Microscopic system, assembling and adjusting method of afocal system and assembling and adjusting device of optical system

Abstract

The invention provides an adjustment method of a microscopic system. The adjustment method comprises the following steps: firstly, calibrating a reference optical axis by a second small ball and a first small ball; secondly, enabling the optical axis of the objective lens to coincide with the reference optical axis after being parallel; and finally, the reference optical axis is parallel to the optical axis of the tube lens equivalently, the optical axis of the tube lens and the optical axis of the objective lens can be coaxial by translating the tube lens, and the precision of consistency adjustment of the optical axis of the microscopic system is improved. The invention further provides an adjustment method of the afocal system. The adjustment method comprises the following steps: firstly, enabling the second small ball center and the first small ball to pass through a target optical axis; secondly, calibrating the optical axis of the auto-collimation device to the target optical axis; and finally, the optical axis of the afocal system is parallel to the target optical axis and then coincides with the target optical axis, so that the optical axis of the afocal system is coaxial with the target optical axis, and the accuracy of consistent adjustment of the optical axis of the afocal system is improved. The invention further provides a device for adjusting the optical system, and the device can guarantee the data consistency of the optical system during optical axis consistency adjustment.

Description

Technical Field

[0001] The present invention relates to the field of optical debugging, and in particular to an adjustment method for a microscope system and an afocal system, and an adjustment device for an optical system. Background Art

[0002] In an optical system, the optical coaxiality between optical modules has a great influence on the optical system. According to the convergence characteristics of light in the optical system, the optical system can be divided into a focal optical system and an afocal optical system.

[0003] The optical microscopy imaging system is a widely used focal optical system, generally including a microscope objective lens, an imaging tube lens, etc. The coaxiality of the optical axis between the objective lens and the imaging tube lens directly affects the imaging quality of the microscopy system, especially for high-resolution microscopy imaging systems. Optical axis deviations at the micron level can lead to a serious decline in imaging quality. Therefore, during the assembly and adjustment of the microscopy system, it is necessary to strictly ensure the coaxiality between the optical modules in the microscopy system.

[0004] Traditional methods for aligning optical modules in a microscope achieve coaxial alignment by assembling each optical module onto machined datum surfaces and reference holes. However, mechanical assembly results in large tolerances, significantly impacting final image quality. One approach uses an interferometer to achieve high-precision coaxial alignment and simultaneously monitor the transmitted wavefront. However, interferometers are bulky and generally suitable for individually aligning small optical modules, making online alignment difficult for medium- and large-sized optical modules. Another method uses an internal focusing telescope or centering device to align optical modules to achieve high-precision coaxial alignment. However, operating an internal focusing telescope requires repeated focusing and finding the spherical center image of the lens's curved surface, a complex and time-consuming process. Yet another method involves aligning by detecting the spherical center image of the lens's curved surface. However, this method typically employs a vertical rotational system and requires an air-bearing turntable. This method is more suitable for individually aligning small optical modules or for coaxial assembly between lenses, but is unsuitable for aligning medium- and large-sized optical modules. Therefore, for larger imaging modules in microscopes, this method cannot yet meet the requirements for high-precision, online alignment, and flexible operation.

[0005] An afocal optical system is an optical system in which both the input and output light are collimated, and generally includes a laser beam expander, beam reducer, and magnifying tube lens. Afocal systems often serve as relays within the entire optical system, connecting other optical components in front and behind. Therefore, the optical axis alignment of a transmissive afocal system is crucial to the performance of the final optical system. For example, if the magnifying tube lens in an imaging system deviates from the center of the front and rear optical imaging modules, aberrations such as coma and astigmatism will be introduced into the final image. Alignment deviations along the optical axis may introduce vignetting, which will affect the final imaging effect. Therefore, the optical axis consistency of the afocal system is a crucial factor in ensuring the imaging quality of the entire optical system.

[0006] As mentioned above, the traditional coaxial method of optical module adjustment is difficult to meet design requirements. One method is to use a total station or a collimator to achieve precise angular adjustment of the afocal system, but the accuracy of such tools is poor, making it difficult to achieve precise alignment of the afocal system with the existing optical axis. Another method is to use an internal focusing telescope to adjust the lens position. This method fixes the internal focusing telescope on an air-floating turntable to establish a reference axis, but it requires repeated focusing to observe the reflected image on the lens surface, and the process is tedious and complicated. Therefore, for an afocal optical system, it is currently not possible to accurately align the optical axis of the afocal optical system with the established optical axis of the entire optical system.

[0007] In summary, how to accurately ensure the optical axis consistency of optical systems such as microscope systems and afocal systems has become one of the technical problems that technical personnel in this field need to solve urgently.

[0008] It should be noted that the above technical background is merely provided to provide a clear and complete description of the technical solutions of the present invention and to facilitate understanding by those skilled in the art. Simply because these solutions are described in the technical background section of the present invention, it should not be assumed that the above technical solutions are well known to those skilled in the art. Summary of the Invention

[0009] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a method for assembling a microscope system and an afocal system, and an assembly device for an optical system, so as to solve the problem in the prior art that it is difficult to accurately ensure the consistency of the optical axes of optical systems such as microscope systems and afocal systems.

[0010] To achieve the above-mentioned purpose and other related purposes, the present invention provides a method for assembling and adjusting a microscope system, which comprises at least the following steps: S1: providing a reference optical axis, an autocollimation device and a first small ball, wherein the center of the first small ball is on the reference optical axis, so that the center of the first small ball is on the optical axis of the autocollimation device; providing a second small ball, wherein the second small ball is located between the first small ball and the autocollimation device, so that the center of the second small ball also passes through the reference optical axis; the position of the center of the first small ball is a first calibration position, and the position of the center of the second small ball is a second calibration position; S2: moving the first small ball and the second small ball out of the optical path, providing a first plane mirror, wherein the first plane mirror is located on the side of the first small ball away from the autocollimation device, so that the first plane mirror is perpendicular to the reference optical axis; providing Provide an objective lens, which is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the focal plane of the objective lens, so that the optical axis of the objective lens is parallel to the reference optical axis; move the first plane mirror out of the optical path, and put the first small ball back into the optical path, so that the optical axis of the objective lens coincides with the reference optical axis; S3: provide a second plane mirror, which is located between the objective lens and the autocollimation device, so that the second plane mirror is perpendicular to the reference optical axis; provide a tube lens, which is located between the second plane mirror and the second calibration position, put the second small ball back into the optical path, so that the optical axis of the tube lens is parallel to the optical axis of the objective lens; withdraw the second plane mirror and the second small ball from the optical path, and put the first plane mirror back into the optical path, so that the optical axis of the tube lens coincides with the optical axis of the objective lens.

