Clamping fixture and polishing device

Abstract

The application relates to a clamping fixture and a grinding and polishing device. The clamping fixture comprises a mounting frame, a clamping assembly, an adjusting assembly and a fixing assembly. The mounting frame is provided with a mounting cavity. The clamping assembly is movably arranged in the mounting cavity. The clamping assembly comprises a first limiting plate and a second limiting plate. The first limiting plate is vertically arranged and the position of the first limiting plate in the horizontal direction is adjustable. The second limiting plate is horizontally arranged and the position of the second limiting plate in the vertical direction is adjustable. The first limiting plate and the second limiting plate are enclosed to form a containing cavity for containing a sample. The adjusting assembly is connected with the mounting frame. The adjusting assembly is used for adjusting and fixing the position of the first limiting plate in the horizontal direction relative to the mounting frame. The fixing assembly is connected with the mounting frame. The fixing assembly is used for fixing the position of the second limiting plate in the vertical direction relative to the mounting frame. The clamping fixture and the grinding and polishing device improve the efficiency and quality of sample grinding and polishing.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment technology, and in particular to a clamping fixture and grinding and polishing apparatus. Background Technology

[0002] With the continuous development of materials and microelectronics information technology, the integration level of chips is constantly increasing. Failure analysis of highly integrated chips is expected to reduce the risk of chip failure. Chip sample preparation is required before failure analysis. Encapsulation, dicing, grinding, and polishing are routine procedures in chip sample preparation, among which sample grinding is a key and commonly used technique.

[0003] In related technologies, the grinding process requires holding the sealed sample by hand or using a handheld sample holder to place the grinding surface of the sample on the grinding wheel for grinding.

[0004] However, when using a handheld sample or a handheld clamp, only one sample can be ground at a time, resulting in low grinding efficiency. Furthermore, the grinding surface of the sample may be uneven due to hand tremors or shaking, or even the degree of force applied, which may affect the subsequent failure analysis results of the sample. Summary of the Invention

[0005] Based on this, this application provides a clamping fixture and a grinding and polishing device to solve the problem of how to improve grinding efficiency and grinding quality.

[0006] On the one hand, this application provides a clamping fixture, including:

[0007] Mounting bracket, wherein the mounting bracket is provided with a mounting cavity;

[0008] A clamping assembly is movably disposed in the mounting cavity. The clamping assembly includes a first limiting plate and a second limiting plate. The first limiting plate is vertically disposed and its position in the horizontal direction is adjustable. The second limiting plate is horizontally disposed and its position in the vertical direction is adjustable. The first limiting plate and the second limiting plate together form a receiving cavity for receiving a sample.

[0009] An adjustment component is connected to the mounting bracket, and the adjustment component is used to adjust and fix the position of the first limiting plate relative to the mounting bracket in the horizontal direction;

[0010] A fixing component is connected to the mounting bracket and is used to fix the position of the second limiting plate relative to the mounting bracket in the vertical direction.

[0011] In one embodiment, the adjustment assembly includes a moving rod, an adjusting rod, and a limiting mechanism. The moving rod and the adjusting rod are fixedly connected, and the moving rod is movably connected to the mounting frame. The moving rod is used to adjust the position of the first limiting plate relative to the mounting frame in the horizontal direction via the adjusting rod when moving relative to the mounting frame. The limiting mechanism is used to lock or release the moving rod.

[0012] In one embodiment, the movable rod has a cavity, and the cavity has an installation port corresponding to the end of the movable rod, through which the limiting mechanism can be assembled into the cavity.

