High-efficiency tubular target electrochemical purification integrated molding device

Abstract

The present invention discloses an efficient one-piece molding device for electrochemical purification of tubular targets, comprising an electrolytic cell, an upper cover, a cathode assembly, an anode assembly, a pulse power supply and a circulating filter assembly; the bottom of the electrolytic cell is provided with a liquid inlet and a liquid outlet, and the top is detachably connected to the upper cover; the cathode assembly comprises an insulating sealing sleeve fixed to the upper cover, the interior of the insulating sealing sleeve is provided with a groove, a cathode carrier tube is coaxially arranged inside the groove, a sealing structure is axially arranged on the outer wall of the top end of the cathode carrier tube, the top end of the cathode carrier tube is fitted with a conductive mechanism, and the radial direction of the cathode carrier tube is provided with a locking mechanism with dynamically adjustable clamping force; through the integrated molding design, multi-layer sealing and stable conductive structure, dynamic electrolyte maintenance system and modular components, efficient and low-cost target material purification production is achieved, while improving the sealing performance, conductive stability and maintenance convenience of the equipment.

Description

Technical Field

[0001] The present invention relates to the intersection of metal material purification and precision molding technology, and specifically to a high-efficiency tubular target material electrochemical purification integrated molding device. Background Art

[0002] Tubular targets (such as high-purity copper, silver, nickel alloy, etc.) are the core materials of semiconductor coating processes. Their purity and structural uniformity directly affect the performance of the thin film.

[0003] At present, the electrochemical purification technology of tubular targets mainly faces three bottlenecks: First, the process flow is complex and costly. The traditional multi-step processing (such as purification, smelting, machining, etc.) leads to large equipment investment and long production cycle, making it difficult to achieve efficient integrated molding, which restricts large-scale production; second, the static sealing structure of the cathode carrier tube is prone to electrolyte leakage due to thermal deformation or vibration. At the same time, the planar contact conductive design has the problem of unstable contact resistance, which affects the uniformity of current distribution and purification quality; third, the dynamic maintenance of the electrolyte is insufficient, and the lack of a closed-loop control system leads to impurity accumulation and composition fluctuations. Traditional intermittent filtration is not synchronized with the electrolysis process and cannot effectively suppress the deposition of electrode polarization by-products, resulting in poor process consistency.

[0004] Therefore, a high-efficiency tubular target electrochemical purification integrated molding device is proposed to solve the above-mentioned problems. Summary of the Invention

[0005] The purpose of the present invention is to provide an efficient one-piece molding device for electrochemical purification of tubular targets, so as to solve the three major bottlenecks raised in the above background technology, namely, the complex process flow and high cost, poor stability of cathode sealing and conductive structure, and insufficient dynamic control of electrolyte, which restrict the problem of large-scale production and consistency of purification quality.

[0006] To achieve the above objectives, the present invention provides the following technical solutions: a high-efficiency tubular target electrochemical purification integrated molding device, comprising an electrolytic cell, an upper cover, a cathode assembly, an anode assembly, a pulse power supply, and a circulating filter assembly; the electrolytic cell is provided with a liquid inlet and a liquid outlet at the bottom, and the top is detachably connected to the upper cover;

[0007] The cathode assembly includes an insulating sealing sleeve fixed to the upper cover plate, a groove is formed inside the insulating sealing sleeve, a cathode carrier tube is coaxially arranged inside the groove, a sealing structure is axially arranged on the outer wall of the top end of the cathode carrier tube, a conductive mechanism is fitted and connected to the top end of the cathode carrier tube, and a locking mechanism with dynamically adjustable clamping force is radially arranged on the cathode carrier tube;

[0008] The conductive mechanism includes a sealing cover fixed to the top of the insulating sealing sleeve, a cathode conductive column fixedly connected to the inner wall of the top of the sealing cover, a first conductive contact cone fixedly connected to the sealing cover is attached to one side of the cathode conductive column, a second conductive contact cone is attached to one side of the first conductive contact cone, and one end of the second conductive contact cone is fixedly connected to the cathode carrier tube;

[0009] The anode assembly includes an insulating ceramic support fixed to the inner wall of the upper cover plate, a clamping groove is provided inside the insulating ceramic support, a clamping block is sleeved at the center position of the clamping groove, and an elastic locking module is provided in the axial direction of the clamping block;

[0010] The anode output end of the pulse power supply is connected to the conductive end of the anode assembly, and the cathode output end is connected to the conductive end of the cathode assembly;

[0011] The circulating filtration assembly includes a magnetically driven filtration pump fixedly connected to the electrolytic cell, and a multi-stage filtration unit and a conductivity control unit connected in series in the pipeline.