[0011] Optionally, step S1 includes step S11 and step S12; in step S11, the self-collimating device and the first ball are provided, the self-collimating device emits collimated light, the self-collimating device is translated along the X-axis, Y-axis or Z-axis, and / or rotated around the X-axis, and / or rotated around the Y-axis, so that the center of the first ball is on the optical axis of the self-collimating device; in step S12, the second ball is provided, the self-collimating device emits collimated light, the second ball is translated along the X-axis, Y-axis or Z-axis, and the center of the second ball is also set on the optical axis of the self-collimating device; wherein the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis, respectively.

[0012] Optionally, step S2 includes step S21, step S22 and step S23; in step S21, the first ball and the second ball are moved out of the optical path, the first plane mirror is provided, the self-collimation device emits collimated light, the first plane mirror is rotated around the X axis, and / or around the Y axis, so that the first plane mirror is perpendicular to the reference optical axis; in step S22, the objective lens is provided, the self-collimation device emits focused light, the self-collimation device is translated along the Z axis, so that the focused light is in the pupil of the objective lens. The objective lens is focused on the surface, and the objective lens is rotated about the X-axis and / or about the Y-axis so that the optical axis of the objective lens is parallel to the reference optical axis; in step S23, the first plane mirror is moved out of the optical path, and the first ball is put back into the optical path, the self-collimation device emits collimated light, and the objective lens is translated along the X-axis, the Y-axis or the Z-axis so that the optical axis of the objective lens coincides with the reference optical axis; wherein the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis respectively.

[0013] Optionally, step S3 includes step S31, step S32 and step S33; in step S31, a second plane mirror is provided, the first ball is moved out of the optical path, the self-collimation device emits collimated light, the second plane mirror is rotated around the X axis, and / or around the Y axis, so that the second plane mirror is perpendicular to the reference optical axis; in step S32, the tube mirror is provided, the second ball is put back into the optical path, the self-collimation device emits focused light, and the self-collimation device is translated along the Z axis so that the focused light is focused on the ball of the second ball. The tube lens is rotated around the X-axis and / or around the Y-axis so that the optical axis of the tube lens is parallel to the optical axis of the objective lens; in step S33, the second plane mirror and the second ball are withdrawn from the optical path, and the first plane mirror is put back into the optical path, the self-collimation device emits collimated light, and the tube lens is translated along the X-axis, Y-axis or Z-axis so that the optical axis of the objective lens and the optical axis of the tube lens are coaxial; wherein the reference optical axis is defined as the Z-axis, and any two mutually perpendicular lines in any plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis respectively.

[0014] Optionally, the microscope system assembly method further includes step S4: withdrawing the first plane mirror from the optical path, and placing the first ball and the second ball back into the optical path, so that the self-collimated image of the first ball meets the target accuracy requirement.

[0015] In order to achieve the above-mentioned object and other related objects, the present invention also provides an adjustment method for an afocal system, which comprises at least the following steps: S1: providing a target optical axis, an autocollimation device and a first small ball, the center of the first small ball being on the target optical axis, so that the autocollimation device is focused on the center of the first small ball; providing a second small ball, the second small ball being located between the autocollimation device and the first small ball, so that the center of the second small ball is also on the target optical axis; the position of the center of the first small ball is a first calibration position, and the position of the center of the second small ball is a second calibration position; S2: the autocollimation device is reflected between the second small ball and the first small ball. Re-switching to make the optical axis of the autocollimation device coincide with the target optical axis; S3: providing a plane mirror, which is located in the optical path of the first ball away from the autocollimation device on the side away from the autocollimation device, so that the plane mirror is perpendicular to the target optical axis; providing an afocal system, which is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the entrance pupil of the afocal system, and the second calibration position is located at the exit pupil of the afocal system, so that the optical axis of the afocal system is parallel to the target optical axis; withdrawing the plane mirror from the optical path, and putting the first ball and the second ball back into the optical path, so that the optical axis of the afocal system is coaxial with the target optical axis.

[0016] Optionally, step S1 includes step S11 and step S12; in step S11, the self-collimating device and the first ball are provided, the self-collimating device emits focused light, the self-collimating device is translated along the X-axis, Y-axis or Z-axis, and / or rotated around the X-axis, and / or rotated around the Y-axis, so that the self-collimating device is focused on the center of the first ball; in step S12, the second ball is provided, the self-collimating device emits focused light, and the second ball is translated along the X-axis, Y-axis or Z-axis, so that the self-collimating device is also focused on the center of the second ball, so that the center of the second ball is also on the target optical axis; wherein the target optical axis is positioned on the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis, respectively.

[0017] Optionally, step S2 includes step S21, step S22 and step S23; in step S21, the self-collimation device emits collimated light, and the self-collimation device translates along the X-axis, Y-axis or Z-axis so that the center of the second ball passes through the optical axis of the self-collimation device; in step S22, the second ball is withdrawn from the light path, the self-collimation device emits collimated light, and the self-collimation device rotates around the X-axis and / or around the Y-axis so that the center of the first ball passes through the optical axis of the self-collimation device; in step S23, steps S21 and S22 are repeated until the optical axis of the self-collimation device coincides with the target optical axis; wherein the target optical axis is positioned on the Z-axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis, respectively.

[0018] Optionally, step S3 includes step S31, step S32 and step S33; in step S31, the plane mirror is provided, the first ball and the second ball are withdrawn from the optical path, the self-collimating device emits collimated light, the plane mirror rotates around the X axis, and / or around the Y axis, so that the plane mirror is perpendicular to the target optical axis; in step S32, the afocal system is provided, the self-collimating device emits collimated light, the afocal system rotates around the X axis, and / or around the Y axis, so that the optical axis of the afocal system is aligned with the target optical axis. The optical axes are parallel; in step S33, the plane mirror is withdrawn from the optical path, the first ball and the second ball are put back into the optical path, the autocollimator emits focused light, the autocollimator translates along the Z axis to focus the focused light to the center of the second ball, the second ball is withdrawn from the optical path, and the afocal system translates along the X axis, Y axis or Z axis to make the optical axis of the afocal system coaxial with the target optical axis; wherein the target optical axis is positioned along the Z axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis, respectively.

[0019] To achieve the above-mentioned objectives and other related objectives, the present invention also provides an optical system adjustment device for implementing the microscope system adjustment method or the afocal system adjustment method, the optical system adjustment device at least includes: parallel guide rails and an industrial adjustment system; the industrial adjustment system is arranged on the parallel guide rails, and is used to establish an XYZ three-dimensional coordinate system, and adjust the position of the device installed on the parallel guide rails based on the XYZ three-dimensional coordinate system; the autocollimation device, first small ball, second small ball, first plane mirror, second plane mirror and microscope system used in the microscope system adjustment method are all installed on the parallel guide rails; or, the autocollimation device, first small ball, second small ball, plane mirror and afocal system used in the afocal system adjustment method are all installed on the parallel guide rails.