[0013] In one embodiment, the limiting mechanism includes a button, a locking member, an elastic member, a first slider, and a second slider. The locking member, the elastic member, the first slider, and the second slider are all installed within the cavity. The inner wall of the mounting opening is provided with two sets of alternating grooves of different depths. The button is slidably connected to the grooves and to one end of the locking member. The other end of the locking member contacts one end of the elastic member, and the other end of the elastic member contacts the first slider. When the button is pressed, the locking member moves axially along the moving rod and rotates about the axial direction, causing the locking member to move between a first position and a second position. When switching, in the first position, the distance between the locking member and the first slider is a first distance; in the second position, the distance between the locking member and the first slider is a second distance, wherein the second distance is less than the first distance. The first slider has a first inclined surface, and the second slider has a second inclined surface. The first inclined surface and the second inclined surface are in sliding contact. The mounting bracket is provided with a limiting groove, and the second slider is provided with a locking tooth corresponding to the limiting groove. The moving rod is provided with a groove corresponding to the locking tooth. When the locking member moves to the second position, the locking groove extends out from the groove and engages with the limiting groove to restrict the movement of the moving rod relative to the mounting bracket.

[0014] In one embodiment, the number of the button, the locking member, the elastic member, and the first slider are all two, and they are correspondingly disposed at both ends of the second slider.

[0015] In one embodiment, the adjusting rod is connected to a sliding bar, the sliding bar being slidably connected to the mounting bracket; and / or, the mounting bracket is provided with a groove, along which the adjusting rod can slide.

[0016] In one embodiment, the mounting bracket is provided with a movable guide rail, which is arranged in a horizontal direction, and the movable rod is slidably engaged with the movable guide rail.

[0017] In one embodiment, the clamping fixture further includes an alignment mechanism disposed on the mounting frame and used to fix the sample placed in the receiving cavity.

[0018] In one embodiment, there are multiple second limiting plates, which are arranged at intervals along the vertical direction. A first limiting plate is disposed between adjacent second limiting plates, and each first limiting plate is connected to the adjustment component.

[0019] On the other hand, this application provides a grinding and polishing apparatus, including a frame, a grinding mechanism, and a clamping fixture as described above. The clamping fixture is connected to the frame, and the grinding mechanism is disposed opposite to the clamping fixture and can move relative to each other in the horizontal direction. The grinding mechanism is used to grind and polish the sample clamped by the clamping fixture. The grinding and polishing apparatus also includes an attitude detection component, which is disposed on the mounting frame or the frame and is used to detect the attitude of the sample housed in the receiving cavity.

[0020] The aforementioned clamping fixture and grinding / polishing device, because the clamping assembly includes a first limiting plate and a second limiting plate, whose positions are adjustable in the horizontal and vertical directions respectively, can clamp samples of different sizes when the first and second limiting plates form a receiving cavity for accommodating samples of various specifications, thus adapting to the grinding needs of samples of various specifications. Furthermore, because the adjusting and fixing components can respectively fix the positions of the first and second limiting plates, the clamping stability of the sample is improved, eliminating the need for the operator to hold the sample, ensuring good flatness of the sample after grinding and polishing. Moreover, the adjusting component can adjust the position of the first limiting plate relative to the mounting frame in the horizontal direction, thereby adjusting the grinding amount. Therefore, the technical solution of this application can improve the efficiency and quality of sample grinding and polishing. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a front view of a grinding and polishing apparatus according to an embodiment of this application.

[0023] Figure 2 The grinding and polishing apparatus of one embodiment of this application is along Figure 2 A schematic diagram of the cross-sectional structure of line II in the diagram.

[0024] Figure 3 This is a schematic diagram of the structure of the adjustment component of the grinding and polishing apparatus in one embodiment of this application.

[0025] Figure 4 This is a rear view of the grinding and polishing apparatus according to one embodiment of this application.

[0026] Figure 5 This is a top view of a grinding and polishing apparatus according to an embodiment of this application.