[0012] Preferably, the sealing structure includes multiple layers of axially arranged sealing rings, each of which is embedded in an annular groove opened on the outer wall of the cathode carrier tube, and the outer peripheral surface of each sealing ring maintains an interference fit with the inner wall surface of the insulating sealing sleeve. The sealing rings are provided with at least three layers and are arranged equidistantly along the axial direction of the cathode carrier tube, and the sealing rings are made of fluororubber.

[0013] Preferably, the locking mechanism includes a first clamping ring provided on one side of the top end of the cathode carrier tube, and the cathode carrier tube is fitted with a second clamping ring on the opposite side of the first clamping ring. One end of the second clamping ring is rotatably connected to a bolt column, and the outer side of the bolt column is threadedly engaged with the side wall of the insulating sealing sleeve.

[0014] Preferably, the elastic locking module includes a slider symmetrically slidably arranged in the insulating ceramic support, the center position of the slider is fixedly connected to a gear rod, the outer side of the gear rod is sleeved with a spring, the two ends of the spring respectively contact the slider and the inner wall of the insulating ceramic support, one end of the gear rod passes through the side wall of the insulating ceramic support and slides with it, and the other end is snap-connected and sleeved on the clamping block, and the bottom end of the clamping block is fixedly connected to a metal conductive rod.

[0015] Preferably, the multi-stage filtration unit includes a filter tank and a three-stage filtration component arranged inside the filter tank. The three-stage filtration component includes a stainless steel sintered mesh, an activated carbon fiber felt and a PTFE membrane in sequence along the fluid flow direction. The top of the filter tank is snap-connected with a hatch, and the center position of the hatch is fixedly connected with an ultrasonic anti-scaling device.

[0016] Preferably, the conductivity control unit includes a conductivity control module, which has a built-in ion concentration sensor, one end of which is connected to the refill valve and the liquid inlet through a three-way connection, and the other end of the refill valve is connected to the electrolyte storage tank.

[0017] Preferably, the positive and negative electrode ends of the pulse power supply are detachably electrically connected to the metal conductive rod and the cathode conductive column respectively through quick-plug conductive connectors.

[0018] Preferably, the cone surface angles of the cathode conductive column, the first conductive contact cone and the second conductive contact cone match each other, and the cone surfaces of the three cooperate to form a line contact type conductive connection structure.

[0019] Preferably, the operating frequency of the ultrasonic anti-scaling device is 20-40 kHz, and the transducer of the ultrasonic anti-scaling device is extended into the filter tank and immersed below the liquid surface.

[0020] Compared with the prior art, the present invention has the following beneficial effects: the high-efficiency tubular target electrochemical purification integrated molding device achieves efficient and low-cost target purification production through integrated molding design, multi-layer sealing and stable conductive structure, dynamic electrolyte maintenance system and modular components, while improving the equipment's sealing performance, conductive stability and maintenance convenience. The specific contents are as follows:

[0021] 1. Integrated molding and process optimization

[0022] By integrating the electrolytic cell, cathode assembly, anode assembly and circulating filtration assembly into an all-in-one device, the purification and forming processes can be completed simultaneously, significantly reducing the equipment investment and production cycle of traditional multi-step processing; the use of pulse power supply and quick-plug conductive connectors further simplifies the operating process, reduces energy consumption, and provides an efficient and low-cost solution for large-scale production.