[0020] As described above, the microscope system, the method for aligning an afocal system, and the device for aligning an optical system of the present invention have the following features:

[0021] Beneficial effects:

[0022] 1. The present invention realizes the optical axis parallelism debugging of the optical system by first rotating the optical system to be debugged around the coordinate axis, and then performs translation debugging of the optical system along the coordinate axis, which can greatly speed up the efficiency of optical axis consistency debugging and improve the accuracy of optical axis consistency debugging.

[0023] 2. The method for assembling a microscope system of the present invention first aligns the objective lens optical axis with the reference optical axis. During the calibration of the tube lens, the tube lens optical axis is parallel to the reference optical axis, thereby cleverly achieving the parallelism of the tube lens optical axis and the objective lens optical axis. On this basis, the tube lens is translated to achieve the coaxial alignment of the tube lens and the objective lens. Therefore, the present invention can reduce the difficulty of coaxial adjustment of the microscope system and improve the accuracy of coaxial adjustment.

[0024] 3. The method for assembling and adjusting the afocal system of the present invention first calibrates the target optical axis by using the first small ball and the second small ball, and then calibrates the target optical axis by using the optical axis of the autocollimation device. By utilizing the connection established between the two small balls, the autocollimation optical axis and the target optical axis, the present invention can make the afocal system parallel to the target optical axis based on the autocollimation image of the plane mirror, and then make the afocal system coaxial with the target optical axis based on the autocollimation image of the first small ball. Therefore, the present invention can reduce the difficulty of coaxial debugging of the afocal system and improve the accuracy of coaxial debugging.

[0025] 4. The optical system adjustment device of the present invention can ensure the consistency of the adjusted optical system, thereby ensuring the industrial quality of the adjusted optical system during mass production, and improving the industrial productivity of optical system adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram showing the self-collimating device of the present invention emitting focused light.

[0027] Figure 2 It is a schematic diagram showing the collimated light emitted by the self-collimating device of the present invention.

[0028] Figure 3 Shown is a schematic flow chart of the microscope system assembly method of the present invention.

[0029] Figure 4 Schematic diagram of the optical path of step S11 of the microscope system assembly method of the present invention is shown.

[0030] Figure 5 FIG. 1 is a schematic diagram of an optical path in step S12 of the microscope system assembly method of the present invention.

[0031] Figure 6FIG. 1 is a schematic diagram of an optical path in step S21 of the microscope system assembly method of the present invention.

[0032] Figure 7 FIG. 1 is a schematic diagram of an optical path in step S22 of the microscope system assembly method of the present invention.

[0033] Figure 8 FIG. 1 is a schematic diagram of an optical path in step S23 of the microscope system assembly method of the present invention.

[0034] Figure 9 FIG. 1 is a schematic diagram of an optical path in step S31 of the microscope system assembly method of the present invention.

[0035] Figure 10 FIG. 1 is a schematic diagram of an optical path in step S32 of the microscope system assembly method of the present invention.

[0036] Figure 11 FIG. 1 is a schematic diagram of an optical path in step S33 of the microscope system assembly method of the present invention.

[0037] Figure 12 FIG. 1 is a schematic diagram showing an optical path in step S4 of the microscope system assembly method of the present invention.

[0038] Figure 13 Shown is a flow chart of the method for assembling and adjusting an afocus system according to the present invention.

[0039] Figure 14 It is a schematic diagram of the optical path of step S11 of the method for assembling and adjusting the afocal system of the present invention.

[0040] Figure 15 FIG. 1 is a schematic diagram of an optical path in step S12 of the method for assembling and adjusting an afocal system according to the present invention.

[0041] Figure 16 It is a schematic diagram of the optical path of step S21 of the method for assembling and adjusting the afocal system of the present invention.

[0042] Figure 17 FIG. 1 is a schematic diagram of an optical path in step S22 of the method for assembling and adjusting an afocal system according to the present invention.

[0043] Figure 18 It is a schematic diagram of the optical path of step S31 of the method for assembling and adjusting the afocal system of the present invention.

[0044] Figure 19 FIG. 1 is a schematic diagram of an optical path in step S32 of the method for assembling and adjusting an afocal system according to the present invention.

[0045] Figure 20 FIG. 1 is a schematic diagram of an optical path in step S33 of the method for assembling and adjusting an afocal system according to the present invention.

[0046] Figure 21 Shown is a schematic structural diagram of an optical system assembling and adjusting device according to the present invention.

[0047] Component number description

[0048] 1. Autocollimation device

[0049] 2 First Ball

[0050] 3 Second ball

[0051] 4 First plane mirror

[0052] 5 Objective lens

[0053] 6 Second plane mirror

[0054] 7 Tubescope

[0055] 8 plane mirror

[0056] 9 Afocal system DETAILED DESCRIPTION

[0057] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention.

[0058] See also Figures 1-21 It should be noted that the diagrams provided in this embodiment are merely schematic illustrations of the basic concept of the present invention. Therefore, the diagrams only show components related to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be changed arbitrarily, and the component layout may also be more complex.

[0059] Whether it is a microscopic system or an afocal system, it is difficult to accurately achieve optical axis consistency using traditional methods. Given the relatively poor accuracy of traditional methods, the present invention provides an adjustment method that utilizes the conjugate characteristics between the object and the image during imaging by an autocollimator to calibrate the optical axes of the microscopic system and the afocal system, so that both the microscopic system and the afocal system can achieve accurate optical axis consistency adjustment. The autocollimator generally includes components such as a collimated light source, a converging lens, a beam splitter, and a detector. Figure 1 As shown, when the converging lens is located at the exit port of the autocollimator, the autocollimator can emit focused light, such as Figure 2As shown, when the converging lens is removed from the exit port in the autocollimator, the autocollimator can emit collimated light. Therefore, by disassembling and assembling the converging lens, the operating mode of the autocollimator can be switched. The conjugate property between the object and the image means that when the autocollimator image obtained inside the autocollimator is located on the optical axis of the autocollimator, the object forming the autocollimator image in the autocollimator is also located on the optical axis of the autocollimator. Using the above principle, the specific implementation scheme of the present invention is as follows:

[0060] Example 1

[0061] like Figure 3 As shown, this embodiment provides a method for assembling a microscope system, comprising the following steps:

[0062] like Figure 3 As shown, in step S1, a reference optical axis, an autocollimation device 1 and a first ball 2 are provided, the center of the first ball 2 is on the reference optical axis, and the center of the first ball 2 is on the optical axis of the autocollimation device 1; a second ball 3 is provided, and the second ball 3 is located between the first ball 2 and the autocollimation device 1, so that the center of the second ball 3 is also on the reference optical axis; the position of the center of the first ball 2 is the first calibration position, and the position of the center of the second ball 3 is the second calibration position.

