portion 80 is provided in the hole portion 70. The conductor portion 80 includes a plurality of conductors (e.g., a first conductor 81 and a second conductor 82). In this embodiment, the first conductor 81 and the second conductor 82 are described as examples. The number and shape of the conductors are not limited to the examples described in this embodiment. The conductor portion 80 is formed on the base resin layer 72 in the hole portion 70. The conductor portion 80 is embedded in the embedding resin 73.

[0052] The conductor portion 80 constitutes a portion of the circuit portion 41 in the length direction. Figure 2 and Figure 5 The conductor portion 80 is electrically connected to the terminal of the slider 51 by a conductive member 86 (shown in FIG. 1 ). The conductors 81 and 82 are primarily formed of copper. If necessary, the copper may be plated with gold or other materials. To simplify the drawings, the plating is omitted. Plating is not required on the conductors. The conductors 81 and 82 are embedded in the embedding resin 73 that fills the hole 70.

[0053] For example, the resin member 71 is composed of a base resin layer 72 and an embedding resin 73 . Figure 4 The double-headed arrow X2 in FIG. 2 indicates the thickness direction of the resin member 71. The resin member 71 has a first surface 71a and a second surface 71b in the thickness direction. The slider support portion 90 is formed on the first surface 71a. The slider support portion 90 is substantially flat. The slider 51 is fixed to the slider support portion 90 by bonding.

[0054] The abutment portion 91 is formed on the second surface 71b of the resin member 71. The protrusion 30a (approximately the apex of the recessed portion 30) contacts the abutment portion 91. The protrusion 30a is formed on the load beam 21 and protrudes toward the slider arrangement portion 50. The slider arrangement portion 50 can swing around the protrusion 30a in the thickness direction of the metal base 40.

[0055] The slider arrangement portion 50 of this embodiment includes a slider support portion 90 formed on the first surface 71a of the resin member 71. The resin member 71 fills the hole portion 70. The first surface 71a is substantially flat. When forming the embedding resin 73, uncured embedding resin 73 is supplied to the hole portion 70. The surface of the embedding resin 73 supplied to the hole portion 70 is flattened by a jig such as a rubber roller. This allows the slider support portion 90 to be formed flat and free of irregularities.

[0056] The slider 51 is arranged on the slider support portion 90. This arrangement stabilizes the orientation of the slider 51. Therefore, the distance between the magnetic disk 12 and the air bearing forming surface 51a (the flying height of the slider) can be precisely controlled. The flying height of the slider is very small. Therefore, precise control of the orientation of the slider 51 is crucial.

[0057] According to the slider arrangement 50 of this embodiment, the conductor portion 80 is embedded in the resin member 71 that fills the hole portion 70. Furthermore, the slider 51 is disposed on the first surface 71a of the resin member 71. The protrusion 30a (the apex of the recess) contacts the second surface 71b of the resin member 71. Consequently, the distance between the apex of the recess and the air bearing forming surface 51a can be reduced. This helps provide a low-profile slider arrangement 50. Furthermore, the slider 51 and the conductor portion 80 overlap in the thickness direction. Consequently, the width of the slider arrangement 50 can be reduced.

[0058] The rotation of the disk 12 creates an air bearing between the disk 12 and the slider 51. Figure 3The pivoting of the bracket 14 caused by the rotation of the bracket 14 (shown) causes the suspension 1 to move in the radial direction of the disk 12. The slider 51 is thereby moved to a desired position on the disk 12. When voltage is applied to the actuator elements 61 and 62, the actuator elements 61 and 62 expand and contract. Therefore, the tip side of the slider 51 can be accurately and quickly moved in the width direction ( Figure 1 Move in the direction indicated by the double-headed arrow Y1).

[0059] The following reference Figures 6 to 20 The slider arrangement portion of the second embodiment to the sixteenth embodiment is described. In these embodiments, the slider arrangement portion 50 of the first embodiment and the common constituent elements of these embodiments are given the same reference numerals. Explanations of these elements are omitted.

[0060] [Second embodiment]

[0061] Figure 6 2 is a cross-sectional view of a slider arrangement portion 50A according to the second embodiment. The slider arrangement portion 50A includes an auxiliary member 91a provided on the abutment portion 91 of the resin member 71. The auxiliary member 91a is formed of a material more rigid than the resin member 71 (e.g., metal). The protrusion 30a of the recessed portion 30 contacts the auxiliary member 91a.

[0062] [Third embodiment]

[0063] Figure 7 is a cross-sectional view of the slider arrangement portion 50B of the third embodiment. The thickness T1 of the resin member 71 is smaller than the thickness of the metal base 40. In this case, the base resin layer 72 can be thinner, or the embedding resin 73 can be thinner. Reducing the thickness T1 of the resin member 71 further shortens the distance between the apex of the dimple and the air bearing forming surface of the slider.

[0064] [Fourth embodiment]

[0065] Figure 8 : is a cross-sectional view of the slider arrangement portion 50C of the fourth embodiment. The resin member 71 of the slider arrangement portion 50C includes a base resin 100. The base resin 100 is formed of an electrically insulating resin such as polyimide. Abutment portions 91 are formed on the base resin 100. The embedded resin 73 is bonded to the surface ( Figure 8 The conductor portion 80 is embedded in the embedding resin 73. The base resin 100 overlaps with the opposite surface of the base resin layer 72 ( Figure 8 overlap with the lower surface in the middle.