[0023] 2. Improved sealing and conductive stability

[0024] The cathode assembly adopts an axial sealing structure with multi-layer fluororubber sealing rings and a dynamically adjustable locking mechanism. Through the synergistic effect of interference fit and bolt columns, it effectively compensates for gap changes caused by thermal deformation or vibration, eliminating the risk of electrolyte leakage. At the same time, the conical surface matching line contact conductive connection structure reduces contact resistance fluctuations through the close fit of the cathode conductive column, the first conductive contact cone and the second conductive contact cone, ensuring uniform current distribution and improving the quality of target material purification.

[0025] 3. Dynamic maintenance and enhancement of electrolyte

[0026] The circulating filtration component forms a closed-loop system using a magnetically driven filter pump and multi-stage filtration units. A three-stage combination of stainless steel sintered mesh, activated carbon fiber felt, and PTFE membrane achieves efficient impurity retention. Combined with the 20-40kHz high-frequency oscillation of the ultrasonic anti-scaling device, the circulating filtration frequency and the pulse period of the pulse power supply are synergistically controlled: the filter pump operates in intermittent mode, with its operating period synchronized with the power-off phase of the pulse power supply. Completing the filtration operation during the power-off period, when the electrolysis reaction is paused, avoids the combined effects of fluid disturbances during the filtration process and the directional migration of ions during the electrolysis reaction. A dynamic equilibrium mechanism ensures the stability of ion migration, solving the problem of polarized byproduct deposition caused by the asynchrony between traditional intermittent filtration and the electrolysis process. The conductivity control module dynamically replenishes the electrolyte based on data from the ion concentration sensor to maintain stable electrolyte composition.

[0027] 4. Modularity and ease of maintenance

[0028] The anode assembly's elastic locking module and quick-plug conductive connector design enable rapid electrode replacement, and the cathode carrier tube's radial clamping mechanism supports adaptation to different tube diameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the three-dimensional structure of the overall state of the present invention;

[0030] Figure 2 For the present invention Figure 1 Middle front cross-sectional structural diagram;

[0031] Figure 3 Schematic diagram of the cross-sectional structure of the cathode assembly in the present invention;

[0032] Figure 4 Schematic diagram of the cross-sectional structure of the anode assembly in the present invention.

[0033] In the figure: 1, electrolytic cell; 101, liquid outlet; 102, liquid inlet; 2, upper cover; 3, cathode assembly; 301, insulating sealing sleeve; 302, sealing cover; 303, cathode conductive column; 304, first conductive contact cone; 305, groove; 306, first clamping ring; 307, cathode carrier tube; 308, second conductive contact cone; 309, sealing ring; 310, second clamping ring; 311, bolt column; 4, anode assembly; 401 , insulating ceramic support; 402, snap-in groove; 403, slider; 404, gear lever; 405, spring; 406, snap-in block; 407, metal conductive rod; 5, pulse power supply; 6, circulation filtration component; 601, magnetically driven filter pump; 602, filter tank; 603, hatch; 604, ultrasonic anti-scaling device; 605, conductivity control module; 606, stainless steel sintered mesh; 607, activated carbon fiber felt; 608, PTFE membrane. DETAILED DESCRIPTION

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0035] See also Figure 1-4 The present invention provides a technical solution: a high-efficiency tubular target electrochemical purification integrated molding device, comprising an electrolytic cell 1, an upper cover plate 2, a cathode assembly 3, an anode assembly 4, a pulse power supply 5, and a circulating filter assembly 6; the electrolytic cell 1 is provided with a liquid inlet 102 and a liquid outlet 101 at the bottom, and the top is detachably connected to the upper cover plate 2;

[0036] The liquid inlet 102 and liquid outlet 101 provided at the bottom of the electrolytic cell 1 form a directional circulation flow path, ensuring uniform distribution of the electrolyte and avoiding uneven deposition caused by localized concentration imbalances. The location of the liquid inlet 102 at the bottom can reduce bubble retention and improve electrolysis efficiency. The electrolytic cell 1 and the upper cover plate 2 are connected in a detachable manner (such as a flange or a quick-release buckle), which facilitates regular cleaning of sediment in the cell or replacement of electrode assemblies, reduces equipment maintenance difficulty, and extends service life.