[0063] Specifically, in this embodiment, the reference optical axis is defined as the Z axis, and any two mutually perpendicular lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis respectively. The X axis, Y axis, and Z axis can establish a three-dimensional coordinate system. Through the three-dimensional coordinate system, various optical devices can be more accurately controlled to achieve precise optical debugging. Furthermore, the first small ball 2 and the second small ball 3 both have relatively perfect spherical surfaces, which can reflect relatively perfect spherical waves, so that an accurate self-collimation image is formed in the self-collimation device. Moreover, the diameters of the first small ball 2 and the second small ball 3 are both larger than the collimated light diameter of the self-collimation device, so that the conjugate characteristics of the self-collimation device 1 can be strictly guaranteed, and the error during debugging can be reduced, thereby improving the accuracy of debugging. As an example, the first small ball 2 and the second small ball 3 are both made of high-precision stainless steel or silicon carbide with an accuracy of grade 5 or above. In practical applications, any material that can provide reflection and the reflected wave is a relatively perfect spherical surface can be used to make the first small ball 2 and the second small ball 3, without being limited to this embodiment.

[0064] Specifically, in this embodiment, in step S11, as Figure 4As shown, an autocollimation device 1 and a first ball 2 are provided. The autocollimation device 1 emits collimated light, which is directed toward the first ball 2 and reflected by the first ball 2. The autocollimation device 1 can obtain an autocollimation image of the first ball 2. The autocollimation device 1 is translated along the X-axis, Y-axis, or Z-axis, and / or rotated around the X-axis, and / or rotated around the Y-axis. When the position of the autocollimation image of the center of the first ball 2 in the autocollimation device 1 remains unchanged and coincides with the reference point of the autocollimation device 1, it is considered that the center of the first ball 2 is also on the optical axis of the autocollimation device 1; wherein the reference point in the autocollimation device 1 refers to the reference point on the detector in the autocollimation device 1, and the reference point in the autocollimation device 1 is on the optical axis of the autocollimation device 1.

[0065] Specifically, in this embodiment, in step S12, as Figure 5 As shown, a second ball 3 is provided, and the self-collimating device 1 emits collimated light. The collimated light is directed to the second ball 3 and reflected by the second ball 3. The self-collimating device 1 obtains a self-collimated image of the second ball 3. By translating the second ball 3 along the X-axis, Y-axis or Z-axis, when the position of the self-collimated image of the center of the second ball 3 in the self-collimating device 1 remains unchanged and coincides with the reference point in the self-collimating device 1, it is considered that the center of the second ball 3 is also on the optical axis of the self-collimating device. In this process, since the position of the self-collimating device 1 remains unchanged, the centers of the first ball 2 and the second ball 3 are both on the reference optical axis. The reference optical axis can be calibrated by the first ball 2 and the second ball 3, so that the objective lens 5 and the tube lens 7 can be adjusted to the reference optical axis, thereby realizing the coaxiality of the microscope system.

[0066] like Figure 3 As shown, in step S2, the first small ball 2 and the second small ball 3 are moved out of the optical path, and a first plane mirror 4 is provided. The first plane mirror 4 is located on the side of the first small ball 2 away from the self-collimation device 1, so that the first plane mirror 4 is perpendicular to the reference optical axis; an objective lens 5 is provided, and the objective lens 5 is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the focal plane of the objective lens 5, so that the optical axis of the objective lens 5 is parallel to the reference optical axis; the first plane mirror 4 is moved out of the optical path, and the first small ball 2 is put back into the optical path, so that the optical axis of the objective lens 5 coincides with the reference optical axis.

[0067] Specifically, in this embodiment, in step S21, as Figure 6As shown, the first small ball 2 and the second small ball 3 are moved out of the optical path, and the first plane mirror 4 is set in the optical path. The first plane mirror 4 is farther away from the autocollimation device 1 than the first small ball 2. The first small ball 2 and the second small ball 3 are withdrawn from the optical path, and the autocollimation device 1 emits collimated light. The collimated light is directed to the first plane mirror 4 and reflected by the first plane mirror 4. The autocollimation device 1 obtains the autocollimation image of the first plane mirror 4. The autocollimation image of the first plane mirror 4 presents a star point feature. The first plane mirror 4 is rotated around the X-axis and / or around the Y-axis. When the autocollimation image of the first plane mirror 4 coincides with the reference point of the autocollimation device 1, it is considered that the first plane mirror 4 is perpendicular to the optical axis of the autocollimation device 1 at this time. Since the position of the autocollimation device 1 is unchanged at this time, it is considered that the first plane mirror 4 is perpendicular to the reference optical axis.

[0068] Specifically, in this embodiment, in step S22, as Figure 7 As shown, the objective lens 5 is arranged in the optical path, and the center of the first ball 2 is located at the focal plane of the objective lens. The self-collimating device 1 emits focused light, which is directed to the objective lens 5 and transmitted to the first plane mirror 4 and then reflected by the first plane mirror 4. The self-collimating device 1 obtains the self-collimating image of the first plane mirror 4, and the self-collimating device 1 is translated along the Z axis, and the focused light is focused on the pupil plane of the objective lens 5. The objective lens 5 is then rotated around the X axis and / or around the Y axis. When the self-collimating image of the first plane mirror 4 coincides with the reference point of the self-collimating device 1, it is considered that the optical axis of the objective lens 5 is perpendicular to the first plane mirror 4, that is, the optical axis of the objective lens 5 is parallel to the reference optical axis.

[0069] Specifically, in this embodiment, in step S23, as Figure 8 As shown, the first plane mirror 4 is withdrawn from the optical path, and the first ball 2 is put back into the optical path. The self-collimating device 1 emits collimated light, which is directed to the objective lens 5 and transmitted to the first ball 2 and then reflected by the first ball 2. The self-collimating device 1 obtains the self-collimated image of the first ball 3. The objective lens 5 is translated along the X-axis, Y-axis or Z-axis. When the self-collimated image of the center of the first ball 3 coincides with the reference point of the self-collimating device 1, it is considered that the optical axis of the objective lens 5 coincides with the reference optical axis through which the center of the first ball 2 passes. Further, during the debugging of the objective lens, as shown in FIG. Figure 7 As shown, the objective lens 5 is first rotated around the X axis and / or around the Y axis, as shown in FIG. Figure 8 As shown, the objective lens 5 is then translated along the X-axis, Y-axis, or Z-axis in order to first make the objective lens optical axis parallel to the reference optical axis, and then achieve optical axis coincidence by translation, which can greatly improve the accuracy of debugging. In actual applications, the specific method of adjusting the objective lens 5 is selected according to needs and is not limited to this embodiment.

[0070] like Figure 1As shown, in step S3, a second plane mirror 6 is provided, and the second plane mirror 6 is located between the objective lens 5 and the autocollimation device 1, so that the second plane mirror 6 is perpendicular to the reference optical axis; a tube lens 7 is provided, and the tube lens 7 is located between the second plane mirror 6 and the second calibration position, and the second small ball 3 is put back into the optical path, so that the optical axis of the tube lens 7 is parallel to the optical axis of the objective lens 5; the second plane mirror 6 and the second small ball 3 are withdrawn from the optical path, and the first plane mirror 4 is put back into the optical path, so that the optical axis of the tube lens 7 and the optical axis of the objective lens 5 coincide with each other.