[0066] [Fifth embodiment]

[0067] Figure 9: is a cross-sectional view of a slider arrangement portion 50D of the fifth embodiment. The slider arrangement portion 50D does not include the base resin layer 72 described in the first embodiment. Figure 9 As shown, the slider arrangement portion 50D includes a base resin 100. The conductor portion 80 is provided on the base resin 100. The conductor portion 80 is embedded in the embedding resin 73. An abutment portion 91 is formed on the base resin 100.

[0068] [Sixth embodiment]

[0069] Figure 10 : is a cross-sectional view of a slider arrangement portion 50E of the sixth embodiment. The slider arrangement portion 50E is different from the first embodiment in that the base resin layer 72 described in the first embodiment is not included. Figure 10 As shown, the slider supporting portion 90 is formed on the first surface 71a of the resin member 71 composed of the embedding resin 73. The abutting portion 91 is formed on the second surface 71b of the resin member 71.

[0070] [Seventh embodiment]

[0071] Figure 11 FIG2 is a cross-sectional view of a slider arrangement 50F according to the seventh embodiment. Slider arrangement 50F has a distance W2 between first conductor 81 and second conductor 82. Distance W2 is greater than the distance between the other conductors. This configuration can increase the electrical insulation distance between recessed portion 30 and conductors 81 and 82.

[0072] [Eighth embodiment]

[0073] Figure 12 1 is a plan view showing a portion of a slider arrangement portion 50G of the eighth embodiment. The conductor portion 80 of the slider arrangement portion 50G is bent around the recessed portion 30 to bypass the recessed portion 30. This makes it possible to extend the electrical insulation distance between the recessed portion 30 and the conductor portion 80.

[0074] [Ninth embodiment]

[0075] Figure 13 : is a cross-sectional view of a slider arrangement portion 50H of the ninth embodiment. Figure 13 As shown, the base resin layer 72 has a first portion 72a and a second portion 72b that is thinner than the first portion 72a. A first conductor 81 is provided on the first portion 72a. A second conductor 82 is provided on the second portion 72b. A portion of the first conductor 81 is exposed to the first surface 71a of the resin member 71. The rear surface-side terminal (top bonding pad) 51b of the slider 51 and the first conductor 81 are electrically connected to each other.

[0076] [Tenth embodiment]

[0077] Figure 14 is a cross-sectional view of a slider arrangement portion 50J according to the tenth embodiment. The base resin layer 72 has a first portion 72a and a second portion 72b, with the second portion 72b being thinner than the first portion 72a. A first conductor 81 is provided on the first portion 72a. A second conductor 82 is provided on the second portion 72b. A portion of the first conductor 81 is exposed to the first surface 71a of the resin member 71. A portion of the second conductor 82 is exposed to the second surface 71b of the resin member 71. Therefore, the second conductor 82 can be electrically connected to the terminal 110 of the flexure 22.

[0078] [Eleventh embodiment]

[0079] Figure 15 FIG2 is a cross-sectional view of a slider arrangement 50K according to the eleventh embodiment. The slider arrangement 50K further includes a first portion 72a and a second portion 72b that is thinner than the first portion 72a. A first conductor 81 is provided on the first portion 72a. A second conductor 82 is provided on the second portion 72b. A connecting conductor 120 electrically connects the adjacent first and second conductors 81 and 82.

[0080] [Twelfth embodiment]

[0081] Figure 16 12 is a cross-sectional view of a slider arrangement portion 50L of the twelfth embodiment. Figure 16 As shown, the ground conductor 130 is provided on the metal base 40. The connecting conductor 131 electrically connects the second conductor 82 and the ground conductor 130.

[0082] [Thirteenth embodiment]

[0083] Figure 17 FIG1 is a cross-sectional view of a slider arrangement portion 50M according to a thirteenth embodiment. The slider arrangement portion 50M includes a base member 140. The base member 140 is disposed on the flat slider support portion 90. The embedded resin 73 and the base resin 100 constitute the resin member 71. Uncured liquid adhesive fills a gap 141 between the slider 51 and the embedded resin 73. This adhesive cures, securing the slider 51. The base resin 100 may not be provided.

[0084] [Fourteenth embodiment]

[0085] Figure 18 This is a cross-sectional view of a slider arrangement portion 50N according to the fourteenth embodiment. The slider 51 is disposed on a flat surface 100a of a base resin 100. A resin member 71 fills a hole 70. The resin member 71 is composed of a base resin layer 72 and an embedding resin 73. A conductor portion 80 is embedded in the resin member 71. The slider 51 is disposed on the flat surface 100a of the base resin 100. This configuration stabilizes the orientation of the slider 51.