[0027] Explanation of reference numerals in the attached figures:

[0028] 100. Clamping fixture; 10. Mounting bracket; 11. Support wall; 12. Mounting cavity; 13. Slide groove; 20. Clamping assembly; 21. First limiting plate; 22. Second limiting plate; 23. Receiving cavity; 30. Adjustment assembly; 31. Moving rod; 311. Mounting port; 312. Slot; 313. Groove; 32. Adjustment rod; 33. Limiting mechanism; 331. Button; 332. Locking element; 333. Elastic element; 334. First slider; 3341. First inclined surface; 33 5. Second slider; 3351. Second inclined plane; 3352. Clamping tooth; 34. Sliding bar; 40. Fixing assembly; 41. Fastening knob; 42. Threaded rod; 50. Connecting assembly; 51. Locking element; 52. Connecting rod; 60. Alignment mechanism; 61. Alignment element; 62. Spring; 200. Frame; 201. Snap-fit ​​groove; 300. Attitude detection element; 301. Laser emitter; 302. Laser receiver; 303. Bracket; 304. Indicator; 400. Laser beam. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0030] It should be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0031] The terms “vertical,” “horizontal,” “up,” “down,” “left,” “right,” and similar expressions are for illustrative purposes only and do not represent the only possible implementation.

[0032] It should be understood that the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” and “horizontal,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0033] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] One embodiment of this application provides a grinding and polishing apparatus capable of grinding and polishing samples to facilitate subsequent failure analysis. It should be noted that the sample to be ground and polished in this application is a chip sample cured with resin (hereinafter referred to as "sample"). The chip package type (i.e., chip type) in the sample includes, but is not limited to, FCBGA (Flip Chip Ball Grid Array), FCCSP (Flip Chip Chip Scale Package), QFN (Quad Flat No-leads Package), or LGA (Land Grid Array).

[0035] Combination Figure 1 and Figure 2 As shown, the grinding and polishing apparatus includes a clamping fixture 100 and a frame 200. The clamping fixture 100 is connected to the frame 200 and is used to clamp the sample to be ground. It should be noted that the grinding and polishing apparatus also includes a grinding mechanism (not shown in the figure). The grinding mechanism is arranged opposite to the clamping fixture 100 and can move relative to each other in the horizontal direction. The grinding mechanism is used to grind and polish the sample clamped by the clamping fixture 100.

[0036] The clamping fixture 100 includes a mounting frame 10, a clamping assembly 20, an adjusting assembly 30, and a fixing assembly 40.

[0037] The mounting bracket 10 is connected to the frame 200. In some embodiments, the mounting bracket 10 is detachably mounted to the frame 200, thereby facilitating the disassembly and maintenance of the clamping fixture 100. For example, the frame 200 is provided with a snap-fit ​​groove 201, and the mounting bracket 10 is provided with a support wall 11, which mates with the snap-fit ​​groove 201. Thus, by utilizing the mate between the support wall 11 and the snap-fit ​​groove 201, the mounting bracket 10 can be quickly assembled to the frame 200.

[0038] The clamping fixture 100 also includes a connecting assembly 50, which includes a locking member 51 and a connecting rod 52. The connecting rod 52 passes through the mounting bracket 10 and the frame 200. The locking member 51 is connected to the connecting rod 52 and is movable relative to the connecting rod 52. In this embodiment, the connecting rod 52 is locked or released by operating the locking member 51 to move relative to the connecting rod 52. Thus, when the locking member 51 locks the connecting rod 52, the connecting rod 52 can maintain a stable connection between the mounting bracket 10 and the frame 200. When the locking member 51 releases the connecting rod 52, the connecting rod 52 can be pulled away from the mounting bracket 10 and the frame 200, thereby releasing the lock on the mounting bracket 10 and the frame 200. Therefore, in this embodiment, the connecting assembly 50 enables quick fixing or disassembly of the mounting bracket 10. The connecting rod 52 and the locking member 51 can be connected by a thread or a snap-fit ​​connection. The connection method between the connecting rod 52 and the locking member 51 is not limited here, as long as the connecting rod 52 and the locking member 51 can be used to install or remove the mounting bracket 10 on the frame 200.

[0039] In other embodiments, the mounting bracket 10 may also be fixedly connected to the frame 200. The connection method between the mounting bracket 10 and the frame 200 is not limited here.