[0071] Specifically, in this embodiment, in step S31, as Figure 9 As shown, the first ball 2 is removed from the optical path, and the second plane mirror 6 is set in the optical path. The self-collimating device 1 emits collimated light, and the collimated light is directed to the second plane mirror 6 and reflected by the second plane mirror 6. The self-collimating device 1 obtains the self-collimating image of the second plane mirror 6, and the second plane mirror 6 is rotated around the X axis and / or around the Y axis. When the self-collimating image of the second plane mirror 6 coincides with the reference point of the self-collimating device 1, it is considered that the second plane mirror 6 and the optical axis of the self-collimating device 1 at this time are perpendicular. Since the self-collimating device 1 is always performing translational motion, it is considered that the second plane mirror 6 is perpendicular to the reference optical axis.

[0072] Specifically, in this embodiment, in step S32, as Figure 10 As shown, the second ball 3 is put back into the optical path, the tube lens 7 is set in the optical path, the autocollimation device 1 emits focused light, and the autocollimation device 1 is translated along the Z axis to focus the focused light on the center of the second ball 3. The second ball 3 is withdrawn from the optical path, and the focused light is transmitted to the tube lens 7 and the second plane mirror 6 in sequence and reflected by the second plane mirror 6. The autocollimation device 1 obtains the autocollimation image of the second plane mirror 6. By rotating the tube lens 7 around the X axis and / or around the Y axis, when the autocollimation image of the second plane mirror 6 coincides with the reference point in the autocollimation device 1, it is considered that the optical axis of the tube lens is perpendicular to the second plane mirror 6, that is, the optical axis of the tube lens is parallel to the reference optical axis where the objective lens is located.

[0073] Specifically, in this embodiment, in step S33, as Figure 11 As shown, the second plane mirror 6 and the second ball 3 are withdrawn from the optical path, and the first plane mirror 4 is put back into the optical path. The self-collimating device 1 emits collimated light, which is directed to the tube lens 7 and transmitted to the objective lens 5 and the first plane mirror 4 and then reflected by the first plane mirror 4. The self-collimating device 1 obtains the self-collimated image of the first plane mirror 4. The tube lens 7 is translated along the X-axis, Y-axis or Z-axis. When the self-collimated image of the first plane mirror 4 coincides with the reference point of the self-collimating device 1, it is considered that the optical axis of the tube lens coincides with the reference optical axis where the objective lens is located. Further, during the debugging of the objective lens, as shown in FIG. Figure 10 As shown, first rotate the tube lens 7 around the X axis and / or around the Y axis, as shown in FIG. Figure 11As shown, the tube lens 7 is then translated along the X-axis, Y-axis, or Z-axis to first make the tube lens optical axis parallel to the reference optical axis where the objective lens is located, and then achieve optical axis coincidence through translation, which can greatly improve the accuracy of debugging. In actual application, the specific method of adjusting the tube lens 7 is selected according to needs and is not limited to this embodiment.

[0074] Specifically, in this embodiment, Figure 12 As shown, the adjustment method of the microscope system also includes step S4: withdrawing the first plane mirror 4 from the optical path, putting the first small ball 2 and the second small ball 3 back into the optical path, and the autocollimation device 1 emits focused light, which passes through the second small ball 3, the tube lens 7, and the objective lens 5 in sequence to reach the first small ball 2 and is reflected by the first small ball 2. The autocollimation device 1 obtains an autocollimated image of the first small ball 2, and by translating or rotating the objective lens 5, and / or translating or rotating the tube lens 7, when it is observed that the autocollimation image of the first small ball 2 meets the target accuracy requirement of the star point test, it is considered that the accuracy of the co-optical axis debugging of the objective lens 5 and the tube lens 7 has also met the target requirement. Therefore, the accuracy of the optical axis debugging of the microscope system can be improved through step S4.

[0075] It should be noted that, since the direction of incident light during actual use of the microscope system is opposite to that during the adjustment process, the objective lens 5 is farther from the autocollimation device than the tube lens 7, and the focal plane of the objective lens is farther from the autocollimation device than the mirror image of the tube lens. Furthermore, since the first ball 2 and the second ball 3 are used as objects that can be actually adjusted to calibrate the reference optical axis, the conjugate property of the autocollimation device 1 can be used to coincide the objective lens optical axis with the reference optical axis. In addition, by making the reference optical axis parallel to the tube lens optical axis, the parallelism of the tube lens optical axis and the objective lens optical axis is cleverly achieved, which can greatly reduce the difficulty of debugging the coaxiality of the optical axis, achieve the coaxiality of the tube lens optical axis and the objective lens optical axis, and improve the accuracy of debugging the coaxiality of the optical axis of the microscope system.

[0076] Example 2

[0077] like Figure 13 As shown, this embodiment provides a method for assembling an afocus system, comprising the following steps:

[0078] like Figure 13 As shown, in step S1, a target optical axis, an autocollimation device 1 and a first ball 2 are provided, the center of the first ball 2 passes through the target optical axis, and the autocollimation device 1 is focused on the center of the first ball 2; a second ball 3 is provided, and the second ball 3 is located between the autocollimation device 1 and the first ball 2, so that the center of the second ball 3 is also on the target optical axis; the position of the center of the first ball is the first calibration position, and the position of the center of the second ball 3 is the second calibration position.

[0079] Specifically, in this embodiment, the target optical axis is defined as the Z axis, and any two mutually perpendicular lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis respectively. The X axis, Y axis, and Z axis can establish a three-dimensional coordinate system. Through the three-dimensional coordinate system, various optical devices can be more accurately controlled to achieve precise optical debugging. Furthermore, the first small ball 2 and the second small ball 3 both have relatively perfect spherical surfaces, which can reflect relatively perfect spherical waves, so that an accurate self-collimation image is formed in the self-collimation device. Moreover, the diameters of the first small ball 2 and the second small ball 3 are both larger than the collimated light diameter of the self-collimation device, so that the conjugate characteristics of the self-collimation device can be strictly guaranteed, and the error during debugging can be reduced, thereby improving the accuracy of debugging. As an example, the first small ball 2 and the second small ball 3 are both made of high-precision stainless steel or silicon carbide with an accuracy of grade 5 or above. In practical applications, any material that can provide reflection and the reflected wave is a relatively perfect spherical surface can be used to make the first small ball 2 and the second small ball 3, without being limited to this embodiment.

[0080] Specifically, in this embodiment, in step S11, as Figure 14 As shown, an autocollimation device 1 and a first ball 2 are provided. The autocollimation device 1 emits focused light, which is emitted to the first ball 2 and reflected by the first ball 2. The autocollimation device 1 obtains an autocollimation image of the first ball 2. By translating the autocollimation device 1 along the X-axis, Y-axis or Z-axis, and / or rotating it around the X-axis, and / or rotating it around the Y-axis, when the autocollimation image of the center of the first ball 2 coincides with the reference point of the autocollimation device 1, it is considered that the output light of the autocollimation device 1 is focused to the center of the first ball 2.