[0037] The cathode assembly 3 includes an insulating sealing sleeve 301 fixed to the upper cover plate 2. A groove 305 is formed inside the insulating sealing sleeve 301. A cathode carrier tube 307 is coaxially arranged inside the groove 305. A sealing structure is axially arranged on the outer wall of the top end of the cathode carrier tube 307. A conductive mechanism is fitted and connected to the top end of the cathode carrier tube 307. A locking mechanism that can dynamically adjust the clamping force is provided radially on the cathode carrier tube 307.

[0038] The insulating sealing sleeve 301 is fixed to the upper cover plate 2 and is made of high-insulation material to effectively prevent current leakage and short-circuit risks. The groove 305 provided inside provides a precise positioning reference for the cathode carrier tube 307, ensuring that it remains coaxially aligned with the electrolytic cell 1 and improving the uniformity of the electric field distribution. The axial sealing structure provided on the outer wall of the top of the cathode carrier tube 307 adopts a multi-layer fluororubber sealing ring 309. Each sealing ring forms an interference fit with the inner wall of the insulating sealing sleeve 301, maintaining excellent sealing performance even under thermal deformation or vibration conditions, preventing electrolyte leakage. The conductive mechanism provided on the top is connected by a conical line contact (cathode The conductive column 303, the first conductive contact cone 304, and the second conductive contact cone 308 achieve stable current transmission with low contact resistance, ensuring the efficient conduction of the electrochemical reaction. The radially arranged dynamically adjustable locking mechanism (the first clamping ring 306, the second clamping ring 310, and the bolt column 311) can adjust the clamping force in real time according to process requirements, effectively compensating for dimensional changes of the cathode carrier tube 307 during the electrolysis process, preventing displacement or loosening, and ensuring the stability of the deposition process. Therefore, the modular assembly design allows for rapid disassembly and assembly of the cathode assembly 3, facilitating regular maintenance and replacement, significantly reducing equipment downtime and improving production efficiency.

[0039] The conductive mechanism includes a sealing cover 302 fixed to the top of the insulating sealing sleeve 301. A cathode conductive column 303 is fixedly connected to the inner wall of the top of the sealing cover 302. A first conductive contact cone 304, which is fixedly connected to the sealing cover 302, is bonded to one side of the cathode conductive column 303. A second conductive contact cone 308 is bonded to one side of the first conductive contact cone 304. One end of the second conductive contact cone 308 is fixedly connected to the cathode carrier tube 307. The cone angles of the cathode conductive column 303, the first conductive contact cone 304, and the second conductive contact cone 308 match each other, and the cone surfaces of the three cooperate to form a line contact conductive connection structure.

[0040] A three-stage conical contact design (cathode conductive post 303, first conductive contact cone 304, and second conductive contact cone 308) achieves line contact conduction through precisely machined matching conical surfaces, improving current transmission efficiency. The sealing cover 302 and insulating sealing sleeve 301 use a flange connection structure, which, combined with positioning pins, enables fast and accurate positioning. All conductive components (cathode conductive post 303, first conductive contact cone 304, and second conductive contact cone 308) are gold-plated, maintaining excellent conductivity and corrosion resistance even in strong acid and alkaline electrolyte environments.

[0041] The anode assembly 4 includes an insulating ceramic support 401 fixed to the inner wall of the upper cover plate 2. A clamping groove 402 is formed inside the insulating ceramic support 401. A clamping block 406 is sleeved at the center of the clamping groove 402. An elastic locking module is provided in the axial direction of the clamping block 406.

[0042] The insulating ceramic support 401 is fixed to the inner wall of the upper cover 2 and is made of ceramic material with high insulation performance, which effectively isolates the anode from other metal parts of the equipment to prevent current leakage; the internal clamping groove 402 provides a precise positioning reference for the clamping block 406, ensuring that the anode assembly and the electrolysis system maintain a stable relative position relationship; the clamping block 406 set at the center of the clamping groove 402 adopts a high-precision matching design and is stably fixed by an elastic locking module, which can not only ensure assembly accuracy, but also effectively buffer mechanical vibration during the electrolysis process and extend the service life of the equipment; the elastic locking module adopts a combination structure of a slider 403, a gear lever 404 and a spring 405, and realizes automatic locking through the spring pre-tightening force. The installation or removal of the anode assembly can be completed with simple operations, which greatly improves maintenance efficiency; therefore, the optimized combination of ceramics and corrosion-resistant metals is particularly suitable for strong acid and strong alkali electrolysis environments, which significantly improves the service life of key components;