[0040] The mounting bracket 10 has a mounting cavity 12, and the clamping assembly 20 is movably disposed in the mounting cavity 12. The clamping assembly 20 is used to clamp the sample.

[0041] Continue to combine Figure 1 and Figure 2As shown, the clamping assembly 20 includes a first limiting plate 21 and a second limiting plate 22. The first limiting plate 21 is vertically positioned and its horizontal position is adjustable, while the second limiting plate 22 is horizontally positioned and its vertical position is adjustable. The first limiting plate 21 and the second limiting plate 22 enclose a receiving cavity 23, which is used to receive the sample. It should be noted that the horizontal and vertical positioning refers to the spatial state during the use of the clamping fixture 100. The vertical positioning of the first limiting plate 21 can be understood as the first limiting plate 21 being approximately parallel to the vertical direction, and the horizontal positioning of the second limiting plate 22 can be understood as the second limiting plate 22 being approximately parallel to the horizontal direction. Since the horizontal position of the first limiting plate 21 is adjustable, and the vertical position of the second limiting plate 22 is adjustable, after the sample is placed into the receiving cavity 23, the first limiting plate 21 and the second limiting plate 22 can respectively fix the position of the sample in the horizontal and vertical directions, thus facilitating stability during subsequent grinding and polishing of the sample.

[0042] In this embodiment, since the first limiting plate 21 is vertically positioned, when the sample is positioned horizontally using the first limiting plate 21, it can keep the grinding surface of the sample (i.e., the surface of the sample to be ground) approximately parallel to the vertical plane. Thus, when the grinding mechanism grinds the sample horizontally, the parallelism between the grinding surface of the sample and the end face of the grinding head of the grinding mechanism (i.e., the surface of the grinding head used to grind the sample) is high, thereby ensuring that the sample has good flatness after grinding and polishing. For example, in some embodiments, the parallelism error between the grinding surface of the sample and the end face of the grinding head is less than or equal to 10 micrometers.

[0043] The adjustment component 30 is connected to the mounting bracket 10. The adjustment component 30 is used to adjust and fix the position of the first limiting plate 21 in the horizontal direction relative to the mounting bracket 10.

[0044] Combination Figure 3 As shown, the adjustment assembly 30 includes a moving rod 31, an adjusting rod 32, and a limiting mechanism 33. The moving rod 31 and the adjusting rod 32 are fixedly connected, and the moving rod 31 is movably connected to the mounting frame 10. The moving rod 31 is used to adjust the position of the first limiting plate 21 in the horizontal direction relative to the mounting frame 10 when it moves relative to the mounting frame 10. It should be noted that since the moving rod 31 and the adjusting rod 32 are fixedly connected, adjusting the position of the moving rod 31 will change the position of the adjusting rod 32, which in turn will adjust the position of the first limiting plate 21 in the horizontal direction relative to the mounting frame 10, thereby controlling the amount of sample grinding.

[0045] The limiting mechanism 33 is used to lock or release the moving rod 31. When the limiting mechanism 33 locks the moving rod 31, the position of the moving rod 31 relative to the mounting bracket 10 is locked and cannot move, thereby fixing the position of the first limiting plate 21 in the horizontal direction relative to the mounting bracket 10. When the limiting mechanism 33 releases the moving rod 31, the position of the moving rod 31 relative to the mounting bracket 10 is no longer constrained by the limiting mechanism 33. At this time, the position of the moving rod 31 relative to the mounting bracket 10 can be adjusted to adaptively adjust the position of the first limiting plate 21 in the horizontal direction relative to the mounting bracket 10, thereby achieving the purpose of adjusting the sample grinding amount.

[0046] In some embodiments, the movable rod 31 has a cavity, and a mounting port 311 is provided at the end of the movable rod 31 corresponding to the cavity. The limiting mechanism 33 can be assembled into the cavity through the mounting port 311. In this way, the limiting mechanism 33 is set in the space of the cavity of the movable rod 31, so that the overall structure of the adjustment assembly 30 is compact and occupies less space.