[0086] [Fifteenth embodiment]

[0087] Figure 19 15 is a cross-sectional view of a slider arrangement portion 50P of the fifteenth embodiment. Figure 19 As shown, the base resin layer 72 and the embedding resin 73 constitute the resin member 71. The slider support portion 90 is formed on the base resin layer 72. The abutment portion 91 is formed on the embedding resin 73. Figure 17 The illustrated base member 140 is provided between the base resin layer 72 and the slider 51 .

[0088] [Sixteenth embodiment]

[0089] Figure 20 FIG1 is a cross-sectional view of a slider arrangement 50Q according to a sixteenth embodiment. Slider arrangement 50Q includes a base portion 150 integrally formed with a base resin 100. A gap 151 is formed between slider 51 and base resin 100. Uncured liquid adhesive fills gap 151. This adhesive cures, securing slider 51.

[0090] Each of the slider arrangement portions 50, 50A to 50H, and 50J to 50Q includes a hole portion 70, a resin member 71, and a conductor portion 80. The hole portion 70 is open in the thickness direction of the metal base 40. The resin member 71 fills the hole portion 70. The conductor portion 80 is embedded in the resin member 71. A flat slider support portion 90 is formed on the resin member 71. This configuration enables the slider 51 to be stably oriented. In addition, the metal base 40 is not provided between the abutment portion 91 and the slider 51. This configuration shortens the distance between the dimple apex and the air bearing forming surface.

[0091] It goes without saying that, when implementing the present invention, various modifications can be made to the configuration of each component such as the metal base and the circuit portion constituting the flexure. In addition, the hole portions formed in the slider placement portion, the resin member, the slider support portion, and the abutment portion can also be implemented in various forms as long as they do not depart from the present invention.

[0092] Other advantages and modifications will readily occur to those skilled in the art. Therefore, the present invention in its broader aspects is not limited to the specific details and representative embodiments shown and described herein. Therefore, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

Claims

1. A disk drive suspension, characterized in that include: a load beam (21); and A flexible member (22), wherein The flexible member (22) comprises: a metal base (40); a slider arrangement portion (50) (50A to 50H) (50J to 50Q) on which the slider (51) is arranged; and a circuit portion (41) electrically connected to the slider (51); The slider arrangement portion (50) (50A to 50H) (50J to 50Q) includes: a hole portion (70) formed at a position on which the slider (51) is provided, and the hole portion (70) is open in a thickness direction of the metal base (40); a resin member (71) filling the hole portion (70); a conductor portion (80) which is a part of the circuit portion (41) and is embedded in the resin member (71); a slider support portion (90) formed on a first surface (71a) in a thickness direction of the resin member (71), the slider (51) being arranged on the slider support portion (90); and An abutment portion (91) is formed on the second surface (71b) in the thickness direction of the resin member (71) and contacts the protrusion (30a) of the recessed portion (30) of the load beam (21).

2. The suspension according to claim 1, characterized in that The resin component (71) includes: a base resin layer (72) formed inside the hole portion (70); and An embedding resin (73) embeds the conductor portion (80) and overlaps the base resin layer (72).

3. The suspension according to claim 1, characterized in that An auxiliary member (91a) is provided on the abutting portion (91) and contacts the protruding portion (30a).

4. The suspension according to claim 1, characterized in that The resin member (71) is thinner than the metal base (40).

5. The suspension according to claim 1, characterized in that The resin component (71) includes: a base resin layer (72) formed inside the hole portion (70); an embedding resin (73) that embeds the conductor portion (80) and overlaps the surface of the base resin layer (72); and A base resin (100) overlaps the opposite surface of the base resin layer (72).

6. The suspension according to claim 1, characterized in that The resin member (71) is composed of an embedding resin (73) that fills the hole portion (70) and embeds the conductor portion (80).

7. The suspension according to claim 1, characterized in that The resin component (71) includes: embedding resin (73) that fills the hole portion (70) and embeds the conductor portion (80); and A base resin (100) overlaps the embedding resin (73).

8. The suspension according to claim 2, characterized in that The base resin layer (72) of the resin component (71) comprises: Part I (72a); and a second portion (72b) that is thinner than the first portion (72a); and The conductor portion (80) comprises: a first conductor (81) provided on the first portion (72a); and The second conductor (82) is provided on the second portion (72b).

9. The suspension according to claim 8, characterized in that A portion of the first conductor (81) is exposed to the first surface (71a) of the resin member (71).

10. The suspension according to claim 8, characterized in that A portion of the second conductor (82) is exposed to the second surface (71b) of the resin member (71).

11. The suspension according to claim 8, characterized in that Also includes: The connecting conductor (120) (130) electrically connects the first conductor (81) and the second conductor (82).

12. The suspension according to claim 1, wherein: Also includes: The connecting conductor (131) electrically connects the metal base (40) and the conductor portion (80).

13. The suspension according to claim 1, wherein: a base member (140) disposed on the slider support portion (90), and The slider (51) is arranged on the slider support portion (90), wherein the base member (140) is sandwiched between the slider (51) and the slider support portion (90).

14. The suspension according to claim 1, wherein A base member (150) is provided on the resin member (71) and is formed integrally with the resin member (71), and a slider (51) is provided on the slider support portion (90), wherein the base member (150) is sandwiched between the slider (51) and the slider support portion (90).

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