[0043] The anode output end of the pulse power supply 5 is connected to the conductive end of the anode assembly 4, and the cathode output end is connected to the conductive end of the cathode assembly 3; the positive and negative electrode ends of the pulse power supply 5 are detachably electrically connected to the metal conductive rod 407 and the cathode conductive column 303 respectively through quick-plug conductive connectors;

[0044] The pulse power supply 5 has an external trigger interface, which can send a synchronization signal to the circulation filter component 6 to achieve precise matching of the pulse period and the filtering interval, and the synchronization error is controlled within ±0.1 second. The pulse power supply 5 utilizes a direct connection architecture between the anode output terminal and the conductive terminal of the anode assembly 4, and the cathode output terminal and the conductive terminal of the cathode assembly 3, forming a complete closed loop. This ensures efficient power transmission, reduces line losses, and improves overall energy efficiency. Quick-connect conductive connectors enable detachable connections between the positive and negative electrodes and the metal conductive rod 407 and cathode conductive column 303. The gold-plated contact surfaces ensure stable current transmission and facilitate quick assembly and disassembly for maintenance. The pulse power supply 5 integrates an intelligent control module that monitors and automatically adjusts the output waveform (square wave, sawtooth wave, etc.), frequency (50-1000Hz), and duty cycle (10%-90%) in real time to accommodate the purification process requirements of different target materials. Multiple protection circuits, including overcurrent, overvoltage, and short-circuit protection, are built in, along with the dual isolation design of the insulating ceramic support 401 and insulating sealing sleeve 301, ensuring safe operation of the equipment under high-voltage and high-current conditions. The standardized quick-connect interface design supports the parallel use of multiple power supplies, allowing flexible expansion of system power according to production needs, meeting the varying production capacity requirements from pilot testing to large-scale production.

[0045] The sealing structure includes multiple layers of axially arranged sealing rings 309. Each sealing ring 309 is embedded in an annular groove formed on the outer wall of the cathode carrier tube 307. The outer circumference of each sealing ring 309 maintains an interference fit with the inner wall of the insulating sealing sleeve 301. There are at least three layers of sealing rings 309, which are equidistantly arranged along the axial direction of the cathode carrier tube 307. The sealing rings 309 are made of fluororubber.

[0046] A design employing at least three layers of fluororubber seals 309 arranged equidistantly in the axial direction creates multiple independent sealing barriers. This maintains system tightness even if a single seal fails, significantly improving reliability. Fluororubber (FKM) seals are used for excellent chemical resistance and high-temperature stability. The multi-layer seals feature a stepped hardness design (upper layer 70 ShoreA, middle layer 80 ShoreA, lower layer 90 ShoreA). Over time, the softer upper seals wear first and automatically compensate for pressure, maintaining stable sealing performance. The multi-layer seal structure, combined with the dynamic adjustment function of the locking mechanism, effectively absorbs mechanical vibration during equipment operation, preventing seal failures caused by vibration.

[0047] The locking mechanism includes a first clamping ring 306 disposed on one side of the top end of the cathode carrier tube 307. A second clamping ring 310 is attached to the opposite side of the cathode carrier tube 307 relative to the first clamping ring 306. A bolt column 311 is rotatably connected to one end of the second clamping ring 310. The outer side of the bolt column 311 is threadedly engaged with the side wall of the insulating sealing sleeve 301.

[0048] The dual-ring clamping structure of the first clamping ring 306 and the second clamping ring 310, combined with the precision-threaded bolt column 311, ensures that the cathode carrier tube 307 can obtain optimal clamping force under different operating conditions. The bolt column 311 uses a fine-pitch thread and a nylon lock washer to maintain the locking state even under vibrating conditions, avoiding the problem of clamping force attenuation caused by mechanical vibration. Therefore, a single-bolt locking design is adopted, and the cathode carrier tube 307 can be installed or removed by simply rotating the bolt column 311. The first clamping ring 306 and the second clamping ring 310 are made of 316L stainless steel with a chrome-plated surface, maintaining excellent mechanical properties and dimensional stability even in highly corrosive electrolyte environments.