[0047] The limiting mechanism 33 adopts a push-push structure, in which the state of the limiting mechanism 33 is adjusted by pressing to lock or release the moving rod 31. This structural design allows the limiting mechanism 33 to conveniently lock or release the position of the moving rod 31 relative to the mounting bracket 10, thereby improving the efficiency of sample grinding amount adjustment.

[0048] For example, in some implementations, combined Figure 3 As shown, the limiting mechanism 33 includes a button 331, a locking element 332, an elastic element 333, a first slider 334, and a second slider 335. The locking element 332, the elastic element 333, the first slider 334, and the second slider 335 are all installed inside the cavity.

[0049] The inner wall of the mounting port 311 is provided with two sets of slots 312 of different depths arranged alternately. The button 331 is slidably connected to the slots 312, and also slidably connected to one end of the locking member 332. The other end of the locking member 332 contacts one end of the elastic member 333, and the other end of the elastic member 333 contacts the first slider 334. Thus, pressing the button 331 causes it to compress the elastic member 333 via the locking member 332, thereby generating a pushing force on the first slider 334.

[0050] When the locking member 332 is pressed by button 331, it can move along the axis of the moving rod 31 and rotate around the axis, thus changing the position of the locking member 332 in the slot 312. Since the slots 312 are arranged in alternating patterns with different depths, the axial position of the locking member 332 corresponding to the moving rod 31 is different depending on the position of the locking member 332 in the slot 312, which in turn results in different compressive forces on the elastic member 333.

[0051] For ease of understanding, the axial positions of the moving rod 31 corresponding to different positions of the locking member 332 in the slot 312 are referred to as the first position and the second position, respectively. In the first position, the distance between the locking member 332 and the first slider 334 is the first distance, and in the second position, the distance between the locking member 332 and the first slider 334 is the second distance. The second distance is less than the first distance. Thus, when the locking member 332 switches from the first position to the second position, the squeezing force of the locking member 332 on the elastic member 333 increases, thereby causing the first slider 334 to move towards the second slider 335 under the drive of the elastic member 333.

[0052] Combination Figures 2 to 4 As shown, the first slider 334 has a first inclined surface 3341, and the second slider 335 has a second inclined surface 3351. The first inclined surface 3341 and the second inclined surface 3351 are in sliding contact. Thus, when the first slider 334 moves toward the second slider 335 under the drive of the elastic member 333, the second slider 335 can move radially along the moving rod 31 through the interaction of the first inclined surface 3341 and the second inclined surface 3351.

[0053] The inner wall of the opening through which the adjusting rod 32 passes in the mounting bracket 10 is provided with a limiting groove (not shown in the figure), the second slider 335 is provided with a locking tooth 3352 corresponding to the limiting groove, and the moving rod 31 is provided with a groove 313 corresponding to the locking tooth 3352.

[0054] In the above embodiment, pressing button 331 causes the locking member 332 to slide and rotate, thereby changing the position of the locking member 332 in the slot 312. For example, when the locking member 332 moves to the second position, it pushes the elastic member 333 to press the first slider 334. The second slider 335 is pressed by the first slider 334 and moves radially along the moving rod 31. Then, the locking teeth 3352 on the second slider 335 extend from the groove 313 and engage with the limiting groove. In this way, the engagement of the locking teeth 3352 with the limiting groove restricts the movement of the moving rod 31 relative to the mounting bracket 10, thereby fixing the position of the moving rod 31 relative to the mounting bracket 10.

[0055] In some embodiments, the limiting mechanism 33 includes two buttons 331, two locking members 332, two elastic members 333, and two first sliders 334, which are correspondingly located at both ends of the second slider 335. Thus, both buttons 331 can be pressed simultaneously, causing both locking members 332 to be in the first position or both in the second position. In this embodiment, since both ends of the second slider 335 are equipped with buttons 331, locking members 332, elastic members 333, and first sliders 334, when the position of the second slider 335 in the radial direction of the moving rod 31 is adjusted by pressing the buttons 331 at both ends, the forces on both ends of the second slider 335 are balanced, thereby improving the stability of the second slider 335.