[0081] Specifically, in this embodiment, in step S12, as Figure 15 As shown, a second ball 3 is provided, and the autocollimation device 1 emits focused light. The focused light is emitted to the second ball 3 and reflected by the second ball 3. The autocollimation device obtains an autocollimation image of the second ball 3. By translating the second ball 3 along the X-axis, Y-axis or Z-axis, when the autocollimation image of the center of the second ball 3 coincides with the reference point of the autocollimation device, it is considered that the output light of the autocollimation device 1 is also focused to the center of the second ball 3. Since the position of the autocollimation device 1 does not change during this process, the center of the second ball 3 is also calibrated on the target optical axis.

[0082] like Figure 13 As shown, in step S2, the autocollimation device 1 repeatedly switches between irradiating the second ball 3 and the first ball 2, so that the optical axis of the autocollimation device 1 coincides with the target optical axis.

[0083] Specifically, in this embodiment, in step S21, as Figure 16As shown, the self-collimating device 1 emits collimated light, which is directed to the second ball 3 and reflected by the second ball 3. The self-collimating device obtains a self-collimated image of the second ball 3. The self-collimating device 1 is translated along the X-axis, Y-axis or Z-axis. When the self-collimated image of the center of the second ball 3 coincides with the reference point of the self-collimating device 1, it is considered that the center of the second ball 3 passes through the optical axis of the self-collimating device 1 at this time. Figure 17 As shown, the second ball 3 is withdrawn from the optical path, and the self-collimation device 1 emits collimated light, which is directed to the first ball 2 and reflected by the first ball 2. The self-collimation device 1 obtains the self-collimation image of the first ball 2. By rotating the self-collimation device 1 around the X axis and / or around the Y axis, when the self-collimation image of the center of the first ball 2 coincides with the reference point of the self-collimation device 1, it is considered that the center of the first ball 2 passes through the optical axis of the self-collimation device 1 at this time. Furthermore, due to the Figure 17 In the process, the position of the autocollimator 1 changes, so adjust it back to Figure 16 After the second ball 3 is in the optical path, the center of the second ball 3 will deviate from the optical axis of the self-collimating device 1, so it is necessary to repeat Figure 16 The steps required and Figure 17 The required steps are performed until the position of the autocollimation device 1 remains unchanged, and the autocollimation images of the center of the first small ball 2 and the autocollimation images of the center of the second small ball 3 both coincide with the reference point of the autocollimation device 1. It is considered that the optical axis of the autocollimation device 1 passes through the center of the first small ball and the center of the second small ball at the same time, that is, the optical axis of the autocollimation device 1 coincides with the target optical axis.

[0084] like Figure 13 As shown, in step S3, a plane mirror 8 is provided, and the plane mirror 8 is located in the optical path of the first ball 2 away from the self-collimation device 1, so that the plane mirror 8 is perpendicular to the target optical axis; an afocal system 9 is provided, and the afocal system 9 is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the entrance pupil of the afocal system 9, and the second calibration position is located at the exit pupil of the afocal system 9, so that the optical axis of the afocal system 9 is parallel to the target optical axis; the plane mirror 8 is withdrawn from the optical path, and the first ball 2 and the second ball 3 are put back into the optical path, so that the optical axis of the afocal system 9 is coaxial with the target optical axis.

[0085] Specifically, in this embodiment, in step S31, as Figure 18 As shown, the first ball 2 and the second ball 3 are withdrawn from the optical path, and a plane mirror 8 is provided. Compared with the first ball 2, the plane mirror 8 is farther away from the autocollimation device 1. The autocollimation device 1 emits collimated light, and the collimated light is directed to the plane mirror 8 and reflected by the plane mirror 8. The autocollimation device 1 obtains an autocollimation image of the plane mirror 8. The plane mirror 8 is rotated around the X-axis and / or around the Y-axis. When the autocollimation image of the plane mirror 8 coincides with the reference point of the autocollimation device 1, it is considered that the plane mirror 8 is perpendicular to the optical axis of the autocollimation device 1 at this time, that is, the plane mirror 8 is perpendicular to the target optical axis.

[0086] Specifically, in this embodiment, in step S32, as Figure 19 As shown, an afocal system 9 is provided, and a collimated light is emitted from a collimated device 1. The collimated light is directed toward the afocal system 9 and transmitted to a plane mirror 8 and then reflected by the plane mirror 8. The autocollimated image of the plane mirror 8 is obtained by the autocollimated device 1. The afocal system 9 is rotated around the X-axis and / or around the Y-axis. When the autocollimated image of the plane mirror 8 coincides with the reference point of the autocollimated device 1, it is considered that the optical axis of the afocal system 9 is perpendicular to the plane mirror, that is, the optical axis of the afocal system 9 is also parallel to the target optical axis.

[0087] Specifically, in this embodiment, in step S33, as Figure 20 As shown, the plane mirror 8 is withdrawn from the optical path, the first ball 2 and the second ball 3 are put back into the optical path, the self-collimating device 1 emits focused light, the self-collimating device 1 is translated along the Z axis, so that the focused light is focused to the center of the second ball 3, the second ball 3 is withdrawn from the optical path, the focused light is transmitted to the afocal system 9 and the first ball 2 in sequence and reflected by the first ball 2, the self-collimating device 1 obtains the autocollimated image of the first ball 2, the afocal system 9 is translated along the X axis, Y axis or Z axis, when the autocollimated image of the center of the first ball 2 coincides with the reference point of the self-collimating device 1, it is considered that the optical axis of the afocal system 9 coincides with the target optical axis passed by the first ball 2, that is, the coaxiality of the optical axis of the afocal system 9 and the target optical axis is achieved. Further, during the debugging process of the afocal system 9, as shown in FIG. Figure 19 As shown, the afocal system 9 is first rotated around the X axis and / or around the Y axis, as shown in FIG. Figure 20 As shown, the afocal system 9 is then translated along the X-axis, Y-axis, or Z-axis to first make the optical axis of the afocal system 9 parallel to the target optical axis, and then achieve optical axis overlap through translation, which can greatly improve the accuracy of debugging. In actual applications, the specific method of assembling and adjusting the afocal system 9 is selected according to needs and is not limited to this embodiment.

[0088] It should be noted that, since the incident light direction of the afocal system 9 during actual use is opposite to the incident light direction during the adjustment process, the entrance pupil point of the afocal system 9 is farther from the autocollimation device than the exit pupil point. Furthermore, since the first ball 2 and the second ball 3 can be used as objects for actual debugging to calibrate the target optical axis, and the autocollimation device 1 can be used as an object that can be actually debugged to calibrate the target optical axis again, this embodiment can first achieve parallelism between the afocal system optical axis and the target optical axis, and then achieve coincidence between the afocal system optical axis and the target optical axis, through the first ball 2, the second ball 3 and the autocollimation device 1, thereby greatly reducing the difficulty of debugging the coaxiality of the optical axis and improving the accuracy of debugging the consistency of the optical axis of the afocal system.