[0049] The elastic locking module includes a slider 403 that slides symmetrically within an insulating ceramic support 401. A lever 404 is fixedly connected to the center of the slider 403. A spring 405 is sleeved on the outer side of the lever 404. The two ends of the spring 405 contact the slider 403 and the inner wall of the insulating ceramic support 401 respectively. One end of the lever 404 penetrates the side wall of the insulating ceramic support 401 and slides therewith. The other end is engaged and sleeved on a clamping block 406. The bottom end of the clamping block 406 is fixedly connected to a metal conductive rod 407.

[0050] The combination of a symmetrical slider 403 and a preloaded spring 405 achieves automatic centering and locking through the spring preload, ensuring that the clamping block 406 and the insulating ceramic support 401 always maintain precise fit. The innovative "push-to-lock" design allows installation or removal of the clamping block 406 by simply applying axial force, and the quick-plug conductive connector allows for rapid replacement of electrode assemblies. The spring 405 is made of a special alloy material (nickel-based high-temperature alloy, such as Inconel 718) and has excellent fatigue resistance.

[0051] The circulating filtration assembly 6 includes a magnetically driven filtration pump 601 fixedly connected to the electrolytic cell 1, as well as a multi-stage filtration unit and a conductivity control unit connected in series in the pipeline. The multi-stage filtration unit includes a filter tank 602 and a three-stage filtration assembly disposed therein. The three-stage filtration assembly includes a stainless steel sintered mesh 606, an activated carbon fiber felt 607, and a PTFE membrane 608 in the direction of fluid flow. The top of the filter tank 602 is snap-connected to a hatch 603, and the center of the hatch 603 is fixedly connected to an ultrasonic anti-scaling device 604.

[0052] The operating sequence of the circulating filter assembly 6 is centrally controlled by a PLC control system and linked to the pulse cycle of the pulse power supply. This ensures that filtration is performed only during the power-off phase of the electrolytic reaction, preventing interference between filtration disturbances and the electrochemical reaction. A three-stage gradient filtration design is employed: a stainless steel sintered mesh 606 intercepts large impurities, an activated carbon fiber felt 607 adsorbs organic contaminants, and a PTFE membrane 608 provides fine filtration, enhancing electrolyte purity. An integrated ultrasonic anti-scaling device 604 (adjustable from 20-40kHz) destroys the crystal structure of scale deposits through cavitation, extending the filter element's service life and reducing maintenance frequency. The ultrasonic anti-scaling device 604 operates in an alternating mode: a low-frequency band of 20kHz (primarily acting on the filter surface) and a high-frequency band of 40kHz (acting deep within the filter membrane). A focused transducer concentrates energy on the filter assembly surface (acoustic field intensity gradient >50%), minimizing disturbance to the underlying electrolyte. Its operating sequence is synchronized with the circulating filter pump, starting only during the filtration phase, coinciding with the pulse power supply's power outage period. It employs a 5-second on / 15-second off intermittent strategy, allowing bubbles generated by cavitation to float and dissipate during the off period, thus preventing interference with ion migration during the electrolysis reaction. The magnetically driven filter pump 601 utilizes a fully sealed design, eliminating the leakage issues associated with traditional shaft seals. The filter tank 602 utilizes a snap-on hatch 603, coupled with a quick-open flange structure, allowing the complete filter assembly to be replaced within 5 minutes, improving maintenance efficiency.

[0053] The conductivity control unit includes a conductivity control module 605, which has a built-in ion concentration sensor. One end of the conductivity control module 605 is connected to the refill valve and the liquid inlet 102 through a three-way connection, and the other end of the refill valve is connected to the electrolyte storage tank.