[0056] In some embodiments, the adjustment assembly 30 includes a sliding bar 34 connected to the adjustment rod 32 and slidably connected to the mounting bracket 10, thereby enabling the adjustment rod 32 to slide relative to the mounting bracket 10 to improve the motion stability of the adjustment rod 32 relative to the mounting bracket 10.

[0057] In some embodiments, the mounting bracket 10 is also provided with a movable guide rail, which is arranged in a horizontal direction. The movable rod 31 slides with the movable guide rail, so that the movable rod 31 can move stably on the horizontal plane, which is conducive to accurately controlling the movement displacement of the adjusting rod 32 and improving the control accuracy of sample grinding and polishing.

[0058] In some embodiments, the mounting bracket 10 is provided with a slide groove 13, along which the adjusting rod 32 can slide. In this embodiment, the slide groove 13 provides guidance for the movement of the adjusting rod 32, thereby improving the movement stability of the adjusting rod 32, which facilitates precise control of the movement displacement of the adjusting rod 32 and improves the control accuracy of sample grinding and polishing.

[0059] In some embodiments, the fine adjustment range of the adjustment component 30 is 0 mm to 10 mm. The adjustment component 30 can ensure that the error in the sample grinding amount is less than or equal to 10 micrometers.

[0060] It should be noted that the number of first limiting plates 21 can be one, two, or more. Each first limiting plate 21 is connected to an adjustment component 30, so that the position of the corresponding first limiting plate 21 in the horizontal direction relative to the mounting frame 10 can be adjusted independently by the adjustment component 30, thereby realizing independent adjustment of the grinding amount of the sample under the horizontal limitation of the first limiting plate 21.

[0061] Furthermore, there are at least two first limiting plates 21 and at least two adjusting components 30. Each adjusting component 30 corresponds to one of the first limiting plates 21, allowing each adjusting component 30 to independently adjust the horizontal position of its corresponding first limiting plate 21, thus enabling independent adjustment of the grinding amount for multiple samples. This satisfies the need for grinding multiple samples at different grinding amounts.

[0062] The adjustment rod 32 has scale lines on its side, so that the position of the adjustment rod 32 can be accurately adjusted by observing the scale lines, so as to precisely control the grinding amount of the sample.

[0063] See again Figure 1 and Figure 2 As shown, the fixing component 40 is connected to the mounting bracket 10, and the fixing component 40 is used to fix the position of the second limiting plate 22 in the vertical direction relative to the mounting bracket 10.

[0064] The fixing assembly 40 includes a fastening knob 41 and a threaded rod 42. The fastening knob 41 is fixedly connected to the threaded rod 42, and the threaded rod 42 is threadedly engaged with the second limiting plate 22. The fastening knob 41 can drive the threaded rod 42 to rotate, thereby adjusting and fixing the position of the second limiting plate 22 in the vertical direction, so as to fix the vertical position of the sample.

[0065] In some embodiments, the clamping assembly 20 is provided with a multi-layer clamping structure, each clamping structure including a receiving cavity 23. This multi-layer clamping structure can increase the sample clamping capacity. For example, the clamping assembly 20 can accommodate 2 to 8 samples, allowing for simultaneous grinding of these samples and further improving grinding efficiency.

[0066] There are multiple second limiting plates 22, which are arranged at intervals along the vertical direction. A first limiting plate 21 is placed between adjacent second limiting plates 22, thus forming a multi-layer clamping structure. The number of first limiting plates 21 and second limiting plates 22 is not limited here. For example, the number of second limiting plates 22 can be 2, 3, 4, or 5.

[0067] Combined again Figure 1 and Figure 2 As shown, the clamping fixture 100 also includes an alignment mechanism 60, which is mounted on the mounting frame 10 and is used to fix the sample placed in the receiving cavity 23, so that the sample is not easy to loosen in the receiving cavity 23, thereby improving the stability of subsequent grinding and polishing operations.