[0089] It should be further explained that the first small ball 2, the second small ball 3 and the self-collimating device 1 used in this embodiment can be the same as or different from the first small ball 2, the second small ball 3 and the self-collimating device 1 in Example 1. The first small ball 2 and the second small ball 3 can be highly symmetrical spheres, and the self-collimating device 1 can emit focused light and collimated light and satisfy the conjugate characteristics between the object and the image. No specific restrictions are made here.

[0090] Example 3

[0091] like Figure 21 As shown, this embodiment provides an optical system assembly and adjustment device, including parallel guide rails and an adjustment system.

[0092] like Figure 21 As shown, the work adjustment system is set on the parallel guide rails, which is used to establish an XYZ three-dimensional coordinate system and adjust the position of the components installed on the parallel guide rails based on the XYZ three-dimensional coordinate system.

[0093] Specifically, in this embodiment, the self-collimation device 1, the first small ball 2, the second small ball 3, the first plane mirror 4, the second plane mirror 6 and the microscope system used in the method for assembling and adjusting the microscope system can all be installed on parallel guide rails, wherein the reference optical axis can be set to the direction of the parallel guide rails, so that the parallel guide rails are convenient for moving each component in the Z-axis direction, thereby improving the debugging efficiency. In actual applications, the specific mechanical structure of the parallel guide rails is selected as needed, and no specific restrictions are made here. Furthermore, the adjustment system can perform translation on the X-axis, Y-axis or Z-axis, and / or rotation around the X-axis, and / or rotation around the Y-axis on each component installed on the parallel guide rails, thereby realizing multi-dimensional debugging of each component installed on the parallel guide rails. In actual applications, the specific mechanical structure of the adjustment system is selected as needed, and no specific restrictions are made here. Furthermore, the adjustment device of the optical system can ensure the data consistency when the adjusted microscope system is coaxial with the target optical axis, thereby improving industrial productivity.

[0094] Specifically, in this embodiment, the self-collimation device 1, the first ball 2, the second ball 3, the plane mirror 8 and the afocal system 9 used in the method for adjusting the afocal system can all be installed on parallel guide rails, wherein the target optical axis can be set to the direction of the parallel guide rails, and the parallel guide rails facilitate the movement of each component in the Z-axis direction, thereby improving the debugging efficiency. In actual applications, the specific mechanical structure of the parallel guide rails is selected as needed, and no specific restrictions are made here. Furthermore, the industrial adjustment system can perform translation on the X-axis, Y-axis or Z-axis, and / or rotation around the X-axis, and / or rotation around the Y-axis on each component installed on the parallel guide rails. In actual applications, the specific mechanical structure of the industrial adjustment system is selected as needed, and no specific restrictions are made here. Furthermore, the optical system adjustment device can ensure data consistency when the adjusted afocal system is coaxial with the target optical axis, thereby improving industrial productivity.

[0095] It should be noted that the optical system adjustment device of this embodiment can be used to implement the adjustment method of the microscope system of Example 1, can also be used to implement the adjustment method of the afocal system of Example 2, and can also be used to implement the adjustment method of other microscope systems or afocal systems, without specific restrictions here.

[0096] In summary, the method for assembling a microscope system of the present invention is as follows: first, the center of the second sphere and the center of the first sphere are both made to pass through the reference optical axis; second, the objective lens optical axis is made parallel to the reference optical axis and then coincides with the reference optical axis by using the first plane mirror and the first sphere; finally, the reference optical axis is made parallel to the tube lens optical axis by using the second plane mirror and the second sphere, which is equivalent to achieving parallelism between the reference optical axis and the tube lens optical axis. By translating the tube lens, the tube lens optical axis and the objective lens optical axis can be made coaxial, thereby improving the accuracy of the consistency adjustment of the optical axis of the microscope system. The method for aligning an afocal system of the present invention is as follows: first, the center of the second sphere and the center of the first sphere are both made to pass through the target optical axis; second, the optical axis of the autocollimation device is also calibrated to the target optical axis; finally, the autocollimation image of the plane mirror is used to make the afocal system optical axis parallel to the target optical axis, and then the first sphere and the second sphere are used to make the afocal system optical axis coincide with the target optical axis, thereby achieving the coaxiality of the afocal system optical axis and the target optical axis, and improving the accuracy of the alignment of the afocal system optical axis. The alignment device of the optical system of the present invention can implement the alignment method of the microscope system or the alignment method of the afocal system, and ensure the data consistency of the optical system during the alignment of the optical axis. In addition, the present invention has the advantages of being able to be aligned online, which is convenient and fast. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial utilization value.

[0097] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. A method for assembling a microscope system, characterized in that: The microscopic system assembly and adjustment method comprises at least the following steps: S1: Provide a reference optical axis, an autocollimation device, and a first ball, wherein the center of the first ball is on the reference optical axis and the center of the first ball is on the optical axis of the autocollimation device; provide a second ball, wherein the second ball is located between the first ball and the autocollimation device, and the center of the second ball also passes through the reference optical axis; the position of the center of the first ball is a first calibration position, and the position of the center of the second ball is a second calibration position; S2: moving the first small ball and the second small ball out of the optical path, providing a first plane mirror, the first plane mirror being located on a side of the first small ball away from the autocollimation device, so that the first plane mirror is perpendicular to the reference optical axis; providing an objective lens, the objective lens being located in the optical path between the first calibration position and the second calibration position, and the first calibration position being located at the focal plane of the objective lens, so that the optical axis of the objective lens is parallel to the reference optical axis; moving the first plane mirror out of the optical path, and placing the first small ball back into the optical path, so that the optical axis of the objective lens coincides with the reference optical axis; S3: Provide a second plane mirror, which is located between the objective lens and the autocollimation device, so that the second plane mirror is perpendicular to the reference optical axis; provide a tube lens, which is located between the second plane mirror and the second calibration position, and put the second ball back into the optical path so that the optical axis of the tube lens is parallel to the optical axis of the objective lens; remove the second plane mirror and the second ball from the optical path, and put the first plane mirror back into the optical path so that the optical axis of the tube lens coincides with the optical axis of the objective lens.

2. The microscope system assembly method according to claim 1, characterized in that: In step S1, including step S11 and step S12; In step S11, the autocollimation device and the first ball are provided, the autocollimation device emits collimated light, and the autocollimation device is translated along the X-axis, Y-axis, or Z-axis, and / or rotated about the X-axis, and / or rotated about the Y-axis, so that the center of the first ball is on the optical axis of the autocollimation device; In step S12, the second ball is provided, the autocollimation device emits collimated light, and the second ball is translated along the X-axis, Y-axis, or Z-axis to set the center of the second ball on the optical axis of the autocollimation device; The reference optical axis is defined as the Z axis, and any two mutually perpendicular lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis respectively.