[0054] The conductivity control module 605 uses a high-precision ion concentration sensor to monitor the changes in electrolyte conductivity in real time and automatically adjust the amount of refill to ensure process stability;

[0055] The operating frequency of the ultrasonic anti-scaling device 604 is 20-40kHz, and the transducer of the ultrasonic anti-scaling device 604 is extended and arranged in the filter tank 602 and immersed below the liquid surface;

[0056] The system uses 20-40kHz broadband ultrasonic waves (with automatic frequency sweeping) to destroy the crystal growth of scale deposits such as CaCO3 through the dual effects of cavitation and mechanical vibration, thereby extending the service life of the filter components. The transducer is installed in an immersed manner (50-100mm below the liquid surface) and, combined with a specially designed radiation surface shape, forms a uniform sound field in the filter tank 602, ensuring that there are no blind spots for scale prevention. An intermittent working strategy is adopted to reduce energy consumption while ensuring the anti-scaling effect.

[0057] Working principle: Before using the high-efficiency tubular target electrochemical purification integrated molding device, it is necessary to first check the overall condition of the device to ensure that it can work normally. Figure 1 - Figure 4 As shown, first, the pulse power supply 5 applies a periodic pulse current to the cathode assembly 3 and the anode assembly 4, causing the electrolyte in the electrolytic cell 1 to undergo an electrochemical reaction; under the action of the electric field, the metal ions on the metal conductive rod 407 migrate in a direction and are reduced and deposited on the surface of the cathode carrier tube 307, forming a high-purity tubular target material;

[0058] Among them, the cathode conductive column 303, the first conductive contact cone 304 and the second conductive contact cone 308 use a cone-line contact conductive structure to ensure low contact resistance and high current transmission stability, thereby improving deposition uniformity; the anode assembly 4 fixes the metal conductive rod 407 through an elastic locking module to ensure reliable electrical connection between the anode and the pulse power supply 5, while facilitating rapid replacement and maintenance; the cathode carrier tube 307 forms an interference fit with the insulating sealing sleeve 301 through a multi-layer fluororubber sealing ring 309, maintaining a stable seal under thermal deformation or vibration conditions to prevent electrolyte leakage; the clamping force of the second clamping ring 310 is adjusted by the bolt column 311 to dynamically compensate for the dimensional change of the cathode carrier tube 307 to ensure that it does not deviate or loosen during the electrolysis process; the intermittent power supply mode of the pulse power supply 5 can suppress concentration polarization and reduce dendrite formation, thereby improving the density and purity of the deposited layer;

[0059] Secondly, a magnetically driven filter pump 601 drives the electrolyte into the filter tank 602, where solid impurities (such as electrode byproducts and particulate matter) are removed through a multi-stage filtration unit. Stainless steel sintered mesh 606 intercepts large impurities, activated carbon fiber felt 607 absorbs organic pollutants, and PTFE membrane 608 achieves fine filtration. Ultrasonic anti-scaling device 604 uses high-frequency vibrations of 20-40kHz to disrupt the deposition of scaling substances in the electrolyte, preventing clogging of the filter media and extending the system maintenance cycle.

[0060] Finally, the conductivity control module 605 monitors the electrolyte ion concentration in real time. When the conductivity is lower than the set threshold, the refill valve is automatically opened to replenish fresh electrolyte from the electrolyte storage tank to maintain the stability of the system composition.

[0061] That is, this device realizes the integrated processing of "purification-deposition-forming" of tubular targets by integrating functional modules such as electrolysis, filtration, and conductivity control, avoiding the multi-step switching in traditional processes and significantly improving production efficiency and product consistency.