[0068] The alignment mechanism 60 includes an alignment member 61 and a spring 62. The alignment member 61 is movably connected to the mounting bracket 10, and one end of the alignment member 61 extends into the receiving cavity 23. The spring 62 is in contact with the alignment member 61 and is used to drive the alignment member 61 to abut against the sample in the receiving cavity 23, thereby achieving preliminary fixation of the sample.

[0069] In some embodiments, one end of the spring 62 is fixedly connected to the alignment member 61, and the other end is connected to the mounting bracket 10 to improve the stability of the alignment member 61 and make the positioning member less likely to detach from the mounting bracket 10.

[0070] The mounting bracket 10 has a mounting groove (not shown in the figure) for mounting the spring 62. The spring 62 is installed in the mounting groove, and part of the structure of the alignment member 61 is located in the mounting groove, thereby further improving the installation stability of the spring 62 and the alignment member 61 by utilizing the mounting groove.

[0071] It should be noted that the height of the sample needs to be higher than or equal to the height of the alignment mechanism 60 so that the alignment mechanism 60 can smoothly hold and position the sample. If the height of the sample does not meet the requirements, a certain number of second limiting plates 22 can be added to quickly fix the initial position of the sample and improve the efficiency of loading the sample.

[0072] Combination Figure 1 , Figure 2 and Figure 5 As shown, in some embodiments, the grinding and polishing apparatus further includes an attitude detection element 300, which is disposed on the mounting frame 10 or the frame 200 and is used to detect the attitude of the sample during the grinding and polishing process. Multiple attitude detection elements 300 can be used to detect samples in different receiving cavities 23 respectively.

[0073] The attitude detection component 300 includes a laser emitter 301 and a laser receiver 302. The laser emitter 301 and the laser receiver 302 are respectively disposed on both sides of the clamping fixture 100 in the horizontal direction. The laser emitter 301 and the laser receiver 302 are used to detect the attitude of the sample during grinding and polishing.

[0074] In some embodiments, the attitude detection device 300 also includes a bracket 303, through which a laser emitter 301 is mounted on one side of the frame 200 and a laser receiver 302 is mounted on the other side of the frame 200 via another bracket 303.

[0075] The attitude detection device 300 also includes an indicator 304, which is disposed on one of the supports 303 or on the frame 200.

[0076] The indicator 304 is electrically connected to the laser receiver 302. The indicator 304 is used to indicate the posture of the sample during the grinding and polishing process based on the received signal from the laser receiver 302. For example, when the laser receiver 302 receives the laser emitted by the laser emitter 301, it indicates that the sample is not blocking the laser emitted by the laser emitter 301 from entering the laser receiver 302. At this time, the indicator 304 can issue a prompt to indicate the current posture of the sample.

[0077] In the above embodiment, the laser beam 400 accurately detects the sample's posture during the grinding and polishing process, and an indicator 304 issues an indication when the sample's posture changes. This design can detect the sample's posture in real time during the grinding and polishing process, which helps to make timely adjustments, reduce the parallelism error between the sample's grinding surface and the grinding mechanism, and improve the smoothness of the sample's grinding and polishing.

[0078] In some embodiments, the laser beam 400 emitted by the laser emitter 301 is either in a line or a cross shape. The type of laser beam 400 is not limited here.

[0079] In some embodiments, the grinding and polishing apparatus includes a motor (not shown) for driving the frame 200 so that the frame 200, with the clamping fixture 100, moves horizontally as a whole, thereby enabling the grinding mechanism to grind and polish the sample.