3. The microscope system assembly and adjustment method according to claim 1, characterized in that: In step S2, including step S21, step S22 and step S23; In step S21, the first ball and the second ball are moved out of the optical path, the first plane mirror is provided, the autocollimation device emits collimated light, and the first plane mirror is rotated about the X-axis and / or about the Y-axis so that the first plane mirror is perpendicular to the reference optical axis; In step S22, the objective lens is provided, the self-collimating output focused light, the self-collimating device is translated along the Z axis to focus the focused light on the pupil plane of the objective lens, and the objective lens is rotated about the X axis and / or about the Y axis to make the optical axis of the objective lens parallel to the reference optical axis; In step S23, the first plane mirror is moved out of the optical path, and the first ball is placed back into the optical path. The self-collimating device emits collimated light, and the objective lens is translated along the X-axis, Y-axis, or Z-axis so that the optical axis of the objective lens coincides with the reference optical axis. The reference optical axis is defined as the Z axis, and any two mutually perpendicular lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis respectively.

4. The microscope system assembly method according to claim 1, characterized in that: In step S3, including step S31, step S32 and step S33; In step S31, a second plane mirror is provided, the first ball is moved out of the optical path, the autocollimation device emits collimated light, and the second plane mirror is rotated about the X-axis and / or about the Y-axis so that the second plane mirror is perpendicular to the reference optical axis; In step S32, the tube lens is provided, the second ball is placed back into the optical path, the autocollimator emits focused light, the autocollimator translates along the Z axis to focus the focused light on the center of the second ball, and the tube lens is rotated about the X axis and / or about the Y axis to make the optical axis of the tube lens parallel to the optical axis of the objective lens; In step S33, the second plane mirror and the second ball are removed from the optical path, and the first plane mirror is placed back into the optical path. The autocollimation device emits collimated light, and the tube lens is translated along the X-axis, Y-axis, or Z-axis to make the optical axis of the objective lens coaxial with the optical axis of the tube lens. The reference optical axis is defined as the Z axis, and any two mutually perpendicular lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis respectively.

5. The microscope system assembly method according to claim 1, characterized in that: The microscope system assembly and adjustment method further includes step S4: withdrawing the first plane mirror from the optical path and placing the first ball back into the optical path, so that the self-collimated image of the first ball meets the target accuracy requirement.

6. A method for assembling a focus-free system, characterized in that: The method for assembling and adjusting the afocus system comprises at least the following steps: S1: Provide a target optical axis, an autocollimator, and a first ball, wherein the center of the first ball is on the target optical axis, and the autocollimator is focused on the center of the first ball; provide a second ball, wherein the second ball is located between the autocollimator and the first ball, and the center of the second ball is also on the target optical axis; the position of the center of the first ball is a first calibration position, and the position of the center of the second ball is a second calibration position; S2: the self-collimating device repeatedly switches between irradiating the second ball and the first ball, so that the optical axis of the self-collimating device coincides with the target optical axis; S3: Provide a plane mirror, which is located in the optical path of the first ball away from the self-collimating device on the side away from the plane mirror, so that the plane mirror is perpendicular to the target optical axis; provide an afocal system, which is located in the optical path between the first calibration position and the second calibration position, and the first calibration position is located at the entrance pupil of the afocal system, and the second calibration position is located at the exit pupil of the afocal system, so that the optical axis of the afocal system is parallel to the target optical axis; remove the plane mirror from the optical path, and put the first ball and the second ball back into the optical path, so that the optical axis of the afocal system is coaxial with the target optical axis.

7. The method for assembling and adjusting an afocus system according to claim 6, characterized in that: In step S1, including step S11 and step S12; In step S11, the autocollimation device and the first ball are provided, the autocollimation device emits focused light, and the autocollimation device is translated along the X-axis, Y-axis, or Z-axis, and / or rotated about the X-axis, and / or rotated about the Y-axis, so that the autocollimation device focuses on the center of the first ball; In step S12, the second ball is provided, the autocollimation device emits focused light, and the second ball is translated along the X-axis, Y-axis, or Z-axis so that the autocollimation device also focuses on the center of the second ball, so that the center of the second ball is also on the target optical axis; The target optical axis is positioned along the Z axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis, respectively.

8. The method for assembling and adjusting an afocus system according to claim 6, characterized in that: In step S2, including step S21, step S22 and step S23; In step S21, the self-collimating device emits collimated light, and the self-collimating device translates along the X-axis, Y-axis or Z-axis so that the center of the second ball passes through the optical axis of the self-collimating device; In step S22, the second ball is removed from the optical path, the autocollimator emits collimated light, and the autocollimator rotates around the X-axis and / or around the Y-axis so that the center of the first ball passes through the optical axis of the autocollimator; In step S23, repeating steps S21 and S22 until the optical axis of the autocollimation device coincides with the target optical axis; The target optical axis is positioned along the Z axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis, respectively.

9. The method for assembling and adjusting an afocus system according to claim 6, characterized in that: In step S3, including step S31, step S32 and step S33; In step S31, the plane mirror is provided, the first ball and the second ball are removed from the optical path, the autocollimation device emits collimated light, and the plane mirror is rotated around the X-axis and / or around the Y-axis so that the plane mirror is perpendicular to the target optical axis; In step S32, the afocal system is provided, the autocollimation device emits collimated light, and the afocal system is rotated around the X-axis and / or around the Y-axis so that the optical axis of the afocal system is parallel to the target optical axis; In step S33, the plane mirror is removed from the optical path, the first ball and the second ball are returned to the optical path, the autocollimator emits focused light, the autocollimator translates along the Z axis to focus the focused light on the center of the second ball, the second ball is removed from the optical path, and the afocal system translates along the X axis, the Y axis, or the Z axis to make the optical axis of the afocal system coaxial with the target optical axis; The target optical axis is positioned along the Z axis, and any two mutually perpendicular straight lines in any plane perpendicular to the Z axis are defined as the X axis and the Y axis, respectively.

10. An optical system adjustment device, used to implement the microscope system adjustment method according to any one of claims 1 to 5 or the afocal system adjustment method according to any one of claims 6 to 9, characterized in that: The optical system adjustment device at least includes: parallel guide rails and an adjustment system; The work adjustment system is arranged on the parallel guide rails, and is used to establish an XYZ three-dimensional coordinate system, and adjust the position of the device installed on the parallel guide rails based on the XYZ three-dimensional coordinate system; The autocollimation device, the first small ball, the second small ball, the first plane mirror, the second plane mirror and the microscope system used in the microscope system assembly and adjustment method are all installed on the parallel guide rails; Alternatively, the autocollimation device, the first ball, the second ball, the plane mirror and the afocal system used in the installation and adjustment method of the afocal system are all installed on the parallel guide rails.

Images