[0062] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A high-efficiency tubular target material electrochemical purification integrated molding device, comprising an electrolytic cell (1), an upper cover plate (2), a cathode assembly (3), an anode assembly (4), a pulse power supply (5) and a circulating filter assembly (6); characterized in that: The electrolytic cell (1) is provided with a liquid inlet (102) and a liquid outlet (101) at the bottom, and the top is detachably connected to the upper cover plate (2); The cathode assembly (3) comprises an insulating sealing sleeve (301) fixed to the upper cover plate (2), a groove (305) is provided inside the insulating sealing sleeve (301), a cathode carrier tube (307) is coaxially arranged inside the groove (305), a sealing structure is axially arranged on the outer wall of the top end of the cathode carrier tube (307), a conductive mechanism is fitted and connected to the top end of the cathode carrier tube (307), and a locking mechanism capable of dynamically adjusting the clamping force is radially arranged on the cathode carrier tube (307); The conductive mechanism comprises a sealing cover (302) fixed to the top of the insulating sealing sleeve (301); a cathode conductive column (303) is fixedly connected to the inner wall of the top of the sealing cover (302); a first conductive contact cone (304) fixedly connected to the sealing cover (302) is fitted on one side of the cathode conductive column (303); a second conductive contact cone (308) is fitted on one side of the first conductive contact cone (304); and one end of the second conductive contact cone (308) is fixedly connected to the cathode carrier tube (307); The anode assembly (4) comprises an insulating ceramic support (401) fixed to the inner wall of the upper cover plate (2), a clamping groove (402) is provided inside the insulating ceramic support (401), a clamping block (406) is sleeved at the center position inside the clamping groove (402), and an elastic locking module is provided in the axial direction of the clamping block (406); The anode output end of the pulse power supply (5) is connected to the conductive end of the anode assembly (4), and the cathode output end is connected to the conductive end of the cathode assembly (3); The circulating filtration assembly (6) comprises a magnetically driven filtration pump (601) fixedly connected to the electrolytic cell (1), and a multi-stage filtration unit and a conductivity control unit connected in series in the pipeline.

2. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The sealing structure comprises multiple layers of axially arranged sealing rings (309), each of which is embedded in an annular groove provided on the outer wall of the cathode carrier tube (307), and the outer peripheral surface of each sealing ring (309) maintains an interference fit with the inner wall surface of the insulating sealing sleeve (301). The sealing rings (309) are provided with at least three layers and are arranged equidistantly along the axial direction of the cathode carrier tube (307), and the sealing rings (309) are made of fluororubber.

3. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The locking mechanism comprises a first clamping ring (306) provided on one side of the top end of the cathode carrier tube (307); a second clamping ring (310) is fitted and connected to the opposite side of the cathode carrier tube (307) relative to the first clamping ring (306); one end of the second clamping ring (310) is rotatably connected to a bolt column (311); the outer side of the bolt column (311) is threadedly engaged with the side wall of the insulating sealing sleeve (301).

4. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The elastic locking module includes a slider (403) symmetrically slidably arranged in the insulating ceramic support (401), a shift rod (404) is fixedly connected to the center position of the slider (403), a spring (405) is sleeved on the outer side of the shift rod (404), and the two ends of the spring (405) are respectively in contact with the slider (403) and the inner wall of the insulating ceramic support (401), one end of the shift rod (404) passes through the side wall of the insulating ceramic support (401) and slides with it, and the other end is engaged and sleeved on the clamping block (406), and the bottom end of the clamping block (406) is fixedly connected to a metal conductive rod (407).

5. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The multi-stage filtration unit comprises a filtration tank (602) and a three-stage filtration assembly arranged therein, wherein the three-stage filtration assembly comprises a stainless steel sintered mesh (606), an activated carbon fiber felt (607) and a PTFE membrane (608) in sequence along the fluid flow direction, the top of the filtration tank (602) is snap-connected with a hatch (603), and the center of the hatch (603) is fixedly connected with an ultrasonic anti-scaling device (604).

6. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The conductivity control unit comprises a conductivity control module (605), wherein the conductivity control module (605) has a built-in ion concentration sensor, one end of which is connected to a refill valve and a liquid inlet (102) via a three-way connection, and the other end of the refill valve is connected to an electrolyte storage tank.

7. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 4, characterized in that: The positive and negative electrode ends of the pulse power supply (5) are detachably electrically connected to the metal conductive rod (407) and the cathode conductive column (303) respectively via quick-plug conductive connectors.

8. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 1, characterized in that: The cone surface angles of the cathode conductive column (303), the first conductive contact cone (304), and the second conductive contact cone (308) match each other, and the cone surfaces of the three cooperate to form a line contact type conductive connection structure.

9. The high-efficiency tubular target electrochemical purification integrated molding device according to claim 5, characterized in that: The operating frequency of the ultrasonic anti-scaling device (604) is 20-40 kHz, and the transducer of the ultrasonic anti-scaling device (604) is extended into the filter tank (602) and immersed below the liquid surface.

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