[0080] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0081] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the inventive concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A clamping fixture, characterized in that, include: Mounting bracket, wherein the mounting bracket is provided with a mounting cavity; A clamping assembly is movably disposed in the mounting cavity. The clamping assembly includes a first limiting plate and a second limiting plate. The first limiting plate is vertically disposed and its position in the horizontal direction is adjustable. The second limiting plate is horizontally disposed and its position in the vertical direction is adjustable. The first limiting plate and the second limiting plate together form a receiving cavity for receiving a sample. An adjustment component is connected to the mounting bracket, and the adjustment component is used to adjust and fix the position of the first limiting plate relative to the mounting bracket in the horizontal direction; A fixing component is provided, connected to the mounting frame, for fixing the position of the second limiting plate in the vertical direction relative to the mounting frame. An adjusting component includes a moving rod, an adjusting rod, and a limiting mechanism. The moving rod and the adjusting rod are fixedly connected, and the moving rod is movably connected to the mounting frame. The moving rod is used to adjust the position of the first limiting plate in the horizontal direction relative to the mounting frame via the adjusting rod when moving relative to the mounting frame. The limiting mechanism is used to lock or release the moving rod. The moving rod has a cavity, and a mounting port is provided at the end of the moving rod corresponding to the cavity. The limiting mechanism can be assembled into the cavity through the mounting port. The limiting mechanism includes a button, a locking component, an elastic component, a first slider, and a second slider. The locking component, the elastic component, the first slider, and the second slider are all installed within the cavity. The inner wall of the mounting opening has two sets of alternating grooves of different depths. The button is slidably connected to the grooves and to one end of the locking component. The other end of the locking component contacts one end of the elastic component, and the other end of the elastic component contacts the first slider. When the button is pressed, the locking component moves along the axial direction of the moving rod and rotates around the axial direction, allowing the locking component to switch between a first position and a second position. In the first position, the distance between the locking member and the first slider is a first distance; in the second position, the distance between the locking member and the first slider is a second distance, wherein the second distance is less than the first distance. The first slider has a first inclined surface, and the second slider has a second inclined surface. The first inclined surface and the second inclined surface are in sliding contact. The mounting bracket is provided with a limiting groove, and the second slider is provided with a locking tooth corresponding to the limiting groove. The moving rod is provided with a groove corresponding to the locking tooth. When the locking member moves to the second position, the locking tooth extends out from the groove and engages with the limiting groove to restrict the movement of the moving rod relative to the mounting bracket.

2. The clamping fixture according to claim 1, characterized in that, The number of the button, the locking component, the elastic component, and the first slider are all two, and they are correspondingly arranged at both ends of the second slider.

3. The clamping fixture according to claim 1, characterized in that, The adjusting rod is connected to a sliding bar, and the sliding bar is slidably connected to the mounting bracket.

4. The clamping fixture according to claim 1, characterized in that, The mounting bracket is provided with a sliding groove, and the adjusting rod can slide along the sliding groove.

5. The clamping fixture according to claim 1, characterized in that, The adjusting rod is connected to a sliding bar, which is slidably connected to the mounting bracket. The mounting bracket is provided with a sliding groove, and the adjusting rod can slide along the sliding groove.

6. The clamping fixture according to claim 1, characterized in that, The mounting bracket is provided with a movable guide rail, which is arranged in a horizontal direction, and the movable rod is slidably engaged with the movable guide rail.

7. The clamping fixture according to claim 1, characterized in that, The clamping fixture also includes an alignment mechanism, which is disposed on the mounting frame and used to fix the sample placed in the receiving cavity.

8. The clamping fixture according to any one of claims 1-7, characterized in that, There are multiple second limiting plates, which are arranged at intervals along the vertical direction. A first limiting plate is set between adjacent second limiting plates, and each first limiting plate is connected to the adjustment component.

9. A grinding and polishing apparatus, characterized in that, The device includes a frame, a grinding mechanism, and a clamping fixture as described in any one of claims 1-8. The clamping fixture is connected to the frame, and the grinding mechanism is disposed opposite to the clamping fixture and is capable of relative movement in the horizontal direction. The grinding mechanism is used to grind and polish the sample clamped by the clamping fixture. The grinding and polishing device also includes an attitude detection element disposed on the mounting frame or the frame and used to detect the attitude of the sample housed in the receiving cavity.

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